CN103894128B - The automatic reaction chip of a kind of piezoelectric type - Google Patents
The automatic reaction chip of a kind of piezoelectric type Download PDFInfo
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- CN103894128B CN103894128B CN201410163601.4A CN201410163601A CN103894128B CN 103894128 B CN103894128 B CN 103894128B CN 201410163601 A CN201410163601 A CN 201410163601A CN 103894128 B CN103894128 B CN 103894128B
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Abstract
The invention discloses the automatic reaction chip of a kind of piezoelectric type, be provided with several layers from top to bottom, be followed successively by micro-mixer layer, first insulating barrier, transducer layer and the second insulating barrier, wherein be integrated with vibration mixing pit in micro-mixer layer, first insulating barrier is located between micro-mixer layer and transducer layer, interdigital transducer and chip electrode is integrated with in transducer layer, interdigital transducer is located at immediately below vibration mixing pit, interdigital transducer is corresponding to the shape of vibration mixing pit, fluid in vibration mixing pit vibrates under the effect of interdigital transducer, interdigital transducer is connected with chip electrode, chip electrode is connected with response controller, response controller is controlled by plug-in, beneficial effect: be a kind of collection mixing, reaction, temperature control, stir the multi-functional full-automatic novel micro fluid reaction chip in one, greatly improve the scope of application of micro fluid reaction chip, and be not only confined to the micro-biochemical reaction under room temperature condition.
Description
Technical field
The present invention relates to a kind of reaction chip, the particularly automatic reaction chip of a kind of piezoelectric type automatically.
Background technology
At present, micro fluid reaction chip is the novel biochemical reaction technology that MEMS field development in recent years is got up, and owing to can complete reaction under smaller size smaller, reagent dosage is little, reaction efficiency is high, it is effective to prepare, and is subject to the extensive concern of scholars.
Micro fluid reaction chip mainly contains active and passive type two kinds, wherein passive type relies on moving freely of microfluid to realize mixing, general needs add groove in runner, the two dimension such as bent angle or three-dimensional structure strengthen mixed effect, there is runner long, volume is large, the problems such as course of reaction is uncontrollable, active, rely on micro-stirring, pressure disturbance, the external energies such as acoustic perturbation act on course of reaction, good mixing effect, it is one of main method constructing micro fluid reaction chip at present, but single active disturbance can only produce single mixed effect, whole complex chemical reaction cannot be realized.Be in the patent of invention of " a kind of Piezoelectric Driving micro-mixer and preparation method thereof and control method " of 201210175152.6 in the patent No., piezoelectric micropump is introduced micro fluid reaction chip field by the people such as Jilin University Liu monarch first, propose a kind of active hybrid mode utilizing piezoelectric pump to drive pulsation input, demonstrate piezoelectric micropump and realize the advantage in microfluid pulsation input and controlled mixing, but it is only a mixing arrangement, course of reaction complexity cannot be completed, reaction time is long, initiatively need stir disturbance, the whole chemical reaction of strict temperature control (liquid phase synthesis of such as noble metal nano particles), the micro-fluid reactor of other active form also also exists similar defect.And the present invention proposes a kind of micro fluid reaction chip of two initiatively disturbance, pulsation input being acted on respectively with vibrational perturbation and mix and course of reaction, is a kind ofly integrate mixing, reaction, temperature control, the multi-functional full-automatic novel micro fluid reaction chip that stirs.
Summary of the invention
Main purpose of the present invention can only realize pulsation mixing to solve existing piezoelectric type micro-fluid reactor, cannot complete the whole chemical reaction that course of reaction complexity, reaction time are long, initiatively need stir disturbance, strict temperature control (liquid phase synthesis of such as noble metal nano particles).
Another object of the present invention be in order to solve existing interdigital transducer be applied in micro fluid reaction chip can only carry out heating, do not directly act on fluid reaction process or only by single acoustic perturbation realize the complicated integral structure of initiatively mixing and relevant apparatus, volume comparatively large, be not easy to integrated and microminiaturized problem.
