CN103894128A - Piezoelectric type automatic reaction chip - Google Patents
Piezoelectric type automatic reaction chip Download PDFInfo
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- CN103894128A CN103894128A CN201410163601.4A CN201410163601A CN103894128A CN 103894128 A CN103894128 A CN 103894128A CN 201410163601 A CN201410163601 A CN 201410163601A CN 103894128 A CN103894128 A CN 103894128A
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Abstract
The invention discloses a piezoelectric type automatic reaction chip which is sequentially provided with a micro-mixer layer, a first insulating layer, a transducer layer and a second insulating layer from top to bottom, wherein a vibration mixing tank is integrated in the micro-mixer layer; the first insulating layer is arranged between the micro-mixer layer and the transducer layer; a fork finger type transducer and a chip electrode are integrated in the transducer layer; the fork finger type transducer is arranged just under the vibration mixing tank; the shape of the fork finger type transducer corresponds to that of the vibration mixing tank; fluid in the vibration mixing tank vibrates under the action of the fork finger type transducer; the fork finger type transducer is connected with the chip electrode; the chip electrode is connected with a reaction controller; the reaction controller is controlled by an internal program. The piezoelectric type automatic reaction chip has the beneficial effects that the piezoelectric type automatic reaction chip is a multifunction and full automation are achieved, mixing, reaction, temperature control and agitation are integrated, the application scope of the microfluid reaction chip is greatly enlarged, and the microfluid reaction chip is not limited by the micro biochemical reaction at room temperature.
Description
Technical field
The present invention relates to a kind of reaction chip, the particularly automatic reaction chip of a kind of piezoelectric type automatically.
Background technology
At present, micro fluid reaction chip is the novel biochemical reaction technology that MEMS field development in recent years is got up, and owing to completing reaction under smaller size smaller, reagent dosage is little, reaction efficiency is high, it is effective to prepare, and is subject to various countries scholar's extensive concern.
Micro fluid reaction chip mainly contains two kinds of active and passive types, wherein passive type relies on moving freely of microfluid to realize mixing, generally need in runner, add groove, the two dimensions such as bent angle or three-dimensional structure are strengthened mixed effect, exist runner long, volume is large, the problems such as course of reaction is uncontrollable, actively rely on micro-stirring, pressure disturbance, the external energies such as acoustic perturbation act on course of reaction, good mixing effect, it is one of main method of constructing at present micro fluid reaction chip, but single active disturbance can only produce single mixed effect, cannot realize whole complex chemical reaction.In the patent of invention of " a kind of Piezoelectric Driving micro-mixer and preparation method thereof and the control method " that is 201210175152.6 in the patent No., the people such as the Liu monarch of Jilin University introduce piezoelectric micropump micro fluid reaction chip field first, a kind of active hybrid mode of utilizing piezoelectric pump to drive pulsation input has been proposed, prove that piezoelectric micropump is in the advantage realizing aspect microfluid pulsation input and controlled mixing, but it is only a mixing arrangement, cannot complete course of reaction complexity, reaction time is long, need initiatively stir disturbance, the whole chemical reaction of strict temperature control (liquid phase such as noble metal nano particles is synthetic), the micro-fluid reactor of other active form also exists similar defect.And the present invention proposes a kind of two initiatively micro fluid reaction chip of disturbances, pulsation input is acted on respectively and mixed and course of reaction with vibrational perturbation, is a kind of multi-functional full-automatic novel micro fluid reaction chip that integrates mixing, reaction, temperature control, stirs.
Summary of the invention
Main purpose of the present invention is can only realize pulsation and mix in order to solve existing piezoelectric type micro-fluid reactor, cannot complete course of reaction complexity, reaction time long, need initiatively stir the whole chemical reaction of disturbance, strict temperature control (liquid phase such as noble metal nano particles is synthetic).
Another object of the present invention is to be applied in micro fluid reaction chip and can only to heat, not directly act on fluid reaction process or only be realized and initiatively being mixed and complicated integral structure, the volume of relevant apparatus are large, be not easy to integrated and microminiaturized problem by single acoustic perturbation in order to solve existing interdigital transducer.
