JPH11263631A - Scribing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing device capable of freely forming scribing lines of various shapes on a work consisting of a hard and brittle material. SOLUTION: An X-Y stage 30 is provided with a scribing head 40. The scribing head 40 has a sharply pointed cutter 43 (contact member), a holder 42 for holding the cutter 43 and a body 41 for slightly slidably supporting the holder 42. A vibration actuator 44 is interposed between a receiving part 42d of the holder 42 and a receiving part 41a of the body 41. The cutter 3 is pressed to sheet glass 100 (work) by the weights of the body 41 and the holder 42. The cutter 43 is moved by driving the X-Y stage 30 while high-frequency oscillation energy of the vibration actuator 44 is imparted thereon, by which the scribing lines of the various shapes are formed on the sheet glass 100 (work).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing apparatus for forming a score line on a work surface of a hard brittle material such as a sheet glass.

[0002]

2. Description of the Related Art Generally, when a work such as a sheet glass is broken, a cut line is formed on the surface of the work in advance, and the work is broken along the cut line. A conventional scribing device used for forming the scored line has a disk-shaped cutter having a sharp peripheral edge, a holder for rotatably supporting the cutter, and pressing the cutter against the surface of a sheet glass (work) via the holder. In addition, a pressing and moving mechanism for moving along the surface of the sheet glass is provided. As described above, the cutter is moved while being pressed against the sheet glass with a predetermined pressing force, thereby forming a linearly extending score line on the sheet glass.

[0003]

In the above-mentioned conventional apparatus,
It is difficult to obtain a product having a complicated contour by drawing a score line of a more complicated shape because the score line can be drawn only linearly. In addition, since the cutter is pressed against the work surface with a large pressing force, not only vertical cracks required for forming the score lines but also cracks occur in the horizontal direction, so that a clear score line cannot be drawn.

[0004]

In order to solve the above-mentioned problems, the invention according to claim 1 comprises (a) a table on which a work is placed, and (b) a contact member which comes into contact with a surface of the placed work. A scribe head having pressing and vibration applying means for applying high-frequency vibration in a direction intersecting the work surface while pressing the contact member against the work surface to generate cracks in the work; Moving means for relatively moving along the work surface,
The moving means includes a base, a first moving body supported on the base so as to be movable in an X-axis direction parallel to the work surface, and a movable body in a Y-axis direction parallel to the work surface and orthogonal to the X axis. A second moving body supported by the first moving body, first and second driving mechanisms for respectively moving the first and second moving bodies, and control means for controlling the first and second driving mechanisms. Wherein the scribe head or the work setting table is provided on the second moving body.

According to a second aspect of the present invention, in the scribe apparatus according to the first aspect, the scribe head is provided on a second movable body of the moving means, and the work setting table is provided on a rotating means. It is characterized by.

According to a third aspect of the present invention, in the scribe device according to the first aspect, the scribe head comprises: (i)
A contact member having a pointed tip, the tip of which abuts against a work surface; and (ii) a holder for holding the contact member.
(Iii) a body that supports the holder so as to be able to reciprocate minutely in a direction intersecting with the work surface; and (iv) a body that is sandwiched between a receiving portion of the body and a receiving portion of the holder, and the holder holds the high-frequency vibration. And (v) an elastic member for urging the receiving portion of the holder toward the vibration actuator, wherein the body is a second moving body or a moving member of the moving means via a slide support mechanism. By being slidably attached to the fixed structure in the vertical direction, the weight of the body and the holder acts on the contact member,
The contact member is pressed against the work surface, and the pressing and vibration applying means includes the body, the holder, and the vibration actuator.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 1 to 3, the scribing device includes a rotation mechanism 10 (rotation means) provided on the base frame 1, a table 20 provided on the rotation mechanism 10, and a rotation mechanism 10 on the base frame 1. An XY stage 30 (moving means) provided laterally, and a scribe head 40 provided on the XY stage 30 are provided.

The table 20 is for placing the work 100 horizontally. More specifically, as shown in FIG. 3, two positioning steps 21 that extend linearly and are orthogonal to each other are formed on the upper surface of the table 20. The work 100 has a rectangular shape, for example, and is placed on the upper surface of the table 20 in a state where two sides thereof are positioned with the positioning step 21 being positioned. A plurality of suction holes 22 are formed on the upper surface of the table 20, and when performing a scribe described later, the work 100 is sucked by driving a vacuum mechanism (not shown) connected to these suction holes 22. Then, the workpiece 100 is held in the above-described positioning state. The table 20 is horizontally rotated by the rotation mechanism 10.

