CN103644100B - A kind of positive ring lock spool Valveless piezoelectric pump - Google Patents

A kind of positive ring lock spool Valveless piezoelectric pump Download PDF

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Publication number
CN103644100B
CN103644100B CN201310555207.0A CN201310555207A CN103644100B CN 103644100 B CN103644100 B CN 103644100B CN 201310555207 A CN201310555207 A CN 201310555207A CN 103644100 B CN103644100 B CN 103644100B
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China
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ring lock
pump
positive ring
flow pipe
horns
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CN201310555207.0A
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CN103644100A (en
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何秀华
蔡盛川
邓志丹
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Jiangsu University
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Jiangsu University
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Abstract

The open a kind of positive ring lock spool Valveless piezoelectric pump of the present invention, comprise the pump housing, pump cover, the pump housing there is import buffer cavity, outlet buffer cavity, inlet flow tube, lower half portion of outlet flow pipe and pump chamber, inlet flow tube is communicated with composition by a positive ring lock linear flow pipe with the ram's horns be arranged symmetrically with relative to positive ring lock linear flow tube hub line with outlet flow pipe, second, 3rd ram's horns is DC tube that geometric structure diamete is identical and both central axis are symmetrical and parallel relative to positive ring lock linear flow tube hub line, first, 4th ram's horns is semicircular pipe that geometric structure diamete is identical and both are symmetrical relative to positive ring lock linear flow tube hub line, positive ring lock linear flow pipe has the good nature of radius of curvature linear transitions, and by uniform horizontal force when fluid flows wherein, flowing is stablized, it is little to vibrate, energy consumption is low, efficiency is high.

