CN104612942A - Miniature flow pump based on rare earth super-magnetostrictive material - Google Patents
Miniature flow pump based on rare earth super-magnetostrictive material Download PDFInfo
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- CN104612942A CN104612942A CN201510031053.4A CN201510031053A CN104612942A CN 104612942 A CN104612942 A CN 104612942A CN 201510031053 A CN201510031053 A CN 201510031053A CN 104612942 A CN104612942 A CN 104612942A
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Abstract
The invention discloses a miniature flow pump based on a rare earth super-magnetostrictive material. The miniature flow pump comprises a first SI base body and a second SI base body. A working cavity is formed in the middle of the second SI base body, and a feeding channel and a discharging channel are formed in the second SI base body. A flexible thick film is fixedly arranged at a lower end opening of the working cavity, a magnetostrictive thin film is fixedly arranged in the middle of the flexible thick film, a working coil is attached to the lower end face of the second SI base body, the working coil is connected with an alternating current circuit, the magnetostrictive thin film vibrates up and down after the working coil is powered up, hence, the flexible thick film is driven to change the size of an inner cavity of the working cavity, and fluid flows into the working cavity from the feeding channel and is discharged from the discharging channel. The miniature flow pump based on the rare earth super-magnetostrictive material is small in size, simple in structure, easy to implement, suitable for mass production, capable of outputting a small amount of fluid and wide in applied range.
Description
Technical field
The present invention relates to a kind of micro flow pump based on rare earth ultra-magnetostriction material.
Background technique
At present, micro-fluidic middle pump is widely used in the transportation work of fluid micro-flux, but the volume of existing micro-fluidic middle pump is comparatively large, and the specific discharge of conveying is large too, cannot meet the requirement of modern industry.
Summary of the invention
The present invention, in order to solve the above-mentioned deficiency of prior art, proposes a kind of micro flow pump based on rare earth ultra-magnetostriction material.
In order to solve the problems of the technologies described above, the present invention by the following technical solutions: a kind of micro flow pump based on rare earth ultra-magnetostriction material, comprises a SI matrix and the two SI matrix superimposed with a SI matrix; The middle part of described 2nd SI matrix is provided with the active chamber that runs through self, and the 2nd SI matrix is shown wall has along its length the pan feeding passage and tapping channel that are connected with described active chamber; In the lower end mouth of described active chamber, sealing is fixed wtih a flexible thick film, the middle part of this flexible thick film is fixed wtih a magnetostrictive thin film, on the lower end surface of described 2nd SI matrix, Surface Mount a spiral helicine actuating coil, and described magnetostrictive thin film is within the scope of the inner circle of described actuating coil; Described actuating coil is connected to alternating circuit, this magnetostrictive thin film is up-down vibration after actuating coil energising, thus drive flexible thick film to change the cavity volume size of active chamber, and then realize fluid thus to flow in active chamber from pan feeding passage and discharge from tapping channel.
Further, the sidewall of described pan feeding passage is provided with the adverse current valve body preventing fluid countercurrent current, and described adverse current valve body is that duckbill is arranged on the both sides sidewall of pan feeding passage.
Further, the square body that a described SI matrix is identical with sized by the 2nd SI matrix.
Further, described active chamber is circular, and described pan feeding passage and tapping channel are all trapezoidal.
Further, described magnetostrictive thin film adopts rare earth ultra-magnetostriction material to make.
Compared with prior art, modern design of the present invention is ingenious, the active chamber of the 2nd SI matrix design, in conjunction with the holding cavity that the flexible thick film on accent makes active chamber inside formation one airtight, and the suitable magnetic of magnetostrictive thin film on flexible thick film, pass into the Ac of certain frequency at actuating coil after, on magnetostrictive thin film, just produce the magnetic field of a direction change, thus magnetostrictive thin film will be vibrated, and drive fexible film also will up-down vibration together thereupon, thus cause the change of working cavity inner volume, when fexible film moves upward, working cavity inner volume reduces, by cavity fluid by tapping channel to exterior liquid, when fexible film moves downward, cavity inner volume increases, fluid will suck in cavity from pan feeding passage, so achieve pumping and sucking of fluid, owing to being provided with check valve body at pan feeding passage, so when pumping fluid, fluid can not on pan feeding passage adverse current, total is simple, is applicable to large-scale processing, and the fluid that can export than traditional micro-fluidic middle pump more small displacement, applied widely, and the volume of total is little, takes up room little, easy for installation, be more adapted to the requirement of modern industry processing.
