CN102084133A - A pump powered by a polymer transducer - Google Patents

A pump powered by a polymer transducer Download PDF

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Publication number
CN102084133A
CN102084133A CN2009801254445A CN200980125444A CN102084133A CN 102084133 A CN102084133 A CN 102084133A CN 2009801254445 A CN2009801254445 A CN 2009801254445A CN 200980125444 A CN200980125444 A CN 200980125444A CN 102084133 A CN102084133 A CN 102084133A
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Prior art keywords
pump
transducer
laminate
film
path
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CN2009801254445A
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Chinese (zh)
Inventor
M·K·汉森
B·汤森
M·特里森
M·本斯利马内
Y·伊斯坎达拉尼
C·莫塞
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Danfoss AS
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Danfoss AS
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Publication of CN102084133A publication Critical patent/CN102084133A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention provides a pump with a transducer comprising a laminate with a film of a dielectric polymer material arranged between first and second layers of an electrically conductive material so that it is deflectable in response to an electrical field applied between the layers, wherein the laminate is arranged to cause a pumping action upon deflection of the film. The invention further provides a control system for a pump.

Description

The pump of power is provided by polymer transducers
Technical field
The present invention relates to a kind of fluid pump, it is used for flowing medium is transferred to delivery side of pump from the inlet of pump, this pump comprises shell and transducer, and shell forms the path between inlet and outlet, and this transducer is arranged to produce pump action so that fluid moves through this path.
Background technique
Displacement pump is used for multiple medical science and non-medical utensil and is used for pumping and compression fluid medium optionally.For example, pump has been used to transmit all types of fluids, salt solution is waited until treatment region etc., pump has been used for from pumping bloods such as dialysis machine, and except medical domain, pump plays an important role in multiple mechanical facility, is used for conveyance fluid, fluid-mixing, compressed fluid particularly is for example with the combining of refrigeration system.
In traditional positive-displacement pump, piston is to-and-fro motion in cylinder body, and by alternately opening and closing inlet valve and outlet valve, by piston pumping fluid and compressed fluid optionally.Piston is made by relative inflexibility metallic material with cylinder body, and reciprocating pump good efficiency and long lifetime are provided, and piston and cylinder body must be made with close tolerance.Usually, the major part of the manufacture cost of this pump is that flower is on the mechanical interaction between piston, cylinder body and other moving member.A problem of conventional piston pump is that they can produce excess noise, is particularly being produced under the reciprocating situation by the eccentric element on the rotating driveshaft.
Summary of the invention
The object of the present invention is to provide a kind of positive-displacement pump (positive displacement pump), pumping activities wherein is provided in an alternating manner, and therefore provide more firm potentially and have more cost-efficient pump.Another purpose is to provide a kind of more quiet potentially pump.Therefore, the invention provides a kind of pump, wherein transducer comprises laminate, this laminate has the di-electric polymer material film of arranging between first conductive material layer and second conductive material layer, make that this film can the deflection in response to the electric field that applies between layer, wherein this laminate is arranged to produce pump action when film deflection.
Because the deflection of polymer material causes pump action, therefore can reduce noise significantly and to the needs of close tolerance.
The meaning of pump action is that fluid is because this effect moves to outlet from inlet.Usually, this effect relates to the process of the volume that changes chamber circularly, and this chamber possesses stop valve or valve-like, and these valves have guaranteed that fluid is from entering the mouth by the one-way flow of chamber to outlet.
The meaning of transducer is the element that can convert electric energy to mechanical energy and on the contrary mechanical energy be converted to electric energy in this article.This makes and can use transducer as actuator, when between first conductive material layer and second conductive material layer, applying electric field, actuator work is passed through the path with mobile fluid, and/or use this transducer as sensor, its variation according to the flox condition in the path provides the variation of electrical feature (for example, the electric capacity between conductive material layer).Therefore, transducer can provide the both-way communication with control system, control system is operated this transducer making fluid move through this path as actuator thus, and transducer provides information can (for example) to carry out closed loop control based on flow resistance or the measurable further feature of film deflection by transducer to control system.
Shell can any kind material provide, for example with hard polymeric material, with metal (such as brass or aluminium) or even provide with soft polymeric material (such as silicone) etc., pump also can comprise the micro passage and can (for example) comprise silicon wafer etc.
The meaning of deflection is crooked or distortion under pressure influence in this article.Under the situation of film, by under gravitation due to the electric field that applies between the conductive layer or repulsion from the pressure activated deflection of conductive layer.
The meaning of laminate is the product of being made by two or more material layers in this article.As an example, laminate can comprise the material with dielectrics character, is called for short hereinafter and does dielectric substance.Dielectric substance can be non-conductive polymer or elastomeric material.Conductive material can form electrode pattern on polymer or elastomeric each side.These at least two kinds of materials combine (for example adhesively) by sintering, perhaps are arranged to simply contact with each other.
Dielectric substance can be any material, and it can be kept electric field and can conduction current, such as relative dielectric constant ε more than or equal to 2 material.Dielectric substance can be polymer, and for example, elastomer is such as silicone elastomer, such as weak viscosity silicone or substantially at the material that has the elastic-like body characteristics aspect the resiliently deformable.For example, Elastosil RT 625, Elastosil RT 622, Elastosil RT 601 (these three all is available from Wacker-Chemie) can be used as dielectric substance.
In this article, term ' dielectric substance ' should be understood especially but not exclusively represent relative dielectric constant ε rMaterial more than or equal to 2.
Under the situation of the dielectric substance that uses inelastic body, should be noted that dielectric substance should for example should have the character of similar elastomeric body aspect elasticity.Therefore, dielectric substance should be deformable, thus deformation extent make this composite bed can deflection owing to the distortion of dielectric substance pushes away and/or draws.
Film can have relative homogeneous thickness with conductive layer, and for example, maximum ga(u)ge is less than 110% of the average thickness of film, minimum thickness be film average thickness at least 90%.Accordingly, the maximum ga(u)ge of first conductive layer can be less than the average thickness 110% of first conductive layer, minimum thickness can be first conductive layer average thickness at least 90%.By absolute calculation, the thickness of conductive layer can be in 0.01 μ m to 0.1 mu m range, such as in 0.02 μ m to 0.09 mu m range, such as in 0.05 μ m to 0.07 mu m range.Therefore, conductive layer preferably is coated on the film with very thin layer.This is convenient to good performance and is convenient to this conductive layer to follow the wave pattern on film surface according to deflection.
The thickness of film can be between 10 μ m and 200 μ m, such as between 20 μ m and 150 μ m, such as between 30 μ m and 100 μ m, such as between 40 μ m and 80 μ m.In this article, the thickness of film is defined as a more lip-deep beeline to the intermediate point of halfway crest on the corrugated surface of film and trough from film.
The specific resistance of conductive layer can be less than 10 -2Ω cm is such as 10 -4Ω cm.Have the very conductive layer of low-resistivity by providing, the all-in resistance of conductive layer will can not become excessive, even under the situation of using very long conductive layer.Thus, the response time of the conversion between mechanical energy and the electric energy can maintain acceptable level and allow the big surface area of composite bed simultaneously, thereby obtains big actuation force in pump.In the prior art, still can not provide the ripple conductive layer with substantially low resistance, mainly be because with due regard to other character of material selects the material of prior art conductive layer so that compliance to be provided.Therefore utilize the present invention, the conductive layer of compliance can be provided by the material of low-resistivity very.This allows to obtain the acceptable response time that big actuation force is kept transducer simultaneously.
