CN117515036A - Air bearing rotor system and air floatation gap regulating and controlling method thereof - Google Patents
Air bearing rotor system and air floatation gap regulating and controlling method thereof Download PDFInfo
- Publication number
- CN117515036A CN117515036A CN202311784687.8A CN202311784687A CN117515036A CN 117515036 A CN117515036 A CN 117515036A CN 202311784687 A CN202311784687 A CN 202311784687A CN 117515036 A CN117515036 A CN 117515036A
- Authority
- CN
- China
- Prior art keywords
- bearing
- air
- conical
- radial
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000001105 regulatory effect Effects 0.000 title claims abstract description 13
- 230000001276 controlling effect Effects 0.000 title description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 44
- 230000033228 biological regulation Effects 0.000 claims abstract description 14
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 238000006073 displacement reaction Methods 0.000 claims description 59
- 230000003068 static effect Effects 0.000 claims description 35
- 238000005096 rolling process Methods 0.000 claims description 34
- 230000007246 mechanism Effects 0.000 claims description 23
- 230000008859 change Effects 0.000 claims description 19
- 238000007667 floating Methods 0.000 claims description 10
- 230000004323 axial length Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 description 9
- 230000009471 action Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000005693 optoelectronics Effects 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002706 hydrostatic effect Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000013178 mathematical model Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012946 outsourcing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008844 regulatory mechanism Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2233/00—Monitoring condition, e.g. temperature, load, vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
- F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
- F16C2240/46—Gap sizes or clearances
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an air bearing rotor system and an air floatation gap regulating method thereof, comprising a linear thrust bearing and an electric spindle arranged in an inner cavity of the linear thrust bearing, wherein bearing fixing seats are arranged at two ends of the inner cavity of the linear thrust bearing, the bearing fixing seats are connected with the linear thrust bearing through piezoelectric ceramic actuators, conical radial bearings are correspondingly arranged in the inner cavities of the two bearing fixing seats, one end of the electric spindle extends outwards through the conical radial bearings at the first end of the linear thrust bearing, the other end extends outwards through the conical radial bearings at the second end of the linear thrust bearing, and a radial air floatation gap is formed between the electric spindle and the inner cavity of the conical radial bearing. The scheme has the advantages of real-time controllable air film acting force, high journal movement precision, small rotation error, strong system function compatibility and the like through the improvement of the structure and the regulation and control method.
Description
Technical Field
The invention belongs to the technical field of air bearing rotor systems, and particularly relates to an air bearing rotor system and an air floatation gap regulating and controlling method thereof.
Background
With the development of industry in China, in the occasions of high-power, variable-load and high-rotation-speed operation of a journal, a common air bearing rotor system cannot meet the operation requirements, and an air bearing rotor in the prior art has the following defects: the motion precision of the shaft diameter is lower, the rotation error is larger, the air film gap of the traditional static pressure air bearing is difficult to realize adjustment, and according to the specific application scene, the change of the air film bearing capacity according to the load change is particularly needed, so that the problem of the adjustment of the air floatation gap change faced by the electric spindle of the ultra-high speed air bearing is urgently needed to be solved, and meanwhile, the problem of lower precision is also needed to be solved.
Disclosure of Invention
The invention aims to at least solve one of the problems in the prior art, and provides an air bearing rotor system and an air bearing clearance regulation method.
The invention aims at providing an air bearing rotor system which comprises a linear thrust bearing and an electric spindle arranged in an inner cavity of the linear thrust bearing, wherein bearing fixing seats are arranged at two ends of the inner cavity of the linear thrust bearing, the bearing fixing seats are connected with the linear thrust bearing through piezoelectric ceramic actuators, conical radial bearings are correspondingly arranged in the inner cavities of the two bearing fixing seats, one end of the electric spindle extends outwards through the conical radial bearings at the first end of the linear thrust bearing, the other end of the electric spindle extends outwards through the conical radial bearings at the second end of the linear thrust bearing, and a radial air floatation gap is formed between the electric spindle and the inner cavities of the conical radial bearings.
As a preferred scheme, a first through throttling hole is formed along the radial main body of the conical radial bearing, the first throttling hole is uniformly distributed around the whole main body of the conical radial bearing, an inner annular air passage groove is formed in the position, corresponding to the first throttling hole, of the bearing fixing seat, the inner annular air passage groove is connected with the first end of the first throttling hole, and the second end of the first throttling hole is communicated with the radial air floatation gap.
As a preferable scheme, the linear thrust bearing comprises a bearing body, wherein the whole bearing body is of a circular ring cylindrical structure, and a plurality of mounting grooves for fixing the piezoelectric ceramic actuator are circumferentially arranged at the edges of two ends of the bearing body; the bearing body is provided with a cavity with two through ends along the central axial direction, a plurality of rolling mechanisms are circumferentially distributed along the inner wall surface in the cavity, and the rolling mechanisms are contacted with the outer wall of the rolling body so as to realize the relative movement of the rolling body and the linear thrust bearing.
As a preferable scheme, the cavity is provided with an annular stop part in a surrounding way near the middle position; the annular stop part is provided with a stop table and mounting tables positioned on two sides of the stop table, and the stop table and the mounting tables are arranged along the whole annular direction of the middle section of the inner wall of the cavity.
As the preferred scheme, electric main shaft includes columniform axle body, axle body middle section position is provided with annular thrust portion, annular thrust portion encircles the cylinder outer wall setting of axle body, and annular thrust portion corresponds the setting with the backstop platform, the thickness of backstop platform is the same with annular thrust portion's thickness, and the length of axle body in the both sides of annular thrust portion is unanimous and the position corresponds with mount table axial length to through mount table inner ring face, backstop surface, annular thrust portion's side and axle body axial face enclose into the accommodation space that is used for installing static pressure thrust bearing.
