CN103644105B - A kind of Archimedes spiral pipe Valveless piezoelectric pump - Google Patents
A kind of Archimedes spiral pipe Valveless piezoelectric pump Download PDFInfo
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- CN103644105B CN103644105B CN201310555395.7A CN201310555395A CN103644105B CN 103644105 B CN103644105 B CN 103644105B CN 201310555395 A CN201310555395 A CN 201310555395A CN 103644105 B CN103644105 B CN 103644105B
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Abstract
The present invention discloses a kind of Archimedes spiral pipe Valveless piezoelectric pump, comprise the pump housing and pump cover, the pump housing there is import buffer cavity, outlet buffer cavity, inlet flow tube, lower half portion of outlet flow pipe and pump chamber, inlet flow tube is identical with outlet flow tubular construction and coaxially arranged and equidistant with the pump chamber center of circle, inlet flow tube is communicated with composition by an Archimedean spiral flow pipe with the ram's horns be arranged symmetrically with relative to Archimedean spiral flow pipe center line with outlet flow pipe, Archimedean spiral flow pipe has the good nature of radius of curvature linear transitions, by uniform horizontal force when fluid flows wherein, flowing is stable, vibrate little, energy consumption is low, efficiency is high.
Description
Technical field
The present invention relates to Micro Fluid Transfer and control and micro mechanical technology field, specifically refer to a kind of Archimedes spiral pipe Valveless piezoelectric pump.
Background technique
Piezoelectric pump is the one of mechanical type Micropump, belongs to displacement pump, is widely used in the conveying of medicine trace, and the cooling of cell separation, electronic product, the injection of fuel trace, chemical microanalysis, Flows turn fields such as twisting control.Current piezoelectric pump is mainly divided into valve piezoelectric pump and Valveless piezoelectric pump two class, Valveless piezoelectric pump is without movable valve block, structure is simple, be more suitable for miniaturization and microminiaturization, the job requirement under high frequency can be met, overcome the shortcoming that valve piezoelectric pump cutout has noise, anti-fatigue behaviour is good, avoids some sensitive medias to be affected.Most of Valveless piezoelectric pump is connected with pump chamber by two special construction stream pipes, and differences in flow resistance when utilizing fluid to flow along special construction stream pipe different direction produces pumping effect, and common special construction stream pipe has conical pipe, and tesla manages, vortex tube, three-way pipe etc.
Tapered tube configuration is simple, be easy to design and processing, but its forward and reverse differences in flow resistance is less, causes the efficiency of Micropump very low; Tesla pipe is also referred to as steel tubing in different shapes, its main structure formed with straight channel collocation curved channel, fluid when reciprocal flowing due to the difference of flow channel length and the inertia effect of fluid, produce the net flow of Way out, but its forward and reverse differences in flow resistance is equally very little, the net flow that Micropump obtains within an operation cycle is limited; Vortex tube essence is the whirlpool region adding a series of triangle or circular arc at two dimensional surface conical pipe wall, these triangle vortex districts and conical flow pipe together constitute swirler passages, but the existence in vortex face increases the manufacture difficulty of runner, and forward and reverse flow resistance of this stream pipe is all very large, make Micropump energy consumption large, efficiency is low; Three-way pipe comprises " Y " type pipe and " V " type pipe etc., " Y " type Guan Youyi collecting fitting and two ram's horns composition " Y " fonts, its collecting fitting and ram's horns are uniform section rectangular tube, " V " type Guan Youyi uniform section rectangular tube is collecting fitting and two diffusion (contraction) ram's horns compositions, three-way pipe reduces forward flow resistance to a certain extent, improve reverse flow resistance, Micropump is made to obtain higher net flow along forward within an operation cycle, but the frictional loss when design of straight line type tube wall makes fluid flow is comparatively large, and energy consumption is higher.Publication number is that the Chinese invention patent application of CN102230465A discloses a kind of valveless piezoelectric pump with Achimedean spiral flow tube, the first Archimedean spiral flow pipe and the first connectivity slot is provided with between the lower cover of this Valveless piezoelectric pump and upper cover, described Archimedean spiral flow pipe one end is connected with the fluid inlet be arranged on the pump housing, and the other end is connected with pump chamber; One end of first connectivity slot is connected with pump chamber, and the other end is connected with fluid output; The first described Archimedean spiral flow pipe is centered by fluid inlet and the Archimedean spiral flow pipe of starting point counterclockwise setting.This kind of structural flow pipe uses overall Archimedes spiral to construct stream pipe, runner is long, all very large along the loss of positive and negative direction when fluid flows in bent flowtube, simultaneously owing to being subject to the effect of centrifugal force, cross section forms Secondary Flow, local resistance is increased, cause secondary flow loss, and direct-connected groove used is without flow resistance characteristic, thus the efficiency of Micropump is lower, structure is relatively complicated in addition, is unfavorable for integrated and microminiaturized.
