CN109164536A - Intelligent optical power distribution devices based on super surfacing - Google Patents

Intelligent optical power distribution devices based on super surfacing Download PDF

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Publication number
CN109164536A
CN109164536A CN201811037248.XA CN201811037248A CN109164536A CN 109164536 A CN109164536 A CN 109164536A CN 201811037248 A CN201811037248 A CN 201811037248A CN 109164536 A CN109164536 A CN 109164536A
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nano brick
axis direction
optical power
block assembly
power distribution
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CN109164536B (en
Inventor
邓娟
郑国兴
何桃桃
邓联贵
李子乐
陶金
武霖
刘子晨
毛庆洲
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Wuhan University WHU
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Wuhan University WHU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Polarising Elements (AREA)

Abstract

The present invention provides a kind of intelligent optical power distribution devices based on super surfacing, it is characterized in that, it include: to be arranged by nanometer block assembly, and the super surface array structure that different location carries out optical power fluctuation can will be respectively focused on along the orhtogonal linear polarizaiton light of nanometer block assembly major and minor axis direction incidence, wherein, nanometer block assembly is made of medium substrate and the nano brick being formed in medium substrate, and medium substrate and nano brick are sub-wavelength dimensions.Intelligence optical power distribution devices provided by the present invention utilize the polarization autonomous behavior for transmitting the super surfacing of phase, phase control is carried out respectively to the orthogonal optical wave in nano brick length axis direction, it will be respectively focused on different location along the orthogonal optical wave of nano brick length axis direction, to realize efficient optical power fluctuation.