Accompanying drawing explanation
Fig. 1 is the first perspective view of the present invention;
Fig. 2 is the second perspective view of the present invention;
Fig. 3 is sectional view of the present invention;
Fig. 4 is bottom surface structure figure of the present invention;
Fig. 5 is the scheme of installation of adverse current valve body of the present invention;
Fig. 6 is the operating diagram of suction fluid of the present invention;
Fig. 7 is the operating diagram extruding fluid of the present invention.
Embodiment
Below in conjunction with drawings and Examples, invention is described in detail.
As shown in Fig. 1 to 5, the micro flow pump based on rare earth ultra-magnetostriction material that the present invention proposes, is comprised a SI matrix 1 and the 2nd SI matrix the 2, one SI matrix 1 and the 2nd SI matrix 2 and is made the structure be superimposed by MEMS technology.And the square body that a SI matrix 1 is identical with sized by the 2nd SI matrix 2.
The middle part of the 2nd SI matrix 2 is provided with the active chamber 21 that runs through self, and the 2nd SI matrix 2 is shown wall has along its length the pan feeding passage 22 and tapping channel 23 that are connected with active chamber 21, active chamber 21, pan feeding passage 22 and tapping channel 23 are all adopt MEMS technology to carry out etching formation.The sidewall of pan feeding passage 22 is provided with the adverse current valve body 6 preventing fluid countercurrent current, and adverse current valve body 6 is arranged on the both sides sidewall of pan feeding passage in duckbill.
And in concrete enforcement, tapping channel 23 is also provided with adverse current valve body, anti-fluid is back in active chamber from tapping channel 23, and the adverse current valve body 6 on pan feeding passage 22 can anti-fluid be back in pan feeding passage 22 from active chamber, ensure that suck and pump unidirectional at one on.
The lower end mouth of active chamber 21 namely seals and is fixed wtih a flexible thick film 3 on the accent of this SI matrix, the middle part of flexible thick film 3 is fixed wtih a magnetostrictive thin film 4, magnetostrictive thin film 4 adopts rare earth ultra-magnetostriction material to make, certainly as a magnet.
Active chamber 21 is circular, and pan feeding passage 22 and tapping channel 23 are all trapezoidal.On the lower end surface of the 2nd SI matrix 2, Surface Mount a spiral helicine actuating coil 5, magnetostrictive thin film 4 is within the scope of the inner circle of actuating coil 5, the suitable magnetic of magnetostrictive thin film on flexible thick film, pass into the Ac of certain frequency at actuating coil after, on magnetostrictive thin film, just produce the magnetic field of a direction change, thus magnetostrictive thin film will be vibrated, and drive fexible film also will up-down vibration together thereupon, thus cause the change of working cavity inner volume, and then realize fluid thus to flow in active chamber from pan feeding passage 22 and discharge from tapping channel 23.
See Fig. 6 and Fig. 7, for sucking state during fluid in Fig. 6, wherein fluid is because flexible thick film extends out downwards on active chamber, and make the volume of active chamber become large, due to the pressure action of air, fluid is drawn in active chamber from pan feeding passage, and when Ac changes current direction, see pumping state in Fig. 7, flexible thick film is inwardly clamp-oned on active chamber, and then the smaller volume of active chamber, is discharged by the fluid in active chamber toward tapping channel 23, the work of repetition so, completes a lasting fluid conveying.
Above-described embodiment only have expressed several mode of execution of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, patent of the present invention and protection domain should be as the criterion with appended claims.
