CN105854717A - Piezoelectric actuation-based integrated micro-mixer - Google Patents
Piezoelectric actuation-based integrated micro-mixer Download PDFInfo
- Publication number
- CN105854717A CN105854717A CN201610317989.8A CN201610317989A CN105854717A CN 105854717 A CN105854717 A CN 105854717A CN 201610317989 A CN201610317989 A CN 201610317989A CN 105854717 A CN105854717 A CN 105854717A
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- reflux
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- hybrid chamber
- mixer
- piezoelectric
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- 238000010992 reflux Methods 0.000 claims abstract description 32
- 239000012530 fluid Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000011259 mixed solution Substances 0.000 claims abstract description 8
- 230000008676 import Effects 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 2
- 238000002156 mixing Methods 0.000 abstract description 14
- 238000009792 diffusion process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 239000000243 solution Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/301—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
- B01F33/3017—Mixing chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/80—Mixing plants; Combinations of mixers
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a piezoelectric actuation-based integrated micro-mixer which comprises a body, wherein the body is composed of an upper substrate layer, a middle reflux layer and a lower vibration layer which are connected fixedly; an upper mixing chamber is arranged in the upper substrate layer, while a plurality of fluid inlets and mixed solution outlets are integrated in the upper substrate layer; a clockwise reflux channel, a counterclockwise reflux channel and a middle mixing chamber are arranged in the middle reflux layer, while a reflux piezoelectric micro-pump and a chip electrode are integrated on the middle reflux layer; an inlet-outlet microfluidic channel and a lower mixing chamber are formed in the lower vibration layer, while an inlet-outlet fluid piezoelectric micro-pump and a vibrator base are integrated on the lower vibration layer; all mixing chambers are concentric and the same in inner diameter. The piezoelectric actuation-based integrated micro-mixer increases a contact area between fluids through alternating circulation reflux and reciprocating continuous vibration, enhances the convection and diffusion between the fluids, and has a high mixing efficiency and controllable processes.
Description
Technical field
The present invention relates to Microfluidic Mixing technical field, especially relate to Piezoelectric Driving integrated form micro-mixer.
Background technology
Microfluid mixer is one of micro-fluidic chip (microfluidic chip) vitals, is mainly used in reality
Existing lot of trace reagent mixes fast and effectively, has in fields such as chemical synthesis, biological respinse, life sciences
It is widely applied very much prospect.The channel design of micro-mixer is generally in micron dimension, and the Reynolds number of fluid is very
Little, fluid is in laminar condition, relies primarily on the mixing of molecule diffusion, and to reach to mix completely between fluid
Close and then need considerably long incorporation time.This causes the micro-fluidic advantage rapidly and efficiently analyzed to weaken even disappearing,
Therefore, under minute yardstick, the quickly mixing of fluid is carried out to micro-fluidic most important.
In order to improve the mixing efficiency of fluid, it is necessary to take effective manner to the micro-contact surface increasing between fluid
Amass or strengthen convection current and diffusion effect.At present, micro-mixer is driven can be divided into two according to or without outside energy
Big class: active micro-mixer and passive type micro-mixer.Passive mixer generally uses has labyrinth
Microchannel or microchannel in special construction, increase micro-contact area as far as possible to improve mixing efficiency, its
Shortcoming is that difficulty of processing is big, mixed effect and poor controllability.Active micro-mixer needs external energy to drive
Move and mix, specifically include that micro-stirring, pressure disturbance, acoustic perturbation, magnetically-actuated, electrofluid drive
Move, have an advantage in that good mixing effect and mixed process are controlled, but also can there is processing technology complexity, add
Work cost intensive, the problems such as the most easy of integration.
Through existing literature search is found, China Patent No.: CN 102553482A, proprietary term: novel backflow
Decline blender, which discloses a kind of high backflow passive microfluid mixer.This micro-mixer utilizes
Coanda effect causes backflow, backflow to extend the incorporation time of fluid also by arranging symmetrical feedback channel
Promote to form eddy current, increase the contact area between fluid.But still have the disadvantage in that for low reynolds number
Fluid, its reflux ratio and mixing intensity are poor, and structural parameters are difficult to determine, and mixed process is uncontrollable
System.
Summary of the invention
For the deficiency overcoming above-mentioned prior art to exist, the invention provides a kind of integrated based on Piezoelectric Driving
Decline blender, makes solution mixing velocity faster, and mixed effect is more preferable and mixed process is more controllable.
The technical solution adopted in the present invention is: provide a kind of based on Piezoelectric Driving integrated form micro-mixer, this
Body is made up of affixed upper gasket bottom, middle part reflux layer, bottom vibration level, and upper gasket bottom is provided with
Top hybrid chamber, is integrated with multiple fluid intake, mixed solution outlet, and middle part reflux layer is provided with and returns clockwise
Circulation road, return flow line counterclockwise, middle part hybrid chamber, be integrated with backflow piezoelectric micropump and chip electrode,
Bottom vibration level is provided with import and export microchannel, bottom hybrid chamber, is integrated with turnover stream piezoelectric micropump, oscillator
Substrate；Each hybrid chamber is concentric and internal diameter is identical.
