CN103644105A - Novel Archimedes solenoid valveless piezoelectric pump - Google Patents
Novel Archimedes solenoid valveless piezoelectric pump Download PDFInfo
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- CN103644105A CN103644105A CN201310555395.7A CN201310555395A CN103644105A CN 103644105 A CN103644105 A CN 103644105A CN 201310555395 A CN201310555395 A CN 201310555395A CN 103644105 A CN103644105 A CN 103644105A
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Abstract
The invention discloses a novel Archimedes solenoid valveless piezoelectric pump. The novel Archimedes solenoid valveless piezoelectric pump comprises a pump body and a pump cover, wherein the pump body is provided with an outlet/inlet buffering cavity, an outlet buffering cavity, an inlet flow pipe, an outlet flow pipe and a half bottom part of a pump cavity, the inlet flow pipe and the outlet flow pipe are of the same structure, are coaxially arranged, and are equally spaced from the circle center of the pump cavity, the inlet flow pipe and the outlet flow pipe are respectively formed by communicating an Archimedes spiral flow pipe and branch pipes, the branch pipes are symmetrically distributed relative to the central line of the corresponding Archimedes spiral flow pipe, the Archimedes spiral flow pipes have good property of curvature radius linear transition, uniform transverse acting force is applied to fluid when the fluid flows in the Archimedes spiral flow pipes, the flowing is stable, vibration is small, energy consumption is small, and efficiency is high.
Description
Technical field
The present invention relates to microfluid transmission and control and micro mechanical technology field, specifically refer to a kind of novel Archimedes spiral pipe Valveless piezoelectric pump.
Background technique
Piezoelectric pump is a kind of of mechanical type Micropump, belongs to displacement pump, is widely used in medicine trace and carries, and cell separation, electronic product cooling, the injection of fuel trace, chemical microanalysis, Flows turn fields such as twisting control.Piezoelectric pump is mainly divided at present valve piezoelectric pump and Valveless piezoelectric pump two classes, Valveless piezoelectric pump is without movable valve block, simple in structure, be more suitable in miniaturization and microminiaturization, can meet the job requirement under high frequency, overcome the shortcoming that has valve piezoelectric pump cutout to have noise, anti-fatigue behaviour is good, avoids some sensitive medias to be affected.Most of Valveless piezoelectric pumps are that two special construction stream pipes are connected with pump chamber, and the differences in flow resistance while utilizing fluid to flow along special construction stream pipe different direction produces pumping effect, and common special construction stream pipe has conical pipe, tesla pipe, vortex tube, three-way pipe etc.
Conical pipe is simple in structure, be easy to design and processing, but its forward and reverse differences in flow resistance is less, causes the efficiency of Micropump very low; Tesla pipe is also referred to as steel tubing in different shapes, its main structure is formed with straight channel collocation curved channel, fluid when back and forth flowing due to the difference of flow channel length and the inertia effect of fluid, produce the net flow of Way out, but its forward and reverse differences in flow resistance is equally very little, the net flow that Micropump obtains within an operation cycle is limited; Vortex tube essence is at two dimensional surface conical pipe wall, to have increased the whirlpool region of a series of triangles or circular arc, these triangle vortex districts have formed vortex passage together with conical flow pipe, but the existence of vortex face has strengthened the manufacture difficulty of runner, and forward and reverse flow resistance of this stream pipe is all very large, make Micropump energy consumption large, efficiency is low; Three-way pipe comprises " Y " type pipe and " V " type pipe etc., " Y " type Guan Youyi collecting fitting and two ram's hornss form " Y " font, its collecting fitting and ram's horns are uniform section rectangular tube, " V " type Guan Youyi uniform section rectangular tube is that collecting fitting and two diffusions (contraction) ram's horns form, three-way pipe has reduced forward flow resistance to a certain extent, improved reverse flow resistance, make Micropump along forward, obtain higher net flow within an operation cycle, but the frictional loss when design of straight line type tube wall is flowed fluid is larger, and energy consumption is higher.Publication number is that the Chinese invention patent application of CN102230465A discloses a kind of valveless piezoelectric pump with Achimedean spiral flow tube, between the lower cover of this Valveless piezoelectric pump and upper cover, be provided with the first Archimedean spiral flow pipe and the first connectivity slot, described Archimedean spiral flow pipe one end is connected with the fluid inlet being arranged on the pump housing, and the other end is connected with pump chamber; One end of the first connectivity slot is connected with pump chamber, and the other end is connected with fluid output; The Archimedean spiral flow pipe of the first described Archimedean spiral flow pipe for counterclockwise arranging with starting point centered by fluid inlet.This kind of structural flow pipe used whole Archimedes spiral structure stream pipe, runner is long, fluid is all very large along the loss of positive and negative direction while flowing in bent flowtube, simultaneously owing to being subject to the effect of centrifugal force, forms Secondary Flow on cross section, local resistance is increased, cause secondary flow loss, and direct-connected groove used is without flow resistance characteristic, thereby the efficiency of Micropump is lower, structure is relatively complicated in addition, is unfavorable for integrated and microminiaturized.