The present invention in order to achieve the above object, address the above problem and the automatic reaction chip of a kind of piezoelectric type that provides, propose first to utilize interdigital transducer to produce vibrational perturbation and act on micro-mixed chemical reaction stage, and can realize multiple stirring, disturbance mode by active control, be a kind of multi-functional full-automatic novel micro fluid reaction chip that integrates mixing, reaction, temperature control, stirs.
The body of the automatic reaction chip of piezoelectric type of the present invention is laminated type stepped construction, be provided with from top to bottom several layers, be followed successively by micro-mixer layer, the first insulating barrier, transducer layer and the second insulating barrier, wherein in micro-mixer layer, be integrated with vibration mixing pit, the first insulating barrier is located between micro-mixer layer and transducer layer, in transducer layer, be integrated with interdigital transducer and chip electrode, interdigital transducer be located at vibration mixing pit under, interdigital transducer is corresponding with the shape of vibration mixing pit, fluid in vibration mixing pit vibrates under the effect of interdigital transducer, interdigital transducer is connected with chip electrode, chip electrode is connected with response controller, response controller is by plug-in control, response controller provides numeric type voltage signal by the work of chip electrode control interdigital transducer, the second insulating barrier is located at the bottom of transducer layer.
Vibration mixing pit is corresponding with the shape of interdigital transducer, the corresponding foursquare interdigital transducer of circular vibration mixing pit, the corresponding rectangular interdigital transducer of rectangular vibration mixing pit.
In micro-mixer layer, be also integrated with piezoelectric micropump, reaction chip import, reaction chip outlet and micro-mixing runner, the inner chamber of piezoelectric micropump is communicated with reaction chip import, and the inner chamber of piezoelectric micropump is communicated with vibration mixing pit by micro-mixing runner, vibration mixing pit is communicated with reaction chip outlet, piezoelectric micropump is connected with the chip electrode in transducer layer, and response controller provides numeric type voltage signal by the work of chip electrode control piezoelectric micropump.
Micro-mixer layer is the hyaline layer that PDMS material is made.
Transducer layer is a piezoelectric substrate, and piezoelectric substrate is synthetic quartz or lithium niobate or lithium tantalate or bismuth-germanate single crystal material.
Interdigital transducer is to make in transducer layer by microelectronic processing technology.
The bottom of the second insulating barrier is provided with temperature control layer, is integrated with platinum heating film on temperature control layer, and temperature control layer is connected with the chip electrode in transducer layer, and response controller is worked by chip electrode control temperature control layer.
Piezoelectric micropump is provided with two or several, and the pump body structure of piezoelectric micropump is single cavity or Multicarity structure.
The version of micro-mixing runner is Y shape or T shape or star.
In the time that piezoelectric micropump is provided with two, the version of micro-mixing runner of answering is in contrast Y shape or T shape; When piezoelectric micropump is provided with when multiple, the version of micro-mixing runner of answering is in contrast the star of different structure form.
Operation principle of the present invention:
Piezoelectric micropump is to utilize the double vibrations of piezoelectric vibrator in pump chamber, to produce malleation or negative pressure, while is in conjunction with the coordinated movement of various economic factors of check valve opening and closing, finally realize the one-way flow of pump chamber inner fluid, regulate the realization such as voltage, frequency, waveform and phase place of piezoelectric micropump to comprise the various different blended syntypes of low-and high-frequency pulsation in being blended in by response controller, thereby the pulsation that realizes microfluid is injected and mix.
Interdigital transducer is according to inverse piezoelectric effect, the signal of telecommunication of input is converted into mechanical oscillation, act on the fluid in vibration mixing pit, make microfluid produce vibration, convection cell produces and stirs or spring up or the effect of lattice vibration, interdigital transducer can produce the multi-modal vibration of row ripple or standing wave under the excitation of response controller, and then causes Ordered and the hybrid reaction of two-phase (or heterogeneous) microfluid in vibration mixing pit.
