CN105005149A - Apparatus for carrying out light splitting on linear polarization laser and marking control - Google Patents
Apparatus for carrying out light splitting on linear polarization laser and marking control Download PDFInfo
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- CN105005149A CN105005149A CN201510483937.3A CN201510483937A CN105005149A CN 105005149 A CN105005149 A CN 105005149A CN 201510483937 A CN201510483937 A CN 201510483937A CN 105005149 A CN105005149 A CN 105005149A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
Abstract
The invention, which is suitable for the processing field of the laser technology, provides an apparatus for carrying out light splitting on linear polarization laser and marking control. The apparatus comprises a laser, laser polarization direction adjustment half wave plates, polarization splitting prisms, and optical branches. The laser polarization direction adjustment half wave plates corresponding to the polarization splitting prisms are arranged in front of all polarization splitting prisms; and n laser polarization direction adjustment half wave plates are arranged in front of n polarization splitting prisms. All polarization splitting prisms split polarized laser emitted by the laser into two beams of light; angles between the corresponding laser polarization direction adjustment half wave plate optical axes and the light polarization directions are adjusted to control the proportion of the two beams of laser; and marking control is carried out on the n+1 beams of light split by the n polarization splitting prisms by the n+1 optical branches. The polarization splitting prisms are used for carrying out light splitting on the linear polarization laser beam; and the number of the light beams can be controlled flexibly according to actual demands; and one half wave plate is placed in front of each polarization splitting prism to adjust the polarization direction of the polarized light, thereby realizing continuous adjustment of the power of each beam of laser.
Description
Technical field
The invention belongs to laser technology manufacture field, particularly relate to and a kind ofly carry out respectively controlling the device of mark to linearly polarized laser light splitting.
Background technology
The increasing extent of Laser Processing is wide, and technique is also more and more perfect, and the quality of processing is also become better and better, and this makes Laser Processing more and more be subject to the great attention of all trades and professions as the manufacturing process of a kind of advanced person.
Laser instrument unit power construction cost reduces with the lifting of power, so carry out to laser instrument the cost that light splitting can reduce integral device.
Generally become by glasses lens plated the object that half-reflecting half mirror realizes light splitting to the light splitting of laser, such light splitting means are subject to the adjustment that cannot realize now the power proportions of light splitting of plated film lens, and this just makes the consistance of crudy poor.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of and carries out controlling the device of mark respectively to linearly polarized laser light splitting, to solve the adjustable problem of the power proportions that cannot realize light splitting in the light splitting of prior art laser.
The embodiment of the present invention is achieved in that a kind ofly carries out controlling the device of mark to linearly polarized laser light splitting respectively, and described device comprises: laser instrument, laser polarization direction regulate half-wave plate, polarization splitting prism and light splitting branch road;
Be provided with the laser polarization direction corresponding with it before polarization splitting prism described in each and regulate half-wave plate, be provided with altogether n described laser polarization direction before n described polarization splitting prism and regulate half-wave plate; The polarization laser that described laser instrument sends is divided into two bundles by polarization splitting prism described in each, regulates the Angle ambiguity two of half-wave plate optical axis and light polarization direction to restraint the ratio of laser by the described laser polarization direction adjusting its correspondence;
The n+1 that the individual described polarization splitting prism of n is divided into restraints light and carries out control mark respectively by n+1 described light splitting branch road.
Further, described light splitting branch road comprise connect successively laser polarization direction adjustment half-wave plate, be inverted beam expanding lens, acoustooptic modulation module, beam expanding lens, 1/4 slide and 3D vibration mirror scanning module;
By adjusting the direction of described laser polarization direction adjustment half-wave plate, the polarization direction that laser polarization direction and described acoustooptic modulation module are needed matches;
Described inversion beam expanding lens carries out contracting bundle to described polarization laser;
By adjusting the frequency of the modulation signal of described controlled by sound and light module, control switch light and the Energy transmission size of described polarization laser;
Described beam expanding lens expands described polarization laser;
The polarization state of described polarization laser is become circular polarization state light beam from linear polarization by described quarter wave plate;
Described 3D vibration mirror scanning module utilizes described circular polarization state laser to process workpiece.