Ancient Greek Mathematics man and mechanics scientist Archimedes have just done detailed discussion to the geometric properties of the equidistant helical of plane in his treatise < < opinion helical > >, people are referred to as " Archimedes spiral ", and mathematicians had found again lituus, fermat spiral, logarithmic spiral, hyperbolic conchoid, cylindrical spiral, conical etc. afterwards.Helical flow pipe has superior structural characteristics and good hydrodynamics, is conducive to integrated arrangement, be widely used in the energy, warship, submarine, space station, ship power, petrochemical industry, space flight and aviation, for electronics cooling with the field such as cryogenic technique.
Summary of the invention
Order of the present invention ground is exactly a kind of novel Archimedes spiral pipe Valveless piezoelectric pump proposing for fear of the deficiency in above-mentioned technology, it be mainly the yardstick of inventing as movement disorder, the ill effect such as viscous resistance is large, boundary layer is easily separated for the existing problem of existing Valveless piezoelectric pump little, flow stable, energy consumption is low, efficiency is high, vibrate little novel Archimedes spiral pipe Valveless piezoelectric pump, has expanded the application area of spiral flow tube technology in microfluid machinery field simultaneously.
The present invention adopts technological scheme to be: comprise the pump housing and pump cover, on pump cover, there is the pump inlet of going out, upper half part of pump discharge and pump chamber, on the pump housing, there is exit port buffer cavity, outlet buffer cavity, inlet flow tube, lower half portion of outlet stream pipe and pump chamber, inlet flow tube is identical and coaxially arranged and equidistant with the pump chamber center of circle with outlet tube flowing structure, inlet flow tube one end is communicated with import buffer cavity, the other end is communicated with pump chamber, outlet stream pipe one end is communicated with pump chamber, the other end is communicated with outlet buffer cavity, import buffer cavity and outlet buffer cavity are communicated with respectively pump inlet and pump discharge, inlet flow tube and outlet stream pipe are communicated with and form by an Archimedean spiral flow pipe and the ram's horns that is arranged symmetrically with respect to Archimedean spiral flow pipe center line, second, the 3rd ram's horns is that the measure-alike DC tube of geometrical construction and both central axis are parallel and symmetrical with the central axis of Archimedean spiral flow pipe, second ram's horns one end is communicated with the first ram's horns, the other end is communicated with pump chamber, the 3rd ram's horns one end is communicated with the 4th ram's horns, the other end is communicated with pump chamber, the first, the 4th ram's horns is that the measure-alike semicircular pipe of geometrical construction and both are symmetrical and connect with the large end of Archimedean spiral flow pipe respectively with respect to Archimedean spiral flow pipe center line.
The profile line of the level cross-sectionn of Archimedean spiral flow pipe is by spiral of Archimedes equation
definite cornerite φ is the spiral of Archimedes section of 45 °, constant
=0.1, polar angle
=0 ~ 2610 °; The length of Archimedean spiral flow pipe is 1200 μ m ~ 3000 μ m, is highly 80 μ m ~ 150 μ m, and the smallest cross-sectional width of small end is 120 μ m ~ 180 μ m, and small end mouth of pipe fillet radius is 50 μ m ~ 80 μ m.