Description

Intelligent optical power distribution devices based on super surfacing
Technical field
The invention belongs to micronano optical fields, and in particular to the intelligent optical power distribution devices based on super surfacing.
Technical background
Luminous-power distributor is the Passive Optical Components for optical signal being divided into multiple-channel output.Current luminous-power distributor has coupling Mould assembly splitter and branching type splitter.Coupled mode splitter is to couple optical signal in special coupling regime, is gone forward side by side The device that row is reallocated.The splitting ratio of this device is difficult to accuracy controlling and manufacture craft is more complex, higher cost.And bifurcated Optical path is directly divided into optical signal the device of multiple-channel output.Splitting ratio controls by adjusting branches angle, fixed for a certain kind Bifurcated optical path device be difficult to realize the regulation of real-time splitting ratio.Therefore urgently new method is broken through and innovation.
Summary of the invention
The present invention is to carry out to solve the above-mentioned problems, and it is an object of the present invention to provide a kind of intelligence based on super surfacing Optical power distribution devices, using the polarization autonomous behavior of the transmission super surfacing of phase, in nano brick length axis direction Orthogonal optical wave carries out phase control respectively, will be respectively focused on different location along the orthogonal optical wave of nano brick length axis direction, from And realize efficient optical power fluctuation.
The present invention to achieve the goals above, uses following scheme:
The present invention provides a kind of intelligent optical power distribution devices based on super surfacing characterized by comprising by receiving Rice block assembly arranges, and can will be respectively focused on along the orhtogonal linear polarizaiton light wave of nanometer block assembly major and minor axis direction incidence The super surface array structure of different location progress optical power fluctuation, wherein nanometer block assembly is by medium substrate and is formed in medium Nano brick in substrate is constituted, and medium substrate and nano brick are sub-wavelength dimensions.
Further, the intelligent optical power distribution devices provided by the invention based on super surfacing can also have following spy Sign: in super surface array structure, the length and width of nano brick is not of uniform size, by being parallel to x-axis direction and y-axis direction The nano brick of different length controls the phase and transmitance of incident light respectively, makes the linearly polarized light of the direction x linearly polarized light and the direction y It is respectively focused on different location after nano brick array, to realize optical power fluctuation.
Further, the intelligent optical power distribution devices provided by the invention based on super surfacing can also have following spy Sign: the structural parameters of nanometer block assembly obtain with the following method:
If x-axis direction and y-axis direction are respectively the direction parallel with the long axis of nano brick and short axle, with the parallel of transmission In x-axis direction linearly polarized light and be parallel to y-axis direction linearly polarized light efficiency and silicon nanometer block assembly phase value groupFor optimizing index;To each phase quantization value groupWith efficiency of transmission highest andWithDifference It is worth absolute value and is less than preset value as optimization aim, the structural parameters for meeting the optimization aim isCorresponding structure Parameter;WithSilicon nanometer block assembly x-axis direction is respectively indicated mutually to be worth with the position in y-axis direction.
Above-mentioned super surface array structure be as silicon nanometer block assembly arrangement made of array, silicon nanometer block assembly by The silicon nano brick etched in medium substrate and medium substrate is constituted.In silicon nanometer block assembly, medium substrate and silicon nano brick are The length, width and height of cuboid, medium substrate and silicon nano brick are sub-wavelength dimensions, and the working face of medium substrate is square.It is situated between Each face of matter substrate and the silicon nano brick etched thereon difference is parallel, and medium substrate and the silicon nano brick etched thereon The line of central point is perpendicular to medium substrate.
The length axis direction of super surface array structure be respectively cuboid nanometer block assembly long side and short side corresponding to Direction.In super surface array structure, the length, width and height of All Media substrate are equal;The height of all silicon nano bricks is equal, but length and width It is different, it should be according to phase Demand Design.Due to such a structure, so that super surface array structure has polarization independent special Property, the phase and transmission of the linearly polarized light of x-axis direction are parallel to by length (direction the x) control of silicon nano brick long axis direction Rate is parallel to the phase and transmission of the linearly polarized light in y-axis direction by length (direction the y) control of silicon nano brick short-axis direction Rate, so as to make the direction x linearly polarized light and the linearly polarized light in the direction y be respectively focused on different location after silicon nano brick array, To realize light splitting.
The design method of above-mentioned super surface array structure, comprising:
(1) the working face coordinate system of silicon nanometer block assembly is established, x-axis direction and y-axis direction work with medium substrate respectively Two groups of sides in face are parallel;
(2) it determines quantization phase sample grade N, constructs phase quantization value group Respectively indicate x-axis side To the phase quantization value with y-axis direction, I, j is equal or unequal;
(3) using the structural parameters of Electromagnetic Simulation method optimization silicon nanometer block assembly, structural parameters include putting down in silicon nano brick Row is in the height H and medium substrate working face side length C of length Lx, the Ly silicon nano brick in x-axis direction and y-axis direction;
To the corresponding phase of structural parameters of each nanometer block assemblyWith efficiency of transmission highest andWithAbsolute difference is less than preset value as optimization aim, and the structural parameters for meeting the optimization aim are Corresponding structural parameters.
(4) optimum results based on step (3) obtain the corresponding structural parameters of each phase, each unit Structural assignments to phase Position is answered to obtain super surface array structure.
The action and effect of invention
(1) present invention, which need to only change silicon nano brick cell size, can be realized phase-modulation within the scope of 2 π, simple process, With very high Stability and dependability.
(2) present invention can be realized inclined to the line polarisation in the direction x and the line in the direction y using the independent silicon nanometer block assembly of polarization Light is regulated and controled respectively, so that it is focused at the different location of different directions, realizes division of labor function.Further by means of The polarizer can change incident light in the light component of length axis direction, to realize real-time, arbitrary, accurate optical power point Match.
