CN103644104B - A kind of logarithmic spiral tube Valveless piezoelectric pump - Google Patents
A kind of logarithmic spiral tube Valveless piezoelectric pump Download PDFInfo
- Publication number
- CN103644104B CN103644104B CN201310555394.2A CN201310555394A CN103644104B CN 103644104 B CN103644104 B CN 103644104B CN 201310555394 A CN201310555394 A CN 201310555394A CN 103644104 B CN103644104 B CN 103644104B
- Authority
- CN
- China
- Prior art keywords
- logarithmic spiral
- pump
- pipe
- horns
- ram
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The present invention discloses a kind of logarithmic spiral tube Valveless piezoelectric pump, comprise the pump housing, pump cover, the pump housing is provided with lower half portion of import buffer cavity, outlet buffer cavity, inlet flow tube, outlet flow pipe and pump chamber, inlet flow tube is communicated with composition by a logarithm helical flow pipe with the ram's horns be arranged symmetrically with relative to logarithmic spiral stream tube hub line with outlet flow pipe, second, third ram's horns is the DC tube that geometric structure diamete is identical, and both are the symmetrical and centerline axis parallel of central axis and logarithmic spiral stream pipe relative to logarithmic spiral stream tube hub line; The first, the 4th ram's horns is semicircular pipe that geometric structure diamete is identical and symmetrical relative to logarithmic spiral stream tube hub line; Logarithmic spiral stream pipe has the good nature of radius of curvature linear transitions, and by uniform horizontal force when fluid flows wherein, flowing is stable, and vibrate little, energy consumption is low, and efficiency is high.
Description
Technical field
The present invention relates to Micro Fluid Transfer and control and micro mechanical technology field, specifically refer to a kind of logarithmic spiral tube Valveless piezoelectric pump.
Background technique
Piezoelectric pump is the one of mechanical type Micropump, belongs to displacement pump, is widely used in the conveying of medicine trace, cell separation, electronic product cooling, the micro-injection of fuel, chemical microanalysis, Flows turn fields such as twisting control.Current piezoelectric pump is mainly divided into valve piezoelectric pump and Valveless piezoelectric pump two class, Valveless piezoelectric pump is without movable valve block, structure is simple, be more suitable for miniaturization and microminiaturization, the job requirement under high frequency can be met, overcome the shortcoming that valve piezoelectric pump cutout has noise, anti-fatigue behaviour is good, avoids some sensitive medias to be affected.Most of Valveless piezoelectric pump is connected with pump chamber by two special construction stream pipes, differences in flow resistance when utilizing fluid to flow along special construction stream pipe different direction produces pumping effect, and common special construction stream pipe has conical pipe, tesla pipe, vortex tube, three-way pipe etc.
Tapered tube configuration is simple, be easy to design and processing, but its forward and reverse differences in flow resistance is less, causes the efficiency of Micropump very low; Tesla pipe is also referred to as steel tubing in different shapes, its main structure formed with straight channel collocation curved channel, fluid when reciprocal flowing due to the difference of flow channel length and the inertia effect of fluid, produce the net flow of Way out, but its forward and reverse differences in flow resistance is equally very little, the net flow that Micropump obtains within an operation cycle is limited; Vortex tube essence is the whirlpool region adding a series of triangle or circular arc at two dimensional surface conical pipe wall, these triangle vortex districts and conical flow pipe together constitute swirler passages, but the existence in vortex face increases the manufacture difficulty of runner, and forward and reverse flow resistance of this stream pipe is all very large, make Micropump energy consumption large, efficiency is low; Three-way pipe comprises " Y " type pipe and " V " type pipe etc., " Y " type Guan Youyi collecting fitting and two ram's horns composition " Y " fonts, its collecting fitting and ram's horns are uniform section