The concrete mode of action of interdigital transducer is as described below:
Mode one: as shown in Figure 3, vibration mixing pit is circular, its corresponding interdigital transducer is foursquare, interdigital transducer forms foursquare version by four orthogonal layouts of same junior unit, the length of side of each junior unit must not be greater than the radius of circular vibration mixing pit, and each junior unit is that many electrodes that are alternately connected by periodic arrangement and with busbar form.The vorticity wave that this mode produces carries out disturbance meeting to the microfluid in vibration mixing pit and produces the effect of stirring, and makes hybrid reaction more abundant, forms better reaction effect; And can regulate by response controller the perturbation direction of vorticity wave, its direction can also be adjusted to pulsation, form better reaction effect.The special synthetic effect that can also play regulation and control synthesized nano particle diameter and pattern except intensified response effect for noble metal or other nano particles.
Mode two: as shown in Figure 4, vibration mixing pit is rectangular, its corresponding interdigital transducer is rectangular, its corresponding interdigital transducer is made up of four rectangular junior units, be specially two parallel centre position, two other be respectively placed in left and right sides perpendicular with it of being placed in of junior unit, each junior unit is that many electrodes that are alternately connected by periodic arrangement and with busbar form.This mode can produce bore or lattice wave carries out disturbance to the microfluid in mixing pit, only allow 2 junior unit work meetings of horizontal direction produce the bore of vertical direction, only allow 2 junior unit work meetings of vertical direction produce the bore of horizontal direction by regulation and control, allow 4 junior units ripple that all work can make two vertical direction propagate formation lattice wave that intersects, in each crosspoint, near zone has identical bumpy weather, and reaction is evenly carried out.Advantage for the synthetic this mode of noble metal or other nano particles is also clearly: the mode of oscillation that this perturbation scheme forms evenly shakes nucleus to each crosspoint, deposition and the gathering of nucleus are hindered, and make noble metal nano particles have regular, a uniform growing environment, thereby the good nano particle of synthesizing monodisperse.
Mode three; Above-mentioned two kinds of modes can also be cascaded, be communicated with by micro-mixing runner by circular vibration mixing pit and rectangle vibration mixing pit, and every kind of corresponding interdigital transducer of vibration mixing pit lays respectively under it, and the perturbation action of the two can phase mutual interference.Under this mode effect, microfluid is first subject to the stirring of vorticity wave in circle vibration mixing pit, make to mix more fully, reaction is more thorough, form more nucleus, then flow into rectangle vibration mixing pit with the fluid of a large amount of nucleus, the mode of oscillation in this pond is uniformly distributed on the crosspoint of lattice wave nucleus, makes nano particle have a uniform growth environment, obstruction nano particle deposition, the nano particle of synthetic uniform particle diameter.
Piezoelectric micropump of the present invention is the assembling by prior art, and therefore concrete model and specification further do not repeat.
Beneficial effect of the present invention:
1, the present invention utilizes interdigital transducer to produce mechanical oscillation, directly act on the microfluid in vibration mixing pit, make it under the effect of vibrational perturbation, proceed mixed chemical reaction, and can realize multiple stirring, disturbance mode by active control, be a kind of multi-functional full-automatic novel micro fluid reaction chip that integrates mixing, reaction, temperature control, stirs.
2, the present invention injects pulsation with two kinds of active modes of vibrational perturbation and is common to micro fluid reaction process, is that a kind of initiative is stronger, the controlled Novel active micro fluid reaction chip of process; Particularly long for the reaction time, course of reaction is complicated, need initiatively stir disturbance, chemical reaction the present invention of strict temperature control (such as the liquid phase synthetic reaction of noble metal nano particles) has larger advantage;
3, for the synthetic reaction of noble metal or other nano particles, the present invention injects pulsation the nucleation and growth process that acts on respectively nano particle with vibrational perturbation, and the generation that hinders or destroy deposition and assemble in the nucleus stage of growth, the growth conditions of improvement or balanced each nucleus, and then form nano particle even, regular growing environment, because of but a kind of specific aim is stronger, effect controllable type micro fluid reaction chip more significantly;
4, the present invention's piezoelectric micropump diameter used below φ 10mm, thickness is not more than 3mm, output pressure can reach 20kPa (being equivalent to 2 meter water columns).On microminiaturized basis, can also meet pulsation and inject required large pressure, the requirement of high flow capacity resolution ratio;
5, the present invention adopt have that frequency is high, volume is little, the interdigital transducer of stable performance and feature low in energy consumption realizes vibrational perturbation, is more conducive to realize the integrated and microminiaturized of whole reaction chip system;
6, the present invention takes laminated type stepped construction design, reaction chip is accomplished in length and width size farthest microminiaturized and be more conducive to the realization of reaction chip function.The orlop of reaction chip is provided with temperature control layer, for adjusting the bulk temperature of reaction chip, thereby can realize the microfluid biochemical reaction under condition of different temperatures, greatly improve the scope of application of micro fluid reaction chip, and be not only confined to the micro-biochemical reaction under room temperature condition.