(3) incident light need to only can be changed in the light component of length axis direction in the present invention by the polarizer, realize any light splitting Than regulation, and it is easy to operate, be easily achieved.The principle for changing light component by the polarizer is that the light of any polarization direction is all The combination of two mutually orthogonal linearly polarized lights can be resolved into.Become the line polarisation along polarizer direction after the polarizer, into One step can decompose the line polarisation along nano brick length axis direction, thus realize the regulation of incident laser energy, and It is only necessary to change the direction of the polarizer then real-time, arbitrary, accurate regulation may be implemented.
(4) intelligent optical power distribution devices provided by the present invention are at low cost, can be mass;Unit size is small, convenient It is integrated, it can be widely applied to the fields such as fiber optic communication, sensing.
Detailed description of the invention
Fig. 1 is the partial structural diagram of super surface array structure designed in the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of silicon nanometer block assembly in the embodiment of the present invention;
Fig. 3 be the embodiment of the present invention in transmitted light phase and transmissivity with nano brick size result of variations figure, wherein (a) be X-direction phase with the long Lx of nano brick, width Ly change as a result, (b) being that X-direction transmitance becomes with the long Lx of nano brick, width Ly It is changing as a result, (c) be Y-direction phase with the long Lx of nano brick, width Ly change as a result, (d) being that Y-direction transmitance is long with nano brick Lx, width Ly result of variations;
Fig. 4 is the working principle diagram of optical power distribution devices in the embodiment of the present invention.
Specific embodiment
Below in conjunction with attached drawing to the specific reality of the intelligent optical power distribution devices of the present invention based on super surfacing The scheme of applying is described in detail.
<embodiment>
As illustrated in fig. 1 and 2, the intelligent optical power distribution devices 10 based on super surfacing provided by the present embodiment are served as reasons Super surface array structure made of multiple silicon nanometer block assemblies 11 arrange.Silicon nanometer block assembly 11 is by medium substrate 11a and thereon The silicon nano brick 11b of etching is constituted.Medium substrate 11a and silicon nano brick 11b is cuboid, and medium substrate 11a and silicon are received The length, width and height of rice brick 11b are sub-wavelength dimensions, and the working face of medium substrate 11a is square.It medium substrate 11a and carves thereon Each face difference of the silicon nano brick 11b of erosion is parallel, and the center of medium substrate 11a and the silicon nano brick 11b etched thereon The line of point is perpendicular to medium substrate 11a.The length, width and height of All Media substrate 11a are equal;The high phase of all silicon nano brick 11b Deng, but length and width are different.
Due to such a structure, so that super surface array structure has polarization autonomous behavior, pass through silicon nano brick 11b Length (direction the x) control of long axis direction is parallel to the phase and transmitance of the linearly polarized light of x-axis direction, passes through silicon nano brick Length (direction the y) control of 11b short-axis direction is parallel to the phase and transmitance of the linearly polarized light in y-axis direction, so as to make the side x It is respectively focused on different location after silicon nano brick 11b array to linearly polarized light and the linearly polarized light in the direction y, to realize light function Rate distribution.
The intelligence optical power distribution devices 10 include the following steps: more particularly to method
Step 1: determining dominant wavelength, i.e. operation wavelength according to actual use situation.Dominant wavelength 658nm in the present embodiment.Silicon Nano brick uses crystalline silicon material, and medium substrate uses fused silica glass material.
Step 2: phase quantization is 4 steps.Determine phase quantization value, respectively 0 °, 90 °, 180 ° and 270 °.This implementation Example can construct 16 groups of phase quantization value groups
Step 3: with the linearly polarized light for being parallel to x-axis direction and being parallel to y-axis side for the wavelength and quantization number of steps To linearly polarized light vertical incidence silicon nano brick cell operation face simultaneously, with the linearly polarized light for being parallel to x-axis direction of transmission and It is parallel to the efficiency of the linearly polarized light in y-axis direction and the phase value of x-axis direction and y-axis directionFor optimizing index, Scanning element structure size C, nano brick length and width Lx, Ly and height H, to obtain the optimal parameter for meeting optimization aim.To each Phase quantization value groupWith efficiency of transmission highest andWithAbsolute difference be less than preset value (15 °) are optimization aim, meet the structural parameters of the optimization aim i.e.Corresponding structural parameters;
Optimized to calculate to obtain C=250nm, H=310nm, different Lx, Ly correspond to different transmitance and phase delay Amount.
As shown in figure 3, analysis scanning result, with efficiency of transmission highest and minimum with the absolute difference of target phase group For optimization aim, it is satisfied the nano brick size (marking see circle in Fig. 3) of 4 stepped profiles.
Following table 1 provides L corresponding to each group phase valuexAnd LyValue.Wherein, X-T and Y-T, which is respectively indicated, is parallel to x-axis The transmission efficiency of the linearly polarized light in direction and the linearly polarized light for being parallel to y-axis direction, X-phase and Y-phase respectively indicate x-axis The phase value in direction and y-axis direction.As shown in Table 1, the silicon nanometer block assembly after optimization also obtains while guaranteeing phase value Obtained higher transmitance and consistency.
The 4 step position corresponding with Ly 1 Lx of table is mutually worth and corresponds to table through efficiency
Step 4: be based on following phase distribution calculation formula, obtain the phase value of arbitrary point on nano brick array, then Continuous phase carries out 4 step quantizations, and the optimum results for being then based on third step obtain the corresponding structural parameters of each phase, each list Meta structure arrangement obtains super surface array structure as shown in Figure 3 to corresponding position.
F is focal length in formula, and x, y are coordinate of the nano brick on super surface array.θx, θyFor be parallel to x-axis line polarisation and It is parallel to the line polarisation of the y-axis focus off-axis angle after nano brick array.λ is wavelength.
As shown in figure 4, the working principle of intelligence optical power distribution devices 10 provided in this embodiment are as follows: when along the direction x Line polarisation incidence when, the splitting ratios of intelligent optical power distribution devices 10 is 1:0, when along the line polarisation incidence in the direction y, intelligence The splitting ratio of energy optical power distribution devices 10 is 0:1.Since can to resolve into two mutually orthogonal lines inclined for the light of random polarization state The combination of vibration light.So by adjusting the direction of rotation of the polarizer, it can be to any splitting ratio M of the light of random polarization state realization: N。
Above embodiments are only the illustration done to technical solution of the present invention.It is according to the present invention to be based on super table The intelligent optical power distribution devices of plane materiel material are not merely defined in described content in the embodiment above, but with right It is required that subject to limited range.Any modification that those skilled in the art of the invention are made on the basis of the embodiment or Supplement or equivalence replacement, all in claim range claimed of the invention.

