CN107035668B - A kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump - Google Patents
A kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump Download PDFInfo
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- CN107035668B CN107035668B CN201710342686.6A CN201710342686A CN107035668B CN 107035668 B CN107035668 B CN 107035668B CN 201710342686 A CN201710342686 A CN 201710342686A CN 107035668 B CN107035668 B CN 107035668B
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- pump
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- 230000008676 import Effects 0.000 claims abstract description 42
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- 208000028659 discharge Diseases 0.000 description 26
- 238000000034 method Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 7
- 238000005086 pumping Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
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- 229910001369 Brass Inorganic materials 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
Abstract
The present invention discloses a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump in microfluidic system field, lower pump chamber connects attached wall part left end, and attached wall part right end connects the first pump inlet cushion chamber through the first import DC tube respectively, the second pump inlet cushion chamber is connected through the second import DC tube and connects pump discharge cushion chamber through outlet DC tube;Attached wall part is made of cushion chamber, confluence Taper Pipe and stop block, and cushion chamber left end is connected to lower pump chamber, and right end is connected to confluence Taper Pipe small end, and confluence Taper Pipe big end is connected to the left end of the first, second import DC tube and outlet DC tube respectively;It is stop block in the middle of confluence Taper Pipe small end, the runner at the Taper Pipe small end that converges is separated into former and later two identical narrow flow roads by stop block;Stop block is connected with the triangular prism on right side by the semicircular pillar in left side and is formed, and the front and rear sides wall and semicircular pillar of triangular prism are tangent;Using stop block inducing fluid jet attached flow, the net flow for discharge of increasing export improves volumetric efficiency.
Description
Technical field
The present invention relates to microfluidic system field, specifically a kind of miniature pump configuration of Valveless piezoelectric is microfluidic system
Core component and dynamical element.
Background technique
The performance of micropump directly determines the performance of microfluidic system.Piezoelectric pump is one kind of reciprocal diaphragm type Micropump,
Conversion of the electric energy to mechanical energy is realized by the inverse piezoelectric effect using piezoelectric material, to achieve the purpose that trandfer fluid.
Compared to the micropump of other driving methods, piezoelectric pump has that structure is simple, small in size, fast response time, actuating power are big, without electricity
Magnetic disturbance, to the viscosity, ionic strength, insensitive acid-base property of pumped (conveying) medium the advantages that, be therefore widely used in chemical analysis,
The fields such as electronic device cooling, environment measuring, drug accurately convey, biochip.
Wall attachment effect is also known as Coanda effect, is the flow phenomenon of fluid, i.e., fluid (water flow or air-flow) is original by leaving
Flow direction, be changed to protrusion body surface flow tendency.Its principle is that jet stream with surrounding fluid exchanges momentum, into
And roll up and inhale fluid, but the Gu Bi of the confined space limits the flow field that volume is inhaled, and jet stream two sides is caused to generate pressure difference, causes jet stream
Deflection, final jet stream flows along wall surface.
Most of Valveless piezoelectric pumps are to connect two special construction flow tubes with pump chamber, utilize the bidirectional flow of special microflow channels
Difference is hindered to generate net flow.For such Valveless piezoelectric pump, the mobile performance of flow tube directly determines that Valveless piezoelectric is micro-
The commutating character of pump.But it is difficult to obtain very big differences in flow resistance by changing tube flowing structure parameter, this leads to most of such knot
The Valveless piezoelectric pump volumetric efficiency of structure is very low.In order to which the flow resistance for generating bigger is poor, higher volumetric efficiency is obtained, many occurs
New structural Micropump, for example, Chinese patent notification number be CN203248339U document in propose it is a kind of based on wall attachment effect
Three-cavity valveless piezoelectric pump devises three pump chambers, controls outflow and flow direction by controlling the amplitude of different pump chambers,
But three pump chambers make structure occupied space become larger, and increase processing cost, and use occasion also has limitation, are unfavorable for being miniaturized
With integrated, the characteristics of furthermore not reaching ideal control flow direction in practical application;China Patent Publication No. is
A kind of bluff body choked flow Valveless piezoelectric pump is proposed in the document of CN102913422A, devises many bluff bodys in pump chamber bottom,
Although space can be saved, this kind of Micropump can hardly bear back pressure, and practical application effect is undesirable.