Conductive layer can preferably be made by metal or electrical conductivity alloy, for example, is made by the metal that is selected from the group that silver, gold and nickel forms.Perhaps, can select other suitable metal or electrical conductivity alloy.Because metal and electrical conductivity alloy have very low specific resistance usually, above the advantage of being mentioned obtains by the conductive material making conductive layer that utilizes metal or any kind, the for example Young's modulus of the conductive material of this metal or any kind is higher than the Young's modulus of dielectric substance, that is, conductive layer can have the rigidity higher than dielectric substance in elastic range.
The specific resistance of dielectric substance can be greater than 10 10Ω cm.Preferably, the specific resistance of dielectric substance is preferably to be up to few 10 far above the specific resistance of conductive layer 14-10 18Doubly.
For the ease of in a direction, increasing the compliance of transducer, therefore for the ease of improved reaction time of pump and improved performance and controllability, perhaps for the life-span of transducer prolongation is provided potentially, surface pattern can comprise ripple, its make conductive layer in the length of length direction greater than the length of this composite bed at length direction.Therefore the bellows-shaped of conductive layer is convenient to this composite bed and is stretched and this conductive layer that can not stretch in this direction in length direction, and the bellows-shaped of conductive layer is flattened.According to the present invention, the bellows-shaped of conductive layer can be the replication form of the surface pattern of film.
Wave pattern can comprise ripple, and ripple is formed on crest and the trough that extends in the common direction, and these ripples limit anisotropic character, is convenient to move in perpendicular to the direction of this common direction.According to this embodiment, crest and trough are similar to the standing wave with substantially parallel wave surface.But these ripples may not be sinusoidal wave, but can have any suitable shape, as long as limit crest and trough.According to this embodiment, crest (or trough) will limit the isohypse of substantial linear, that is, and and with respect to the line of whole composite bed along corrugated portion with double altitudes.This at least the line of substantially linear will be basically parallel at least by other crest and the formed similar isohypse of trough, and this at least the direction of the line of substantially linear limit common direction.The common direction of Xian Dinging has the anisotropic result of generation in this way, and be convenient to this composite bed perpendicular to moving in the direction of this common direction, that is, and this composite bed, perhaps be arranged in the conductive layer on the corrugated surface at least, in direction, be obedient to perpendicular to this common direction.
The projection and the variation of concave surface portion are can be relative macroscopical and be easy to be detected by people's naked eyes, and they can be the result of MANUFACTURER deliberate act.Cyclically-varying can comprise by being used to make the mark or the marking that one or more joints of forming on the roller of this film cause.As an alternative or as a supplement, cyclically-varying basically the scale of microcosmic take place.In the case, cyclically-varying can have the order of magnitude in the manufacturing tolerances of making the instrument (such as roller) that uses during this film.Even the expection and attempt to provide perfect roller, have perfect pattern, in fact also always can in the pattern that roller limited, have less variation owing to manufacturing tolerances.No matter how little this variation have, and they will cause on the film that uses this roller repeatedly to produce and cyclically-varying occur.In this way, film can have two kinds of cyclically-varyings, first kind is the stamping surface pattern of structure, such as the ripple that is shaped perpendicular to this film, this can be known as the sub pattern of variation, and in addition since the negative engraving (negative plate) of same roller or impression repeat impression, form the hypergraph case by the sub pattern that repeats.
Allow film is manufactured any expection length by repeatedly using identical shape qualification element to make this film, only limit element with this shape of repeatedly using that causes this expection length.Thus, the size of composite bed alongst is not subjected to being used for the tool sizes restriction of manufacture process.This is very favorable.But this film rolling ground produces and stores, and afterwards, when film applies one or more conductive layer, film is deployable.
Each ripple in corrugated surface can limit a height, and this highly is the beeline between crest and the adjacent trough.In the case, each ripple limits maximum ripple, and maximum ripple has 110% the height at the most of mean wave height, and/or each ripple can limit small echo, and small echo has at least 90% height of mean wave height.According to this embodiment, the variation of wave height is very little and obtain well-proportioned pattern.
According to an embodiment, the mean wave height of ripple can be between 1/3 μ m and 20 μ m, such as between 1 μ m and 15 μ m, such as between 2 μ m and 10 μ m, such as between 4 μ m and 8 μ m.
As an alternative or as a supplement, the wavelength of ripple can be defined as the beeline between two crests, and can be between 1/30 and 2, such as between 1/20 and 1.5, such as between 1/10 and 1 at the average height and the ratio between the mean wavelength of ripple.
The mean wavelength of ripple can be in 1 μ m to 20 mu m range, such as in the scope of 2 μ m to 15 μ m, such as in the scope of 5 μ m to 10 μ m.
Ratio between the average thickness of the average height of ripple and film can be between 1/50 and 1/2, such as between 1/40 and 1/3, such as between 1/30 and 1/4, such as between 1/20 and 1/5.
Second conductive layer can be similar to first layer, has surface pattern, for example, comprises bellows-shaped, and it can be provided as the replication form of the surface pattern of film.Perhaps, second conductive layer is a substantially flat.If second conductive layer is smooth, this composite bed will only have compliance on one of two surface, and second conductive layer tends to prevent another surface elongation.This provides following such composite bed: when applying current potential and pass two conductive layers, and this composite bed bending.
A kind of mode of making layer casting die is that the several composite beds of combination are the MULTILAYER COMPOSITE layer with laminar structure.Each composite bed can comprise:
-by the film that dielectric substance is made, it has front surface and rear surface, and front surface comprises the surface pattern of projection and concave surface portion, and,
-the first conductive layer, it deposits on the surface pattern, and this conductive layer has the bellows-shaped that the surface pattern by film forms.
In this structure, can limit electrode group structure, make each second conductive layer become the electrode that first group of electrode and each intermediate conductive layer become second group of electrode.Potential difference between two arrays of electrodes will cause the rete distortion between them, so this composite bed is electroactive.In this layered configuration, last layer will keep non-activity.Therefore, the MULTILAYER COMPOSITE layer with three layers comprises 2 active layers, and the MULTILAYER COMPOSITE layer with 10 layers comprises 9 active layers etc.
According to an embodiment, the projection of the surface pattern of the film of each composite bed and concave surface portion can have shape and/or the size that periodically changes along at least one direction of front surface.This explains hereinbefore.
If conductive layer deposition on the front surface of film, can advantageously be arranged to the rear surface toward each other with these layers.In this way, the MULTILAYER COMPOSITE layer becomes and not too is subject to the influence of shortcoming in the film.If the film in one deck has the defective that can cause the electric pole short circuit on its opposed surface, surface arrangement becomes that to have defective against the layer that the problem film is arranged in same position be very impossible so thereafter.In other words, at least one in two films provides the electricity of two conductive layers to separate.
The MULTILAYER COMPOSITE layer can be made by following steps: arrange composite bed in heaps and apply potential difference between each adjacent conductive layer in this heap to make these layers be biased toward one another they are flattened.Because the physics or the characteristic properties of film, said method can combine layer.As an alternative or supplement, these layers can be by being arranged in tackiness agent between each layer and combination.Preferably should select the compliance of not damping of tackiness agent multi-layer structure.Therefore,, can preferably select same material, perhaps select the tackiness agent of Young's modulus at least less than the Young's modulus of film for film and tackiness agent.
