CN111495454B - Liquid metal flow control structure and method based on electromagnetic drive - Google Patents

Liquid metal flow control structure and method based on electromagnetic drive Download PDF

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Publication number
CN111495454B
CN111495454B CN202010464527.5A CN202010464527A CN111495454B CN 111495454 B CN111495454 B CN 111495454B CN 202010464527 A CN202010464527 A CN 202010464527A CN 111495454 B CN111495454 B CN 111495454B
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liquid metal
flow
flow control
micro
channel
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CN111495454A (en
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李平
许诺
臧金良
张涵
安灵椿
刘立滨
王一凡
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Beijing Machinery Equipment Research Institute
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Beijing Machinery Equipment Research Institute
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00Magnets
    • H01F7/06Electromagnets; Actuators including electromagnets
    • H01F7/20Electromagnets; Actuators including electromagnets without armatures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/043Moving fluids with specific forces or mechanical means specific forces magnetic forces

Abstract

The invention discloses a liquid metal flow control structure and a flow control method based on electromagnetic drive, wherein the flow control structure comprises a micro-channel structure, a plurality of groups of flow control units and an electromagnetic drive unit, the micro-channel structure is provided with a flow guide channel for liquid metal to flow, the plurality of groups of flow control units are arranged on the inner wall of the micro-channel structure and are arranged at intervals along the flow direction of the liquid metal in the flow guide channel, and the electromagnetic drive unit is arranged outside the micro-channel structure and is arranged along the flow direction of the liquid metal in the flow guide channel; the liquid metal is doped with magnetic substances, the electromagnetic driving unit can form a magnetic field around the flow guide channel, the liquid metal is attracted to flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substances, and the flow position of the liquid metal in the flow guide channel is limited through the multiple groups of flow control units. The drive control of the invention has large-scale flow capacity and can realize the dynamic reconstruction of the liquid metal form in the flow passage structure.

Description

Liquid metal flow control structure and flow control method based on electromagnetic drive
Technical Field
The invention relates to the technical field of electromagnetic materials, in particular to a liquid metal flow control structure and a flow control method based on electromagnetic driving.
Background
Liquid metals represented by gallium-based alloys combine the excellent properties of conventional rigid and flexible materials, and have melting points near or below room temperature, thus maintaining good conductivity while having fluidity, large deformation, and reconfigurability at room temperature. By injecting the liquid metal into the micro-channel structure, the continuous dynamic reconfiguration of the structural form of the micro-channel structure under the action of the liquid metal is realized, and the micro-channel structure becomes a brand new field with great development prospect and can be widely applied to the aspects of flexible electronics, radio frequency reconfigurable antennas, biological medical treatment and the like.
At present, the drive control of liquid metal in a micro-channel structure is mainly based on the conventional electromagnetic pump, pressure and voltage drive control, but the electromagnetic pump is larger in size at present, is generally applied to a channel structure with a millimeter-centimeter-level liquid metal channel, and cannot realize the electrical blocking function of the liquid metal in the channel structure; the pressure driving control mode needs an external driving pump with larger volume, the miniaturization of the volume of the liquid metal flow control structure is difficult to realize, and the liquid metal flow control structure cannot be integrated with the flow channel structure; in the process of dynamically reconstructing the liquid metal, the voltage is directly applied to the liquid metal and the oxide layer removing solution, so that bubbles are easily generated, the flow channel performance and the electrical performance of the liquid metal in the closed flow channel are influenced, and the surface tension of the liquid metal is large, so that the liquid metal is difficult to apply to a flow channel structure with a long length.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a liquid metal flow control structure and a flow control method, which have small volume, can realize high-precision and large-scale flow of liquid metal, and can realize isolation and blocking and position fixing of the liquid metal in a flow passage structure.
In order to achieve the above object, a first aspect of the present invention provides a liquid metal flow control structure based on electromagnetic driving, including a micro flow channel structure having a flow guide channel for liquid metal to flow, a plurality of sets of flow control units disposed on an inner wall of the micro flow channel structure and disposed at intervals along a flow direction of liquid metal in the flow guide channel, and an electromagnetic driving unit disposed outside the micro flow channel structure and disposed along the flow direction of liquid metal in the flow guide channel; the liquid metal is doped with a magnetic substance, the electromagnetic driving unit can form a magnetic field around the flow guide channel, the liquid metal is attracted to flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substance, and the flowing position of the liquid metal in the flow guide channel is limited through the plurality of sets of flow control units.