Brief description of the drawings
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is decomposition texture schematic diagram of the present invention.
Fig. 3 is the layout schematic diagram that vibration mixing pit of the present invention is circular configuration.
Fig. 4 is the layout schematic diagram that vibration mixing pit of the present invention is rectangle structure.
1, micro-mixer layer 2, the first insulating barrier 3, transducer layer 4, the second insulating barrier
5, temperature control layer 6, response controller 11, piezoelectric micropump 12, reaction chip import
13, reaction chip outlet 14, micro-mixing runner 15, vibration mixing pit
31, interdigital transducer 32, chip electrode.
Detailed description of the invention
Refer to shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4:
The body of the automatic reaction chip of piezoelectric type of the present invention is laminated type stepped construction, be provided with from top to bottom several layers, be followed successively by micro-mixer layer 1, the first insulating barrier 2, transducer layer 3 and the second insulating barrier 4, wherein in micro-mixer layer 1, be integrated with vibration mixing pit 15, the first insulating barrier 2 is located between micro-mixer layer 1 and transducer layer 3, in transducer layer 3, be integrated with interdigital transducer 31 and chip electrode 32, interdigital transducer 31 be located at vibration mixing pit 15 under, fluid in vibration mixing pit 15 vibrates under the effect of interdigital transducer 31, interdigital transducer 31 is connected with chip electrode 32, chip electrode 32 is connected with response controller 6, response controller 6 is by plug-in control, response controller 6 provides numeric type voltage signal to control interdigital transducer 31 by chip electrode 32 and works, the second insulating barrier 4 is located at the bottom of transducer layer 3.
In micro-mixer layer 1, be also integrated with piezoelectric micropump 11, reaction chip import 12, reaction chip outlet 13 and micro-mixing runner 14, the inner chamber of piezoelectric micropump 11 is communicated with reaction chip import 12, and the inner chamber of piezoelectric micropump 11 is communicated with vibration mixing pit 15 by micro-mixing runner 14, vibration mixing pit 15 is communicated with reaction chip outlet 13, piezoelectric micropump 11 is connected with the chip electrode 32 in transducer layer 3, and response controller 6 provides numeric type voltage signal to control the work of piezoelectric micropump 11 by chip electrode 32.
The hyaline layer that micro-mixer layer 1 is made for PDMS material.
The bottom of the second insulating barrier 4 is provided with temperature control layer 5, is integrated with platinum heating film on temperature control layer 5, and temperature control layer 5 is connected with the chip electrode 32 in transducer layer 3, and response controller 6 is controlled temperature control layer 5 by chip electrode 32 and worked.
The version of micro-mixing runner 14 is Y shape or T shape or star.
In the time that piezoelectric micropump 11 is provided with two, the version of micro-mixing runner 14 of answering is in contrast Y shape or T shape; When piezoelectric micropump 11 is provided with when multiple, the version of micro-mixing runner 14 of answering is in contrast the star of different structure form.
Operation principle of the present invention:
The concrete mode of action of interdigital transducer 31 is as described below:
Mode one: as shown in Figure 3, vibration mixing pit 15 is circular, its corresponding interdigital transducer 31 is foursquare, interdigital transducer 31 forms foursquare version by four orthogonal layouts of same junior unit, the length of side of each junior unit must not be greater than the radius of circular vibration mixing pit, and each junior unit is that many electrodes that are alternately connected by periodic arrangement and with busbar form.The vorticity wave that this mode produces carries out disturbance meeting to the microfluid in vibration mixing pit 15 and produces the effect of stirring, and makes hybrid reaction more abundant, forms better reaction effect; And can regulate by response controller 6 perturbation direction of vorticity wave, its direction can also be adjusted to pulsation, form better reaction effect, the special synthetic effect that can also play regulation and control synthesized nano particle diameter and pattern except intensified response effect for noble metal or other nano particles.