Claims (5)
1. based on a micro flow pump for rare earth ultra-magnetostriction material, it is characterized in that: comprise a SI matrix (1) and the two SI matrix (2) superimposed with a SI matrix (1); The middle part of described 2nd SI matrix (2) is provided with the active chamber (21) that runs through self, and the 2nd SI matrix (2) upper table wall has the pan feeding passage (22) and tapping channel (23) that are connected with described active chamber (21) along its length; In the lower end mouth of described active chamber (21), sealing is fixed wtih a flexible thick film (3), the middle part of this flexible thick film (3) is fixed wtih a magnetostrictive thin film (4), on the lower end surface of described 2nd SI matrix (2), Surface Mount a spiral helicine actuating coil (5), and described magnetostrictive thin film (4) is within the scope of the inner circle of described actuating coil (5); Described actuating coil is connected to alternating circuit, this magnetostrictive thin film (4) is up-down vibration after actuating coil (5) energising, thus drive flexible thick film to change the cavity volume size of active chamber (21), and then realize fluid thus to flow in active chamber from pan feeding passage (22) and discharge from tapping channel (23).
2. as claimed in claim 1 based on the micro flow pump of rare earth ultra-magnetostriction material, it is characterized in that: the sidewall of described pan feeding passage (22) is provided with the adverse current valve body (6) preventing fluid countercurrent current, described adverse current valve body (6) is arranged on the both sides sidewall of pan feeding passage in duckbill.
3., as claimed in claim 1 based on the micro flow pump of rare earth ultra-magnetostriction material, it is characterized in that: the square body that a described SI matrix (1) is identical with sized by the 2nd SI matrix (2).
4. as claimed in claim 1 based on the micro flow pump of rare earth ultra-magnetostriction material, it is characterized in that: described active chamber (21) is for circular, and described pan feeding passage (22) and tapping channel (23) are all trapezoidal.
5. as claimed in claim 1 based on the micro flow pump of rare earth ultra-magnetostriction material, it is characterized in that: described magnetostrictive thin film (4) adopts rare earth ultra-magnetostriction material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510031053.4A CN104612942A (en) | 2015-01-19 | 2015-01-19 | Miniature flow pump based on rare earth super-magnetostrictive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510031053.4A CN104612942A (en) | 2015-01-19 | 2015-01-19 | Miniature flow pump based on rare earth super-magnetostrictive material |
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| Publication Number | Publication Date |
|---|---|
| CN104612942A true CN104612942A (en) | 2015-05-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510031053.4A Pending CN104612942A (en) | 2015-01-19 | 2015-01-19 | Miniature flow pump based on rare earth super-magnetostrictive material |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105299000A (en) * | 2015-11-10 | 2016-02-03 | 中国科学院合肥物质科学研究院 | One-way drive microfluid pipe |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE466467B (en) * | 1987-12-10 | 1992-02-17 | Asea Atom Ab | WATER PUMP DRIVEN FROM ELEMENTS OF A JETTAGMAGNOSTICTIVE MATERIAL |
| CN1570381A (en) * | 2004-04-30 | 2005-01-26 | 北京联合大学 | Hydraulic pump directly driven by actuator made of rare earth super magnetostrictive material |
| CN201875258U (en) * | 2010-08-17 | 2011-06-22 | 北京福坛嘉业科技有限公司 | High-speed switch valve driven by actuator manufactured by rare-earth giant magnetostrictive material |
| CN102797667A (en) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | Micro-pump based on super-magnetostrictive film driver |
| CN103939317A (en) * | 2014-04-01 | 2014-07-23 | 安徽理工大学 | Micropump based on ultra-magnetostriction thin film actuator |
-
2015
- 2015-01-19 CN CN201510031053.4A patent/CN104612942A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE466467B (en) * | 1987-12-10 | 1992-02-17 | Asea Atom Ab | WATER PUMP DRIVEN FROM ELEMENTS OF A JETTAGMAGNOSTICTIVE MATERIAL |
| CN1570381A (en) * | 2004-04-30 | 2005-01-26 | 北京联合大学 | Hydraulic pump directly driven by actuator made of rare earth super magnetostrictive material |
| CN201875258U (en) * | 2010-08-17 | 2011-06-22 | 北京福坛嘉业科技有限公司 | High-speed switch valve driven by actuator manufactured by rare-earth giant magnetostrictive material |
| CN102797667A (en) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | Micro-pump based on super-magnetostrictive film driver |
| CN103939317A (en) * | 2014-04-01 | 2014-07-23 | 安徽理工大学 | Micropump based on ultra-magnetostriction thin film actuator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105299000A (en) * | 2015-11-10 | 2016-02-03 | 中国科学院合肥物质科学研究院 | One-way drive microfluid pipe |
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Application publication date: 20150513 |