The invention has the beneficial effects as follows: the present invention organically combines helical flow Manifold technology and piezoelectric pump technology, the tube flowing structure of the helical flow pipe that employing profile line is spiral of Archimedes and ram's horns combination, compare with conventional diffusion/collapsible tube Valveless piezoelectric pump and three-way pipe Valveless piezoelectric pump, Archimedean spiral flow pipe has the good nature of radius of curvature linear transitions, fluid is subject to uniform horizontal force while flowing therein, flows stable, vibrates little, energy consumption is low, and efficiency is high; Fluid is during along inlet flow tube (outlet stream pipe) forward flow, and ram's horns is to a certain degree playing pumping action, thereby boundary layer separation is controlled, and prevents flow separation, reduces loss, and forward flow resistance is reduced, and the flow of logical flow tube increases; Fluid is during along inlet flow tube (outlet stream pipe) reverse flow, with respect to flow direction and wall, there is the reasonable application of the ram's horns at certain tilt angle, can generate discrete longitudinal Vortex, main flow is played to certain flow-disturbing effect, reverse flow resistance is increased, the flow of logical flow tube reduces, and an operation cycle, along forward flow direction, can obtain higher net flow, has improved the efficiency of Valveless piezoelectric pump; Meanwhile, this pump can be worked under upper frequency, and anti-electromagnetic interference capability is strong, and flow is easy to control, and can be applicable to Biological Chip, micro-fluidic chip, the fields such as micro-full analytical system and clinical medicine trace transfusion system.
Accompanying drawing explanation
Fig. 1 is that the overall structure master of a kind of novel Archimedes spiral pipe Valveless piezoelectric pump of the present invention looks sectional view;
Fig. 2 is that the A-A of Fig. 1 is to sectional drawing;
Fig. 3 is I partial enlarged drawing in Fig. 2;
Fig. 4 is the geometrical construction enlarged view of inlet flow tube 7 or outlet stream pipe 9 in Fig. 2;
Fig. 5 is that the B-B of Fig. 2 is to sectional drawing;
Fig. 6 is M partial enlarged drawing in Fig. 5;
Fig. 7 is the spiral of Archimedes schematic diagram under the present invention's polar coordinate system used;
Fig. 8 is the fundamental diagram of inlet flow tube 7 suction processes in the present invention;
Fig. 9 is the fundamental diagram of inlet flow tube 7 discharge processes in the present invention;
Figure 10 is the fundamental diagram of a kind of novel Archimedes spiral pipe Valveless piezoelectric pump suction process of the present invention;
Figure 11 is the fundamental diagram of a kind of novel Archimedes spiral pipe Valveless piezoelectric pump discharge process of the present invention;
In figure: 1. pump inlet; 2. pump cover; 3. piezoelectric vibrator; 4. pump chamber; 5. pump discharge; 6. import buffer cavity; 7. inlet flow tube; 8. the pump housing; 9. outlet stream is managed; 10. export buffer cavity; 11. Archimedes spiral pipes; 12,13,14,15. ram's hornss.
Embodiment
With reference to Fig. 1, Fig. 2 and Fig. 5, a kind of novel Archimedes spiral pipe Valveless piezoelectric pump of the present invention comprises the pump housing 8, pump cover 2 and piezoelectric vibrator 3, the material of the pump housing 8 is silicon chip, the material of pump cover 2 is glass, on pump cover 2, utilize laser processing technology to process pump inlet 1, upper half part of pump discharge 5 and pump chamber 4, on the pump housing 8, utilize dry etch process to process import buffer cavity 6, outlet buffer cavity 10, inlet flow tube 7, lower half portion of outlet stream pipe 9 and pump chamber 4, inlet flow tube 7 is identical and coaxially arranged with outlet stream pipe 9 structures, and equidistant with pump chamber 4 centers of circle, inlet flow tube 7 one end are communicated with import buffer cavity 6, the other end is communicated with pump chamber 4, outlet stream pipe 9 one end are communicated with pump chamber 4, the other end is communicated with outlet buffer cavity 10, and import buffer cavity 6 and outlet buffer cavity 10 are communicated with respectively pump inlet 1 and pump discharge 5, the pump housing 8 and pump cover 2 fit tightly by anode linkage technique, with binder, piezoelectric vibrator 3 are fixedly bonded in directly over pump cover 2.