As the preferred scheme, the motorized spindle still includes first conical shaft and the second conical shaft that are connected with axle body both ends respectively, the other end of first conical shaft is connected with first path axle, the other end of second conical shaft is connected with the second path axle, cylinder axis body, first conical shaft, second conical shaft, first path axle and the coaxial setting of second path axle, first conical shaft and second conical shaft are round platform shape structure, and first conical shaft and second conical shaft all include big footpath end and footpath end, and the diameter of the big footpath end of first conical shaft, second conical shaft equals the diameter of axle body.
As a preferred scheme, the static pressure thrust bearing is fixedly connected with one end face of the conical radial bearing, the static pressure thrust bearing comprises an outer annular air passage groove arranged on the outer annular surface, a first annular boss and a second annular boss are formed on two sides of the outer annular air passage groove, an air hole channel is formed on the connecting end face of the first annular boss and the conical radial bearing, the second annular boss surrounds a plurality of second orifices on the central axis of the second annular boss, one end of each second orifice is connected with the outer annular air passage groove, and the other end of each second orifice is communicated with an axial air floatation gap between the static pressure thrust bearing and the stop table.
As a preferable scheme, pressure sensors are arranged on the annular inner surface of the conical radial bearing and the end surface of the static pressure thrust bearing facing the stop table, and are used for detecting the air film bearing capacity of the air film gap in real time.
As a preferable scheme, photoelectric displacement sensors are uniformly distributed and circumferentially around the position, close to the end, of the inner cavity of the conical radial bearing and are used for detecting the gap change between the electric spindle and the inner wall of the conical radial bearing in real time.
The second purpose of the invention is to provide an air bearing rotor system air floatation gap regulating method, which comprises the following specific steps: step one, a photoelectric displacement sensor monitors the position change of an electric spindle in real time, so that the size of a radial air floatation gap between a conical radial bearing and the electric spindle is obtained, and the radial offset of the electric spindle is calculated; comparing the air film bearing capacity with a preset circumferential offset, and enabling the pressure sensor to be used for detecting the air film bearing capacity change of the air floating gap in real time so as to feed back the air film bearing capacity change to the controller and judging whether the air film bearing capacity corresponding to the floating gap reaches a preset value or not;
and secondly, according to the established air floatation gap real-time regulation model, exciting the piezoelectric ceramic actuator through corresponding voltage according to the radial offset and the air film bearing capacity change of the electric spindle, and moving the moving body consisting of the bearing fixing seat, the conical radial bearing and the static pressure thrust bearing to a preset position, wherein the radial air floatation gap and the axial air floatation gap of the electric spindle are regulated and controlled, so that the electric spindle obtains the corresponding air film bearing capacity.
Compared with the prior art, the invention has at least the following beneficial effects:
according to the scheme, a structure that the linear thrust bearing and the axial fixing seat can move relatively axially is adopted, wherein the bearing fixing seat, the conical radial bearing and the static pressure thrust bearing are fixedly connected to form a moving body, the whole body can move axially relative to the linear thrust bearing, and extremely high gap regulation and control precision and repeatability precision can be realized; the piezoelectric driving unit is used for realizing radial high contact stiffness, axial displacement and radial displacement conversion, and the bearing capacity and stiffness of the bearing can be greatly increased by the air film formed by the conical radial bearing, the static pressure thrust bearing and the electric spindle.
Secondly, the scheme optimizes the method for regulating and controlling the air floatation gap in real time, and by matching with the air floatation gap regulating structure with the specific structure, the closed-loop control can be established by adopting a preset radial photoelectric displacement sensor at first, so that the precise dynamic regulation and control of the air floatation gap of the bearing can be realized. Through the size of changing air feed pressure, the bearing capacity of adjustable toper radial bearing and footstep bearing, and then guarantee that the adjustable superhigh speed air bearing electricity main shaft system of air supporting clearance can not lead to the decline of system stability because of operational environment's parameter change, can guarantee the high accuracy steady operation of entire system.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is an exploded isometric view of an air bearing rotor system;
FIG. 2 is a general assembly cross-sectional view of an air bearing rotor system;
FIG. 3 is a schematic view of a linear thrust bearing;
FIG. 4 is a cross-sectional view taken from A-A of FIG. 3;
FIG. 5 is a schematic diagram of the structure of the motorized spindle 1;
fig. 6 is a schematic diagram of the structure of the motorized spindle 2;
FIG. 7 is a schematic illustration of a tapered radial air bearing construction;
FIG. 8 is a cross-sectional view taken from B-B of FIG. 7;
FIG. 9 is a schematic diagram of a piezoceramic actuator structure;
FIG. 10 is a cross-sectional view taken from C-C of FIG. 9;
FIG. 11 is a schematic view of a static pressure thrust bearing;
FIG. 12 is a cross-sectional view from D-D of FIG. 11;
FIG. 13 is a cross-sectional view of a bearing mount;
FIG. 14 is a flow chart for air bearing rotor system regulation model creation and air bearing gap regulation;
fig. 15 is a schematic view of a unidirectional driving vibration system of the piezoelectric ceramic actuator of the present invention.