The present invention in order to achieve the above object, solve the problem and the automatic reaction chip of a kind of piezoelectric type provided, the chemical reaction stage after utilizing interdigital transducer generation vibrational perturbation to act on microring array is proposed first, and realize multiple stirring, disturbance mode by active control, be a kind ofly integrate mixing, reaction, temperature control, the multi-functional full-automatic novel micro fluid reaction chip that stirs.
The body of the automatic reaction chip of piezoelectric type of the present invention is laminated type stepped construction, be provided with several layers from top to bottom, be followed successively by micro-mixer layer, first insulating barrier, transducer layer and the second insulating barrier, wherein be integrated with vibration mixing pit in micro-mixer layer, first insulating barrier is located between micro-mixer layer and transducer layer, interdigital transducer and chip electrode is integrated with in transducer layer, interdigital transducer is located at immediately below vibration mixing pit, interdigital transducer is corresponding to the shape of vibration mixing pit, fluid in vibration mixing pit vibrates under the effect of interdigital transducer, interdigital transducer is connected with chip electrode, chip electrode is connected with response controller, response controller is controlled by plug-in, response controller provides numeric type voltage signal to control interdigital transducer work by chip electrode, second insulating barrier is located at the bottom of transducer layer.
Vibration mixing pit is corresponding with the shape of interdigital transducer, the corresponding foursquare interdigital transducer of circular vibration mixing pit, the corresponding rectangular interdigital transducer of rectangular vibration mixing pit.
Piezoelectric micropump, reaction chip import, reaction chip outlet and microring array runner is also integrated with in micro-mixer layer, the inner chamber of piezoelectric micropump and reaction chip inlet communication, and the inner chamber of piezoelectric micropump is communicated with vibration mixing pit by microring array runner, vibration mixing pit and reaction chip outlet, piezoelectric micropump is connected with the chip electrode in transducer layer, and response controller provides numeric type voltage signal to control the work of piezoelectric micropump by chip electrode.
Micro-mixer layer is the hyaline layer that PDMS material is made.
Transducer layer is a piezoelectric substrate, and piezoelectric substrate is synthetic quartz or lithium niobate or lithium tantalate or bismuth-germanate single crystal material.
Interdigital transducer is obtained in transducer layer by microelectronic processing technology.
The bottom of the second insulating barrier is provided with temperature control layer, and temperature control layer is integrated with platinum heating film, temperature control layer is connected with the chip electrode in transducer layer, and response controller controls the work of temperature control layer by chip electrode.
Piezoelectric micropump is provided with two or several, and the pump body structure of piezoelectric micropump is single cavity or multi-cavity structure.
The version of microring array runner is Y shape or T-shaped or star.
When piezoelectric micropump is provided with two, the version of the microring array runner corresponded is Y shape or T-shaped; When piezoelectric micropump is provided with multiple, the version of the microring array runner corresponded is the star of different structure form.
Operation principle of the present invention:
Piezoelectric micropump utilizes the of reciprocating vibration of piezoelectric vibrator in pump chamber, produce malleation or negative pressure, simultaneously in conjunction with the coordinated movement of various economic factors that check valve opens and closes, finally realize the one-way flow of pump chamber inner fluid, regulate the voltage of piezoelectric micropump, frequency, waveform and phase place etc. to realize comprising low-and high-frequency pulsation by response controller and be blended in interior various different blended syntypes, thus the pulsation realizing microfluid is injected and mixing.
Interdigital transducer is according to inverse piezoelectric effect, be mechanical oscillation by the transform electrical signals of input, act on the fluid in vibration mixing pit, microfluid is made to produce vibration, fluid is produced and stirs or spring up or the effect of lattice vibration, interdigital transducer can produce the multiple modal vibrations of row ripple or standing wave under the excitation of response controller, and then causes Ordered and the hybrid reaction of two-phase (or heterogeneous) microfluid in vibration mixing pit.