Summary of the invention
The object of the present invention is to provide a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropumps, are lured using the stop block of special construction
It leads incoming flow and generates wall attachment effect, so that there is this Micropump big flow to go out to flow, volumetric efficiency is high.
To achieve the above object, a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump of the present invention the technical solution adopted is that:
With a pump housing, the pump housing is equipped with lower pump chamber, and lower pump chamber connects the left end of attached wall part, and the right end of attached wall part is respectively through the
One import DC tube connects the first pump inlet cushion chamber, connects the second pump inlet cushion chamber through the second import DC tube and through going out
Mouth DC tube connects pump discharge cushion chamber;The horizontal middle spindle weight of the left and right directions of lower pump chamber, attached wall part and outlet DC tube
It closes;The attached wall part is made of cushion chamber, confluence Taper Pipe and stop block, and cushion chamber left end is connected to lower pump chamber, right end and confluence
The connection of Taper Pipe small end, the big end for the Taper Pipe that converges respectively with the first import DC tube, the second import DC tube and outlet DC tube
Left end connection;It is stop block in the middle of confluence Taper Pipe small end, the runner at the Taper Pipe small end that converges is separated into forward and backward two by stop block
A identical narrow flow road;Stop block is connected with the triangular prism on right side by the semicircular pillar in left side and is formed, and the cross section of stop block is semicircle
The shape that shape and triangle connect, the left side side length of triangle are equal to semicircular diameter, the front and rear sides side of triangle and half
Circular front and rear sides side is connected.
The beneficial effects of the present invention are: the present invention not only has common Valveless piezoelectric pump configuration simple, easy processing, at low cost
The advantages of, and the stop block inducing fluid jet attached flow by utilizing special construction, the design of stop block increase discharge and sucking
The flow resistance of process is poor, substantially increase outlet discharge net flow, further improve volumetric efficiency so that the pump have compared with
Good bearing capacity.Compared to the Valveless piezoelectric pump of three chambers based on wall attachment effect, only one pump chamber of the invention is substantially reduced
Structure size, it is easier to process, not by electromagnetic interference, be conducive to micromation and integrated, greatly shorten the design cycle at
This;Compared to divergent-convergent duct type Valveless Piezoelectric Micropump, the present invention induces incoming flow along stop block surface flow using stop block, so that row
Jet stream generates whirlpool simultaneously in stop block two sides during out, and outlet direct current is flowed by two import DC tubes to roll up and inhale fluid
Pipe further increases the discharge rate of outlet DC tube, and volumetric efficiency may be up to 84.5% or more under high reynolds number high-frequency,
And can be used under high reynolds number (1000) high frequency (1000Hz), the entire discharge process time accounts for the 80% of the period.
Detailed description of the invention
Fig. 1 is a kind of front view structure cross-sectional view of stop block formula wall-attached jet Valveless Piezoelectric Micropump of the present invention;
Fig. 2 is the top view of pump cover in Fig. 1;
Fig. 3 be in Fig. 1 A-A to enlarged cross-sectional view and geometric dimension mark figure;
Fig. 4 is attached wall part schematic enlarged-scale view and geometric dimension mark figure in Fig. 3;
Fig. 5-6 is the working principle diagram of discharge process of the present invention;
Fig. 7-8 is the working principle diagram of suction process of the present invention;
In figure: 1. fill pumping hole;2. filling pump chamber;3. filling pump line;4. lower pump chamber;Pump chamber on 5.;6. cushion chamber;7. stop block;8.
Converge Taper Pipe;9. exporting DC tube;10. the first import DC tube;11. the second import DC tube;12. pump discharge cushion chamber;13.
Pump discharge;14. the first pump inlet cushion chamber;15. the first pump inlet;16. the second pump inlet cushion chamber;17. the second pump inlet;
18. vibrating diaphragm;19. piezoelectric vibrator;20. pump cover;21. the pump housing;The attached wall part of II,.
Specific embodiment
Referring to Fig.1 shown in -3, the present invention includes the pump housing 21, pump cover 20, piezoelectric vibrator 19 and vibrating diaphragm 18.The pump housing 21
Material is silicon, and for pump cover 20 in the surface of the pump housing 21, the material of pump cover 20 is that glass, the pump housing 21 and pump cover 20 pass through vacuum oxygen etc.
Gas ions bonding technology fits closely together.
