CN110441559B - Force real-time adjustable micro-nano probe automatic forming device and control method - Google Patents
Force real-time adjustable micro-nano probe automatic forming device and control method Download PDFInfo
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- CN110441559B CN110441559B CN201910791610.0A CN201910791610A CN110441559B CN 110441559 B CN110441559 B CN 110441559B CN 201910791610 A CN201910791610 A CN 201910791610A CN 110441559 B CN110441559 B CN 110441559B
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Abstract
The invention relates to micro-electro-mechanical integration, in particular to a micro-nano probe automatic forming device with real-time adjustable force and a control method.
Description
Technical Field
The invention relates to the technical field of micro-nano technology, in particular to micro-nano probe automatic forming device with real-time adjustable force and a control method.
Background
With the gradual progress of scientific research and microcosmic, the world of micro-nano level is gradually developed in the eyes of researchers, at present, the micro-nano probe is taken as a common tool in the field of micro-nano level research, has the advantages of single structure, relatively simple preparation method, low cost and the like, and has obvious economic and practical benefits in the aspects of micro-nano operation, measurement and the like. Generally, micro-nano probes are manufactured into various shapes meeting requirements according to the requirements of scientific research tasks so as to facilitate the smooth progress of the tasks, and the micro-nano probes are manufactured by adopting a traditional manual processing method in order to easily obtain simple probe shape structures. Although the manual processing method can meet the most basic requirements of probe simple shape processing, the manufacturing efficiency is low, the forming effect is poor, the product yield is low, the product processing precision is low, the requirements of efficient tasks are difficult to meet, and the manufacturing cost is easy to increase. In addition, the micro-nano probe manufactured and molded by a manual processing method has a single structure and cannot meet the requirement of a complex research task on the special shape of the probe.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a micro-nano probe automatic forming device with real-time adjustable force and a control method, which solve the problems of single forming structure, low efficiency, poor forming effect, low precision and the like of the existing manual micro-nano probe manufacturing, can realize the functions of real-time adjustable main force, dynamic force calculation, multi-mode servo feedback and the like, and have the characteristics of automatic forming, real-time adjustable force, simple structure, easiness in realization and the like.
The technical problem to be solved by the invention is realized by the following technical scheme:
a force real-time adjustable micro-nano probe automatic forming device comprises a bottom plate, wherein the bottom plate is fixed on a basic platform parallel to the bottom plate through a first supporting rod, an executing mechanism and a movable probe supporting mechanism are fixed on the bottom plate, the probe supporting mechanism comprises a fixed guide rail fixed on the bottom plate and two movable slide rail pieces sliding on the fixed guide rail, an interchangeable probe supporting base is supported on each movable slide rail piece through a second supporting rod, and an interchangeable probe is supported by the interchangeable probe supporting bases arranged on the two movable slide rail pieces; the actuating mechanism comprises a disc-shaped circumferential rotating module and a curved actuator fixed at the circumference of the circumferential rotating module, the curved actuator is fixed on the circumference of the circumferential rotating module through a first middle connecting piece, the curved actuator is arc-shaped, the inner side of the arc of the curved actuator is provided with a replaceable elastic connecting piece, and the back side of the arc of the curved actuator is provided with a force-adjustable module; a cantilever beam is vertically fixed on the basic platform, one end of the force adjustable module is fixed at the joint of the first middle connecting piece and the bending actuator, and the other end of the force adjustable module is fixed to the top of the cantilever beam through a second middle connecting piece; the circumferential rotation module is driven by a micro motor arranged on the bottom plate.
In the invention, a force detection module is arranged above the fixed guide rail, and the force detection module is arranged on the fixed guide rail through a first telescopic connecting piece and is positioned below the probe.
In the invention, a semicircular connector is arranged on the inner side of the arc of the bent actuator, one end of the replaceable elastic connecting piece is connected to the top end of the bent actuator, the other end of the replaceable elastic connecting piece is connected with one end of the semicircular connector, and the other end of the semicircular connector is hinged to the middle part of the bent actuator.
In the invention, the middle position of the force adjustable module is symmetrically provided with the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener, so as to adjust the bearing force of the force adjustable module.
In the invention, the top and the bottom of the cantilever beam are both provided with sensors, and the two sensors are matched to detect the deformation quantity of the cantilever beam in real time.