As shown in FIGS. 1 and 3, the XY stage 30 includes a base 31, a first movable body 32, and a second movable body 3.
3 is provided. Two rails 34 extending in the horizontal X-axis direction are provided on the upper surface of the base 31, and the first moving body 32 is slidably supported along the rails 34. Two rails 35 extending in the Y-axis direction are also provided on the upper surface of the first moving body 32.
The second moving body 33 is slidably supported along. The Y axis is horizontal and orthogonal to the X axis.

As shown in FIG. 3, the first moving body 32
Are moved in the X-axis direction by the first drive mechanism 36. The first drive mechanism 36 includes a screw rod 36a extending in the X-axis direction, a stepping motor 36b connected to one end of the screw rod 36a, a bearing 36c rotatably supporting the other end of the screw rod 36a, 1
A screw member 36d fixed to the lower surface of the moving body 32 and screwed to the screw rod 36a. When the stepping motor 36b is driven, the screw rod 36a rotates, and the first moving body 32 moves in the X-axis direction through the screwing action of the screw rod 36a and the screw member 36d. The second moving body 33 is configured to move in the Y-axis direction by a second driving mechanism 37. This second drive mechanism 37
Is, like the first drive mechanism 36, a screw rod 37a,
It includes a stepping motor 37b, a bearing 37c, and a screwing member 37d.

The second moving body 33 includes a bracket 39.
Is attached. The scribe head 40 is attached to the bracket 39 via a slide mechanism 50.

The slide mechanism 50 includes a mounting plate 51 fixed vertically to the bracket 39,
And a vertically extending guide 52 fixed to the
2 and a slider 53 supported to be slidable in the vertical direction.
And As shown in FIG. 3, a guide groove 52a extending in the vertical direction is formed in the guide 52, and a vertically long protrusion 53a of the slider 53 is slidably inserted into the guide groove 52a. The lower limit position of the slider 53 is determined by a stopper (not shown) provided on the guide 52.

As shown in FIG. 1, the body 41 of the scribe head 40 is attached to the slider 53 via a pair of upper and lower horizontal leaf springs 55a and 55b. More specifically, the slider 53 has L
The brackets 56a and 56b are fixed one by one, and the central portions of the leaf springs 55a and 55b are fixed to the brackets 56a and 56b, respectively. On the other hand, L-shaped brackets 57a and 57b are fixed to the body 41, one pair at a time, one above the other. The upper pair of brackets 57a are disposed apart from the bracket 56a with the bracket 56a interposed therebetween.
5a is fixed to both ends. Similarly, a pair of lower brackets 57b are also arranged at a distance from the bracket 56b with the bracket 56b interposed therebetween.
5b is fixed to both ends.

Next, the configuration of the scribe head 40 will be described in detail. The scribe head 40 includes the body 41, a holder 42 supported by the body 41 so as to be able to reciprocate in a small amount in the vertical direction, and a holder 42.
And a piezo actuator 44 (vibration actuator) that applies vertical vibration to the holder 42. In addition,
Body 41, holder 42, piezo actuator 44
Constitutes a pressing / vibration applying means for applying high-frequency vibration when the cutter 43 is pressed against the surface of the workpiece 100 as described later. The body 41 has a hollow upper portion and a lower portion forming a flat plate portion. A step 41 a between the two is provided as a receiving portion for locking the upper end of the piezo actuator 44. A guide 45 is fixed below the body 41.

The holder 42 is elongated so as to extend in the vertical direction. The holder 42 has a main rod 42a extending in the form of a narrow flat plate and extending vertically, and is connected to the upper end of the main rod 42a to vertically move upward. Extending auxiliary rod 42b
(The base end of the holder 42) and the attachment 42c fixed to the lower end of the main rod 42a (the end of the holder 42).
And The main rod 42a is guided by a guide 45 of the body 41, and can slide a small amount in the vertical direction.

A receiving member 42d (receiving portion) is fixed to an intermediate portion in the longitudinal direction of the main rod 42a, and a lower end of the piezo actuator 44 is locked to the receiving member 42d. As a result, the piezo actuator 44
The step 41a and the receiving member 42d facing each other in the vertical direction
And are arranged so as to be sandwiched between them. The piezo actuator 44 periodically expands and contracts in the vertical direction in response to the high-frequency AC voltage. The periodic expansion and contraction causes the holder 42 to vibrate in the vertical direction.

