CN111650745B - Scanning system based on micro-lens array group and self-adaptive optical fiber collimator - Google Patents
Scanning system based on micro-lens array group and self-adaptive optical fiber collimator Download PDFInfo
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- CN111650745B CN111650745B CN202010722598.0A CN202010722598A CN111650745B CN 111650745 B CN111650745 B CN 111650745B CN 202010722598 A CN202010722598 A CN 202010722598A CN 111650745 B CN111650745 B CN 111650745B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
Abstract
The invention discloses a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator. The self-adaptive optical fiber collimator can realize self-adaptive accurate control of the emergent collimated light beam in a small angle range to carry out continuous addressing scanning. The microlens array sets enable large angle discrete addressing scanning. The invention has the advantages that the advantages of the micro-lens array group and the self-adaptive optical fiber collimator are complemented, the disadvantages of each other are eliminated, and the large-angle high-precision continuous addressing scanning is creatively realized. And by utilizing the principle that the optical path is reversible, the system can be used as a large-range light beam receiving system and has the capability of bidirectional receiving and transmitting.
Description
Technical Field
The invention relates to a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator, which can be used for civil and military application occasions such as laser communication, laser radar, optical fiber laser coherent synthesis, optical fiber laser atmospheric transmission, optical fiber laser precise positioning, optical switches and the like.
Background
The beam scanning system is used for changing the beam direction and can be divided into a non-inertia scanning system, a small micro-inertia scanning system and an inertia scanning system according to the inertia, wherein the traditional inertia scanning system represented by a rotary table is mature in technology and is commercialized in a large scale, and the defects of the traditional inertia scanning system are that the inertia is large, the size is large, the flexibility is not high, the response speed is low, and the requirements of fields with high requirements on the response speed, such as laser radars, fiber laser coherent synthesis and the like, are difficult to meet. The inertialess phased array scanning system has a strong development trend, but due to the limitation of manufacturing technology, although related commercial products are produced, the effect is not as good as that of the traditional inertialess scanning system. In view of the above circumstances, researchers in various countries have developed small micro-inertial scanning systems, wherein a light beam scanning system based on a micro-lens array has a small volume, a light weight and a small motion inertia, and can realize large-angle two-dimensional scanning by using micrometer-scale displacement. Microlens array group scanning was first proposed by W.Goltsos et al (W.Goltsos and M.Holz, "Agile beam steering using binary optics arrays," Opti.Eng.29 (11), 1392-1397 (1990)), at the university of labor in Massachusetts, and the scanning principle and characteristics thereof were analyzed. However, due to the limitation of the scanning principle of the micro-lens array group, the scanning of the single micro-lens array group can only realize discrete addressing scanning, and the micro-lens array group cannot be used for scenes requiring continuous scanning capability, such as laser communication, laser radar and the like.
An Adaptive fiber collimator is a device for beam collimation, and in 2005 and 2011, l.beresev et al (l.beresev and m.vorotsov, "Design of Adaptive fiber Optics collimator for free-space communication laser," proc.spie 5895,58950R (2005)) and the institute of optoelectronics of the national academy of sciences (c.geng, x.li, et., "Coherent beam combination of an optical array using Adaptive fiber Optics collimators," Optics 284,5531 (collimated light)) have been developed independently of Adaptive fiber collimators (Adaptive-Optics collimators, AFOCs), which can be applied within a small angle range of self-Adaptive scanning, but have a small angular limit.
Disclosure of Invention
The technical problem solved by the invention is as follows: aiming at the problem of discrete addressing scanning of a micro-lens array scanning system, a pre-scanning device which takes an adaptive optical fiber collimator as a micro-lens array group is provided as shown in figure 1, the problem of discrete addressing scanning of the micro-lens array group is solved, the scanning principle is subjected to theoretical and simulation analysis, and large-angle continuous addressing scanning is creatively realized.
