CN113323848A - Liquid metal driving device based on piezoelectric film, control method and manufacturing method - Google Patents
Liquid metal driving device based on piezoelectric film, control method and manufacturing method Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
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Images
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Micromachines (AREA)
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Abstract
The invention provides a liquid metal driving device based on a piezoelectric film, a driving control method and a preparation method. The invention realizes reversible continuous or stepped flow control of the liquid metal in the flexible micro-channel structure, so that the liquid metal can flow in a large scale with higher precision, and the position of the liquid metal in the flow channel structure can be accurately controlled, thereby being applicable to the fields of camouflage, communication, heat dissipation, energy collection and the like and realizing dynamic regulation and control capability.
Description
Technical Field
The invention belongs to the technical field of liquid metal driving devices, and particularly relates to a liquid metal driving device based on a piezoelectric film, a control method and a manufacturing method.
Background
Liquid metal represented by gallium-based alloy has the characteristics of good conductivity, continuous fluidity at normal temperature, large deformation, controllability and the like, so that great attention is paid in recent years, and the gallium-based alloy has excellent application prospects in the fields of flexible electronics, flexible sensing, reconfigurable radio frequency systems and the like. How to drive and control the continuous flow of liquid metal in a specific structure with high precision and realize the characteristic of random reconfiguration function of electrical length which cannot be achieved by conventional metal materials such as gold, silver, copper and the like is a key problem of research and breakthrough in the field. For example, in a metamaterial unit structure and a radio frequency antenna structure, the microfluidic control of liquid metal is utilized, and the broadband adjustable radio frequency antenna structure has broadband regulation and performance (frequency, polarization mode and directional diagram) reconstruction capability on a conventional metamaterial and radio frequency antenna structure.
At present, the drive control of liquid metal in a micro-channel structure is mainly based on the conventional electromagnetic pump, pressure and voltage drive control, but the electromagnetic pump is large in size at present, is generally applied to a channel structure with a millimeter-centimeter-level liquid metal channel, and cannot realize the electrical blocking effect of the liquid metal in the channel structure; the pressure driving control mode needs an external driving pump with larger volume, is difficult to realize volume miniaturization, and cannot be integrated with the flow channel structure; in the process of dynamically reconstructing the liquid metal, the voltage is directly applied to the liquid metal and the oxide layer removing solution, so that the electrical property of the liquid metal is influenced, and the surface tension of the liquid metal is large, so that the voltage-driven control method is difficult to apply to a runner structure with a long length.
Therefore, how to improve the existing liquid metal driving control method and improve the controllability of the flow process is an important problem in the field.
Disclosure of Invention
In order to overcome the problems in the prior art, the invention provides a liquid metal driving device based on a piezoelectric film, which comprises a substrate and a cover plate, wherein a flexible micro-channel structure is formed on the substrate, a liquid metal liquid storage tank capable of containing liquid metal is formed at one end of the flexible micro-channel structure, a film structure is integrated on the flexible micro-channel structure, and the film structure is subjected to displacement deformation under the control of voltage and is deformed, so that the liquid metal filled in the flexible micro-channel structure is driven to flow through the extrusion effect.
Further, the thin film structure is arranged at the bottom of the liquid metal liquid storage tank.
Further, the thin film structure is arranged on the outer wall of the flexible micro-channel structure. Preferably, the number of the film structures is several, and several of the film structures are arranged on the outer wall of the flexible microchannel structure at intervals. More preferably, a plurality of thin film structures are arranged at intervals on the outer wall of the liquid metal removing reservoir part of the flexible microchannel structure.
Furthermore, the liquid metal liquid storage tank is L-shaped, and the width of the liquid metal liquid storage tank extending downwards is larger than that of the flexible micro-channel structure; the flexible microchannel structure seals the liquid metal within its interior.
Furthermore, the film structure is a piezoelectric film layer, and the width of the piezoelectric film layer is millimeter-centimeter level; the thickness is in the micron-millimeter level.
Furthermore, a plurality of micro-column structures are further arranged on the inner wall of the flexible micro-channel structure, and the film structure is arranged on the outer wall of the flexible micro-channel structure and at a position corresponding to the micro-column structures in the vertical direction. Preferably, the diameter and height of the microcolumn structure are in the order of millimeters to centimeters. Preferably, the micro-column structure is a cylinder, a cuboid or a cube structure.
