CN108227079A - A kind of high-precision N-bit adjustable light delays - Google Patents
A kind of high-precision N-bit adjustable light delays Download PDFInfo
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- CN108227079A CN108227079A CN201611149460.6A CN201611149460A CN108227079A CN 108227079 A CN108227079 A CN 108227079A CN 201611149460 A CN201611149460 A CN 201611149460A CN 108227079 A CN108227079 A CN 108227079A
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- 238000005498 polishing Methods 0.000 claims description 19
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The present invention provides a kind of high-precision N bit adjustable light delays, are mainly made of optical switch chip, collimator lens array, free space time delay module, input-output optical fiber pigtail, pedestal.Wherein optical switch chip is integrated for the array of multiple optical switch elements, and free space time delay module realizes the integration of multistage delay unit, and the efficient coupling of the two is realized by lens array, ps grades of step-lengths, the adjustable light delay of 10 more than bit finally can be achieved.The present invention have many advantages, such as delay precision it is high, with it is roomy, small, light-weight, be easy to technique realization, be very suitable for the application in the fields such as Optical Controlled Phased Array Antenna system, particularly airborne, spaceborne radar.
Description
Technical field
The present invention relates to photoelectric device technical field, more particularly to a kind of high-precision tunable optical delayer.
Background technology
In phased array radar system, the phase shifter configuration of traditional electrical domain phased array antenna is related with microwave signal frequency,
This makes its instant bandwidth very narrow.To realize the big instant bandwidth of phased-array radar, true delay (True Time Delay) should be used
Technology replaces electrical domain phase shifter.Traditional TTD is made of waveguide or coaxial cable, this to microwave signal direct delay
Method is limited by electrical circuit density, and the time-delay network constructed is bulky and heavy, loss of signal is high, no matter in performance also
It is not have practicability in engineering.Microwave signal is modulated on light, timing circuit is done with optical waveguide, is i.e. optics is really delayed skill
Art (OTTD), device have it is small, light-weight, with it is roomy, transmission stablize, the advantage without mutual radiation interference, be microwave light
The important research field that son is learned.
To make antenna scanning direction adjustable, the necessary delay length of optical time delay unit is adjustable；And it is to ensure antenna scan angle
High-resolution, the tuning step-length of optical time delay unit should be sufficiently small.To meet high band radar application, it is delayed for step-by-step movement tunable optical
Device, delay stepping need to generally reach ps magnitudes, at this time it is believed that this is the adjustable light delay of a kind of " quasi-continuous ".
At present there are many implementations of adjustable light delay, mainly include " photoswitch+delay line ", optical resonator,
Chirp grating, photonic crystal etc..These schemes of optical resonator, chirp grating, photonic crystal can realize the continuous of light delay
Tuning, but all belong to resonance structure, delay-bandwidth product of the limited performance that optical signal postpones in resonance structure inherently, they
Bandwidth it is all narrow, it is impossible to meet the application demand of wideband radar." photoswitch+delay line " scheme can realize big bandwidth,
But belong to step-by-step movement tunable optical delay technique, in order to meet high band radar application, it must delay stepsize it is sufficiently small, delay essence
It spends sufficiently high.
" photoswitch+fiber delay time " scheme is classical step-by-step movement tunable optical delay technique, but is limited by optical fiber machining accuracy
System, delay precision can only accomplish 0.01ns or so, be suitable only for the low-frequency ranges application such as S-band, and by the volume of discrete optical fibre device
Weight limits, and devices difficult realizes integration and miniaturization, limits it in airborne/spaceborne application for waiting fields.
A kind of emerging technology is the tunable optical delay technique that " photoswitch+optical waveguide delay " on piece integrates, delay precision
0.1ps be can reach hereinafter, the delay precision requirement of high band radar application can be met, but it technique realization on also there are some
Problem.According to the small size waveguide fabrication of submicron order, there is the coupling efficiency of larger waveguide optical transmission loss, chip and optical fiber
The problems such as relatively low, delay path accurately controls difficult and chip performance high to process sensitivity；According to micron-sized big ruler
Very little waveguide, the bending radius of waveguide it is then larger, it can be achieved that delayer bit numbers it is less, it is impossible to meet application demand.In addition, piece
Upper integrated more bit optical time delay units, due to the temperature dependency of Refractive Index of Material, Time delay variation caused by temperature change holds very much
It is easily suitable with delay stepping even beyond delay stepping, thus device must have temperature control measures.In short, what current on piece integrated
" photoswitch+optical waveguide delay " tunable optical delay technique also exists relatively at a distance from practical.
