CN101772721A - Optical arrangement for generating multi-beams - Google Patents
Optical arrangement for generating multi-beams Download PDFInfo
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- CN101772721A CN101772721A CN200880025684A CN200880025684A CN101772721A CN 101772721 A CN101772721 A CN 101772721A CN 200880025684 A CN200880025684 A CN 200880025684A CN 200880025684 A CN200880025684 A CN 200880025684A CN 101772721 A CN101772721 A CN 101772721A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
Abstract
The invention relates to optical arrangements by which a radiation field is grouped or split into a multiplicity of beams. In one group of optical arrangements, the radiation field is split sequentially by beam splitters arranged in succession. In the other group of optical arrangements, the radiation field is grouped and split by the edges or corners of arrays of optical components, such as lenses and/or mirrors, in cross section. The beams thus generated are used for parallel applications such as drilling, cutting, eroding, coating removal and structuring.
Description
Technical field
What the present invention relates to is to utilize a cover optical module to produce the method for multichannel light beam.
Background technology
Materialbearbeitung mit Laserlicht is more and more important in modern production technology.Utilize laser beam that processing work is processed.Linear axis and (or) scanner is used to laser beam is located.In order to reach axle or the scanner that high efficiency just must adopt high speed.In order to reach at a high speed, positioning unit not only must have very outstanding acceleration capacity, possesses very high precision again to satisfy little processing requirements of one's work simultaneously.This causes the complicated and difficult of device fabrication.In addition, owing to want frequent acceleration and braking, positioning unit also can consume a lot of energy.The result can bring high operating cost.
Summary of the invention
Purpose of the present invention is exactly for fear of the problems referred to above.Solution is exactly to produce multiple laser by optical module and come concurrent working.
What the present invention relates to is the multiple laser concurrent working.Under identical work efficiency, can correspondingly reduce the acceleration of positioning unit, thereby make the machinery of equipment require remarkable decline is all arranged with energy consumption.
Advantage optical devices example of the present invention is described in detail by claim.Principal feature of the present invention can be set forth by following drawing.
Description of drawings
Fig. 1: diagram is optical devices that utilize beam splitter to carry out the order beam split to a beam field,
Fig. 2 a: optical devices that utilize wave plate and birefringence shift element to carry out beam split,
Fig. 2 b: utilize wave plate and birefringent prism light-dividing device.
Fig. 3: adopt the light-dividing device of lens arra,
Fig. 4: on Fig. 3 basis, add the light-dividing device of imaging lens,
Fig. 5: adopt the light-dividing device of fiber array,
Fig. 6: on Fig. 5 basis, add the light-dividing device of imaging camera lens again,
Fig. 7: utilize the light-dividing device of reflecting element beam split,
Fig. 8: reflecting element among Fig. 7 is changed into light-dividing device behind the prism,
Fig. 9: on Fig. 8 basis, added the light-dividing device of condenser lens,
Figure 10: on Fig. 8 basis, added the light-dividing device of imaging lens,
Figure 11: on Fig. 8 basis, added the light-dividing device of the telescopical imaging lens of double lens,
Figure 12: the figure of the line spot that slab laser produces,
Figure 13: the two-dimentional uniform strength distribution hot spot figure of actual photographed,
Figure 14: Gaussian beam light spot energy distribution plan,
Figure 15: 1/2nd wave plates, be used for covering half light beam approximately,
Figure 16: the stack light beam synoptic diagram that two bundles are produced by two birefringent prisms,
Figure 17 a: by birefringent prism two the bundle divided beams the surface of intensity distribution,
Figure 17 b: the total surface of intensity distribution after the two bundle divided beams stacks;
Figure 18: by one 1/2nd wave plate and the device that the polarization beam splitting element is formed,
Figure 19: by one 1/2nd wave plate and the device that birefringence translation light beam stack element is formed.