FIG. 16 is a diamond-type micro-displacement amplifying mechanism principle of a piezoelectric ceramic actuator;
FIG. 17 is a schematic diagram 1 of the output displacement of a diamond-shaped displacement amplifying structure under different loads
FIG. 18 is a schematic diagram of output displacement of the diamond displacement amplifying structure under different loads 2;
FIG. 19 is a graph of piezoelectric actuation force versus output displacement;
FIG. 20 is a schematic diagram of a tapered radial bearing model;
FIG. 21 is a bearing pressure profile for a dual row supply hole;
FIG. 22 is a graph showing the relationship between the air film bearing capacity and the number of orifices;
FIG. 23 is a graph of air film bearing capacity as a function of rotational speed;
FIG. 24 is a graph showing the relationship between the air film bearing capacity and the orifice position
FIG. 25 is a graph of the influence of gas supply pressure on gas film load capacity;
FIG. 26 is a graph of loading after gravity coupling of gas buoyancy and gas bearings;
FIG. 27 is a graph of piezo-ceramic actuation force loading;
FIG. 28 is a graph of axial displacement of a gas bearing air bearing gap adjustment mechanism;
the marks in the figure: 1. the piezoelectric ceramic actuator comprises a piezoelectric ceramic actuator body, 10, a bearing end face, 11, PZT piezoelectric ceramics, 12, a flexible hinge, 2, a linear thrust bearing, 21, a mounting groove, 22, a rolling mechanism, 23, a cavity, 24, an annular stop part, 241, a stop table, 242, a mounting table, 3, a static pressure thrust bearing, 31, an outer annular air passage groove, 32, an air hole passage, 33, a second orifice, 4, a fixing screw, 6, a bearing fixing seat, 61, an inner annular air passage groove, 62, an air supply passage, 63, a connecting hole, 7, a conical radial bearing, 71, a conical cavity, 72, a first orifice, 8, an optoelectronic displacement sensor, 9, an electric spindle, 91, a spindle body, 92, an annular stop part, 94, a first conical spindle, 95, a first small-diameter spindle, 96, a second conical spindle, 97 and a second small-diameter spindle.
Detailed Description
The invention is described in detail below by way of exemplary embodiments. It is to be understood that elements, structures and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
It should be noted that: unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used in the specification and claims of this application, the terms "a," "an," and "the" and similar referents are not to be construed to limit the scope of at least one. The word "comprising" or "comprises", and the like, indicates that elements or items listed thereafter or equivalents thereof may be substituted for elements or items thereof in addition to those listed thereafter or equivalents thereof without departing from the scope of the word "comprising" or "comprising".
As shown, an exemplary embodiment of the present invention provides an air bearing rotor system comprising a linear thrust bearing 2, two hydrostatic thrust bearings 3, two bearing mounts 6, two conical radial bearings 7, and an electric spindle 9; the linear thrust bearing 2 is provided with a cavity 23 with two through ends, the cavity 23 is internally provided with an electric spindle 9, mounting grooves 21 at the two ends of the linear thrust bearing 2 are respectively connected with the bearing fixing seat 6 through the piezoelectric ceramic actuator 1, the two bearing fixing seats 6 extend into the cavity 23 of the linear thrust bearing 2, the mounting cavities of the bearing fixing seats 6 are internally provided with tapered radial bearings 7 through interference fit, the tapered radial bearings 7 are provided with two and respectively support the two ends of the electric spindle 9, and a radial air floatation gap is formed between the tapered radial bearings 7 and the electric spindle 9.
According to the scheme, the linear thrust bearing 2 and the piezoelectric ceramic actuator 1 are adopted to push the moving body to axially move, the axial displacement of the linear thrust bearing 2 can be converted into the radial displacement of the conical radial bearing 7, so that the air floatation gap is adjusted, and the higher gap adjusting and controlling precision and repeatability precision between the conical radial bearing 7 and the electric spindle 9 can be realized.
In this scheme, motorized spindle 9 adopts the following structure: the motorized spindle 9 includes a spindle body 91, wherein the middle section of the spindle body 91 is a large-diameter cylindrical structural section, an annular thrust portion 92 is disposed at the middle section of the cylindrical surface of the spindle body 91, the annular thrust portion 92 surrounds the cylindrical surface of the whole cylinder, two sections of tapered shafts are disposed at two ends of the spindle body 91, specifically, a first tapered shaft 94 and a second tapered shaft 96, large diameter ends of the first tapered shaft 94 and the second tapered shaft 96 are connected with the spindle body 91 respectively, a first small diameter shaft 95 is disposed at a small diameter end of the first tapered shaft 94, a second small diameter shaft 97 is disposed at a small diameter end of the second tapered shaft 96, and the spindle body 91, the annular thrust portion 92, the first tapered shaft 94, the first small diameter shaft 95, the second tapered shaft 96 and the second small diameter shaft 97 are coaxially disposed. The first small diameter shaft 95 may be used for installing a spindle driving power device for driving the motorized spindle 9 to rotate, and the second small diameter shaft 97 at the other end may be used for fixedly connecting a fixture or a processing platform for clamping a workpiece.
In this embodiment, the linear thrust bearing 2 includes a cylindrical bearing body, and a plurality of mounting grooves 21 for fixing the piezoelectric ceramic actuator 1 are respectively provided around edges of both ends of the bearing body; the number of the mounting grooves 21 at each end is uniformly distributed around, the number of the mounting grooves 21 is not particularly limited, the scheme is that each end is provided with 4 mounting grooves 21, the bearing body is provided with a hollow cavity 23, the cavity 23 is integrally communicated, an annular stop part 24 is arranged in the middle section of the inner wall of the cavity 23, the annular stop part 24 surrounds the whole inner wall of the cavity 23, the annular stop part 24 is provided with a stop table 241 and mounting tables 242 respectively positioned at two sides of the stop table 241, the stop tables 241 are correspondingly mounted with the annular stop part 92 of the electric spindle 9 and have the same width, the stop table 241 is positioned in the cavity of the annular stop part 92, and an accommodating space for mounting the static pressure thrust bearing 3 is enclosed by the inner mounting surface of the mounting table 242, the stop surface of the stop table 241, the side surface of the annular stop part 92 and the outer shaft surface of the shaft body 91, the cavities on two sides of the annular stop part 24 are provided with rolling mechanisms 6, each side of the rolling mechanism 6 is arranged by adopting a plurality of circumferential ball rings, each side of the rolling mechanism is provided with circumferential four-ring arrangement, the rolling mechanism can also be arranged to be distributed in a circumferential six-ring arrangement, each ball ring is formed by a plurality of balls in a surrounding manner, the balls are used for being in contact with the outer wall surface of the bearing fixing seat 6, the structure can enable the radial force borne by the linear thrust bearing 2 and the moving body to be uniformly distributed along the radial direction, the moving body comprises the bearing fixing seat 6, the conical radial bearing 7 and the static pressure thrust bearing 3 and is formed by fixedly connecting the bearing fixing seat 6 with the conical radial bearing 7, and a welding mode is adopted between the static pressure thrust bearing 3 and the conical radial bearing 7.