Invention content
The purpose of the present invention proposes a kind of high-accuracy light-adjustable delayer, it prolongs aiming at the deficiencies in the prior art
When tuning step-length up to 1ps, delay precision up to 0.1ps, while have with roomy, small, tuned speed it is fast, be easy to technique
The advantages that realization, disclosure satisfy that the application demand of Optically controlled microwave wideband radar.
Technical solution disclosed by the invention is as follows：
Using binary system " photoswitch+light delay " topological structure, device mainly by optical switch chip, collimator lens array,
Free space time delay module, input-output optical fiber Pigtail, pedestal composition.For N-bit adjustable light delays, photoswitch core
Piece need to include N+1 optical switch element, and free space time delay module need to construct N number of free space delay unit, delays at different levels
Unit includes two delay paths, is connected respectively with two I/O ports of optical switch element, two in every stage of time delay unit
The delay length difference of a delay path is incremented by 2 times of relationships.Optical signals optical fiber inputs, through being carried out during the 1st optical switch element
Delay path selects, and selection enters some delay path of the 1st grade of delay unit, then selects the 2nd grade through the 2nd optical switch element
Delay path, and so on, until passing through N grades of delay paths, then output is switched to by the N+1 optical switch element
End, optical signal is after delay from optical fiber output.
The photoswitch can utilize electrooptic effect, thermo-optic effect, plasma dispersion effect etc. to realize "ON", "Off" shape
State controls, and can be based on silicon based SOI (Silicon On Insulator) material, organic polymer material etc..Optical switch chip
There are two types of may form：One kind is that N+1 optical switch element is 2 × 2 photoswitches entirely；Another kind is the 1st, the N+1 light is opened
Pass is 1 × 2 photoswitch, remaining is 2 × 2 photoswitches entirely.All optical switch element laid out in parallel forming arrays in optical switch chip.
It is processed for ease of lens array, the input/output waveguide of array of photoswitch is generally equally distributed or in the whole of minimum spacing
Several times are distributed.
To increase return loss, horizontal or vertical oblique polishing treatment can be carried out to chip input/output Waveguide end face,
It can make input/output optical waveguide and chip normal line of butt end when chip designs into certain angle of inclination.
The free space time delay module includes two parts, is respectively placed in the both ends of optical switch chip, adjacent delay
Unit is located in two parts time delay module respectively.Each delay unit is made of two delay paths, the delay in two paths it
Difference is incremented by with series in 2 times.Each delay path realizes that light path is turned back by two speculums, so as to be sent into next stage photoswitch.
Realize that delay length designs by designing reflector position, all speculums are pasted by high-precision patch and glue bond technique
Together in the time delay module of being integrally formed on the substrate with position groove.
The lens array uses equidistant lens design, and its spacing is equal between the minimum of photoswitch input/output terminal
Away from.All focal lengths of lens of lens array can be designed as identical, may be designed in the lens array of non-homogeneous focal length, so that
The coupling efficiency of each lens is more matched with corresponding light path, this depends on the tradeoff of coupling efficiency and process complexity.
The input-output optical fiber pigtail is the optical fiber pigtail with GRIN Lens, and GRIN Lens is saturating with collimation
Lens array, chip waveguide coupling, the input and output of optical signal are realized by optical fiber.
The pedestal is to realize optical switch chip, collimator lens array, free space time delay module, input and output
The Best Coupling light path of the components such as optical fiber Pigtail and the substrate mounting platform for being reliably fixed connection and designing, it should select heat
The relatively low material of the coefficient of expansion, mechanical structure should also have relatively low temperature sensitivity.Optical switch chip, collimation lens battle array
The components such as row, speculum and substrate, input-output optical fiber Pigtail are bonded together with pedestal by glue curing, holding phase
Fixation to position.Collimator lens array is located at the both sides of optical switch chip, and chip waveguide emergent light spot is collimated.Input and output
Optical fiber Pigtail is bonded and fixed on the substrate of speculum by glue and is coupled with collimation lens.
The advantage of the invention is that：Compared with traditional " photoswitch+fiber delay time " adjustable light delay, delay stepsize and prolong
Shi Jingdu is greatly improved, and small, light-weight, makes it in Optical Controlled Phased Array Antenna system, particularly airborne, spaceborne thunder
Application up to field is very strong；Compared with " photoswitch+optical waveguide delay " adjustable light delay that on piece integrates, technological feasibility
It is much better than, and light delay length is not acted upon by temperature changes.
