CN109759714A - It is a kind of based on femtosecond laser at the large format marking system and mark range scaling method of silk - Google Patents
It is a kind of based on femtosecond laser at the large format marking system and mark range scaling method of silk Download PDFInfo
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- CN109759714A CN109759714A CN201910042382.7A CN201910042382A CN109759714A CN 109759714 A CN109759714 A CN 109759714A CN 201910042382 A CN201910042382 A CN 201910042382A CN 109759714 A CN109759714 A CN 109759714A
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Abstract
The present invention provides a kind of based on femtosecond laser into the large format marking system and mark range scaling method of silk, is related to the big object mark field such as big machinery part, aircraft.The disadvantages of generally existing operating distance of current marking system is short, mark range is small.In view of the above problems, depth of focus is increased effectively at silk technology by femtosecond laser, has widened mark range.When sample breadth to be processed is larger, using focal length lens focus femtosecond laser, induction generates long chevilled silk, and in entire chevilled silk length range, high quality mark can be achieved.In addition, the increase of mark range is so that this system is also applied for curved surface mark.
Description
Technical field
The present invention relates to a kind of based on femtosecond laser into the large format marking system and mark range scaling method of silk, especially
It can be realized the processing of the mark to large format sample and curved surface sample, be related to the big object mark such as big machinery part, aircraft
Field.
Background technique
Laser marking be it is a kind of using high energy laser beam sample surfaces scan, leave the laser processing skill of permanent trace
Art controls the motion profile of laser by computer, thus text or icon indicia needed for being formed.Laser marking has non-connect
The advantages such as touching, high-precision, high-efficiency environment friendly are widely used in the fields such as machining, the marking of product symbol, anti-fake.
Femtosecond laser is one of optical field non-linear phenomena at silk, when femtosecond laser is in transmission process, Ke Er
When self-focusing and plasma defocusing effect reach dynamic equilibrium, the salt free ligands transmission that will form over Rayleigh range is Filamentous logical
Road.
Femtosecond laser can be regulated and controled at the chevilled silk length of silk by changing the focal length of condenser lens in a certain range, when
When power is greater than filamentation threshold, long focus lens can generate longer chevilled silk.
The drawbacks such as the generally existing mark range of current laser marking is small, operating distance is short.Large format mark mostly uses greatly
Translation stage mobile example, the processing method then spliced and combined need to be precisely controlled sample position, the cause pair of operating distance short-range missile
The placement location of sample is more demanding, and the mark difficulty of processing of curved surface sample is larger.
Summary of the invention
In view of the problems of the existing technology the technical problem to be solved by the present invention is to, provide a kind of sharp based on femtosecond
Light at silk large format marking system.By femtosecond laser at silk technology, the operating distance of mark is effectively increased, is realized substantially
Face and curved surface laser marking.
The technical solution adopted by the present invention is that:
It is a kind of based on femtosecond laser at the large format marking system of silk, which is characterized in that including femto-second laser, the first gold medal
Reflecting mirror, Glan prism, dichroscope, convex lens, 2-D vibration mirror scanning system, the second gold medal reflecting mirror, specimen holder, computer and
He-Ne laser pen;The wherein femto-second laser provides high energy pulse for exporting femtosecond laser for mark;Described first
Golden reflecting mirror changes optic path direction for reflecting femtosecond laser;The Glan prism, by rotation, for continuously adjusting
The power of femto-second laser pulse;The dichroscope, first is that together with the first gold medal reflecting mirror, for reflecting the femtosecond of collimated incident
Laser, second is that the He-Ne visible light of transmissive He-Ne laser pen output positions mark location for identifying optical path;It is described convex
Lens induce air ionization at silk for focusing femtosecond laser;The 2-D vibration mirror scanning system includes orthogonal placement
Two pieces of eyeglasses, for combining control incident beam two-dimensional scanning;The second gold medal reflecting mirror, for reflecting the light onto level side
To mark;The specimen holder, for fixing sample to be processed;The computer controls light beam for controlling 2-D vibration mirror scanning
Motion profile forms required text or icon indicia;The He-Ne laser pen is accurately located at sample for generating visible light
Mark location on product;
Further, above-described convex lens is to change focal length according to sample size to be processed, pattern.When processing is bent
When the sample of face, focal length convex lens is selected to generate long chevilled silk, improve working range, high quality mark is realized in entire chevilled silk length
Processing, without accurately being controlled light beam or sample position.
Further, above-described second gold medal reflecting mirror is to change size according to sample breadth size, when processing sample
When product breadth is larger, select large-sized golden reflecting mirror that can further widen mark breadth.
Further, above-described Glan prism is equipped with scale, according to threshold value caused by sample material difference to be processed
Damage power is different, rotates Glan prism, is precisely adjusted to the power of incident femto-second laser pulse.
Further, the laser shooting location device of above-described He-Ne laser pen and dichroscope composition, wherein
He-Ne laser pen selects other any visible light wave range laser light sources.