The concrete mode of action of interdigital transducer is as described below:
Mode one: as shown in Figure 3, vibration mixing pit is circular, its corresponding interdigital transducer is foursquare, interdigital transducer forms foursquare version by four same orthogonal layouts of junior unit, the length of side of each junior unit must not be greater than the radius of circular vibration mixing pit, and each junior unit is by periodic arrangement and forms with the many electrodes that busbar is alternately connected.The vorticity wave that this mode produces carries out to the microfluid in vibration mixing pit the effect that disturbance can produce stirring, makes hybrid reaction more abundant, forms better reaction effect; And the perturbation direction of vorticity wave can be regulated by response controller, its direction can also to be adjusted to pulsation, to form better reaction effect.The effect of the synthesized nano particle diameter of regulation and control and pattern can also be played especially except intensified response effect for the synthesis of noble metal or other nano particles.
Mode two: as shown in Figure 4, vibration mixing pit is rectangular, its corresponding interdigital transducer is rectangular, the interdigital transducer of its correspondence is made up of four rectangular junior units, be specially that two junior units are parallelly placed in centre position, two other perpendicularly with it is placed in the left and right sides respectively, each junior unit is by periodic arrangement and forms with the many electrodes that busbar is alternately connected.This mode can produce bore or lattice wave carries out disturbance to the microfluid in mixing pit, only allow 2 of horizontal direction junior unit work can produce the bore of vertical direction, only allow 2 of vertical direction junior unit work can produce the bore of horizontal direction by regulation and control, 4 junior units ripple that all work can make two vertical direction propagate is allowed to intersect formation lattice wave, in each crosspoint, near zone has identical bumpy weather, and reaction is evenly carried out.Advantage for this mode of synthesis of noble metal or other nano particles is also clearly: nucleus evenly shakes on each crosspoint by the mode of oscillation that this perturbation scheme is formed, hinder deposition and the gathering of nucleus, and noble metal nano particles is had regular, a uniform growing environment, thus the nano particle that synthesizing monodisperse is good.
Mode three; Above-mentioned two kinds of modes can also be cascaded, microring array flow passage is passed through by circular vibration mixing pit and rectangle vibration mixing pit, and often kind of interdigital transducer vibrating mixing pit corresponding lays respectively at immediately below it, and the perturbation action of the two can not disturb mutually.Under this mode effect, microfluid is first subject to the stirring of vorticity wave in circular vibration mixing pit, make mixing more fully, reaction is more thorough, form more nucleus, then the fluid with a large amount of nucleus flows into rectangle vibration mixing pit, and the mode of oscillation in this pond makes nucleus be uniformly distributed on the crosspoint of lattice wave, makes nano particle have a uniform growth environment, obstruction nano particle deposits, the nano particle of synthesis uniform particle diameter.
Piezoelectric micropump of the present invention is by the assembling of prior art, and therefore concrete model and specification do not repeat further.
Beneficial effect of the present invention:
1, the present invention utilizes interdigital transducer to produce mechanical oscillation, directly act on the microfluid in vibration mixing pit, make it under the effect of vibrational perturbation, proceed mixed chemical reaction, and realize multiple stirring, disturbance mode by active control, be a kind ofly integrate mixing, reaction, temperature control, the multi-functional full-automatic novel micro fluid reaction chip that stirs.
2, pulsation is injected and is common to micro fluid reaction process with vibrational perturbation two kinds of active modes by the present invention, is that a kind of initiative is stronger, the Novel active micro fluid reaction chip of process control; Particularly long for the reaction time, course of reaction is complicated, initiatively need stir disturbance, chemical reaction the present invention of strict temperature control (the liquid phase synthesis reaction of such as noble metal nano particles) has larger advantage;
3, for the synthetic reaction of noble metal or other nano particles, the nucleation and growth process acting on nano particle with vibrational perturbation is respectively injected in pulsation by the present invention, and hinder in the nuclei grow stage or destroy deposition and the generation assembled, the growth conditions of improvement or each nucleus balanced, and then form even, the regular growing environment of nano particle, because of but a kind of specific aim is stronger, effect controllable type micro fluid reaction chip more significantly;
4, the present invention's piezoelectric micropump diameter used is not more than 3mm at below φ 10mm, thickness, and output pressure can reach 20kPa (being equivalent to 2 meter water columns).The basis of microminiaturization can also meet the requirement of the large pressure needed for pulsation injection, high flow capacity resolution ratio;
5, the present invention adopt have that frequency is high, volume is little, the interdigital transducer of stable performance and feature low in energy consumption to realize vibrational perturbation, be more conducive to realize the integrated and microminiaturized of whole reaction chip system;
6, the present invention takes laminated type stepped construction to design, and makes reaction chip in length and width size, accomplish farthest microminiaturization and is more conducive to the realization of reaction chip function.The orlop of reaction chip is provided with temperature control layer, for adjusting the bulk temperature of reaction chip, thus the microfluid biochemical reaction that can realize under condition of different temperatures, greatly improve the scope of application of micro fluid reaction chip, and be not only confined to the micro-biochemical reaction under room temperature condition.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is decomposition texture schematic diagram of the present invention.
