CN1597249A - Trifreedom nanometer grade micro allocation working table - Google Patents
Trifreedom nanometer grade micro allocation working table Download PDFInfo
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- CN1597249A CN1597249A CN 200410019986 CN200410019986A CN1597249A CN 1597249 A CN1597249 A CN 1597249A CN 200410019986 CN200410019986 CN 200410019986 CN 200410019986 A CN200410019986 A CN 200410019986A CN 1597249 A CN1597249 A CN 1597249A
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Abstract
A working table with 3 freedoms and microlocation for grinding the workpiece with nano-class precision is composed of 3 piezoelectric ceramic drivers movable axially, 3 elastic hinges with circular recess, a prefastening unit consisting of elastic hinge, elastic prefastening ring and vertical column, movable platform, rigid base, and shift sensors.
Description
Technical field
The present invention relates to a kind of novel numerical control microposition workbench that is used for the flat surface grinding ACTIVE CONTROL.
Background technology
Grinding is a kind of precision machined effective ways, utilizes the accurate grinding process technology can directly reach micron-sized machining accuracy, but desires further to improve the machining accuracy of grinding, then is subjected to the restriction of grinding machine mechanical feed systemic resolution.In addition, coming off of online finishing and gravel will cause emery wheel off-centre in grinding process, and then cause vibration of grinding wheel, thereby make the relative position between emery wheel and the workpiece change, and reduce the surface quality of grinding.Usually the rotating speed of emery wheel up to 3000-5000r/min about, be that the extraneous vibration of 50-84Hz disturbs and carries out dynamic compensation to frequency, the response frequency of its performance element needs higher.Because the feeding quality of feeding grinder system is bigger,, be difficult to online dynamic compensation is carried out in the vibration that emery wheel off-centre causes so its dynamic response frequency is lower.Therefore, a kind of novel microposition workbench with high response speed and precise displacement control of research has important significance for theories and economic worth.It can be used as the auxiliary table of precision machine tool, improves the feed accuracy grade of precision machine tool effectively, realizes fine motion adjustment and compensation to the quiet dynamic machining error of lathe.The technical difficulty of building nano level microposition workbench is how to improve its positioning accuracy, displacement resolution, sound attitude rigidity and response speed, thereby makes it can satisfy the requirement of grinding assist location and dynamic compensation.Proposition of the present invention can make an above-mentioned difficult problem be resolved.
Summary of the invention
The purpose of this invention is to provide the assist location platform of a kind of microposition workbench as precision grinder, combine with the original feed mechanism of lathe, can realize fast big stroke feeding and position adjustment and microfeed and precision positioning and can carry out online dynamic compensation vibration of grinding wheel.
The present invention is achieved by the following technical programs.With reference to accompanying drawing, Three Degree Of Freedom nanoscale microposition workbench mainly is made of moving platform 1, piezoelectric ceramic actuator 2, displacement transducer 3 and base 4.Three piezoelectric ceramics (PZT) drivers 2 that can be subjected to displacement variation vertically uniformly-spaced are connected with base 4 by adjusting pad 11 along circumference, and rigidly fix with bolt, by adjusting the thickness of pad 11, can apply pretightning force to PZT driver 2.Driver top is connected with globe joint 6 by screw thread and globe joint 6 contacts with elastic hinge 7 formation hertz.Three circular groove elastic hinges 7 also are rigidly fixed on the connecting ring 8 in equally spaced mode along circumference, and this arrangement form can provide isotropic lateral rigidity, and can limit the rotation of moving platform around the z axle.Elastic hinge 7, connecting ring 8 and the column 5 formation pre-tightening mechanism that is fixed together, connecting ring 8 is connected with moving platform 1 by bolt.Column 5 is rigidly connected with pre-tightening mechanism and base 4 becomes an overall structure, reduced manufacturing and rigging error, and has limited moving platform along the translational degree of freedom of x, y axle with around the rotational freedom of z axle.Two pole plates of three displacement transducers 3 uniformly-spaced are individually fixed on connecting ring 8 and the base 4 along piezoelectric ceramics (PZT) driver 2 place circumference by fixed support 9,10 separately, and with 60 ° of piezoelectric ceramics (PZT) driver 2 spaces.Three piezoelectric ceramics PZT driver 2 moving platforms 1 that drive in parallel make moving platform have the spatial attitude adjustment capability.
Characteristics of the present invention are, this platform can be used as the assist location platform of precision grinder, combine with the original feed mechanism of lathe, realize fast big stroke feeding and position adjustment and microfeed and precision positioning and can carry out online dynamic compensation the vibration that emery wheel off-centre causes.
Description of drawings
Fig. 1 is the three-dimensional view of Three Degree Of Freedom nanoscale microposition workbench.