rectangular tube, " V " type Guan Youyi uniform section rectangular tube is collecting fitting and two diffusion (contraction) ram's horns compositions, three-way pipe reduces forward flow resistance to a certain extent, improve reverse flow resistance, Micropump is made to obtain higher net flow along forward within an operation cycle, but the frictional loss when design of straight line type tube wall makes fluid flow is comparatively large, and energy consumption is higher.Publication number is that the Chinese invention patent application of CN101975154A discloses a kind of logarithmic spiral composite tube Valveless piezoelectric pump, inlet flow tube wherein and outlet flow pipe are shunted logarithmic spiral pipe by the Taper Pipe that confluxes form with two that are communicated with the large end of the Taper Pipe that confluxes respectively, angle between two shunting logarithmic spiral tube hub lines is 120 °, and be arranged symmetrically with relative to the center line of the Taper Pipe that confluxes, the profile line of two shunting logarithmic spiral pipes described in it is one section that intercepts on log spiral.The Valveless piezoelectric pump essence of this kind of structure is still three-way pipe Valveless piezoelectric pump, has relatively high flow resistance coefficient ratio, but loss is still very large, causes piezoelectric pump efficiency low.Publication number is that the Chinese invention patent application of CN102261325A discloses a kind of logarithmic spiral stream pipe Valveless piezoelectric pump, the pump chamber of this Valveless piezoelectric pump is provided with the first logarithmic spiral stream pipe and the first DC tube, first described logarithmic spiral stream pipe one end is connected with pump chamber, and the other end is connected with the fluid inlet be arranged on the pump housing; Described first DC tube one end is connected with pump chamber, and the other end is connected with the fluid output be arranged on the pump housing; The first described logarithmic spiral stream pipe is take fluid inlet as starting point dextrorotation to stream pipe.This kind of structural flow pipe uses overall logarithmic spiral to construct stream pipe, runner is long, all very large along the loss of positive and negative direction when fluid flows in bent flowtube, simultaneously owing to being subject to the effect of centrifugal force, cross section forms Secondary Flow, local resistance is increased, cause secondary flow loss, and DC tube used is without flow resistance characteristic, thus the efficiency of Micropump is lower, structure is relatively complicated in addition, is unfavorable for integrated and microminiaturized.
Ancient Greek Mathematics man and mechanics scientist Archimedes have just done detailed discussion to the geometric properties of plane systematic helical in his treatise " opinion helical ", people are referred to as " Archimedes spiral ", and mathematicians had found again lituus, fermat spiral, logarithmic spiral, hyperbolic conchoid, cylindrical spiral, conical etc. afterwards.Helical flow pipe has superior structural characteristics and good hydrodynamics, is conducive to integrated arrangement, is widely used in the energy, warship, submarine, space station, ship power, petrochemical industry, space flight and aviation, is the field such as electrical cooling and cryogenic technique.
Log spiral (logarithmicspiral) is also called equiangular helical spiral, introduce through Descartes for 1638, afterwards Switzerland mathematician respectively refined-Bernoulli studied it in great detail, finds that the gradually line of logarithmic spiral, involute, hemstitch line, catacustic are all logarithmic spirals.
Summary of the invention
The object of the invention is in order to avoid the deficiency in above-mentioned technology, mainly for the problem existing for existing Valveless piezoelectric pump as movement disorder, the ill effect such as viscous resistance is large, boundary layer is easily separated and propose that a kind of yardstick is little, flowing is stable, energy consumption is low, efficiency is high, vibrate little novel logarithmic spiral tube Valveless piezoelectric pump, expands the application area of spiral flow tube technology in microfluid machinery field simultaneously.