Embodiment
Fig. 1 is used for beam field is carried out order optics light-dividing device synoptic diagram.Beam field 1 is divided into two bundles by first beam splitter 63.This 2 bundle light is again respectively by 63 beam split of other beam splitter (deflecting mirror 41 is used for light beam is carried out deflection).The 4 bundle light that indicated as sign 11 among the figure have just been generated thus.Can at application-specific, export the light beam of similar and different power/energy as required.
Fig. 2 a has shown another kind of optics light-dividing device.In this device, the polarization state of incident beam field is specifically controlled by wave plate 71.Subsequently be birefringence shift element 62.Beam field 1 is polarized after by birefringence translation device 62 and is divided into two bundles.The polarization of this two-beam is changed by wave plate subsequently.After subsequently birefringence shift element 62 is come out again, totally four bundle light 11 have just been generated.
The polarization spectro mode of beam field also can be finished (referring to Fig. 2 b) by the prism 64,65 that the crystal that the birefringence function is arranged is made.
The element of same numeral can be applied mechanically mutually in the respective element in the difference diagram in the diagram.Equally, be associated accordingly or use can be applied mechanically and change to equivalent assembly also mutually in each diagram.
After beam field can also being coupled into optical fiber, utilize optical fiber to carry out beam split.The power of beam field or energy can be conducted into 2 optical fiber by Y type path, thereby reach spectrophotometric result.By parity of reasoning, and the power of the light beam of telling or energy can continue to carry out in the same manner beam split, thereby obtain 4 bundle light, so that more.
One of them selection is that a lot of optical fiber are linked to each other with an input optical fibre, and power or the energy with a beam field is divided into a lot of light beams in this way.
Another application relevant with optical fiber is that beam split generates a linear beam field or multi-beam thus by the diffraction that is engraved in optical grating construction in the optical fiber.
The use that also can mutually combine of above-mentioned two kinds of fiber optic applications modes.
Beam field is carried out beam split also can use one or more diffraction optical elements to realize.
Fig. 3 has shown a device that utilizes 46 pairs of beam field of lens arra 3 to carry out beam split.Beam field 3 is expanded by beam split on cross-wise direction.Lens arra 46 is divided into a lot of sections with beam field 3 in cross-wise direction, every section corresponding output beam 6 that generates.
Beam array or beam field that output light 6 is formed can directly be used, such as being used for parallel materials processing.Can carry out flexible to the output optical arrays after adding imaging lens 47,, make accurately location (referring to Fig. 4) on workpiece of independent light beam 4 as operating distance.Often use a telecentric imaging unit or telescope in practice.
The another kind of method that improves dirigibility is that single beam is coupled into optical fiber 45, by its guiding workpiece (referring to Fig. 5).In application, can little hot spot be projected (referring to Fig. 6) on the workpiece with optical fiber.As seen, every bundle can be throwed on workpiece respectively by the light of fiber optic conduction.
Shown in Figure 7, beam field 3 also can be cut apart by reflecting element.For example use the reflective mirror 42 of a plurality of discrete arrangements, beam field 3 is divided into groups on cross-wise direction and form multi beam output beam 8.In this device,, can regulate as required the beam separation that is partitioned into, and be variable by the catoptron of stepped arrangement.
Shown in Figure 8, be that reflective mirror among Fig. 7 42 is replaced by prism 43.
Shown in Figure 9, output beam 8 is transformed into output beam 9 by a lens devices, perhaps focuses on the workpiece.
Shown in Figure 10, it is feasible that output beam 8 is transformed into the light beam 2 that can carry out concurrent working by an optical element.
What Figure 11 showed is to utilize two lens 16 and 17 telescopes that constitute as imaging device (a kind of reconstruction of image optical element).
The power of every Shu Guang or energy can be identical or different.Each beam sizes is equated or do not wait by being provided with of imaging or focusing optical element.
Can utilize the differential declines rate and (or) the coating sheet modulates the power and the energy of light beam.Also can utilize some polarization components,, the power or the energy of light beam be modulated as wave plate, polarizing beam splitter, polaroid, birefringence shift element.