Fig. 2 is the three-dimensional view that pre-tightening mechanism and base are connected and are constituted.
Fig. 3 is a control flow chart of the present invention.
Wherein: the 1-moving platform; The 2-piezoelectric ceramic actuator; The 3-displacement transducer; The 4-base; The 5-column; The 6-globe joint; The 7-elastic hinge; The 8-connecting ring; 9,10-fixed support; 11-adjusts pad.
The specific embodiment
The present invention is a kind of microposition workbench.As Fig. 1～shown in Figure 3, for present embodiment, workbench is of a size of Φ 150 * 145mm
3, the parameter of piezoelectric ceramics (PZT) driver is: maximum thrust 3000N, and axial rigidity 400N/ μ m, the parameter of three High precision capacitance displacement sensor is: range of dynamic measurement is 0-10KHz, and range is 50 μ m, and resolution ratio is 1nm.For ease of being installed of workpiece, it is 12.5 * 12.5mm that the moving platform upper surface has pitch-row
2The M2 screwed hole.There are 6 equally spaced screwed holes to be used for being connected by bolt on the circumference of moving platform lower surface Φ 120mm with connecting ring.Connecting ring is a hollow cylinder, and its interior external diameter is respectively Φ 100mm and Φ 150mm thickness is 10mm.In order to improve kinematic accuracy, three elastic hinges 7 constitute pretension and guiding mechanism by connecting ring 8, have promptly adopted pretension and the guiding mechanism of the elastic hinge of circular groove as the microposition workbench.One end of circular groove elastic hinge 7 is fixed on the connecting ring, and the other end directly links to each other with column, and three elastic hinges are along circumferentially uniformly-spaced arranging.The center of rotation of three elastic hinges lay respectively at 15mm place under the connecting ring and and the circumference of Φ 72mm tangent.Utilize bolt that the bottom of PZT driver is connected with base by pad, the top of PZT driver is connected with the hertz way of contact by an end of globe joint and elastic hinge.Be to be a hertz contact between piezoelectric ceramics (PZT) driver 2 and the moving platform 1.Utilize the pad between PZT driver and the base can adjust the pretension link applies pretightning force to the PZT driver size.Suitable pretightning force can prevent in the fast separation between moving platform and the globe joint in the process of elongation of PZT driver.In order to overcome the non-linear influence of PZT,, the actual output displacement of adopting three High precision capacitance displacement sensor directly to measure moving platform controls thereby forming the full cut-off ring to the microposition performance characteristic.The target pole plate of capacitance type sensor and measuring pad are separately fixed on the support 9,10, and the distance between the two-plate is 50 μ m.Support 9,10 is connected with base with connecting ring 8 by bolt respectively, and and the PZT driver be spaced apart 60 °.The arrangement of this kind capacitive displacement transducer can directly be measured the actual output of moving platform, thereby can form the control of full cut-off ring.
Be used to provide the flexible needed electric current of PZT driver by computer-controlled triple channel voltage amplifier.(as shown in Figure 3) numerical value measured of three capacitive displacement transducers is transported to computer by 16 capture card.The numerical computations of measuring by capacitive displacement transducer go out the physical location of moving platform and attitude and with theoretical numerical value contrast, utilize the digital PID control algolithm of establishment to obtain the size of the needed compensation rate of each PZT driver, and then can realize adjustment by 16 digital to analog converter to the moving platform attitude.The coordinated movement of various economic factors of three PZT drivers can realize that moving platform is along the rotation of two trunnion axis and the platform of a vertical axis.
The present invention has quiet dynamic rate height, positioning accuracy height, control is flexible and have the attitude adjustment capability.Can be used for the auxiliary precision positioning and the vibration dynamic compensation of grinding, also can be used for the measurement of optics.
Claims (5)
1. Three Degree Of Freedom nanoscale microposition workbench, mainly by moving platform (1), piezoelectric ceramic actuator (2), capacitive displacement transducer (3) and base (4) constitute, it is characterized in that three piezoelectric ceramics (PZT) drivers (2) uniformly-spaced rigidly fix with base (4) by adjusting pad (11) along circumference, each driver (2) top is connected with globe joint (6) by screw thread and globe joint (6) contacts with elastic hinge (7) formation hertz, three circular groove elastic hinges (7) also are rigidly fixed on the connecting ring (8) in equally spaced mode along circumference, elastic hinge (7), connecting ring (8) and column (5) the formation pre-tightening mechanism that is fixed together, connecting ring (8) is connected with moving platform (1) by bolt, column (5) and base (4) are rigidly connected and become an overall structure, two pole plates of three capacitive displacement transducers (3) pass through fixed support (9 separately, 10) uniformly-spaced be individually fixed on connecting ring (8) and the base (4) along piezoelectric ceramics (PZT) driver (2) place circumference, and with 60 ° of piezoelectric ceramics (PZT) driver (2) spaces.