Such as Fig. 2, is processed on pump cover 20 and fill pumping hole 1, upper pump chamber 5, the first pump inlet 15, the second pump inlet 17 and pump out
Mouthfuls 13, the structure upper-lower height processed on pump cover 20 is identical with the upper-lower height of pump cover 20.
Such as Fig. 3, is processed on the pump housing 21 and fill pump chamber 2, fill pump line 3, lower pump chamber 4, attached wall part II, the first import direct current
Pipe 10, the first pump inlet cushion chamber 14, the second import DC tube 11, the second pump inlet cushion chamber 16 and outlet DC tube 9, pump
Export cushion chamber 12.With the pump housing 21 with height, longitudinal section is rectangle, and closes the structure upper-lower height processed on the pump housing 21
It is symmetrical before and after the horizontal middle spindle M of the left and right directions where the pump housing 21.Structure on the pump housing 21 can be added by method of molding
Work forms, and the structure on pump cover 20 can be process using laser processing technology.
Vibrating diaphragm 18 is brass (or other elastic materials), and the surface of upper pump chamber 5 is fixed on by binder.Piezoelectricity
Oscillator 19 is driving element, and piezoelectric vibrator 19 is bonded in 18 upper surface of vibrating diaphragm by epoxy resin.Piezoelectric vibrator 19, vibration
Diaphragm 18, upper pump chamber 4 are conllinear with the vertical center line of lower pump chamber 5.
It fills pump chamber 2, fill pump line 3, lower pump chamber 4 and attached wall part II from left to right along the left and right horizontal central axis M of the pump housing 21
Front and back is symmetrical, is sequentially connected in series and is sequentially communicated.The right end of attached wall part II is respectively through the first pump of the first import DC tube 10 connection
Import cushion chamber 14 connects the second pump inlet cushion chamber 12 through the second import DC tube 11 and through the outlet connection pump of DC tube 9
Export cushion chamber 12.Export the horizontal center line of the left and right directions of DC tube 9 and pump discharge cushion chamber 12 and the left and right of the pump housing 21
Horizontal middle spindle M coincides.First pump inlet cushion chamber 14 and the second pump inlet cushion chamber 16 are about pump discharge cushion chamber 12
Symmetrical before and after left and right horizontal central axis M, the first import DC tube 10 and the second import DC tube 11 are about pump discharge cushion chamber 9
It is symmetrical before and after left and right horizontal central axis M.
Fill pump chamber 2 fill pumping hole 1 underface and with fill pumping hole 1 communicate, lower pump chamber 4 upper pump chamber 5 underface and with
Lower pump chamber 4 communicates, and upper pump chamber 5 is that round and internal diameter is equal with the level cross-sectionn of lower pump chamber 4, upper pump chamber 5 and lower 4 shape of pump chamber
At the pump chamber of Micropump.First pump inlet cushion chamber 14 the first pump inlet 15 underface and communicated with the first pump inlet 15,
Two pump inlet cushion chambers 16 the second pump inlet 17 underface and communicated with the second pump inlet 17, pump discharge cushion chamber 12 is pumping
It exports 13 underface and is communicated with pump discharge 13.
Referring to Fig. 3 and Fig. 4, attached wall part II is made of cushion chamber 6, confluence Taper Pipe 8 and stop block 7.The left end of confluence Taper Pipe 8
It is small end, right end is big end, and the left end of cushion chamber 6 is connected to lower pump chamber 4, and right end is connected to the small end of confluence Taper Pipe 8.Confluence cone
The big end of pipe 8 is connected to the left end of the first import DC tube 10, the second import DC tube 11 and outlet DC tube 9 respectively.First
The right end of import DC tube 10 is connected to the first import cushion chamber 14, and the right end of the second import DC tube 11 and the second import buffer
Chamber 16 is connected to.The right end for exporting DC tube 9 is connected to outlet cushion chamber 12.