Specifically, 4 sets of rolling mechanisms 22 for contacting the outer wall of the bearing fixing seat 6 are circumferentially distributed at two ends in the cavity 23 along the inner wall respectively. Each group of rolling mechanism 22 comprises a plurality of balls arranged in a rolling groove on the inner wall of the cavity 23, and the opening width of the rolling groove on the inner wall is smaller than the diameter of the balls, so that the balls can roll in the rolling groove only and cannot be separated from the rolling groove, and under the action of voltage excitation, the axial displacement of the linear thrust bearing 2 can be converted into the radial displacement of the conical radial bearing 7 by the mechanism amplification type piezoelectric ceramic actuator 1, so that the air floatation gap is adjusted.
In this scheme, static pressure thrust bearing 3 is located the accommodation space of annular thrust portion 92 both sides, static pressure thrust bearing 3's chamber suit is on axle body 91, static pressure thrust bearing 3 is annular structure, be provided with outer annular air flue groove 31 on its outer anchor ring, wherein the both sides of outer annular air flue groove 31 then are provided with annular boss respectively, wherein be provided with air vent passageway 32 on the first annular boss, air vent passageway 32's one end and outer annular air flue groove 31 intercommunication, be provided with a plurality of second orifices 33 on the second annular boss, second orifice 33 arranges around static pressure thrust bearing 3's axis and sets up, second orifice 33's first end is linked together with outer annular air flue groove 31, the axial air supporting clearance intercommunication that forms between the backstop face of static pressure thrust bearing 3 and backstop platform 241, the effect of outer annular air flue groove 31 is: uniform distribution of the gas in the second gas flow passage 32 to the second orifice 33 is achieved. The gas flows into the groove cavity of the outer annular air passage groove 31 through the air hole channel 32, and enters the second throttling hole 33 through the groove cavity to form a compressed air film with axial bearing capacity, so that the axial displacement precision of the electric spindle 9 is ensured.
The bearing fixing seat 6 comprises a shaft sleeve body and a connecting seat arranged at one end of the shaft sleeve body, wherein the connecting seat is a flange part formed by protruding the shaft sleeve body to the outer edge, a connecting hole 63 of the connecting seat part of the bearing fixing seat 6 is connected with the piezoelectric ceramic actuator 1 through a fixing screw 4, the shaft sleeve body is of a cylindrical sleeve structure, a plurality of inner annular air passage grooves 61 which are axially arranged are formed in the inner wall of a cavity of the shaft sleeve body, the inner annular air passage grooves 61 are communicated with air supply channels 62 which are formed in the side wall of the bearing fixing seat 6, the air supply channels 62 are formed in the side wall of the shaft sleeve body and are arranged in the axial direction of the shaft sleeve body, the other end of each air supply channel 62 is communicated with an air hole channel 32 of the corresponding static pressure thrust bearing 6, and the conical radial bearing 7 is fixedly arranged in the bearing fixing seat 6 in an interference fit manner and is communicated with a first throttling hole 71 of the conical radial bearing.
In one embodiment of the invention, the outer wall of the conical radial bearing 7 is in a cylindrical structure, the conical radial bearing 7 is provided with a central cavity along the central axis, the central cavity is a circular truncated cone-shaped cavity, the circular truncated cone-shaped cavity comprises a large-diameter end and a small-diameter end, the large-diameter end faces the direction of the static pressure thrust bearing 3, the large-diameter end of the conical radial bearing 7 is fixedly connected with one end of the static pressure thrust bearing 3, particularly, a laser welding mode or an integral forming mode can be adopted, the inside of the central cavity of the conical radial bearing 7 is used for installing a conical section of the electric spindle 9, the conical cavities 71 of the two conical radial bearings 7 are respectively matched with a first conical shaft 94 and a second conical shaft 96 of the electric spindle 9, a radial air floating gap is formed between the conical cavities 71 and the conical shafts, a first throttling hole 72 which is arranged along the radial direction of the conical radial bearing 7 is formed on the side wall of the conical cavity 71, and the first throttling hole 72 is provided with more than two rows, and the first throttling hole 72 of each row is arranged in a penetrating way along the annular surface of the whole conical radial bearing 7. In this embodiment, the first end of the first orifice 71 is disposed corresponding to the inner annular air passage groove 61 in the inner cavity of the bearing holder 6, and the air can be uniformly distributed to the first orifice 71 by the action of the inner annular air passage groove 61. The first orifice 71 on the conical radial bearing 7 is used to control the flow of gas and thus regulate the bearing capacity.
In this embodiment, the mechanism amplification type piezoelectric ceramic actuator 1 is composed of a bearing end face 10, PZT piezoelectric ceramic 11 and a flexible hinge 12. The piezoelectric ceramic actuator 1 can be obtained by outsourcing, signals are input through the PZT piezoelectric ceramic 11, and the carrying end face 10 can output displacement along the axial direction of the linear thrust bearing 2.
In this embodiment, the number of the piezoelectric ceramic actuators 1 is not particularly limited, for example, the piezoelectric ceramic actuators 1 on each side of the linear thrust bearing 2 in this embodiment are set to 4 groups, the piezoelectric ceramic actuators 1 on each side move in a telescopic manner synchronously, one end of each piezoelectric ceramic actuator 1 is connected to the mounting groove of the linear thrust bearing 2 by a fixing screw 4, and the other end is connected to the bearing fixing seat 6 by the fixing screw 4.
In an exemplary embodiment of the present invention, an optoelectronic displacement sensor 8 is further provided, where the optoelectronic displacement sensor 8 is disposed in a mounting groove on the inner wall of the small diameter end of the cavity of the conical radial bearing 7, and the optoelectronic displacement sensor 8 can detect a radial air-floating gap with the outer wall of the motorized spindle 9, and adjust the excitation voltage of the piezoceramic actuator 1 according to the radial air-floating gap. The photoelectric displacement sensors 8 are distributed at the end parts of the conical radial bearing 7 at intervals of 90 degrees in a central symmetry manner and are used for monitoring the displacement of the electric spindle 9 in the radial runout in real time.