Composite bed in the MULTILAYER COMPOSITE layer preferably should be identical to guarantee the homogeneous deformation by the MULTILAYER COMPOSITE layer of all layers when applying electric field.And, can advantageously provide the wave pattern of each layer, make that the crest of the crest of one deck and adjacent layer is adjacent or make that the trough of the crest of one deck and adjacent layer is adjacent.
In one embodiment, pump is based on the distortion and the therefore Volume Changes of the part in path.This can (for example) on the opposition side of this part in this path in conjunction with valve.As an example, can be arranged to provide one-way flow such as the safety check of flapper valve, that is, flow through this path in a direction, the Volume Changes that makes this part repeat causes the fluid by this path to flow.This section in this path can be located in the main body of deformable material, the flexible pipe of silicone material for example, but the bellows of rubber material or have the main body of plastic deformation wall substantially.Transducer can be arranged to make this main body deflection, this path changing volume thus when film deflection.Transducer can be arranged in outside this path, and in this path, perhaps it can form the part of the main body of deformable material.
This transducer can possess at least three independent active parts, and these three independent active parts can activate independently and each part is arranged to make this main body in the diverse location place distortion along this path.In this way, the first portion in the flow direction upstream can at first activated to push this main body and to close this path in the upstream primary importance.Subsequently, actuatable second portion between other two parts, first portion prevents the backflow in this path simultaneously.The distortion of the main body that is caused by second portion will be pressed fluid in this path at downstream direction.Subsequently, actuatable last third part is to prevent the backflow in this path when discharging first portion and second portion.For this purpose, can provide control system, it is suitable for activating these parts with predetermined sequence.
This main body can have built-in pressure unit, and it presses this path towards neutral configuration, can the path be promoted towards actuation configuration from neutral configuration by this built-in pressure unit of transducer antagonism.Neutral configuration can be in the path flow resistance less than or be higher than the configuration of the flow resistance in the actuation configuration.
As an alternative or as a supplement, keep the shape of this main body by transducer, transducer moves this main body on one's own initiative between the different distortion state, and need not any supporting from this main body itself.As an example, this main body can comprise the flexible foils material bag, for example, and plastic bag.In one embodiment, this main body itself is made of its laminate at least in part.For this purpose, at least two the composite bed of having mentioned from making laminate can form the front surface and the rear surface of the bag that constitutes this main body.
According to preferred embodiment, this laminate of can reeling is to form the coiling pattern of dielectric substance and electrode.In the following description, the transducer that has a laminate of coiling is known as the transducer of coiling.In this article, term " coiling pattern " should be understood that the cross section of representing transducer presents electrode and dielectric substance smooth, helical pattern.Therefore, the part of similar swiss roll of the transducer of coiling or swiss roll.
According to this embodiment, preferably become heavy wall column self-supporting structure to design this transducer by the laminate of reeling or twine potential indefinite length, this self-supporting structure has sufficient intensity to prevent flexing during the pump normal running.
Laminate can be reeled to be formed on the transducer of the elongated shape that axial direction extends around axially extended axis.
The laminate of reeling can form tubular member.This should be understood that the laminate of reeling limits outer surface and towards the internal surface of the hollow cavity of the laminate of reeling.Therefore, in the case, transducer forms " pipe ", but " pipe " can have any suitable shape.
Form at the transducer of reeling under the situation of tubular member, the laminate of coiling can form substantially cylindrical or similar columniform member.In this article, term " similar cylindrical " should be understood that to represent to limit the shape of longitudinal axis, and wherein this member is independent of the position of axis along the longitudinal at least substantially along the size and dimension in the cross section on the plane that is basically perpendicular to longitudinal axis at least.Therefore, according to this embodiment, this cross section can have almost circular at least shape, limits the tubular member of substantially cylindrical thus.But preferably, this cross section has non-circular shape, such as oval, avette, rectangle or symmetric shape not even.Non-circular shape is preferred, because need change the sectional area of transducer during operation, keeps the girth of this cross section substantial constant simultaneously at least.Have in the cross section under the situation of circular shape, this is impossible, can not change its area because have the shape of the circle of constant circumference.Therefore, non-circular shape is preferred.
The transducer of reeling can limit sectional area A, and it is positioned at this area for the area of the part in the cross section of the transducer of coiling, the material that forms the transducer of reeling, and A can be at 10mm 2To 20000mm 2Scope in, such as at 50mm 2To 2000mm 2Scope in, such as at 75mm 2To 1500mm 2Scope in, such as at 200mm 2To 700mm 2Scope in.Therefore, A can be considered to the size of part of total sectional area of the transducer of the coiling that ' occupied ' by transducer institute.In other words, A is by outer surface and the sectional area that defined by the internal surface towards the hollow cavity of winding-structure at opposite side in a side.
The laminate of reeling can limit the turning radius, r g, by
Figure BPA00001283946700081
Provide, wherein I is the area inertia moment of the transducer of coiling, and r gCan be in the scope of 5mm to 100mm, such as in the scope of 10mm to 75mm, such as in the scope of 25mm to 50mm.The turning radius, r g, the reflection distance is along the distance of the central axis of the longitudinal axis stretching, extension of tubular member, if the whole cross section of the transducer of reeling is positioned at this distance from central axis, this will obtain identical moment of inertia, I.
And the laminate of coiling can limit slenderness ratio, and λ is by λ=L/r gProvide, wherein L is the axial length of the laminate of reeling, and λ can be less than 20, such as less than 10.Therefore, slenderness ratio, λ is reflected in the axial length of laminate of coiling and the ratio between the radius that above limited.Therefore, if λ is higher, axial length is compared greatly with radius, and therefore the laminate of reeling will show as ' more elongated ' object.On the other hand, if λ is lower, length is compared less with radius, and therefore the transducer of reeling will show as ' flat ' object, claims that therefore this term is ' slenderness ratio '.Object with low slenderness ratio tends to show the rigidity bigger than the object with high slenderness ratio.Therefore, in the laminate of coiling, avoid or reduced flexing between period of energization at least to a great extent with low slenderness ratio.
The laminate of reeling can limit wall thickness t, and ratio t/r gCan be in 1/1000 to 2 scope, such as in 1/500 to 1 scope, such as in 1/300 to 2/3 scope.This ratio reflection is compared with the overall dimensions of the laminate of reeling, and the wall that is limited by the laminate of reeling is what kind of is thin or thick.If this ratio height, wall thickness is just big so, and the hollow cavity that is limited by the transducer of reeling is less relatively.On the other hand, if this ratio is low, wall thickness is just little so, and the hollow cavity that limits by the laminate of reeling with regard to relative greatly.
As an alternative or as a supplement, the laminate of coiling can have wall thickness t, and can comprise a plurality of windings, n is in the scope of 5 to 100 windings of every millimeter wall thickness, such as in the scope of 10 to 50 windings of every millimeter wall thickness.This numeral is big more, and the laminate of expansion must be thin more.And have similar transducer than a small amount of winding of thick film (that is, and have identical or similar cross-section long-pending) compare, a large amount of windings of film allow to realize given actuation force with potential difference lower between the electrode.This is very favorable.
The machinery of electrically active films and electrostatic property are as the basis of the actuation force of estimating per unit area and stroke.The laminate of coiling as indicated above is by the very thin composite bed of coiling/winding (for example, have in micrometer range thickness) and make.Such typical transducer can be made by the laminate that is wound in thousands of windings.