Description of the drawings
Fig. 1 is the tunable optical delay topological structure schematic diagram that the present invention uses.
Fig. 2 is the exemplary structure diagram of 9-bit optical time delay units disclosed by the invention.
Fig. 3 is array of photoswitch arrangement schematic diagram disclosed by the invention.
Fig. 4 is chip optical waveguide end face disclosed by the invention vertically oblique polishing treatment schematic diagram.
Fig. 5 is horizontal tiltedly polishing one schematic diagram of example in chip optical waveguide end face disclosed by the invention.
Fig. 6 is horizontal tiltedly polishing two schematic diagram of example in chip optical waveguide end face disclosed by the invention.
Fig. 7 is chip optical waveguide inclined design schematic diagram disclosed by the invention.
Fig. 8 is the schematic diagram of free space unit delay path example one disclosed by the invention.
Fig. 9 is the schematic diagram of free space unit delay path example two disclosed by the invention.
Figure 10 is lens array schematic diagram disclosed by the invention.
Figure 11 is base platform structure diagram disclosed by the invention.
Specific embodiment
The present invention is described in detail below by specific embodiment and with reference to attached drawing：
The present invention proposes a kind of novel adjustable light delay of " photoswitch+free space optical delay ", use two into
Topological structure processed.As shown in Figure 1, smooth delay units at different levels have two delay paths, the difference of the two delay length is respectively Δ L, 2
ΔL、4ΔL……2n-1Δ L, wherein n are the bit numbers of delayer, and Δ L is the tuning step-length of delayer.The 1st, N+1 in figure
Photoswitch can also be substituted with 2 × 2 photoswitches.
Fig. 2 gives an exemplary structure diagram of 9-bit optical time delay units disclosed by the invention.1 is photoswitch in figure
Chip is made of 10 2 × 2 array of photoswitch, and 2 be collimator lens array, and 3 be speculum, and 4 be mirror substrate platform, and 5 are
Input/output optical fiber Pigtail.As shown in Fig. 2, 2 × 2 optical switch elements can realize " straight-through ", " intersection " two kinds of transmission shapes
State switches, and realizes that delay path selects by the state switching of every level-one optical switch element.A series of speculums and substrate platform
Two free space optical delay modules are formed, respectively positioned at optical switch chip both sides.Optical switch chip and free space optical delay
Module realizes efficient coupling by collimator lens array.Input/output optical fiber Pigtail is coupled respectively to by collimation lens
1 grade with the output terminal of last 1 grade of optical switch element.Accordingly, for the 9-bit optical time delay units of this example, by controlling per level-one light
The transmission state control of switch unit, you can realize using Δ L as step-length, 29The adjustable delay of step number.
Array of photoswitch arrangement is as shown in Figure 3.Figure medium spacing a is same 2 × 2 optical switch element, two input/output
The centre-to-centre spacing of waveguide, spacing b are the centre-to-centre spacing of the adjacent input/output waveguide of adjacent optical switch element.For ease of collimation lens
Array is processed, and all optical switch elements should equidistantly arrange, and figure medium spacing a and b should meet integral multiple relation, wherein smaller
Spacing is the centre-to-centre spacing of adjacent lens in lens array.A kind of simplest situation is given in this example, i.e. a=b is also equal to
The adjacent lens centre-to-centre spacing of lens array.The present invention does not impose any restrictions the controlling mechanism of photoswitch, chip material, such as controls
Making mechanism can be thermo-optic effect, electrooptic effect, plasma dispersion effect, MEMS etc., chip material can be silicon (containing SOI),
Organic polymer etc..Using SOI materials in this example, the pass switching technique based on plasma dispersion effect.
To increase return loss, incident light and the chip normal line of butt end of chip waveguide can be designed with certain angle, referred to as
Oblique incidence, for the oblique incidence light is made expeditiously to be coupled into chip optical waveguide, optical waveguide should also be protected with chip normal line of butt end
Hold certain angle.The angle of inclination there are many implementation, including to the vertical oblique polishing of chip end face, horizontal tiltedly polishing or
Optical waveguide is just made to keep the angle of inclination with chip normal line of butt end when chip designs.