In the invention, the circumferential rotation module and the micro motor are axially arranged and are connected through a bearing and a coupling, the micro motor is arranged on the bottom plate through a micro motor base, and the bearing is arranged on the bottom plate through a bearing base.
Further, the rotating shaft of the micro motor is arranged in parallel with the probe.
According to the invention, the replaceable probe fixing upper cover piece is hinged on the replaceable probe supporting base, and the replaceable probe fixing upper cover piece is matched with the replaceable probe supporting base to clamp and fix the micro-nano probes with different sizes.
In the invention, the bottom plate is also provided with a visual detection module, and the visual detection module is fixed on the bottom plate through a second telescopic connecting piece to identify the clamping and fixing position and the processing position of the probe.
Based on the structure, the control method of the micro-nano probe automatic forming device with the force adjustable in real time comprises the following specific operation steps:
1) carrying out data discretization processing on the micro-nano probe target shape by using a computer, and analyzing main characteristic parameters of the micro-nano probe target shape;
2) precisely controlling the lifting of the force detection module and the visual detection module by adjusting the first and second telescopic links, respectively, to determine their appropriate heights L1 and L2;
3) automatically adjusting the relative position distance of the two movable slide rail pieces according to the requirement of the target shape of the micro-nano probe;
4) placing the micro-nano probe on a replaceable probe supporting base, and clamping and fixing the micro-nano probe by using a replaceable probe fixing upper cover piece;
5) different clamping forces are applied by replacing the replaceable elastic connecting piece, and the circumferential rotating module is driven to move by the micro motor;
6) the shape of the probe is imaged in real time by using a visual detection module, the actual deviation value of the shape of the probe is calculated, the combined action of the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener is automatically controlled, and the magnitude of the applied main force is dynamically adjusted, so that the purpose of adjusting the force in real time is achieved;
7) sensing deformation quantity by using two sensors, and dynamically calculating the magnitude of the applied active force;
8) the probe deforms and moves downwards, touches the force detection module and transmits sensing information to the computer system;
9) when the computer system receives the touch information of the probe sensed by the force detection module, the visual detection module is used for acquiring the actual shape of the probe in real time, the matching proximity of the actual shape of the probe and the main characteristic parameters of the target shape is automatically judged by utilizing a template matching method, if the matching proximity meets the set requirement, the actual shape of the micro-nano probe is judged to reach the forming target, otherwise, the force real-time adjustable micro-nano probe automatic forming device control method is repeated.
Compared with the prior art, the invention solves the problems of single forming structure, low efficiency, poor forming effect, low precision and the like existing in the prior art of manually manufacturing the micro-nano probe; the real-time adjustment of the active force applied to the probe is realized by utilizing the automatic linkage control of the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener; the cantilever beam of the device is provided with a sensor for sensing deformation, so that the main force is dynamically calculated, and the aim of effectively controlling the rigidity of the elastic connecting piece in real time is fulfilled; the probe is imaged in real time through the visual detection module, and the coupling force detection module senses touch information, so that multi-mode servo feedback is realized, and automatic forming and manufacturing of the micro-nano probe are realized; the device has the advantages of automatic forming, real-time force adjustment, simple structure, easy realization and the like.
Drawings
FIG. 1 is a flow chart of a control method of the micro-nano probe automatic forming device with force adjustable in real time, which is disclosed by the invention;
FIG. 2 is a schematic structural diagram of an automatic micro-nano probe forming device with force adjustable in real time, which is disclosed by the invention;
fig. 3 is a right-side view of fig. 2.
In the figure: the probe fixing device comprises a basic platform 1, a cantilever beam 2, a bearing base 3, a circumferential rotation module 4, a first middle connecting piece 5, a sensor 6, a second middle connecting piece 7, a force adjustable module 8, an electromagnetic forward rotation fastener 9, an electromagnetic reverse rotation fastener 10, a semicircular connecting piece 11, a bent actuator 12, an interchangeable elastic connecting piece 13, an interchangeable probe fixing upper cover piece 14, an interchangeable probe supporting base 15, a second supporting rod 16, a visual detection module 17, a movable sliding rail piece 18, a second telescopic connecting piece 19, a fixed guide rail 20, a bottom plate 21, a first supporting rod 22, a micro motor base 23, a micro motor 24, a coupler 25, a bearing 26, a force detection module 27 and a first telescopic connecting piece 28.