The advantage that beam field is carried out cutting apart on the cross-wise direction is that the light beam that scioptics, reflective mirror or prism array are told is easy to form the hot spot that uniform strength distributes.
The hot spot picture is a kind of linear or rectangular light beam field 51 among Figure 12.Along the rectangle long side direction, energy distributions is (distribution of carnival hat formula) uniformly.In another direction or Gaussian distribution, or uniform strength distributes, and multimode distributes.This light beam can be that the laser instrument of rectangle produces by the laser medium cross section, as slab laser.
Figure 13 is that a cross section is rectangle or foursquare hot spot (52), and its light distribution is even, and this hot spot helps the formation of two-dimentional light beam array.This light beam can be rectangle or foursquare thin-sheet laser or fiber laser generation by the cross section.
Uniform strength distribute can by an integration optical element and (or) lens arra and (or) the prism array produces.Non-spherical lens and (or) catoptron also can be used to produce the light beam that uniform strength distributes.The beam quality M2 of uniform strength distribution light beam is usually in 10 scopes.
Light beam used in many application needs higher beam quality.Therefore, we recommend to utilize by Gaussian beam, the equally distributed light beam of intensity that wave plate and polarizer produce.
Shown in Figure 14 is the light distribution of Gaussian beam, and this Gaussian beam is a linear polarization.
Figure 15 and Figure 16 are the synoptic diagram that adds in light path behind λ/2 wave plates (7).The light wave of wherein making an appointment with half is by λ/2 wave plates (referring to Figure 15).Like this, light beam is divided into two parts light beam.Pass 90 ° of the polarization direction deflections of that part of light beam of λ/2 wave plates (7), the polarization direction of another part light beam is then constant.The light beam polarization direction uses ⊙ to meet expression (referring to Figure 15 and Figure 16) with ↑ two kinds respectively.Wave plate can be installed on the turntable, in order to adjust the polarization direction of light beam.Also can change the polarization direction by using polarization rotator.This two parts light beam can superpose in the space under the prerequisite that does not have the beam quality loss, thereby obtains the equally distributed light beam of intensity (referring to Figure 16).Two parts light beam 56,57 has ↑ with two different polarization directions of ⊙, they produce different refractions by birefringent prism 26 backs, make intensity obtain stack after the space overlaps.In 56, the 57 parallel stacks of second birefringent prism, 26 back two parts light beams (a) referring to Figure 17.Thereby obtain the best in quality and the uniform light beam of intensity distributions.
Part light beam translation is decided by distance between two birefringent prisms. can make a part of light beam translation reach optimum value by adjusting between two birefringent prisms distance--and 1.06 times of-Gaussian beam radius.Because the two-beam polarization direction is vertical mutually,, and do not produce interference (referring to the curve 56,57 and 58 among Figure 17 a and Figure 17 b) so this two parts light beam light is the intensity stack.The intensity modulated of He Cheng light beam is less than 4% thus.
In addition, by adjusting two parts beam separation, can produce light distribution on request, for example higher or middle higher light distribution in edge with certain degree of modulation.
The equally distributed beam cross section of light intensity can amplify and dwindle, or utilize lens array and (or) the catoptron array is divided into multi-beam or organizes light beam more.
Figure 18 is optical devices of the present invention.Polarizer or polarising means 23 have two plane of polarizations 91 and 92.Light beam 81 is polarized face 92 and reflexes to downwards on the plane of polarization 91 earlier.Light beam 81 is polarized face 91 reflection identical with the direction of propagation of the light beam 82 and coaxial stacks in back.Two-beam has just become coaxial directional light like this.
Used birefringence translation device 61 among Figure 19.Linear polarized beam forms the orthogonal light beam 81,82 in two parts polarization direction by λ/2 wave plates, 7 backs.Two parts light beam passes birefringence translation device 61.Then, two parts beam propagation is identical.The overlapping of the cross section of two-beam determined by the length of birefringence translation device 61 along direction of beam propagation.Because two parts light beam polarization direction is vertical mutually,, and do not produce interference so this two parts light beam light is the intensity stack.The intensity of corresponding synthetic output light 36,37,78 be two parts beam intensity and; The stack intensity distributions is shown in Figure 17 b.The field intensity of so just having avoided being caused by interference is modulated.By selecting the length of birefringence translation device, can obtain needed synthetic light beam field strength distribution.