It is stop block 7 in the middle of the small end of confluence Taper Pipe 8, the runner at 8 small end of Taper Pipe that converges is separated by stop block 7
Former and later two identical narrow flow roads.Stop block 7 about symmetrical before and after the left and right horizontal central axis M of the pump housing 21, stop block 7 it is high up and down
Degree is identical as the upper-lower height of the pump housing 21, and is fixed on the bottom surface of the pump housing 21.The semicircular pillar and right side of stop block 7 by left side
Triangular prism connects integrator composition, and the right end of stop block 7 is the tip of triangular prism.The cross section of stop block 7 is semicircle and triangle
The shape that shape connects, the left side side length of triangle are equal to semicircular diameter, the front and rear sides side of triangle and it is semicircular before
Two sides are connected afterwards, and the semicircle center of stop block 7 is the center of confluence 8 small end face of Taper Pipe.
Narrow flow road minimum widith at confluence 8 small end of Taper Pipe is d, and d is 100 μm -200 μm.The left and right length of confluence Taper Pipe 8
L1For 4 ~ 8 times of narrow flow road minimum widith d.The narrow flow road minimum widith d that the arc radius R of stop block 7 is 1 ~ 2 times, stop block 7
The angle α of the triangle right end of cross section is 60 °.8 liang of Taper Pipe of first import DC tube 10, the second import DC tube 11 and confluence
Angle theta between end face is 60 °.The front and back of first import DC tube 10, the second import DC tube 11 and outlet DC tube 9 is wide
It spends equal, is all b, b is equal to.First import DC tube 10, the second import DC tube 11 and outlet are straight
The left and right equal length of flow tube 9, is L2, it is desirable that L2: d 15:1.The radius R of lower pump chamber 4cThe ratio between with narrow flow road minimum widith d
Rc: d 25:1.
Referring to shown in Fig. 5-6, when the invention works, alternating voltage signal (sinusoidal or square is loaded at 19 both ends of piezoelectric vibrator
Shape wave signal) afterwards piezoelectric vibrator 19 can occur bending and deformation and with periodic vibration above and below electric voltage frequency, which drives and pumps
Fluid flowing in chamber 5 and lower pump chamber 4, the flow process can be divided into discharge process and suction process: discharge process such as Fig. 5-6 institute
Show: when piezoelectric vibrator 19 is vibrated downwards by external electrical field incentive action, pump chamber volume reduces, so that the pressure in pump chamber increases
Greatly and it is greater than outside pressure, so that fluid is drained into confluence Taper Pipe 8 out of pump chamber by cushion chamber 6.As shown in figure 5, due to resistance
The arc transition structure induced jet of block 7 is along 7 surface flow of stop block, so that the fluid of pump chamber discharge enters outlet DC tube 9
Ratio increase considerably, while confluence Taper Pipe 8 close to import DC tube place formed two pairs of whirlpools.In the discharge stage
In for the previous period, since vortices entrain intensity is weaker, inlet and outlet DC tube is discharged fluid (as shown in Figure 6) simultaneously, but with
Vortices entrain intensity increases, and fluid is from the first import DC tube 10, the second import DC tube 11 by volume inspiration inlet/outlet DC tube
9, as shown in fig. 6, the pump chamber discharge rate of discharge process is.Suction process is as Figure 7-8, and piezoelectric vibrator 19 is by the external world
When electric field excitation is acted on and vibrated upwards, pump chamber volume increases, and the pressure in pump chamber reduces and is less than outside pressure, thus fluid
It is flowed into lower pump chamber 4 simultaneously by the first pump inlet 15 and the second pump inlet 17.Due to discharge the stage whirlpool still have with
And the fluid entered from import has certain inhibition to the fluid that outlet enters, and exports the existing discharge of fluid in DC tube 9
There is sucking again.In sucting stage, interior pump discharge 13 shows as discharge fluid for the previous period, as shown in fig. 7, and with whirlpool
Weaken disappearance and the increase of pump chamber suction velocity, pump discharge 13 shows as sucking fluid, as shown in figure 8, the pump of suction process
Chamber soakage is.If the instantaneous flow of pump discharge 13 is, then the net flow of the pump discharge 13 in a cycle be, pump chamber volume change is, therefore the volumetric efficiency of the stop block formula wall-attached jet Valveless Piezoelectric Micropump
For, volumetric efficiencyUp to 84.5%.