In this embodiment, a pressure sensor is further disposed on the annular inner surface of the conical radial bearing 7 and on the side of the static pressure thrust bearing 3 facing the stop table 241, for detecting the air film bearing force of the air-floating gap in real time and feeding back to the controller, so as to determine whether the air film bearing force reaches a predetermined set value.
The invention also provides a method for regulating and controlling the air floatation gap of the air bearing rotor system in real time, which comprises the following specific steps:
step one, a photoelectric displacement sensor 8 monitors the position change of an electric spindle 9 in real time, so that the radial air floatation gap between a conical radial bearing 7 and the electric spindle 9 is obtained, and the radial offset of the electric spindle 9 is calculated; comparing the air film bearing capacity variation with a preset circumferential offset, wherein the pressure sensor is used for detecting the air film bearing capacity variation of the radial air-floating gap in real time;
specifically, the photoelectric displacement sensor 8 and the pressure sensor monitor the bearing capacity of the air floatation gap and the air film of the electric spindle 9 in real time. Photoelectric displacement sensors 8 are adopted, are distributed and nested in the inner groove of the conical radial bearing 7 at 90 degrees in the circumferential direction, and are used for measuring that when the electric spindle 9 runs, rectangular coordinates are established by taking one end facing the electric spindle 9 as a reference plane, and according to radial offset delta X and delta Y of the electric spindle 9 along the positive and negative directions of the X and Y axes, the radial offset delta X and delta Y are compared with the specified circumferential offset of the electric spindle 9, so that the stability of the electric spindle 9 under different working conditions is judged; converting the displacement signal of the photoelectric displacement sensor 8 into an electric signal, converting the electric signal into a digital signal through a signal processing circuit, and finally obtaining displacement data through computer processing; the photoelectric displacement sensor 8 monitors the input data and adds to the input as an adjustment feedback to correct the displacement deviation. By installing pressure sensors at the air inlet and the air outlet of the conical radial bearing 7, the working state of the conical radial bearing 7, such as air inlet pressure, air outlet pressure, bearing load and the like, can be monitored in real time, and the rigidity and damping of the conical radial bearing 7 are controlled by adjusting the pressure of the air inlet, so that the running stability of the air bearing rotor system is improved; the pressure sensor is arranged on the surfaces of the conical radial bearing 7 and the static pressure thrust bearing 3 and is used for monitoring the running condition of the motorized spindle 9 in real time and establishing the connection between the pressure sensor and the computer processing system so as to realize the real-time monitoring of the bearing capacity of the air film.
And secondly, according to the established air floatation gap real-time regulation model, exciting the piezoelectric ceramic actuator through corresponding voltage according to the radial offset and the air film bearing capacity change of the electric spindle, and moving a moving body consisting of a bearing fixing seat, a conical radial bearing and a static pressure thrust bearing to a preset position, wherein the radial air floatation gap and the axial air floatation gap of the electric spindle are regulated and controlled, so that the electric spindle obtains the corresponding air film bearing capacity.
Specifically, the piezoelectric ceramic actuator 1 serves as a driving element of the linear thrust bearing, and a rapid response of the linear thrust bearing 2 can be achieved. By utilizing the characteristic that the electric energy can be converted into mechanical motion, the accurate control of the linear thrust bearing 2 can be realized by controlling the voltage and the waveform; because the output is larger, the micron-level feeding can be realized, and thus, the high-precision processing and measurement can be realized. When the rotating speed and the applied load change, the piezoelectric ceramic actuator 1 synchronously refers to the optimal air floatation gap corresponding to the working condition in the built model database to adjust the excitation voltage, so that the acting force in the horizontal direction generated by the piezoelectric ceramic actuator 1 under the action of voltage excitation is changed, and the force pulls the linear thrust bearing 2 to slightly move along the axial direction. The axial movement of the linear thrust bearing 2 can generate an extrusion effect on the conical radial bearing 7, so that gas in the air floatation gap is compressed, the gas film supporting force is changed, and the motorized spindle 9 generates a phenomenon of bidirectional micro movement in the radial direction and the axial direction; the bi-directional movement of the motorized spindle 9 causes the gas at the end of the conical radial bearing 7 and hydrostatic thrust bearing 3 to be compressed, the end supporting force increasing, acting on the motorized spindle 9, bringing it to a new equilibrium position.
In the second step, voltage excitation of the piezoelectric ceramic actuator 1 needs to be realized according to the established regulation system model.
It should be noted that the regulation system model is proposed on the basis of cooperation with the air bearing rotor system with the specific structure, and therefore, the regulation system model is firstly based on the establishment of the precise regulation mechanism for the air bearing clearance with the specific static pressure.
As shown in fig. 14, the regulation system model is specifically as follows: according to the scheme, the positioning quantity, the positioning precision and the movement precision of the gas bearing air-floatation gap adjusting mechanism are researched according to dynamic and kinematic analysis of the gas bearing air-floatation gap adjusting mechanism:
s1: a mathematical model of the piezoelectric ceramic actuator 1 unidirectional driving vibration system is established.
As shown in FIG. 15, the piezoelectric ceramic plate is equivalent to a piezoelectric unidirectional drive simplified vibration system with the rigidity of k p Is pushed to be equivalent to mass M and has rigidity of k g Damping of c g Is a block of (a) a block of (b). When the mass is in a balanced state, the piezoelectric actuation force F a Reaction force F of object block g Damping force F c The following relation is formed between the moving displacement of the object block and the moving displacement of the object block:
wherein t is the acting time of the piezoelectric ceramic actuator; x is x 0 For a given excitation voltage, the maximum output displacement of the piezoelectric ceramic actuator 1; x is x 1 The displacement is actually output for the piezoelectric actuator.