When activating, guiding/promotion transducer is transformed into mechanical energy with electric energy.The part of this energy is stored in the transducer material and when transducer discharges and can reuses with the potential energy form.The remaining part of mechanical energy is used for activating effectively.Only strengthen this transducer architecture opposing mechanical instability (such as know because the flexing due to the axial compression) situation under, just might make this remaining part of this mechanical energy convert the actuating energy fully to.This can realize by the length of strengthening on the one hand the sectional area of transducer and optimize transducer according to Euler's theory (Euler ' s theory) then.
Optimizing process starts from and limits the required force level of given pump.Based on the actuation force of per unit area, might estimate to reach the required sectional area of this force level then.
Stable transducer is resisted any mechanical instability sexual needs and is strengthened its cross section by the area inertia moment I that increases its cross section.The low value of I causes the high value of more unsettled structure and I to cause very stable anti-flexing structure.Being used to strengthen this structure Design parameter is the turning radius
Figure BPA00001283946700091
It relates to sectional area A and area inertia moment I.r gLow value cause the transducer architecture and the r of less stable gThe high value cause very stable transducer architecture.Defining area A and turning radius r gOptimum range after, might be with t/r gThe relative r of form gLimit the optimum range of the wall thickness t of the transducer of reeling.Area A, radius r gAnd wall thickness t is used to strengthen the design parameter that the transducer cross section obtains maximum stable.T/r gLow value cause high stability transducer architecture and t/r gThe high value cause the transducer architecture of less stable.
In case determined the scope of cross section parameter, just need to estimate the extreme length L of transducer, under this length, can not take place because the flexing due to the axial compression for required force level.The slenderness ratio that is limited as mentioned, λ is and the theoretical relevant parameter commonly used of Euler.The high value that the low value of λ causes resisting the high stability transducer architecture of flexing and λ causes resisting the transducer architecture of the less stable of flexing.
In case determined all design parameters of best effort guiding transducer, for given electrically active films, just might estimate to make the required winding sum of transducer based on the winding number n of transducer wall thickness t and every millimeter with the concrete thickness in the rice scope of emblem.
The transducer of reeling can comprise center-pole, and center-pole is arranged such that transducer reels around center-pole, and the Young's modulus of center-pole is lower than the Young's modulus of dielectric substance.According to this embodiment, can fill by center-pole by the hollow cavity that tubular member limits, perhaps this center-pole can be hollow, that is and, it can have tubular structure.Center-pole can support the transducer of this coiling.But importantly the Young's modulus of center-pole is lower than the Young's modulus of dielectric substance to prevent the function of center-pole inhibition transducer.
As an alternative or as a supplement, the transducer of reeling can comprise center-pole, center-pole is arranged such that transducer is around this center-pole coiling, and center-pole can have in abutting connection with the outer surface of the transducer of this coiling, and the friction of described outer surface allows the transducer of this coiling to slide along described outer surface between this transducer period of energization.In the case, center-pole can for example be a spring.Owing to allow of the outer surface slip of the transducer of coiling along center-pole, the existence of center-pole will can not suppress the elongation of transducer along the longitudinal direction that is limited by center-pole, the operation of transducer will can not be subjected to the inhibition that center-pole exists thus, and this is because the low friction characteristic of center-pole.
Comprise that the transducer of the laminate of coiling can have the area inertia moment in cross section, it is at least 50 times of the area inertia moment in the cross section of the transducer that launches, such as at least 75 times, such as at least 100 times.According to the present invention, the area inertia moment of this increase is preferably by utilizing sufficient winding number this transducer of reeling to obtain with the expection area inertia moment of realizing winding-structure.Therefore, although the transducer that launches is preferably very thin, and therefore will have very low area inertia moment, the expection area inertia moment of the transducer of reeling can be reeled this transducer with the winding of quantity sufficient simply and be obtained.The area inertia moment of the transducer of reeling should preferably be enough to prevent the transducer flexing during normal running.
Therefore, the transducer of the coiling area inertia moment that can have a cross section that is enough to realize the transducer of reeling is a plurality of windings of at least 50 times (such as at least 75 times, such as at least 100 times) of the mean value of the area inertia moment in the cross section of the transducer that launches.
According to an embodiment, positive electrode and negative electrode necessarily patterned arrangement on the similar face of dielectric substance, and can make the transducer of reeling limit following layer like this by the dielectric substance that is furnished with electrode above reeling and form transducer: in each layer, positive electrode and negative electrode positioned opposite, and between positive electrode and negative electrode, dielectric substance is arranged.According to this embodiment, long film that preferably can be by dielectric substance is provided and on a surface of film depositing electrode make this transducer.Electrode can for example be arranged along the longitudinal direction of long film in an alternating manner.The part that this long film has the film of positive electrode above making of can reeling then will be arranged to belong to previous adjacent winding and above to have the part of film of negative electrode adjacent.Thus, positive electrode and negative electrode will be arranged opposite to each other, and dielectric film part is arranged between positive electrode and negative electrode.Therefore, when reeling, film forms transducer.
Can be for example with respect to this laminate of reeling of at least one the surface pattern in these layers, make the distortion of film cause the radial expansion of transducer.This can obtain to be parallel to reel this laminate around the wave pattern that extends of axis.Perhaps, can be with respect to this laminate of reeling of the surface pattern of at least one in the layer, make the distortion of film cause transducer axial expansion and the therefore variable range between the axial opposed end face of transducer.This can obtain perpendicular to this laminate of reeling around the wave pattern that extends of axis, make the crest of ripple and trough (chests) around transducer at extending circumferentially.
This laminate is to form the cylindrical body portion of hollow if reel, and the laminate of Juan Raoing self can form at least a portion in this path so.
This pump can comprise the transducer of at least one coiling, and selectivity is the transducer of a plurality of coilings, be used for axial elongation and be arranged in cylindrical chamber, and moves in this chamber as piston the end.If the transducer of a plurality of coilings is provided in this way, so they can be arranged to adjacent transducer end face toward each other, be formed on the continuous row of the transducer in the continous cylindrical chamber.
Transducer can be for example in the fixed-site between the end on chamber wall.When activating transducer, thus the spatial volume that they reduce to provide between adjacent transducer at axial expansion.When the transducer axial shrinkage, the spatial volume between adjacent transducer increases.In transducer between the end face of each, promptly provide exceptional space in the inner chamber between the internal surface of the outer surface of the laminate of reeling and cylindrical chamber or in the transducer of coiling.When transducer simultaneously during contraction or expansion, these exceptional spaces increase with reverse order with respect to the space between the transducer or reduce.One group of safety check is provided or has the valve of similar one-way function by each end, when activating in the cylinder body all transducers simultaneously, can obtain pump action in the space.
In the non-coiling embodiment of pump, transducer comprises the planar wafer of laminate, and pump comprises control system, control system is suitable for this transducer of frequency drives corresponding to the resonant frequency of plane layer casting die, thereby can utilize low-yield supply to obtain the vibration of laminate with relatively large mobile amplitude.One or more variable-volume chambers.
Description of drawings
Now the preferred embodiments of the present invention are described in more detail referring to accompanying drawing, in the accompanying drawings:
Fig. 1 illustrates according to two different pump structures of the present invention with Fig. 2;
Fig. 3 illustrates the laminate that is used for transducer;
Fig. 4 and Fig. 5 illustrate this laminate of reeling respectively with elongation and expansion;
Fig. 6 illustrates by piling up the alternative that two composite structures are made the transducer of coiling;
Fig. 7 to Figure 26 illustrates various instead of pump; And
Figure 27 illustrates the electric diagram of the control system that is used for control pump.