The technical scheme adopted by the invention for solving the technical problems is as follows: a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator is characterized in that the self-adaptive optical fiber collimator 2 is used as a pre-scanning device in the scanning system, a first micro-lens array 5 in a micro-lens array scanning unit is fixed on a supporting structure 3 connected with an integrated structure 1, a second micro-lens array 7 is connected with two pairs of bimorph drivers 4 fixed on the integrated structure 1 through connecting structures 6, the voltage of the bimorph drivers 4 is controlled through a controller 8, so that the two groups of micro-lens arrays generate relative displacement in the direction perpendicular to an optical axis, the scanning direction of an emergent light beam is changed, far-field discrete addressing scanning is achieved, the direction of emergent light of the self-adaptive optical fiber collimator 2 is changed through the controller 8, and two-stage cooperative scanning is achieved, and finally large-angle continuous addressing scanning is achieved.
Furthermore, the realization of continuous addressing scanning adopts a unique two-step method, and for the structure of the self-adaptive optical fiber collimator cascade Kepler micro-lens array group, the relative position among the micro-lens arrays is firstly adjusted, and the far-field diffraction factor is changed
Then changing the far field interference factor by adjusting the direction of the outgoing beam of the adaptive fiber collimator
To realize the addressing of any position, the corresponding one-dimensional far-field distribution is
Wherein k isfNormalizing the coordinates for the far field, xMIs the relative displacement between microlens arrays, xAFor adapting the displacement of the fibre end face of the fibre collimator, fAFocal length of lens for adaptive fiber collimator, fMThe focal length of the unit lens of the micro-lens array, D the effective clear aperture of the system, L the distance between the micro-lenses, D' the effective clear aperture of the unit lens of the micro-lens, and lambda the wavelength.
Furthermore, the driving device in the adaptive fiber collimator and the driving device of the microlens array set may be a bimorph driver, or may also be a piezoelectric stack driver, an electrostatic comb, or a voice coil motor displacement driving device.
Furthermore, the micro lens array material can be optical glass, optical crystal, various optical materials of optical plastics, including quartz, zinc selenide, germanium, calcium fluoride and sapphire, and can be optimized and manufactured through optical processing technologies such as film coating, adhesive attaching and the like. The unit lenses in the micro lens array can be hexagonal, square or circular and arranged on the substrate in a hexagonal or quadrilateral arrangement mode, the surface shape of the unit lenses of the micro lens array can be a spherical or aspheric continuous surface and a stepped binary optical surface, the group number and the structure of the micro lens array used by the micro lens array scanning unit can be a two-mirror Galileo or Kepler structure and a three-mirror field lens optimized Kepler structure, and according to the difference of the structures, the required relative motion in the micro lens array scanning unit can be generated by driving any one or more micro lens arrays in the micro lens array group.
Furthermore, the adaptive optical fiber collimator and the micro-lens array group are connected in cascade and have the same optical axis transmission type optical path structure.
Furthermore, the adaptive optical fiber collimator and the micro-lens array group can be integrated into a whole to cooperatively work, and can also be respectively used as two devices to realize cooperative work in a cascading mode.
Furthermore, two working modes of discrete addressing scanning and continuous addressing scanning can be realized according to different cooperative working modes of the adaptive fiber collimator and the micro-lens array group.
Furthermore, the system can be used for scanning light beams and receiving large-aperture light beams, so that a receiving and transmitting integrated structure is realized.
Compared with the prior art, the invention has the advantages that:
(1) a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator can realize two-dimensional large-angle continuous addressing scanning by a single device;
(2) a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator has a transmission type coaxial optical path structure, and is simple in optical path, convenient to install and modularized;
(3) a scanning system based on a micro-lens array group and a self-adaptive optical fiber collimator can be used as a large-range light beam receiving system, and a light beam receiving and transmitting integrated structure is achieved.
Drawings
Fig. 1 is a schematic structural diagram of a scanning system based on a microlens array set and an adaptive fiber collimator according to the present invention.
Fig. 2 is a schematic structural diagram of a scanning system based on a microlens array set and an adaptive fiber collimator and a schematic operating state thereof.