The technical solution used in the present invention is: comprise the pump housing, pump cover, pump cover is provided with upper half part of pump inlet, pump discharge and pump chamber, the pump housing is provided with lower half portion of import buffer cavity, outlet buffer cavity, inlet flow tube, outlet flow pipe and pump chamber, and inlet flow tube is identical with outlet flow tubular construction and coaxially arranged and equidistant with the pump chamber center of circle, inlet flow tube one end is communicated with import buffer cavity, the other end is communicated with pump chamber, outlet flow pipe one end is communicated with pump chamber, the other end is communicated with outlet buffer cavity, import buffer cavity is communicated with pump inlet and pump discharge respectively with outlet buffer cavity, described inlet flow tube is communicated with composition by a logarithm helical flow pipe with the ram's horns be arranged symmetrically with relative to logarithmic spiral stream tube hub line with outlet flow pipe, second, 3rd ram's horns is the DC tube that geometric structure diamete is identical, both are the symmetrical and centerline axis parallel of central axis and logarithmic spiral stream pipe relative to logarithmic spiral stream tube hub line, the first, the 4th ram's horns is semicircular pipe that geometric structure diamete is identical and symmetrical relative to logarithmic spiral stream tube hub line, second ram's horns one end is communicated with the first ram's horns, and the other end is communicated with pump chamber, and the 3rd ram's horns one end is communicated with the 4th ram's horns, and the other end is communicated with pump chamber, and the first, the 4th ram's horns is through with the large end of logarithmic spiral stream pipe respectively.
The profile line of described logarithmic spiral stream pipe is by log spiral equation
the cornerite determined is the logarithmic spiral line segment of 60 °,
be 10 μm, polar angle
be 0 ~ 7270 °, constant
be 0.0025,
for the truth of a matter of natural logarithm function, value is 2.71828; The length of logarithmic spiral stream pipe is 1000 μm ~ 3000 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 120 μm ~ 180 μm, and small end mouth of pipe fillet radius is 40 μm ~ 70 μm.
The invention has the beneficial effects as follows: helical flow Manifold technology and piezoelectric pump technology organically combine by the present invention, profile line is adopted to be the helical flow pipe of log spiral and the tube flowing structure of ram's horns combination, compared with conventional diffusion/collapsible tube Valveless piezoelectric pump and three-way pipe Valveless piezoelectric pump, logarithmic spiral stream pipe has the good nature of radius of curvature linear transitions, by uniform horizontal force when fluid flows wherein, flowing is stable, vibrates little, energy consumption is low, and efficiency is high; When fluid is along inlet flow tube (outlet flow pipe) forward flow, ram's horns is to a certain degree serving pumping action, thus controls boundary layer separation, prevents flow separation, reduces loss, forward flow resistance is reduced, and the flow of logical flow tube increases; When fluid is along inlet flow tube (outlet flow pipe) reverse flow, relative to the reasonable application of the ram's horns that flow direction and wall have certain tilt angle, discrete longitudinal Vortex can be generated, certain flow-disturbing effect is played to main flow, reverse flow resistance is increased, the flow of logical flow tube reduces, then can obtain higher net flow an operation cycle along forward flow direction, improve the efficiency of Valveless piezoelectric pump; Meanwhile, this pump can work at higher frequencies, and anti-electromagnetic interference capability is strong, and flow is easy to control, and can be applicable to Biological Chip, micro-fluidic chip, the fields such as micro-full analytical system and clinical medicine trace transfusion system.
Accompanying drawing explanation
Fig. 1 is the overall structure sectional view of a kind of logarithmic spiral tube Valveless piezoelectric pump of the present invention;
Fig. 2 is that the A-A of Fig. 1 is to sectional drawing;
Fig. 3 is the I partial enlarged drawing of inlet flow tube 7 or outlet flow pipe 9 in Fig. 2;
Fig. 4 is the geometrical construction enlarged view of inlet flow tube 7 or outlet flow pipe 9 in Fig. 2;
Fig. 5 is that the B-B of Fig. 2 is to sectional drawing;
Fig. 6 is M partial enlarged drawing in Fig. 5;
Fig. 7 is the log spiral schematic diagram under the present invention's polar coordinate system used;
Fig. 8 is the fundamental diagram of inlet flow tube 7 suction process in the present invention;
Fig. 9 is the fundamental diagram of inlet flow tube 7 discharge process in the present invention;
Figure 10 is the fundamental diagram of suction process of the present invention;
Figure 11 is the fundamental diagram of discharge process of the present invention;
In figure: 1. pump inlet; 2. pump cover; 3. piezoelectric vibrator; 4. pump chamber; 5. pump discharge; 6. import buffer cavity; 7. inlet flow tube; 8. the pump housing; 9. outlet flow pipe; 10. export buffer cavity; 11. logarithmic spiral tube; 12,13,14,15. ram's hornss.
