CN105715865B - Electromagnetic micro valve device - Google Patents
Electromagnetic micro valve device Download PDFInfo
- Publication number
- CN105715865B CN105715865B CN201610173874.6A CN201610173874A CN105715865B CN 105715865 B CN105715865 B CN 105715865B CN 201610173874 A CN201610173874 A CN 201610173874A CN 105715865 B CN105715865 B CN 105715865B
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- CN
- China
- Prior art keywords
- liquid metal
- fluid channel
- spiral winding
- metal spiral
- winding fluid
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0026—Valves using channel deformation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
Abstract
The invention discloses a kind of electromagnetic micro valve device, it is related to microfluidic art, described device includes：Sample reagent runner, the first liquid metal spiral winding fluid channel by room temperature liquid metal filling, the second liquid metal spiral winding fluid channel and fexible film by room temperature liquid metal filling.The present invention passes through attraction between the liquid metal spiral winding fluid channel that room temperature liquid metal is filled and repulsive force realizes the closing of sample reagent runner and unlatching, it can quickly realize the purpose of control fluid flowing, and it is compact-sized, perfusion it is easy to make, of low cost, and it is easily integrated, in addition, since the liquid metal being filled in liquid metal spiral winding fluid channel has mobility and deformability, during electromagnetic drive extrudes and closes valve and Open valve, it will not be broken, it is good to be electrically connected stability.
Description
Technical field
The present invention relates to microfluidic art, more particularly to a kind of electromagnetic micro valve device.
Background technology
Electromagnetic micro valve produces electromagnetic force extruding fluid channel using electromagnetic coil, blocks microfluidic.Existing electromagnetic micro valve is main
Electromagnetic force is produced using iron-core coil or film coil, the upper and lower side of sample reagent fluid channel sets one respectively in this kind of micro-valve
A coil.When two lateral coils load equidirectional electric current at the same time produces equidirectional magnetic field, two coils can attract each other extruding
Middle fluid channel, micro-valve are closed；Conversely, micro-valve is opened.Alternately, the coil of the upper and lower wherein side of sample reagent can also be
Permanent magnet.Iron-core coil volume is big, can not be integrated in valve, is unfavorable for microfluidic system and integrates and be miniaturized；Though film coil
It can be integrated in valve, but the manufacture craft such as required sputtering, deposition is costly, process is complicated.
The content of the invention
In view of the above problems, it is proposed that the present invention overcomes the above problem in order to provide one kind or solves at least in part
State a kind of electromagnetic micro valve device of problem.
According to one aspect of the present invention, there is provided a kind of electromagnetic micro valve device, described device include：Sample reagent stream
Road, the first liquid metal spiral winding fluid channel by room temperature liquid metal filling, the second liquid by room temperature liquid metal filling
State metal spiral coil fluid channel and fexible film；
The first liquid metal spiral winding fluid channel and the second liquid metal spiral winding fluid channel are oppositely arranged, institute
The first side that the first liquid metal spiral winding fluid channel is arranged at the fexible film is stated, the sample reagent runner is arranged on institute
State between the second side of fexible film and the second liquid metal spiral winding fluid channel.
Alternatively, between the first liquid metal spiral winding fluid channel and the second liquid metal spiral winding fluid channel
In being staggered.
Alternatively, the number of turns of the second liquid metal spiral winding fluid channel is less than the first liquid metal helix
Enclose the number of turns of fluid channel.
Alternatively, the first liquid metal spiral winding fluid channel and the second liquid metal spiral winding fluid channel are
Circular ring shape, ellipse or rectangle.
Alternatively, the first liquid metal spiral winding fluid channel, the second liquid metal spiral winding fluid channel and sample
This reagent runner is made of etching technics.
Alternatively, the fexible film is fexible film made of polydimethylsiloxane, and the fexible film
Thickness range be 100 μm~1000 μm；
Or,
The fexible film is thin slice made of glass.
Alternatively, between the first liquid metal spiral winding fluid channel and fexible film, fexible film and sample examination
Pass through plasma bonding side between agent runner and between sample reagent runner and the second liquid metal spiral winding fluid channel
Formula is packaged.
Alternatively, the ratio between the height and the width of the sample reagent flow channel cross-section is not more than 1：2.
Alternatively, the room temperature liquid metal is mercury, gallium, gallium-indium alloy, gallium-indium-tin alloy or gallium indium red brass.
Alternatively, doped with nano metal powder in the room temperature liquid metal.