Fig. 3 is a schematic diagram of an alternative structure scheme and an operating state of a scanning system based on a micro-lens array group and an adaptive fiber collimator.
Fig. 4 shows that the microlens array set in the scanning system based on the microlens array set and the adaptive fiber collimator can adopt different structures, where fig. 4(a) is a galileo microstructure, fig. 4(b) is a kepler structure, and fig. 4(c) is a field-lens optimized kepler structure.
FIG. 5 is a graph showing the relationship between the scanning angle and the F/# of the microlens array unit lens in a scanning system based on a microlens array set and an adaptive fiber collimator according to the present invention.
Fig. 6 is a simulation result of scanning tracks of a discrete addressing scanning mode and a continuous addressing scanning mode of a scanning system based on a microlens array set and an adaptive fiber collimator, where fig. 6(a) is a result of scanning tracks in the discrete addressing scanning mode, and fig. 6(b) is a result of scanning tracks in the continuous addressing scanning mode.
Fig. 7 is a partial arrangement scheme of a microlens array in a scanning system based on a microlens array set and an adaptive fiber collimator according to the present invention.
FIG. 8 is a schematic diagram of a scanning system based on a microlens array set and an adaptive fiber collimator, which implements continuous addressing scanning in two steps.
In the figure: the system comprises an integrated structure 1, a self-adaptive optical fiber collimator 2, a supporting structure 3, a bimorph driver 4, a first micro-lens array 5, a connecting structure 6, a second micro-lens array 7 and a controller 8.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
The invention relates to a scanning system based on a micro-lens array group and an adaptive optical fiber collimator, which takes the adaptive optical fiber collimator as a pre-scanning device as shown in figure 2, and changes the direction of an emergent beam of the adaptive optical fiber collimator through a controller on the basis of discrete addressing scanning of the micro-lens array group to realize large-angle continuous addressing scanning. Wherein the relationship between the scanning angle of the microlens array set and the F/# of the unit lens of the microlens array is shown in FIG. 5.
The microlens array scanning unit used by the system can be designed according to specific requirements. The micro lens array material can be optical glass, optical crystal, optical plastic and other optical materials, such as quartz, zinc selenide, germanium, calcium fluoride, sapphire and the like, and can be optimized and manufactured through coating, adhesive attaching and other optical processing technologies. The shape of the unit lenses in the microlens array may be hexagonal, square, circular, and arranged on the substrate in a hexagonal or quadrangular arrangement as shown in fig. 7. The unit lens surface type of the micro lens array can be a continuous surface of a spherical surface or an aspherical surface and a stepped binary optical surface. The number and structure of the microlens array used in the microlens array set can be two-mirror Galileo or Kepler structure, three-mirror field-lens optimized Kepler structure as shown in FIG. 4, but not limited thereto. And depending on the configuration, the desired relative motion between groups of microlens arrays can be generated by driving any one or more of the microlens arrays in a group of microlens arrays as shown in fig. 3.
The implementation of continuous addressing scanning employs a unique two-step approach as shown in fig. 8, which exemplifies a cascade kepler structure for an adaptive fiber collimator. The field distribution of the system exit beam is:
wherein L is the micro-lens space, d' is the effective clear aperture of the micro-lens array unit lens, fMIs the focal length, x, of the microlens arrayMIs the relative displacement between the microlens arrays, D is the effective clear aperture of the system, fAIs fromAdapted to the focal length, x, of the lens in the fibre collimatorAIn order to adapt to the displacement of the fiber end face of the fiber collimator, λ is the wavelength, rect (-) is a rectangular function, comb (-) is a comb function.
Fourier transform of equation (1) yields the corresponding far field distribution as:
wherein k isfFor far-field normalized coordinates, sinc (·) is a sine function.
The continuous scanning process comprises the following steps: firstly, the relative position between the microlens arrays is adjusted to change the far field diffraction factor
Then changing the far field interference factor by adjusting the direction of the outgoing beam of the adaptive fiber collimator
Finally, the purpose of realizing continuous addressing and scanning is achieved.