Embodiment
With reference to Fig. 1, Fig. 2 and Fig. 5, the present invention includes the pump housing 8, pump cover 2 and piezoelectric vibrator 3, the material of the pump housing 8 is silicon chip, the material of pump cover 2 is glass, pump cover 2 utilize laser processing technology process upper half part of pump inlet 1, pump discharge 5 and pump chamber 4, the pump housing 8 utilize dry etch process process lower half portion of import buffer cavity 6, outlet buffer cavity 10, inlet flow tube 7, outlet flow pipe 9 and pump chamber 4, inlet flow tube 7 is identical and coaxially arranged with outlet flow pipe 9 structure, and equidistant with pump chamber 4 center of circle; Inlet flow tube 7 one end is communicated with import buffer cavity 6, the other end is communicated with pump chamber 4, outlet flow pipe 9 one end is communicated with pump chamber 4, the other end is communicated with outlet buffer cavity 10, and import buffer cavity 6 is communicated with pump inlet 1 and pump discharge 5 respectively with outlet buffer cavity 10, piezoelectric vibrator 3 is fixedly bonded in directly over pump cover 2 with binder together with being fitted tightly by anode linkage technique by the pump housing 8 and pump cover 2.
With reference to Fig. 2, Fig. 3, inlet flow tube 7 is communicated with composition by a logarithm helical flow pipe 11 with the ram's horns be arranged symmetrically with relative to logarithmic spiral stream pipe 11 center line with outlet flow pipe 9, wherein, ram's horns 13,14 is DC tube, and both are symmetrical relative to logarithmic spiral stream pipe 11 center line; Ram's horns 12,15 is semicircular pipe, and both are symmetrical relative to logarithmic spiral stream pipe 11 center line; The central axis of ram's horns 13,14 and the centerline axis parallel of logarithmic spiral stream pipe 11; Ram's horns 13 one end is communicated with ram's horns 12, and the other end is communicated with pump chamber 4, and ram's horns 14 one end is communicated with ram's horns 15, and the other end is communicated with pump chamber 4, and ram's horns 12,15 is through with the large end of logarithmic spiral stream pipe 11 respectively; The geometric structure diamete of ram's horns 13,14 is identical, and the geometric structure diamete of ram's horns 12,15 is identical.
With reference to Fig. 4, Fig. 6 and Fig. 7, the profile line of logarithmic spiral stream pipe 11 is by log spiral equation
the cornerite φ determined is the logarithmic spiral line segment MN of 60 °, wherein
be 10 μm, polar angle
be 0 ~ 7270 °, constant
be 0.0025,
for the truth of a matter of natural logarithm function, value is 2.71828; The length of logarithmic spiral stream pipe 11
it is 1000 μm ~ 3000 μm, highly
be 80 μm ~ 150 μm, the smallest cross-sectional width of small end
be 120 μm ~ 180 μm, small end mouth of pipe fillet radius
it is 40 μm ~ 70 μm; The central axis of ram's horns 13,14 and the distance of logarithmic spiral stream pipe 11 central axis
be 480 μm ~ 1380 μm, length
be 330 μm ~ 1000 μm, width
for
, highly
with the height of logarithmic spiral stream pipe 11
identical; Ram's horns 12,15 is semicircular pipe, and its center of circle is to the distance of logarithmic spiral stream pipe 11 central axis
be 330 μm ~ 920 μm, interior semicircle radius
be 120 μm ~ 370 μm, outer semicircle radius
it is 180 μm ~ 540 μm.