Here said beam field can be that the light hole of square or rectangle obtains by the cross section also.This class scheme is accompanied by power attenuation all the time.
The cross section is that the lossless light beam of square or rectangle can produce by slab laser on ground.This laser instrument has the amplification medium that the cross section is square or rectangle.Utilizing pump beam that sheet medium is carried out the slab laser of pumping can be with generating the light beam with square or rectangle amplification region.The cross section is that square or rectangular light beam also can be produced by thin-sheet laser.Can make the amplification medium gain region cross section of thin-sheet laser by suitable design pumping configuration is square or rectangle.
Utilize the gain region cross section to be rectangle or foursquare light beam for rectangle or foursquare fiber laser also can obtain the cross section.
A lot of large-area products as flat-panel monitor and photovoltaic module, have the electrode or the insulator of the same structure that much is arranged in parallel.For the production of this series products, the present invention has remarkable advantages, for example rules on thin-film solar module, manufactures electrode structure on solar panel, punches on silicon chip, makes electrode, or the like.With respect to the equipment of only exporting a branch of light, rate request, machinery that the present invention greatly reduces the equipment moving part require and wearing and tearing.Simultaneously, the present invention has reduced power consumption and production cost.
The above optics is used to beam field is made up or beam split.Beam field is carried out beam split by the tactic spectroscope in one group of optical module.Another the group optical module utilize the wherein stupefied and angle of array of optical elements, as lens and (or) reflective mirror, make up and beam split in cross-wise direction.The beam bundles of Chan Shenging is used to parallel processing in this way, as punching, shear, cut, peel off and modeling.
Claims (according to the modification of the 19th of treaty)
1. be used for being undertaken by the beam field that one or more laser instrument produces the optical devices of material processed, it is made up of optical element, it is characterized in that beam field (1,3) optical element (63,64,66,45 by discrete setting, 42,43) be divided into two-beam (11,6 at least, 4,5,8,9,2,37, parallel material processed of carrying out when 36,78), these light beams are used to need to use two-beam at least.
2. according to the optical devices of claim 1, it is characterized in that the optical element of discrete setting is made up of wave plate (7) and polarizer.
3. according to the optical devices of claim 1, it is characterized in that beam field cross section (1,3) is by the corner angle and the periphery (63,64,66,45 of the optical element of discrete setting, 42,43) spatially be divided into two groups at least, constitute two-beam (11,6,4,5 at least thus, 8,9,2,37,36,78).
4. according to the optical devices of claim 3, it is characterized in that the optical element of discrete setting constitutes the lens arra (63,64,66 of an one dimension or bidimensional, 45,42,43), Li San optical element forms (63,64 by one dimension or two-dimensional lens array, 66,45,42,43).
5. according to the optical devices of claim 3, it is characterized in that the optical element of discrete setting constitutes the prism array (64,66,43,26) of an one dimension or bidimensional.
6. according to the optical devices of claim 3, it is characterized in that the optical element of discrete setting constitutes the reflection mirror array (63,42) of an one dimension or bidimensional.
7. according to each optical devices in the claim 3 to 5, it is characterized in that light beam is coupled one by one with waveguide respectively, these waveguides constitute the waveguide array (45) of one dimensions or bidimensional.
8. according to the optical devices of claim 7, it is characterized in that the xsect of waveguide (45) is rectangle basically.
9. according to the optical devices of claim 7, it is characterized in that waveguide array contains the thin glass sheet of portraying structure by a slice and constitutes.
10. according to the optical devices of claim 9, it is characterized in that waveguide array is scribed by thermomechanometry, thermophotometry, electroopitical method, magneto-optical method or use beam of laser and formed.