Claims (6)
1. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump, has a pump housing (21), the pump housing (21) is equipped with lower pump chamber
(4), it is characterized in that: lower pump chamber (4) connects the left end of attached wall part II, the right end of attached wall part (II) is straight through the first import respectively
Flow tube (10) connects the first pump inlet cushion chamber (14), connects the second pump inlet cushion chamber (16) through the second import DC tube (11)
And through outlet DC tube (9) connection pump discharge cushion chamber (12);Lower pump chamber (4), attached wall part (II) and outlet DC tube (9)
Left and right directions horizontal centre overlapping of axles;The attached wall part (II) is by cushion chamber (6), confluence Taper Pipe (8) and stop block (7) group
At cushion chamber (6) left end is connected to lower pump chamber (4), and right end is connected to confluence Taper Pipe (8) small end, the big end point of confluence Taper Pipe (8)
It is not connected to the left end of the first import DC tube (10), the second import DC tube (11) and outlet DC tube (9);In confluence Taper Pipe
(8) middle of small end is stop block (7), and it is identical that the runner at Taper Pipe (8) small end that converges is separated into former and later two by stop block (7)
Narrow flow road;Stop block (7), which is connected by the semicircular pillar in left side with the triangular prism on right side, to be formed, and the cross section of stop block (7) is semicircle
The shape that shape and triangle connect, the left side side length of triangle are equal to semicircular diameter, the front and rear sides side of triangle and half
Circular front and rear sides side is connected.
2. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump according to claim 1, it is characterized in that: confluence Taper Pipe (8)
Left and right length L1For 4 ~ 8 times of narrow flow road minimum widith d, the narrow flow road minimum widith that the arc radius R of stop block (7) is 1 ~ 2 times
D, the angle α of the triangle right end of the cross section of stop block (7) are 60 °.
3. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump according to claim 2, it is characterized in that: the first, second import
Angle theta between DC tube (10,11) and confluence Taper Pipe (8) both ends of the surface is 60 °, the first, second import DC tube (10,11)
Equal with outlet itself front and rear width b of DC tube (9), b is equal to。
4. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump according to claim 2, it is characterized in that: the first, second import
DC tube (10,11) and itself the left and right length L for exporting DC tube (9)2It is equal, it is desirable that L2: d 15:1.
5. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump according to claim 2, it is characterized in that: the half of lower pump chamber (4)
Diameter RcWith the ratio between narrow flow road minimum widith d Rc: d 25:1.
6. a kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump according to claim 1, it is characterized in that: the first pump inlet buffers
Chamber (14) and the second pump inlet cushion chamber (16) are about symmetrical, the first import before and after the horizontal middle spindle of the pump housing (21) left and right directions
DC tube (10) and the second import DC tube (11) are about symmetrical before and after the horizontal middle spindle of the pump housing (21) left and right directions.
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CN201710342686.6A CN107035668B (en) | 2017-05-16 | 2017-05-16 | A kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump |
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CN201710342686.6A CN107035668B (en) | 2017-05-16 | 2017-05-16 | A kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump |
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CN110195724A (en) * | 2019-07-05 | 2019-09-03 | 常州威图流体科技有限公司 | A kind of piezoelectric fan, radiator and electronic equipment |
CN112196777A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Water-drop-shaped choke valveless piezoelectric pump based on wall attachment effect |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
CN102913422A (en) * | 2012-10-18 | 2013-02-06 | 南京航空航天大学 | Drag-reducing valveless piezoelectric pump with drag-reducing fluids |
CN103016318A (en) * | 2012-12-13 | 2013-04-03 | 江苏大学 | Valveless piezoelectric pump based on wall attachment effect |
CN104696203A (en) * | 2015-03-20 | 2015-06-10 | 青岛农业大学 | Composite bluff body valve-less piezoelectric pump |
Family Cites Families (1)
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JP2005299597A (en) * | 2004-04-15 | 2005-10-27 | Tama Tlo Kk | Micro pump |
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2017
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
CN102913422A (en) * | 2012-10-18 | 2013-02-06 | 南京航空航天大学 | Drag-reducing valveless piezoelectric pump with drag-reducing fluids |
CN103016318A (en) * | 2012-12-13 | 2013-04-03 | 江苏大学 | Valveless piezoelectric pump based on wall attachment effect |
CN104696203A (en) * | 2015-03-20 | 2015-06-10 | 青岛农业大学 | Composite bluff body valve-less piezoelectric pump |
Non-Patent Citations (1)
Title |
---|
三棱柱阻流体无阀压电泵的设计与试验;张蕊华等;《光学精密工程》;20160229;全文 * |
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