Ancient Greek Mathematics man and mechanics scientist Archimedes have just done detailed discussion to the geometric properties of plane systematic helical in his treatise " opinion helical ", people are referred to as " Archimedes spiral ", and mathematicians had found again lituus, fermat spiral, logarithmic spiral, hyperbolic conchoid, cylindrical spiral, conical etc. afterwards.Helical flow pipe has superior structural characteristics and good hydrodynamics, is conducive to integrated arrangement, is widely used in the energy, warship, submarine, space station, ship power, petrochemical industry, space flight and aviation, is the field such as electrical cooling and cryogenic technique.
Summary of the invention
A kind of Archimedes spiral pipe Valveless piezoelectric pump that order ground of the present invention proposes in order to avoid the deficiency in above-mentioned technology exactly, it mainly for the problem existing for existing Valveless piezoelectric pump as movement disorder, the ill effect such as viscous resistance is large, boundary layer the is easily separated and yardstick invented is little, flowing is stable, energy consumption is low, efficiency is high, vibrate little novel Archimedes spiral pipe Valveless piezoelectric pump, expands the application area of spiral flow tube technology in microfluid machinery field simultaneously.
The present invention adopts technological scheme to be: comprise the pump housing and pump cover, pump cover there is pump inlet, upper half part of pump discharge and pump chamber, the pump housing there is import buffer cavity, outlet buffer cavity, inlet flow tube, lower half portion of outlet flow pipe and pump chamber, inlet flow tube is identical with outlet flow tubular construction and coaxially arranged and equidistant with the pump chamber center of circle, inlet flow tube one end is communicated with import buffer cavity, the other end is communicated with pump chamber, outlet flow pipe one end is communicated with pump chamber, the other end is communicated with outlet buffer cavity, import buffer cavity is communicated with pump inlet and pump discharge respectively with outlet buffer cavity, inlet flow tube is communicated with composition by an Archimedean spiral flow pipe with the ram's horns be arranged symmetrically with relative to Archimedean spiral flow pipe center line with outlet flow pipe, the small end of the Archimedean spiral flow pipe in inlet flow tube is connected with import buffer cavity, large end is connected with pump chamber, the small end of the Archimedean spiral flow pipe in outlet flow pipe is connected with pump chamber, large end is connected with outlet buffer cavity, second, third ram's horns is DC tube and both central axis and the centerline axis parallel of Archimedean spiral flow pipe that geometric structure diamete is identical and symmetrical, second ram's horns one end is communicated with the first ram's horns, the other end is communicated with pump chamber, 3rd ram's horns one end is communicated with the 4th ram's horns, the other end is communicated with pump chamber, the first, the 4th ram's horns is semicircular pipe that geometric structure diamete is identical and both are symmetrical relative to Archimedean spiral flow pipe center line and through with the large end of Archimedean spiral flow pipe respectively.
The profile line of the level cross-sectionn of Archimedean spiral flow pipe is by spiral of Archimedes equation
the cornerite φ determined is the spiral of Archimedes section of 45 °, constant
=0.1, polar angle
=0 ~ 2610 °; The length of Archimedean spiral flow pipe is 1200 μm ~ 3000 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 120 μm ~ 180 μm, and small end mouth of pipe fillet radius is 50 μm ~ 80 μm.
