KR20080009692A - Scribe device - Google Patents

Abstract

A scribe device for scribing a line on work, where a coarse movement mechanism and a fine movement mechanism are successfully combined to enable a cutter to be accurately stopped at a zero point position. The scribe device has a base (3) movable in parallel to the surface of work, a movement base (4) lifted and lowered relative to the base (3), a head (6) having, provided at its lower end, a cutter (2) for scribing a line on the work and lifted and lowered with the movement base (4), first linear movement guides (8, 9) for guiding the movement base (4) to be lifted and lowered, and second linear movement guides (8, 10) for guiding the head (6) to be lifted and lowered. In the lowering of the movement base (4) and the head (6), slight lowering of the movement base (4) is allowed even if the cutter (2) comes in contact with the work (1) to stop the lowering of the head (6).

Description

Scribe device {SCRIBE DEVICE}

TECHNICAL FIELD This invention relates to the scribe apparatus which inscribes a scribe line to the workpiece | work which consists of brittle materials, such as glass and a semiconductor.

As a method for cutting a workpiece made of brittle material, for example, a dicing method for feeding into a rotary blade and cutting into a dice shape, or a scribe line inscribed in a dice shape with a cutter on the surface of the workpiece, and then along the scribe line The scribe and brake method of cutting a workpiece | work by applying a bending load to it is known.

As a scribing apparatus for carving a scribe line on a work, a scribe device that presses a rotatable cutter in the form of an abacus ball onto the work, rolls the cutter while pressing the work with the cutter, and inscribes a scribe line on the work surface (for example, a patent document) 1) or a scribing apparatus (see Patent Document 2, for example), in which a cutter is moved while applying a vibration to the cutter to engrave a scribe line on a workpiece surface.

Patent Document 1: Japanese Patent Laid-Open No. 2003-212578

Patent Document 2: Japanese Patent Application Laid-Open No. 10-101967

In any scribe device, it is necessary to lower the cutter and load it on the surface of the workpiece before the scribe line is inscribed on the workpiece surface by the cutter.

However, it is difficult to detect the state where the cutter is in contact with the surface of the workpiece (so-called zero point position) during the lowering of the cutter, and to stop the lowering of the cutter at the zero point position only by the coarse motion mechanism that determines the approximate height of the cutter. Entails. It is therefore an object of the present invention to provide a scribing apparatus capable of accurately stopping a cutter at a zero point position by combining a coarse motion mechanism and a fine movement mechanism.

Further, when the first and second linear motion guides are provided in each of the coarse motion mechanism and the fine motion mechanism, the number of parts also increases, and the scribe device also tends to be large in size. Accordingly, another object of the present invention is to provide a scribing apparatus capable of making the entire apparatus compact.

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated. In addition, in order to make understanding of this invention easy, the reference number of an accompanying drawing is attached | subjected by parenthesis, However, this invention is not limited to the form of illustration by this.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, invention of Claim 1 is a scribe apparatus which inscribes a scribe line to the workpiece | work 1, and is movable to the base 3 and the said base 3 which are movable parallel to the surface of the workpiece | work 1; A moving table 4 which rises and falls relative to the moving table, and a cutter 6 for engraving a scribe line on the work 1 at a lower end thereof, and a head 6 which rises and descends together with the moving table 4; And first linear motion guides 8 and 9 for guiding the movable table 4 to rise and fall, and second linear motion guides 8 and 10 for guiding the head 6 to rise and fall. And the cutter 2 contacts the workpiece 1 while the lowering of the head 6 stops while the movable table 4 and the head 6 are lowered. Is allowed to descend slightly.