Detailed Description
The invention is further described below with reference to the drawings and specific preferred embodiments of the description, without thereby limiting the scope of protection of the invention.
Referring to fig. 2 and 3, the automatic micro-nano probe forming device with force real-time adjustable comprises a bottom plate 21, wherein the bottom plate 21 is fixed on a base platform 1 parallel to the bottom plate 21 through a first supporting rod 22, and an executing mechanism and a movable probe supporting mechanism are fixed on the bottom plate 21.
The probe supporting mechanism comprises a fixed guide rail 20 fixed on a bottom plate 21 and two movable sliding rail parts 18 sliding on the fixed guide rail 20, the movable sliding rail parts 18 support a replaceable probe supporting base 15 through a second support rod 16, the replaceable probe supporting bases 15 arranged on the two movable sliding rail parts 18 support a probe together, a replaceable probe fixing upper cover part 14 is hinged to the replaceable probe supporting base 15, and the replaceable probe fixing upper cover part 14 is matched with the replaceable probe supporting base 15 to clamp and fix the micro-nano probes with different sizes; a force detection module 27 is arranged above the fixed guide rail 20, and the force detection module 27 is arranged on the fixed guide rail 20 below the probe through a first telescopic connecting piece 28.
The actuating mechanism comprises a disc-shaped circumferential rotating module 4 and a curved actuator 12 fixed on the circumference of the circumferential rotating module 4, the curved actuator 12 is fixed on the circumference of the circumferential rotating module 4 through a first middle connecting piece 5, the curved actuator 12 is arc-shaped, the inner side of the arc of the curved actuator 12 is provided with an exchangeable elastic connecting piece 13 and a semicircular connector 11, one end of the exchangeable elastic connecting piece 13 is connected to the top end of the curved actuator 12, the other end of the exchangeable elastic connecting piece is connected with one end of the semicircular connector 11, and the other end of the semicircular connector 11 is hinged to the middle part of the curved actuator 12; the arc back side of the bent actuator 12 is provided with a force adjustable module 8, and the middle position of the force adjustable module 8 is symmetrically provided with an electromagnetic forward rotation fastener 9 and an electromagnetic reverse rotation fastener 10.
The cantilever beam 2 is vertically fixed on the base platform 1, one end of the force adjustable module 8 is fixed at the joint of the first middle connecting piece 5 and the bending actuator 12, the other end of the force adjustable module is fixed to the top of the cantilever beam 2 through the second middle connecting piece 7, the top and the bottom of the cantilever beam 2 are both provided with sensors 6, and the two sensors 6 are matched to detect the deformation quantity of the cantilever beam 2 in real time.
The circumferential rotation module 4 is driven by a micro motor 24 arranged on the bottom plate 21, the circumferential rotation module 4 and the micro motor 24 are coaxially arranged and are connected through a bearing 26 and a coupler 25, the micro motor 24 is installed on the bottom plate 21 through a micro motor base 23, the bearing 26 is installed on the bottom plate 21 through a bearing base 3, and a rotating shaft of the micro motor 24 is arranged in parallel with the probe.
In the invention, the bottom plate 21 is further provided with a visual detection module 17, and the visual detection module 17 is fixed on the bottom plate 21 through a second telescopic connecting piece 19 to identify the clamping and fixing position and the processing position of the probe.