With reference to Fig. 2, Fig. 3, inlet flow tube 7 and outlet stream pipe 9 are communicated with and form by an Archimedean spiral flow pipe 11 and the ram's horns that is arranged symmetrically with respect to Archimedean spiral flow pipe 11 center lines, wherein, ram's horns 13 and ram's horns 14 are arranged symmetrically with respect to Archimedean spiral flow pipe 11 center lines, and the central axis of ram's horns 13 and ram's horns 14 is parallel with the central axis of Archimedean spiral flow pipe 11; Ram's horns 13 one end are communicated with ram's horns 12, and the other end is communicated with pump chamber 4, and ram's horns 14 one end are communicated with ram's horns 15, and the other end is communicated with pump chamber 4.Ram's horns 12 and ram's horns 15 are arranged symmetrically with respect to Archimedean spiral flow pipe 11 center lines, and ram's horns 12, ram's horns 15 connect with the large end of Archimedean spiral flow pipe 11 respectively; The geometrical construction of ram's horns 13 and ram's horns 14 is measure-alike, and the geometrical construction of ram's horns 12 and ram's horns 15 is measure-alike.The small end of the Archimedean spiral flow pipe 11 of inlet flow tube 7 is communicated with import buffer cavity 6, and the small end of the Archimedean spiral flow pipe 11 of outlet stream pipe 9 is communicated with pump chamber 4.
With reference to Fig. 4, Fig. 6 and Fig. 7, the profile line of the level cross-sectionn of Archimedean spiral flow pipe 11 is by spiral of Archimedes equation
definite cornerite φ is the spiral of Archimedes section MN of 45 °, wherein constant
be 0.1, polar angle
it is 0 ~ 2610 °; The length of Archimedean spiral flow pipe 11
be 1200 μ m ~ 3000 μ m, highly
be 80 μ m ~ 150 μ m, the smallest cross-sectional width of small end
be 120 μ m ~ 180 μ m, small end mouth of pipe fillet radius
be 50 μ m ~ 80 μ m; Stream pipe 13,14 is DC tube, the distance of its central axis and Archimedean spiral flow pipe 11 central axis
be 410 μ m ~ 900 μ m, length
be 400 μ m ~ 1000 μ m, width
for
, highly
height with Archimedean spiral flow pipe 11
identical; Ram's horns 12,15 is semicircular pipe, and its center of circle is to the distance of Archimedean spiral flow pipe 11 central axis
be 270 μ m ~ 560 μ m, interior half circle radius
be 110 μ m ~ 250 μ m, outer half circle radius
be 170 μ m ~ 420 μ m.
With reference to Fig. 8, Fig. 9, Figure 10 and Figure 11, the working principle of a kind of novel Archimedes spiral pipe Valveless piezoelectric pump of the present invention is: after piezoelectric vibrator 3 two ends load alternating voltage signals (sine or square-wave signal), piezoelectric vibrator 3 can occur bending and deformation and with electric voltage frequency up-down vibration, this vibration drives the fluid in pump chamber 4 to flow; The motion of piezoelectric vibrator 3 can be divided into upwards displacement movement and downwards displacement movement, the interior flow process of pump chamber 4 is just divided into suction process and discharge process accordingly.When piezoelectric vibrator 3 upwards vibrates, pump chamber 4 volumes increase, pressure decreased in pump chamber 4 and be less than outside pressure, thereby fluid flows into pump chamber 4 by pump inlet 1 and pump discharge 5 through inlet flow tube 7 and outlet stream pipe 9, at this moment piezoelectric pump is in suction condition, because inlet flow tube 7 is different with the flow resistance coefficient on outlet stream pipe 9 positive and negative direction, make to be flow to through inlet flow tube 7 by pump inlet 1 flow of pump chamber 4
be greater than and by pump discharge 5, through outlet stream pipe 9, flow to the flow of pump chamber 4
, because inlet flow tube 7 all adopts profile line with outlet stream pipe 9, be helical flow pipe 11 and the ram's horns 12 of spiral of Archimedes, 13, 14, the tube flowing structure of 15 combinations, therefore in this suction process, when flowing through Archimedean spiral flow pipe 11 by import buffer cavity 6, fluid flows stable, energy loss is little, and four ram's hornss 12 that are communicated with Archimedean spiral flow pipe 11 and pump chamber 4, 13, 14, 15 can enter pump chamber 4 the fluid conduction of Archimedean spiral flow pipe 11 walls wish stagnation, played to a certain extent pumping action, this pumping action can make the fluid in Archimedean spiral flow pipe 11 boundary layers overcome the effect of reverse differential pressure and continue to flow to pump chamber 4, thereby prevented to a certain extent boundary layer separation, reach the effect that reduces viscous friction drag, make to flow into by inlet flow tube 7 flow of pump chamber 4