Invention of Claim 2 is a scribe apparatus which inscribes a scribe line to the workpiece | work 1, The base 3 which can move parallel to the surface of the workpiece | work 1, and the movable stand which raises and falls with respect to the said base 3 are made. (4) and a cutter (2) for engraving a scribe line on the work (1) at the lower end, and the head (6) which rises and falls with the movable table (4), and the base (3) The common track rail 8 provided, the 1st moving block 9 which is slidably arrange | positioned at the said common track rail 8, and guides that the said movable stand 4 raises and falls, and the said common track It is slidably arranged in the rail 8, and has the 2nd moving block 10 which guides that the said head 6 raises and falls, and during the lowering of the said movable stand 4 and the said head 6, Even if the cutter 2 contacts the workpiece 1 and the lowering of the head 6 stops, the movable table 4 It characterized in that it allows the fall between.

In the invention according to claim 3, in the scribing apparatus according to claim 2, the head 6 holds the head main body 18 attached to the second moving block 10 and the cutter 2. Having a holder 30 and an actuator 28 received in the head body 18 and oscillating the holder 30, the scribe device is also slidably disposed on the common track rail 8. And a third moving block 11 for guiding the vibration of the holder 30.

In the invention according to claim 4, in the scribe device according to claim 2 or 3, the scribe device further includes an air cylinder 21 for adjusting the pressure applied from the cutter 2 to the workpiece 1. And a cylinder body 21a of the air cylinder 21 is mounted on the movable table 4, and a rod 21b extending and contracted from the cylinder body 21a is connected to the head 6. do.

In the invention according to claim 5, in the scribe device according to any one of claims 2 to 4, the scribe device is further interposed between the movable table 4 and the head 6, and the head 6 Spring (27) for reducing the weight of the () is characterized in that it is provided.

According to the invention described in claim 1, the head descending toward the work can be accurately stopped at the position where the cutter contacts the work (zero point position).

According to the invention as set forth in claim 2, since the first moving block for guiding the moving up and down and the second moving block for guiding the moving up and down of the head are arranged on the common track rail, the device can be compactly installed. can do. In addition, the number of parts can be reduced.

According to the invention of claim 3, since the third moving block for guiding the vibration of the holder is also disposed on the common track rail, the device can be made more compact and the number of parts can be reduced.

According to the invention described in claim 4, the pressure applied to the work from the cutter can be controlled by adjusting the air pressure applied to the air cylinder.

According to invention of Claim 5, the self-weight of a head can be reduced in the pressure applied to the said workpiece from a cutter.

1 is a side view (including some cross-sectional views) of a scribing apparatus according to an embodiment of the present invention.

2 is a front view of the scribe device.

3 is a side view showing a spring spanned between the movable table and the head;

4 is a front view of the linear motion guide.

5 is a side view of the linear motion guide.

[Description of the code]

1: walk

2: cutter

3: base

4: moving table

6: head

8: common track rail

9, 10, 11: moving block

8, 9: first linear motion guide

8, 10: 2nd linear motion guide

18: head body

21: air cylinder

21a: cylinder body

21b: load

27: spring

28: Actuator

30: Holder

EMBODIMENT OF THE INVENTION Hereinafter, based on an accompanying drawing, the scribe apparatus in one Embodiment of this invention is demonstrated based on an accompanying drawing. In each figure, the same machine element is attached | subjected with the same code | symbol.

1 shows a side view of the scribe device, and FIG. 2 shows a front view of the scribe device. A scribing apparatus is an apparatus for inscribe | scribing a scribe line on the surface of the thin-shaped workpiece | work which consists of brittle materials, such as glass, a semiconductor, and ceramics. The workpiece 1 is fixed to the upper surface of the work table 7 of the scribe device by vacuum suction or a jig. When the cutter 2 is pressed against the surface of the workpiece 1 and the cutter 2 is moved horizontally along the surface of the workpiece 1, a scribe line is engraved on the surface of the workpiece 1. In the scribe line, vertical cracks formed in the surface layer of the work 1 propagate along the surface of the work 1.

There are two types of scribing apparatus, which are largely divided so as not to vibrate the cutter and a type that vibrates the cutter. In the following embodiment, although the scribing apparatus of the type which vibrates a cutter is demonstrated, of course, this invention can be applied also to the scribing apparatus of the type which does not vibrate a cutter.