Further, the number of described polarization splitting prism is 3, and be all provided with a described laser polarization direction before described polarization splitting prism and regulate half-wave plate, one has 3;
After first laser polarization direction regulates the polarization direction of half-wave plate to laser to regulate, described polarized light is divided into two bundles by the first polarization splitting prism being 45 ° with horizontal plane angle, the polarization state of two-beam is respectively P and S, and direction is respectively horizontal direction and direction straight down;
A branch of polarized light through the horizontal direction of described first polarization splitting prism regulates after half-wave plate carries out the adjustment of polarization direction through the second laser polarization direction, by being 45 ° with horizontal plane angle, the second polarization splitting prism is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down;
A branch of polarized light through the direction straight down of described first polarization splitting prism regulates after half-wave plate carries out the adjustment of polarization direction through the 3rd laser polarization direction, by being 45 ° with horizontal plane angle, the 3rd polarization splitting prism is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down.
Further, described laser instrument and described first laser polarization direction regulate to have between half-wave plate and to be the first catoptrons and the second catoptron that 45 ° of height arrange with horizontal plane angle;
Described first catoptron and the described direction of propagation of the second catoptron to the polarized light of the horizontal direction that described laser instrument sends regulate.
Further, the polarized light through the described horizontal direction of described second polarization splitting prism carries out control mark by the first light splitting branch road;
Through described in described second polarization splitting prism straight down the polarized light in direction carry out control mark by the second light splitting branch road;
Through described in described 3rd polarization splitting prism straight down the polarized light of direction horizontal direction carry out control mark by the 3rd light splitting branch road;
Polarized light through the described horizontal direction of described 3rd polarization splitting prism carries out control mark by the 4th light splitting branch road.
Further, described first light splitting branch road and described 4th light splitting branch road also comprise with horizontal plane angle is the 3rd catoptron of 45 °;
Described polarization splitting prism and described laser polarization direction adjustment half-wave plate be separately positioned on the 3rd catoptron horizontal side and immediately below, from described polarization splitting prism through described polarized light through described 3rd catoptron reflection after enter straight down described laser polarization direction adjustment half-wave plate.
Further, described in each, light splitting branch road also comprises: highly identical the 4th catoptron and the 5th catoptron being 45 ° with horizontal plane angle;
Described 4th catoptron and described 5th catoptron are arranged between described inversion beam expanding lens and described acoustooptic modulation module, described 4th catoptron and the described direction of propagation of 5th catoptron to the polarized light through described inversion beam expanding lens adjust, and the angle making it to need with described acoustooptic modulation module matches.
