CN109759714A - It is a kind of based on femtosecond laser at the large format marking system and mark range scaling method of silk - Google Patents

It is a kind of based on femtosecond laser at the large format marking system and mark range scaling method of silk Download PDF

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CN109759714A
CN109759714A CN201910042382.7A CN201910042382A CN109759714A CN 109759714 A CN109759714 A CN 109759714A CN 201910042382 A CN201910042382 A CN 201910042382A CN 109759714 A CN109759714 A CN 109759714A
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mark
laser
silk
femtosecond laser
sample
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CN109759714B (en
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刘伟伟
戴子杰
王云飞
张楠
陈平
林列
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Nankai University
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Nankai University
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Abstract

The present invention provides a kind of based on femtosecond laser into the large format marking system and mark range scaling method of silk, is related to the big object mark field such as big machinery part, aircraft.The disadvantages of generally existing operating distance of current marking system is short, mark range is small.In view of the above problems, depth of focus is increased effectively at silk technology by femtosecond laser, has widened mark range.When sample breadth to be processed is larger, using focal length lens focus femtosecond laser, induction generates long chevilled silk, and in entire chevilled silk length range, high quality mark can be achieved.In addition, the increase of mark range is so that this system is also applied for curved surface mark.

Description

It is a kind of to be demarcated based on femtosecond laser at the large format marking system and mark range of silk Method
Technical field
The present invention relates to a kind of based on femtosecond laser into the large format marking system and mark range scaling method of silk, especially It can be realized the processing of the mark to large format sample and curved surface sample, be related to the big object mark such as big machinery part, aircraft Field.
Background technique
Laser marking be it is a kind of using high energy laser beam sample surfaces scan, leave the laser processing skill of permanent trace Art controls the motion profile of laser by computer, thus text or icon indicia needed for being formed.Laser marking has non-connect The advantages such as touching, high-precision, high-efficiency environment friendly are widely used in the fields such as machining, the marking of product symbol, anti-fake.
Femtosecond laser is one of optical field non-linear phenomena at silk, when femtosecond laser is in transmission process, Ke Er When self-focusing and plasma defocusing effect reach dynamic equilibrium, the salt free ligands transmission that will form over Rayleigh range is Filamentous logical Road.
Femtosecond laser can be regulated and controled at the chevilled silk length of silk by changing the focal length of condenser lens in a certain range, when When power is greater than filamentation threshold, long focus lens can generate longer chevilled silk.
The drawbacks such as the generally existing mark range of current laser marking is small, operating distance is short.Large format mark mostly uses greatly Translation stage mobile example, the processing method then spliced and combined need to be precisely controlled sample position, the cause pair of operating distance short-range missile The placement location of sample is more demanding, and the mark difficulty of processing of curved surface sample is larger.
Summary of the invention
In view of the problems of the existing technology the technical problem to be solved by the present invention is to, provide a kind of sharp based on femtosecond Light at silk large format marking system.By femtosecond laser at silk technology, the operating distance of mark is effectively increased, is realized substantially Face and curved surface laser marking.
The technical solution adopted by the present invention is that:
It is a kind of based on femtosecond laser at the large format marking system of silk, which is characterized in that including femto-second laser, the first gold medal Reflecting mirror, Glan prism, dichroscope, convex lens, 2-D vibration mirror scanning system, the second gold medal reflecting mirror, specimen holder, computer and He-Ne laser pen;The wherein femto-second laser provides high energy pulse for exporting femtosecond laser for mark;Described first Golden reflecting mirror changes optic path direction for reflecting femtosecond laser;The Glan prism, by rotation, for continuously adjusting The power of femto-second laser pulse;The dichroscope, first is that together with the first gold medal reflecting mirror, for reflecting the femtosecond of collimated incident Laser, second is that the He-Ne visible light of transmissive He-Ne laser pen output positions mark location for identifying optical path;It is described convex Lens induce air ionization at silk for focusing femtosecond laser;The 2-D vibration mirror scanning system includes orthogonal placement Two pieces of eyeglasses, for combining control incident beam two-dimensional scanning;The second gold medal reflecting mirror, for reflecting the light onto level side To mark;The specimen holder, for fixing sample to be processed;The computer controls light beam for controlling 2-D vibration mirror scanning Motion profile forms required text or icon indicia;The He-Ne laser pen is accurately located at sample for generating visible light Mark location on product;
Further, above-described convex lens is to change focal length according to sample size to be processed, pattern.When processing is bent When the sample of face, focal length convex lens is selected to generate long chevilled silk, improve working range, high quality mark is realized in entire chevilled silk length Processing, without accurately being controlled light beam or sample position.
Further, above-described second gold medal reflecting mirror is to change size according to sample breadth size, when processing sample When product breadth is larger, select large-sized golden reflecting mirror that can further widen mark breadth.
Further, above-described Glan prism is equipped with scale, according to threshold value caused by sample material difference to be processed Damage power is different, rotates Glan prism, is precisely adjusted to the power of incident femto-second laser pulse.
Further, the laser shooting location device of above-described He-Ne laser pen and dichroscope composition, wherein He-Ne laser pen selects other any visible light wave range laser light sources.
Further, above-described first gold medal reflecting mirror, Glan prism, dichroscope, convex lens and the reflection of the second gold medal Mirror, which is respectively mounted, to be fixed on two-dimentional adjustable optical mirror holder, and the left and right of optical path, pitching are adjustable.
Invention also provides a kind of based on femtosecond laser into the large format mark range scaling method of silk, step packet It includes:
Mark range in the first step, the calibration direction z, stepping mobile example, step-length are set as 0.5mm in the z-direction, simultaneously After each stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing, sample moves record at this time Dynamic distance, as the mark range on the direction z;
Mark range on second step, the calibration direction xy, takes the middle position of the mark length on the direction z, and fixation is to be added Work sample, mark figure use USAF-1951 resolving power test target array, observe the deletion condition of marking figure, obtain on the direction xy Mark range.
Further, above-described mark figure includes but is not limited to resolving power test target array, or round, square Figure.
Further, spherical surface mark described above, since mark will appear distortion on curved surface, pretreatment mark picture disappears Except distortion method are as follows: pre- mark figure is carried out curved surface or spherical projection calculates, revised picture is obtained, is then input to vibration Mirror controls software to get distortionless curved surface or spherical surface mark is arrived.
Advantages and beneficial effects of the present invention:
The present invention proposes a kind of large format marking system and mark range scaling method based on femtosecond laser at silk, is applicable in In the marking of large format, three-dimension curved surface sample, the high quality laser marking of large format and curved surface may be implemented, solve existing sharp The problems such as light marking system operating distance is short, mark range is small is related to the big object mark field such as big machinery part, aircraft.
Detailed description of the invention
Fig. 1 is based on femtosecond laser into the large format marking system schematic diagram of silk.
Fig. 2 is 2-D vibration mirror scanning system schematic diagram.
Fig. 3 widens mark range schematic diagram at silk for femtosecond laser.
Fig. 4 is that spherical surface mark picture pre-processes schematic diagram, to eliminate distortion: (a) picture to be processed;(b) make spherical projection Amendment picture afterwards.