increase, because acting on a pair of whirlpool that Archimedean spiral flow pipe 11 goes out interruption-forming, sudden expansion to pump chamber 4 centers, moves under the effect by through four ram's horns 12,13,14,15 fluids simultaneously, in moving process, the dissipation in whirlpool becomes slow, vorticity diminishes, effective range increases, thereby further suppresses or delay the generation of flow separation, same, fluid is when exporting buffer cavity 10 and flow through Archimedean spiral flow pipe 11, than straight wall flow pipe (diffusion/collapsible tube), Archimedean spiral flow pipe 11 flow resistances are larger, and fluid flows through four ram's hornss can generate discrete longitudinal Vortex at 12,13,14,15 o'clock, main flow is played to certain agitation, reverse flow resistance is increased, the flow of logical flow tube
further reduce, the flow to amount total at suction process piezoelectric pump is
, when piezoelectric vibrator 3 vibration downwards, pump chamber 4 volumes reduce, pressure in pump chamber 4 increases and is greater than outside pressure, thereby fluid flows out pump chamber 4 through inlet flow tube 7 and the outlet stream pipe 9 of pump chamber 4 both sides by pump inlet 1 and pump discharge 5, at this moment piezoelectric pump is in discharge state, this process is contrary with pump suction process, the flow that pump chamber 4 is discharged by pump inlet 1 through inlet flow tube 7
be less than by pump chamber 4 through outlet stream pipe 9 flows of being discharged by pump discharge 5
, in total discharge of discharge process piezoelectric pump, be
, the amplitude of the present invention's piezoelectric vibrator 3 in suction process and discharge process is certain, flows into the flow of pump chamber 4 equal with the flow of outflow pump chamber 4, is designated as
, have
, discharge process and suction process form one-period, and the pump discharge of one-period is for flow the difference of the flow of pipe 9 outflow pump chambers 4 and the flow of inflow pump chamber 4 by outlet
, or flow into pump chamber 4 flows and the difference that flows out the flow of pump chamber 4 by inlet flow tube 7
, pump discharge in one-period
for:
This value is greater than zero, therefore Valveless piezoelectric pump is within an operation cycle, the flow that flows into pump chamber 4 by inlet flow tube 7 in suction process is greater than the flow of discharging in discharge process, outlet stream pipe 9 is just in time contrary, the flow that flows into pump chamber 4 in suction process is less than the flow of discharging in discharge process, the one-way flow that has finally realized fluid, has completed pump function.
Claims (3)
1. a novel Archimedes spiral pipe Valveless piezoelectric pump, comprise the pump housing (8) and pump cover (2), on pump cover (2), there is the pump inlet of going out (1), upper half part of pump discharge (5) and pump chamber (4), on the pump housing (8), there is exit port buffer cavity (6), outlet buffer cavity (10), inlet flow tube (7), lower half portion of outlet stream pipe (9) and pump chamber (4), inlet flow tube (7) is identical and coaxially arranged and equidistant with pump chamber (4) center of circle with outlet stream pipe (9) structure, inlet flow tube (7) one end is communicated with import buffer cavity (6), the other end is communicated with pump chamber (4), outlet stream pipe (9) one end is communicated with pump chamber (4), the other end is communicated with outlet buffer cavity (10), import buffer cavity (6) and outlet buffer cavity (10) are communicated with respectively pump inlet (1) and pump discharge (5), it is characterized in that: described inlet flow tube (7) and outlet stream pipe (9) are communicated with and form by an Archimedean spiral flow pipe (11) and the ram's horns that is arranged symmetrically with respect to Archimedean spiral flow pipe (11) center line, second, the 3rd ram's horns (13, 14) be that the measure-alike DC tube of geometrical construction and both central axis are parallel and symmetrical with the central axis of Archimedean spiral flow pipe (11), the second ram's horns (13) one end is communicated with the first ram's horns (12), the other end is communicated with pump chamber (4), the 3rd ram's horns (14) one end is communicated with the 4th ram's horns (15), the other end is communicated with pump chamber (4), the first, the 4th ram's horns (12,15) is that the measure-alike semicircular pipe of geometrical construction and both are symmetrical and connect with the large end of Archimedean spiral flow pipe (11) respectively with respect to Archimedean spiral flow pipe (11) center line.