Attraction and repulsion between the liquid metal spiral winding fluid channel that the present invention passes through room temperature liquid metal filling
Power realizes the closing of sample reagent runner and unlatching, can quickly realize the purpose of control fluid flowing, and it is compact-sized, fill
Note easy to make, of low cost, and be easily integrated, further, since being filled in the liquid in liquid metal spiral winding fluid channel
State metal has mobility and deformability, during electromagnetic drive extrudes and closes valve and Open valve, will not be broken,
It is good to be electrically connected stability.
Brief description of the drawings
Fig. 1 is horizontal schematic cross-sectional view of the electromagnetic micro valve device of one embodiment of the present invention in opening；
Fig. 2 is longitudinal schematic cross-sectional view of the electromagnetic micro valve device in opening shown in Fig. 1；
Fig. 3 be electromagnetic micro valve device shown in Fig. 1 in off position when horizontal schematic cross-sectional view；
Fig. 4 is the structure diagram of the second liquid metal spiral winding in electromagnetic micro valve device shown in Fig. 1；
Fig. 5 is the structure diagram of the first liquid metal spiral winding in electromagnetic micro valve device shown in Fig. 1.
Wherein：The perfusion import of 1_1, the second liquid metal spiral winding fluid channel；1_2, the second liquid metal helix
Enclose the priming outlet of fluid channel；2nd, the second liquid metal spiral winding fluid channel；3rd, sample reagent runner；4th, fexible film；5、
First liquid metal spiral winding fluid channel；The perfusion import of 6_1, the first liquid metal spiral winding fluid channel；6_2, first
The priming outlet of liquid metal spiral winding fluid channel；The positive wire of 2_1, the second liquid metal spiral winding fluid channel；2_
2nd, the negative wire of the second liquid metal spiral winding fluid channel；5_1, the cathode of the first liquid metal spiral winding fluid channel draw
Line；The negative wire of 5_2, the first liquid metal spiral winding fluid channel.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
Fig. 1 is horizontal schematic cross-sectional view of the electromagnetic micro valve device of one embodiment of the present invention in opening；Fig. 2
It is longitudinal schematic cross-sectional view of the electromagnetic micro valve device shown in Fig. 1 in opening；With reference to Fig. 1~2, described device includes：
Sample reagent runner 3, by room temperature liquid metal filling the first liquid metal spiral winding fluid channel 5, by room temperature liquid metal
The the second liquid metal spiral winding fluid channel 2 and fexible film 4 of filling；
The first liquid metal spiral winding fluid channel 5 and the second liquid metal spiral winding fluid channel 2 are oppositely arranged,
The first liquid metal spiral winding fluid channel 5 is arranged at the first side of the fexible film 4, the sample reagent runner 3
Between the second side of the fexible film 4 and the second liquid metal spiral winding fluid channel 2.
, can be by irrigating import for ease of irrigating liquid metal into the first liquid metal spiral winding fluid channel 5
6_1 irrigates liquid metal into the first liquid metal spiral winding fluid channel 5, fills full rear unnecessary liquid metal from priming outlet
6_2 overflows.
Correspondingly, liquid metal can be irrigated into the second liquid metal spiral winding fluid channel 2 by irrigating import 1_1,
Unnecessary liquid metal is overflowed from priming outlet 1_2 after filling is full.
The operation principle of the electromagnetic micro valve device of present embodiment is：In the first liquid metal spiral winding fluid channel
5 and second liquid metal spiral winding fluid channel 2 load equidirectional electric current when, the two spiral winding fluid channels can produce
Series connection electromagnetic field, attract each other, so that fexible film 4 and sample reagent runner 3 are extruded, the examination in cut-out sample reagent runner 3
Agent is flowed, and with reference to Fig. 3, and then closes valve；When needing to reopen valve, it is only necessary to rapid to change wherein any one spiral shell
The current direction of spin line circle fluid channel.
Attraction between the liquid metal spiral winding fluid channel that present embodiment is filled by room temperature liquid metal and
Repulsive force realizes the closing of sample reagent runner and unlatching, can quickly realize the purpose of control fluid flowing, and structure is tight
Gather, irrigate easy to make, of low cost, and be easily integrated, further, since being filled in liquid metal spiral winding fluid channel
Liquid metal there is mobility and deformability, will not during electromagnetic drive extrudes and closes valve and Open valve
Fracture, it is good to be electrically connected stability.
It will be appreciated that since fexible film 4 is arranged at the 3 and second liquid metal spiral winding of sample reagent runner
Between fluid channel 2, liquid metal can be effectively prevented from and contacted with the direct of sample reagent.
