CN110441559B - Force real-time adjustable micro-nano probe automatic forming device and control method - Google Patents

Abstract

The invention relates to micro-electromechanical integration, in particular to a micro-nano probe automatic forming device and a control method with real-time adjustable force. The real-time adjustment of the active force applied to the probe during processing and a visual detection module are used to perform real-time monitoring on the probe. The imaging and coupling force detection module senses the touch information, and the combined multi-mode servo feedback realizes the automatic forming and manufacturing of the micro-nano probe. It has the advantages of automatic forming, real-time adjustable force, simple structure and easy implementation.

Description

A real-time adjustable force micro-nano probe automatic forming device and control method

technical field

The invention relates to the field of micro-nano technology, in particular to micro-electromechanical integration, in particular to a micro-nano probe automatic forming device and a control method with real-time adjustable force.

Background technique

As scientific research gradually becomes microscopic, the world of micro-nano level has gradually unfolded in the eyes of researchers. At present, micro-nano probes, as common tools in the field of micro-nano level research, have the advantages of single structure, relatively simple preparation method, Low cost and other advantages have obvious economic and practical benefits in micro-nano operation and measurement. Usually, according to the needs of scientific research tasks, the micro-nano probes are made into various shapes that meet the requirements, so as to facilitate the smooth progress of the task, and in order to easily obtain a simple probe shape structure, traditional manual processing is generally used. Manufacturing method. Although the manual processing method can meet the most basic requirements of simple shape processing of the probe, it has low production efficiency, poor molding effect, low product yield, low product processing accuracy, difficult to meet the needs of efficient tasks, and easy to increase the production cost. In addition, the micro-nano probes fabricated by manual processing methods have a single structure, which cannot meet the needs of complex research tasks for special probe shapes.

SUMMARY OF THE INVENTION

In order to solve the deficiencies of the prior art, the present invention proposes a micro-nano probe automatic forming device and control method with real-time adjustable force, which solves the problems of single forming structure, low efficiency and forming effect of the existing hand-made micro-nano probes. At the same time, it can realize functions such as real-time adjustment of main power, dynamic calculation of force, multi-mode servo feedback, etc. It has the characteristics of automatic molding, real-time adjustment of force, simple structure and easy implementation.

The technical problem to be solved by the present invention is achieved through the following technical solutions:

An automatic forming device for micro-nano probes with real-time adjustable force, comprising a base plate, the base plate is fixed on a basic platform parallel to the base plate through a first support rod, an actuator and a movable probe support mechanism are fixed on the base plate, so The probe support mechanism includes a fixed guide rail fixed on the bottom plate and two movable slide rail pieces that slide on the fixed guide rail. The replaceable probe support base set on the movable slide rail supports a probe together; the actuator includes a disk-shaped circumferential rotation module and a curved actuator fixed at the circumference of the circumferential rotation module, The curved actuator is fixed on the circumference of the circumferential rotation module through the first intermediate connecting piece. A force-adjustable module is arranged on the back side of the arc; a cantilever beam is vertically fixed on the base platform, one end of the force-adjustable module is fixed at the connection between the first intermediate connecting piece and the curved actuator, and the other end passes through the Two intermediate connecting pieces are fixed to the top of the cantilever beam; the circumferential rotation module is driven by a micromotor arranged on the bottom plate.

In the present invention, a force detection module is arranged above the fixed guide rail, and the force detection module is arranged on the fixed guide rail through the first retractable connecting piece, and is located below the probe.

In the present invention, a semicircular connector is provided on the inner side of the arc of the curved actuator, one end of the replaceable elastic connector is connected to the top end of the curved actuator, and the other end is connected to the semicircular connector. One end is connected, and the other end of the semicircular connector is hinged to the middle of the curved actuator.

In the present invention, the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener are symmetrically installed at the middle position of the adjustable force module to adjust the bearing force of the adjustable force module.

In the present invention, the top and bottom of the cantilever beam are provided with sensors, and the two sensors cooperate to detect the deformation amount of the cantilever beam in real time.

In the present invention, the circumferential rotation module is axially arranged with the micromotor and is connected by a bearing and a coupling, the micromotor is mounted on the base plate through the micromotor base, and the bearing is mounted on the base plate through the bearing base.

Further, the rotating shaft of the micromotor is arranged in parallel with the probe.

In the present invention, a replaceable probe fixing upper cover is hinged on the replaceable probe support base, and the replaceable probe fixing upper cover cooperates with the replaceable probe support base to realize different sizes of micro-nano probes. Clamping and fixing.

In the present invention, the base plate is further provided with a visual detection module, and the visual detection module is fixed on the base plate through the second retractable connector to identify the clamping and fixing position and the processing position of the probe.

