CN202707437U - Micro pump based on GMF (Giant Magnetostrictive Thin Film) driver - Google Patents
Micro pump based on GMF (Giant Magnetostrictive Thin Film) driver Download PDFInfo
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- CN202707437U CN202707437U CN 201220443035 CN201220443035U CN202707437U CN 202707437 U CN202707437 U CN 202707437U CN 201220443035 CN201220443035 CN 201220443035 CN 201220443035 U CN201220443035 U CN 201220443035U CN 202707437 U CN202707437 U CN 202707437U
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- thin film
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Abstract
The utility model discloses a micro pump based on a GMF (Giant Magnetostrictive Thin Film) driver. The micro pump comprises a lower pump body (1), a substrate (6) and an upper pump body (9) which are sequentially stacked on the lower pump body (1), wherein the upper side of the substrate (6) is plated with a thin film (8) with a positive magnetostrictive effect, the lower side of the substrate (6) is plated with a thin film (12) with a converse magnetostrictive effect, the bottom surface of the substrate (6) and the lower pump body (1) form a pump cavity (4) and a valve cavity (11), the pump cavity (4) and the valve cavity (11) are communicated through through holes, the pump cavity (4) is provided with a liquid inlet pipeline (3) in a connection manner, the valve cavity (11) is provided with a liquid outlet pipeline (13) in the connection manner, the pump cavity (4) and the valve cavity (11) are respectively provided with a valve film of a cantilever beam valve structure, the pump body (1) is externally provided with a coil rack (5), the coil rack (5) is coiled with a driving coil (7), the thin films with the magnetostrictive effects drive the substrate to swing vertically under the action of a magnetic field, and the liquid in the valve cavity (11) can be forced to generate the circulating flow in a single direction. The micro pump disclosed by the utility model has the characteristics that the output pressure is large, the driving frequency is high, the controllability is strong, and the like.
Description
Technical field
The present invention relates to micropump, particularly a kind of with the micropump of magnetostrictive thin film as the driving material.
Background technique
Micropump has boundless application prospect as the core of microfluid system in fields such as the conveying of medicine micrometeor, release, Micro-volume liquid sampling, the injection of oil plant trace, cell separation, integrating electronic element cooling and microchemical analysis, space flight.At present the more mechanical type film type Micropump driving principle of research have that piezoelectricity, static, electromagnetism, hot gas are moving, heat flow, bimetallic effect and shape memory effect driving etc.Piezoelectricity, static, electromagnetic type belong to high-frequency drive, and flow is larger, use extensivelyr, but driving voltage is too high, usually at upper hectovolt, is difficult to be complementary with IC circuit control voltage.And that hot gas is moving, heat flow, bimetallic effect and shape memory effect drive driver frequency is lower, and the flow of output is also less.Can reach kilo hertz magnetic on the hundreds of based on the micropump driver frequency of magnetostriction materials, and magnetostriction materials are that the magnetic field that provides by coil is flexible, belong to contactless driving, the failure modes such as electrical breakdown can not occur as piezoelectric constant.Therefore utilize magnetostriction materials can improve life-span and the service behaviour of micropump as driver.
Summary of the invention
The objective of the invention is the defective for existing Micropump existence, utilize the characteristic of super magnetostriction material, propose a kind of novel micropump, to improving output flow and the delivery pressure of Micropump.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of micropump based on the giant magnetostrictive thin film driver, its structural feature is: comprise lower pump body, press substrate and the upper pump casing be stacked on the lower pump body successively, described substrate upside is coated with the film of direct magnetostriction effect, and downside is coated with the film of counter magnetostriction effect; The bottom surface of substrate and lower pump body consist of pump cavity and valve chamber, and pump cavity is communicated with by through hole with valve chamber; Described pump cavity is connected with input duct, and described valve chamber is connected with the fluid pipeline, and described input duct and pump cavity connectivity part are provided with the liquid feed valve film, and described liquid feed valve film is bonded in by an end and forms the cantilever valve structure on the pump cavity inwall; Described valve chamber and pump cavity connectivity part are provided with the liquid valve film, and described liquid valve film is bonded in by an end and forms the cantilever valve structure on the valve chamber inwall; Described pump housing peripheral hardware has coil carrier, is full of drive coil on the coil carrier.
