CN106239495B - A kind of micro-nano operation parallel pose adjustment platform and method - Google Patents
A kind of micro-nano operation parallel pose adjustment platform and method Download PDFInfo
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- CN106239495B CN106239495B CN201610750219.2A CN201610750219A CN106239495B CN 106239495 B CN106239495 B CN 106239495B CN 201610750219 A CN201610750219 A CN 201610750219A CN 106239495 B CN106239495 B CN 106239495B
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- platform
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/08—Programme-controlled manipulators characterised by modular constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
Abstract
The invention discloses a kind of parallel poses of micro-nano operation to adjust platform and method.The platform is mainly used under scanning electron microscope environment, judge the object to be operated and the relative pose relationship of executor tail end using scanning electron microscope image, start the pose that platform is rotated parallel in micro motor driving platform progress y z-planes to convert, platform is driven to carry out pose transformation in x z-planes by two platform Actuators of combined launch, to judge whether platform space pose meets the operation requirement of executor tail end, micro-nano operation is carried out to research object if meet platform coupling executor tail end, otherwise repeats the set-up procedure of above-mentioned platform space pose.The present invention carries out micro-nano operation mainly for coupling scanning electron microscope lower end actuator, can increase end effector degree of freedom, enlarged distal tip actuator opereating specification；Meanwhile the parallel pose adjustable platform that arbitrarily rotates of space can expand the function of observation and operation, have the characteristics that automation mechanized operation, simple in structure, easy to implement.
Description
Technical field
The invention discloses a kind of parallel poses of micro-nano operation to adjust platform and method, belongs to the electrical integrated skill of microcomputer
Art, micro-nano operating technology field.
Background technology
Scanning electron microscope because it is with nanometer resolution, even Subnano-class resolution ratio, meanwhile, to sample shape
The superior function that looks are observed and constituent analysis aspect has, therefore, it has become the requisite instrumentations of modern nanosecond science and technology analysis field.
When observing sample topography or constituent analysis, the platform of carrying sample used has been standardized mostly, and conjunction is mostly used when replacing sample
Suitable example platform, and scanning electron microscope vacuum chamber need to be opened and replaced manually, it is prolonged and repeated to cause under equipment vacuum degree
Drop and platform abrasion, to increase plant maintenance and maintenance expense.With the continuous development of micro-electromechanical technology, it is based on scanning electron
When microscope is operated and assembled to the object to be operated of micro/nano level scale, micro-nano operation robot gradually shows it and answers
Foreground and advantage.But since for micro-nano operation robot generally tool there are three the degree of freedom in direction, motion range is also limited, from
And causing its operating space limited, this will necessarily limit the further expansion of micro-nano operation robot application.It is grasped by means of micro-nano
When making robot the object to be operated being observed and operated, it then follows effect maximization principle, therefore it is required that being observed platform tool
There are more degree of freedom and automation mechanized operation function.
Invention content
In order to overcome the above-mentioned deficiencies of the prior art, it is operated the present invention provides a kind of micro-nano and adjusts platform with parallel pose
And method, solve the problems such as existing platform the degree of automation is low, micro-nano operation robot degree of freedom is limited and opereating specification is small,
The parallel pose adjustable platform that space arbitrarily rotates simultaneously can expand the function of observation and operation, have automation mechanized operation, structure
Simply, the features such as easy to implement.
In order to achieve the above object, idea of the invention is that：By means of scanning electron microscope to the quilt of micro-nano-scale
When operation object is operated and characterized, in order to overcome observation and operating function existing for micro-nano operation robot single, free
The problems such as limited and opereating specification is small is spent, meanwhile, for the deficiencies such as existing observation platform the degree of automation is low, the present invention provides
A kind of micro-nano operation parallel pose adjustment platform and method.The platform judges the object to be operated using scanning electron microscope image and holds
The relative pose relationship of row device end starts the pose that platform is rotated parallel in micro motor driving platform progress y-z plane and converts,
Platform is driven to carry out pose transformation in x-z-plane by two platform Actuators of combined launch, to judge platform space position
Whether appearance meets the operation requirement of executor tail end, and micro-nano is carried out to the object to be operated if meet platform coupling executor tail end
Operation, set-up procedure that is on the contrary then repeating above-mentioned platform space pose.It can be realized entirely by two parallel movable tablets of platform
Circumference synchronous rotary operates, and the parallel pose to realize platform is adjustable；The movable tablet peripheric surface of platform can be arranged by operation pair
As that by the parallel adjustment of free-position, can realize the comprehensive morphology observations to the object to be operated and comprehensive operation, together
When, it can realize that the automation comparison of observation or operation is ground to the object to be operated on synchronous movable tablet using executor tail end
Study carefully, has expanded the function of observation and operation and operable range.