Embodiment
Fig. 1 illustrates pump 1, and it comprises shell 2, and shell 2 has the stationary spindle 3 in internal placement, and axle 3 has the worm structure of spirality fin 4 on the outer surface.Shell forms the outlet 6 that makes fluid enter into the inlet 5 of pump and be used to make fluid to discharge from pump.The path between the outer surface 8 of the internal surface 7 of shell and axle from the entrance extension to the outlet.Shell is made by the material of elastically deformable, and transducer 9 is attached on the outer surface to cause shell deflection.Fig. 1 c and Fig. 1 d illustrate two kinds of different deflection states of shell, and Fig. 1 e, 1f and Fig. 1 g illustrate the deflection order around stationary spindle 3.Cause fluid to be subjected to the axle guiding 5 to move to outlet 6 around the order deflection of axle from entering the mouth.
Each transducer 9 is made by laminate, and this laminate has the di-electric polymer material film of arranging between first conductive material layer and second conductive material layer, make that this film can the flexibly distortion in response to the electric field that applies between layer.This laminate is reeled, is piled up or be folding.
Fig. 2 illustrates instead of pump, and it has flexible pipe 10 and a plurality of transducer 11, and flexible pipe 10 can be out of shape owing to exerting pressure, and a plurality of transducer 11 is arranged to be out of shape under pressure around this flexible pipe.Can provide the pumping effect by actuation sequence, wherein activate transducer in turn to provide from entering the mouth 12 to the flowing of outlet 13, also referring to Fig. 7.
Providing laminate to make that it is easier to be obedient in direction rather than other direction at one is out of shape.This laminate also possess anisotropic character make its in the compliance of a specific direction less than compliance in other direction.As shown in Figure 3, this feature can be provided by the waved surface structure, because the waved surface structure, this laminate can expanded by the longitudinal direction of being obedient to shown in the thick arrow 14,15 owing to the resiliently deformable of polymer material 16, and the conductive material that is coated to waved surface is straightened rather than stretches.
By selecting conductive material, make the required power of conductive material resiliently deformable greater than making the required power of polymer material distortion, and pass through (promptly by the whole horizontal direction shown in the thick arrow 17,18, be parallel to the direction that the crest of ripple and trough extend) the coated with conductive material, the laminate anisotropy that becomes.Anisotropy presentation layer casting die longitudinal direction be obedient to and be insubordinate at horizontal direction.
Reel laminar structure shown in Figure 3 to form the tubulose actuator.As shown in Figure 4, can be around being parallel to axis that crest and trough extend this laminate of reeling.This provides the tubulose actuator when deformable polymer radial expansion is known as " reeling to expand " in this article.As shown in Figure 5, also can be around this laminate of reeling perpendicular to the axis of crest and trough extension.This provides the tubulose actuator when deformable polymer axial elongation is known as " reeling with elongation " in this article.When reeling this laminate, two opposite conductive material layers are called top layer and bottom hereinafter, must be by the electricity separation each other of extra non-conducting material film.
Fig. 6 illustrates laminate, and it is reeled comprises the multi-layer structure with at least two composite beds with formation tubular structure and it.Composite bed is identical, each comprises the film 19 and first conductive material layer 20, film 19 is made by di-electric polymer material and is had front surface and rear surface, and front surface comprises the surface pattern of projection and concave surface portion, and first conductive material layer 20 deposits on this surface pattern.When these two composite beds are arranged in the top of each other, the cambial wall casting die, this laminate has the polymeric material film between two conductive layers.Second film provides the isolation between top layer and the bottom.Composite bed can arrange as shown in the figure that the front surface of a composite bed is against the rear surface of adjacent composite bed.Perhaps, composite bed can be arranged to the rear surface against such laminate below forming each other: two films against each other and two conductive layers on the opposition side of two films, form outer surface.
Each is made transducer among Fig. 2 by the laminate of being reeled with elongation.The axial end portion of the laminate of reeling engages subsequently to form annular shape.Fig. 7 also illustrates the order and the principle of this pump.
Fig. 8 a and Fig. 8 b illustrate the pump that has pipe 20 and delegation's transducer 21.Each is made transducer by the laminate of being reeled with elongation, and one of the axial end portion of the laminate of reeling is arranged with by directly contact or pipe 20 is out of shape via the pressure elements (not shown) between the outer surface of the axial end of the laminate that is arranged in coiling and pipe with it towards pipe 20.Fig. 8 a to Fig. 8 c illustrates this pump and has following such structure: the dynamic pressure of its antagonism fluid of pumping in this pipe 20 of only working.When considering that transducer 21 must act on power on the pipe, in pipe minimum pressure with manage outside pressure between static pressure reduction can ignore.
Fig. 9 illustrates in the pipe 20 that is inserted among Fig. 8 a to Fig. 8 c or the check valve element 22 in the flexible pipe among Fig. 2 10.
Figure 10 illustrates the alternate design of pump, and the part of wherein passive flexible pipe 24 is alternately arranged with the part of active flexible pipe.Initiatively flexible pipe partly comprises the laminate of before having mentioned type and the transducer that therefore is configured for this pump.This laminate is reeled to make can carry out radial contraction and expansion in active part to extend, and by suitable actuation sequence, and fluid can 26 be transferred to outlet 27 by flexible pipe 24,25 from entering the mouth, as shown in figure 11.
Figure 12 illustrates the pump of band shell 28 and two transducers, and transducer comprises displacement member 29,30, and displacement member 29,30 can be by using the mobile access way 31 with the laminate 32,33 of elongation of being reeled.This pump comprises two safety check 34,35 that are arranged on the opposition side that is in the transducer in the flow direction shown in the thick arrow.
Figure 13 a to Figure 13 c illustrates the alternate embodiment of pump in accordance with the present invention.Pump 36 comprises a plurality of composite beds 37,38, and each composite bed has three conductive layers 39,40 and 41.Between two composite beds 37,38, form chamber 42 and away from each other or repel toward each other or shrink, can change the volume in chamber 42 by composite bed.Bias voltage can provide to conductive layer 39 at first, and the top of composite bed is biased toward one another thus, and liquid enters into inlet 43.Subsequently, bias voltage and the bias voltage of removing between conductive layer 39 is applied to conductive layer 41.This has closed inlet 43 and bias voltage can be applied to conductive layer 40, and the intermediate portion of composite bed is biased toward one another and reduces the volume in chamber 42 thus.Therefore by exporting 44 the fluid in this chamber pumped from chamber.
Figure 14 illustrates the pump of band shell 45, and shell 45 forms chamber 46, and safety check 47,48 is in opposite end.Be arranged in the free volume change capable of circulation that makes in the chamber 46 in the chamber by reeling with the transducer 49 that expands or the laminate of elongation forms, and make from enter the mouth 50 by chamber to exporting 51 pumping fluids.Figure 15 illustrates the pump structure among Figure 14, and wherein this chamber is " heart " shape.
Figure 16 and Figure 17 illustrate the pump of band shell 52, and shell 52 has groove 53, and groove 53 is formed on the chamber 54 that extends between inlet 55 and the outlet 56.By using transducer 57,58 to make casing deformation, transducer 57,58 comprises the laminate of being reeled with elongation.Shell 52 also comprises a plurality of chambeies or connects endoporus that it makes shell be easier to deflection.Flow only in a direction to guarantee this in the opposite end that safety check can be positioned at chamber 54.