Further, each group of flow control units comprises a first microcolumn and a second microcolumn which are oppositely arranged along the inner wall of the micro flow channel structure, and a gap for the liquid metal to flow through is formed between the first microcolumn and the second microcolumn.
Further, the flow control unit and the micro flow channel structure are integrated or arranged in a split mode.
Further, the electromagnetic driving unit comprises a plurality of electromagnetic elements which are arranged at intervals along the flowing direction of the liquid metal in the flow guide channel.
Further, the electromagnetic element is an electromagnet or an electromagnetic coil.
The liquid metal storage unit is communicated with the flow guide channel of the micro channel structure, and the liquid metal injected from the outside is stored in the liquid metal storage unit.
In a second aspect of the present invention, a liquid metal flow control method based on electromagnetic driving is provided, which includes the following steps:
1) performing magnetization treatment on the liquid metal;
2) a plurality of groups of flow control units are arranged on the inner wall of the micro-channel structure at intervals;
3) injecting the magnetically treated liquid metal into the micro-channel structure;
4) and applying a magnetic field around the micro-channel structure to attract the liquid metal to flow along the flow guide channel.
Further, before the step of injecting the magnetically treated liquid metal into the liquid metal flow control structure, the method further comprises: and presetting an acidic or alkaline solution in the flow guide channel of the micro-channel structure.
Further, before the step of injecting the magnetically treated liquid metal into the liquid metal flow control structure, the method further comprises: and vacuumizing the micro-channel structure.
Further, the magnetizing the liquid metal comprises:
doping a magnetic powder in a liquid metal;
and (3) treating the liquid metal doped with the magnetic powder by using an acid solution to mix the liquid metal with the magnetic powder.
Further, applying a magnetic field around the micro flow channel structure to attract the liquid metal to flow along the flow guide channel comprises:
arranging a plurality of electromagnetic elements arranged at intervals around the micro flow channel structure;
generating a magnetic field by applying a current to the plurality of electromagnetic elements;
and attracting the liquid metal to flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substance.
The liquid metal flow control structure formed by integrating the micro-channel structure, the flow control unit and the electromagnetic driving unit has small volume, and the magnetic liquid metal can continuously and reversibly flow in the micro-channel structure under the action of electromagnetic force generated by electrifying the electromagnetic driving unit, so that the drive control has large-scale flow capacity. The liquid metal is isolated, blocked and fixed in position in the flow channel structure by combining a plurality of groups of flow control units in the micro-flow channel structure, the accurate flow position of the liquid metal is controlled, and the reconstruction of the liquid metal form in the flow channel structure is realized.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a liquid metal flow control structure according to an embodiment of the present invention;
fig. 2 is a schematic flow chart of a liquid metal flow control method according to an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Referring to fig. 1, a schematic diagram of a liquid metal flow control structure according to an embodiment of the invention is shown. As shown in fig. 1, the liquid metal flow control structure based on electromagnetic driving comprises a micro flow channel structure 2, a plurality of sets of fluidic units 3 and an electromagnetic driving unit 4, wherein the micro flow channel structure 2 is provided with a flow guide channel 21 for the liquid metal 1 to flow, the plurality of sets of fluidic units 3 are arranged on the inner wall of the micro flow channel structure 2 and are arranged at intervals along the flow direction of the liquid metal in the flow guide channel 21, and the electromagnetic driving unit 4 is arranged outside the micro flow channel structure 2 and is arranged along the flow direction of the liquid metal 1 in the flow guide channel 21; wherein, the liquid metal 1 is doped with a magnetic substance, the electromagnetic driving unit 4 can form a magnetic field around the flow guide channel 21, the liquid metal 1 is attracted to migrate and flow along the flow guide channel 21 by the electromagnetic force between the magnetic field and the magnetic substance, and the flowing position of the liquid metal in the flow guide channel 21 is defined by the plurality of sets of flow control units 3.