Conceived according to foregoing invention, the present invention uses following technical proposals：
A kind of micro-nano operation parallel pose adjustment platform, micro-nano behaviour is carried out for coupling scanning electron microscope lower end actuator
Make, a platform rotates that micro motor is coaxially connected with driving gear by shaft coupling, and the platform rotates micro motor parallel parallel
It being connected on movable floor by the first support base, the driving gear is mounted on by first bearing in first bearing seat,
The first bearing seat is connected in by the second support base on movable floor；The driving gear and the first intermediate driven gear
Intermeshing, first driven gear are intermeshed with the second driven gear and third driven gear respectively, and described second is passive
Gear and third driven gear are coaxially connected with the first movable tablet and the second movable tablet respectively, first driven gear,
Second driven gear and the first movable tablet, third driven gear and the second movable tablet are installed by a pair of of second bearing respectively
In a pair of of second bearing seat, which is connected in by three pairs of third support bases on movable floor respectively；
Two the first hinged-supports are installed in movable floor upper surface center both sides respectively, which passes through first connecting rod and
Two connecting rods are articulated with the second hinged-support, which is connected in a pair of first support plate upper surface, the first support plate following table
Face is fixed on by a pair of second support plate on sole plate, and the sole plate will be micro- using threaded hole at lower central position
The parallel pose of operation of receiving adjusts stage+module on scanning electron microscope workbench；The sole plate upper surface passes through two pedestals
It is respectively fixed with the first platform Actuator and the second platform Actuator, the first platform Actuator and the second platform are micro-
The projecting end of actuator is connected with one end of third connecting rod, the other end and fourth link and the 5th connecting rod of the third connecting rod
Be articulated with a bit, the other end of fourth link is connected in the upper surface of sole plate by third hinged-support, the 5th connecting rod it is another
One end is connected in the lower surface of movable floor by the 4th hinged-support；Two the first hinged-supports and two the 4th hinged-supports play branch
Support the purpose of movable floor.
A kind of parallel pose method of adjustment of micro-nano operation adjusts platform using the above-mentioned parallel pose of micro-nano operation,
Operating procedure is as follows：
1) judge the object to be operated and the relative pose relationship of executor tail end using scanning electron microscope image, grasped according to micro-nano
Make the drive connection of mission requirements and transmission device, differentiates needed for the first movable tablet of platform and the second movable tablet pose rotation
Suitable direction and angle, θ；
2) start platform and rotate micro motor parallel, the first movable tablet of platform and the second movable tablet can be driven to be carried out at the same time
Rotation, to realize pose transformation of the designated position in y-z plane on platform；
3) the first platform Actuator and the second platform Actuator are subjected to linkage telescopic, driving platform first is movably flat
Plate and the second movable tablet carry out pitching motion in the horizontal plane simultaneously, to realize that designated position is in x-z-plane on platform
Pose transformation；
4) judge whether platform space pose meets the operation requirement of executor tail end, if meeting parallel pose levelling
Platform couples executor tail end and carries out micro-nano operation, adjustment step that is on the contrary then repeating above-mentioned platform space pose to the object to be operated
Suddenly.
Compared with prior art, the present invention with following obvious prominent substantive distinguishing features and remarkable advantage：
The present invention couples scanning electron microscope lower end actuator and the object to be operated of micro-nano-scale is operated and characterized
When, it increases end effector degree of freedom, expand end effector opereating specification；Pass through two parallel movable tablets of platform
Circle synchronous rotary operation can be achieved, the parallel pose to realize platform is adjustable；The movable tablet peripheric surface of platform can be arranged
The object to be operated can be realized by the parallel adjustment of free-position to the comprehensive morphology observations of the object to be operated and comprehensive
Operation, meanwhile, observation can be realized to the object to be operated on synchronous movable tablet or operate automatic using executor tail end
Change comparative study, expands the function of observation and operation；Has many advantages, such as automation mechanized operation, simple in structure, easy to implement.
Description of the drawings
Fig. 1 is that micro-nano operates parallel pose method of adjustment flow chart.
Fig. 2 is that micro-nano is operated with the parallel pose adjustment main schematic diagram of platform structure.
Fig. 3 is that micro-nano is operated with the parallel pose adjustment right schematic diagram of platform structure.
Fig. 4 is that parallel pose adjusts platform coupling executor tail end progress micro-nano operation chart.
Specific implementation mode
The preferred embodiment in the present invention is clearly and completely described below in conjunction with the accompanying drawings, it is clear that described reality
Apply a part of the embodiment that example is only the present invention.