Mode two: as shown in Figure 4, vibration mixing pit 15 is rectangular, its corresponding interdigital transducer 31 is rectangular, its corresponding interdigital transducer 31 is made up of four rectangular junior units, be specially two parallel centre position, two other be respectively placed in left and right sides perpendicular with it of being placed in of junior unit, each junior unit is that many electrodes that are alternately connected by periodic arrangement and with busbar form.This mode can produce bore or lattice wave carries out disturbance to the microfluid in mixing pit, only allow 2 junior unit work meetings of horizontal direction produce the bore of vertical direction, only allow 2 junior unit work meetings of vertical direction produce the bore of horizontal direction by regulation and control, allow 4 junior units ripple that all work can make two vertical direction propagate formation lattice wave that intersects, in each crosspoint, near zone has identical bumpy weather, and reaction is evenly carried out; Advantage for the synthetic this mode of noble metal or other nano particles is also clearly: the mode of oscillation that this perturbation scheme forms evenly shakes nucleus to each crosspoint, deposition and the gathering of nucleus are hindered, and make nano particle have regular, a uniform growing environment, thereby the good nano particle of synthesizing monodisperse.
Mode three; Above-mentioned two kinds of modes can also be cascaded, be communicated with by micro-mixing runner 14 by circular vibration mixing pit 15 and rectangle vibration mixing pit 15, and every kind of corresponding interdigital transducer 31 of vibration mixing pit 15 lays respectively under it, and the perturbation action of the two can phase mutual interference.Under this mode effect, microfluid is first subject to the stirring of vorticity wave in circle vibration mixing pit 15, make to mix more fully, reaction is more thorough, form more nucleus, then flow into rectangle vibration mixing pit 15 with the fluid of a large amount of nucleus, the mode of oscillation in this pond is uniformly distributed on the crosspoint of lattice wave nucleus, makes nano particle have a uniform growth environment, obstruction nano particle deposition, the nano particle of synthetic uniform particle diameter.
With the embodiment that synthesizes of golden nanometer particle, the present invention is further described below.
The liquid phase of golden nanometer particle is synthesized and is comprised that gold atom is separated out, three processes of nucleation and growing.The present invention acts on respectively the nucleation and growth process of golden nanometer particle with pulsation injection and vibrational perturbation, the evenly problem of growth of nano particle that affects such as solve nucleus bunchy in its building-up process, deposit and gather, improve the growth conditions of balanced each nucleus, and then form evenly regular growing environment of gold nano grain.Pulsation is injected and is chosen double pump structure, be used for respectively carrying gold chloride and sodium citrate solution, vibrational perturbation is rectangle vibration mixing pit 15 and its corresponding interdigital transducer 31, whole reaction chip body is passed through to chip electrode 32 and is connected with response controller 6, then in two reaction chip imports 12, put into respectively gold chloride and sodium citrate solution, after confirmation, press button, by regulating response controller 6 to regulate the temperature of whole chip, by response controller 6, piezoelectric micropump 11 and interdigital transducer 31 are all started working according to the plug-in of response controller 6 equally, until complete whole course of reaction, obtain qualified golden nanometer particle.
From embodiment above can illustrate that the present invention is long for the reaction time, course of reaction sends out the chemical reaction of (such as the liquid phase of noble metal nano particles synthetic etc.) assorted and has unique advantage, and simple to operate, intelligent, complete machine, just can obtain the good nano particle of monodispersity of different-shape particle diameter by choosing the embedded different control programs of response controller 6.