According to the invention, there is also provided a method for driving liquid metal by any one of the above liquid metal driving devices based on piezoelectric film, comprising the following steps:
aiming at the type of the film in the device, the film is subjected to displacement deformation in a corresponding mode, and the inner wall of the flexible micro-channel structure is driven to deform; preferably, the piezoelectric film is subjected to displacement deformation under the control of voltage; and the liquid metal controllably flows in the flexible micro-channel structure by utilizing the extrusion effect of the deformation of the inner wall of the flexible micro-channel structure.
Furthermore, the continuity and/or gradient control of the liquid metal is realized through the thin film structure arranged at the bottom of the liquid metal storage tank and/or on the outer wall of the flexible microchannel structure.
According to the invention, the invention also provides a preparation method of the liquid metal driving device based on the piezoelectric film, which comprises the following steps:
s1, preparing a flexible micro-channel structure by using a flexible material, wherein the flexible micro-channel structure is formed by bonding and sealing a flow channel substrate and a cover plate; s2, injecting liquid metal into the flexible micro-channel structure through a micro process, and removing a surface oxidation layer of the liquid metal in the flexible micro-channel structure through acidic and alkaline solutions; the method comprises the following steps of forming a closed and air-isolated working environment in the flowing process of liquid metal in a flexible micro-channel structure through packaging; s3, integrating the outer wall of the flexible micro-channel structure with a thin film material or integrating the bottom of the liquid metal liquid storage tank of the flexible micro-channel structure with the thin film material.
Further, the flexible material is made of Polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), polyvinyl chloride (PVC) and silica gel.
Further, the thin film structure is a piezoelectric thin film layer. Preferably, the flexible microchannel structure is realized by adopting an inverse mould process or a micro-nano processing process, and specifically comprises a photoetching process and a nano-imprinting process.
Preferably, before the liquid metal is injected into the flexible microchannel structure, the flexible microchannel structure is firstly vacuumized in a dry vacuum operation environment to realize the vacuum state of the flexible microchannel structure; and then, under a dry vacuum environment, injecting liquid metal into the flexible microchannel structure by a micro-injection process.
Preferably, the micro-injection is realized by a high-precision micro-injector and a 3D direct writing mode.
The invention has the advantages of
According to the invention, the piezoelectric film material is integrated in the flexible micro-channel structure in which the liquid metal flows, namely, the liquid metal driving control system and the flexible micro-channel flow structure are integrated, the flexible micro-channel structure design is combined, and the inverse piezoelectric effect of the piezoelectric film layer is utilized, so that the piezoelectric film drives the liquid metal to flow in the flexible micro-channel structure, and the driving control of the liquid metal in a long-distance flow channel structure and a complex flow channel structure is realized, thereby controlling the electrical conduction and blocking of the liquid metal in the flow channel structure, and realizing the miniaturized design of the liquid metal flow channel structure. By adopting the technical scheme of the invention, the liquid metal can flow in a higher precision and large scale, the position of the liquid metal in the micro-channel structure can be accurately controlled, and the liquid metal micro-channel structure can be applied to the fields of camouflage, communication, heat dissipation, energy collection and the like, such as metamaterials and radio frequency antennas, and the dynamic controllable adjustment of the performance is realized.
Drawings
FIG. 1 is a schematic diagram of a piezoelectric film-based liquid metal driving apparatus according to an embodiment of the present invention;
fig. 2 shows a schematic structural diagram of a liquid metal driving device based on a piezoelectric film in another embodiment of the present invention.
Reference numerals: 1-liquid metal; 2-a flexible microchannel structure; 3-micro-column structure; 4-a piezoelectric thin film layer; 5-liquid metal reservoir.
Detailed Description
The present invention will be described in further detail with reference to specific examples. It is to be understood that the following examples are only illustrative and explanatory of the present invention and should not be construed as limiting the scope of the present invention. All the technologies realized based on the above-mentioned contents of the present invention are covered in the protection scope of the present invention.
The invention provides a liquid metal driving device based on a piezoelectric film, which comprises a substrate and a cover plate, wherein a flexible micro-channel structure 2 is formed on the substrate, a liquid metal liquid storage tank 5 capable of containing liquid metal 1 is formed at one end of the flexible micro-channel structure 2, and a film structure is integrated on the flexible micro-channel structure 2, wherein the film structure is subjected to displacement deformation under the control of voltage, and the flexible micro-channel structure 2 is subjected to deformation, so that the liquid metal 1 filled in the flexible micro-channel structure 2 is driven to flow through the extrusion effect.