The natural frequency of the piezoelectric ceramic single-drive vibration system is as follows:
the piezoelectric actuation force and output displacement are related as shown in figure 19Is tied up. When the excitation voltage is constant, the piezoelectric actuation force F a Inversely proportional to the output displacement x, the functional relationship is:
F a ＝k p (x 0 -x 1 ) (3)
wherein x is 0 For a given excitation voltage, the maximum output displacement of the piezoelectric ceramic actuator 1; x is x 1 The displacement is actually output for the piezoelectric actuator.
For x 1 Reaction force F of object block g The method comprises the following steps:
F g ＝k g x 1 (4)
from this, it can be seen that the piezoelectric actuator output displacement when the piezoelectric ceramic actuator 1 unidirectionally drives the vibration system at the equilibrium position is:
under the combined action of the excitation voltage and the pretightening force, the output displacement of the piezoelectric ceramic actuator 1 can be obtained by the following formula:
wherein F is the pretightening force of the piezoelectric ceramic actuator; Δx 1 The piezoelectric ceramic actuator 1 outputs displacement under the action of pretightening force; Δx 1 ' is the output displacement of the piezoelectric actuator under the combined action of the pretightening force and the electric field force; c T The rigidity of the piezoelectric actuator is the rigidity of the piezoelectric actuator under the action of no pretightening force; c F The rigidity of the piezoelectric actuator under the action of pretightening force; f (F) e An effective output force generated for the piezoelectric actuator; f (F) m Maximum output force generated for the piezoelectric actuator; l (L) 0 Is the original length of the piezoelectric actuator; e is the electric field strength; d is the piezoelectric actuator thickness.
In the scheme, as shown in figures 17 and 18, modal analysis and statics analysis are carried out on a mechanism amplification type piezoelectric ceramic actuator, a model material is a super-hard aluminum alloy 7075-T6 plate, and the elastic modulus E=72000/mm 2 Yield strength δ=505 Mpa, poisson ratio λ=0.33. One end of the diamond-shaped displacement amplifying mechanism is provided with fixed constraint, the input end applies displacement load, and the displacement variation of the diamond-shaped displacement amplifying mechanism in the output direction is obtained, so that the simulation amplification factor of the diamond-shaped displacement amplifying mechanism is calculated to be 3.94.
S4, establishing a gas film force solving equation of the conical radial bearing 7 by combining an air bearing working principle:
according to the scheme, the conical radial bearing as shown in fig. 20 is taken as a research object, a conical hydrostatic gas bearing lubrication analysis mathematical model is established, a dimensionless Reynolds equation is solved numerically by adopting a finite difference method, and a Matlab iterative program is compiled to calculate the gas film pressure distribution of the bearing.
(1) Establishing a steady-state nonlinear dimensionless control equation of the conical radial bearing, wherein the equation is shown as follows:
performing the following corner-preserving transformation, and enabling:
wherein phi is a circumferential coordinate; r is a dimensionless radial coordinate; p is the dimensionless air film pressure; h is the air film gap μm; h is the thickness of the dimensionless air film; omega is the angular velocity of the bearing;r 1 : radial radius of air film, P a : standard atmospheric pressure, h 0 : an initial average air film gap, mu is an air film viscosity coefficient; />
(2) Utilizing a finite difference method to numerically solve an equation, and compiling a Matlab iterative program to calculate the air film pressure distribution of the bearing; according to the air film pressure distribution, the dimensionless bearing capacity of the bearing is obtained, and the calculation formula is as follows:
the radial total bearing capacity is:static stiffness is +.>Wherein Wx: air film force along eccentric direction of journal, wy: and (3) air film force along the eccentric direction perpendicular to the shaft neck.
S5, adopting a finite difference method to numerically solve a control equation to obtain bearing pressure distribution of the conical radial bearing 7, and calculating total bearing and static rigidity according to bearing capacity and rigidity function expression;
establishing a friction force solving model of the linear thrust bearing 2 rolling body, and loading Q of the rolling body n And self-stiffness k n Deformation delta n The relationship of (2) is as follows:
wherein k is i ，k o An inner wall surface in contact with the rolling elements, and an outer wall surface having rigidity; delta i ，δ o The deformation of the inner wall surface and the outer wall surface.
The deformation amount of any non-main radial force train rolling element is as follows:
in the psi- 1k The space included angle between the rolling bodies in the circumferential direction and the rolling bodies in the row where the main radial force is located is set as a non-first row rolling body in the circumferential direction;the deformation of the kth rolling element is the column where the main radial force is located; c 1 The radial play of the rolling bodies is the main radial force.
The entire linear thrust bearing 2 is subjected to the following loads:
the friction force of all rolling bodies is as follows:
s6, establishing a friction force applied to the rolling bodies of the linear thrust bearing 2 to solve an equation;
establishing an axial displacement solving equation of the moving body, wherein an axial force balancing equation borne by the moving body is as follows:
wherein W: the total air film force along the radial direction, f is the total friction force of the rolling body of the linear bearing, a is the acceleration of the moving body, and alpha is the taper angle of the conical radial air bearing; m is M e Is the mass of the moving body.
The axial displacement of the moving body at any moment can be approximately solved by the following steps:
the amount of change in the gas bearing air bearing gap is:
Δh＝X e tanα (16)
s7: the photoelectric displacement sensor monitors the axial movement amount of the moving body along with time in real time, and the pressure sensor monitors the change of air film force in real time.
S8: the voltage excites the piezoelectric ceramic actuator, the moving body moves to a designated position, and the air floatation gap is regulated.
Fig. 21 shows the three-dimensional gas film pressure distribution of the gas bearing with the number of double row gas supply holes of n=20×2, the gas film gap of 10 μm, and the rotation speed of 30000 rpm.