The auxiliary rod 42b protrudes upward through the upper wall of the body 41. On the upper wall of the body 41, a ball 46 (spherical elastic member) made of an elastic material such as rubber or resin, and upper and lower spherical seats 47 and 48 are arranged. Is penetrating. The upper end of the auxiliary rod 42b is formed with a male screw, and by tightening the upper spherical seat 48 screwed to the male screw, the ball 46 is mounted on the spherical seat 4.
It is sandwiched by 7, 48 and elastically deformed. The restoring force of the ball 46 is a force for urging the holder 42 upward with respect to the body 41, and is a force for constantly pressing the receiving member 42d of the holder 42 against the piezo actuator 44.

The cutter 43 is fixed to the attachment 42c of the holder 42. This cutter 43
Extends vertically, and its lower end (tip) is conical and pointed. The lower end of the cutter 43 may have a pyramid shape. At the lower end of the cutter 43, diamond particles having a pyramid shape are fixed.

Further, a guide plate 49 is attached to the attachment 42c. This guide plate 49 is
It is made of a spring material and its flat ends are attachment 4
It is attached to both side surfaces of 2c, and the central part is convexly curved downward. As best shown in FIGS. 4 and 5, a hole 49a is formed in the center of the guide plate 49. The cutter 43 protrudes downward by a predetermined amount (several microns) from the guide plate 49 through the hole 49a. In the drawing, the amount of protrusion is exaggerated.

As shown in FIG. 2 and FIG.
, An air cylinder 60 is mounted vertically.
On the other hand, an L-shaped bracket 65 is fixed to the upper side surface of the body 41 of the scribe head 40, and a vertical short rod 66 is screwed to the bracket 65. The short rod 66 is located right above the rod 61 of the air cylinder 60.

The scribing device further includes a control unit 70
(Control means, shown only in FIG. 3). The control unit 70 includes the vacuum mechanism, the rotation mechanism 20,
The stepping motor 36b of the XY stage 30,
37b, piezo actuator 44, air cylinder 60
And so on.

The operation of the scribing device having the above configuration will be described. As described above, the plate glass 100 (work) is positioned on the horizontal table 20 and set horizontally.
In the initial state, the cutter 43 of the scribe head 40
It is horizontally separated from the edge of the glass sheet 100 and is slightly spaced from the upper surface of the table 20. In this state, when the start button of the control unit 70 is turned on, the control unit 70 drives the vacuum mechanism to set the plate glass 1
00 is adsorbed. At the same time, the stepping motors 36b and 37b of the XY stage 30 are driven to move the moving bodies 32 and 33, thereby moving the scribe head 40 to the scribe start position on the plate glass 100. In the process of moving the scribe head 40 to the scribe start position, the curved portion of the guide plate 49 hits the edge of the glass sheet 100, and the scribe head 40 is pushed up by its inclination.
Thereby, the cutter 43 can ride on the upper surface of the plate glass 100 smoothly beyond the edge.

When the cutter 43 of the scribing head 40 reaches the scribing start position on the upper surface of the glass sheet 100, the control unit 70 applies a high-frequency voltage to the piezo actuator 44 and controls the stepping motors 36b and 36b of the XY stage 30. By driving 37b, for example, a ruled line 105 forming a closed curve having a shape shown in FIG.
To form

When forming the score line 105, the cutter 4
3, a pressing force P1 against the upper surface of the glass sheet 100 is always applied. That is, the scribe head 40
Is slidably supported via a slide support mechanism 50, and the weight of the scribe head 40 (mainly the weight of the body 41 and the holder 42) and the weight of the slider 53 serve as a pressing force to the cutter 43.

As described above, when the cutter 43 is pressed against the surface of the glass sheet 100 by the weight of the scribe head 40 or the like, a high frequency voltage is applied to the piezo actuator 44 to periodically expand and contract the piezo actuator 44. The vibration of the holder 42 due to the periodic expansion and contraction
3 to the sheet glass 100. In other words,
As shown in FIG.
Of the pressure applied to the body 10 fluctuates periodically due to the vibration of the piezo actuator 44 with the pressing force P1 caused by the weight of the body 10 or the like as a lower limit. Therefore, the pressing force P periodically becomes a very large force, and the cutter 43
An impact is applied to the glass sheet 100 through the sharp lower end, and a score line 105 having a deep vertical crack can be formed as shown in FIG. However, since the pressing force P1 caused by its own weight is relatively small, the occurrence of horizontal cracks unlike the conventional device can be almost completely eliminated.