Based on the above structure, a method for controlling a micro-nano probe automatic forming device with real-time adjustable force, the specific operation steps are as follows:

1) Use computer to discretize the target shape of the micro-nano probe, and analyze the main characteristic parameters of the target shape of the micro-nano probe;

2) By adjusting the first retractable connector and the second retractable connector respectively, accurately control the lifting and lowering of the force detection module and the visual detection module, thereby determining their appropriate heights L1 and L2;

3) According to the needs of the target shape of the micro-nano probe, automatically adjust the relative position spacing of the two movable slide rails;

4) Place the micro-nano probe on the replaceable probe support base, and use the replaceable probe to fix the upper cover to clamp and fix the micro-nano probe;

5) Apply different clamping forces by replacing the replaceable elastic connectors, and use the micromotor to drive the movement of the circumferential rotation module;

6) Use the visual inspection module to image the probe shape in real time, calculate the actual deviation of the probe shape, automatically control the joint action of the electromagnetic forward rotation fastener and the electromagnetic reverse fastener, and dynamically adjust the applied active force, so as to achieve real-time force control. the purpose of tuning;

7) Use two sensors to perceive the deformation variables, and dynamically calculate the magnitude of the applied active force;

8) The probe is deformed and moves downward, touches the force detection module, and transmits the sensing information to the computer system;

9) When the computer system receives the touch information of the probe perceived by the force detection module, the visual detection module is used to obtain the actual shape of the probe in real time, and the template matching method is used to automatically determine the match between the actual shape of the probe and the main characteristic parameters of the target shape. Proximity, if the set requirements are met, it is determined that the actual shape of the micro-nano probe reaches the forming target; otherwise, the above-mentioned control method of the micro-nano probe automatic forming device with adjustable force in real time is repeated.

Compared with the prior art, the invention solves the problems of single molding structure, low efficiency, poor molding effect and low precision of the existing hand-made micro-nano probes; the electromagnetic forward-rotating fastener and the electromagnetic reverse-rotating fastening are used. The automatic linkage control of the parts realizes the real-time adjustment of the active force applied to the probe; the sensor is arranged on the cantilever beam of the device to sense the deformation, and the active force is dynamically calculated to achieve the purpose of effectively controlling the stiffness of the elastic connector in real time; through visual inspection The module performs real-time imaging of the probe, and the coupling force detection module senses the touch information, thereby realizing multi-mode servo feedback, so as to realize the automatic forming and manufacturing of micro-nano probes; it has automatic forming, real-time adjustable force, simple structure and easy implementation. Etc.

Description of drawings

Fig. 1 is the flow chart of the control method of the micro-nano probe automatic forming device with adjustable force in real time according to the present invention;

2 is a schematic structural diagram of the micro-nano probe automatic forming device with real-time adjustable force of the present invention;

FIG. 3 is a schematic right side view of FIG. 2 .

In the figure: basic platform 1, cantilever beam 2, bearing base 3, circumferential rotation module 4, first intermediate connector 5, sensor 6, second intermediate connector 7, force adjustable module 8, electromagnetic forward rotation fastener 9. Electromagnetic reversing fastener 10, semicircular connector 11, curved actuator 12, replaceable elastic connector 13, replaceable probe fixing upper cover 14, replaceable probe support base 15, second Support rod 16 , visual detection module 17 , movable slide rail member 18 , second retractable connecting member 19 , fixed guide rail 20 , bottom plate 21 , first support rod 22 , micro motor base 23 , micro motor 24 , coupling 25 , bearing 26 , force detection module 27 , first retractable connector 28 .

Detailed ways

The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

Referring to Figures 2 and 3, the micro-nano probe automatic forming device with real-time adjustable force includes a base plate 21, the base plate 21 is fixed on the base platform 1 parallel to the base plate 21 through the first support rod 22, and the base plate 21 is fixed with Actuator and movable probe support mechanism.

The probe support mechanism includes a fixed guide rail 20 fixed on the bottom plate 21 and two movable slide rail pieces 18 slid on the fixed guide rail 20. The movable slide rail pieces 18 are supported by the second support rod 16 and can be replaced. The probe support base 15, the replaceable probe support base 15 provided on the two movable slide rail members 18 jointly supports a probe, and the replaceable probe support base 15 is hinged with a replaceable probe fixing upper cover 14. The replaceable probe fixing upper cover 14 cooperates with the replaceable probe support base 15 to clamp and fix the micro-nano probes of different sizes; a force detection module 27 is arranged above the fixed guide rail 20, and the force detection module 27 The first retractable connecting piece 28 is arranged on the fixed guide rail 20, below the probe.