Structural feature of the present invention also is:
Described direct magnetostriction effect film is made by the TbDyFe alloy, and described counter magnetostriction effect film is made by the SmFe alloy; Described direct magnetostriction effect film 8 and counter magnetostriction effect film 12 are plated in respectively along the axial substrate left and right sides of pump cavity by being two.
Described substrate is made by the material silicon sheet with high tension.
Described liquid feed valve film and liquid valve film are made by having elasticity, toughness, corrosion resistant rubber, plastic cement or silicon thin film.
The present invention compared with prior art, the useful effect that has is:
1, the present invention is than existing Micropump, and driving current is little, usually less than 1A, is convenient to realize circuit safety control.
2, driver frequency of the present invention is high, and the output of larger flow and larger pressure can be provided.
3, field drives of the present invention belongs to contactless driving, and without impacting, noise is low.
Description of drawings
Fig. 1 is structural principle schematic diagram of the present invention.
Fig. 2 is stereochemical structure decomposing schematic representation of the present invention.
Among the figure: 1, lower pump body, 2, the liquid feed valve film, 3, input duct, 4, pump cavity, 5, coil carrier, 6, substrate, 7, drive coil, 8, the direct magnetostriction effect film, 9, upper pump casing, 10, liquid valve film, 11, valve chamber, 12, the counter magnetostriction effect film, 13, the fluid pipeline.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, micropump comprises lower pump body 1, presses substrate 6 and the upper pump casing 9 that is stacked on the lower pump body 1 successively, and substrate 6 upsides are coated with the film 8 of direct magnetostriction effect, and downside is coated with the film 12 of counter magnetostriction effect; The bottom surface of substrate 6 and lower pump body consist of pump cavity 4 and valve chamber 11, and pump cavity 4 and valve chamber 11 are in connected state by through hole; Pump cavity is connected with input duct 3, and valve chamber is connected with fluid pipeline 13, and input duct 3 is provided with liquid feed valve film 2 with pump cavity 4 connectivity parts, and liquid feed valve film 2 is bonded in by an end and forms the cantilever valve structure on the pump cavity inwall; Valve chamber 11 is provided with liquid valve film 10 with pump cavity 4 connectivity parts, and liquid valve film 10 is bonded in by an end and forms the cantilever valve structure on the valve chamber inwall; Pump housing peripheral hardware has coil carrier 5, is full of drive coil 7 on the coil carrier 5; Drive coil 7 produces magnetic field under the effect of electric current, for the magnetostrictive thin film driver provides field drives.
During implementation, direct magnetostriction effect film 8 is made by TbDyFe alloy (commercially available), has counter magnetostriction effect film 12 and is made by SmFe alloy (commercially available); Direct magnetostriction effect film 8 and counter magnetostriction effect film 12 are plated in respectively along the axial substrate left and right sides of pump cavity by being two.Substrate 6 is made by the material silicon sheet with high tension.Liquid feed valve film and liquid valve film can be made by having enough elasticity, toughness, corrosion resistant rubber, plastic cement or silicon thin film.Liquid valve film one end is adhered to the valve chamber inwall, and the cantilever valve of formation can stop the liquid medium in the valve chamber to flow back to pump cavity, realizes the unidirectional output of liquid.
Working principle is: the Ac that passes into certain frequency at drive coil 7, coil produces corresponding alternating magnetic field under the effect of Ac, when electric current increases, magnetic field increases along with the increase of electric current, film 8 with direct magnetostriction effect extends under magnetic fields, and the film 12 with counter magnetostriction effect shortens under the effect in magnetic field, thereby driving substrate 6 deflects down, compressor pump cavity 4, the pressure of pump cavity 4 is increased, promote liquid valve film 10 1 ends and open, produce certain interval, liquid flows into valve chamber 11, provides micro fluid through the fluid pipeline to system again.The liquid feed valve film is close to input duct under the elastic acting force of self material and fluid pressure effect, stop liquid to flow out from input duct, realizes the discharge opeing process of Micropump.