The invention has the beneficial effects as follows: helical flow Manifold technology and piezoelectric pump technology organically combine by the present invention, profile line is adopted to be the helical flow pipe of spiral of Archimedes and the tube flowing structure of ram's horns combination, compared with conventional diffusion/collapsible tube Valveless piezoelectric pump and three-way pipe Valveless piezoelectric pump, Archimedean spiral flow pipe has the good nature of radius of curvature linear transitions, by uniform horizontal force when fluid flows wherein, flowing is stable, vibrates little, energy consumption is low, and efficiency is high; When fluid is along inlet flow tube (outlet flow pipe) forward flow, ram's horns is to a certain degree serving pumping action, thus controls boundary layer separation, prevents flow separation, reduces loss, forward flow resistance is reduced, and the flow of logical flow tube increases; When fluid is along inlet flow tube (outlet flow pipe) reverse flow, relative to the reasonable application of the ram's horns that flow direction and wall have certain tilt angle, discrete longitudinal Vortex can be generated, certain flow-disturbing effect is played to main flow, reverse flow resistance is increased, the flow of logical flow tube reduces, then can obtain higher net flow an operation cycle along forward flow direction, improve the efficiency of Valveless piezoelectric pump; Meanwhile, this pump can work at higher frequencies, and anti-electromagnetic interference capability is strong, and flow is easy to control, and can be applicable to Biological Chip, micro-fluidic chip, the fields such as micro-full analytical system and clinical medicine trace transfusion system.
Accompanying drawing explanation
Fig. 1 is the overall structure front sectional view of a kind of Archimedes spiral pipe Valveless piezoelectric pump of the present invention;
Fig. 2 is that the A-A of Fig. 1 is to sectional drawing;
Fig. 3 is I partial enlarged drawing in Fig. 2;
Fig. 4 is the geometrical construction enlarged view of inlet flow tube 7 or outlet flow pipe 9 in Fig. 2;
Fig. 5 is that the B-B of Fig. 2 is to sectional drawing;
Fig. 6 is M partial enlarged drawing in Fig. 5;
Fig. 7 is the spiral of Archimedes schematic diagram under the present invention's polar coordinate system used;
Fig. 8 is the fundamental diagram of inlet flow tube 7 suction process in the present invention;
Fig. 9 is the fundamental diagram of inlet flow tube 7 discharge process in the present invention;
Figure 10 is the fundamental diagram of a kind of Archimedes spiral pipe Valveless piezoelectric pump suction process of the present invention;
Figure 11 is the fundamental diagram of a kind of Archimedes spiral pipe Valveless piezoelectric pump discharge process of the present invention;
In figure: 1. pump inlet; 2. pump cover; 3. piezoelectric vibrator; 4. pump chamber; 5. pump discharge; 6. import buffer cavity; 7. inlet flow tube; 8. the pump housing; 9. outlet flow pipe; 10. export buffer cavity; 11. Archimedes spiral pipes; 12,13,14,15. ram's hornss.
Embodiment
With reference to Fig. 1, Fig. 2 and Fig. 5, a kind of Archimedes spiral pipe Valveless piezoelectric pump of the present invention comprises the pump housing 8, pump cover 2 and piezoelectric vibrator 3, the material of the pump housing 8 is silicon chip, the material of pump cover 2 is glass, pump cover 2 utilize laser processing technology process upper half part of pump inlet 1, pump discharge 5 and pump chamber 4, the pump housing 8 utilize dry etch process process lower half portion of import buffer cavity 6, outlet buffer cavity 10, inlet flow tube 7, outlet flow pipe 9 and pump chamber 4, inlet flow tube 7 is identical and coaxially arranged with outlet flow pipe 9 structure, and equidistant with pump chamber 4 center of circle; Inlet flow tube 7 one end is communicated with import buffer cavity 6, the other end is communicated with pump chamber 4, outlet flow pipe 9 one end is communicated with pump chamber 4, the other end is communicated with outlet buffer cavity 10, and import buffer cavity 6 is communicated with pump inlet 1 and pump discharge 5 respectively with outlet buffer cavity 10, the pump housing 8 and pump cover 2 are fitted tightly by anode linkage technique, are fixedly bonded in directly over pump cover 2 by piezoelectric vibrator 3 with binder.