The pump of the schematically illustrated band shell 59 of Figure 18, shell 59 form passage 60 between two safety check 61,62.Spring structure reel 63 is arranged in this path.This reel is to be made by elongate member, and this elongate member is made of the laminate of being reeled with elongation.During the elongation of laminate or shrinking, this reel opens and therefore be increased in the size in space 64 between the winding, and is perhaps closed and reduce space between winding, and pump action is provided in passage thus.Figure 19 illustrates the same pump of no safety check.In the case, provide pump action by the geometrical shape of passage or the laminate of coiling, because its shape, by the propelling fluid in the pumping direction that is contracted in of the laminate of reeling.
Figure 20 to Figure 22 illustrates the pump of band shell, and shell has pipe 65, and transducer 66 and safety check 67,68, transducer 66 comprise around this pipe reels with the laminate that expands and shrink.
Figure 23 illustrates the pump that has shell 69, and shell 69 has inlet 70 and outlet 71, and entrance and exit is provided with safety check, and safety check is not shown in Figure 23.Safety check provides the one-way flow that exports from entering the mouth to.Pump comprises bellows 72, and bellows 72 forms the chamber 73 with variable- volume.Transducer 74,75 is arranged to the roof 76 of mobile chamber 73 and therefore causes chamber volume to change.Each transducer comprises the laminate of being reeled with elongation.
Figure 24 illustrates the pump of band shell 77, and shell 77 forms chamber 78, and chamber 78 has inlet 79 and outlet 80.Entrance and exit is provided with safety check 81,82, and safety check provides the one-way flow that exports from entering the mouth to.Thereby transducer 83 comprises that being reeled moves around as the piston in cylinder body with the laminate that expands and in chamber 78 to be caused the variable volume of chamber 78 and so provides the pumping effect.Figure 25 illustrates the pumping effect, and wherein on behalf of filled chamber 78 and unshadowed area representative, the shadow region empty chamber 78.Time along the position of the end face 84 of X-axis and transducer 83 along Y-axis.
Figure 26 illustrates the pump that has laminate 85, and laminate 85 forms the transducer of pump.Laminate moves one and two pistons 86,87 of possibility, thereby piston 86,87 moves the chamber 90,91 that forms variable-volume in corresponding cylinder body 88,89.Have the one-way flow that the entrance and exit 92,93,94,95 of safety check 96,97,98,99 provides by chamber in pumping activities.The spring force structure for example, is coiled the form of spring 100 in the shape of a spiral, can be arranged to adjust the feature of pump.
Figure 27 illustrates the electric diagram of the control system that is used for the control pump operation.Control system is particularly suitable for combining with certain displacement pump, wherein by making chamber deflection realize pumping with variable-volume, promptly when chamber in a direction during deflection, this volume increases and this chamber is full of fluid and when chamber during in other direction deflection, this volume reduces and fluid is discharged from chamber.
Control system is based on the following fact: laminate has capacitor arrangement, and wherein the distance between the electric capacity indication first layer and the second layer is indicated the film deflection thus.
By determining the electric capacity of laminate, control system can be determined the pressure reduction on the pump, and if pump be displacement pump, also can determine the discharge capacity grade in the variable-volume chamber of pump.These characteristics can for example be used for the dosage purpose, and here pump in accordance with the present invention can provide relative accurate fluid dosage by the deflection of determining film and the compression degree of therefore determining the variable-volume chamber.
In the following description, word " bias voltage " has been described and has been applied between the first layer and the second layer so that the voltage of film deflection, and " measuring voltage " described the voltage that applies with the electric capacity of determining laminate.
Can between layer, apply known bias voltage and determine the electric capacity of laminate simultaneously according to control system of the present invention.According to the fixed reference feature of pump, the bias voltage that is applied should provide the theoretical deflection of film and the therefore theoretical volume variation of displacement pump.By measure electric capacity when applying bias voltage, control system can derive the actual film deflection that obtains and therefore derive the actual fluid displacement from the discharge of variable-volume chamber that obtains.
Control system comprises data storage capacity 101, has wherein stipulated from the fluid displacement of chamber discharge and the ratio between the actuator electric capacity.In simple embodiment, this ratio is stored as centrifugal pump.Computing device 102 is communicated by letter with data storage device 101 and based on treating that the fluid dosage by pump is discharged determines theoretical bias voltage 103, by theoretical bias voltage 103, make film in theory deflection to cause the chamber volume variation of expection.Computing device is sent to error correction device 104 with theoretical bias voltage, and bias generator 105 receives input to be set to the high voltage bias signal of transducer 106 from error correction device 104.Actuator 106 comprises the laminate of describing type, and in this figure, this laminate is corresponding to capacitor.
Except bias voltage signal, bias generator 105 provides the low voltage test signal via connecting line 107, and low voltage test signal and bias voltage signal are applied to laminate simultaneously.Wave filter 108 extracts low voltage signal from high voltage signal, and capacitance measuring device 109 is determined the actual capacitance of transducer 106.
Determine electric capacity at film during by the deflection of high voltage bias signal, and therefore, electric capacity indication bias voltage signal make film deflection what.In the illustrated embodiment, electric capacity is converted into feedback signal 110, in the case, to compare the form of bias voltage, promptly provides the bias voltage of actual generation and definite film deflection by measuring electric capacity with the fixed reference feature of pump.In correcting device 104, deduct the comparison bias voltage and receive gained correction bias voltage 111 by bias generator 105 from the bias voltage of determining.
Generally speaking, feedback signal 110 can be handled in every way via dissimilar amplifiers and transducer.
Capacitance measuring device also may be implemented in the conventional computer system, and it can include, but is not limited to any principle in the following principle of measurement: AC power, AC voltage, RMS power, peak detector, logarithmic detector, RSSI, impedance, pulse measurment circuit or spectrum measurement circuit.
Voltage is set usually greater than 300 volts and less than 10kV to what actuator provided the high voltage bias signal.One example will be 500V to 2.5kV.The low voltage test signal will be usually between 1V and 10V, and an example will be 3V to 5V.The high voltage actuator control signal is generally direct current to the low frequency less than the 1KHz repetition frequency, and an example will be 50Hz.The AC test signal is being significantly higher than the frequency of actuator usually, and common multiple with 10 is higher than the actuator repetition frequency.Have the 2.5kV signal, the actuator of 10Hz repetition frequency can have the AC test signal of 5V and the repetition frequency of 1KHz.
Data processing structure also can be suitable for using the deflection of definite variable-volume chamber that concrete flowing information is provided.This information can be based on the information in second data file, and the information of second data file has been described in the deflection of variable-volume chamber and in the pressure drop on the pump, through the ratio between the flowing velocity of the concrete fluid of pump etc.
And control system can be suitable for controlling this pump and be used for deciding the dosage purpose.As an example, control system can have the ability of user about the request of flow that read.As an example, this can be the expection pressure drop, the projected dose of expected flow speed or the flowing medium that discharges by pump.Based on this request, control system applies bias voltage to first conductive layer and second conductive layer, measures electric capacity simultaneously.In this way, determine the deflection of variable-volume chamber and, can fulfil this request by using the data in first data file and second data file.