In a preferred embodiment of the present invention, as shown in fig. 1, the thin film structure is disposed at the bottom of the liquid metal reservoir 5 for deforming the bottom of the liquid metal reservoir 5 in a vertical direction, so as to realize flow driving of the liquid metal 1 in the flexible microchannel structure, thereby realizing continuous control of the liquid metal 1.
As shown in fig. 2, in another preferred embodiment of the present invention, the thin film structure is disposed on an outer wall of the flexible micro-channel structure 2, the flexible micro-channel structure 2 seals the liquid metal 1 therein, the thin film structure is deformed by displacement under the control of voltage, different thin film structures are deformed differently by applying different voltages, and the outer wall of the flexible micro-channel structure 2 is driven to deform in different amplitudes at different positions, so that the liquid metal 1 is driven to flow in the flexible micro-channel structure 2 by squeezing, thereby realizing gradient control of the liquid metal 1.
Preferably, the thin film structure employs the piezoelectric thin film layer 4. The piezoelectric thin film layer 4 may be a single layer or a plurality of layers, and the multilayer structure can realize larger displacement deformation. Preferably, the number of the film structures is several, and several of the film structures are arranged on the outer wall of the flexible microchannel structure 2 at intervals. More preferably, the distance between the plurality of thin film structures is in the order of micrometers to centimeters, and is specifically designed according to the requirement of the driving fluid. It is further preferred that several membrane structures are arranged at intervals on the outer wall of the flexible microchannel structure 2 excluding the liquid metal reservoir 5.
Preferably, the width of the piezoelectric film layer 4 is millimeter-centimeter level; the thickness is in the micron-millimeter level. The width and thickness of the piezoelectric thin film layer 4 can be set according to the pressure value required by the driving fluid.
The specific working principle of the invention is as follows: based on the inverse piezoelectric mechanism of the piezoelectric film material, the piezoelectric film layer 4 deforms under the action of voltage, the piezoelectric film layer 4 changes the form of the flexible microchannel structure 2 through self displacement deformation, or the volume of the liquid metal liquid storage tank 5 is adjusted to deform, so that the flow driving of the liquid metal 1 in the microchannel structure 2 is realized, and if the liquid metal 1 is extruded from the liquid metal liquid storage tank 5, the migration and the flow of the liquid metal 1 in the flexible microchannel structure 2 are realized. The deformation amount of the piezoelectric film material is different under the action of different voltages. Therefore, the invention realizes the control or flow of the flow quantity of the liquid metal 1, and further regulates and controls the flow response of the liquid metal 1 in the flexible micro-channel structure 2.
The deformation of the liquid metal liquid storage tank 5 is in a micrometer-millimeter level, the flow rate control realizes a microliter/min level, and the width and height of the flexible microchannel structure are in a micrometer-millimeter level.
The invention realizes the drive control and isolation blocking of the liquid metal 1 in the flow channel structure by integrating the liquid metal liquid storage tank 5 and the piezoelectric film, and realizes the reconstruction of the form of the liquid metal 1 in the flow channel structure. By regulating and controlling the micro-flow control property and the optional flowability of the liquid metal 1 in the flexible micro-channel structure, the reversible continuous or stepped flow control of the liquid metal 1 is realized, the structural form and the scale parameters of the liquid metal 1 in the flow channel are reconstructed, and the designed flow structural form and the material properties are further regulated. The device can be applied to the field of metamaterials and radio frequency antennas, and dynamic reconstruction of the metamaterial and antenna channel structures is realized by driving and controlling different flowing positions of the liquid metal 1 in the channel structures so as to dynamically adjust performance parameters of the metamaterials and the antennas.
As a more preferable mode, a plurality of micro-column structures 3 are further disposed on the inner wall of the flexible micro-channel structure 2. Wherein, piezoelectric film layer 4 sets up in the outer wall of flexible microchannel structure 2 and on the position that corresponds with little post structure 3 in vertical direction, mutually supports with corresponding piezoelectric film layer 4 through different little post structures 3 to this provides better gradient nature control effect, through piezoelectric film layer 4's deformation, form the mutual extrusion jointly with little post structure and act on liquid metal, realize liquid metal's flow control, simultaneously, utilize little post structure to realize fixing of liquid metal flow position.