The scribing apparatus includes a base 3 that moves in the horizontal direction (XY axis direction) parallel to the work 1, a moving table 4 that moves up and down in the Z-axis direction with respect to the base 3, and a moving table. Together with (4), the head 6 which rises and falls in the Z-axis direction is provided. At the lower end of the head 6, a wheel-shaped or diamond-shaped cutter 2 is provided. As the cutter 2, for example, a wheel tool formed in the shape of an abacus, or a diamond tool formed in a shape such as a square weight, a triangular weight, or a flattened tip portion of the triangular weight is used. For example, when the work 1 is a semiconductor wafer, a diamond tool is used, and when the work 1 is glass, a wheel tool formed in the shape of an abacus ball is used.

The base 3 is coupled to the XY axis table 5. The XY axis table 5 is moved to a horizontal direction by the XY axis moving mechanism which is not shown in figure. The XY axis moving mechanism has a motor / ball screw mechanism and a linear motor as a drive source, and has an XY axis linear motion guide 12 for guiding the XY axis table 5 to slide. When the X-axis or Y-axis movement mechanism is provided on the work table 7 side, either the X-axis or the Y-axis movement mechanism may be on the XY-axis table 5 side. By moving the XY axis table 5 in the horizontal direction parallel to the work table 7, a scribe line extending in the horizontal direction on the surface of the work 1 can be engraved.

The base 3 is provided with a moving table 4 that moves up and down in the Z-axis direction. The base 3 is equipped with a common track rail 8 extending in the Z-axis direction. The first moving block 9 is slidably arranged on the common track rail 8. The moving table 4 is mounted to the first moving block 9. The first linear motion guide composed of these common track rails 8 and the first moving blocks 9 guides the slide 4 in the Z-axis direction with respect to the base 3.

The moving table 4 is connected to the Z-axis moving mechanism 16 including the Z-axis motor 13 and the ball screw mechanisms 14 and 15, and is driven in the Z-axis direction. When the Z-axis motor 13 is driven to rotate, the screw shaft 14 rotates, and the nut 15 screwed to the screw shaft 14 and the moving table 4 coupled to the nut 15 are screw shafts ( Move in the axial direction of 14).

In addition, the base 6 is slidably provided with a head 6 that moves up and down in the Z-axis direction together with the movable table 4. The second moving block 10 is slidably arranged on the common track rail 8. The head 6 (exactly the head main body 18) is attached to the 2nd moving block 10. As shown in FIG. The second linear motion guide composed of these common track rails 8 and the second moving block 10 guides the slide of the head 6 in the Z-axis direction with respect to the base 3. The structure of the head 6 is mentioned later.

The cylindrical cylinder main body 21a of the air cylinder 21 is attached to the movable table 4 by mounting the rod 21b toward the Z-axis direction. The Z pressing shaft 23 is attached to the tip of the rod 21b of the air cylinder 21 via a sensor such as a load cell or a switch 22 such as a contact switch. The Z pressing shaft 23 penetrates the back plate 24 fixed to the movable table 4. When the rod 21b extends from the cylinder body 21a by a predetermined amount or more, the large diameter portion 23a of the upper portion of the Z pressing shaft 23 contacts the upper surface of the mounting plate 24, and the rod 21b extends. The amount is limited. In the second moving block 10, a bracket 25 is mounted on the upper portion of the second moving block 10 together with the head main body 18, and the Z pressing shaft 23 is connected to the bracket 25. The rod 21b of the air cylinder 21 is connected to the head main body 18 by the above.

When the air cylinder 21 is operated in a state in which the cutter 2 is in contact with the work 1, pressure is applied from the cutter 2 to the work 1. This pressure is kept constant while carving the scribe wire. The electropneumatic regulator connected to the air cylinder 21 is electrically operated by a program to control the air pressure supplied from the electropneumatic regulator to the air cylinder, and further, the pressure applied to the work 1 from the cutter 2. To control.