The layout schematic diagram of Fig. 3 to be vibration mixing pit of the present invention be circular configuration.
The layout schematic diagram of Fig. 4 to be vibration mixing pit of the present invention be rectangle structure.
1, micro-mixer layer 2, first insulating barrier 3, transducer layer 4, second insulating barrier
5, temperature control layer 6, response controller 11, piezoelectric micropump 12, reaction chip import
13, reaction chip outlet 14, microring array runner 15, vibration mixing pit
31, interdigital transducer 32, chip electrode.
Detailed description of the invention
Refer to shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4:
The body of the automatic reaction chip of piezoelectric type of the present invention is laminated type stepped construction, be provided with several layers from top to bottom, be followed successively by micro-mixer layer 1, first insulating barrier 2, transducer layer 3 and the second insulating barrier 4, wherein be integrated with vibration mixing pit 15 in micro-mixer layer 1, first insulating barrier 2 is located between micro-mixer layer 1 and transducer layer 3, interdigital transducer 31 and chip electrode 32 is integrated with in transducer layer 3, interdigital transducer 31 is located at immediately below vibration mixing pit 15, fluid in vibration mixing pit 15 vibrates under the effect of interdigital transducer 31, interdigital transducer 31 is connected with chip electrode 32, chip electrode 32 is connected with response controller 6, response controller 6 is controlled by plug-in, response controller 6 provides numeric type voltage signal to control interdigital transducer 31 by chip electrode 32 and works, second insulating barrier 4 is located at the bottom of transducer layer 3.
Vibration mixing pit 15 is corresponding with the shape of interdigital transducer 31, the circular corresponding foursquare interdigital transducer 31 of vibration mixing pit 15, the corresponding rectangular interdigital transducer 31 of rectangular vibration mixing pit 15.
Piezoelectric micropump 11, reaction chip import 12, reaction chip outlet 13 and microring array runner 14 is also integrated with in micro-mixer layer 1, the inner chamber of piezoelectric micropump 11 is communicated with reaction chip import 12, and the inner chamber of piezoelectric micropump 11 is communicated with vibration mixing pit 15 by microring array runner 14, vibration mixing pit 15 exports 13 with reaction chip and is communicated with, piezoelectric micropump 11 is connected with the chip electrode 32 in transducer layer 3, and response controller 6 provides numeric type voltage signal to control the work of piezoelectric micropump 11 by chip electrode 32.
The hyaline layer that micro-mixer layer 1 is made for PDMS material.
Transducer layer 3 is a piezoelectric substrate, and piezoelectric substrate is synthetic quartz or lithium niobate or lithium tantalate or bismuth-germanate single crystal material.
Interdigital transducer 31 is obtained in transducer layer 3 by microelectronic processing technology.
The bottom of the second insulating barrier 4 is provided with temperature control layer 5, and temperature control layer 5 is integrated with platinum heating film, temperature control layer 5 is connected with the chip electrode 32 in transducer layer 3, and response controller 6 controls temperature control layer 5 by chip electrode 32 and works.
Piezoelectric micropump 11 is provided with two or several, and the pump body structure of piezoelectric micropump 11 is single cavity or multi-cavity structure.
The version of microring array runner 14 is Y shape or T-shaped or star.
When piezoelectric micropump 11 is provided with two, the version of the microring array runner 14 corresponded is Y shape or T-shaped; When piezoelectric micropump 11 is provided with multiple, the version of the microring array runner 14 corresponded is the star of different structure form.