2. according to the described Three Degree Of Freedom nanoscale of claim 1 microposition workbench, it is characterized in that described three piezoelectric ceramics (PZT) drivers (2) moving platform (1) that drives in parallel.
3. according to the described Three Degree Of Freedom nanoscale of claim 1 microposition workbench, three capacitive displacement transducers (3) shown in it is characterized in that are directly measured the output displacement of moving platform (1).
4. according to the described Three Degree Of Freedom nanoscale of claim 1 microposition workbench, it is characterized in that being between described piezoelectric ceramics (PZT) driver (2) and the moving platform (1) a hertz contact.
5. according to the described Three Degree Of Freedom nanoscale of claim 1 microposition workbench, three elastic hinges (7) shown in it is characterized in that constitute pretension and guiding mechanism by connecting ring (8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410019986 CN1597249A (en) | 2004-07-15 | 2004-07-15 | Trifreedom nanometer grade micro allocation working table |
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| CN 200410019986 CN1597249A (en) | 2004-07-15 | 2004-07-15 | Trifreedom nanometer grade micro allocation working table |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101290808B (en) * | 2008-06-06 | 2010-04-14 | 华中科技大学 | 3 freedom degrees ultra-precise micro displacement workbench |
| CN1962209B (en) * | 2006-12-08 | 2010-05-19 | 哈尔滨工业大学 | Three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism |
| CN101750885B (en) * | 2010-01-06 | 2011-12-14 | 天津大学 | Two-degree of freedom precise positioning work table |
| CN102275231A (en) * | 2011-07-25 | 2011-12-14 | 东北大学 | Three-dimensional ultrasonic vibration machining working head |
| CN101710229B (en) * | 2009-12-07 | 2011-12-28 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN101770166B (en) * | 2010-01-06 | 2011-12-28 | 天津大学 | Two-translational-motion precision positioning working table for nano-imprint photoetching system |
| CN101726997B (en) * | 2009-12-11 | 2011-12-28 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN102490106A (en) * | 2011-12-15 | 2012-06-13 | 扬州恒德模具有限公司 | Workbench |
| CN102998899A (en) * | 2012-12-05 | 2013-03-27 | 天津大学 | Two-degree-of-freedom nanometer positioning platform |
| CN107378525A (en) * | 2017-08-10 | 2017-11-24 | 南通第五机床有限公司 | NC vertical milling machine workbench |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN109940566A (en) * | 2019-03-25 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement drive and its control method |
| CN110246537A (en) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | Transmission mechanism for space three-freedom nanopositioning stage |
-
2004
- 2004-07-15 CN CN 200410019986 patent/CN1597249A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1962209B (en) * | 2006-12-08 | 2010-05-19 | 哈尔滨工业大学 | Three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism |
| CN101290808B (en) * | 2008-06-06 | 2010-04-14 | 华中科技大学 | 3 freedom degrees ultra-precise micro displacement workbench |
| CN101710229B (en) * | 2009-12-07 | 2011-12-28 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN101726997B (en) * | 2009-12-11 | 2011-12-28 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN101750885B (en) * | 2010-01-06 | 2011-12-14 | 天津大学 | Two-degree of freedom precise positioning work table |
| CN101770166B (en) * | 2010-01-06 | 2011-12-28 | 天津大学 | Two-translational-motion precision positioning working table for nano-imprint photoetching system |
| CN102275231B (en) * | 2011-07-25 | 2014-07-09 | 东北大学 | Three-dimensional ultrasonic vibration machining working head |
| CN102275231A (en) * | 2011-07-25 | 2011-12-14 | 东北大学 | Three-dimensional ultrasonic vibration machining working head |
| CN102490106A (en) * | 2011-12-15 | 2012-06-13 | 扬州恒德模具有限公司 | Workbench |
| CN102998899A (en) * | 2012-12-05 | 2013-03-27 | 天津大学 | Two-degree-of-freedom nanometer positioning platform |
| CN102998899B (en) * | 2012-12-05 | 2014-09-17 | 天津大学 | Two-degree-of-freedom nanometer positioning platform |
| CN107378525A (en) * | 2017-08-10 | 2017-11-24 | 南通第五机床有限公司 | NC vertical milling machine workbench |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN109940566A (en) * | 2019-03-25 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement drive and its control method |
| CN109940566B (en) * | 2019-03-25 | 2022-04-05 | 中国科学院长春光学精密机械与物理研究所 | Planar linear displacement driving device and control method thereof |
| CN110246537A (en) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | Transmission mechanism for space three-freedom nanopositioning stage |
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