As shown in Fig. 3, a tension coil spring 27 as a spring is interposed between the movable table 4 and the bracket 25. As shown in FIG. The tension force of the spring 27 acts to lift the magnetic weight of the head 6, thereby reducing the magnetic weight of the head 6 in the pressure applied from the cutter 2 to the work 1.

As shown in Figs. 1 and 2, an actuator 28 for generating vibration is provided in the box-shaped head main body 18. As the actuator 28, for example, a piezoelectric element (piezo actuator) which generates distortion when an external electric field is applied is used. When the voltage applied to the piezoelectric element is changed at a predetermined frequency, the piezoelectric element is stretched periodically. When the magnetic field is applied as the actuator 28, a magnetic material such as a supermagnetism element that causes distortion in the magnetic body may be used. When the magnetic field applied to the supermagnetism element is changed at a predetermined frequency, the supermagnetism element is periodically stretched.

The actuator 28 is sandwiched between the pair of actuator guides 29a and 29b in the vertical direction. The upper actuator guide 29a is mounted on the second moving block 10, and the lower actuator guide 29b is mounted on the third moving block 11. This third moving block 11 is slidably arranged on the common track rail 8. The holder 30 which holds the cutter 2 is attached to the 3rd moving block 11.

A third linear motion guide composed of these common track rails 8 and the third moving block 11 guides the holder 30 oscillating in the Z-axis direction. When the air cylinder 21 is operated, the position of the head main body 18 side becomes difficult to change. For this reason, when the actuator 28 is expanded and contracted, the holder 30 side vibrates instead of the head main body 18 side. The third guide guides the vibration in the Z axis direction of the holder 30.

The actuator 28 which vibrates the cutter 2 expands and contracts in the Z-axis direction, but expands and contracts not only in the Z-axis direction but also in the XY-axis direction. When the cutter 2 vibrates in the XY axis direction, the scribe line formed on the work 1 is adversely affected. In order to correct the vibration of the actuator 28 in the Z-axis direction, the third moving block 11 guides the oscillation of the holder 30 in the Z-axis direction.

Between the lower actuator guide 29b and the head main body 18, the plate-shaped leaf spring 31 which presses the actuator guide 29b to the actuator 28 is provided. When the screw 32 which is screwed to the lower part of the head main body 18 is rotated, and the said screw 32 is moved up and down, the amount of bending of the leaf spring 31 is adjusted. Thereby, the pressure (that is, preload) which clamps the actuator 28 between a pair of actuator guides 29a and 29b is adjusted. By applying a preload to the actuator 28, the vibration of the holder 30 can be followed to the expansion and contraction of the actuator 28.

4 and 5 show a linear motion guide composed of a common track rail 8 and first to third moving blocks 9, 10, 11. 4 shows a front view of the linear motion guide, and FIG. 5 shows a side view of the linear motion guide. The moving blocks 9, 10 and 11 are slidably assembled and attached to the common track rail 8 via balls as a plurality of rolling bodies. A roller may be used instead of a ball as a rolling vehicle.

The common track rail 8 extends thin and long in a square shape with a flat cross section. A plurality of ball rolling running grooves 8a extending along the longitudinal direction are formed at the left and right edges and the left and right side surfaces of the upper surface of the common track rail 8.

The moving blocks 9, 10, and 11 are formed in a saddle shape, and extend downward from both left and right sides of the center portion 31 facing the upper surface of the common track rail 8 and the common track rail 8. Side walls 32 are disposed opposite to the left and right sides of the < RTI ID = 0.0 > A plurality of load ball rollings opposed to the ball rolling running grooves 8a of the common track rail 8 are located inside the bottom surface and the side wall portion 32 of the central portion 31 of the moving blocks 9, 10, 11. The groove 31a is formed.