Fig. 4 gives a kind of Waveguide end face to optical switch chip and carries out the vertical tiltedly exemplary schematic diagram of polishing treatment.Figure
In 1 be chip substrate material, 2 be chip light waveguide-layer, and 3 tiltedly polish angle for Chip Vertical, and 4 be lens array, click and sweep in figure
Line has marked the profile signal of launching spot.Vertical tiltedly polishing treatment is that up-narrow and down-wide formula tilts in this example, also can be wide at the top and narrow at the bottom
The oblique polishing treatment of formula.Can two end faces of pair chip coupled with lens array carry out vertical oblique polishing treatment, also can only pair with
The chip end face of input/output fiber coupling carries out vertical oblique polishing treatment.
Fig. 5 gives a kind of Waveguide end face progress to optical switch chip the horizontal tiltedly exemplary schematic diagram of polishing treatment.Figure
In 1 be chip, 2 be lens array, and 3 be optical waveguide in chip, and 4 tiltedly polish angle for chip level, and figure chain lines mark
Light path is illustrated.Can two end faces of pair chip coupled with lens array carry out horizontal oblique polishing treatment, also can only pair with input/
The chip end face of output optical fibre coupling carries out horizontal oblique polishing treatment.
Fig. 6 gives another Waveguide end face progress to optical switch chip the horizontal tiltedly exemplary schematic diagram of polishing treatment.
1 is chip in figure, and 2 be lens array, and 3 be optical waveguide in chip, and 4 tiltedly polish angle for chip level, and figure chain lines mark
Light path signal.Chip polishing mode is identical with example shown in fig. 5, and only each lens unit of lens array is adopted in this example
It is designed with tilting, therefore different coupled to the light path of free space.
Fig. 7 gives a kind of exemplary schematic diagram of chip optical waveguide inclined design.1 is chip in figure, and 2 be lens array, 3
For optical waveguide in chip, figure chain lines have marked light path signal.This example does not carry out oblique polishing treatment to chip, and in chip
Make input/output optical waveguide and chip normal line of butt end during design into certain angle of inclination.This example chips both ends optical waveguide into
It has gone inclined design, also only pair can carry out inclination optical waveguide design with one end of input/output fiber coupling.
Fig. 8 gives a kind of exemplary schematic diagram of free space unit delay path.One of light timing circuit is：Light
Upper road output terminal of the signal through i-th of (1≤i≤N) optical switch element exports, by Lens Coupling to free space, by certainly
Light path reflexed, then the lower road by Lens Coupling to i+1 optical switch element are realized by the speculum of space optical delay module
Output terminal.Another light timing circuit is：Optical signal passes through free space optical from the lower road output terminal output of i-th of photoswitch
In time delay module after light path reflexed coupling input to i+1 photoswitch upper road input terminal.For simplicity, this example is set
All speculums and incident ray angle at 45 °.As shown in the figure, 4 symmetrically placed speculums constitute two light paths, light path
The adjustable delay length of i.e. this grade delay unit of the optical path difference of respectively L1, L2, L1 and L2.As previously mentioned, adjacent level delay is single
The adjustable delay length of member is incremented by 2 times.In the design, the optical path difference of delay unit L1 and L2 at different levels need to be controlled accurately and be allowed to
Meet binary system incrementally to require, and the absolute growth of L1 or L2 need not be controlled strictly.L1 and L2 who that whom grows is short not important, only
Want technique that can realize.This example provides a kind of better simply example, i.e., every stage of time delay unit is L2 compared with L1 long.
Fig. 9 gives another exemplary schematic diagram of free space unit delay path.One of light timing circuit is：
Upper road output terminal of the optical signal through i-th of optical switch element exports, by Lens Coupling to free space, by free space optical
The speculum of time delay module realizes light path reflexed, then the upper road output terminal for passing through Lens Coupling to i+1 optical switch element.Separately
One light timing circuit is：Optical signal is exported from the lower road output terminal of i-th of photoswitch, by free space optical delay module
After light path reflexed coupling input to i+1 photoswitch lower road input terminal.
Figure 10 is collimator lens array schematic diagram disclosed by the invention.As shown in Figure 10, collimation lens is in the same direction
It arranges at a certain distance, lens spacing is corresponding with the spacing of waveguide chip channel.It is corresponding with optical switch chip waveguide spacing,
Figure 10 gives a kind of centre-to-centre spacing equally distributed lens array example.All lens centre axis are mutually flat in orientation
Row, the spherical surfaces of lens are aspherical in opposite side in the same side.All focal lengths of lens of lens array can be designed as it is identical,
The lens array of non-homogeneous focal length is can be designed as, so that the coupling efficiency of each lens is more matched with corresponding light path, this is depended on
The tradeoff of coupling efficiency and process complexity.The identical lens array of all focal lengths of lens is designed, because of different lens institutes
Corresponding light path is different, and coupling efficiency is also different whens light path does not wait.Coupling efficiency to make maximum light path and minimum light path is poor
Different sufficiently small, the spot diameters of lens should select sufficiently large.