According to the invention, the driving method of the liquid metal driving device based on the piezoelectric film is also provided, and comprises the following steps: aiming at the type of the film in the device, the film is subjected to displacement deformation in a corresponding mode, the inner wall of the flexible micro-channel structure 2 is driven to deform, and the liquid metal 1 controllably flows in the micro-channel structure by utilizing the extrusion effect of the deformation of the inner wall of the flexible micro-channel structure 2.
The drive control method of the liquid metal drive device based on the piezoelectric film can integrate the flexible micro-channel structure 2, the liquid metal liquid storage tank 5 and the piezoelectric film layer 4, namely, the piezoelectric film layers 4 and the flexible micro-channel structure 2 are sequentially integrated, the deformation of the piezoelectric film layers corresponding to different voltages is different, each piezoelectric film layer deforms in the vertical direction, the distributed piezoelectric film layers are sequentially electrified to generate a stepped drive force, the deformation of the extrusion control flow channel structure is adjusted by controlling the response of the piezoelectric film layers 4, the miniaturization and high-precision response of the liquid metal drive is realized, and the liquid metal has continuous reversible flow and large-scale flow capacity in the flow channel structure. Thereby realizing the reconstruction of the liquid metal form in the flow passage structure.
In addition, the invention also provides a manufacturing method of the liquid metal driving device based on the piezoelectric film, which comprises the following steps:
s1, preparing a flexible micro-channel structure 2 by using a flexible material;
s2, injecting the liquid metal 1 into the flexible micro-channel structure 2 through a micro-process, removing a surface oxidation layer of the liquid metal 1 in the flexible micro-channel structure 2 through an acidic solution and an alkaline solution, and realizing the flow of the liquid metal 1 in the flexible micro-channel structure 2 through encapsulation to form a closed and air-isolated working environment;
s3, forming a piezoelectric thin film layer 4 on the outer wall of the flexible micro-channel structure 2, for example, the flexible micro-channel structure 2 is formed in an integrated manner with the piezoelectric thin film material.
The flexible material can be Polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), polyvinyl chloride (PVC), silica gel and the like, and is formed by adopting an inverse mould process or a micro-nano processing process, including photoetching, nano-imprinting and other process methods. And bonding and sealing the base structure and the cover plate structure of the flexible micro-channel structure 2 by high-temperature and plasma technology. In an air environment, the liquid metal 1 is easy to act with air to form an oxide layer on the surface of the liquid metal 1, the thickness of the oxide layer is about 3-5nm, and the oxide layer can be removed by adopting hydrochloric acid or acid oil to wrap the liquid metal. Therefore, the flexible microchannel structure 2 is circulated with hydrochloric acid or an acidic oil before the liquid metal 1 is injected into the flexible microchannel structure 2.
Preferably, before injecting the liquid metal into the flexible microchannel structure 2, firstly, in a dry vacuum operation environment, the flexible microchannel structure 2 is vacuumized to realize a vacuum state; liquid metal 1 is then injected into the flexible microchannel structure 2 by a micro-injection process in a dry vacuum environment. Preferably, the micro-injection is realized by a high-precision micro-injector and a 3D direct writing mode.
The embodiments of the present invention have been described above. However, the present invention is not limited to the above embodiment. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (11)
1. The utility model provides a liquid metal drive arrangement based on piezoelectric film, its characterized in that, includes basement and apron, be formed with flexible micro channel structure (2) on the basement the one end of flexible micro channel structure (2) is formed with liquid metal liquid storage tank (5) that can hold liquid metal (1), the integration has the film structure on flexible micro channel structure (2), the film structure takes place displacement deformation under voltage control, and makes flexible micro channel structure (2) take place deformation, thereby fill through the extrusion drive liquid metal (1) in the flexible micro channel structure (2) flow.
2. A liquid metal drive as claimed in claim 1, wherein said membrane structure is disposed at the bottom of said liquid metal reservoir (5).
3. A liquid metal actuation apparatus according to claim 1, wherein the membrane structure is disposed on an outer wall of the flexible microchannel structure (2).
Preferably, the number of the film structures is several, and several film structures are arranged on the outer wall of the flexible micro-channel structure (2) at intervals.
More preferably, a plurality of the film structures are arranged on the outer wall of the flexible microchannel structure (2) at intervals except for the liquid metal liquid storage tank (5).