Further, above-described first gold medal reflecting mirror, Glan prism, dichroscope, convex lens and the reflection of the second gold medal
Mirror, which is respectively mounted, to be fixed on two-dimentional adjustable optical mirror holder, and the left and right of optical path, pitching are adjustable.
Invention also provides a kind of based on femtosecond laser into the large format mark range scaling method of silk, step packet
It includes:
Mark range in the first step, the calibration direction z, stepping mobile example, step-length are set as 0.5mm in the z-direction, simultaneously
After each stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing, sample moves record at this time
Dynamic distance, as the mark range on the direction z;
Mark range on second step, the calibration direction xy, takes the middle position of the mark length on the direction z, and fixation is to be added
Work sample, mark figure use USAF-1951 resolving power test target array, observe the deletion condition of marking figure, obtain on the direction xy
Mark range.
Further, above-described mark figure includes but is not limited to resolving power test target array, or round, square
Figure.
Further, spherical surface mark described above, since mark will appear distortion on curved surface, pretreatment mark picture disappears
Except distortion method are as follows: pre- mark figure is carried out curved surface or spherical projection calculates, revised picture is obtained, is then input to vibration
Mirror controls software to get distortionless curved surface or spherical surface mark is arrived.
Advantages and beneficial effects of the present invention:
The present invention proposes a kind of large format marking system and mark range scaling method based on femtosecond laser at silk, is applicable in
In the marking of large format, three-dimension curved surface sample, the high quality laser marking of large format and curved surface may be implemented, solve existing sharp
The problems such as light marking system operating distance is short, mark range is small is related to the big object mark field such as big machinery part, aircraft.
Detailed description of the invention
Fig. 1 is based on femtosecond laser into the large format marking system schematic diagram of silk.
Fig. 2 is 2-D vibration mirror scanning system schematic diagram.
Fig. 3 widens mark range schematic diagram at silk for femtosecond laser.
Fig. 4 is that spherical surface mark picture pre-processes schematic diagram, to eliminate distortion: (a) picture to be processed;(b) make spherical projection
Amendment picture afterwards.
Appended drawing reference: 1- femto-second laser;2- the first gold medal reflecting mirror;3- Glan prism;4- dichroscope;5- convex lens;
6- 2-D vibration mirror scanning system;7- the second gold medal reflecting mirror;8- specimen holder;9-He-Ne laser pen;10- 2-D vibration mirror;11- is calculated
Machine;12- femtosecond laser;13- femtosecond laser is at silk region, the direction 14-xy mark maximum breadth.
In order to which the technical features, objects and effects of the invention are more clearly understood, the Detailed description of the invention present invention is now compareed
Specific embodiment.
Specific embodiment
Fig. 1 is anti-at the large format marking system schematic diagram of silk, including femto-second laser 1, the first gold medal based on femtosecond laser
Penetrate mirror 2, Glan prism 3, dichroscope 4, convex lens 5,2-D vibration mirror scanning system 6, the second gold medal reflecting mirror 7,8 and of specimen holder
He-Ne laser pen 9.Its described femto-second laser 1 provides high energy pulse for exporting femtosecond laser for mark;Described first
Golden mirror 2 changes optic path direction for reflecting femtosecond laser;The Glan prism 3, it is winged for continuously adjusting by rotation
The power of second laser pulse;The dichroscope 4, first is that being combined with the first gold medal reflecting mirror 2, for reflecting the femtosecond of collimated incident
Laser, second is that the He-Ne visible light that transmissive He-Ne laser pen 9 exports positions mark location for identifying optical path;It is described convex
Lens 5 induce air ionization at silk for focusing femtosecond laser;The 2-D vibration mirror scanning system 6 is as shown in Fig. 2, include two
Galvanometer 10 and computer 11 are tieed up, wherein the 2-D vibration mirror 10 is made of two pieces of reflecting optics of orthogonal placement, is used for group
It closes reflection laser and carries out two-dimensional scanning;The computer 11 scans for controlling 2-D vibration mirror 10, controls beam motion track,
Text or icon indicia needed for being formed;The second gold medal reflecting mirror 7, for reflecting the light onto horizontal direction mark;It is described
Specimen holder 8, for fixing sample to be processed;The He-Ne laser pen 9 is accurately located on sample for generating visible light
Mark location.
The femto-second laser 1 used in the present invention is implemented is titanium-doped sapphire laser, central wavelength 800nm, arteries and veins
Wide 42fs, repetition rate 2.5KHz, or select the femto-second laser of other models.Femtosecond laser is through the first gold medal reflecting mirror 2 and two
It is collimated to Look mirror 4, after being focused by convex lens 5, normal incidence to 2-D vibration mirror scanning system 6, through vibration mirror reflected to the below
Two gold medal reflecting mirrors 7, femtosecond laser is in the horizontal direction at silk.Stepping mobile example in the z-direction, step-length are set as 0.5mm, while every
After secondary stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing.Sample is mobile at this time for record
Distance, the as mark range on the direction z.Take the middle position of the mark length on the direction z, fixed sample to be processed.It beats
Shape of marking on a map uses USAF-1951 resolving power test target array, observes the deletion condition of marking figure, obtains the mark model on the direction xy
It encloses, high quality mark processing can be carried out in entire chevilled silk length.