The above analysis shows that the scanning angle is determined by the displacement of the microlens array set and the displacement of the fiber end of the adaptive fiber collimator together under the coordination of the adaptive fiber collimator
The driving device in the adaptive optical fiber collimator and the driving device of the micro lens array can be a bimorph driver, and can also be a piezoelectric stack driver, an electrostatic comb or a voice coil motor displacement driving device.
The self-adaptive optical fiber collimator and the micro-lens array group are of a cascade coaxial-axis transmission type light path structure.
The self-adaptive optical fiber collimator and the micro-lens array group can be integrated into a whole to cooperatively work, and can also be respectively used as two devices to realize cooperative work in a cascading mode.
According to different cooperative working modes of the adaptive fiber collimator and the microlens array set, two working modes of discrete addressing scanning and continuous addressing scanning can be realized as shown in fig. 6.
The system can be used for scanning light beams and receiving the light beams, so that a receiving and transmitting integrated structure is realized.
According to the structure of figure 2, the self-adaptive optical fiber collimator selects the light-transmitting caliber of 10mm and the focal length fAThe 30mm double-cemented collimating lens uses a single-mode fiber with a wavelength of 632.8nm, and the translation amount of the fiber end face on the focal plane of the collimating lens is +/-200 μm, so that the maximum inclination amount of the light beam is +/-200 μm/30mm or +/-6.6 mrad.
The microlens array scanning unit adopts a field lens optimized Kepler structure, the effective light-passing aperture is 10mm, the unit lens interval L is 400 μm, the focal length is 1.2mm, the maximum relative displacement between two groups of microlens arrays is +/-200 μm, the maximum light beam inclination generated by the microlens array group is +/-200 μm/1.2mm +/-166 mrad, when the adaptive fiber collimator and the microlens array group work cooperatively, the continuous addressing scanning angle theta is determined by the microlens array group and the adaptive fiber collimator together under the cooperation of the adaptive fiber collimator
The function of the adaptive fiber collimator is to implement addressing at any angle by adding integral phase tilt to each outgoing beam of the microlens array and modulating the relative position of far-field interference factors, thereby implementing continuous scanning, as shown in fig. 8.
Those skilled in the art will appreciate that those matters not described in detail in the present specification are well known in the art.
Claims (7)
1. A scanning system based on a micro-lens array group and an adaptive optical fiber collimator is characterized in that: the scanning system takes an adaptive fiber collimator (2) as a pre-scanning device, a first microlens array (5) in a microlens array scanning unit is fixed on a supporting structure (3) connected with an integrated structure (1), a second microlens array (7) is connected with two pairs of bimorph drivers (4) fixed on the integrated structure (1) through connecting structures (6), the voltage of the bimorph drivers (4) is controlled through a controller (8), so that the two groups of microlens arrays generate relative displacement in the direction vertical to an optical axis, the scanning direction of an emergent beam is changed, far-field discrete addressing scanning is realized, the direction of emergent light of the adaptive fiber collimator (2) is changed through the controller (8), and two-stage cooperative scanning is realized to finally realize large-angle continuous addressing scanning;
the realization of continuous addressing scanning adopts a unique two-step method, and for a self-adaptive optical fiber collimator cascade Kepler structure micro-lens array group, the field distribution of the emergent light beam of the system is as follows:
wherein L is the micro-lens space, d' is the effective clear aperture of the micro-lens array unit lens, fMIs the focal length, x, of the microlens arrayMIs the relative displacement between the microlens arrays, D is the effective clear aperture of the system, fAIs the focal length, x, of the lens in the adaptive fiber collimatorAThe displacement of the fiber end face of the self-adaptive fiber collimator is shown, wherein lambda is the wavelength, rect (-) is a rectangular function, comb (-) is a comb function;