Claims (according to the modification of the 19th of treaty)
1. one kind is used for from the fluid pump of inlet to outlet transfering fluid medium, and described pump comprises: shell, and it forms the path between described inlet and outlet; And, transducer, it comprises laminate, laminate has the di-electric polymer material film that is arranged between first conductive material layer and second conductive material layer, make that described film can the deflection in response to being applied to electric field between the described layer, wherein said laminate is arranged to produce pump action when described film deflection.
2. pump according to claim 1, wherein said film has first surface and opposed second surface, and described at least first surface comprises the surface pattern of projection and concave surface portion.
3. fluid pump according to claim 2, wherein said surface pattern comprise the hypergraph case by the iteron pattern generating.
4. according to a described pump in 1 to 3 in the aforementioned claim, wherein said laminate comprises multi-layer structure, and multi-layer structure has at least two composite beds, and each composite bed comprises:
-by the film that di-electric polymer material is made, it has front surface and rear surface, and described front surface comprises the surface pattern of projection and concave surface portion, and
-depositing to first conductive material layer on the described surface pattern, described conductive material layer has bellows-shaped, and this bellows-shaped is formed by the surface pattern of film.
5. pump according to claim 4, wherein said transducer are provided with at least three independent active parts, and each part is arranged to make described main body in the diverse location place distortion along described path.
6. according to each described pump in the aforementioned claim, wherein said laminate is reeled to form the transducer of elongation, and the transducer of elongation has the end face and the cylindrical body portion between described end face of axial opposed.
7. pump according to claim 6, the laminate of wherein said coiling limits the turning radius, r g, by
Figure FPA00001283946200011
Provide, wherein I is the area inertia moment of the transducer of coiling, and r gCan be in the scope of 5mm to 100mm, such as in the scope of 10mm to 75mm, such as in the scope of 25mm to 50mm.
8. according to claim 6 or 7 described pumps, the laminate of wherein said coiling can limit slenderness ratio, and λ is by λ=L/r gProvide, wherein L is the axial length of the laminate of reeling, and λ can be less than 20, such as less than 10.
9. according to each described pump in the aforementioned claim, wherein said first conductive layer deposition is on described surface pattern and have the shape of projection and concave surface portion, and described shape is formed by described surface pattern.
10. each described pump in the aforementioned claim of root, wherein said projection and concave surface portion have the shape that periodically changes along at least one direction of described first surface.
11. each described pump in the aforementioned claim of root, wherein said projection and concave surface portion have the size that periodically changes along at least one direction of described first surface.
12. according to each described pump in the aforementioned claim, the Young's modulus of wherein said first conductive layer is higher than the Young's modulus of described film.
13. according to each described pump in the aforementioned claim, the thickness of wherein said film the average thickness of described film 90% and 110% between.
14. according to each described pump in the aforementioned claim, the thickness of wherein said first conductive layer the average thickness of described first conductive layer 90% and 110% between.
15. according to each described pump in the claim 9 to 14, wherein said surface pattern comprises ripple, these ripples form trough and the crest that extends substantially on a common direction.
16. pump according to claim 15, wherein each ripple limits the height that becomes the beeline between crest and the adjacent trough, and the average height of described ripple is between 1/3 μ m and 20 μ m.
17. according to each described pump in the aforementioned claim, the average thickness of wherein said film is between 10 μ m and 200 μ m.
18. according to each described pump in the aforementioned claim, the thickness of wherein said first conductive layer is in the 0.01-0.1 mu m range.
19. according to each described pump in the aforementioned claim 9 to 18, wherein said second surface is a substantially flat.
20. pump according to claim 4, wherein at least two adjacent composite beds are arranged to the rear surface toward each other.
21. pump according to claim 4, wherein at least two adjacent composite beds are arranged to front surface toward each other.
22. pump according to claim 4, wherein at least two adjacent composite beds are arranged to the front surface of the rear surface of a composite bed towards another composite bed.
23. according to each described pump in the claim 4,20,21 or 22, the part in wherein said path is formed by the space between described composite bed.
24. according to each described pump in the aforementioned claim, it comprises at least two safety check, these at least two safety check are arranged in the described path to form the pumping space between them.
25. according to claim 23 and 24 described pumps, wherein said valve arrangement is to be formed by the additional layers of conductive material on the film of each composite bed.
26. forming, pump according to claim 25, wherein said transducer make described laminate meet Euler's standard about the stability in the normal operation range at pump under the no bearing state.
27. according to each described pump in the aforementioned claim, at least a portion in wherein said path is located in the main body of deformable material, described transducer is arranged to make described main body deflection, described thus path changing volume when described film deflection.
28. pump according to claim 5, it also comprises control system, and described control system is suitable for providing in order the actuating subsequently of a part after another part, and this realizes pump action, thus in described path on flow direction propelling fluid.
29. according to each described pump in the claim 28, wherein said main body has built-in pressure unit, described built-in pressure unit is pressed described path towards neutral configuration, and described path can be overcome described built-in pressure unit by described transducer and promote towards actuation configuration from described neutral configuration.
30. pump according to claim 29, wherein said neutral configuration are compared described actuation configuration lower flow resistance are provided in described path.
31. pump according to claim 29, wherein said neutral configuration are compared described actuation configuration higher flow resistance are provided in described path.
32. according to each described pump in the aforementioned claim, wherein said transducer arrangement is in outside, described path.
33. according to each described pump in the claim 1 to 31, wherein said transducer arrangement is in described path.
34. pump according to claim 33, wherein said transducer are arranged to produce the Volume Changes of the part in described path when described film deflection.
35. pump according to claim 6, it comprises at least two safety check, described at least two safety check be arranged on the opposition side of described transducer and be provided at described inlet and outlet between one-way flow, at least one in the described valve element is attached to described end face or forms the part of described end face.
36. pump according to claim 35, wherein said cylindrical body portion are hollow and part that form described path.
37. according to each described pump in the claim 35 to 36, it comprises the transducer that is arranged in a plurality of elongations in the continous cylindrical chamber, the end of adjacent transducer toward each other.
38. according to each described pump in the claim 35 to 37, wherein said laminate is reeled with respect to the surface pattern of at least one in the described layer, makes the deflection of described film cause the radial expansion of described transducer.
39. according to each described pump in the claim 35 to 37, wherein said laminate is reeled with respect to the surface pattern of at least one in the described layer, makes the deflection of described film cause the axial expansion of described transducer.
40. according to each described pump in the aforementioned claim, it comprises the bellows with inner space, thereby described transducer is arranged to make described bellows deflection that volume variable in the described space is provided.
41. according to each described pump in the aforementioned claim, it comprises cylinder body and piston, described cylinder body forms the part in described path and is provided with two safety check, described safety check is arranged and causes from described inlet by the one-way flow of described cylinder body to described outlet, described piston can move in described cylinder body, and wherein said transducer is arranged to make described piston to move with respect to described cylinder body.
42. according to the described pump of claim 41, the laminate of wherein said transducer is the plane layer casting die, and described pump comprises control system, described control system is suitable for the described transducer of frequency drives corresponding to the resonant frequency of described plane layer casting die.
43. according to each described pump in the aforementioned claim, it comprises control system, described control system is suitable for applying known bias voltage between described layer, determines for the significant measurement of the electric capacity of described laminate simultaneously.
44. according to the described pump of claim 43, wherein said transducer is arranged to provide the deflection of variable-volume chamber.
45. according to the control system of each described pump in the claim 1 to 42, described control system is suitable for applying known bias voltage between described layer, determines the electric capacity of the laminate of described pump simultaneously.