Referring to Fig. 2~Fig. 4, a kind of micro-nano operation parallel pose adjustment platform is held for coupling scanning electron microscope lower end
Row device carries out micro-nano operation, and it is coaxially connected by shaft coupling 14 and driving gear 10 that a platform rotates micro motor 15 parallel, institute
It states platform and rotates micro motor 15 parallel and be connected on movable floor 24 by the first support base 17, the driving gear 10 passes through
First bearing 11 is mounted in first bearing seat 12, which is connected in movable floor by the second support base 13
On 24；The driving gear 10 is intermeshed with the first intermediate driven gear 9, first driven gear 9 respectively with the second quilt
Moving gear 30 and third driven gear 31 are intermeshed, and second driven gear 30 and third driven gear 31 are respectively with first
Movable tablet 8 is coaxially connected with the second movable tablet 32, and first driven gear 9, the second driven gear 30 and first are movable
Tablet 8, third driven gear 31 and the second movable tablet 32 are mounted on a pair of of second bearing seat by a pair of of second bearing 7 respectively
On 6, which is connected in by three pairs of third support bases 5 on movable floor 24 respectively；The movable floor
Two the first hinged-supports 23 are installed in 24 upper surfaces center both sides respectively, which is connected by first connecting rod 18 and second
Bar 19 is articulated with the second hinged-support 20, which is connected in 21 upper surface of a pair of first support plate, the first support plate
21 lower surfaces are fixed on by a pair of second support plate 22 on sole plate 25, and the sole plate 25 utilizes lower central position
Locate threaded hole 26 to operate micro-nano with parallel pose adjustment stage+module on scanning electron microscope workbench；On the sole plate 25
Surface is respectively fixed with the first platform Actuator 28 and the second platform Actuator 33 by two pedestals 27, and described first is flat
The projecting end of platform Actuator 28 and the second platform Actuator 33 is connected with one end of third connecting rod 29, the third connecting rod
29 other end is articulated with a bit with fourth link 2 and the 5th connecting rod 3, and the other end of fourth link 2 is solid by third hinged-support 1
It is connected in the upper surface of sole plate 25, the other end of the 5th connecting rod 3 is connected in the following table of movable floor 24 by the 4th hinged-support 4
Face；Two the first hinged-supports 23 and two the 4th hinged-supports 4 play the purpose of support movable floor 24.
Referring to Fig. 1, a kind of parallel pose method of adjustment of micro-nano operation operates parallel pose tune using above-mentioned micro-nano
Platform is flattened, operating procedure is as follows：
1) object to be operated and the relative pose relationship of executor tail end 16 are judged using scanning electron microscope image, according to micro-nano
Operation task requires and the drive connection of transmission device, differentiates the first movable tablet of platform 8 and the rotation of 32 pose of the second movable tablet
Suitable direction and angle, θ needed for turning；
2) start platform and rotate micro motor 15 parallel, platform the first movable tablet 8 and the second movable tablet 32 can be driven same
Shi Jinhang rotates, to realize pose transformation of the designated position in y-z plane on platform；
3) the first platform Actuator 28 and the second platform Actuator 33 are subjected to linkage telescopic, driving platform first can
8 and second movable tablet 32 of dynamic tablet carries out pitching motion in the horizontal plane simultaneously, to realize that designated position is in x-z on platform
Pose transformation in plane；
4) judge whether platform space pose meets the operation requirement of executor tail end 16, if meeting parallel pose is adjustable
Platform couples executor tail end 16 and carries out micro-nano operation, adjustment that is on the contrary then repeating above-mentioned platform space pose to the object to be operated
Step.
The embodiment of the present invention carries out micro-nano operation mainly for coupling scanning electron microscope lower end actuator, can increase end
Actuator degree of freedom, enlarged distal tip actuator opereating specification；Meanwhile the parallel pose adjustable platform that space arbitrarily rotates can be expanded
The function of observation and operation.
Claims (2)
1. a kind of micro-nano operation adjusts platform with parallel pose, micro-nano behaviour is carried out for coupling scanning electron microscope lower end actuator
Make, it is characterised in that：It is coaxially connected by shaft coupling (14) and driving gear (10) that one platform rotates micro motor (15) parallel,
The platform rotates micro motor (15) and is connected on movable floor (24) by the first support base (17) parallel, the driving tooth
It takes turns (10) to be mounted in first bearing seat (12) by first bearing (11), which passes through the second support base
(13) it is connected on movable floor (24)；The driving gear (10) is intermeshed with intermediate the first driven gear (9), this
One driven gear (9) is intermeshed with the second driven gear (30) and third driven gear (31) respectively, second passive tooth
Wheel (30) and third driven gear (31) are described respectively with the first movable tablet (8) and the second movable tablet (32) is coaxial is connected
First driven gear (9), the second driven gear (30) and the first movable tablet (8), third driven gear (31) and second are movable
Tablet (32) is mounted on by a pair of of second bearing (7) on a pair of of second bearing seat (6) respectively, three pairs of second bearing seats (6)
It is connected on movable floor (24) by three pairs of third support bases (5) respectively；Movable floor (24) the upper surface center two
Two the first hinged-supports (23) are installed in side respectively, which is cut with scissors by first connecting rod (18) and second connecting rod (19)
It is connected to the second hinged-support (20), which is connected in a pair of first support plate (21) upper surface, the first support plate
(21) lower surface is fixed on by a pair of second support plate (22) on sole plate (25), and the sole plate (25) utilizes lower section
Micro-nano is operated and adjusts stage+module on scanning electron microscope workbench with parallel pose by center position threaded hole (26)；The base
Plinth pedestal (25) upper surface is respectively fixed with the first platform Actuator (28) and the micro- rush of the second platform by two pedestals (27)
Dynamic device (33), the projecting end and third connecting rod of the first platform Actuator (28) and the second platform Actuator (33)
(29) one end is connected, and the other end and the fourth link (2) and the 5th connecting rod (3) of the third connecting rod (29) are articulated with a bit,
The other end of fourth link (2) is connected in the upper surface of sole plate (25) by third hinged-support (1), the 5th connecting rod (3)
The other end is connected in the lower surface of movable floor (24) by the 4th hinged-support (4)；Two the first hinged-supports (23) and two
Four hinged-supports (4) play the purpose of support movable floor (24).