The embodiment of the present invention provide a kind of to linearly polarized laser light splitting and the beneficial effect of device carrying out controlling mark respectively comprise:
Adopt polarization splitting prism to linearly polarized laser Shu Jinhang light splitting, in the light beam separated, add polarization splitting prism again can control number of beams according to the actual requirements flexibly; Place a half-wave plate before each Amici prism for regulating the polarization direction of polarized light, realize the power continuously adjustabe to every Shu Jiguang, what accurately can control every Shu Jiguang goes out luminous energy; Simultaneously, by arrange regulate acoustooptic modulation module to carry out switch light to independent beam of laser or control out luminous energy and then do not affect other Shu Jiguang go out luminous energy, any road light beam and 3d galvanometer of going the same way coordinate all can independent graphics processing, and each branch light path does not interfere with each other.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is that a kind of that the embodiment of the present invention provides carries out controlling the structural representation of device of mark respectively to linearly polarized laser light splitting;
Wherein, 1 is laser instrument, 2 is the first catoptron, 3 is the second catoptron, 4 is that the first laser polarization direction regulates half-wave plate, 5 is the first polarization splitting prism, 6 is that the second laser polarization direction regulates half-wave plate, 7 is the second polarization splitting prism, 8 is the 3rd catoptron, 9 is the first laser polarization direction adjustment half-wave plate, 10 is the first inversion beam expanding lens, 11 is the 4th catoptron, 12 is the 5th catoptron, 13 is first sound optical modulator module, 14 is the first beam expanding lens, 15 is the one 1/4 slide, 16 is a 3D vibration mirror scanning module, 17 is the second laser polarization direction adjustment half-wave plate, 18 is the second inversion beam expanding lens, 19 is the 6th catoptron, 20 is the 7th catoptron, 21 is second sound optical modulator module, 22 is the second beam expanding lens, 23 is the 2 1/4 slide, 24 is the 2nd 3D vibration mirror scanning module, 25 is that the 3rd laser polarization direction regulates half-wave plate, 26 is the 3rd polarization splitting prism, 27 is the 3rd laser polarization direction adjustment half-wave plate, 28 is the 3rd inversion beam expanding lens, 29 is the 8th catoptron, 30 is the 9th catoptron, 31 is the 3rd acoustooptic modulation module, 32 is the 3rd beam expanding lens, 33 is the 3 1/4 slide, 34 is the 3rd 3D vibration mirror scanning module, 35 is the tenth catoptron, 36 is the 4th laser polarization direction adjustment half-wave plate, 37 is the 4th inversion beam expanding lens, 38 is the 11 catoptron, 39 is the tenth two-mirror, 40 is fourth sound optical modulator module, 41 is the 4th beam expanding lens, 42 is the 4 1/4 slide, 43 is the 4th 3D vibration mirror scanning module.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
In order to technical solutions according to the invention are described, be described below by specific embodiment.
What the embodiment of the present invention provided a kind ofly carries out controlling the device of mark to linearly polarized laser light splitting respectively, comprising:
Laser instrument, laser polarization direction regulate half-wave plate, polarization splitting prism and light splitting branch road.
Be provided with the laser polarization direction corresponding with it before each polarization splitting prism and regulate half-wave plate, be provided with altogether n laser polarization direction before n polarization splitting prism and regulate half-wave plate, n is positive integer.
The polarization laser that laser instrument sends by each polarization splitting prism is divided into two bundles, regulates the Angle ambiguity two of half-wave plate optical axis and light polarization direction to restraint the ratio of laser by the laser polarization direction adjusting its correspondence.
The n+1 that n polarization splitting prism is divided into restraints light and carries out control mark respectively by n+1 light splitting branch road.
Further, light splitting branch road comprise connect successively laser polarization direction adjustment half-wave plate, be inverted beam expanding lens, acoustooptic modulation module, beam expanding lens, 1/4 slide and 3D vibration mirror scanning module.
By the direction of adjustment laser polarization direction adjustment half-wave plate, the polarization direction that laser polarization direction and acoustooptic modulation module are needed matches; Be inverted beam expanding lens and contracting bundle is carried out to polarization laser; By the frequency of the modulation signal of adjustment controlled by sound and light module, control switch light and the Energy transmission size of polarization laser; Beam expanding lens expands polarization laser; The polarization state of polarization laser is become circular polarization state light beam from linear polarization by quarter wave plate; 3D vibration mirror scanning module utilizes this circular polarization state laser to process workpiece.
What the embodiment of the present invention provided a kind ofly carries out controlling the device of mark to linearly polarized laser light splitting respectively, adopt polarization splitting prism to linearly polarized laser Shu Jinhang light splitting, in the light beam separated, add polarization splitting prism again can control number of beams according to the actual requirements flexibly; Place a half-wave plate before each Amici prism for regulating the polarization direction of polarized light, realize the power continuously adjustabe to every Shu Jiguang, what accurately can control every Shu Jiguang goes out luminous energy; Simultaneously, by arrange regulate acoustooptic modulation module to carry out switch light to independent beam of laser or control out luminous energy and then do not affect other Shu Jiguang go out luminous energy, any road light beam and 3d galvanometer of going the same way coordinate all can independent graphics processing, and each branch light path does not interfere with each other.