Description

A kind of positive ring lock spool Valveless piezoelectric pump
Technical field
The present invention relates to Micro Fluid Transfer and control and micro mechanical technology field, specifically refer to a kind of positive ring lock spool Valveless piezoelectric pump.
Background technique
Piezoelectric pump is the one of mechanical type Micropump, belongs to displacement pump, is widely used in the conveying of medicine trace, and the cooling of cell separation, electronic product, the injection of fuel trace, chemical microanalysis, Flows turn fields such as twisting control.At present, piezoelectric pump is mainly divided into valve piezoelectric pump and Valveless piezoelectric pump two class, Valveless piezoelectric pump is without movable valve block, structure is simple, be more suitable for miniaturization and microminiaturization, the job requirement under high frequency can be met, overcome the shortcoming that valve piezoelectric pump cutout has noise, anti-fatigue behaviour is good, avoids some sensitive medias to be affected.Most of Valveless piezoelectric pump is connected with pump chamber by two special construction stream pipes, differences in flow resistance when utilizing fluid to flow along special construction stream pipe different direction produces pumping effect, and common special construction stream pipe has conical pipe, tesla pipe, vortex tube, three-way pipe etc.
Tapered tube configuration is simple, be easy to design and processing, but its forward and reverse differences in flow resistance is less, causes the efficiency of Micropump very low; Tesla pipe is also referred to as steel tubing in different shapes, its main structure formed with straight channel collocation curved channel, fluid when reciprocal flowing due to the difference of flow channel length and the inertia effect of fluid, produce the net flow of Way out, but its forward and reverse differences in flow resistance is equally very little, the net flow that Micropump obtains within an operation cycle is limited; Vortex tube essence is the whirlpool region adding a series of triangle or circular arc at two dimensional surface conical pipe wall, these triangle vortex districts and conical flow pipe together constitute swirler passages, but the existence in vortex face increases the manufacture difficulty of runner, and forward and reverse flow resistance of this stream pipe is all very large, make Micropump energy consumption large, efficiency is low; Three-way pipe comprises " Y " type pipe and " V " type pipe etc., " Y " type Guan Youyi collecting fitting and two ram's horns composition " Y " fonts, its collecting fitting and ram's horns are uniform section rectangular tube, " V " type Guan Youyi uniform section rectangular tube is collecting fitting and two diffusion (contraction) ram's horns compositions, three-way pipe reduces forward flow resistance to a certain extent, improve reverse flow resistance, Micropump is made to obtain higher net flow along forward within an operation cycle, but the frictional loss when design of straight line type tube wall makes fluid flow is comparatively large, and energy consumption is higher.
Summary of the invention
The object of the invention is the deficiency in order to avoid above-mentioned technology, mainly for movement disorder existing for existing Valveless piezoelectric pump, the ill effect such as viscous resistance is large, boundary layer is easily separated and a kind of yardstick of proposing is little, flowing is stable, energy consumption is low, efficiency is high, vibrate little novel positive ring lock spool Valveless piezoelectric pump.
The technical solution used in the present invention is: comprise the pump housing, pump cover, pump cover there is upper half part of pump inlet, pump discharge and pump chamber, the pump housing has lower half portion of import buffer cavity, outlet buffer cavity, inlet flow tube, outlet flow pipe and pump chamber, inlet flow tube is identical with outlet flow tubular construction and coaxially arranged and equidistant with the pump chamber center of circle, inlet flow tube one end is communicated with import buffer cavity, the other end is communicated with pump chamber, outlet flow pipe one end is communicated with pump chamber, the other end is communicated with outlet buffer cavity, and import buffer cavity is communicated with pump inlet and pump discharge respectively with outlet buffer cavity, described inlet flow tube is communicated with composition by a positive ring lock linear flow pipe with the ram's horns be arranged symmetrically with relative to positive ring lock linear flow tube hub line with outlet flow pipe, second, 3rd ram's horns is DC tube that geometric structure diamete is identical and both central axis are symmetrical and parallel relative to positive ring lock linear flow tube hub line, first, 4th ram's horns is semicircular pipe that geometric structure diamete is identical and both are symmetrical relative to positive ring lock linear flow tube hub line, second ram's horns one end is communicated with the first ram's horns, and the other end is communicated with pump chamber, and the 3rd ram's horns one end is communicated with the 4th ram's horns, and the other end is communicated with pump chamber, and the first, the 4th ram's horns is through with the large end of positive ring lock linear flow pipe respectively.
The profile line of positive ring lock linear flow pipe is by positive cricoclavicular line equation the positive ring lock line segment determined, polar angle for-70 ° ~ 70 °, constant be 1, the length of positive ring lock linear flow pipe is 1500 μm ~ 3500 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 130 μm ~ 180 μm, and small end mouth of pipe fillet radius is 60 μm ~ 90 μm.