The actuator includes a disk-shaped circumferential rotation module 4 and a curved actuator 12 fixed at the circumference of the circumferential rotation module 4 , and the curved actuator 12 is fixed on the circumferential rotation module 4 through a first intermediate connecting piece 5 . On the circumference of the curved actuator 12, the curved actuator 12 is in the shape of an arc, and the inner arc of the curved actuator 12 is provided with a replaceable elastic connector 13 and a semicircular connector 11, and one end of the replaceable elastic connector 13 is connected to the curved The top end of the curved actuator 12, the other end is connected to one end of the semicircular connector 11, and the other end of the semicircular connector 11 is hinged to the middle of the curved actuator 12; A force adjustable module 8 is arranged on the back side of the arc, and an electromagnetic forward rotation fastener 9 and an electromagnetic reverse rotation fastener 10 are symmetrically installed at the middle position of the force adjustable module 8 .

A cantilever beam 2 is vertically fixed on the base platform 1 , one end of the adjustable force module 8 is fixed at the connection between the first intermediate connecting piece 5 and the curved actuator 12 , and the other end passes through the second intermediate connecting piece 7 . It is fixed to the top of the cantilever beam 2 , the top and bottom of the cantilever beam 2 are provided with sensors 6 , and the two sensors 6 cooperate to detect the deformation amount of the cantilever beam 2 in real time.

The circumferential rotation module 4 is driven by the micromotor 24 arranged on the bottom plate 21. The circumferential rotation module 4 is coaxially arranged with the micromotor 24, and is connected through the bearing 26 and the coupling 25. The micromotor 24 is connected by the micromotor 24. The motor base 23 is installed on the base plate 21 , the bearing 26 is installed on the base plate 21 through the bearing base 3 , and the rotating shaft of the micromotor 24 is arranged in parallel with the probe.

In the present invention, the base plate 21 is further provided with a visual inspection module 17, which is fixed on the base plate 21 through the second retractable connector 19 to identify the clamping and fixing position and the processing position of the probe.

Based on the above structure, a method for controlling a micro-nano probe automatic forming device with adjustable force in real time is shown in Figure 1, and the specific operation steps are as follows:

1) Use computer to discretize the target shape of the micro-nano probe, and analyze the main characteristic parameters of the target shape of the micro-nano probe;

2) By adjusting the first retractable connector 28 and the second retractable connector 19 respectively, the force detection module 8 and the visual detection module 17 are precisely controlled to rise and fall, thereby determining their appropriate heights L1 and L2;

3) According to the needs of the target shape of the micro-nano probe, automatically adjust the relative position spacing of the two movable slide rail members 18;

4) Place the micro-nano probe on the replaceable probe support base 15, and use the replaceable probe fixing upper cover 14 to clamp and fix the micro-nano probe;

5) Apply different clamping forces by replacing the replaceable elastic connector 13, and use the micromotor 24 to drive the circumferential rotation module 4 to move;

6) Use the visual inspection module 17 to image the probe shape in real time, calculate the actual deviation of the probe shape, automatically control the joint action of the electromagnetic forward rotation fastener 9 and the electromagnetic reverse rotation fastener 10, and dynamically adjust the applied active force to achieve The purpose of real-time adjustment of the force adjustable module 8;

7) Use two sensors 6 to perceive the deformation variables, and dynamically calculate the magnitude of the applied active force;

8) The probe is deformed and moves downward, touches the force detection module 27, and transmits the sensing information to the computer system;

9) When the computer system receives the touch information of the probe perceived by the force detection module 27, the visual detection module 17 is used to obtain the actual shape of the probe in real time, and the template matching method is used to automatically determine the actual shape of the probe and the main characteristic parameters of the target shape. If the matching proximity of the main characteristic parameters is greater than 99.5%, it is determined that the actual shape of the micro-nano probe reaches the forming target, otherwise, the above-mentioned control method of the micro-nano probe automatic forming device with real-time adjustable force is repeated.

Therefore, in combination with the above structures and steps, it can be found that the real-time adjustable force micro-nano probe automatic forming device and control method of the present invention utilizes the automatic linkage control of the electromagnetic forward-rotating fastener and the electromagnetic reverse-rotating fastener to realize Real-time adjustment of the active force applied to the probe; sensors are arranged on the cantilever beam of the device to sense the deformation, so as to dynamically calculate the active force to achieve the purpose of effectively controlling the stiffness of the elastic connector in real time; real-time imaging of the probe through the visual inspection module , the coupling force detection module senses the touch information, so as to realize multi-mode servo feedback, so as to realize the automatic forming and production of micro-nano probes; it has the advantages of automatic forming, real-time adjustable force, simple structure and easy realization.