The outer wall of bottom vibration level import microchannel is all tangent with hybrid chamber, and rotation direction keeps consistent, fluid
Eddy flow is formed by self flowing；The outer wall of reflux layer return flow line clockwise, middle part is all tangent with hybrid chamber,
Rotation direction is that fluid, by clockwise backflow, forms eddy flow clockwise in hybrid chamber clockwise；In
Portion's reflux layer is counterclockwise, and return flow line outer wall is all tangent with hybrid chamber, and fluid is refluxed by counter clockwise direction,
Hybrid chamber is formed eddy flow counterclockwise.
Two kinds of reflux type alternate cycles effects successively, significantly enhance the mixed effect of solution.
Drive piezoelectric vibrator substrate by continuous alternating signal, different based on frequency so that it is be in single order or
Multi-modes vibrates, and strengthens convection current and diffusion between fluid, improves mixing efficiency.
Integrated backflow piezoelectric micropump can be to have valve pump or valveless pump, and quantity is two or more；Stream
Body entry number is two or more.
The operation principle of the present invention is: the runner that the multiple rotation directions tangent with cavity are identical is easy to fluid by certainly
The flowing of body produces cyclonic effect in chamber；Piezoelectric micropump is that the inverse piezoelectric effect utilizing piezoelectric ceramics makes pressure
Electric tachometer indicator is deformed, deformation cause pump chamber change to realize the one-way flow of fluid；Oscillator substrate is
Utilize piezoelectric vibrator to be in single order or multi-modes vibration, act in microfluid, strengthen between fluid convection current and
Diffusion.
Compared with prior art, the invention has the beneficial effects as follows: by alternative expression circulating reflux and reciprocating mode
Vibration two ways acts in microring array jointly, is the microring array that a kind of initiative is higher, process is more controlled
Device.On the basis of possessing extremely strong mixed, it is possible not only to quickly mix the solution of high reynolds number, also
Can efficiently mix the solution of low reynolds number, there is the vast scope of application.
Accompanying drawing explanation
Below in conjunction with the accompanying drawings and embodiment the present invention is further described.In accompanying drawing:
Fig. 1 is three-dimensional structure installation diagram of the present invention.
Fig. 2 is depression angle of the present invention structural blast figure.
Fig. 3 is upward view angle structural blast figure of the present invention.
Fig. 4 is upper substrate Rotating fields schematic diagram of the present invention.
Fig. 5 is middle part of the present invention reflux layer structural representation.
Fig. 6 is bottom of the present invention vibration level structural representation.
Fig. 7 is that gateway of the present invention flows to schematic diagram.
Fig. 8 is that reflux layer counter clockwise flow of the present invention is to schematic diagram.
Fig. 9 is that reflux layer of the present invention flows to schematic diagram clockwise.
Wherein: 1, mixed solution outlet；2, valve free pump A；3, fluid intake one；4, oscillator substrate；
5, there is valve Micropump A；6, chip electrode；7, valve free pump B；8, middle part reflux layer；9, bottom vibration
Layer；10, upper gasket bottom；11, valve free pump C；12, there is valve Micropump B；13, fluid intake two；
14, valve free pump D；15, there is valve Micropump C.
Detailed description of the invention
Refer to Fig. 1, Fig. 2, Fig. 3, to mix two kinds of solution (solution A and solution B), be driven in and out stream
Power source be have valve Micropump, the power source that drives backflow is this to be described as a example by 4 piezoelectricity valve free pumps
Bright.The present invention is formed by three parts are affixed, and upper gasket bottom (10) is integrated with fluid intake one (3), stream
Body entrance two (13), mixed solution outlet (1)；Middle part reflux layer (8) be integrated with valve free pump A (2),
Valve free pump B (7), valve free pump C (11), valve free pump D (14) and chip electrode (6)；Under
Portion's vibration level (9) is integrated with oscillator substrate (4), has valve Micropump A (5), has valve Micropump B (12), has valve
Micropump C (15).
As shown in Figure 4, upper gasket bottom (10) is provided with top hybrid chamber (1001), upper entrance passage one
(1002), upper entrance passage two (1004), upper outlet passage (1003).As it is shown in figure 5, middle part
Reflux layer (8) is provided with middle part hybrid chamber (803), Micropump cavity A (802) and runner A1 (801),
Runner A2 (804), Micropump cavity B (806) and runner B1 (807), runner B2 (805), micro-
Pump housing C (810) and runner C1 (809), runner C2 (811), Micropump cavity D (814) and
Runner D1 (815), runner D2 (813), centre entrance passage one (816), centre entrance passage two (808),
Centre exit passage (812).As shown in Figure 6, bottom vibration level (9) be provided with bottom hybrid chamber (901),
Lower entrances runner one (904), entrance channel two (902), lower part outlet runner (903).Each hybrid chamber
With one heart and internal diameter is identical.