A plurality of balls are arranged between the ball rolling groove 8a and the load ball rolling groove 31a. When the movement blocks 9, 10, and 11 slide with respect to the common track rail 8, a plurality of balls receive rolling loads between the ball rolling groove 8a and the load ball rolling groove 31a. do.

The ball rolled to one end of the load ball rolling groove 31a of the moving blocks 9, 10, 11 passes through the U-shaped direction change path in the end plate 33, and then the load ball rolling groove ( Enter the no-load ball return passage extending parallel to 31a). The ball passing through the no-load ball return passage enters the load ball rolling groove 31a again after passing through the redirection path of the end plate 33 on the opposite side. A circuit-shaped ball circulation path is formed by these load ball rolling travel grooves 31a, the direction change path, and the no-load ball return passage.

In addition to the above-described LM guide (THK Corporation registered trademark), a ball spline, a ball bush, a sliding bearing, etc. can be used for the linear motion guide.

Next, the usage method of the scribe device of this embodiment is demonstrated based on FIG. First, the work 1 is set on the upper surface of the work table 7 of the scribe device. Next, the head 6 is moved above the workpiece 1 by the XY axis moving mechanism. Next, the Z-axis motor 13 is driven to rotate to lower the movable table 4 and the head 6 toward the work. The rotation angle of the Z-axis motor 13 is measured by the encoder 36 so that the lowering amounts of the movable table 4 and the head 6 can be controlled.

When the head 6 descends and the cutter 2 at the lower end of the head 6 contacts the workpiece 1, the head 6 stops without lowering any more. Nevertheless, since the Z-axis motor 13 does not stop the rotation and wants to lower the movable table 4 further, the movable table 4 lowers slightly to approach the head 6. Between the back plate 24 and the bracket 25, a gap for the movable table 4 to approach the head 6 is created. The sensor or switch 22 detects that the moving table 4 has approached the head 6 and sends a signal to the control device. When the signal from the switch 22 is received, the control device stops the rotational drive of the Z-axis motor 13 and stores that the position of the cutter 2 at that time is the zero point position.

The operator inputs the cutting depth, the cutting pressure, and the trajectory of the cutter in the horizontal direction to the control device. According to the set cutting pressure, the electro-pneumatic regulator supplies air to the air cylinder 21. After seeing the situation of the test cut, the operator may set the infeed pressure again.

When the depth of cut is set, the Z-axis motor 13 further rotates by the depth of cut, so that the movable table 4 approaches the head 6 by the depth of cut. When the air cylinder 21 is operated in this state, the cutter 2 enters into the work 1 by the depth of cut.

The pressure applied from the cutter 2 to the work 1 is measured in a load cell provided at a position spaced apart from the work 1 in the horizontal direction. After moving the cutter 2 on the load cell, the cutter 2 is brought into contact with the load cell, and the pressure applied to the tip of the cutter 2 in the load cell is measured. If the load cell is used instead of the switch 22 provided at the tip of the rod 21b, the load cell detects the zero point and the cutter 2 measures the pressure applied to the work 1. Can be combined.

When the setting of the cutting depth, the cutting pressure, and the trajectory of the cutter in the horizontal direction is finished, the cutter 2 actually starts carving the scribe line into the work 1. The engraving of the scribe line moves the cutter 2 to a position shifted from the workpiece 1 in the horizontal direction, and then moves the cutter 2 toward the workpiece 1 to move the cutter 2 to the workpiece 1. ), The scribe line is carved from the end of the work 1, the cutter 2 is brought into direct contact with the surface of the work 1, and the cutter 2 is moved horizontally from the position to There is a way to carve. In the former engraving method, the value before mounting and the value after mounting are set to the cutting depth. When the cutter 2 outside the horizontal direction of the workpiece 1 is moving toward the workpiece 1, the depth of cut before placing is set, and the cutter 2 moves in a state of being lifted from the table 7. . When the cutter 2 is placed on the work 1, the cutting depth after the mounting is set, and the cutter 2 is bited into the work 1 by a predetermined cutting depth. When the cutter 2 is moved along the surface of the work 1 while periodically applying a high frequency electric field or the like to the actuator 28, a scribe line through which vertical cracks propagate is engraved on the surface layer of the work 1. In the latter engraving method, only the value after the cutting depth is set. Then, the cutter 2 is fed into the work 1 by a predetermined cutting depth, and the cutter 2 is moved along the surface of the work 1 while periodically applying a high frequency electric field to the actuator 28 and vibrating periodically. .