Appended drawing reference: 1- femto-second laser;2- the first gold medal reflecting mirror;3- Glan prism;4- dichroscope;5- convex lens; 6- 2-D vibration mirror scanning system;7- the second gold medal reflecting mirror;8- specimen holder;9-He-Ne laser pen;10- 2-D vibration mirror;11- is calculated Machine;12- femtosecond laser;13- femtosecond laser is at silk region, the direction 14-xy mark maximum breadth.
In order to which the technical features, objects and effects of the invention are more clearly understood, the Detailed description of the invention present invention is now compareed Specific embodiment.
Specific embodiment
Fig. 1 is anti-at the large format marking system schematic diagram of silk, including femto-second laser 1, the first gold medal based on femtosecond laser Penetrate mirror 2, Glan prism 3, dichroscope 4, convex lens 5,2-D vibration mirror scanning system 6, the second gold medal reflecting mirror 7,8 and of specimen holder He-Ne laser pen 9.Its described femto-second laser 1 provides high energy pulse for exporting femtosecond laser for mark;Described first Golden mirror 2 changes optic path direction for reflecting femtosecond laser;The Glan prism 3, it is winged for continuously adjusting by rotation The power of second laser pulse;The dichroscope 4, first is that being combined with the first gold medal reflecting mirror 2, for reflecting the femtosecond of collimated incident Laser, second is that the He-Ne visible light that transmissive He-Ne laser pen 9 exports positions mark location for identifying optical path;It is described convex Lens 5 induce air ionization at silk for focusing femtosecond laser;The 2-D vibration mirror scanning system 6 is as shown in Fig. 2, include two Galvanometer 10 and computer 11 are tieed up, wherein the 2-D vibration mirror 10 is made of two pieces of reflecting optics of orthogonal placement, is used for group It closes reflection laser and carries out two-dimensional scanning;The computer 11 scans for controlling 2-D vibration mirror 10, controls beam motion track, Text or icon indicia needed for being formed;The second gold medal reflecting mirror 7, for reflecting the light onto horizontal direction mark;It is described Specimen holder 8, for fixing sample to be processed;The He-Ne laser pen 9 is accurately located on sample for generating visible light Mark location.
The femto-second laser 1 used in the present invention is implemented is titanium-doped sapphire laser, central wavelength 800nm, arteries and veins Wide 42fs, repetition rate 2.5KHz, or select the femto-second laser of other models.Femtosecond laser is through the first gold medal reflecting mirror 2 and two It is collimated to Look mirror 4, after being focused by convex lens 5, normal incidence to 2-D vibration mirror scanning system 6, through vibration mirror reflected to the below Two gold medal reflecting mirrors 7, femtosecond laser is in the horizontal direction at silk.Stepping mobile example in the z-direction, step-length are set as 0.5mm, while every After secondary stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing.Sample is mobile at this time for record Distance, the as mark range on the direction z.Take the middle position of the mark length on the direction z, fixed sample to be processed.It beats Shape of marking on a map uses USAF-1951 resolving power test target array, observes the deletion condition of marking figure, obtains the mark model on the direction xy It encloses, high quality mark processing can be carried out in entire chevilled silk length.
Fig. 3 widens mark range schematic illustration at silk for femtosecond laser, and sample is placed in this femtosecond laser into silk region 13 or meets in the bigger region of sample ablation threshold mark may be implemented, wherein the maximum breadth in the direction xy is dotted line 14, Chevilled silk length can be increased, further widen mark breadth.
When Fig. 4 illustrates spherical surface sample mark, distortions correction method: pre- mark figure is subjected to spherical projection calculating, is obtained To revised picture, it is then input to galvanometer control software, realizes distortionless spherical surface mark.
The relevant explanation of the present invention:
1. all features, method disclosed in the present invention or in the process the step of, in addition to mutually exclusive feature or step Outside, it can be combined in any way.
2. any feature disclosed in the present invention unless specifically stated can be equivalent by other or with similar purpose Alternative features replaced.That is, unless stated otherwise, each feature is in a series of equivalent or similar characteristics An example.