With reference to Fig. 8, Fig. 9, Figure 10 and Figure 11, working principle of the present invention is: load at piezoelectric vibrator 3 two ends alternating voltage signal (sinusoidal or square-wave signal) afterwards piezoelectric vibrator 3 to occur bending and deformation and with electric voltage frequency up-down vibration, this vibration drives the fluid flowing in pump chamber 4; The motion of piezoelectric vibrator 3 can be divided into upwards displacement movement and downward displacement movement, then in pump chamber 4, flow process is just divided into suction process and discharge process accordingly.When piezoelectric vibrator 3 upwards vibrates, pump chamber 4 volume increases, pressure in pump chamber 4 reduces and is less than outside pressure, thus fluid flows into pump chamber 4 by pump inlet 1 and pump discharge 5 through inlet flow tube 7 and outlet flow pipe 9, at this moment piezoelectric pump is in suction condition, because inlet flow tube 7 is different with the flow resistance coefficient on outlet flow pipe 9 positive and negative direction, make the flow being flow to pump chamber 4 by pump inlet 1 through inlet flow tube 7
be greater than the flow being flow to pump chamber 4 by pump discharge 5 through outlet flow pipe 9
, because inlet flow tube 7 and outlet flow pipe 9 all adopt profile line to be helical flow pipe 11 and the ram's horns 12 of log spiral, 13, 14, the tube flowing structure of 15 combinations, therefore in this suction process, fluid flows stable when flowing through logarithmic spiral stream pipe 11 by import buffer cavity 6, energy loss is little, and be communicated with the ram's horns 12 of logarithmic spiral stream pipe 11 and pump chamber 4, 13, 14, 15 can enter pump chamber 4 the fluid conduction of logarithmic spiral stream pipe 11 wall wish stagnation, serve pumping action to a certain extent, this pumping action can make the fluid in logarithmic spiral stream pipe 11 boundary layer overcome the effect of reverse differential pressure and continue to flow to pump chamber 4, thus prevent to some extent boundary layer separation, reach the effect reducing viscous friction drag, make the flow being flowed into pump chamber 4 by inlet flow tube 7
increase, moving to pump chamber 4 center by under the effect of ram's horns 12,13,14,15 fluid because sudden expansion acts on a pair whirlpool that logarithmic spiral stream pipe 11 goes out interruption-forming simultaneously, in moving process, the dissipation in whirlpool becomes slow, vorticity diminishes, effective range increases, thus suppresses or delay the generation of flow separation further, same, fluid by export buffer cavity 10 flow through logarithmic spiral stream pipe 11 time, compared to straight wall flow pipe (diffusion/collapsible tube), logarithmic spiral stream pipe 11 pairs of flow resistances are larger, and fluid can generate discrete longitudinal Vortex when flowing through ram's horns 12,13,14,15, certain agitation is played to main flow, reverse flow resistance is increased, the flow of logical flow tube
further reduction, the flow to amount total at suction process piezoelectric pump is
, when piezoelectric vibrator 3 vibrates downwards, pump chamber 4 volume reduces, pressure increase in pump chamber 4 and be greater than outside pressure, thus the inlet flow tube 7 of fluid through pump chamber 4 both sides and outlet flow pipe 9 flow out pump chamber 4 by pump inlet 1 and pump discharge 5, at this moment piezoelectric pump is in discharge state, this process is contrary with pump suction process, the flow that pump chamber 4 is discharged by pump inlet 1 through inlet flow tube 7
be less than the flow of being discharged by pump discharge 5 through outlet flow pipe 9 by pump chamber 4
, in total discharge of discharge process piezoelectric pump be
, the amplitude of the present invention's piezoelectric vibrator 3 in suction process and discharge process is certain, and the flow flowing into pump chamber 4 is equal with the flow flowing out pump chamber 4, is designated as
, then have
, a discharge process and suction process composition one-period, the pump discharge of one-period is flow out the flow of pump chamber 4 and the difference of the flow of inflow pump chamber 4 by outlet flow pipe 9
, or flow into pump chamber 4 flow and the difference of flow flowing out pump chamber 4 by inlet flow tube 7
, then pump discharge in one-period
for:
，
This value is greater than zero, therefore Valveless piezoelectric pump is within an operation cycle, the flow flowing into pump chamber 4 by inlet flow tube 7 in suction process is greater than the flow of discharging in discharge process, outlet flow pipe 9 is then just in time contrary, namely the flow flowing into pump chamber 4 in suction process is less than the flow of discharging in discharge process, finally achieve the one-way flow of fluid, complete pump function.