Claims (7)
1. the automatic reaction chip of piezoelectric type, it is characterized in that: body is laminated type stepped construction, be provided with from top to bottom several layers, be followed successively by micro-mixer layer, the first insulating barrier, transducer layer and the second insulating barrier, wherein in micro-mixer layer, be integrated with vibration mixing pit, the first insulating barrier is located between micro-mixer layer and transducer layer, in transducer layer, be integrated with interdigital transducer and chip electrode, interdigital transducer be located at vibration mixing pit under, interdigital transducer is corresponding with the shape of vibration mixing pit, fluid in vibration mixing pit vibrates under the effect of interdigital transducer, interdigital transducer is connected with chip electrode, chip electrode is connected with response controller, response controller is by plug-in control, response controller provides numeric type voltage signal by the work of chip electrode control interdigital transducer, the second insulating barrier is located at the bottom of transducer layer.
2. the automatic reaction chip of a kind of piezoelectric type according to claim 1, it is characterized in that: in described micro-mixer layer, be also integrated with piezoelectric micropump, reaction chip import, reaction chip outlet and micro-mixing runner, the inner chamber of piezoelectric micropump is communicated with reaction chip import, and the inner chamber of piezoelectric micropump is communicated with vibration mixing pit by micro-mixing runner, vibration mixing pit is communicated with reaction chip outlet, piezoelectric micropump is connected with the chip electrode in transducer layer, and response controller provides numeric type voltage signal by the work of chip electrode control piezoelectric micropump.
3. the automatic reaction chip of a kind of piezoelectric type according to claim 1, is characterized in that: described micro-mixer layer is the hyaline layer that PDMS material is made.
4. the automatic reaction chip of a kind of piezoelectric type according to claim 1, is characterized in that: described transducer layer is a piezoelectric substrate, and piezoelectric substrate is synthetic quartz or lithium niobate or lithium tantalate or bismuth-germanate single crystal material.
5. the automatic reaction chip of a kind of piezoelectric type according to claim 1, it is characterized in that: the bottom of the second described insulating barrier is provided with temperature control layer, on temperature control layer, be integrated with platinum heating film, temperature control layer is connected with the chip electrode in transducer layer, and response controller is worked by chip electrode control temperature control layer.
6. the automatic reaction chip of a kind of piezoelectric type according to claim 2, is characterized in that: described piezoelectric micropump is provided with two or several, the pump body structure of piezoelectric micropump is single cavity or Multicarity structure.
7. the automatic reaction chip of a kind of piezoelectric type according to claim 2, is characterized in that: the version of described micro-mixing runner is Y shape or T shape or star.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104998704A (en) * | 2015-07-29 | 2015-10-28 | 西安交通大学 | Integrated liquid drop generating chip based on piezoelectric film pumps and manufacturing method thereof |
| CN103894128B (en) * | 2014-04-22 | 2015-11-11 | 吉林大学 | The automatic reaction chip of a kind of piezoelectric type |
| CN105927519A (en) * | 2016-06-22 | 2016-09-07 | 吉林大学 | Vibration-excitation-vibration-absorption traveling wave guide microfluid delivery device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20070140041A1 (en) * | 2002-10-03 | 2007-06-21 | Protasis Corporation | Fluid-handling apparatus and methods |
| CN202962353U (en) * | 2012-05-31 | 2013-06-05 | 吉林大学 | Piezoelectric actuation micro mixer |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103894128B (en) * | 2014-04-22 | 2015-11-11 | 吉林大学 | The automatic reaction chip of a kind of piezoelectric type |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070140041A1 (en) * | 2002-10-03 | 2007-06-21 | Protasis Corporation | Fluid-handling apparatus and methods |
| CN202962353U (en) * | 2012-05-31 | 2013-06-05 | 吉林大学 | Piezoelectric actuation micro mixer |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894128B (en) * | 2014-04-22 | 2015-11-11 | 吉林大学 | The automatic reaction chip of a kind of piezoelectric type |
| CN104998704A (en) * | 2015-07-29 | 2015-10-28 | 西安交通大学 | Integrated liquid drop generating chip based on piezoelectric film pumps and manufacturing method thereof |
| CN105927519A (en) * | 2016-06-22 | 2016-09-07 | 吉林大学 | Vibration-excitation-vibration-absorption traveling wave guide microfluid delivery device |
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Address after: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee after: Changzhou Weitu Fluid Technology Co. Ltd. Address before: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee before: Changzhou Weitu Fluid Technology Co. Ltd. |