Claims (9)

1. A micro-nano probe automatic forming device with adjustable force in real time is characterized in that: comprising a base plate, the base plate is fixed on a basic platform parallel to the base plate through a first support rod, and an actuator and a movable A probe support mechanism, the probe support mechanism includes a fixed guide rail fixed on the bottom plate and two movable slide rail pieces slid on the fixed guide rail, the movable slide rail pieces are supported by a second support rod to support the exchangeable probe A needle support base, the exchangeable probe support bases provided on the two movable slide rails jointly support a probe; the actuator includes a disk-shaped circumferential rotation module and a circumferential rotation module fixed at the circumference The curved actuator is fixed on the circumference of the circumferential rotation module through the first intermediate connecting piece, the curved actuator is in the shape of an arc, and the inner arc of the curved actuator is provided with a replaceable elastic connecting piece , the back side of the arc of the curved actuator is provided with a force adjustable module, the inner side of the circular arc of the curved actuator is provided with a semi-circular connector, and one end of the replaceable elastic connector is connected to the curved actuator The top end and the other end are connected to one end of the semicircular connector, and the other end of the semicircular connector is hinged to the middle of the curved actuator; a cantilever beam is vertically fixed on the base platform, and the force can One end of the adjustment module is fixed at the connection between the first intermediate connecting piece and the curved actuator, and the other end is fixed to the top of the cantilever beam through the second intermediate connecting piece; the circumferential rotation module is driven by a micromotor arranged on the bottom plate . 2 . The micro-nano probe automatic forming device with adjustable force in real time according to claim 1 , wherein a force detection module is arranged above the fixed guide rail, and the force detection module is arranged on the fixed guide rail through the first retractable connecting piece. 3 . , below the probe. 3 . The micro-nano probe automatic forming device with adjustable force in real time according to claim 1 , wherein the electromagnetic forward rotation fastener and the electromagnetic reverse rotation fastener are symmetrically installed at the middle position of the force adjustable module. 4 . pieces. 4. The micro-nano probe automatic forming device with adjustable force in real time according to claim 1, wherein the top and bottom of the cantilever beam are provided with sensors, and the two sensors cooperate to detect the shape of the cantilever beam in real time. variable. 5 . The micro-nano probe automatic forming device with adjustable force in real time according to claim 1 , wherein the circumferential rotation module and the micro-motor are axially arranged and connected through a bearing and a shaft coupling. 6 . The micromotor is mounted on the base plate through the micromotor base, and the bearing is mounted on the base plate through the bearing base. 6 . The micro-nano probe automatic forming device with real-time adjustable force according to claim 5 , wherein the rotating shaft of the micro-motor is arranged in parallel with the probe. 7 . 7 . The micro-nano probe automatic forming device with real-time adjustable force according to claim 1 , wherein the replaceable probe fixing upper cover is hinged on the replaceable probe support base. 8 . 8 . The micro-nano probe automatic forming device with adjustable force in real time according to claim 1 , wherein a visual detection module is further provided on the base plate, and the visual detection module is fixed on the base plate through a second retractable connector. 9 . superior. 9. A method for controlling a micro-nano probe automatic forming device with adjustable force in real time, using the real-time adjustable micro-nano probe automatic forming device according to claim 8, characterized in that, comprising the following operation steps: 1) Use computer to discretize the target shape of the micro-nano probe, and analyze the main characteristic parameters of the target shape of the micro-nano probe; 2) By adjusting the first retractable connector and the second retractable connector respectively, accurately control the lifting and lowering of the force detection module and the visual detection module, thereby determining their appropriate heights L1 and L2; 3) According to the needs of the target shape of the micro-nano probe, automatically adjust the relative position spacing of the two movable slide rails; 4) Place the micro-nano probe on the replaceable probe support base, and use the replaceable probe to fix the upper cover to clamp and fix the micro-nano probe; 5) Apply different clamping forces by replacing the replaceable elastic connectors, and use the micromotor to drive the movement of the circumferential rotation module; 6) Use the visual inspection module to image the probe shape in real time, calculate the actual deviation of the probe shape, automatically control the joint action of the electromagnetic forward rotation fastener and the electromagnetic reverse fastener, and dynamically adjust the applied active force, so as to achieve real-time force control. the purpose of tuning; 7) Use two sensors to sense the deformation of the cantilever beam, and dynamically calculate the magnitude of the applied active force; 8) The probe is deformed and moves downward, touches the force detection module, and transmits the sensing information to the computer system; 9) When the computer system receives the touch information of the probe perceived by the force detection module, the visual detection module is used to obtain the actual shape of the probe in real time, and the template matching method is used to automatically determine the match between the actual shape of the probe and the main characteristic parameters of the target shape. Proximity, if the set requirements are met, it is determined that the actual shape of the micro-nano probe reaches the forming target; otherwise, the above-mentioned control method of the micro-nano probe automatic forming device with adjustable force in real time is repeated.

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