Claims (43)

1. one kind is used for from the fluid pump of inlet to outlet transfering fluid medium, and described pump comprises: shell, and it forms the path between described inlet and outlet; And, transducer, it comprises laminate, laminate has the di-electric polymer material film that is arranged between first conductive material layer and second conductive material layer, make that described film can the deflection in response to being applied to electric field between the described layer, wherein said laminate is arranged to produce pump action when described film deflection.
2. pump according to claim 1, wherein said film has first surface and opposed second surface, and described at least first surface comprises the surface pattern of projection and concave surface portion.
3. pump according to claim 2, wherein said first conductive layer deposition are on described surface pattern and have the shape of projection and concave surface portion, and described shape is formed by described surface pattern.
4. according to each described pump in the claim 2 to 3, wherein said projection and concave surface portion have the shape that periodically changes along at least one direction of described first surface.
5. according to each described pump in the claim 2 to 4, wherein said projection and concave surface portion have the size that periodically changes along at least one direction of described first surface.
6. according to each described pump in the aforementioned claim, the Young's modulus of wherein said first conductive layer is higher than the Young's modulus of described film.
7. according to each described pump in the aforementioned claim, the thickness of wherein said film the average thickness of described film 90% and 110% between.
8. according to each described pump in the aforementioned claim, the thickness of wherein said first conductive layer the average thickness of described first conductive layer 90% and 110% between.
9. according to each described pump in the claim 2 to 8, wherein said surface pattern comprises ripple, and these ripples form trough and the crest that extends substantially on a common direction.
10. pump according to claim 9, wherein each ripple limits the height that becomes the beeline between crest and the adjacent trough, and the average height of described ripple is between 1/3 μ m and 20 μ m.
11. according to each described pump in the aforementioned claim, the average thickness of wherein said film is between 10 μ m and 200 μ m.
12. according to each described pump in the aforementioned claim, the thickness of wherein said first conductive layer is in the 0.01-0.1 mu m range.
13. according to each described pump in the aforementioned claim 2 to 12, wherein said second surface is a substantially flat.
14. according to each described pump in the aforementioned claim, wherein said laminate comprises multi-layer structure, multi-layer structure has at least two composite beds, and each composite bed comprises:
-by the film that di-electric polymer material is made, it has front surface and rear surface, and described front surface comprises the surface pattern of projection and concave surface portion, and
-depositing to first conductive material layer on the described surface pattern, described conductive material layer has bellows-shaped, and this bellows-shaped is formed by the surface pattern of described film.
15. pump according to claim 14, wherein at least two adjacent composite beds are arranged to the rear surface toward each other.
16. pump according to claim 14, wherein at least two adjacent composite beds are arranged to front surface toward each other.
17. pump according to claim 14, wherein at least two adjacent composite beds are arranged to the front surface of the rear surface of a composite bed towards another composite bed.
18. according to each described pump in the claim 14 to 17, wherein said multi-layer structure is made by a plurality of composite beds, the area moment in the cross section that described a plurality of composite bed obtains is enough to crooked described multi-layer structure, and described area moment is at least 2 times of mean value of the area inertia moment of independent each composite bed.
19. according to each described pump in the claim 14 to 18, the part in wherein said path is formed by the space between described composite bed.
20. according to each described pump in the aforementioned claim, it comprises at least two safety check, these at least two safety check are arranged in the described path to form the pumping space between them.
21. according to claim 19 and 20 described pumps, wherein said valve arrangement is formed by the additional layers of conductive material on the film of each composite bed.
22. forming, pump according to claim 21, wherein said transducer make described laminate meet Euler's standard about the stability in the normal operation range at pump under the no bearing state.
23. according to each described pump in the aforementioned claim, at least a portion in wherein said path is located in the main body of deformable material, described transducer is arranged to make described main body deflection, described thus path changing volume when described film deflection.
24. pump according to claim 23, wherein said transducer are provided with at least three independent active parts, each part is arranged to make described main body in the diverse location place distortion along described path.
25. pump according to claim 24, it also comprises control system, and described control system is suitable for providing in order the actuating subsequently of a part after another part, and this realizes pump action, thus in described path on flow direction propelling fluid.
26. according to each described pump in the claim 24 to 25, wherein said main body has built-in pressure unit, described built-in pressure unit is pressed described path towards neutral configuration, and described path can be overcome described built-in pressure unit by described transducer and promote towards actuation configuration from described neutral configuration.
27. pump according to claim 26, wherein said neutral configuration are compared described actuation configuration lower flow resistance are provided in described path.
28. pump according to claim 26, wherein said neutral configuration are compared described actuation configuration higher flow resistance are provided in described path.
29. according to each described pump in the aforementioned claim, wherein said transducer arrangement is in outside, described path.
30. according to each described pump in the claim 1 to 28, wherein said transducer arrangement is in described path.
31. pump according to claim 30, wherein said transducer are arranged to produce the Volume Changes of the part in described path when described film deflection.
32. according to each described pump in the aforementioned claim, wherein said laminate is reeled to form the transducer of elongation, the transducer of elongation has the end face and the cylindrical body portion between described end face of axial opposed.
33. pump according to claim 32, it comprises at least two safety check, described at least two safety check be arranged on the opposition side of described transducer and be provided at described inlet and outlet between one-way flow, at least one in the described valve element is attached to described end face or forms the part of described end face.
34. according to each described pump in the claim 32 to 34, wherein said cylindrical body portion is hollow and part that form described path.
35. according to each described pump in the claim 32 to 34, it comprises the transducer that is arranged in a plurality of elongations in the continous cylindrical chamber, the end of adjacent transducer toward each other.
36. according to each described pump in the claim 32 to 35, wherein said laminate is reeled with respect to the surface pattern of at least one in the described layer, makes the deflection of described film cause the radial expansion of described transducer.
37. according to each described pump in the claim 32 to 35, wherein said laminate is reeled with respect to the surface pattern of at least one in the described layer, makes the deflection of described film cause the axial expansion of described transducer.
38. according to each described pump in the aforementioned claim, it comprises the bellows with inner space, thereby described transducer is arranged to make described bellows deflection that volume variable in the described space is provided.
39. according to each described pump in the aforementioned claim, it comprises cylinder body and piston, described cylinder body forms the part in described path and is provided with two safety check, described safety check is arranged and causes from described inlet by the one-way flow of described cylinder body to described outlet, described piston can move in described cylinder body, and wherein said transducer is arranged to make described piston to move with respect to described cylinder body.
40. according to the described pump of claim 39, the laminate of wherein said transducer is the plane layer casting die, and described pump comprises control system, described control system is suitable for the described transducer of frequency drives corresponding to the resonant frequency of described plane layer casting die.
41. according to each described pump in the aforementioned claim, it comprises control system, described control system is suitable for applying known bias voltage between described layer, determines for the significant measurement of the electric capacity of described laminate simultaneously.
42. according to the described pump of claim 41, wherein said transducer is arranged to provide the deflection of variable-volume chamber.
43. according to the control system of each described pump in the claim 1 to 40, described control system is suitable for applying known bias voltage between described layer, determines the electric capacity of the laminate of described pump simultaneously.
CN2009801254445A 2008-04-30 2009-04-30 A pump powered by a polymer transducer Pending CN102084133A (en)

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CN104763620A (en) * 2014-10-31 2015-07-08 浙江大学 Flexible peristaltic pump
CN108223339A (en) * 2016-12-14 2018-06-29 德尔格制造股份两合公司 Cavity pump and the method for running cavity pump
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