The cycle of the pressing force P, in other words, the frequency of the high frequency voltage applied to the piezo actuator 44 is
Set to about 3 to 30 KHz and set the piezo actuator 4
The expansion / contraction amount of 4, that is, the amplitude is set to about several μm to 20 μm. When the upper frequency is adopted, the feed speed of the cutter 43 is preferably set to about 100 to 250 mm / sec.

In the process of forming the score line 105, the cutter 43 is always in contact with the surface of the sheet glass 100 with the pressing force due to its own weight of the scribe head 40 and the like, and does not instantaneously leave the surface. Defects in the vicinity of the score line 105 can be eliminated, and a clean score line 105 can be formed. The holder 42 is a rigid body and the cutter 43
Is fixed directly to the holder 42 without an elastic body, so that the cutter 43 vibrates integrally with the holder 42,
The vibration energy of the piezo actuator 44 can be transmitted to the cutter 43 satisfactorily, the possibility of resonance can be reduced, and the possibility of the cutter 43 jumping up can be reduced. Moreover, in the present embodiment, the leaf springs 55a and 55b are interposed between the body 41 and the slider 53, so that the possibility of resonance can be further reduced. Further, since the ball 46 is used as the elastic member, the durability is good, and the elastic force can be reliably applied to the piezo actuator 44.

Here, the movement locus of the cutter 43 for forming the score line 105 shown in FIG. 7 will be described.
7 has a substantially square shape, and four corners are arcs. In this case, for four sides forming a straight line, one of the stepping motors 36b and 37b is driven to move one of the moving bodies 32 and 33, and the cutter 43 is moved in the X-axis or Y-axis direction. Thereby, it forms. Further, the arc of the corner is formed by simultaneously driving the stepping motors 36b and 37b to move the moving bodies 33 and 34 at the same time and to cause the cutter 43 to draw the arc. As described above, by controlling the XY stage 30, the ruled line 105 having a shape including a plurality of straight lines having different extending directions as shown in FIG. 7 or a shape including a curved line such as an arc can be easily formed. be able to.

By the simultaneous control of the stepping motors 36b and 37b of the XY stage 30, it is possible to form a perfect circle 105 'as shown in FIG. In the case of forming a true circle ruled line 105 'in FIG. 8, X
After the cutter 43 is moved to the scribe start position by the control of the -Y stage 30, the piezo actuator 44 may be driven while driving the rotating mechanism 10 to rotate the plate glass 100. In this way, the control is simple. Further, when the center of the arc forming a part of the marking line coincides with the rotation center of the rotation mechanism 10,
The rotation mechanism 10 may be driven to form an arc.

The cutter 43 concentrates the pressing force at a pinpoint and forms the engraved lines 105 and 105 ′ composed of vertical cracks with the relative movement with respect to the glass plate 100, so that the attitude of the cutter 43 with respect to the movement trajectory is considered. This is not necessary, and the attitude control of the cutter 43 is unnecessary.

After the cutter 43 completes the formation of the engraved lines 105 and 105 'on the glass sheet 100, the energization of the piezo actuator 44 is stopped and the air cylinder 60 is driven to push the scribe head 40 upward. Then, the XY stage 30 is controlled to return to the initial position distant from the glass sheet 100. Thereafter, the air cylinder 60 is driven in the reverse direction to return the scribe head 40 to the lower limit position. After that, score line 10
The plate glass 100 formed with 5, 105 'is placed on the table 20.
, And the next new sheet glass 100 is set.

When the cracks in the score lines 105 and 105 ′ are deep and the thickness of the sheet glass 100 is almost the same as that of the sheet glass 100, a slight force is applied to the sheet glass 100 and the cracks are formed along the score lines 105 and 105 ′. It can be broken and its outer and inner parts can be separated.
Then, for example, an inner portion having the contours of the inscribed lines 105 and 105 'can be used as a product. Engraved lines 105, 105 '
Is relatively shallow, it breaks using air pressure or mechanical pressure.

The present invention is not limited to the above embodiment, and various embodiments are possible. In the embodiment shown in FIG. 9, the scribe head 40 is attached to a support 80 (fixed structure) provided on the base frame 1 via a bracket 81 and a slide mechanism 50. Work 1
The table 20 for setting 00 is provided on the XY stage 30. In FIG. 9, components corresponding to the above-described embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. In this embodiment, the workpiece 100 moves horizontally with respect to the scribe head 40 at the fixed position under the control of the XY stage 30, so that the score lines 105 and 105 'as shown in FIGS. Can be formed. In this embodiment, the table 20 and the second moving body 33 of the XY stage 30 may be integrated. Instead of the ball 25, a number of stacked disc springs or the like may be used as the elastic member. The work of the hard and brittle material is not limited to the plate glass, but may be a ceramic plate, a silicon wafer, or the like.