FIGS. 22-25 show the relationship between the bearing capacity and the variation of the motion parameter, and as the air film gap increases, the bearing capacity has a significant decreasing trend as shown in FIG. 22; with the same air film gap, the bearing capacity increases with the number of orifices. As shown in fig. 23, as the rotational speed increases, the dynamic pressure effect increases and the bearing capacity gradually increases. As shown in fig. 24, when the air-bearing gap is constant, the farther from the end face, the larger the bearing force, but the smaller the influence of the orifice position on the bearing force. As shown in fig. 25, the larger the air supply pressure, the larger the bearing capacity, and as the air-floating gap increases, the influence of the air supply pressure on the bearing capacity gradually decreases.
Table 1 shows the number of air supply holes n=20×2, the air supply pressure ps=0.6 Mpa, the distance s=15.12 mm between the orifice rotation center line and the tapered radial air bearing end face, the average air film gap at different rotational speeds, and the corresponding air film bearing capacity.
Average air film gap at each rotational speed and corresponding air film force in table 1
As shown in FIGS. 26, 27 and 28, the following simulation results were obtained under the conditions of an air supply pressure of 0.6MPa, a journal rotation speed of 20000rpm/min and an average air bearing gap of 12 um.
Wherein fig. 26 is a loading curve over time after coupling of the gas buoyancy force with the tapered gas bearing gravity force, wherein the ordinate y represents the resultant force of the gas buoyancy force and the tapered gas bearing gravity force. Fig. 27 is a graph of piezoelectric ceramic actuation force loading over time, where the ordinate y represents piezoelectric actuation force. Fig. 28 shows the axial displacement of the moving body from the start of axial stress to the stress balance. According to the axial displacement of the moving body at each moment before the axial stress balance, the average air-bearing clearance corresponding to the axial displacement can be obtained, and the corresponding value of the axial displacement and the air-bearing clearance at the conversion position can be converted according to the model.
The simulation parameter conditions are set as follows: the flange is in binding contact with the air bearing; the contact friction coefficients of the rolling bodies of the linear bearing and the inner surface and the outer surface are 0.3,0.002 respectively; the interval between the rolling bodies is 0.01mm; the maximum output force of the single mechanism amplifying type piezoelectric actuator is 30N, and 4 total 120N; the linear bearing is set as fixed; the flange end is set as a transition; in the whole air floatation gap regulation and control process, the rolling bodies only conduct autorotation at fixed positions; and coupling piezoelectric actuation force, air film force, air bearing gravity and the like to the rotation central shaft of the air floatation gap regulating mechanism to perform axial displacement simulation analysis on the rotation central shaft, and finally obtaining radial air floatation gap variation.
The present invention is not limited to the above-mentioned embodiments, but is intended to be limited to the following embodiments, and any modifications, equivalent changes and variations in the above-mentioned embodiments can be made by those skilled in the art without departing from the scope of the present invention.
Claims (10)
1. An air bearing rotor system, characterized by: the electric spindle comprises a linear thrust bearing and an electric spindle arranged in an inner cavity of the linear thrust bearing, wherein bearing fixing seats are arranged at two ends of the inner cavity of the linear thrust bearing, the bearing fixing seats are connected with the linear thrust bearing through piezoelectric ceramic actuators, conical radial bearings are correspondingly arranged in the inner cavities of the two bearing fixing seats, one end of the electric spindle penetrates through the conical radial bearings at the first end of the linear thrust bearing to extend outwards, the other end of the electric spindle penetrates through the conical radial bearings at the second end of the linear thrust bearing to extend outwards, and a radial air floatation gap is formed between the electric spindle and the inner cavities of the conical radial bearings.
2. An air bearing rotor system according to claim 1, wherein: the radial main body of the conical radial bearing is provided with a through first throttling hole, the first throttling hole is uniformly distributed in a surrounding manner along the whole main body of the conical radial bearing, an inner annular air passage groove is formed in the position, corresponding to the first throttling hole, of the bearing fixing seat, the inner annular air passage groove is connected with the first end of the first throttling hole, and the second end of the first throttling hole is communicated with the radial air floatation gap.
3. An air bearing rotor system according to claim 1 or 2, characterized in that: the linear thrust bearing comprises a bearing body, wherein the whole bearing body is of a circular-ring cylindrical structure, and a plurality of mounting grooves for fixing the piezoelectric ceramic actuator are formed in the edges of two ends of the bearing body in a surrounding mode; the bearing body is provided with a cavity with two through ends along the central axial direction, a plurality of rolling mechanisms are circumferentially distributed along the inner wall surface in the cavity, and the rolling mechanisms are contacted with the outer wall of the rolling body so as to realize the relative movement of the rolling body and the linear thrust bearing.
4. An air bearing rotor system according to claim 3, wherein: an annular stop part is circumferentially arranged at the middle position of the cavity; the annular stop part is provided with a stop table and mounting tables positioned on two sides of the stop table, and the stop table and the mounting tables are arranged along the whole annular direction of the middle section of the inner wall of the cavity.
5. An air bearing rotor system as set forth in claim 4 wherein: the electric spindle comprises a cylindrical spindle body, an annular thrust part is arranged at the middle section of the spindle body, the annular thrust part is arranged around the outer wall of a column body of the spindle body, the annular thrust part is arranged corresponding to the stop table, the thickness of the stop table is identical to that of the annular thrust part, the lengths of the spindle bodies at two sides of the annular thrust part are consistent with the axial lengths of the mounting tables and correspond to the positions, and accordingly an accommodating space for mounting the static pressure thrust bearing is formed by the inner annular surface of the mounting table, the stop surface of the stop table, the side surface of the annular thrust part and the spindle body.
6. An air bearing rotor system as set forth in claim 5 wherein: the electric spindle further comprises a first conical shaft and a second conical shaft which are connected with two ends of the spindle body respectively, the other end of the first conical shaft is connected with a first small-diameter shaft, the other end of the second conical shaft is connected with a second small-diameter shaft, the cylindrical shaft body, the first conical shaft, the second conical shaft, the first small-diameter shaft and the second small-diameter shaft are coaxially arranged, the first conical shaft and the second conical shaft are of circular truncated cone structures, the first conical shaft and the second conical shaft comprise large-diameter ends and small-diameter ends, and the diameters of the large-diameter ends of the first conical shaft and the second conical shaft are equal to the diameters of the spindle body.