The micro-channel structure 2 is provided with a flow guide channel 21 for flowing of liquid metal, the material of the micro-channel structure 2 is a material which is easy to flow control of the liquid metal, such as Polydimethylsiloxane (PDMS), polymethyl methacrylate (PMMA), organic glass, PVC and the like, and the surface roughness of the micro-channel structure 2 is treated, so that the micro-acting force is reduced, and the control and the mobility of liquid metal micro-droplets are improved. The micro-channel structure 2 can be realized by adopting a mold turning process or a micro-nano processing process, including photoetching, nano-imprinting and other process methods. The micro flow channel structure 2 may be composed of a substrate and a cover plate, the flow channel substrate realizes the flow of liquid metal therein, and the cover plate realizes the sealing of the flow channel structure.
In order to simplify the arrangement of the flow control unit 3 and the micro flow channel structure 2, the flow control unit 3 and the micro flow channel structure 2 may be manufactured together by the above-described overmolding process or micro-nano processing process. However, the present invention is not limited to this, and the plurality of sets of fluidic units 3 may be provided separately from the microchannel structure 2 and fixed together. When the liquid metal flows in the diversion channel 21, the liquid metal is subjected to an electromagnetic driving force, an adhesive force of the flow channel structure and the surface tension of the liquid metal, the multiple groups of flow control units 3 arranged on the inner wall of the micro-flow channel structure 2 at intervals can change the surface tension of the liquid metal, when the electromagnetic driving force is greater than the adhesive force and the surface tension, the liquid metal flows, otherwise, the original position is kept. In addition, after the electromagnetic driving force is removed, the liquid metal can be kept unchanged at the current position under the influence of the obstruction and the limiting of a plurality of groups of flow control units 3 arranged at intervals and the surface tension of the liquid metal, so that the high-precision continuous reversible flow driving control of the liquid metal in the micro-channel structure is realized.
Each set of the flow control units 3 includes a first microcolumn 31 and a second microcolumn 32 oppositely disposed along an inner wall of the micro flow channel structure 2, and a gap through which the liquid metal 1 flows is provided between the first microcolumn 31 and the second microcolumn 32. In the present embodiment, the first microcolumn 31 and the second microcolumn 32 are symmetrically disposed at the upper side and the lower side in the flow guide channel 21, but the present invention is not limited thereto, and they may be symmetrically disposed at any position on the sidewall of the flow guide channel 21, for example, symmetrically disposed at the left side and the right side of the flow guide channel 21. It should be noted that the structure of the microcolumns forming the flow control unit 3 is not limited to be arranged symmetrically, and the microcolumns forming the flow control unit may be arranged in a staggered manner.
The electromagnetic driving unit 4 includes a plurality of electromagnetic elements arranged at intervals along the flow direction of the liquid metal 1 in the guide passage 21, and the plurality of electromagnetic elements provide successive electromagnetic forces to the liquid metal 1 through a formed magnetic field when the electromagnetic elements are energized. The position of the electromagnetic element is determined by the driving force received by the liquid metal. The distance of interval between the electromagnetic element is relevant with the magnetic field intensity that the electromagnetic element formed, if the magnetic field intensity that the electromagnetic element formed is big, and there is bigger magnetic attraction between the liquid metal, then the distance between the electromagnetic element can suitably set up some far away, otherwise the distance between the electromagnetic element sets up some near, as long as guarantee from the liquid metal that last level electromagnetic element attracted, can continue to advance under the magnetic attraction effect that next level electromagnetic element provided in principle. When the spacing distance between the electromagnetic elements is set to be larger, the number of the electromagnetic elements covering the whole diversion channel can be correspondingly reduced, the manufacturing cost of the equipment can be reduced, and the small size of the equipment can be effectively controlled. Wherein, the electromagnetic element can be an electromagnet or an electromagnetic coil. In addition, the electromagnetic driving unit 4 may be an electromagnet or an electromagnetic coil with a large size covering the entire length of the diversion passage 21. When the electromagnetic driving unit 4 includes a plurality of electromagnetic elements, each electromagnetic element may be led out of a wire, and whether the electromagnetic element is electrified or not may be controlled to adjust the position of the liquid metal in the diversion channel more flexibly, so as to dynamically reconstruct various forms.