Operation principle of the present invention:
Piezoelectric micropump 11 utilizes the of reciprocating vibration of piezoelectric vibrator in pump chamber, produce malleation or negative pressure, simultaneously in conjunction with the coordinated movement of various economic factors that check valve opens and closes, finally realize the one-way flow of pump chamber inner fluid, regulate the voltage of piezoelectric micropump 11, frequency, waveform and phase place etc. to realize comprising low-and high-frequency pulsation by response controller 6 and be blended in interior various different blended syntypes, thus the pulsation realizing microfluid is injected and mixing.
Interdigital transducer 31 is according to inverse piezoelectric effect, be mechanical oscillation by the transform electrical signals of input, act on the fluid in vibration mixing pit 15, microfluid is made to produce vibration, fluid is produced and stirs or spring up or the effect of lattice vibration, interdigital transducer 31 can produce the multiple modal vibrations of row ripple or standing wave under the excitation of response controller 6, and then causes Ordered and the hybrid reaction of two-phase (or heterogeneous) microfluid in vibration mixing pit 15.
The concrete mode of action of interdigital transducer 31 is as described below:
Mode one: as shown in Figure 3, vibration mixing pit 15 is circular, its corresponding interdigital transducer 31 is foursquare, interdigital transducer 31 forms foursquare version by four same orthogonal layouts of junior unit, the length of side of each junior unit must not be greater than the radius of circular vibration mixing pit, and each junior unit is by periodic arrangement and forms with the many electrodes that busbar is alternately connected.The vorticity wave that this mode produces carries out to the microfluid in vibration mixing pit 15 effect that disturbance can produce stirring, makes hybrid reaction more abundant, forms better reaction effect; And the perturbation direction of vorticity wave can be regulated by response controller 6, its direction can also to be adjusted to pulsation, form better reaction effect, the effect of the synthesized nano particle diameter of regulation and control and pattern can also be played especially for the synthesis of noble metal or other nano particles except intensified response effect.
Mode two: as shown in Figure 4, vibration mixing pit 15 is rectangular, its corresponding interdigital transducer 31 is rectangular, the interdigital transducer 31 of its correspondence is made up of four rectangular junior units, be specially that two junior units are parallelly placed in centre position, two other perpendicularly with it is placed in the left and right sides respectively, each junior unit is by periodic arrangement and forms with the many electrodes that busbar is alternately connected.This mode can produce bore or lattice wave carries out disturbance to the microfluid in mixing pit, only allow 2 of horizontal direction junior unit work can produce the bore of vertical direction, only allow 2 of vertical direction junior unit work can produce the bore of horizontal direction by regulation and control, 4 junior units ripple that all work can make two vertical direction propagate is allowed to intersect formation lattice wave, in each crosspoint, near zone has identical bumpy weather, and reaction is evenly carried out; Advantage for this mode of synthesis of noble metal or other nano particles is also clearly: nucleus evenly shakes on each crosspoint by the mode of oscillation that this perturbation scheme is formed, hinder deposition and the gathering of nucleus, and nano particle is had regular, a uniform growing environment, thus the nano particle that synthesizing monodisperse is good.
Mode three; Above-mentioned two kinds of modes can also be cascaded, be communicated with by microring array runner 14 with rectangle vibration mixing pit 15 by circular vibration mixing pit 15, and often kind of interdigital transducer 31 vibrating mixing pit 15 corresponding lays respectively at immediately below it, and the perturbation action of the two can not disturb mutually.Under this mode effect, microfluid is first subject to the stirring of vorticity wave in circular vibration mixing pit 15, make mixing more fully, reaction is more thorough, form more nucleus, then the fluid with a large amount of nucleus flows into rectangle vibration mixing pit 15, and the mode of oscillation in this pond makes nucleus be uniformly distributed on the crosspoint of lattice wave, makes nano particle have a uniform growth environment, obstruction nano particle deposits, the nano particle of synthesis uniform particle diameter.
Piezoelectric micropump 11 of the present invention is by the assembling of prior art, and therefore concrete model and specification do not repeat further.