When the electric current in passing into coil is reduced to zero from the peak value of electric current, magnetic field reduces along with reducing of electric current, positive magnetostriction film 8 shortens, 12 elongations of converse magnetostriction film upward deflect thereby drive substrate 6, and the volume of pump cavity 4 increases, pressure reduces, liquid is pushed liquid feed valve film 2 open under atmospheric effect a end enters pump cavity 4, and the liquid valve film is close to the fluid pipeline and is stoped liquid to flow out under self elastic properties of materials active force, thereby realizes the oil-absorbing process of Micropump.The size of Micropump flow is by size of current and the FREQUENCY CONTROL of input coil, and the low-intensity magnetic field that is applicable to low pressure, high-frequency drive drives occasion.
Claims (4)
1. micropump based on the giant magnetostrictive thin film driver, it is characterized in that comprising lower pump body (1), press substrate (6) and the upper pump casing (9) that is stacked on the lower pump body (1) successively, described substrate (6) upside is coated with the film (8) of direct magnetostriction effect, and downside is coated with the film (12) of counter magnetostriction effect; The bottom surface of substrate (6) and lower pump body consist of pump cavity (4) and valve chamber (11), and pump cavity (4) is communicated with by through hole with valve chamber (11); Described pump cavity is connected with input duct (3), described valve chamber is connected with fluid pipeline (13), input duct (3) is provided with liquid feed valve film (2) with pump cavity (4) connectivity part, and liquid feed valve film (2) is bonded in by an end and forms the cantilever valve structure on the pump cavity inwall; Described valve chamber (11) is provided with liquid valve film (10) with pump cavity (4) connectivity part, and liquid valve film (10) is bonded in by an end and forms the cantilever valve structure on the valve chamber inwall; Described pump housing peripheral hardware has coil carrier (5), is full of drive coil (7) on the coil carrier (5).
2. a kind of micropump based on the giant magnetostrictive thin film driver according to claim 1, it is characterized in that: described direct magnetostriction effect film (8) is made by the TbDyFe alloy, and described counter magnetostriction effect film (12) is made by the SmFe alloy; Described direct magnetostriction effect film (8) and counter magnetostriction effect film (12) are plated in respectively along the axial substrate left and right sides of pump cavity by being two.
3. a kind of micropump based on the giant magnetostrictive thin film driver according to claim 1, it is characterized in that: described substrate (6) is made by the material silicon sheet with high tension.
4. a kind of micropump based on the giant magnetostrictive thin film driver according to claim 1, it is characterized in that: described liquid feed valve film and liquid valve film are made by having elasticity, toughness, corrosion resistant rubber, plastic cement or silicon thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220443035 CN202707437U (en) | 2012-09-01 | 2012-09-01 | Micro pump based on GMF (Giant Magnetostrictive Thin Film) driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220443035 CN202707437U (en) | 2012-09-01 | 2012-09-01 | Micro pump based on GMF (Giant Magnetostrictive Thin Film) driver |
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| Publication Number | Publication Date |
|---|---|
| CN202707437U true CN202707437U (en) | 2013-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220443035 Expired - Fee Related CN202707437U (en) | 2012-09-01 | 2012-09-01 | Micro pump based on GMF (Giant Magnetostrictive Thin Film) driver |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102797667A (en) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | Micro-pump based on super-magnetostrictive film driver |
| CN103939317A (en) * | 2014-04-01 | 2014-07-23 | 安徽理工大学 | Micropump based on ultra-magnetostriction thin film actuator |
| CN109963063A (en) * | 2019-04-02 | 2019-07-02 | Oppo广东移动通信有限公司 | Adjustment structure, camera and terminal device |
| CN111237174A (en) * | 2020-01-08 | 2020-06-05 | 安徽建筑大学 | Active power assembly and driving device with same |
-
2012
- 2012-09-01 CN CN 201220443035 patent/CN202707437U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102797667A (en) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | Micro-pump based on super-magnetostrictive film driver |
| CN103939317A (en) * | 2014-04-01 | 2014-07-23 | 安徽理工大学 | Micropump based on ultra-magnetostriction thin film actuator |
| CN109963063A (en) * | 2019-04-02 | 2019-07-02 | Oppo广东移动通信有限公司 | Adjustment structure, camera and terminal device |
| CN111237174A (en) * | 2020-01-08 | 2020-06-05 | 安徽建筑大学 | Active power assembly and driving device with same |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20150901 |
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| EXPY | Termination of patent right or utility model |