firstly, the relative position between the microlens arrays is adjusted to change the far field diffraction factor
Then changing the far field interference factor by adjusting the direction of the outgoing beam of the adaptive fiber collimator
To realize the addressing of any position, and the corresponding one-dimensional far-field distribution is
Wherein k isfNormalizing the coordinates for the far field;
the self-adaptive optical fiber collimator selects the light-transmitting caliber of 10mm and the focal length fAThe double-cemented collimating lens with the diameter of 30mm adopts a single-mode optical fiber with the wavelength of 632.8nm, and the translation amount of the end face of the optical fiber on the focal plane of the collimating lens is +/-200 mu m, so that the maximum inclination amount of the light beam is +/-200 mu m/30mm or +/-6.6 mrad;
the microlens array scanning unit adopts a field lens optimized Kepler structure, the effective light-passing aperture is 10mm, the unit lens interval L is 400 μm, the focal length is 1.2mm, the maximum relative displacement between two groups of microlens arrays is +/-200 μm, the maximum light beam inclination generated by the microlens array group is +/-200 μm/1.2mm +/-166 mrad, when the adaptive fiber collimator and the microlens array group work cooperatively, the continuous addressing scanning angle theta is determined by the microlens array group and the adaptive fiber collimator together under the cooperation of the adaptive fiber collimator
The self-adaptive optical fiber collimator has the function of realizing addressing at any angle by adding integral phase tilt to each emergent light beam of the micro-lens array and modulating the relative position of far-field interference factors, thereby realizing continuous scanning.
2. The scanning system of claim 1 based on a microlens array set and an adaptive fiber collimator, wherein: the driving device in the adaptive optical fiber collimator and the driving device of the micro-lens array group are bimorph drivers or piezoelectric stack drivers, electrostatic combs and voice coil motor displacement driving devices.
3. The scanning system of claim 1 based on a microlens array set and an adaptive fiber collimator, wherein: the micro-lens array material can be optical glass, optical crystals, various optical materials of optical plastics, including quartz, zinc selenide, germanium, calcium fluoride and sapphire, and is optimized and manufactured through optical processing technologies such as film coating, adhesive adhering and the like; the unit lenses in the micro lens array are hexagonal, square and circular and are arranged on the substrate in a hexagonal or quadrilateral arrangement mode, the surface shapes of the unit lenses of the micro lens array are a spherical or aspherical continuous surface and a stepped binary optical surface, the group number and the structure of the micro lens array used by the micro lens array scanning unit are two-mirror Galileo or Kepler structures and three-mirror field lens optimized Kepler structures, and according to the difference of the structures, the generation of the required relative motion in the micro lens array scanning unit is realized by driving any one or more micro lens arrays in the micro lens array group.
4. The scanning system of claim 1 based on a microlens array set and an adaptive fiber collimator, wherein: the cascade connection same-optical-axis transmission type light path structure of the self-adaptive optical fiber collimator and the micro-lens array group.
5. The scanning system of claim 1 based on a microlens array set and an adaptive fiber collimator, wherein: the self-adaptive optical fiber collimator and the micro-lens array group are integrated into a whole to work in a cooperative mode, or the self-adaptive optical fiber collimator and the micro-lens array group are respectively used as two devices to realize the cooperative work in a cascading mode.
6. The scanning system based on the microlens array set and the adaptive fiber collimator as claimed in claim 1, wherein: according to the different cooperative working modes of the adaptive optical fiber collimator and the micro-lens array group, two working modes of discrete addressing scanning and continuous addressing scanning are realized.