Claims (4)

1. a kind of intelligent optical power distribution devices based on super surfacing characterized by comprising
It is arranged, and can will divided along the orhtogonal linear polarizaiton light wave of nanometer block assembly major and minor axis direction incidence by nanometer block assembly The super surface array structure that different location carries out optical power fluctuation is not focused on,
Wherein, the nanometer block assembly is made of medium substrate and the nano brick being formed in the medium substrate, and described Medium substrate and the nano brick are sub-wavelength dimensions.
2. intelligence optical power distribution devices according to claim 1, it is characterised in that:
Wherein, in the super surface array structure, the length and width of the nano brick is not of uniform size, by being parallel to x-axis The nano brick of the different length in direction and y-axis direction controls the phase and transmitance of incident light respectively, make the direction x linearly polarized light and The linearly polarized light in the direction y is respectively focused on different location after nano brick array, to realize light splitting.
3. intelligence optical power distribution devices according to claim 1, it is characterised in that:
Wherein, the structural parameters of the nanometer block assembly obtain with the following method:
If x-axis direction and y-axis direction are respectively the direction parallel with the long axis of nano brick and short axle, x is parallel to transmission The linearly polarized light of axis direction and be parallel to y-axis direction linearly polarized light efficiency and silicon nanometer block assembly phase value group For optimizing index,
To each phase quantization value groupWith efficiency of transmission highest andWithAbsolute difference is less than pre- If value is used as optimization aim, the structural parameters for meeting the optimization aim areCorresponding structural parameters,
It is describedWithSilicon nanometer block assembly x-axis direction is respectively indicated mutually to be worth with the position in y-axis direction.
4. intelligence optical power distribution devices according to claim 1, it is characterised in that:
Wherein, the phase value of arbitrary point is calculated by following formula on nano brick array:
F is focal length in formula, and x, y are coordinate of the nano brick on super surface array.θx, θyFor be parallel to the line polarisation of x-axis with it is parallel In y-axis line polarisation after nano brick array focus off-axis angle, λ be wavelength.
CN201811037248.XA 2018-09-06 2018-09-06 Intelligent optical power distribution device based on super surface material Expired - Fee Related CN109164536B (en)

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CN109782390A (en) * 2019-03-08 2019-05-21 北京邮电大学 Beam splitter and its design method based on aperiodic sub-wave length grating
CN110989088A (en) * 2019-12-06 2020-04-10 武汉大学 Multiplexing/demultiplexing device and method based on lens and super-surface lens
CN111025430A (en) * 2019-11-11 2020-04-17 武汉大学 Super-surface array structure and application thereof in gray-scale adjustable image display multiplexing
CN112213800A (en) * 2020-11-04 2021-01-12 中航华东光电有限公司 Phase control type light deflection device based on micro-nano structure

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Publication number Priority date Publication date Assignee Title
CN109782390A (en) * 2019-03-08 2019-05-21 北京邮电大学 Beam splitter and its design method based on aperiodic sub-wave length grating
CN109782390B (en) * 2019-03-08 2020-06-16 北京邮电大学 Optical beam splitter based on non-periodic sub-wavelength grating and design method thereof
CN111025430A (en) * 2019-11-11 2020-04-17 武汉大学 Super-surface array structure and application thereof in gray-scale adjustable image display multiplexing
CN111025430B (en) * 2019-11-11 2021-05-18 武汉大学 Super-surface array structure and application thereof in gray-scale adjustable image display multiplexing
CN110989088A (en) * 2019-12-06 2020-04-10 武汉大学 Multiplexing/demultiplexing device and method based on lens and super-surface lens
CN112213800A (en) * 2020-11-04 2021-01-12 中航华东光电有限公司 Phase control type light deflection device based on micro-nano structure
CN112213800B (en) * 2020-11-04 2022-04-19 中航华东光电有限公司 Phase control type light deflection device based on micro-nano structure

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