Claims (9)

1. it is a kind of based on femtosecond laser at the large format marking system of silk, which is characterized in that it is anti-including femto-second laser, the first gold medal Penetrate mirror, Glan prism, dichroscope, convex lens, 2-D vibration mirror scanning system, the second gold medal reflecting mirror, specimen holder, computer and He-Ne laser pen;The wherein femto-second laser provides high energy pulse for exporting femtosecond laser for mark;Described first Golden reflecting mirror changes optic path direction for reflecting femtosecond laser;The Glan prism, by rotation, for continuously adjusting The power of femto-second laser pulse;The dichroscope, first is that reflection femtosecond laser is used for laser with the first gold medal arrangement of mirrors The collimation of light beam, second is that the He-Ne visible light of transmission He-Ne laser pen output positions mark location for identifying optical path;Institute Convex lens is stated, for focusing femtosecond laser, induces air ionization at silk;The 2-D vibration mirror scanning system includes orthogonal puts The two pieces of eyeglasses set, for combining control incident beam two-dimensional scanning;The second gold medal reflecting mirror, for reflecting the light onto water Square to mark;The specimen holder, for fixing sample to be processed;The computer, for controlling 2-D vibration mirror scanning, control Beam motion track forms required text or icon indicia;The He-Ne laser pen, for generating visual identification light, accurately The mark location being located on sample makes mark process visualization, convenient for observation.
2. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described The second gold medal reflecting mirror size is changed according to sample breadth size, when processed sample breadth is larger, select large-sized gold anti- It penetrates mirror and further widens mark breadth.
3. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described Convex lens suitable focal length is selected according to sample size to be processed, pattern;When processing curve sample, focal length convex lens is selected Long chevilled silk is generated, working range is improved, high quality mark processing is realized in entire chevilled silk length, without to light beam or sample position It sets and is accurately controlled.
4. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described Glan prism be equipped with scale, according to sample material to be processed it is different caused by threshold impairment power it is different, rotate Glan prism, The power of incident femto-second laser pulse is precisely adjusted.
5. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described He-Ne laser pen and dichroscope form laser shooting location device, wherein He-Ne laser pen be any visible light wave range Laser light source.
6. it is according to claim 1 it is a kind of based on femtosecond laser at the large format marking system of silk, it is characterised in that: it is described The first gold medal reflecting mirror, Glan prism, dichroscope, convex lens and the second gold medal reflecting mirror be respectively mounted and be fixed on two-dimentional adjustable optical On mirror holder, the left and right of optical path, pitching are adjustable.
7. it is according to claim 1-6 it is a kind of based on femtosecond laser at the large format mark range calibration side of silk Method, it is characterised in that mark range demarcating steps include:
Step 1: the mark range on the calibration direction z, stepping mobile example, step-length are set as 0.5mm in the z-direction, while every time After stepping, all in sample surfaces mark groove, until groove stops stepping when just completely disappearing, record sample movement at this time Distance, as the mark range on the direction z;
Step 2: the mark range on the calibration direction xy, takes the middle position of the mark length on the direction z, fixed sample to be processed Product, mark figure use USAF-1951 resolving power test target array, observe the deletion condition of marking figure to get on the direction xy Mark range.
8. it is according to claim 7 based on femtosecond laser at the large format mark range scaling method of silk, which is characterized in that The mark figure includes but is not limited to resolving power test target array, or round, square-shaped patterns.
9. it is according to claim 7 based on femtosecond laser at the large format mark range scaling method of silk, it is characterised in that: When processing curve or spherical surface sample, since mark will appear distortion on curved surface, pretreatment mark picture eliminates distortion method packet It includes:
Pre- mark figure is subjected to curved surface or spherical projection calculates, obtains revised picture, it is soft to be then input to galvanometer control Part, to obtain distortionless curved surface or spherical surface mark.
CN201910042382.7A 2019-01-17 2019-01-17 Large-breadth marking system based on femtosecond laser filamentation and marking range calibration method Active CN109759714B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111975208A (en) * 2020-09-28 2020-11-24 广州翔声智能科技有限公司 Application system of laser scoring machine
CN112404705A (en) * 2020-10-30 2021-02-26 山东师范大学 Femtosecond laser micro-nano processing device and use method and application thereof
CN113290386A (en) * 2021-05-10 2021-08-24 长春理工大学 Laser/ultrasonic composite low-damage complex microstructure machining device and method for stable flow area