The invention has the beneficial effects as follows: the present invention adopts profile line to be the stream pipe of positive cricoclavicular line and the tube flowing structure of ram's horns combination, compared with conventional diffusion/collapsible tube Valveless piezoelectric pump and three-way pipe Valveless piezoelectric pump, positive ring lock linear flow pipe has the good nature of radius of curvature linear transitions, by uniform horizontal force when fluid flows wherein, flowing is stablized, it is little to vibrate, energy consumption is low, efficiency is high; When fluid is along inlet flow tube (outlet flow pipe) forward flow, ram's horns is to a certain degree serving pumping action, thus controls boundary layer separation, prevents flow separation, reduces loss, forward flow resistance is reduced, and the flow of logical flow tube increases; When fluid is along inlet flow tube (outlet flow pipe) reverse flow, relative to the reasonable application of the ram's horns that flow direction and wall have certain tilt angle, discrete longitudinal Vortex can be generated, certain flow-disturbing effect is played to main flow, reverse flow resistance is increased, the flow of logical flow tube reduces, then can obtain higher net flow an operation cycle along forward flow direction, improve the efficiency of Valveless piezoelectric pump; Meanwhile, this pump can work at higher frequencies, and anti-electromagnetic interference capability is strong, and flow is easy to control, and can be applicable to Biological Chip, micro-fluidic chip, the fields such as micro-full analytical system and clinical medicine trace transfusion system.
Accompanying drawing explanation
Fig. 1 is the overall structure sectional view of a kind of positive ring lock spool Valveless piezoelectric pump of the present invention;
Fig. 2 is that the A-A of Fig. 1 is to sectional drawing;
Fig. 3 is I partial enlarged drawing in Fig. 2;
Fig. 4 is the geometrical construction enlarged view of inlet flow tube 7 or outlet flow pipe 9 in Fig. 2;
Fig. 5 be in Fig. 2 B-B to sectional drawing;
Fig. 6 is M partial enlarged drawing in Fig. 5;
Fig. 7 is the positive cricoclavicular line schematic diagram under the present invention's polar coordinate system used;
Fig. 8 is the fundamental diagram of inlet flow tube 7 suction process in the present invention;
Fig. 9 is the fundamental diagram of inlet flow tube 7 discharge process in the present invention;
Figure 10 is the fundamental diagram of suction process of the present invention;
Figure 11 is the fundamental diagram of discharge process of the present invention;
In figure: 1. pump inlet; 2. pump cover; 3. piezoelectric vibrator; 4. pump chamber; 5. pump discharge; 6. import buffer cavity; 7. inlet flow tube; 8. the pump housing; 9. outlet flow pipe; 10. export buffer cavity; 11. positive ring lock spools; 12,13,14,15. ram's hornss.
Embodiment
With reference to Fig. 1, Fig. 2 and Fig. 5, the present invention includes the pump housing 8, pump cover 2 and piezoelectric vibrator 3, the material of the pump housing 8 is silicon chip, the material of pump cover 2 is glass, pump cover 2 utilize laser processing technology process upper half part of pump inlet 1, pump discharge 5 and pump chamber 4, the pump housing 8 utilize dry etch process process lower half portion of import buffer cavity 6, outlet buffer cavity 10, inlet flow tube 7, outlet flow pipe 9 and pump chamber 4, inlet flow tube 7 is identical and coaxially arranged with outlet flow pipe 9 structure, and equidistant with pump chamber 4 center of circle; Inlet flow tube 7 one end is communicated with import buffer cavity 6, the other end is communicated with pump chamber 4, outlet flow pipe 9 one end is communicated with pump chamber 4, the other end is communicated with outlet buffer cavity 10, and import buffer cavity 6 is communicated with pump inlet 1 and pump discharge 5 respectively with outlet buffer cavity 10, piezoelectric vibrator 3 is fixedly bonded in directly over pump cover 2 with binder together with being fitted tightly by anode linkage technique by the pump housing 8 and pump cover 2.
With reference to Fig. 2, Fig. 3, inlet flow tube 7 is communicated with composition by a positive ring lock linear flow pipe 11 with the ram's horns be arranged symmetrically with relative to positive ring lock linear flow pipe 11 center line with outlet flow pipe 9, and ram's horns 13,14 is DC tube, and ram's horns 12,15 is semicircular pipe; The central axis of ram's horns 13,14 is symmetrical relative to positive ring lock linear flow pipe 11 center line, the central axis of ram's horns 13,14 and the centerline axis parallel of positive ring lock linear flow pipe 11, and ram's horns 12,15 is symmetrical relative to positive ring lock linear flow pipe 11 center line; Ram's horns 13 one end is communicated with ram's horns 12, and the other end is communicated with pump chamber 4, and ram's horns 14 one end is communicated with ram's horns 15, and the other end is communicated with pump chamber 4, and ram's horns 12,15 is through with the large end of positive ring lock linear flow pipe 11 respectively; The geometric structure diamete of ram's horns 13,14 is identical, and the geometric structure diamete of ram's horns 12,15 is identical.The small end of the positive ring lock linear flow pipe 11 of inlet flow tube 7 is communicated with import buffer cavity 6, and the small end of the positive ring lock linear flow pipe 11 of outlet flow pipe 9 is communicated with pump chamber 4.