During work, solution A has valve Micropump A (5) to drive by piezoelectricity, by fluid intake one (3), top
Access road one (1004), centre entrance passage one (816), lower entrances runner one (904) flow into the end
In portion's hybrid chamber (901), B solution has valve Micropump B (12) to drive, by fluid intake by piezoelectricity simultaneously
Two (13), upper entrance passage two (1002), centre entrance passage two (808), lower entrances runner two
(902) flow in bottom hybrid chamber (901), due to gateway, bottom runner outer wall and bottom hybrid chamber phase
Cutting and rotation direction is consistent, therefore, fluid can be formed in bottom hybrid chamber (901) by the flowing of self
Eddy flow, carries out preliminary microring array to solution.Hereafter through following reflux type one, reflux type two alternately
After circulating reflux, the solution finally mixed has valve Micropump C (15) to drive, by lower part outlet stream by piezoelectricity
Road (903), through centre exit passage (812), upper outlet passage (1003) from mixed solution export
(1) flow out, flow to signal as shown in Figure 7.
Reflux type one: valve free pump A (2), valve free pump C (11) work, and mixed solution is through runner
A1 (801), runner C1 (809) separately flow into cavity A (802), cavity C (810), the most respectively from
Runner A2 (804), runner C2 (811) flow back to middle part hybrid chamber (803), form backflow, due to runner
A1 (801), runner A2 (804), runner C1 (809), C2 runner (811) outer wall are all and hybrid chamber
Tangent and rotation direction is counterclockwise, therefore, produces eddy flow counterclockwise in hybrid chamber, flows to signal such as Fig. 8 institute
Show.
Reflux type two: piezoelectricity valve free pump B (7), valve free pump D (14) work, mixed solution is through stream
Road B1 (807), runner D1 (815) separately flow into cavity B (806), cavity D (814), distinguish again
Flow back to middle part hybrid chamber (803) from runner B2 (805), runner D2 (813), form backflow, due to stream
Road B1 (807), B2 (805), D1 (815), D2 (813) outer wall is all tangent with hybrid chamber and rotation direction is
Clockwise, therefore, hybrid chamber produces eddy flow clockwise, flow to signal as shown in Figure 9.
Two kinds of actively reflux type cycle alternation successively work, increase the contact area between fluid, make solution mix
Close more efficient.
Oscillator substrate (4) is constantly in single order or multi-modes vibration in mixed process, enhances fluid
Between convection current and diffusion, make solution mix more abundant.
Above-mentioned piezoelectricity valve free pump A (2), valve free pump B (7), valve free pump C (11) valve free pump
D (14), piezoelectricity have valve Micropump A (5), have valve Micropump B (12), have valve Micropump C (15), oscillator base
The end (4), is all connected with peripheral control unit by chip electrode (6).
Claims (4)
1. one kind based on Piezoelectric Driving integrated form micro-mixer, it is characterised in that: body is by affixed upper
Portion's substrate layer, middle part reflux layer, bottom vibration level form, and upper gasket bottom is provided with top hybrid chamber, integrated
Having multiple fluid intake, mixed solution to export, middle part reflux layer is provided with return flow line clockwise, returns counterclockwise
Circulation road, middle part hybrid chamber, be integrated with backflow piezoelectric micropump and chip electrode, bottom vibration level be provided with into
Outlet microfluidic channels, bottom hybrid chamber, be integrated with turnover stream piezoelectric micropump, oscillator substrate；Each hybrid chamber is same
The heart and internal diameter are equal.
One the most according to claim 1 is based on Piezoelectric Driving integrated form micro-mixer, it is characterised in that:
The outer wall of bottom vibration level import microchannel is all tangent with hybrid chamber, and rotation direction keeps consistent；Middle part backflow
The outer wall of layer return flow line clockwise is all tangent with hybrid chamber, and rotation direction is clockwise；The middle part reflux layer inverse time
Pin return flow line outer wall is all tangent with hybrid chamber, and rotation direction is counterclockwise.
One the most according to claim 1 is based on Piezoelectric Driving integrated form micro-mixer, it is characterised in that:
Middle part reflux layer reflux type is the alternative expression circulating reflux suitable, counterclockwise that piezoelectric micropump drives, piezoelectric micropump
Can be to have valve or valve free pump.