Based on the structure, the control method of the micro-nano probe automatic forming device with the force adjustable in real time comprises the following specific operation steps as shown in figure 1:
1) carrying out data discretization processing on the micro-nano probe target shape by using a computer, and analyzing main characteristic parameters of the micro-nano probe target shape;
2) by adjusting the first and second telescopic links 28 and 19, respectively, the force detection module 8 and the visual detection module 17 are precisely controlled to rise and fall, thereby determining their appropriate heights L1 and L2;
3) automatically adjusting the relative position distance of the two movable sliding rail pieces 18 according to the requirement of the target shape of the micro-nano probe;
4) placing the micro-nano probe on a replaceable probe supporting base 15, and clamping and fixing the micro-nano probe by using a replaceable probe fixing upper cover part 14;
5) different clamping forces are applied by replacing the replaceable elastic connecting piece 13, and the circumferential rotating module 4 is driven to move by the micro motor 24;
6) the shape of the probe is imaged in real time by using the visual detection module 17, the actual deviation amount of the shape of the probe is calculated, the combined action of the electromagnetic forward rotation fastener 9 and the electromagnetic reverse rotation fastener 10 is automatically controlled, and the magnitude of the applied main force is dynamically adjusted, so that the purpose of adjusting the force adjustable module 8 in real time is achieved;
7) sensing deformation quantity by using two sensors 6, and dynamically calculating the magnitude of the applied active force;
8) the probe deforms and moves downwards, touches the force detection module 27 and transmits sensing information to the computer system;
9) when the computer system receives the touch information of the probe sensed by the force detection module 27, the visual detection module 17 is used for acquiring the actual shape of the probe in real time, the matching proximity of the actual shape of the probe and the main characteristic parameters of the target shape is automatically judged by utilizing a template matching method, if the matching proximity of the main characteristic parameters is more than 99.5%, the actual shape of the micro-nano probe is judged to reach the molding target, otherwise, the force real-time adjustable micro-nano probe automatic molding device control method is repeated.
Therefore, by combining the structure and the steps, the micro-nano probe automatic forming device with the force adjustable in real time and the control method disclosed by the invention have the advantages that the real-time adjustment of the active force applied to the probe is realized by utilizing the automatic linkage control of the electromagnetic forward rotating fastener and the electromagnetic reverse rotating fastener; the cantilever beam of the device is provided with a sensor for sensing deformation, so that the main force is dynamically calculated, and the aim of effectively controlling the rigidity of the elastic connecting piece in real time is fulfilled; the probe is imaged in real time through the visual detection module, and the coupling force detection module senses touch information, so that multi-mode servo feedback is realized, and automatic forming and manufacturing of the micro-nano probe are realized; the device has the advantages of automatic forming, real-time force adjustment, simple structure, easy realization and the like.
Claims (9)
1. The utility model provides a real-time adjustable of power receives probe automatic molding device a little which characterized in that: the probe supporting mechanism comprises a fixed guide rail fixed on the bottom plate and two movable sliding rail pieces sliding on the fixed guide rail, the movable sliding rail pieces support an interchangeable probe supporting base through a second supporting rod, and the interchangeable probe supporting bases arranged on the two movable sliding rail pieces support a probe together; the actuating mechanism comprises a disc-shaped circumferential rotating module and a bending actuator fixed at the circumference of the circumferential rotating module, the bending actuator is fixed on the circumference of the circumferential rotating module through a first middle connecting piece, the bending actuator is arc-shaped, an interchangeable elastic connecting piece is arranged on the inner side of the arc of the bending actuator, a force-adjustable module is arranged on the back side of the arc of the bending actuator, a semicircular connector is arranged on the inner side of the arc of the bending actuator, one end of the interchangeable elastic connecting piece is connected to the top end of the bending actuator, the other end of the interchangeable elastic connecting piece is connected with one end of the semicircular connector, and the other end of the semicircular connector is hinged to the middle of; a cantilever beam is vertically fixed on the basic platform, one end of the force adjustable module is fixed at the joint of the first middle connecting piece and the bending actuator, and the other end of the force adjustable module is fixed to the top of the cantilever beam through a second middle connecting piece; the circumferential rotation module is driven by a micro motor arranged on the bottom plate.
2. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: the force detection module is arranged above the fixed guide rail and is arranged on the fixed guide rail through a first telescopic connecting piece and located below the probe.
3. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: and the middle position of the force adjustable module is symmetrically provided with an electromagnetic forward rotation fastener and an electromagnetic reverse rotation fastener.
4. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: the top and the bottom of the cantilever beam are provided with sensors, and the two sensors are matched to detect the deformation quantity of the cantilever beam in real time.
5. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: the circumferential rotation module is axially arranged with the micro motor and is connected with the micro motor through a bearing and a coupler, the micro motor is installed on the bottom plate through a micro motor base, and the bearing is installed on the bottom plate through a bearing base.
6. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 5, characterized in that: the rotating shaft of the micro motor is arranged in parallel with the probe.
7. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: the replaceable probe supporting base is hinged with a replaceable probe fixing upper cover part.