Claims (3)
1. a logarithmic spiral tube Valveless piezoelectric pump, comprise the pump housing (8), pump cover (2), pump cover (2) is provided with upper half part of pump inlet (1), pump discharge (5) and pump chamber (4), the pump housing (8) is provided with lower half portion of import buffer cavity (6), outlet buffer cavity (10), inlet flow tube (7), outlet flow pipe (9) and pump chamber (4), and inlet flow tube (7) is identical with the structure of outlet flow pipe (9) and coaxially arranged and equidistant with pump chamber (4) center of circle, inlet flow tube (7) one end is communicated with import buffer cavity (6), the other end is communicated with pump chamber (4), outlet flow pipe (9) one end is communicated with pump chamber (4), the other end is communicated with outlet buffer cavity (10), import buffer cavity (6) is communicated with pump inlet (1) and pump discharge (5) respectively with outlet buffer cavity (10), inlet flow tube (7) is communicated with composition by a logarithm helical flow pipe (11) with the ram's horns be arranged symmetrically with relative to logarithmic spiral stream pipe (11) center line with outlet flow pipe (9), it is characterized in that: second, 3rd ram's horns (13, 14) be DC tube that geometric structure diamete is identical, both are the symmetrical and centerline axis parallel of central axis and logarithmic spiral stream pipe (11) relative to logarithmic spiral stream pipe (11) center line, the first, the 4th ram's horns (12,15) is relative to logarithmic spiral stream pipe (11) center line symmetrical for the identical semicircular pipe of geometric structure diamete, second ram's horns (13) one end is communicated with the first ram's horns (12), the other end is communicated with pump chamber (4), 3rd ram's horns (14) one end is communicated with the 4th ram's horns (15), the other end is communicated with pump chamber (4), and the first, the 4th ram's horns (12,15) is through with the large end of logarithmic spiral stream pipe (11) respectively.
2. a kind of logarithmic spiral tube Valveless piezoelectric pump according to claim 1, is characterized in that: the profile line of described logarithmic spiral stream pipe (11) is by log spiral equation
the cornerite determined is the logarithmic spiral line segment of 60 °,
be 10 μm, polar angle
be 0 ~ 7270 °, constant
be 0.0025,
for the truth of a matter of natural logarithm function, value is 2.71828; The length of logarithmic spiral stream pipe (11) is 1000 μm ~ 3000 μm, is highly 80 μm ~ 150 μm, and the smallest cross-sectional width of small end is 120 μm ~ 180 μm, and small end mouth of pipe fillet radius is 40 μm ~ 70 μm.