Embodiment one
Be illustrated in figure 1 and provided by the inventionly a kind of the structural representation of embodiment one of the device controlling mark carry out respectively to linearly polarized laser light splitting, as shown in Figure 1, provided by the inventionly carry out in the embodiment of the device controlling mark respectively to linearly polarized laser light splitting: laser polarization direction regulates the number of half-wave plate and polarization splitting prism to be 3.
Have between laser instrument 1 and the first laser polarization direction adjustment half-wave plate 4 and be 45 ° of first catoptron 2 and second catoptrons 3 just arranged with horizontal plane angle.The direction of propagation of the polarized light of the horizontal direction that the first catoptron 2 and the second catoptron 3 pairs of laser instruments 1 send regulates, after first laser polarization direction regulates the polarization direction of half-wave plate 4 pairs of laser to regulate, polarized light is divided into two bundles by the first polarization splitting prism 5 being 45 ° with horizontal plane angle, the polarization state of two-beam is respectively P and S, and direction is respectively horizontal direction and direction straight down.
A branch of polarized light P through the horizontal direction of the first polarization splitting prism 5 regulates after half-wave plate 6 carries out the adjustment of polarization direction through the second laser polarization direction, by being 45 ° with horizontal plane angle, the second polarization splitting prism 7 is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down.Polarized light through the horizontal direction of the second polarization splitting prism 7 carries out control mark by the first light splitting branch road, and the polarized light through the direction straight down of the second polarization splitting prism 7 carries out control mark by the second light splitting branch road.
A branch of polarized light S through the direction straight down of the first polarization splitting prism 5 regulates after half-wave plate 25 carries out the adjustment of polarization direction through the 3rd laser polarization direction, by being 45 ° with horizontal plane angle, the 3rd polarization splitting prism 26 is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down.Polarized light through the horizontal direction of direction straight down of the 3rd polarization splitting prism 26 carries out control mark by the 3rd light splitting branch road, and the polarized light through the horizontal direction of the 3rd polarization splitting prism 26 carries out control mark by the 4th light splitting branch road.
Four bundle polarization states are linearly polarized light.This four bundles polarized light carries out control mark respectively by four light splitting branch roads.
As shown in Figure 1, the first light splitting branch road comprises: the first laser polarization direction adjustment half-wave plate 9, first connected successively is from top to bottom inverted beam expanding lens 10, first sound optical modulator module 13, first beam expanding lens the 14, the 1 slide 15 and a 3D vibration mirror scanning module 16.
Further, this first light splitting branch road also comprises the 3rd catoptron 8, the 4th catoptron 11 and the 5th catoptron 12 that to be 45 ° with horizontal plane angle.
Second polarization splitting prism 7 and the first laser polarization direction adjustment half-wave plate 9 be separately positioned on the 3rd catoptron 8 horizontal side and immediately below, from the second polarization splitting prism 7 through polarized light through the 3rd catoptron 8 reflect after enter straight down first laser polarization direction adjustment half-wave plate 9.
4th catoptron 11 is highly identical with the 5th catoptron 12, be arranged between the first inversion beam expanding lens 10 and first sound optical modulator module 13,4th catoptron 11 and the 5th catoptron 12 adjust the direction of propagation of being inverted the polarized light of beam expanding lens 10 through first, and the angle making it to need with first sound optical modulator module 13 matches.
Second light splitting branch road comprises: the second laser polarization direction adjustment half-wave plate 17, second connected successively is from top to bottom inverted beam expanding lens 18, second sound optical modulator module 21, second beam expanding lens the 22, the 2 1/4 slide 23 and the 2nd 3D vibration mirror scanning module 24.
Further, this second light splitting branch road also comprises highly equal the 6th catoptron 19 and the 7th catoptron 20 that are 45 ° with horizontal plane angle.
6th catoptron 19 and the 7th catoptron 20 are arranged between the second inversion beam expanding lens 18 and second sound optical modulator module 21, adjust the direction of propagation of being inverted the polarized light of beam expanding lens 18 through second, the angle making it to need with second sound optical modulator module 21 matches.
3rd light splitting branch road comprises: the 3rd laser polarization direction adjustment half-wave plate 27, the 3rd connected successively is from top to bottom inverted beam expanding lens 28, the 3rd acoustooptic modulation module 31, the 3rd beam expanding lens the 32, the 3 1/4 slide 33 and the 3rd 3D vibration mirror scanning module 34.
Further, the 3rd light splitting branch road also comprises highly equal the 8th catoptron 29 and the 9th catoptron 30 that are 45 ° with horizontal plane angle.
8th catoptron 29 and the 9th catoptron 30 are arranged on the 3rd and are inverted between beam expanding lens 28 and the 3rd acoustooptic modulation module 31, adjust the direction of propagation of being inverted the polarized light of beam expanding lens 28 through the 3rd, the angle making it to need with the 3rd acoustooptic modulation module 31 matches.
4th light splitting branch road comprises: the 4th laser polarization direction adjustment half-wave plate 36, the 4th connected successively is from top to bottom inverted beam expanding lens 37, fourth sound optical modulator module 40, the 4th beam expanding lens the 41, the 4 1/4 slide 42 and the 4th 3D vibration mirror scanning module 43.
Further, the 4th light splitting branch road also comprises the tenth catoptron the 35, the 11 catoptron 38 and the tenth two-mirror 39 being 45 ° with horizontal plane angle.
3rd polarization splitting prism 26 and the 4th laser polarization direction adjustment half-wave plate 36 be separately positioned on the tenth catoptron 35 horizontal side and immediately below, from the 3rd polarization splitting prism 26 through polarized light through the tenth catoptron 35 reflect after enter straight down the 4th laser polarization direction adjustment half-wave plate 36.
11 catoptron 38 is highly identical with the tenth two-mirror 39, being arranged on the 4th is inverted between beam expanding lens 37 and fourth sound optical modulator module 40,11 catoptron 38 and the tenth two-mirror 39 adjust the direction of propagation of being inverted the polarized light of beam expanding lens 37 through the 4th, and the angle making it to need with fourth sound optical modulator module 40 matches.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. carry out respectively controlling the device of mark to linearly polarized laser light splitting, it is characterized in that, described device comprises: laser instrument, laser polarization direction regulate half-wave plate, polarization splitting prism and light splitting branch road;
Be provided with the laser polarization direction corresponding with it before polarization splitting prism described in each and regulate half-wave plate, be provided with altogether n described laser polarization direction before n described polarization splitting prism and regulate half-wave plate; The polarization laser that described laser instrument sends is divided into two bundles by polarization splitting prism described in each, regulates the Angle ambiguity two of half-wave plate optical axis and light polarization direction to restraint the ratio of laser by the described laser polarization direction adjusting its correspondence;
The n+1 that the individual described polarization splitting prism of n is divided into restraints light and carries out control mark respectively by n+1 described light splitting branch road.