Fig. 3 widens mark range schematic illustration at silk for femtosecond laser, and sample is placed in this femtosecond laser into silk region
13 or meets in the bigger region of sample ablation threshold mark may be implemented, wherein the maximum breadth in the direction xy is dotted line 14,
Chevilled silk length can be increased, further widen mark breadth.
When Fig. 4 illustrates spherical surface sample mark, distortions correction method: pre- mark figure is subjected to spherical projection calculating, is obtained
To revised picture, it is then input to galvanometer control software, realizes distortionless spherical surface mark.
The relevant explanation of the present invention:
1. all features, method disclosed in the present invention or in the process the step of, in addition to mutually exclusive feature or step
Outside, it can be combined in any way.
2. any feature disclosed in the present invention unless specifically stated can be equivalent by other or with similar purpose
Alternative features replaced.That is, unless stated otherwise, each feature is in a series of equivalent or similar characteristics
An example.
Claims (9)
1. it is a kind of based on femtosecond laser at the large format marking system of silk, which is characterized in that it is anti-including femto-second laser, the first gold medal
Penetrate mirror, Glan prism, dichroscope, convex lens, 2-D vibration mirror scanning system, the second gold medal reflecting mirror, specimen holder, computer and
He-Ne laser pen;The wherein femto-second laser provides high energy pulse for exporting femtosecond laser for mark;Described first
Golden reflecting mirror changes optic path direction for reflecting femtosecond laser;The Glan prism, by rotation, for continuously adjusting
The power of femto-second laser pulse;The dichroscope, first is that reflection femtosecond laser is used for laser with the first gold medal arrangement of mirrors
The collimation of light beam, second is that the He-Ne visible light of transmission He-Ne laser pen output positions mark location for identifying optical path;Institute
Convex lens is stated, for focusing femtosecond laser, induces air ionization at silk;The 2-D vibration mirror scanning system includes orthogonal puts
The two pieces of eyeglasses set, for combining control incident beam two-dimensional scanning;The second gold medal reflecting mirror, for reflecting the light onto water
Square to mark;The specimen holder, for fixing sample to be processed;The computer, for controlling 2-D vibration mirror scanning, control
Beam motion track forms required text or icon indicia;The He-Ne laser pen, for generating visual identification light, accurately
The mark location being located on sample makes mark process visualization, convenient for observation.
2. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described
The second gold medal reflecting mirror size is changed according to sample breadth size, when processed sample breadth is larger, select large-sized gold anti-
It penetrates mirror and further widens mark breadth.
3. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described
Convex lens suitable focal length is selected according to sample size to be processed, pattern;When processing curve sample, focal length convex lens is selected
Long chevilled silk is generated, working range is improved, high quality mark processing is realized in entire chevilled silk length, without to light beam or sample position
It sets and is accurately controlled.
4. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described
Glan prism be equipped with scale, according to sample material to be processed it is different caused by threshold impairment power it is different, rotate Glan prism,
The power of incident femto-second laser pulse is precisely adjusted.
5. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described
He-Ne laser pen and dichroscope form laser shooting location device, wherein He-Ne laser pen be any visible light wave range
Laser light source.
6. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described
The first gold medal reflecting mirror, Glan prism, dichroscope, convex lens and the second gold medal reflecting mirror be respectively mounted and be fixed on two-dimentional adjustable optical
On mirror holder, the left and right of optical path, pitching are adjustable.
7. it is according to claim 1-6 it is a kind of based on femtosecond laser at the large format mark range calibration side of silk
Method, it is characterised in that mark range demarcating steps include:
Step 1: the mark range on the calibration direction z, stepping mobile example, step-length are set as 0.5mm in the z-direction, while every time
After stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing, record sample movement at this time
Distance, as the mark range on the direction z;
Step 2: the mark range on the calibration direction xy, takes the middle position of the mark length on the direction z, fixed sample to be processed
Product, mark figure use USAF-1951 resolving power test target array, observe the deletion condition of marking figure to get on the direction xy
Mark range.
8. it is according to claim 7 based on femtosecond laser at the large format mark range scaling method of silk, which is characterized in that
The mark figure includes but is not limited to resolving power test target array, or round, square-shaped patterns.
9. it is according to claim 7 based on femtosecond laser at the large format mark range scaling method of silk, it is characterised in that:
When processing curve or spherical surface sample, since mark will appear distortion on curved surface, pretreatment mark picture eliminates distortion method packet
It includes:
Pre- mark figure is subjected to curved surface or spherical projection calculates, obtains revised picture, it is soft to be then input to galvanometer control
Part, to obtain distortionless curved surface or spherical surface mark.
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