It should be noted that in present embodiment, the first liquid metal spiral winding fluid channel 5 and the second liquid gold
It is in be staggered between category spiral winding fluid channel 2, that is to say, that the first liquid metal spiral winding fluid channel 5 and the second liquid
The gap of state metal spiral coil fluid channel 2 is opposite, and the second liquid metal spiral winding fluid channel 2 is spiral with the first liquid metal
The gap of coil fluid channel 5 is opposite, so as to effectively enhance the electromagnetic attraction between two spiral winding fluid channels.
To further enhance the electromagnetic attraction between two spiral winding fluid channels, in present embodiment, described second
The number of turns of liquid metal spiral winding fluid channel 2 can be less than the number of turns of the first liquid metal spiral winding fluid channel 5.
For ease of realizing in process of production, in present embodiment, 5 He of the first liquid metal spiral winding fluid channel
Second liquid metal spiral winding fluid channel 2 is circular ring shape, can be also ellipse or rectangle, present embodiment pair certainly
This is not any limitation as.
For ease of making, in present embodiment, the electromagnetic micro valve device uses micro-fluidic chip (MEMS) micro Process side
Formula makes, such as：The first liquid metal spiral winding fluid channel 5, the second liquid metal spiral winding fluid channel 2 and sample
Reagent runner 3 can use etching technics to make.
For ease of making the fexible film 4, spin coating proceeding can be used to make the fexible film 4, the fexible film 4
Can be fexible film made of dimethyl silicone polymer (PDMS), it is described soft in order to ensure the structural strength of the fexible film 4
Property film 4 thickness range be 100 μm~1000 μm, certainly, the fexible film 4 can also be thin slice made of glass.
In the concrete realization, the first liquid metal spiral winding fluid channel 5, the second liquid metal spiral winding miniflow
Road 2 and the preferred selection PDMS of sample reagent runner 3 are made,
To ensure the stability of the electromagnetic micro valve device, in present embodiment, the first liquid metal spiral winding
Between fluid channel 5 and fexible film 4, between fexible film 4 and sample reagent runner 3 and 3 and second liquid of sample reagent runner
It is packaged between state metal spiral coil fluid channel 2 by plasma bonding pattern.
For ease of the reagent flowing in cut-out sample reagent runner 3, so, the cross section of the sample reagent runner 3 is excellent
First select flat semicircle arcuation, it is preferable that the ratio between the height and the width of 3 cross section of sample reagent runner is not more than
1：2, certainly, the height of 3 cross section of sample reagent runner is not more than 100 μm.
To ensure that liquid metal be in liquid in room temperature, in present embodiment, the room temperature liquid metal be mercury, gallium,
Gallium-indium alloy, gallium-indium-tin alloy or gallium indium red brass, certainly, preferentially select gallium, gallium-indium alloy or gallium-indium-tin alloy.
To strengthen electromagnetic driving force, in present embodiment, in the room temperature liquid metal can doped with nano metal powder,
Such as：The nanometer powder of the metals such as iron, nickel.
With reference to Fig. 4~5, in specific implementation, the positive wire 2_ of the second liquid metal spiral winding fluid channel 2 can be passed through
1 and cathode conductor 2_2 can pass through the first liquid metal helix to 2 loading current of the second liquid metal spiral winding fluid channel
The positive wire 5_1 and negative wire 5_2 of fluid channel 5 are enclosed to 5 loading current of the first liquid metal spiral winding fluid channel.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, in relation to the common of technical field
Technical staff, without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore all
Equivalent technical solution falls within scope of the invention, and scope of patent protection of the invention should be defined by the claims.
Claims (9)
1. a kind of electromagnetic micro valve device, it is characterised in that described device includes：Sample reagent runner, filled out by room temperature liquid metal
The the first liquid metal spiral winding fluid channel filled, the second liquid metal spiral winding fluid channel filled by room temperature liquid metal
And fexible film；
The first liquid metal spiral winding fluid channel and the second liquid metal spiral winding fluid channel are oppositely arranged, and described
One liquid metal spiral winding fluid channel is arranged at the first side of the fexible film, and the sample reagent runner is arranged on described soft
Between second side of property film and the second liquid metal spiral winding fluid channel；
The first liquid metal spiral winding fluid channel is equipped with perfusion import and priming outlet so that by irrigate import to
Liquid metal is irrigated in first liquid metal spiral winding fluid channel, full rear unnecessary liquid metal is filled and is overflowed from priming outlet；
It is in be staggered between the first liquid metal spiral winding fluid channel and the second liquid metal spiral winding fluid channel.
2. device as claimed in claim 1, it is characterised in that the number of turns of the second liquid metal spiral winding fluid channel is small
In the number of turns of the first liquid metal spiral winding fluid channel.