With reference to Fig. 4, Fig. 6 and Fig. 7, the profile line of positive ring lock linear flow pipe 11 is by positive cricoclavicular line equation the positive ring lock line segment 0N determined, wherein polar angle for-70 ° ~ 70 °, constant be 1; The length of positive ring lock linear flow pipe 11 it is 1500 μm ~ 3500 μm, highly be 80 μm ~ 150 μm, the smallest cross-sectional width of small end be 130 μm ~ 180 μm, small end mouth of pipe fillet radius it is 60 μm ~ 90 μm; The central axis of ram's horns 13,14 and the distance of positive ring lock linear flow pipe 11 central axis be 500 μm ~ 1020 μm, length be 500 μm ~ 1160 μm, width for , the height of ram's horns 13,14 with positive ring lock linear flow pipe height identical; The center of circle of ram's horns 12,15 is to the distance of positive ring lock linear flow pipe 11 central axis be 330 μm ~ 660 μm, interior semicircle radius be 130 μm ~ 270 μm, outer semicircle radius it is 210 μm ~ 460 μm.
With reference to Fig. 8, Fig. 9, Figure 10 and Figure 11, working principle of the present invention is: load at piezoelectric vibrator 3 two ends alternating voltage signal (sinusoidal or square-wave signal) afterwards piezoelectric vibrator 3 to occur bending and deformation and with electric voltage frequency up-down vibration, this vibration drives the fluid flowing in pump chamber 4; The motion of piezoelectric vibrator 3 can be divided into upwards displacement movement and downward displacement movement, then in pump chamber 4, flow process is just divided into suction process and discharge process accordingly.When piezoelectric vibrator 3 upwards vibrates, pump chamber 4 volume increases, pressure in pump chamber 4 reduces and is less than outside pressure, thus fluid flows into pump chamber 4 by pump inlet 1 and pump discharge 5 through inlet flow tube 7 and outlet flow pipe 9, at this moment piezoelectric pump is in suction condition, because inlet flow tube 7 is different with the flow resistance coefficient on outlet flow pipe 9 positive and negative direction, make the flow being flow to pump chamber 4 by pump inlet 1 through inlet flow tube 7 be greater than the flow being flow to pump chamber 4 by pump discharge 5 through outlet flow pipe 9 , because inlet flow tube 7 and outlet flow pipe 9 all adopt profile line to be stream pipe 11 and the ram's horns 12 of positive cricoclavicular line, 13, 14, the tube flowing structure of 15 combinations, therefore in this suction process, fluid flows stable when flowing through positive ring lock linear flow pipe 11 by import buffer cavity 6, energy loss is little, and be communicated with the ram's horns 12 of positive ring lock linear flow pipe 11 and pump chamber 4, 13, 14, 15 can enter pump chamber 4 the fluid conduction of positive ring lock linear flow pipe 11 wall wish stagnation, serve pumping action to a certain extent, this pumping action can make the fluid in positive ring lock linear flow pipe 11 boundary layer overcome the effect of reverse differential pressure and continue to flow to pump chamber 4, thus prevent to some extent boundary layer separation, reach the effect reducing viscous friction drag, make the flow being flowed into pump chamber 4 by inlet flow tube 7 increase, moving to pump chamber 4 center by under the effect of ram's horns 12,13,14,15 fluid because sudden expansion acts on a pair whirlpool that positive ring lock linear flow pipe 11 goes out interruption-forming simultaneously, in moving process, the dissipation in whirlpool becomes slow, vorticity diminishes, effective range increases, thus suppresses or delay the generation of flow separation further, same, fluid by export buffer cavity 10 flow through positive ring lock linear flow pipe 11 time, compared to straight wall flow pipe (diffusion/collapsible tube), positive ring lock linear flow pipe 11 pairs of flow resistances are larger, and fluid can generate discrete longitudinal Vortex when flowing through ram's horns 12,13,14,15, certain agitation is played to main flow, reverse flow resistance is increased, the flow of logical flow tube further reduction, the flow to amount total at suction process piezoelectric pump is , when piezoelectric vibrator 3 vibrates downwards, pump chamber 4 volume reduces, pressure increase in pump chamber 4 and be greater than outside pressure, thus the inlet flow tube 7 of fluid through pump chamber 4 both sides and outlet flow pipe 9 flow out pump chamber 4 by pump inlet 1 and pump discharge 5, at this moment piezoelectric pump is in discharge state, this process is contrary with pump suction process, the flow that pump chamber 4 is discharged by pump inlet 1 through inlet flow tube 7 be less than the flow of being discharged by pump discharge 5 through outlet flow pipe 9 by pump chamber 4 , in total discharge of discharge process piezoelectric pump be , the amplitude of the present invention's piezoelectric vibrator 3 in suction process and discharge process is certain, and the flow flowing into pump chamber 4 is equal with the flow flowing out pump chamber 4, is designated as , then have , a discharge process and suction process composition one-period, the pump discharge of one-period is flow out the flow of pump chamber 4 and the difference of the flow of inflow pump chamber 4 by outlet flow pipe 9 , or flow into pump chamber 4 flow and the difference of flow flowing out pump chamber 4 by inlet flow tube 7 , then pump discharge in one-period for:
This value is greater than zero, therefore Valveless piezoelectric pump is within an operation cycle, the flow flowing into pump chamber 4 by inlet flow tube 7 in suction process is greater than the flow of discharging in discharge process, outlet flow pipe 9 is then just in time contrary, namely the flow flowing into pump chamber 4 in suction process is less than the flow of discharging in discharge process, finally achieve the one-way flow of fluid, complete pump function.