11. the optical devices according to claim 7 is characterized in that, it is circular that the xsect of waveguide (45) is essentially.
12., it is characterized in that beam field (1,3) is produced by a lasing light emitter according to each optical devices in the claim 1 to 11.
13., it is characterized in that beam field (1,3) constitutes by the stack of two lasing light emitters at least according to each optical devices in the claim 1 to 11.
14. the optical devices according to claim 13 is characterized in that, lasing light emitter (1,3) has different polarizations at least in part.
15. the optical devices according to claim 13 is characterized in that, lasing light emitter has different wave length at least in part.
16., it is characterized in that light source is a slab laser, or light sources is a plurality of slab lasers according to each optical devices in the claim 1 to 15.
17. according to each optical devices in the claim 1 to 16, it is characterized in that the intensity distributions of beam field (1,3) is essentially rectangle, its intensity is approximate to distribute along a direction equably.
18. according to each optical devices in the claim 1 to 16, it is characterized in that the intensity distributions of beam field (1,3) is essentially rectangle, its intensity is approximate in two directions to distribute equably.
19., it is characterized in that beam field (1,3) cross section is circular according to each optical devices in the claim 1 to 16, its intensity distributions evenly distributes for approximate.
20. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more lens arras.
21. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more prism arrays.
22. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more reflection mirror arrays.
23. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by at least one non-spherical lens or a catoptron.
24., it is characterized in that uniform strength distributes (52) by one or more planar alignment according to each optical devices in the claim 17 to 19, or have the square-section, or the waveguide with round section produces.
25. according to each optical devices in the claim 16 to 19, it is characterized in that, uniform strength distributes (52) by λ/2 wave plates (7) and a polarising means (23) generation, λ/2 wave plates (7) see through about half light beam and make the polarization direction half-twist, and two parts of light field are superposeed by polarising means (23) subsequently.
26., it is characterized in that the single beam bundle is imaged onto on one or more workpiece by an optical element (47,16,17) according to each optical devices in the claim 1 to 25.
27. the optical devices according to claim 26 is characterized in that, optical element is a telecentric imaging camera lens (16,17).
28., it is characterized in that every light beams is focused on and imaging by an optical element that is provided with for its according to each optical devices in the claim 1 to 25.
29. according to each optical devices in the claim 26 to 28, it is characterized in that imaging lens so designs, making the spot intensity that arrives on the workpiece is even distribution (52) at least in one direction.
Claims (29)
1. produce the optical devices of multichannel light beam, it is characterized in that, use beam field (1,3), tell two light beams (11,6,4,5,8,9,2,37,36,78) at least by discrete optical element (63,64,66,45,42,43).
2. according to the optical devices of claim 1, it is characterized in that discrete optical element is made up of wave plate (7) and polarizer.
3. according to the optical devices of claim 1, it is characterized in that beam field cross section (1,3) is by the stupefied or angle (63,64,66 of discrete optical element, 45,42,43) spatially be divided into two groups at least and also tell two light beams (11,6,4,5 thus, 8,9,2,37,36,78).
4. according to the optical devices of claim 3, it is characterized in that discrete optical element is formed (63,64,66,45,42,43) by one dimension or two-dimensional lens array.
5. according to the optical devices of claim 3, it is characterized in that discrete optical element is formed (64,66,43,26) by one dimension or two-dimentional prism array.
6. according to the optical devices of claim 3, it is characterized in that discrete optical element is formed (63,42) by one dimension or two-dimentional reflection mirror array.
7. according to each optical devices in the claim 3 to 5, it is characterized in that every bundle is optically coupled into a corresponding optical fiber (45) and these optical fiber is formed one dimension or 2-D optical fibre array.
8. according to the optical devices of claim 7, it is characterized in that the xsect of optical fiber (45) is approximately square.
9. according to the optical devices of claim 7, it is characterized in that fiber array contains the thin glass sheet of portraying structure by a slice and constitutes.