2. a kind of novel Archimedes spiral pipe Valveless piezoelectric pump according to claim 1, is characterized in that: the profile line of the level cross-sectionn of Archimedean spiral flow pipe (11) is by spiral of Archimedes equation
definite cornerite φ is the spiral of Archimedes section of 45 °, constant
=0.1, polar angle
=0 ~ 2610 °; The length of Archimedean spiral flow pipe (11) is 1200 μ m ~ 3000 μ m, is highly 80 μ m ~ 150 μ m, and the smallest cross-sectional width of small end is 120 μ m ~ 180 μ m, and small end mouth of pipe fillet radius is 50 μ m ~ 80 μ m.
3. a kind of novel Archimedes spiral pipe Valveless piezoelectric pump according to claim 2, is characterized in that: the distance of the central axis of second, third ram's horns (13,14) and the central axis of Archimedean spiral flow pipe (11) is 410 μ m ~ 900 μ m, length
be 400 μ m ~ 1000 μ m, width is
, height is identical with the height of Archimedean spiral flow pipe (11); The first, the center of circle of the 4th ram's horns (12,15) is 270 μ m ~ 560 μ m to the distance of the central axis of Archimedean spiral flow pipe (11), and interior half circle radius is 110 μ m ~ 250 μ m, and outer half circle radius is 170 μ m ~ 420 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555395.7A CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555395.7A CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103644105A true CN103644105A (en) | 2014-03-19 |
| CN103644105B CN103644105B (en) | 2016-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310555395.7A Expired - Fee Related CN103644105B (en) | 2013-11-11 | 2013-11-11 | A kind of Archimedes spiral pipe Valveless piezoelectric pump |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196777A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Water-drop-shaped choke valveless piezoelectric pump based on wall attachment effect |
| CN112683255A (en) * | 2020-12-28 | 2021-04-20 | 贵州航天计量测试技术研究所 | MEMS fluid gyroscope based on Archimedes spiral microchannel valveless piezoelectric pump |
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| US4216477A (en) * | 1978-05-10 | 1980-08-05 | Hitachi, Ltd. | Nozzle head of an ink-jet printing apparatus with built-in fluid diodes |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| JP2007117883A (en) * | 2005-10-27 | 2007-05-17 | Konica Minolta Medical & Graphic Inc | Micro-reactor and micro-analysis system |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| CN202117898U (en) * | 2011-06-21 | 2012-01-18 | 南京航空航天大学 | Valveless piezoelectric pump with Achimedean spiral flow tube |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
-
2013
- 2013-11-11 CN CN201310555395.7A patent/CN103644105B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4216477A (en) * | 1978-05-10 | 1980-08-05 | Hitachi, Ltd. | Nozzle head of an ink-jet printing apparatus with built-in fluid diodes |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| JP2007117883A (en) * | 2005-10-27 | 2007-05-17 | Konica Minolta Medical & Graphic Inc | Micro-reactor and micro-analysis system |
| WO2009072261A1 (en) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | Pump |
| CN202117898U (en) * | 2011-06-21 | 2012-01-18 | 南京航空航天大学 | Valveless piezoelectric pump with Achimedean spiral flow tube |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196777A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Water-drop-shaped choke valveless piezoelectric pump based on wall attachment effect |
| CN112683255A (en) * | 2020-12-28 | 2021-04-20 | 贵州航天计量测试技术研究所 | MEMS fluid gyroscope based on Archimedes spiral microchannel valveless piezoelectric pump |
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