7. The scanning system of claim 1 based on a microlens array set and an adaptive fiber collimator, wherein: the system can be used for scanning light beams and receiving large-aperture light beams, and realizes a receiving and transmitting integrated structure.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4377753A (en) * | 1981-06-01 | 1983-03-22 | Eastman Kodak Company | High resolution optical-addressing device and electronic scanner and/or printer apparatus employing such device |
| US6167169A (en) * | 1994-09-09 | 2000-12-26 | Gemfire Corporation | Scanning method and architecture for display |
| JP2012058713A (en) * | 2011-02-15 | 2012-03-22 | Dainippon Printing Co Ltd | Projection type video display device |
| WO2012170038A1 (en) * | 2011-06-10 | 2012-12-13 | Hewlett-Packard Development Company, L.P. | Optical scanning apparatus, system and method |
| CN105874662A (en) * | 2013-04-22 | 2016-08-17 | 三流明公司 | Microlenses for multibeam arrays of optoelectronic devices for high frequency operation |
| FR3049719A1 (en) * | 2016-04-04 | 2017-10-06 | Centre Nat De La Rech Scient (Cnrs) | DEVICES AND METHODS FOR TRANSPORTING AND CONTROLLING LUMINOUS BEAMS FOR ENDO-MICROSCOPIC IMAGING WITHOUT LENS |
| CN109782433A (en) * | 2019-02-26 | 2019-05-21 | 中国科学院光电技术研究所 | A kind of two-dimentional light beam scan method based on planar phased array |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6033524A (en) * | 1983-08-04 | 1985-02-20 | Matsushita Electric Ind Co Ltd | Photoscanner |
| JP2002008248A (en) * | 2000-06-21 | 2002-01-11 | Sony Corp | Optical disk, address management method thereof, and driving device for optical disk |
| JP2007298818A (en) * | 2006-05-01 | 2007-11-15 | Fuji Xerox Co Ltd | Method for driving liquid crystal device, and driving device for liquid crystal device |
| CN103092006B (en) * | 2013-01-25 | 2015-02-18 | 中国科学院上海光学精密机械研究所 | Lithography illumination system |
| CN105050475B (en) * | 2013-03-29 | 2017-10-13 | 索尼公司 | Device and Laser Scanning are observed in laser scanning |
| US9110246B2 (en) * | 2013-05-29 | 2015-08-18 | Ipg Photonics Corporation | High power spatial filter |
| AU2014354673B2 (en) * | 2013-11-27 | 2019-04-11 | Magic Leap, Inc. | Virtual and augmented reality systems and methods |
| US9921408B2 (en) * | 2016-02-26 | 2018-03-20 | Qualcomm Incorporated | Collimating light emitted by a fiber via an array of lenslets on a curved surface |
| CN109884791B (en) * | 2019-02-28 | 2020-08-25 | 中国科学院光电技术研究所 | Rapid high-precision scanning method based on rotating biprism |
-
2020
- 2020-07-24 CN CN202010722598.0A patent/CN111650745B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4377753A (en) * | 1981-06-01 | 1983-03-22 | Eastman Kodak Company | High resolution optical-addressing device and electronic scanner and/or printer apparatus employing such device |
| US6167169A (en) * | 1994-09-09 | 2000-12-26 | Gemfire Corporation | Scanning method and architecture for display |
| JP2012058713A (en) * | 2011-02-15 | 2012-03-22 | Dainippon Printing Co Ltd | Projection type video display device |
| WO2012170038A1 (en) * | 2011-06-10 | 2012-12-13 | Hewlett-Packard Development Company, L.P. | Optical scanning apparatus, system and method |
| CN105874662A (en) * | 2013-04-22 | 2016-08-17 | 三流明公司 | Microlenses for multibeam arrays of optoelectronic devices for high frequency operation |
| FR3049719A1 (en) * | 2016-04-04 | 2017-10-06 | Centre Nat De La Rech Scient (Cnrs) | DEVICES AND METHODS FOR TRANSPORTING AND CONTROLLING LUMINOUS BEAMS FOR ENDO-MICROSCOPIC IMAGING WITHOUT LENS |
| CN109782433A (en) * | 2019-02-26 | 2019-05-21 | 中国科学院光电技术研究所 | A kind of two-dimentional light beam scan method based on planar phased array |
Non-Patent Citations (1)
| Title |
|---|
| Akatay A.Design and optimization of microlens array based high resolution beam steering.《Optics express》.2007,第15卷(第8期), * |
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