2. a kind of micro-nano operates parallel pose method of adjustment, adjusted using the parallel pose of micro-nano operation in claim 1
Platform, which is characterized in that operating procedure is as follows：
1) judge the object to be operated and the relative pose relationship of executor tail end (16) using scanning electron microscope image, grasped according to micro-nano
Make the drive connection of mission requirements and transmission device, differentiates the first movable tablet of platform (8) and the second movable tablet (32) pose
Suitable direction and angle, θ needed for rotation；
2) start platform and rotate micro motor (15) parallel, the first movable tablet of platform (8) and the second movable tablet (32) can be driven
It is carried out at the same time rotation, to realize pose transformation of the designated position in y-z plane on platform；
3) the first platform Actuator (28) and the second platform Actuator (33) are subjected to linkage telescopic, driving platform first can
It moves tablet (8) and the second movable tablet (32) while carrying out pitching motion in the horizontal plane, to realize designated position on platform
Pose transformation in x-z-plane；
4) judge whether platform space pose meets the operation requirement of executor tail end (16), put down if meeting and adjusting parallel pose
Platform couples executor tail end (16) and carries out micro-nano operation, adjustment that is on the contrary then repeating above-mentioned platform space pose to the object to be operated
Step.
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| CN201610750219.2A CN106239495B (en) | 2016-08-30 | 2016-08-30 | A kind of micro-nano operation parallel pose adjustment platform and method |
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| CN201610750219.2A CN106239495B (en) | 2016-08-30 | 2016-08-30 | A kind of micro-nano operation parallel pose adjustment platform and method |
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| CN106239495A CN106239495A (en) | 2016-12-21 |
| CN106239495B true CN106239495B (en) | 2018-08-07 |
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| CN110441559B (en) * | 2019-08-26 | 2020-07-28 | 上海大学 | Force real-time adjustable micro-nano probe automatic forming device and control method |
| CN113029560A (en) * | 2021-03-09 | 2021-06-25 | 安徽工程大学 | Adaptive high-precision RV reducer performance testing device and control method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2339095C1 (en) * | 2007-03-12 | 2008-11-20 | Федеральное государственное унитарное предприятие "Центральное конструкторское бюро машиностроения" (ФГУП "ЦКБМ") | Operating platform for operator position during nuclear fuel recharge on vessels with nuclear steam plant |
| CN102501247A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Fully flexible six-degree-of-freedom fine operating platform |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104493825A (en) * | 2014-10-29 | 2015-04-08 | 北京理工大学 | Cooperating device for micro-nano operating robot and operating method for microinjection |
| CN104765382A (en) * | 2015-03-26 | 2015-07-08 | 上海大学 | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform |
| CN105720859A (en) * | 2016-05-03 | 2016-06-29 | 吉林大学 | Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform |
-
2016
- 2016-08-30 CN CN201610750219.2A patent/CN106239495B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2339095C1 (en) * | 2007-03-12 | 2008-11-20 | Федеральное государственное унитарное предприятие "Центральное конструкторское бюро машиностроения" (ФГУП "ЦКБМ") | Operating platform for operator position during nuclear fuel recharge on vessels with nuclear steam plant |
| CN102501247A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Fully flexible six-degree-of-freedom fine operating platform |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104493825A (en) * | 2014-10-29 | 2015-04-08 | 北京理工大学 | Cooperating device for micro-nano operating robot and operating method for microinjection |
| CN104765382A (en) * | 2015-03-26 | 2015-07-08 | 上海大学 | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform |
| CN105720859A (en) * | 2016-05-03 | 2016-06-29 | 吉林大学 | Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform |
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