4. A liquid metal driving device according to claim 1, characterized in that the liquid metal reservoir (5) is L-shaped and extends with a width greater than the width of the flexible microchannel structure (2); the flexible microchannel structure (2) seals the liquid metal (1) inside.
5. A liquid metal actuation device according to any one of claims 1 to 4, wherein the membrane structure is a piezoelectric membrane layer (4), the width of the piezoelectric membrane layer (4) being in the range of millimetres to centimetres; the thickness is in the micron-millimeter level.
6. The device according to claim 1, wherein the inner wall of the flexible microchannel structure (2) is further provided with a plurality of micro-pillar structures (3), and the thin-film structure is arranged on the outer wall of the flexible microchannel structure (2) at a position corresponding to the micro-pillar structures (3) in the vertical direction.
Preferably, the diameter and height of the micro-pillar structure (3) are in the order of millimeters to centimeters.
Preferably, the micro-column structure (3) is a cylinder, a cuboid or a cube structure.
7. Method for driving a liquid metal with a piezoelectric film based liquid metal driving device according to any of claims 1 to 6, comprising the steps of:
aiming at the type of the film in the device, the film is caused to displace and deform in a corresponding mode, and the inner wall of the flexible micro-channel structure (2) is driven to deform;
and (3) the liquid metal (1) is controlled to flow in the flexible micro-channel structure (2) by utilizing the extrusion effect of the deformation of the inner wall of the flexible micro-channel structure (2).
Preferably, the piezoelectric film layer is controlled by different voltages to generate different displacement deformations.
8. The method according to claim 7, characterized in that the control of the continuity and/or gradient of the liquid metal is achieved by a thin film structure provided on the bottom of the liquid metal reservoir (5) and/or on the outer wall of the flexible microchannel structure (2).
9. A method of making a liquid metal drive unit drive of any one of claims 1 to 6, comprising the steps of:
s1, preparing a flexible micro-channel structure (2) by using a flexible material, wherein the flexible micro-channel structure (2) is formed by bonding and sealing a flow channel substrate and a cover plate;
s2, injecting the liquid metal (1) into the flexible micro-channel structure (2) through a micro-process, and removing a surface oxidation layer of the liquid metal (1) in the flexible micro-channel structure (2) through an acidic and alkaline solution; the liquid metal (1) flows in the flexible micro-channel structure (2) through encapsulation to form a closed and air-isolated working environment;
s3, integrating the outer wall of the flexible micro-channel structure (2) with a thin film material or integrating the bottom of the liquid metal liquid storage tank (5) of the flexible micro-channel structure (2) with the thin film material.
10. The method of claim 9, wherein: the flexible material is made of polydimethylsiloxane, polyethylene terephthalate, polyvinyl chloride and silica gel.
11. A method according to claim 9, characterized in that the thin-film structure is a piezoelectric thin-film layer (4).
Preferably, the flexible micro-channel structure (2) is realized by adopting an over-mold process or a micro-nano processing process, and specifically comprises photoetching and nano-imprinting processes.
Preferably, before injecting the liquid metal into the flexible microchannel structure (2), firstly, vacuumizing the flexible microchannel structure (2) in a dry vacuum operation environment to realize the vacuum state of the flexible microchannel structure (2); and then, under a dry vacuum environment, realizing the injection of the liquid metal (1) into the flexible microchannel structure (2) through a micro-injection process.
Preferably, the micro-injection is realized by a high-precision micro-injector and a 3D direct writing mode.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114263594A (en) * | 2021-11-18 | 2022-04-01 | 北京机械设备研究所 | Liquid metal dynamic driving method based on pressure and voltage |
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| US20200139368A1 (en) * | 2018-11-07 | 2020-05-07 | Microjet Technology Co., Ltd. | Micro channel structure |
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| CN110955041A (en) * | 2020-01-10 | 2020-04-03 | 太原理工大学 | SEBS film-based all-solid-state variable-focus piezoelectric driving type micro-lens |
| CN111495454A (en) * | 2020-05-27 | 2020-08-07 | 北京机械设备研究所 | Liquid metal flow control structure and flow control method based on electromagnetic drive |
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| CN114263594A (en) * | 2021-11-18 | 2022-04-01 | 北京机械设备研究所 | Liquid metal dynamic driving method based on pressure and voltage |
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