Claims (3)

1. a positive ring lock spool Valveless piezoelectric pump, comprise the pump housing (8), pump cover (2), pump cover (2) there is upper half part of pump inlet (1), pump discharge (5) and pump chamber (4), the pump housing (8) has lower half portion of import buffer cavity (6), outlet buffer cavity (10), inlet flow tube (7), outlet flow pipe (9) and pump chamber (4), inlet flow tube (7) is identical with outlet flow pipe (9) structure and coaxially arranged and equidistant with pump chamber (4) center of circle; Inlet flow tube (7) one end is communicated with import buffer cavity (6), the other end is communicated with pump chamber (4), outlet flow pipe (9) one end is communicated with pump chamber (4), the other end is communicated with outlet buffer cavity (10), import buffer cavity (6) is communicated with pump inlet (1) and pump discharge (5) respectively with outlet buffer cavity (10), it is characterized in that: described inlet flow tube (7) is communicated with composition by a positive ring lock linear flow pipe (11) with the ram's horns be arranged symmetrically with relative to positive ring lock linear flow pipe (11) center line with outlet flow pipe (9); Positive ring lock linear flow pipe (11) small end in inlet flow tube (7) is connected with import buffer cavity (6), large end is connected with pump chamber (4); Positive ring lock linear flow pipe (11) small end in outlet flow pipe (9) is connected with pump chamber (4), large end is connected with outlet buffer cavity (10); Second, third ram's horns (13,14) is for the identical DC tube of geometric structure diamete and both central axis are symmetrical and parallel relative to positive ring lock linear flow pipe (11) center line, and the first, the 4th ram's horns (12,15) is for the identical semicircular pipe of geometric structure diamete and both are symmetrical relative to positive ring lock linear flow pipe (11) center line; Second ram's horns (13) one end is communicated with the first ram's horns (12), the other end is communicated with pump chamber (4), 3rd ram's horns (14) one end is communicated with the 4th ram's horns (15), the other end is communicated with pump chamber (4), and the first, the 4th ram's horns (12,15) is through with the large end of positive ring lock linear flow pipe 11 respectively.
2. a kind of positive ring lock spool Valveless piezoelectric pump according to claim 1, is characterized in that: the profile line of positive ring lock linear flow pipe (11) is by positive cricoclavicular line equation the positive ring lock line segment determined, polar angle for-70 ° ~ 70 °, constant be 1, the length of positive ring lock linear flow pipe (11) is 1500 μm ~ 3500 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 130 μm ~ 180 μm, and small end mouth of pipe fillet radius is 60 μm ~ 90 μm.
3. a kind of positive ring lock spool Valveless piezoelectric pump according to claim 2, is characterized in that: the central axis of second, third ram's horns (13,14) and the distance of positive ring lock linear flow pipe (11) central axis are 500 μm ~ 1020 μm, length be 500 μm ~ 1160 μm, width is , height is identical with the height of positive ring lock linear flow pipe (11); The first, the center of circle of the 4th ram's horns (12,15) is 330 μm ~ 660 μm to the distance of positive ring lock linear flow pipe (11) central axis, and interior semicircle radius is 130 μm ~ 270 μm, and outer semicircle radius is 210 μm ~ 460 μm.
CN201310555207.0A 2013-11-11 2013-11-11 A kind of positive ring lock spool Valveless piezoelectric pump Expired - Fee Related CN103644100B (en)

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CN103644100B true CN103644100B (en) 2015-12-30

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5876187A (en) * 1995-03-09 1999-03-02 University Of Washington Micropumps with fixed valves
CN1743670A (en) * 2005-10-14 2006-03-08 北京工业大学 Built-in corrugated channel valveless piezoelectric pump
CN101975154A (en) * 2010-10-12 2011-02-16 江苏大学 Valve-free piezoelectric pump of logarithmic spiral combined tube
CN101975153A (en) * 2010-10-12 2011-02-16 江苏大学 Valveless piezoelectric pump of elliptical combined pipe
CN102435184A (en) * 2011-06-21 2012-05-02 无锡长辉机电科技有限公司 Gyro based on lituus flow tube valveless piezoelectric pump
CN102691648A (en) * 2012-05-02 2012-09-26 江苏大学 Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5876187A (en) * 1995-03-09 1999-03-02 University Of Washington Micropumps with fixed valves
CN1743670A (en) * 2005-10-14 2006-03-08 北京工业大学 Built-in corrugated channel valveless piezoelectric pump
CN101975154A (en) * 2010-10-12 2011-02-16 江苏大学 Valve-free piezoelectric pump of logarithmic spiral combined tube
CN101975153A (en) * 2010-10-12 2011-02-16 江苏大学 Valveless piezoelectric pump of elliptical combined pipe
CN102435184A (en) * 2011-06-21 2012-05-02 无锡长辉机电科技有限公司 Gyro based on lituus flow tube valveless piezoelectric pump
CN102691648A (en) * 2012-05-02 2012-09-26 江苏大学 Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe

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