8. The automatic forming device of the micro-nano probe with the real-time adjustable force according to claim 1, which is characterized in that: the bottom plate is also provided with a visual detection module, and the visual detection module is fixed on the bottom plate through a second telescopic connecting piece.
9. A control method of a micro-nano probe automatic forming device with real-time adjustable force is applied to the micro-nano probe automatic forming device with real-time adjustable force according to claim 8, and is characterized by comprising the following operation steps:
1) carrying out data discretization processing on the micro-nano probe target shape by using a computer, and analyzing main characteristic parameters of the micro-nano probe target shape;
2) precisely controlling the lifting of the force detection module and the visual detection module by adjusting the first and second telescopic links, respectively, to determine their appropriate heights L1 and L2;
3) automatically adjusting the relative position distance of the two movable slide rail pieces according to the requirement of the target shape of the micro-nano probe;
4) placing the micro-nano probe on a replaceable probe supporting base, and clamping and fixing the micro-nano probe by using a replaceable probe fixing upper cover piece;
5) different clamping forces are applied by replacing the replaceable elastic connecting piece, and the circumferential rotating module is driven to move by the micro motor;
6) the shape of the probe is imaged in real time by using a visual detection module, the actual deviation value of the shape of the probe is calculated, the combined action of the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener is automatically controlled, and the magnitude of the applied main force is dynamically adjusted, so that the purpose of adjusting the force in real time is achieved;
7) sensing the deformation quantity of the cantilever beam by using two sensors, and dynamically calculating the magnitude of the applied main force;
8) the probe deforms and moves downwards, touches the force detection module and transmits sensing information to the computer system;
9) when the computer system receives the touch information of the probe sensed by the force detection module, the visual detection module is used for acquiring the actual shape of the probe in real time, the matching proximity of the actual shape of the probe and the main characteristic parameters of the target shape is automatically judged by utilizing a template matching method, if the matching proximity meets the set requirement, the actual shape of the micro-nano probe is judged to reach the forming target, otherwise, the force real-time adjustable micro-nano probe automatic forming device control method is repeated.
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| CN201910791610.0A CN110441559B (en) | 2019-08-26 | 2019-08-26 | Force real-time adjustable micro-nano probe automatic forming device and control method |
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| CN114966142B (en) * | 2022-06-13 | 2023-01-31 | 法特迪精密科技（苏州）有限公司 | Matching method of electromagnetic drive rotary probe and fixed socket |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5513518A (en) * | 1994-05-19 | 1996-05-07 | Molecular Imaging Corporation | Magnetic modulation of force sensor for AC detection in an atomic force microscope |
| CN2488061Y (en) * | 2001-05-25 | 2002-04-24 | 中国科学院长春应用化学研究所 | Adjustable multi-probe seat for stomic force microscope |
| KR100373762B1 (en) * | 2002-09-25 | 2003-02-26 | Uk Ki Lee | Method for manufacturing cavity-type micro-probe using mems technology and micro-probe according to the same |
| CN1866407A (en) * | 2006-05-31 | 2006-11-22 | 北京大学 | MEMS microprobe and preparation method thereof |
| US8023393B2 (en) * | 2007-05-10 | 2011-09-20 | International Business Machines Corporation | Method and apparatus for reducing tip-wear of a probe |
| CN101643195B (en) * | 2008-08-06 | 2011-11-09 | 中国科学院生态环境研究中心 | Method and device for preparing colloid probe |
| GB201217344D0 (en) * | 2012-09-28 | 2012-11-14 | Ibm | Microfluidic surface processing systems with self- regulated distance-to surface control |
| CN104931741B (en) * | 2014-03-19 | 2018-05-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Microprobe and preparation method thereof |
| CN104155478A (en) * | 2014-08-13 | 2014-11-19 | 中国科学院电工研究所 | Probe self-damping method applied to fast scanning atomic force microscopy |
| CN104865408A (en) * | 2015-04-28 | 2015-08-26 | 中山大学 | Method and device for controlling resonance frequency of atomic force microscope cantilever beam |
| CN106239495B (en) * | 2016-08-30 | 2018-08-07 | 上海大学 | A kind of micro-nano operation parallel pose adjustment platform and method |
| CN107796958B (en) * | 2017-09-18 | 2019-10-01 | 上海理工大学 | A kind of preparation method of atomic force microscope colloid probe |
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