3. a kind of logarithmic spiral tube Valveless piezoelectric pump according to claim 2, is characterized in that: the central axis of second, third ram's horns (13,14) and the distance of logarithmic spiral stream pipe (11) central axis are 480 μm ~ 1380 μm, length
be 330 μm ~ 1000 μm, width is
, height is identical with the height of logarithmic spiral stream pipe (11); The first, the center of circle of the 4th ram's horns (12,15) is 330 μm ~ 920 μm to the distance of logarithmic spiral stream pipe (11) central axis, and interior semicircle radius is 120 μm ~ 370 μm, and outer semicircle radius is 180 μm ~ 540 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555394.2A CN103644104B (en) | 2013-11-11 | 2013-11-11 | A kind of logarithmic spiral tube Valveless piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310555394.2A CN103644104B (en) | 2013-11-11 | 2013-11-11 | A kind of logarithmic spiral tube Valveless piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103644104A CN103644104A (en) | 2014-03-19 |
| CN103644104B true CN103644104B (en) | 2016-03-02 |
Family
ID=50249372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310555394.2A Expired - Fee Related CN103644104B (en) | 2013-11-11 | 2013-11-11 | A kind of logarithmic spiral tube Valveless piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103644104B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110160834A (en) * | 2019-05-24 | 2019-08-23 | 深圳市前海微升科学股份有限公司 | A kind of method and device of micro quantitative determination sampling |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5094594A (en) * | 1990-04-23 | 1992-03-10 | Genomyx, Incorporated | Piezoelectric pumping device |
| CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
| CN102261325A (en) * | 2011-06-21 | 2011-11-30 | 南京航空航天大学 | Logarithmic solenoid valve pressure-free electric pump |
| CN202165255U (en) * | 2011-06-21 | 2012-03-14 | 无锡长辉机电科技有限公司 | Interlocking spiral flow pipe valve-free piezoelectric pump |
| CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
| CN202707436U (en) * | 2012-05-02 | 2013-01-30 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral tubes |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101495A (en) * | 2006-10-18 | 2008-05-01 | Alps Electric Co Ltd | Diaphragm pump |
-
2013
- 2013-11-11 CN CN201310555394.2A patent/CN103644104B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5094594A (en) * | 1990-04-23 | 1992-03-10 | Genomyx, Incorporated | Piezoelectric pumping device |
| CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
| CN102261325A (en) * | 2011-06-21 | 2011-11-30 | 南京航空航天大学 | Logarithmic solenoid valve pressure-free electric pump |
| CN202165255U (en) * | 2011-06-21 | 2012-03-14 | 无锡长辉机电科技有限公司 | Interlocking spiral flow pipe valve-free piezoelectric pump |
| CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
| CN202707436U (en) * | 2012-05-02 | 2013-01-30 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral tubes |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103644104A (en) | 2014-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101975154B (en) | Valve-free piezoelectric pump of logarithmic spiral combined tube | |
| CN103170265B (en) | A kind of Piezoelectric micro-mixer | |
| CN102691648A (en) | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe | |
| CN101975153B (en) | Valveless piezoelectric pump of elliptical combined pipe | |
| CN102691647A (en) | Valveless piezoelectric pump with, axially symmetric elliptic tubes | |
| CN103016318B (en) | A kind of Valveless piezoelectric pump based on wall attachment effect | |
| CN102135087B (en) | Diffusion/contraction combined pipe valveless piezoelectric pump | |
| CN103644105B (en) | A kind of Archimedes spiral pipe Valveless piezoelectric pump | |
| CN103644104B (en) | A kind of logarithmic spiral tube Valveless piezoelectric pump | |
| CN103758734B (en) | A kind of fermat spiral pipe Valveless piezoelectric pump | |
| CN103644103B (en) | A kind of lituus pipe Valveless piezoelectric pump | |
| CN103629089B (en) | A kind of hyperbolic helical-tube Valveless piezoelectric pump | |
| CN103644102B (en) | A kind of two-chamber valveless piezoelectric pump of three-port structure | |
| CN102230465B (en) | Valveless piezoelectric pump of Archimedes helical flow pipe | |
| CN103016317B (en) | Three-cavity valveless piezoelectric pump based on wall-attachment effect | |
| CN103752200A (en) | Novel piezoelectric valveless micromixer | |
| CN103644100B (en) | A kind of positive ring lock spool Valveless piezoelectric pump | |
| CN203525623U (en) | Piezoelectric micromixer | |
| CN203248339U (en) | Three-cavity valveless piezoelectric pump based on wall-attachment effect | |
| CN202165255U (en) | Interlocking spiral flow pipe valve-free piezoelectric pump | |
| CN208380824U (en) | A kind of Valveless piezoelectric pump equipped with three-dimensional flow tube | |
| CN2818844Y (en) | Piezo-electric pump without valve | |
| CN103644099B (en) | A kind of two-chamber valveless piezoelectric pump based on wall attachment effect | |
| CN102338066B (en) | Valveless piezoelectric pump with lituus flow pipes | |
| CN1743670A (en) | Built-in corrugated channel valveless piezoelectric pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160302 Termination date: 20181111 |