With the embodiment that synthesizes of golden nanometer particle, the present invention is further described below.
The liquid phase synthesis of golden nanometer particle comprises gold atom precipitation, nucleation and growing three processes.The present invention acts on the nucleation and growth process of golden nanometer particle respectively with pulse injection and vibrational perturbation, solve the nucleus bunchy in its building-up process, deposit and the problem affecting nano particle homoepitaxial such as to gather, improve the growth conditions of each nucleus balanced, and then form the evenly regular growing environment of gold nano grain.Double pump structure is chosen in pulsation injection, be used for respectively carrying gold chloride and sodium citrate solution, vibrational perturbation is rectangle vibration mixing pit 15 and its corresponding interdigital transducer 31, whole reaction chip body is connected with response controller 6 by chip electrode 32, then in two reaction chip imports 12, gold chloride and sodium citrate solution is put into respectively, button press after confirming, by the temperature regulating response controller 6 to regulate whole chip, by response controller 6, piezoelectric micropump 11 and interdigital transducer 31 are all started working according to the plug-in of response controller 6 equally, until complete whole course of reaction, obtain qualified golden nanometer particle.
Can illustrate that the present invention is long for the reaction time from embodiment above, course of reaction sends out the chemical reaction of (liquid phase synthesis etc. of such as noble metal nano particles) assorted and have unique advantage, and it is simple to operate, intelligent, all in one machine, just can obtain the good nano particle of the monodispersity of different-shape particle diameter by choosing the embedded different control programs of response controller 6.
Claims (1)
1. the automatic reaction chip of piezoelectric type, body is laminated type stepped construction, be provided with several layers from top to bottom, be followed successively by micro-mixer layer, first insulating barrier, transducer layer and the second insulating barrier, wherein be integrated with vibration mixing pit in micro-mixer layer, first insulating barrier is located between micro-mixer layer and transducer layer, interdigital transducer and chip electrode is integrated with in transducer layer, interdigital transducer is located at immediately below vibration mixing pit, interdigital transducer is corresponding to the shape of vibration mixing pit, fluid in vibration mixing pit vibrates under the effect of interdigital transducer, interdigital transducer is connected with chip electrode, chip electrode is connected with response controller, response controller is controlled by plug-in, response controller provides numeric type voltage signal to control interdigital transducer work by chip electrode, second insulating barrier is located at the bottom of transducer layer, it is characterized in that: the bottom of the second described insulating barrier is provided with temperature control layer, temperature control layer is integrated with platinum heating film, temperature control layer is connected with the chip electrode in transducer layer, response controller controls the work of temperature control layer by chip electrode.
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| CN103894128B (en) * | 2014-04-22 | 2015-11-11 | 吉林大学 | The automatic reaction chip of a kind of piezoelectric type |
| CN104998704B (en) * | 2015-07-29 | 2016-11-30 | 西安交通大学 | A kind of integrated drop formation chip based on piezoelectric film pump and preparation method thereof |
| CN105927519B (en) * | 2016-06-22 | 2018-01-19 | 吉林大学 | A kind of device of exciting absorbing traveling wave guiding microfluid transport |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070140041A1 (en) * | 2002-10-03 | 2007-06-21 | Protasis Corporation | Fluid-handling apparatus and methods |
| CN202962353U (en) * | 2012-05-31 | 2013-06-05 | 吉林大学 | Piezoelectric actuation micro mixer |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
| CN103894128A (en) * | 2014-04-22 | 2014-07-02 | 吉林大学 | Piezoelectric type automatic reaction chip |
-
2014
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070140041A1 (en) * | 2002-10-03 | 2007-06-21 | Protasis Corporation | Fluid-handling apparatus and methods |
| CN202962353U (en) * | 2012-05-31 | 2013-06-05 | 吉林大学 | Piezoelectric actuation micro mixer |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
| CN103894128A (en) * | 2014-04-22 | 2014-07-02 | 吉林大学 | Piezoelectric type automatic reaction chip |
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Address after: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee after: Changzhou Weitu Fluid Technology Co. Ltd. Address before: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee before: Changzhou Weitu Fluid Technology Co. Ltd. |