3. device as claimed in claim 1 or 2, it is characterised in that the first liquid metal spiral winding fluid channel and
Two liquid metal spiral winding fluid channels are circular ring shape, ellipse or rectangle.
4. device as claimed in claim 1 or 2, it is characterised in that the first liquid metal spiral winding fluid channel, second
Liquid metal spiral winding fluid channel and sample reagent runner are made of etching technics.
5. device as claimed in claim 1 or 2, it is characterised in that the fexible film is polydimethylsiloxane system
Into fexible film, and the thickness range of the fexible film be 100 μm~1000 μm；
Or,
The fexible film is thin slice made of glass.
6. device as claimed in claim 1 or 2, it is characterised in that the first liquid metal spiral winding fluid channel and soft
Between property film, between fexible film and sample reagent runner and sample reagent runner and the second liquid metal spiral winding
It is packaged between fluid channel by plasma bonding pattern.
7. device as claimed in claim 1 or 2, it is characterised in that the height and the width of the sample reagent flow channel cross-section
Between ratio be not more than 1：2.
8. device as claimed in claim 1 or 2, it is characterised in that the room temperature liquid metal is mercury, gallium, gallium-indium alloy, gallium
Indium stannum alloy or gallium indium red brass.
9. device as claimed in claim 8, it is characterised in that doped with nano metal powder in the room temperature liquid metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610173874.6A CN105715865B (en) | 2016-03-24 | 2016-03-24 | Electromagnetic micro valve device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610173874.6A CN105715865B (en) | 2016-03-24 | 2016-03-24 | Electromagnetic micro valve device |
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| Publication Number | Publication Date |
|---|---|
| CN105715865A CN105715865A (en) | 2016-06-29 |
| CN105715865B true CN105715865B (en) | 2018-04-27 |
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| CN201610173874.6A Active CN105715865B (en) | 2016-03-24 | 2016-03-24 | Electromagnetic micro valve device |
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| CN107569764B (en) * | 2017-08-24 | 2020-04-21 | 任鹏涛 | Based on little electromagnetism anus intestines postoperative device of dosing of PDMS |
| CN108345363B (en) * | 2018-02-02 | 2019-09-17 | 中国科学院理化技术研究所 | A kind of logical device unit, computer device and computer |
| CN108417363B (en) * | 2018-02-10 | 2021-05-11 | 深圳大学 | Liquid metal wireless charging coil and preparation method thereof |
| CN109239464A (en) * | 2018-09-20 | 2019-01-18 | 中国电力科学研究院有限公司 | Inductance sensor and liquid metal microwire coil preparation method for transmission & distribution cable |
| CN109185107B (en) * | 2018-11-02 | 2019-08-02 | 北京机械设备研究所 | A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve |
| CN109780318B (en) * | 2019-01-09 | 2020-05-12 | 中国科学院理化技术研究所 | Liquid metal micro-valve device and micro-fluidic system provided with same |
| CN110354926B (en) * | 2019-08-27 | 2021-10-29 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN113944804B (en) * | 2021-08-30 | 2024-01-30 | 北京航空航天大学 | Liquid metal door, method for its preparation and driving and release cartridge employing said door |
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| EP0435237A1 (en) * | 1989-12-27 | 1991-07-03 | Honeywell Inc. | Electrostatic miniature valve and method for its fabrication |
| CN102740977A (en) * | 2010-02-10 | 2012-10-17 | 索尼公司 | Microchip and method of producing microchip |
| CN104140926A (en) * | 2014-07-15 | 2014-11-12 | 大连医科大学附属第二医院 | Device and method for full-automatically sorting circulating tumor cells on micro-fluidic chip |
| CN104625072A (en) * | 2015-01-30 | 2015-05-20 | 上海交通大学 | Method for 3D printing of electromagnetic coil |
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2016
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0435237A1 (en) * | 1989-12-27 | 1991-07-03 | Honeywell Inc. | Electrostatic miniature valve and method for its fabrication |
| CN102740977A (en) * | 2010-02-10 | 2012-10-17 | 索尼公司 | Microchip and method of producing microchip |
| CN104140926A (en) * | 2014-07-15 | 2014-11-12 | 大连医科大学附属第二医院 | Device and method for full-automatically sorting circulating tumor cells on micro-fluidic chip |
| CN104625072A (en) * | 2015-01-30 | 2015-05-20 | 上海交通大学 | Method for 3D printing of electromagnetic coil |
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| CN105715865A (en) | 2016-06-29 |
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