10. according to the optical devices of claim 9, it is characterized in that fiber array is to scribe by thermomechanometry, thermoptometry, electron optics method, magnetooptics method or use laser beam to form.
11. the optical devices according to claim 7 is characterized in that, it is circular that the xsect of optical fiber (45) is approximately.
12., it is characterized in that beam field (1,3) is produced by a lasing light emitter according to each optical devices in the claim 1 to 11.
13., it is characterized in that beam field (1,3) is formed by stacking by two light beams at least according to each optical devices in the claim 1 to 11.
14. the optical devices according to claim 13 is characterized in that, beam field (1,3) has different polarizations at least in part.
15. the optical devices according to claim 13 is characterized in that, lasing light emitter has different wave length at least in part.
16., it is characterized in that lasing light emitter (group) is a slab laser according to each optical devices in the claim 1 to 15.
17. according to each optical devices in the claim 1 to 16, it is characterized in that beam field (1,3) has a rectangular cross section (52), its intensity is approximate to distribute along a direction equably.
18. according to each optical devices in the claim 1 to 16, it is characterized in that beam field (1,3) has a rectangular cross section (52), its intensity is approximate in two directions to distribute equably.
19., it is characterized in that beam field (1,3) cross section is circular according to each optical devices in the claim 1 to 16, its intensity distributions evenly distributes for approximate.
20. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more lens arras.
21. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more prism arrays.
22. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by one or more reflection mirror arrays.
23. according to each optical devices in the claim 17 to 19, it is characterized in that, uniform strength distribute (52) produce by a non-spherical lens or a reflection mirror array.
24., it is characterized in that the distribute optical fiber of (52) or round section square of uniform strength according to each optical devices in the claim 17 to 19 by having of one or more planar alignment.
25. according to each optical devices in the claim 16 to 19, it is characterized in that, uniform strength distributes (52) by λ/2 wave plates (7) and a polarising means (23) generation, λ/2 wave plates (7) see through about half light beam and make the polarization direction half-twist, and two parts beam field is superposeed by polarising means (23) subsequently.
26., it is characterized in that the single beam bundle is imaged onto on one or more workpiece by an optical element (47,16,17) according to each optical devices in the claim 1 to 25.
27. the optical devices according to claim 26 is characterized in that, optical element is a telecentric imaging camera lens (16,17).
28., it is characterized in that every light beams is focused on or imaging by the optical element of distributing to it according to each optical devices in the claim 1 to 25.
29. according to each optical devices in the claim 26 to 28, it is characterized in that imaging lens so designs, making hot spot field strength distribution on the guiding workpiece is uniform strength distribute (52) at least in one direction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007034554.4 | 2007-07-21 | ||
| DE102007034554 | 2007-07-21 | ||
| PCT/EP2008/005769 WO2009012913A1 (en) | 2007-07-21 | 2008-07-15 | Optical arrangement for generating multi-beams |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101772721A true CN101772721A (en) | 2010-07-07 |
Family
ID=39967936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880025684A Pending CN101772721A (en) | 2007-07-21 | 2008-07-15 | Optical arrangement for generating multi-beams |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN101772721A (en) |
| DE (1) | DE112008001873A5 (en) |
| WO (1) | WO2009012913A1 (en) |
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- 2008-07-15 DE DE112008001873T patent/DE112008001873A5/en not_active Withdrawn
- 2008-07-15 CN CN200880025684A patent/CN101772721A/en active Pending
- 2008-07-15 WO PCT/EP2008/005769 patent/WO2009012913A1/en active Application Filing
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| CN107855642A (en) * | 2017-12-07 | 2018-03-30 | 英诺激光科技股份有限公司 | A kind of light-dividing device |
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| CN115609162A (en) * | 2022-12-19 | 2023-01-17 | 扬州艾镭激光设备有限公司 | Automatic height-adjusting type laser marking machine |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE112008001873A5 (en) | 2010-06-10 |
| WO2009012913A4 (en) | 2009-04-02 |
| WO2009012913A1 (en) | 2009-01-29 |
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