7. An air bearing rotor system as set forth in claim 5 wherein: the static pressure thrust bearing is fixedly connected with one end face of the conical radial bearing, the static pressure thrust bearing comprises an outer annular air passage groove arranged on the outer annular surface, a first annular boss and a second annular boss are formed on two sides of the outer annular air passage groove, an air hole channel is formed on the connecting end face of the first annular boss and the conical radial bearing, the second annular boss surrounds a plurality of second orifices on the central axis of the second annular boss, one end of each second orifice is connected with the outer annular air passage groove, and the other end of each second orifice is communicated with an axial air floatation gap between the static pressure thrust bearing and the stop table.
8. An air bearing rotor system as set forth in claim 5 wherein: pressure sensors are arranged on the annular inner surface of the conical radial bearing and the end surface of the static pressure thrust bearing facing the stop table, and are used for detecting the air film bearing capacity of the air film gap in real time.
9. An air bearing rotor system as set forth in claim 5 wherein: photoelectric displacement sensors are uniformly distributed and circumferentially around the position, close to the end, of the inner cavity of the conical radial bearing and are used for detecting the gap change between the electric spindle and the inner wall of the conical radial bearing in real time.
10. An air bearing rotor system air bearing clearance adjustment and control method according to claims 1-9, characterized in that:
step one, a photoelectric displacement sensor monitors the position change of an electric spindle in real time, so that the size of a radial air floatation gap between a conical radial bearing and the electric spindle is obtained, and the radial offset of the electric spindle is calculated; comparing the air film bearing capacity with a preset circumferential offset, and enabling the pressure sensor to be used for detecting the air film bearing capacity change of the air floating gap in real time so as to feed back the air film bearing capacity change to the controller and judging whether the air film bearing capacity corresponding to the floating gap reaches a preset value or not;
and secondly, according to the established air floatation gap real-time regulation model, exciting the piezoelectric ceramic actuator through corresponding voltage according to the radial offset and the air film bearing capacity change of the electric spindle, and moving the moving body consisting of the bearing fixing seat, the conical radial bearing and the static pressure thrust bearing to a preset position, wherein the radial air floatation gap and the axial air floatation gap of the electric spindle are regulated and controlled, so that the electric spindle obtains the corresponding air film bearing capacity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311784687.8A CN117515036A (en) | 2023-12-23 | 2023-12-23 | Air bearing rotor system and air floatation gap regulating and controlling method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311784687.8A CN117515036A (en) | 2023-12-23 | 2023-12-23 | Air bearing rotor system and air floatation gap regulating and controlling method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117515036A true CN117515036A (en) | 2024-02-06 |
Family
ID=89766638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311784687.8A Pending CN117515036A (en) | 2023-12-23 | 2023-12-23 | Air bearing rotor system and air floatation gap regulating and controlling method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117515036A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117583629A (en) * | 2023-12-28 | 2024-02-23 | 广州市昊志机电股份有限公司 | Air-floatation high-speed ultra-precise electric spindle structure |
-
2023
- 2023-12-23 CN CN202311784687.8A patent/CN117515036A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117583629A (en) * | 2023-12-28 | 2024-02-23 | 广州市昊志机电股份有限公司 | Air-floatation high-speed ultra-precise electric spindle structure |
| CN117583629B (en) * | 2023-12-28 | 2024-08-20 | 广州市昊志机电股份有限公司 | Air-floatation high-speed ultra-precise electric spindle structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117515036A (en) | Air bearing rotor system and air floatation gap regulating and controlling method thereof | |
| CN108620948B (en) | Detection compensation control system for air static pressure main shaft | |
| CN105179480B (en) | A kind of gas suspension device of active control orifice inlet port air pressure | |
| Luo et al. | Design of ultraprecision machine tools with applications to manufacture of miniature and micro components | |
| JP2009115131A (en) | Dynamic bearing and spindle device using radial dynamic bearing | |
| Shinno et al. | A newly developed linear motor-driven aerostatic XY planar motion table system for nano-machining | |
| JP5148259B2 (en) | Processing equipment | |
| WO2021022866A1 (en) | Long-stroke high-precision micro-nano motion servo feed system and control method | |
| CN101484713A (en) | Gas bearings | |
| CN108788238B (en) | Deep hole processing intelligent drill rod system with radial tilting pad | |
| CN109488689B (en) | Bearing compensation device and method for air floatation spindle | |
| CN103836070A (en) | Active air-floatation support device | |
| US10507532B2 (en) | Chuck for a high precision machine tool | |
| Li et al. | Research development of preload technology on angular contact ball bearing of high speed spindle: a review | |
| CN103573979B (en) | A kind of bearing pre-fastening self-regulation device based on piezoelectric ceramic actuator | |
| CN110605407B (en) | Air floatation spindle axial dynamic stiffness self-adaptive device and method based on micro-disturbance | |
| Hu et al. | Study on variable pressure/position preload spindle-bearing system by using piezoelectric actuators under close-loop control | |
| US11626815B2 (en) | High-precision rigid-flexible coupling rotating platform and control method thereof | |
| CN104440836A (en) | Space two-degree-of-freedom adjustment method and device based on dense ball annular bearing and double-axis combined driving | |
| JP2004132705A (en) | Inspection method and inspecting apparatus of fluid bearing | |
| Snoeys et al. | Development of improved externally pressurized gas bearings | |
| CN110439958B (en) | Planar two-degree-of-freedom micro-disturbance flexible active vibration isolation device and method | |
| CN105179478B (en) | A kind of Porous gas suspension support system applied to full physical simulation | |
| CN102080690B (en) | For the spacer element with adjustable length of rolling bearing | |
| CN2707426Y (en) | Nanopositioning workbench with three degrees of freedom |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |