CN108345155A - A kind of light-beam scanner and design method of three-dimensional tuning - Google Patents
A kind of light-beam scanner and design method of three-dimensional tuning Download PDFInfo
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- CN108345155A CN108345155A CN201810356896.5A CN201810356896A CN108345155A CN 108345155 A CN108345155 A CN 108345155A CN 201810356896 A CN201810356896 A CN 201810356896A CN 108345155 A CN108345155 A CN 108345155A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The present invention relates to a kind of light-beam scanner and methods, and in particular to a kind of light-beam scanner and design method of three-dimensional tuning.The present invention is directed to laser scanning light source, using plus lens, voltage-controlled variable focus lens and a kind of two-dimentional acousto-optic modulator of right-angled intersection, realizes the spacescan of three-dimensional tuning.Laser beam is focused by plus lens, and the light beam after focusing adjusts exit beam deflection angle, hot spot is point-by-point mobile successively on scanning plane, realizes the transversal scanning of optical signal by the driving frequency of separately adjustable two-dimentional acousto-optic modulator.According to difference of the scanning plane at a distance from device, by the focal length for adjusting Zoom lens, change the angle of divergence and operating distance of outgoing laser beams, change its longitudinal collimation property, realize the accurate scanning to the body surface of different distance, spatial resolution is improved, to realize the dynamic scan method of three-dimensional tuning.
Description
Technical field
This patent is related to a kind of light-beam scanner and method, and in particular to a kind of light-beam scanner of three-dimensional tuning with
Design method.The present apparatus is mainly the two-dimentional acousto-optic modulation by laser, plus lens, Zoom lens and a kind of cross structure
Device forms.Laser beam realizes the horizontal transversal scanning with vertical direction on scanning plane by acousto-optic modulator；Pass through adjusting
The focal length of Zoom lens realizes that longitudinal tuning is the adjusting of beam divergence angle and scanning plane spot size size, to realize
The scan mode of three-dimensional tuning.
Background technology
Light beam scanning technique refers to the technology that laser beam direction is precisely controlled and positions.The technology is widely used in
Multiple fields, such as optical radar, laser display, space optical communication, optical information processing and storage, 3D printing and three-dimensional imaging
Etc. in high and new technologies field.Existing optical beam scanner mostly uses mechanical scanning principle, the disadvantage is that being influenced by machine driving precision, sweeps
It is limited to retouch precision, sweep speed is slow, and scanning system is often huger.It is carried out using acousto-optic deflection device control laser beam
Scanning is a kind of very promising laser scanner technique, advantage be speed it is fast, with roomy, low in energy consumption, miniaturization, purposes it is wide,
Mechanical moving element is not needed.But one-dimensional scanning only may be implemented in common acousto-optic modulator.
It is existing at present to realize that the three-dimensional imaging of two-dimensional scan swashs based on high-precision stepper motor in 3-D scanning research direction
Optical radar can realize the three-dimensional measurement of a wide range of, high dot density.But the shortcomings of it is slow that there are image taking speeds, and volume is big, quality is big.
3 D video laser radar system (patent No. CN103472458A) of the Chinese invention patent based on acousto-optic scanning, by using two
A orthogonal two-dimentional audio-optical deflection device of acousto-optic deflection device composition in deflection direction, realizes the two-dimensional deflection of laser beam, passes through
Quickly change acoustic frequency, scanning angle and speed can be changed, realizes 3 D video imaging.But the cascade connection type employed in patent
Two-dimentional acousto-optic scanning device is concatenated by two one-dimensional acousto-optic modulators, as shown in Figure 1.Light beam passes through first modulator (X
To or horizontal direction) after, direction just has occurred and that deflection, and the position for being incident on second modulator (Y-direction or vertically to) becomes
Change, the incidence angle of opposite second modulator changes, it cannot be guaranteed that spreading out to the Prague that can meet Y-direction when scanning in X
Penetrate condition.The efficiency of diffraction light can not ensure that Strength Changes are big.Can also hot spot be made to move on to if the scanning range of the first order is slightly larger
Except optoacoustic active region or even except acousto-optic modulator, therefore which also limits the angular ranges of light beam scanning.So in patent
Do not mention incidence angle how and meanwhile meet the Bragg diffraction conditions of two one-dimensional acousto-optic deflection devices.It is modulated additionally, due to two
Device series connection is difficult to realize linear scan, so the prior art needs complicated deformity to correct.Technical pattern dispersion is unfavorable for swashing
Light collimates and the system integration, poor practicability.We propose a kind of " right-angled intersection knot to China State Intellectual Property Office recently
The application for a patent for invention (application No. is " 201711251345.4 ") of the device and design method of the two-dimentional acousto-optic modulator of structure ",
This method has abandoned the cascade system of existing two-dimentional audio-optical deflection technology, devises a kind of two-dimentional acousto-optic tune of criss-cross construction
Device processed.As shown in Fig. 2, cross two dimension acousto-optic modulator is as a whole, formed in horizontal direction and vertical direction independent
Modulation, respectively include energy converter, acousto-optic crsytal, an absorbent treatment.It is in shape chi structure, bidimensional sound wave is in infall shape
At common acousto-optic interaction area, when light beam passes through active region, light intensity, light frequency and light propagation side can be realized in two directions
To modulation, be equivalent to a two-dimensional grating.It is simple and compact for structure, it can easily be accommodated, facilitate the system integration；Bidimensional adjusts mutually only
It is vertical, it does not interfere with each other.Angle scanning range is directly proportional to the sound bandwidth of driver.When it modulates and scans for direction, scanning
The angle linearity is good, and range is wide.
Invention content
In order to further enhance the adjusting degree of freedom of the prior art, this patent propose it is a kind of can three-dimensional tuning light beam
Scanning means and design method, while meeting diffraction conditions horizontally and vertically, different distance can also be directed to
Target carries out more accurate high resolution scanning.
In order to realize above-mentioned target, present invention uses " a kind of right-angled intersection knots that we have declared to State Patent Office
The technical solution of the device and design method of the two-dimentional acousto-optic modulator of structure " (application number 201711251345.4), for realizing
The two dimension tuning of scanning light beam.
A kind of light-beam scanner of three-dimensional tuning of patent of the present invention includes and the plus lens of laser coaxial, variable
Focus lens and a two-dimentional acousto-optic modulator based on criss-cross construction, it is characterised in that：The plus lens is located at laser
The coaxial front of device, the laser that laser is sent out carry out light beam convergence by plus lens；The two dimension of the criss-cross construction
Acousto-optic modulator is located at the coaxial front of plus lens, and the active region of two-dimentional acousto-optic modulator is placed exactly in the beam of light beam after convergence
At waist, the angle scanning in horizontal and vertical both direction is realized；The Zoom lens are located in front of two-dimentional acousto-optic modulator,
According to different operating modes to the adjusting by the modulated laser progress divergence characterization of two-dimentional acousto-optic modulator.
The scanning light beam that laser can be sent out regards ideal Gaussian beam as, and can change scanning using double lens method swashs
The far field collimation property of light beam.Double lens method principle is as shown in figure 3, in advance with a short focus lens L1By Gaussian beam focusing,
To obtain minimum waist spot ω0', it is easy to implement the high-frequency drive of acousto-optic modulator, improves driving bandwidth.Then long with one again
Focal length lenses L2Improve its divergence characterization, can be obtained good collimating effect.
It is explained using the imaging formula of geometric optics,Here object distance u (girdling the waist to the distance of L2) is fixed,
Image distance D is in dynamic change, so to can be at clearly as needing F to different image distance D2Also it and then to adjust.
The driving frequency bandwidth of acousto-optic modulator determines the angular range of scanning.According to the formula of modulation bandwidth：(wherein：ω0：The diameter (spot diameter after focusing) in acousto-optic interaction area；
θB：Incidence angle is equal to Bragg angle；VS：Drive the velocity of wave of sound wave) it can be seen that bandwidth passes through the transition time of light beam with sound waveBe inversely proportional, i.e., with the diameter (ω of light beam0) be inversely proportional, you must use the plus lens of short focus makes beam heights
Convergence, to obtain larger bandwidth and scanning range, it is therefore necessary to which cross two dimension acousto-optic modulator to be placed among double lens
Place with a tight waist.For the incident beam of collimation, modulator is placed in lens L1One times of focal length at.
By changing the focal length of Zoom lens, the collimation property of modulated laser changes, the diverging of emergent light
Angle can change, and (also known as Rayleigh distance refers to from the output end of light to a tight waist Gaussian beam for the operating distance of light beam
Distance) adjust accordingly, hot spot is of different sizes on scanning plane.And then it can be formed on the scanning plane of different distance
Clear hot spot improves spatial resolution.Changing Zoom lens can also be such that scanning light spot makes by produced by two dimension tuning later
Scanning range size and scanning accuracy it is different, scanning range and scanning accuracy can be according to the distances of device to the plane of scanning motion
With size and change, to adapt to the scanning requirement of different distance, realize the scan mode of three-dimensional tuning.
Preferably：
The scan laser selects the light source of short wavelength；
The plus lens is the short focus lens of fixed focal length；
The laser is much larger than the focal length of plus lens at a distance from the plus lens；
The Zoom lens are voltage-controlled zoom lens, by adjusting the shape of voltage adjusting lens and changing it effectively
Focal length.
The two dimension acousto-optic modulator is the two-dimentional acousto-optic modulator of cross type, and two-dimentional acousto-optic is formed in intersection region
Collective effect area realizes the independent scan of two orthogonal directions.
The acousto-optic interaction area of the two dimension acousto-optic modulator is located at the place with a tight waist of converging beam.
The present invention having the beneficial effect that when realizing 3-D scanning：
(1) without mechanical loss and disturbance
The present invention has abandoned the mechanical deflection mode of conventional laser scanning, without mechanical moving element.By adjusting acousto-optic
The driving frequency of modulator changes scanning angle, and making laser beam, arbitrarily direction or sequential scan, scanning are fast in a certain range
Degree is fast, and control angle precision is high, and service life is long；Zoom lens are voltage-controlled Zoom lens, are changed by electric signal
Become the shape of liquid in lens to control the variation of focal length, mechanical movement is not present, has tradition machinery scanning device can not
The advantage of analogy.
(2) small, it is simple in structure, it is advantageously integrated
The present invention is using the criss-cross construction two dimension acousto-optic deflection device innovated.Current two-dimentional acousto-optic deflection device structure point
It is vertical, be unfavorable for the system integration, the two-dimentional acousto-optic deflection device that the present invention designs is small, structure is single compact, use it is varifocal
Lens diameter and thickness are no more than 30mm, and system structure is simple, small, are advantageously integrated, easy to use and optical path adjusting.
(3) sweep speed is faster
Conventional two-dimensional acousto-optic deflection device makes the deflection of laser beam in two directions be carried out separately, and the present invention designs
The deflection of two-dimentional acousto-optic of criss-cross construction be carried out at the same time, in contrast, the laser scanning speed that the present invention designs is more
Soon.And the variation that the Zoom lens used can complete focal length by adjusting voltage in 20ms is adjusted, beam collimation characteristic (hair
Dissipate angle and operating distance) adjusting faster compared to other mechanical method speed, sweep speed is rapider.
(4) scanning space resolution ratio improves
For the target of different distance, the focal length by changing Zoom lens changes collimation performance (angle of divergence and work
Distance), the variation of larger operating distance can be met in different operating apart from upper guarantee optimum scanning precision.
Description of the drawings
The existing cascade connection type two dimension acousto-optic modulator schematic diagrams of Fig. 1.
Fig. 2 is the laser scanning device schematic diagram based on criss-cross construction two dimension acousto-optic deflection device.
Fig. 3 is that double lens collimates method schematic diagram.
Fig. 4 is the laser scanning schematic diagram of the present invention.In figure：1 main control unit, 2 drive control circuit units, 3 lasers,
4 plus lens, 5 two-dimentional acousto-optic modulators, 6 acousto-optic interaction areas, 7 workpiece, 8 scanning planes, 9 scanning light spots, 10 voltage-controlled variables are burnt thoroughly
Mirror.
Fig. 5 is a kind of laser scanning schematic diagram of the embodiment of the present invention.
Fig. 6 is another laser scanning schematic diagram of the embodiment of the present invention.
Fig. 7 is the hot spot schematic diagram of scanning plane in the present embodiment.
Fig. 8 is Gaussian beam profile schematic diagram.
Specific implementation mode
In the following, the present invention is specifically described by illustrative embodiment.It should be appreciated, however, that not into one
In the case of step narration, element, structure and features in an embodiment can also be advantageously incorporated into other embodiment
In.
In the description of the present invention, it should be noted that term " X ", " Y ", " Z ", "-X ", "-Y ", "-Z ", horizontal, perpendicular
It is straight to wait the orientation or positional relationship of instructions for position relationship based on ... shown in the drawings, it is merely for convenience of the description present invention and simplifies
Description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration and behaviour
Make, therefore is not considered as limiting the invention.
A kind of light-beam scanner of three-dimensional tuning of the present embodiment includes laser 3, is coaxially put in the front of laser 3
It is equipped with plus lens 4, plus lens 4 is converged the laser that laser is sent out to obtain minimum light spot.
It is additionally provided with novel criss-cross construction two dimension acousto-optic deflection device 5, New Two Dimensional sound in the coaxial front of plus lens 4
The acousto-optic interaction area 6 of optical modulator is located at minimum light spot, is also driven and is controlled by drive control circuit 2 and main control unit 1.When
The acousto-optic that the light beam that laser 3 is sent out is incident on criss-cross construction two dimension acousto-optic modulator 5 after the focusing of plus lens 4 is made
When with area 6, Bragg diffraction occurs for laser, generates the very high one order diffracted spots of diffraction efficiency, and opposite incident beam has occurred
Two-dimensional deflection.By the adjusting of driving frequency, the adjusting of deflection angle is realized, so that it may to allow diffraction pattern to form certain scanning
Range, as shown in the plane of scanning motion in Fig. 2.
Voltage-controlled variable focus lens 10 are equipped in front of two-dimentional acousto-optic modulator, voltage-controlled variable focus lens 10 refer to passing through electricity here
It is voltage-controlled to make the lens focused.This kind of voltage-controlled variable focus lens 10 belong to existing device, are mainly used in imaging system, realize
The imaging of different depths of focus or the depth of field is all located in the receiving terminal of optical signal, images on planar array detector.Voltage-controlled variable is burnt thoroughly
Mirror belongs to the prior art, and voltage control principle and circuit can be with reference explanation books, and which is not described herein again.In the present embodiment,
Voltage-controlled variable focus lens 10 are imaged the hot spot in acousto-optic interaction area as collimation lens, as shown in Figure 5, Figure 6, voltage-controlled variable
The focal length of focus lens 10 changes the collimation property of outgoing beam, that is, changes beam divergence angle and operating distance, thus also changing can
Adjust imaging effect.One voltage-controlled variable focus lens 10 for the present embodiment selection is the production of OptoTune companies of Switzerland
EL-10-30, zoom lens are interior filled with polymer dispersed liquid crystals, it has different models to be suitable for different-waveband, there is different installations
Form.Its focal-distance tuning range can complete the adjusting of focal length between 50-120mm, by adjusting voltage in 20ms, to
Realize the adjusting of outgoing beam collimation property.Laser 3 and voltage-controlled variable focus lens 10 are by drive control circuit 2 and master control list
1 driving of member and control.
As shown in figure 5, the size of scanning light spot determines scanning resolution.Scanning light spot 9 is smaller, more clear, then scans
Precision it is higher, spatial resolution is higher；On the contrary, scanning light spot 9 is bigger, fuzzyyer, then scanning accuracy is lower.Scan laser
Select the visible light of short wavelength, scanning light spot 9 that can be visually observed in scanning plane 8.For the workpiece 7 of different location, pass through tune
The collimation for saving the focus adjustment outgoing beam of voltage-controlled variable focus lens 10, be to keeping scanning light spot 9 all it is minimum, can be with
It realizes the high resolution scanning on the scanning plane of different distance, realizes the function of three-dimensional tuning.
It is wherein above-mentioned：
Laser 3：Send out scanning laser beam used；
Voltage-controlled variable focus lens 10：For collimating modulated laser beam, change in the size and scanning plane of scanning plane
The size of hot spot, to realize adjustment scanning accuracy.
Criss-cross construction two dimension acousto-optic modulator 5：For modulated scanning laser, laser is made to generate Bragg diffraction, shape
At certain two-dimensional scan range.
Scanning plane 8：The scanning area that laser diffraction is formed.
Acousto-optic interaction area 6：It is the effective coverage that laser generates Bragg diffraction.
The scanning means of the three-dimensional tuning of the present embodiment, for the object of different distance, as shown in figure 5, laser 3 is sent out
Laser by plus lens 4 focus after, by two-dimentional acousto-optic modulator 5 acousto-optic interaction area 6 occur Bragg diffraction, generate
Two-dimensional scan angle be respectively α and β.If in image distance D1Distance on form clearly scanning light spot 9, and if diffraction
Light beam does not have the tuning of voltage-controlled variable focus lens 10, in image distance D2Scanning light spot 9 can be relatively fuzzy, the resolution being not achieved
Rate.If changing the focal length of voltage-controlled variable focus lens 10, makes the diffraction pattern in acousto-optic interaction area, just image in image distance D2Place
On scanning plane.Zoom lens can be any apart from 9 minimum of upper guarantee scanning light spot, and hot spot is apparent, and scanning accuracy is high.
It can be according to the theory further analysis of Gaussian beam.It is located at D in Fig. 52The scanning plane blur spot distribution note at place
For a, D is located in Fig. 62The clear hot spot distribution of scanning plane at place is denoted as b.Laser facula on a and b scanning planes is in a z-direction
Gaussian Profile is as shown in figure 8, a, b are distributed in the Gaussian Profile difference corresponding diagram 8 of hot spot on a, b scanning plane.Ordinate is laser
Intensity, abscissa are beam size, and spot size is corresponded on scanning plane.It is strong when dropping to center along radially-arranged light intensity
DegreeWhen, corresponding size is defined as spot size.Positioned at same distance D2Scanning plane 8, because of voltage-controlled variable focus lens 10
Focal length it is different, the scanning light spot 9 on face is of different sizes, very big to the visual effect difference of people.As shown in fig. 7, spot size
ωz1And ωz2There is significant difference, has corresponded to the matching of tuning focal length and two kinds of situations of untuned mismatch.
In specific implementation procedure, is fed back according to the size of the hot spot 9 of 7 scanning plane 8 of workpiece of different distance, pass through master control
Unit 1 and drive control circuit 2 adjust the focal length of voltage-controlled variable focus lens 10, adjust the clarity of scanning light spot 9, until obtaining
Satisfied effect.
Embodiment described above, only one kind of the present invention more preferably specific implementation mode, those skilled in the art
The usual variations and alternatives that member carries out within the scope of technical solution of the present invention should be all included within the scope of the present invention.
Claims (8)
1. a kind of light-beam scanner and design method of three-dimensional tuning, it is characterised in that：
Described device includes scanning laser light source, main control unit, drive control circuit, plus lens, voltage-controlled variable focus lens
With the two-dimentional acousto-optic modulator of criss-cross construction；
The horizontal transversal scanning with vertical direction on scanning plane is realized by acousto-optic modulator；
By adjusting the focal length of Zoom lens, realize that longitudinal tuning is the tune of beam divergence angle and scanning plane spot size size
Section, to realize the scan mode of three-dimensional tuning.
2. the light-beam scanner and design method of three-dimensional tuning according to claim 1, it is characterised in that：
The scan laser selects the light source of short wavelength；
The laser is much larger than the focal length of plus lens at a distance from the plus lens.
3. the light-beam scanner and design method of three-dimensional tuning according to claim 1, it is characterised in that：
The plus lens is located at the coaxial front of laser, for the laser that confined laser is sent out, for the light for reaching minimum
Spot size；
Plus lens is the short focus lens of fixed focal length.
4. the light-beam scanner and design method of three-dimensional tuning according to claim 1, it is characterised in that：
The two-dimentional acousto-optic modulator of the criss-cross construction is located at the coaxial front of the plus lens, the laser after line focus
Change beam deflection angle, realization is being swept by changing the driving frequency of acousto-optic modulation by the active region of two-dimentional acousto-optic modulator
Retouch the horizontal transversal scanning with vertical direction on face.
5. according to claim 1, the light-beam scanner and design method of the three-dimensional tuning described in 3,4, it is characterised in that：
The two-dimensional scan of the two-dimentional acousto-optic modulator of the criss-cross construction is separately adjustable, does not interfere with each other；
The acousto-optic interaction area of the two dimension acousto-optic modulator is located at the place with a tight waist of converging beam.
6. the light-beam scanner and design method of three-dimensional tuning according to claim 1, it is characterised in that：
The voltage-controlled variable lens are located in front of cross two-dimentional acousto-optic modulator, filled with polymer in the voltage-controlled zoom lens
Dispersed LCD changes the distribution of shapes of liquid crystal by adjusting voltage, and so as to cause focal length variations, variation range is tens millimeters
To millimeters up to a hundred.
7. according to claim 1, the light-beam scanner and design method of the three-dimensional tuning described in 5,6, it is characterised in that：
The voltage-controlled variable focus lens collimate modulated laser beam, and the driving voltage by adjusting Zoom lens changes
Varifocal, and then the collimation properties such as the angle of divergence and operating distance for changing scanning light beam.
8. according to claim 1, the light-beam scanner and design method of the three-dimensional tuning described in 5,6,7, it is characterised in that：
According to the distance to operating distance, by adjusting the focal length of Zoom lens, it is imaged, is realized to difference in scanning plane high definition
The high-resolution two-dimensional scan of distance, to realize the scan mode of three-dimensional tuning.
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| CN201810356896.5A CN108345155A (en) | 2018-04-20 | 2018-04-20 | A kind of light-beam scanner and design method of three-dimensional tuning |
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| CN201810356896.5A CN108345155A (en) | 2018-04-20 | 2018-04-20 | A kind of light-beam scanner and design method of three-dimensional tuning |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109211825A (en) * | 2018-10-10 | 2019-01-15 | 吉林大学 | Solution gas infrared detecting device and method in a kind of water using acoustooptical effect collimated light path |
| CN112764326A (en) * | 2021-01-21 | 2021-05-07 | 浙江大学 | Three-dimensional direct-writing photoetching method and device with high-speed axial scanning capability |
| CN112904526A (en) * | 2021-01-21 | 2021-06-04 | 浙江大学 | High-precision automatic focusing method and device with anti-noise capability based on differential confocal detection |
-
2018
- 2018-04-20 CN CN201810356896.5A patent/CN108345155A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109211825A (en) * | 2018-10-10 | 2019-01-15 | 吉林大学 | Solution gas infrared detecting device and method in a kind of water using acoustooptical effect collimated light path |
| CN112764326A (en) * | 2021-01-21 | 2021-05-07 | 浙江大学 | Three-dimensional direct-writing photoetching method and device with high-speed axial scanning capability |
| CN112904526A (en) * | 2021-01-21 | 2021-06-04 | 浙江大学 | High-precision automatic focusing method and device with anti-noise capability based on differential confocal detection |
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