With reference to Fig. 2, Fig. 3, inlet flow tube 7 is communicated with composition by an Archimedean spiral flow pipe 11 with the ram's horns be arranged symmetrically with relative to Archimedean spiral flow pipe 11 center line with outlet flow pipe 9, wherein, ram's horns 13 and ram's horns 14 are arranged symmetrically with relative to Archimedean spiral flow pipe 11 center line, and the centerline axis parallel of the central axis of ram's horns 13 and ram's horns 14 and Archimedean spiral flow pipe 11; Ram's horns 13 one end is communicated with ram's horns 12, and the other end is communicated with pump chamber 4, and ram's horns 14 one end is communicated with ram's horns 15, and the other end is communicated with pump chamber 4.Ram's horns 12 and ram's horns 15 are arranged symmetrically with relative to Archimedean spiral flow pipe 11 center line, and ram's horns 12, ram's horns 15 are through with the large end of Archimedean spiral flow pipe 11 respectively; Ram's horns 13 is identical with the geometric structure diamete of ram's horns 14, and ram's horns 12 is identical with the geometric structure diamete of ram's horns 15.The small end of the Archimedean spiral flow pipe 11 of inlet flow tube 7 is communicated with import buffer cavity 6, and the small end of the Archimedean spiral flow pipe 11 of outlet flow pipe 9 is communicated with pump chamber 4.
With reference to Fig. 4, Fig. 6 and Fig. 7, the profile line of the level cross-sectionn of Archimedean spiral flow pipe 11 is by spiral of Archimedes equation
the cornerite φ determined is the spiral of Archimedes section MN of 45 °, wherein constant
be 0.1, polar angle
it is 0 ~ 2610 °; The length of Archimedean spiral flow pipe 11
it is 1200 μm ~ 3000 μm, highly
be 80 μm ~ 150 μm, the smallest cross-sectional width of small end
be 120 μm ~ 180 μm, small end mouth of pipe fillet radius
it is 50 μm ~ 80 μm; Stream pipe 13,14 is DC tube, the distance of its central axis and Archimedean spiral flow pipe 11 central axis
be 410 μm ~ 900 μm, length
be 400 μm ~ 1000 μm, width
for
, highly
with the height of Archimedean spiral flow pipe 11
identical; Ram's horns 12,15 is semicircular pipe, and its center of circle is to the distance of Archimedean spiral flow pipe 11 central axis
be 270 μm ~ 560 μm, interior semicircle radius
be 110 μm ~ 250 μm, outer semicircle radius
it is 170 μm ~ 420 μm.
With reference to Fig. 8, Fig. 9, Figure 10 and Figure 11, the working principle of a kind of Archimedes spiral pipe Valveless piezoelectric pump of the present invention is: load at piezoelectric vibrator 3 two ends alternating voltage signal (sinusoidal or square-wave signal) afterwards piezoelectric vibrator 3 to occur bending and deformation and with electric voltage frequency up-down vibration, this vibration drives the fluid flowing in pump chamber 4; The motion of piezoelectric vibrator 3 can be divided into upwards displacement movement and downward displacement movement, then in pump chamber 4, flow process is just divided into suction process and discharge process accordingly.When piezoelectric vibrator 3 upwards vibrates, pump chamber 4 volume increases, pressure in pump chamber 4 reduces and is less than outside pressure, thus fluid flows into pump chamber 4 by pump inlet 1 and pump discharge 5 through inlet flow tube 7 and outlet flow pipe 9, at this moment piezoelectric pump is in suction condition, because inlet flow tube 7 is different with the flow resistance coefficient on outlet flow pipe 9 positive and negative direction, make the flow being flow to pump chamber 4 by pump inlet 1 through inlet flow tube 7
be greater than the flow being flow to pump chamber 4 by pump discharge 5 through outlet flow pipe 9