[0034]

As described above, according to the first aspect of the present invention, by applying high frequency vibration while pressing the contact member against the work, the score line can be formed deeply in the work, and the horizontal line can be formed. Cracks can be prevented from occurring. In addition, by moving the first and second moving bodies along two orthogonal axes, the trajectory of the contact member can be drawn, and not only a straight line but also a shape including a curve or a plurality of straight lines intersecting each other Can be formed in any shape, such as a shape including. According to the second aspect of the present invention, by imparting rotation to the work, it is possible to form a circular arc or a perfect circle by simple control using the moving means in the two orthogonal axes for positioning. According to the third aspect of the present invention, the vibration pressing force is applied to the work at the pinpoint via the contact member having a sharp tip, so that the attitude control of the scribe head is unnecessary even if the shape of the score line is not a straight line. It is. Also, by sandwiching the vibration actuator between the body and the receiving portion of the holder and pressing the receiving portion of the holder toward the vibration actuator with an elastic member, the vibration energy of the vibration actuator can be reliably applied to the contact member. The contact member is pressed against the workpiece by the weight of the holder and the holder, so that the score line can be formed more clearly.

[Brief description of the drawings]

FIG. 1 is a side view showing, in partial cross section, a scribe device according to an embodiment of the present invention.

FIG. 2 is a front view of the scribe device.

FIG. 3 is a plan view of the scribe device.

FIG. 4 is an enlarged front view showing a main part of a scribe head of the apparatus in a partial cross section.

FIG. 5 is an enlarged side view showing the relevant part in a partial cross section.

FIG. 6 is a diagram showing a pressing force of a cutter against a sheet glass.

FIG. 7 is a plan view showing one mode of a score line to be formed.

FIG. 8 is a plan view showing another mode of the score line formed.

FIG. 9 is a side view showing a partially sectioned scribe device according to another embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 10 Work setting table 20 Rotating mechanism (rotating means) 30 XY stage (moving means) 31 Base 32 First moving body 33 Second moving body 36 First driving mechanism 37 Second driving mechanism 40 Scribe head 41 Body 41a Step (receiving portion) 42 Holder 42d Receiving member (receiving portion) 43 Cutter (contact member) 44 Piezo actuator (vibration actuator) 46 Ball (elastic member) 50 Slide mechanism 70 Control unit (control means) 80 Post (fixed structure) ) 100 Flat glass (work)

Claims (3)

[Claims] 1. A table for setting a work,
(B) A contact member that contacts the surface of the installed work, and pressing and vibration that applies high-frequency vibration in a direction intersecting the work surface while pressing the contact member against the work surface to generate cracks in the work. A scribing head having application means; and (c) a moving means for relatively moving the scribing head along a work surface, wherein the moving means comprises a base and an X-axis direction parallel to the work surface. The first movable body supported on the base so as to be movable in the
A second movable body supported by the first movable body so as to be movable in a Y-axis direction perpendicular to the axis, first and second drive mechanisms for respectively moving the first and second movable bodies, , Second
Control means for controlling a drive mechanism, wherein the scribe head or the work setting table is provided on the second moving body. 2. A scribing apparatus according to claim 1, wherein said scribing head is provided on a second moving body of said moving means, and said work setting table is provided on a rotating means. 3. The scribe head has (i) a sharp tip, the tip of which abuts against a work surface, (ii) a holder for holding the contact member, and (iii) a holder for holding the contact member.
(Iv) a body that supports the holder so as to be able to reciprocate minutely in a direction intersecting with the work surface; and (iv) is sandwiched between a receiving portion of the body and a receiving portion of the holder, and applies the high-frequency vibration to the holder. A vibration actuator, and (v) an elastic member for urging the receiving portion of the holder toward the vibration actuator, wherein the body is connected via a slide support mechanism.
The body and the holder are slidably attached to the second moving body or the fixed structure of the moving means in the vertical direction, and the weight of the body and the holder acts on the abutting member, so that the abutting member is pressed against the work surface, 2. The scribing apparatus according to claim 1, wherein said pressing and vibration applying means includes said body, holder and vibration actuator.