2. device as claimed in claim 1, is characterized in that, described light splitting branch road comprises the laser polarization direction connected successively and adjusts half-wave plate, is inverted beam expanding lens, acoustooptic modulation module, beam expanding lens, 1/4 slide and 3D vibration mirror scanning module;
Regulate the direction of half-wave plate by adjusting described laser polarization direction, the polarization direction that laser polarization direction and described acoustooptic modulation module are needed matches;
Described inversion beam expanding lens carries out contracting bundle to described polarization laser;
By adjusting the frequency of the modulation signal of described controlled by sound and light module, control switch light and the Energy transmission size of described polarization laser;
Described beam expanding lens expands described polarization laser;
The polarization state of described polarization laser is become circular polarization state light beam from linear polarization by described quarter wave plate;
Described 3D vibration mirror scanning module utilizes described circular polarization state laser to process workpiece.
3. device as claimed in claim 2, is characterized in that, is equipped with a laser polarization direction and regulates half-wave plate before described polarization splitting prism, is provided with altogether 3 laser polarization directions and regulates half-wave plate before 3 described polarization splitting prisms;
After first laser polarization direction regulates the polarization direction of half-wave plate to laser to regulate, described polarized light is divided into two bundles by the first polarization splitting prism being 45 ° with horizontal plane angle, the polarization state of two-beam is respectively P and S, and direction is respectively horizontal direction and direction straight down;
A branch of polarized light through the horizontal direction of described first polarization splitting prism regulates after half-wave plate carries out the adjustment of polarization direction through the second laser polarization direction, by being 45 ° with horizontal plane angle, the second polarization splitting prism is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down;
A branch of polarized light through the direction straight down of described first polarization splitting prism regulates after half-wave plate carries out the adjustment of polarization direction through the 3rd laser polarization direction, by being 45 ° with horizontal plane angle, the 3rd polarization splitting prism is divided into 2 bundle laser, and direction is respectively horizontal direction and direction straight down.
4. device as claimed in claim 3, is characterized in that, has and be 45 ° of first catoptrons and the second catoptron just arranged with horizontal plane angle between described laser instrument and described first laser polarization direction adjustment half-wave plate;
Described first catoptron and the described direction of propagation of the second catoptron to the polarized light of the horizontal direction that described laser instrument sends regulate.
5. device as claimed in claim 3, it is characterized in that, the polarized light through the described horizontal direction of described second polarization splitting prism carries out control mark by the first light splitting branch road;
Through described in described second polarization splitting prism straight down the polarized light in direction carry out control mark by the second light splitting branch road;
Through described in described 3rd polarization splitting prism straight down the polarized light of direction horizontal direction carry out control mark by the 3rd light splitting branch road;
Polarized light through the described horizontal direction of described 3rd polarization splitting prism carries out control mark by the 4th light splitting branch road.
6. device as claimed in claim 5, is characterized in that, it is the 3rd catoptron of 45 ° that described first light splitting branch road and described 4th light splitting branch road also comprise with horizontal plane angle;
Described polarization splitting prism and described laser polarization direction adjustment half-wave plate be separately positioned on the 3rd catoptron horizontal side and immediately below, from described polarization splitting prism through described polarized light through described 3rd catoptron reflection after enter straight down described laser polarization direction adjustment half-wave plate.
7. device as claimed in claim 5, it is characterized in that, described in each, light splitting branch road also comprises: highly identical the 4th catoptron and the 5th catoptron being 45 ° with horizontal plane angle;
Described 4th catoptron and described 5th catoptron are arranged between described inversion beam expanding lens and described acoustooptic modulation module, described 4th catoptron and the described direction of propagation of 5th catoptron to the polarized light through described inversion beam expanding lens adjust, and the angle making it to need with described acoustooptic modulation module matches.
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| CN110095843A (en) * | 2018-01-30 | 2019-08-06 | 上海以众科技有限公司 | A kind of high power laser system simulation radiant and laser system |
| CN110369863A (en) * | 2019-07-23 | 2019-10-25 | 上海精测半导体技术有限公司 | Light dividing method, the cutting method based on laser, equipment and system |
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| CN113381271A (en) * | 2021-06-01 | 2021-09-10 | 中国科学院理化技术研究所 | Polarized laser light splitting device and system |
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