, because inlet flow tube 7 and outlet flow pipe 9 all adopt profile line to be helical flow pipe 11 and the ram's horns 12 of spiral of Archimedes, 13, 14, the tube flowing structure of 15 combinations, therefore in this suction process, fluid flows stable when flowing through Archimedean spiral flow pipe 11 by import buffer cavity 6, energy loss is little, and be communicated with four ram's hornss 12 of Archimedean spiral flow pipe 11 and pump chamber 4, 13, 14, 15 can enter pump chamber 4 the fluid conduction of Archimedean spiral flow pipe 11 wall wish stagnation, serve pumping action to a certain extent, this pumping action can make the fluid in Archimedean spiral flow pipe 11 boundary layer overcome the effect of reverse differential pressure and continue to flow to pump chamber 4, thus prevent to some extent boundary layer separation, reach the effect reducing viscous friction drag, make the flow being flowed into pump chamber 4 by inlet flow tube 7
increase, moving to pump chamber 4 center by under the effect of four ram's hornss 12,13,14,15 fluid because sudden expansion acts on a pair whirlpool that Archimedean spiral flow pipe 11 goes out interruption-forming simultaneously, in moving process, the dissipation in whirlpool becomes slow, vorticity diminishes, effective range increases, thus suppresses or delay the generation of flow separation further, same, fluid by export buffer cavity 10 flow through Archimedean spiral flow pipe 11 time, compared to straight wall flow pipe (diffusion/collapsible tube), Archimedean spiral flow pipe 11 pairs of flow resistances are larger, and fluid can generate discrete longitudinal Vortex when flowing through four ram's hornss 12,13,14,15, certain agitation is played to main flow, reverse flow resistance is increased, the flow of logical flow tube
further reduction, the flow to amount total at suction process piezoelectric pump is
, when piezoelectric vibrator 3 vibrates downwards, pump chamber 4 volume reduces, pressure increase in pump chamber 4 and be greater than outside pressure, thus the inlet flow tube 7 of fluid through pump chamber 4 both sides and outlet flow pipe 9 flow out pump chamber 4 by pump inlet 1 and pump discharge 5, at this moment piezoelectric pump is in discharge state, this process is contrary with pump suction process, the flow that pump chamber 4 is discharged by pump inlet 1 through inlet flow tube 7
be less than the flow of being discharged by pump discharge 5 through outlet flow pipe 9 by pump chamber 4
, in total discharge of discharge process piezoelectric pump be
, the amplitude of the present invention's piezoelectric vibrator 3 in suction process and discharge process is certain, and the flow flowing into pump chamber 4 is equal with the flow flowing out pump chamber 4, is designated as
, then have
, a discharge process and suction process composition one-period, the pump discharge of one-period is flow out the flow of pump chamber 4 and the difference of the flow of inflow pump chamber 4 by outlet flow pipe 9
, or flow into pump chamber 4 flow and the difference of flow flowing out pump chamber 4 by inlet flow tube 7
, then pump discharge in one-period
for:
，
This value is greater than zero, therefore Valveless piezoelectric pump is within an operation cycle, the flow flowing into pump chamber 4 by inlet flow tube 7 in suction process is greater than the flow of discharging in discharge process, outlet flow pipe 9 is then just in time contrary, namely the flow flowing into pump chamber 4 in suction process is less than the flow of discharging in discharge process, finally achieve the one-way flow of fluid, complete pump function.