When the processing is finished, the Z-axis motor 13 raises the movable table 4 and the head 6. The rising height of the head 6 is determined by the position sensor 37. The work 1 inscribed with the scribe line is removed from the work table 7 and cut along the scribe line by a breaker (not shown). When cutting a thin workpiece | work, since the vertical crack which reaches | attains the back surface of a workpiece | work may be formed only by engraving a scribe line on the surface of a workpiece | work, this brake process may be skipped.

In the cutting of a semiconductor wafer by a conventional dicing cutter, when cutting a semiconductor wafer in a dice shape with a rotary blade, there existed a problem that heat generate | occur | produces in a semiconductor wafer or a fine powder generate | occur | produces by volume removal. As in the present embodiment, if a scribe line is cut and then a method of cutting is employed, no heat is generated and no fine powder is generated. Moreover, since heat does not generate | occur | produce, processing in a dry state is also possible without using a cooling liquid.

In addition, this invention is not limited to the said embodiment, It can implement in various embodiment, without changing the summary. For example, the common track rail 8 may be divided in the longitudinal direction, and first to third track rails may be provided corresponding to each of the first to third moving blocks. In addition, instead of the third moving block 11, the holder 30 may be guided by the ball spline. In this case, the holder 30 is formed in an axial shape. In the scribing apparatus of the type which does not vibrate the cutter 2, of course, the third moving block 11 becomes unnecessary. In the case where a plurality of scribe lines are simultaneously formed, a plurality of heads may be provided in one scribe device.

This specification is based on the JP Patent application 2005-084998 of the March 23, 2005 application. All of this is included here.

Claims (5)

It is a scribe device to scribe a scribe line on the work, A base movable in parallel to the surface of the workpiece, A moving table that rises and falls relative to the base, A head which is provided at the lower end with a cutter for carving a scribe line on the work, and which rises and falls with the movable table; A first linear motion guide for guiding the movable platform to move up and down, And a second linear motion guide for guiding the head to rise and fall, The scribing apparatus of the said movable stand and the head which allows the said movable stand to fall slightly even if the said cutter contact | connects the said workpiece and the lowering of the said head stops. It is a scribe device to scribe a scribe line on the work, A base movable in parallel to the surface of the workpiece, A moving table that rises and falls relative to the base, A head which is provided at the lower end with a cutter for carving a scribe line on the work, and which rises and falls with the movable table; A common track rail installed on the base, A first movable block slidably disposed on the common track rail and guiding the moving table to move up and down; A second movable block slidably disposed on the common track rail and guiding the head to move up and down, The scribing apparatus of the said movable stand and the head which allows the said movable stand to fall slightly even if the said cutter contact | connects the said workpiece and the lowering of the said head stops. The method of claim 2, wherein the head, A head body mounted to the second moving block; A holder for holding the cutter; Has an actuator accommodated in the head body and vibrating the holder, The scribe device also, And a third moving block slidably disposed on the common track rail and guiding vibration of the holder. The scribe device according to claim 2 or 3, further comprising: An air cylinder for adjusting a pressure applied to the work from the cutter, The cylinder body of the air cylinder is mounted on the movable table, And a rod extending and contracted from the cylinder body to the head. The scribe device according to any one of claims 2 to 4, further comprising: A scribing apparatus, comprising: a spring spanning between the movable table and the head to reduce the weight of the head.

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