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203124969U (en) * 2013-01-23 2013-08-14 刘茂珍 Laser micro machining equipment based on adaptive optics
CN104318047A (en) * 2014-08-18 2015-01-28 辽宁大学 Geometric distortion correcting method for laser marking system
CN104959736A (en) * 2015-07-23 2015-10-07 深圳英诺激光科技有限公司 Apparatus and method for processing micropore through filamentous laser
CN105005149A (en) * 2015-08-10 2015-10-28 武汉华工激光工程有限责任公司 Apparatus for carrying out light splitting on linear polarization laser and marking control
CN105620050A (en) * 2014-10-28 2016-06-01 大族激光科技产业集团股份有限公司 High-precision galvanometer error self-correcting device and high-precision galvanometer error self-correcting method based on machine vision
CN105834589A (en) * 2016-06-16 2016-08-10 吉林大学 Device and method for preparing microstructure on surface of silicon crystal through femtosecond laser filaments
CN105991949A (en) * 2015-03-06 2016-10-05 深圳市恒瀚电子科技有限公司 Laser scanning image distortion correction method, device and system
CN106853555A (en) * 2015-12-08 2017-06-16 彭翔 Laser Focusing control method in material processing
CN107335923A (en) * 2017-06-09 2017-11-10 中国科学院上海光学精密机械研究所 Femtosecond laser space-time focuses on metal surface high throughput processes apparatus and method
CN107768971A (en) * 2017-11-10 2018-03-06 吉林大学 The device and method of femtosecond laser chevilled silk array is produced using wedge-shaped quartz wafer
CN107931866A (en) * 2017-11-10 2018-04-20 吉林大学 The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203124969U (en) * 2013-01-23 2013-08-14 刘茂珍 Laser micro machining equipment based on adaptive optics
CN104318047A (en) * 2014-08-18 2015-01-28 辽宁大学 Geometric distortion correcting method for laser marking system
CN105620050A (en) * 2014-10-28 2016-06-01 大族激光科技产业集团股份有限公司 High-precision galvanometer error self-correcting device and high-precision galvanometer error self-correcting method based on machine vision
CN105991949A (en) * 2015-03-06 2016-10-05 深圳市恒瀚电子科技有限公司 Laser scanning image distortion correction method, device and system
CN104959736A (en) * 2015-07-23 2015-10-07 深圳英诺激光科技有限公司 Apparatus and method for processing micropore through filamentous laser
CN105005149A (en) * 2015-08-10 2015-10-28 武汉华工激光工程有限责任公司 Apparatus for carrying out light splitting on linear polarization laser and marking control
CN106853555A (en) * 2015-12-08 2017-06-16 彭翔 Laser Focusing control method in material processing
CN105834589A (en) * 2016-06-16 2016-08-10 吉林大学 Device and method for preparing microstructure on surface of silicon crystal through femtosecond laser filaments
CN107335923A (en) * 2017-06-09 2017-11-10 中国科学院上海光学精密机械研究所 Femtosecond laser space-time focuses on metal surface high throughput processes apparatus and method
CN107768971A (en) * 2017-11-10 2018-03-06 吉林大学 The device and method of femtosecond laser chevilled silk array is produced using wedge-shaped quartz wafer
CN107931866A (en) * 2017-11-10 2018-04-20 吉林大学 The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
谢应鑫: "《威力无穷的神光:激光技术》", 30 September 1999, 四川教育出版社 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111975208A (en) * 2020-09-28 2020-11-24 广州翔声智能科技有限公司 Application system of laser scoring machine
CN111975208B (en) * 2020-09-28 2024-05-24 广州翔声智能科技有限公司 Application system of laser scoring machine
CN112404705A (en) * 2020-10-30 2021-02-26 山东师范大学 Femtosecond laser micro-nano processing device and use method and application thereof
CN113290386A (en) * 2021-05-10 2021-08-24 长春理工大学 Laser/ultrasonic composite low-damage complex microstructure machining device and method for stable flow area

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