Claims (3)
1. an Archimedes spiral pipe Valveless piezoelectric pump, comprise the pump housing (8) and pump cover (2), pump cover (2) there is pump inlet (1), upper half part of pump discharge (5) and pump chamber (4), the pump housing (8) there is import buffer cavity (6), outlet buffer cavity (10), inlet flow tube (7), lower half portion of outlet flow pipe (9) and pump chamber (4), inlet flow tube (7) is identical with outlet flow pipe (9) structure and coaxially arranged and equidistant with pump chamber (4) center of circle, inlet flow tube (7) one end is communicated with import buffer cavity (6), the other end is communicated with pump chamber (4), outlet flow pipe (9) one end is communicated with pump chamber (4), the other end is communicated with outlet buffer cavity (10), import buffer cavity (6) is communicated with pump inlet (1) and pump discharge (5) respectively with outlet buffer cavity (10), it is characterized in that: described inlet flow tube (7) is communicated with composition by an Archimedean spiral flow pipe (11) with the ram's horns be arranged symmetrically with relative to Archimedean spiral flow pipe (11) center line with outlet flow pipe (9), the small end of the Archimedean spiral flow pipe (11) in inlet flow tube (7) is connected with import buffer cavity (6), large end is connected with pump chamber (4), the small end of the Archimedean spiral flow pipe (11) in outlet flow pipe (9) is connected with pump chamber (4), large end is connected with outlet buffer cavity (10), second, third ram's horns (13,14) is DC tube that geometric structure diamete is identical and both central axis are symmetrical relative to the centerline axis parallel of Archimedean spiral flow pipe (11), second ram's horns (13) one end is communicated with the first ram's horns (12), the other end is communicated with pump chamber (4), 3rd ram's horns (14) one end is communicated with the 4th ram's horns (15), the other end is communicated with pump chamber (4), the first, the 4th ram's horns (12,15) is semicircular pipe that geometric structure diamete is identical and both are symmetrical relative to Archimedean spiral flow pipe (11) center line and through with the large end of Archimedean spiral flow pipe (11) respectively.
2. a kind of Archimedes spiral pipe Valveless piezoelectric pump according to claim 1, is characterized in that: the profile line of the level cross-sectionn of Archimedean spiral flow pipe (11) is by spiral of Archimedes equation
the cornerite φ determined is the spiral of Archimedes section of 45 °, constant
=0.1, polar angle
=0 ~ 2610 °; The length of Archimedean spiral flow pipe (11) is 1200 μm ~ 3000 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 120 μm ~ 180 μm, and small end mouth of pipe fillet radius is 50 μm ~ 80 μm.
3. a kind of Archimedes spiral pipe Valveless piezoelectric pump according to claim 2, is characterized in that: the distance of the central axis of second, third ram's horns (13,14) and the central axis of Archimedean spiral flow pipe (11) is 410 μm ~ 900 μm, length
be 400 μm ~ 1000 μm, width is
, height is identical with the height of Archimedean spiral flow pipe (11); The first, the center of circle of the 4th ram's horns (12,15) is 270 μm ~ 560 μm to the distance of the central axis of Archimedean spiral flow pipe (11), and interior semicircle radius is 110 μm ~ 250 μm, and outer semicircle radius is 170 μm ~ 420 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555395.7A CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555395.7A CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
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| Publication Number | Publication Date |
|---|---|
| CN103644105A CN103644105A (en) | 2014-03-19 |
| CN103644105B true CN103644105B (en) | 2016-01-20 |
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|---|---|---|---|
| CN201310555395.7A Expired - Fee Related CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196777A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Water-drop-shaped choke valveless piezoelectric pump based on wall attachment effect |
| CN112683255A (en) * | 2020-12-28 | 2021-04-20 | 贵州航天计量测试技术研究所 | MEMS fluid gyroscope based on Archimedes spiral microchannel valveless piezoelectric pump |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4216477A (en) * | 1978-05-10 | 1980-08-05 | Hitachi, Ltd. | Nozzle head of an ink-jet printing apparatus with built-in fluid diodes |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| JP2007117883A (en) * | 2005-10-27 | 2007-05-17 | Konica Minolta Medical & Graphic Inc | Micro-reactor and micro-analysis system |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| CN202117898U (en) * | 2011-06-21 | 2012-01-18 | 南京航空航天大学 | Valveless piezoelectric pump with Achimedean spiral flow tube |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
-
2013
- 2013-11-11 CN CN201310555395.7A patent/CN103644105B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4216477A (en) * | 1978-05-10 | 1980-08-05 | Hitachi, Ltd. | Nozzle head of an ink-jet printing apparatus with built-in fluid diodes |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| JP2007117883A (en) * | 2005-10-27 | 2007-05-17 | Konica Minolta Medical & Graphic Inc | Micro-reactor and micro-analysis system |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| CN202117898U (en) * | 2011-06-21 | 2012-01-18 | 南京航空航天大学 | Valveless piezoelectric pump with Achimedean spiral flow tube |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
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