In order to position the initial position of the liquid metal 1 after being injected into the diversion channel 21 and facilitate the injection of the liquid metal, the liquid metal flow control structure may further include a liquid metal storage unit 5, the liquid metal storage unit 5 is communicated with the micro channel structure 2, the liquid metal 1 may be injected into the liquid metal storage unit 5 first, and the liquid metal injected into the liquid metal storage unit 5 may reside therein under its own weight because the position of the liquid metal storage unit 5 is lower than the diversion channel 21. When the position of the liquid metal 1 in the diversion channel 21 is adjusted, firstly, the electromagnetic element closest to the liquid metal storage unit 5 is electrified, the liquid metal stored in the liquid metal storage unit 5 can be attracted into the diversion channel 21 by means of magnetic attraction force generated when the electromagnetic element is electrified, and then the position of the liquid metal in the diversion channel can be adjusted by sequentially electrifying the electromagnetic element.
The present invention further provides a liquid metal flow control method based on electromagnetic driving, and the liquid metal flow control structure adopted in the method has been described in detail in the above embodiments, and is not described herein again. The liquid metal flow control method comprises the following steps:
step S11: and carrying out magnetization treatment on the liquid metal.
Wherein, in order to make liquid metal can flow under the magnetic attraction effect of external magnetic field, need carry out the magnetization to liquid metal and handle, include: doping a magnetic powder in a liquid metal; and treating the liquid metal doped with the magnetic powder by using an acidic solution to mix the liquid metal with the magnetic powder.
The liquid metal surface is wrapped with magnetic powder (iron powder, nickel powder, etc.) with particle diameter of hundreds of nanometers to dozens of micrometers, the liquid metal is mixed with the magnetic particles after being treated by acid solution, namely the magnetic liquid metal, and the magnetic liquid metal and the magnetic particles generate mutual attraction under the action of an external magnetic field to drive the liquid metal to flow.
Step S21: and a plurality of groups of flow control units are arranged on the inner wall of the micro-channel structure at intervals. The micro-fluidic channel structures and the sets of fluidic units can be fabricated together by an overmolding process or a nanoimprint process. The micro-channel structure comprises a substrate and a cover plate, and the substrate structure and the cover plate are packaged to realize the working environment of sealing and isolating the liquid metal in the micro-channel structure. When the substrate and the cover plate are packaged, firstly, a packaging cover plate structure is prepared, the packaging cover plate structure is made of materials such as PDMS (polydimethylsiloxane), PMMA (polymethyl methacrylate), silica gel and the like, and then the packaging cover plate and the substrate are sealed through high-temperature and plasma technologies to form a sealed micro-channel structure.
Step S31: and injecting the liquid metal after the magnetic treatment into the liquid metal flow control structure.
In an air environment, the liquid metal is easy to act with air to form an oxide layer on the surface of the liquid metal, the thickness of the oxide layer is 3-5nm, and the oxide layer can be removed by adopting an acidic or alkaline solution. Before the liquid metal after magnetic treatment is injected into the liquid metal flow control structure, an acidic or alkaline solution can be preset in the flow guide channel of the micro-channel structure to remove an oxidation layer of the liquid metal in the convection channel structure and improve the fluidity of the liquid metal in the flow guide channel.
Before the liquid metal after magnetic treatment is injected into the liquid metal flow control structure, the micro-channel structure can be vacuumized, so that the vacuum state in the flow guide channel is realized, and the liquidity of the liquid metal in the flow guide channel can be improved.
In order to locate the initial position of the liquid metal 1 after being injected into the guide passage 21 and to facilitate the injection of the liquid metal, the liquid metal may be injected into the liquid metal storage unit. However, the invention is not limited thereto, and the liquid metal may be directly injected into the flow guide channel of the micro flow channel structure.
Step S41: and applying a magnetic field around the micro-channel structure to attract the liquid metal to flow along the flow guide channel.
The manner of applying the magnetic field around the microchannel structure may include various manners. In the present embodiment, a plurality of electromagnetic elements are arranged at intervals around the micro flow channel structure. Generating a magnetic field by applying a current to the plurality of electromagnetic elements; and the liquid metal is attracted to migrate and flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substance. Through the distributed electromagnetic elements, electromagnetic fields are sequentially generated under the action of current and act on the magnetic liquid metal in a stepped mode, so that the liquid metal is driven and controlled and fixed in position in the flow channel structure, and further the electrical conduction and the reconstruction of the liquid metal form in the flow channel structure are achieved.