One the most according to claim 1 is based on Piezoelectric Driving integrated form micro-mixer, it is characterised in that:
Bottom vibration level oscillator base drive signal is continuous alternating signal, and different based on frequency, mode of vibration is one
Rank or multi-modes vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610317989.8A CN105854717B (en) | 2016-05-13 | 2016-05-13 | One kind is based on Piezoelectric Driving integrated form micro-mixer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610317989.8A CN105854717B (en) | 2016-05-13 | 2016-05-13 | One kind is based on Piezoelectric Driving integrated form micro-mixer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105854717A true CN105854717A (en) | 2016-08-17 |
| CN105854717B CN105854717B (en) | 2018-04-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610317989.8A Active CN105854717B (en) | 2016-05-13 | 2016-05-13 | One kind is based on Piezoelectric Driving integrated form micro-mixer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289529A (en) * | 2021-05-10 | 2021-08-24 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
| CN114308160A (en) * | 2021-12-29 | 2022-04-12 | 臻准生物科技（上海）有限公司 | Digital PCR microcavity chip and preparation method thereof |
| EP4282517A1 (en) | 2022-05-25 | 2023-11-29 | Stratec SE | System for the microfluidic distribution of fluids |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6494433B2 (en) * | 2000-06-06 | 2002-12-17 | The Regents Of The University Of Michigan | Thermally activated polymer device |
| CN1584601A (en) * | 2003-08-20 | 2005-02-23 | 中国科学院大连化学物理研究所 | Sample feeding method for micro-current controlling chip based pressure and electric power combination |
| CN205627815U (en) * | 2016-05-13 | 2016-10-12 | 吉林大学 | Based on integrated blender that declines of piezoelectricity drive |
-
2016
- 2016-05-13 CN CN201610317989.8A patent/CN105854717B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6494433B2 (en) * | 2000-06-06 | 2002-12-17 | The Regents Of The University Of Michigan | Thermally activated polymer device |
| CN1584601A (en) * | 2003-08-20 | 2005-02-23 | 中国科学院大连化学物理研究所 | Sample feeding method for micro-current controlling chip based pressure and electric power combination |
| CN205627815U (en) * | 2016-05-13 | 2016-10-12 | 吉林大学 | Based on integrated blender that declines of piezoelectricity drive |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289529A (en) * | 2021-05-10 | 2021-08-24 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
| CN113289529B (en) * | 2021-05-10 | 2022-07-12 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
| CN114308160A (en) * | 2021-12-29 | 2022-04-12 | 臻准生物科技（上海）有限公司 | Digital PCR microcavity chip and preparation method thereof |
| EP4282517A1 (en) | 2022-05-25 | 2023-11-29 | Stratec SE | System for the microfluidic distribution of fluids |
| LU102963B1 (en) | 2022-05-25 | 2023-12-04 | Stratec Se | System for the microfluidic distribution of fluids |
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| Publication number | Publication date |
|---|---|
| CN105854717B (en) | 2018-04-03 |
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| CB03 | Change of inventor or designer information |
Inventor after: Liu Guojun Inventor after: Pei Xiaohan Inventor after: Li Xinbo Inventor after: Wu Yue Inventor after: Liu Jianfang Inventor after: Yang Zhigang Inventor after: Ma Xiang Inventor after: Tang Chunxiu Inventor after: Liang Shihai Inventor after: Wang Tengfei Inventor after: Jiang Feng Inventor after: Zhang Yanyan Inventor after: Zhao Xin Inventor after: Hong Wen Inventor before: Liu Guojun Inventor before: Li Xinbo Inventor before: Wu Yue Inventor before: Liu Jianfang Inventor before: Yang Zhigang Inventor before: Tang Chunxiu Inventor before: Liang Shihai Inventor before: Wang Tengfei Inventor before: Jiang Feng Inventor before: Zhang Yanyan Inventor before: Zhao Xin Inventor before: Hong Wen Inventor before: Pei Xiaohan |
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Effective date of registration: 20180912 Address after: 213164 Science and Technology Branch of Changzhou Science and Education City, Jiangsu Province Patentee after: Changzhou angde Industrial Equipment Technology Co. Ltd. Address before: 130012 No. 2699 Qianjin Street, Jilin, Changchun Patentee before: Jilin University |
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Effective date of registration: 20181214 Address after: 213164 Room 2521, North Building, Huiyan Building, 18 Changwuzhong Road, Wujin District, Changzhou City, Jiangsu Province Patentee after: Changzhou Weitu Fluid Technology Co. Ltd. Address before: 213164 Science and Technology Branch of Changzhou Science and Education City, Jiangsu Province Patentee before: Changzhou angde Industrial Equipment Technology Co. Ltd. |
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| CP02 | Change in the address of a patent holder | ||
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Address after: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee after: Changzhou Weitu Fluid Technology Co. Ltd. Address before: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee before: Changzhou Weitu Fluid Technology Co. Ltd. |