The invention can be applied to the fields of camouflage, communication, heat dissipation, energy collection and the like, and realizes dynamic regulation and control capability. Particularly for the field of radio frequency antennas, the dynamic reconfiguration of the antenna channel structure is realized by driving and controlling different flowing positions of the liquid metal in the channel structure, so as to dynamically adjust the performance parameters of the antenna, such as frequency, polarization mode, directional diagram and the like.
The invention integrates the electromagnet (electromagnetic coil) in the flow channel structure of the liquid metal flow, integrates the liquid metal drive control system with the flow channel structure, utilizes the electromagnetic force between the magnetic liquid metal and the electromagnet (electromagnetic coil) to drive the liquid metal to flow in the flow channel structure, utilizes the flow channel structure to control the accurate flow position of the liquid metal, realizes the drive control of the liquid metal in the long-distance closed flow channel structure and the complex closed flow channel structure, and enables the liquid metal flow channel structure to realize the miniaturization design.
The terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying a number of the indicated technical features. Thus, a defined "first" or "second" feature may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, where the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (9)

1. The liquid metal flow control structure based on electromagnetic driving is characterized by comprising a micro-channel structure, a plurality of groups of flow control units and an electromagnetic driving unit, wherein the micro-channel structure is provided with a flow guide channel for liquid metal to flow, the plurality of groups of flow control units are arranged on the inner wall of the micro-channel structure and are arranged at intervals along the flow direction of the liquid metal in the flow guide channel, each group of flow control units comprises a first micro-column and a second micro-column which are oppositely arranged along the inner wall of the micro-channel structure, a gap for the liquid metal to flow through is arranged between the first micro-column and the second micro-column, and the electromagnetic driving unit is arranged outside the micro-channel structure and is arranged along the flow direction of the liquid metal in the flow guide channel; the liquid metal is doped with a magnetic substance, the electromagnetic driving unit can form a magnetic field around the flow guide channel, the liquid metal is attracted to flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substance, and the liquid metal is positioned between the two adjacent groups of flow control units under the limiting of the two adjacent groups of flow control units.
2. The liquid metal flow control structure of claim 1, wherein the fluidic unit is integrated with or separate from the microchannel structure.
3. The liquid metal flow control structure of claim 1, wherein the electromagnetic drive unit includes a plurality of electromagnetic elements that are spaced apart along a flow direction of the liquid metal in the diversion channel.
4. The liquid metal flow control structure of claim 1, further comprising a liquid metal reservoir unit in communication with the microchannel structure, the liquid metal in the liquid metal reservoir unit being capable of being injected into the flow channel of the microchannel structure.
5. A liquid metal flow control method for a liquid metal flow control structure as claimed in any one of claims 1 to 4, comprising the steps of:
1) performing magnetization treatment on the liquid metal;
2) a plurality of groups of flow control units are arranged on the inner wall of the micro-channel structure at intervals; each group of flow control units comprises a first microcolumn and a second microcolumn which are oppositely arranged along the inner wall of the micro-channel structure, and a gap for the liquid metal to flow through is formed between the first microcolumn and the second microcolumn;
3) injecting the magnetically treated liquid metal into a liquid metal flow control structure;
4) and applying a magnetic field around the micro-channel structure to attract the liquid metal to flow along the flow guide channel, and positioning the liquid metal between the two adjacent groups of flow control units under the limit of the two adjacent groups of flow control units.
6. The liquid metal flow control method of claim 5, further comprising, prior to injecting the magnetically treated liquid metal into the liquid metal flow control structure:
and presetting an acidic or alkaline solution in the flow guide channel of the micro-channel structure.
7. The liquid metal flow control method of claim 5, further comprising, prior to injecting the magnetically treated liquid metal into the liquid metal flow control structure:
and vacuumizing the micro-channel structure.
8. The liquid metal flow control method of claim 5, wherein the magnetizing the liquid metal comprises:
doping a magnetic powder in a liquid metal;
and treating the liquid metal doped with the magnetic powder by using an acidic solution to mix the liquid metal with the magnetic powder.
9. The liquid metal flow control method of claim 5, wherein applying a magnetic field around the micro flow channel structure to attract the liquid metal to flow along the flow guide channel comprises:
arranging a plurality of electromagnetic elements arranged at intervals around the micro flow channel structure;
generating a magnetic field by applying a current to the plurality of electromagnetic elements;
and attracting the liquid metal to flow along the flow guide channel through the electromagnetic force between the magnetic field and the magnetic substance.
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