Figure 11 is base platform structure diagram disclosed by the invention.As shown in figure 11,1 is platform base, and 2 be photoswitch
Array chip, 3 be collimator lens array, and 4 be free space optical delay module.Metal or non-metallic material can be used in base platform
Matter, platform centre is waveguide chip rest area, and both ends are respectively lens array rest area and free space time delay module rest area.
Each region retaining surface is parallel, and each face is according to the difference of waveguide chip, lens array and time delay module height highly
It is different, in order to keep the light path that chip light wave guiding center is formed with lens centre, mirror center coplanar.To make entirety
The temperature stability higher of device, optical switch chip, free space optical delay module, lens array preferably select identical substrate material
Material similar in material or coefficient of thermal expansion.
The present invention is described in detail in embodiment of above, and those skilled in the art can be according to the above description
Many variations example is made to the present invention.Thus, certain details in embodiment should not form limitation of the invention, the present invention
It will be using the range that the appended claims define as protection scope of the present invention.
Claims (15)
1. a kind of high-precision N-bit (N >=1) adjustable light delay, mainly by optical switch chip, free space optical delay module,
Lens array, input/output optical fiber Pigtail, pedestal composition, it is characterised in that：
A) the N-bit adjustable light delays include N grades of tunable optical delay units, and each light delay unit includes 2 light and is delayed
Circuit, the optical path difference of 2 light timing circuits are to form the tunable optical delay length of the light delay unit.N number of tunable optical is prolonged
The optical path difference of Shi Danyuan meets 20ΔL、21ΔL……2N-1Δ L relationships, wherein Δ L represent tunable optical delay stepsize.
B) optical switch chip includes N+1 optical switch element, N+1 optical switch element from top to bottom laid out in parallel, wherein
Being coupled with input optical fibre, to connect be the 1st optical switch element, and being coupled with output optical fibre, to connect be the N+1 photoswitch
Unit, the 1st optical switch element are 2 × 2 or 1 × 2 photoswitch, and the N+1 optical switch element is 2 × 2 or 2 × 1
Photoswitch, remaining N-1 optical switch element are 2 × 2 photoswitches.
C) 2 × 2 photoswitch includes 2 input terminals and 2 output terminals, respectively upper road input terminal, lower road input terminal, upper road
Output terminal, lower road output terminal, 1 × 2 photoswitch include 1 input terminal and 2 output terminals, wherein 2 output terminals are respectively upper road
Output terminal, lower road output terminal, 2 × 1 photoswitches include 2 input terminals and 1 output terminal, wherein 2 input terminals are respectively upper road
Input terminal, lower road input terminal.The upper road refers to close to the port of upside in 2 input terminals or output terminal, and lower road refers to 2 input terminals
Or close to the port of downside in output terminal.
D) 2 light timing circuits of i-stage (1≤i≤N) the tunable optical delay unit, loop configuration mode is, wherein one
Some output terminal of optical signal through i-th of optical switch element in a light timing circuit exports, and passes through Lens Coupling to free sky
Between, the speculum by free space optical delay module realizes light path reflexed, then pass through Lens Coupling to i+1 photoswitch list
Some input terminal of member, the optical signal in another light timing circuit pass through from another output terminal output of i-th of photoswitch
In free space optical delay module after light path reflexed coupling input to i+1 photoswitch another input terminal.
E) the free space optical delay is made of two parts optical delay module, is respectively placed in the both sides of optical switch chip, at different levels
Light delay unit, which interleaves, to be set in two parts time delay module.
F) optical delay module is made of a series of speculums with substrate material, by rows of mirrors cloth design realize it is at different levels can
Dim delay length.
G) optical switch chip light input/output waveguide described in and free space optical delay module, the two by lens array into
Row coupling.
H) components such as the optical switch chip, free space optical delay module, lens array, input/output optical fiber Pigtail,
Realize that Best Coupling to each other and relative position are fixed by the pedestal mechanical structure.
2. i-stage tunable optical delay unit as described in claim 1, it is characterised in that：In one of light timing circuit
Upper road output terminal of the optical signal through i-th of optical switch element exports, by Lens Coupling to free space, by free space optical
The speculum of time delay module realizes light path reflexed, then the lower road input terminal by Lens Coupling to i+1 optical switch element, separately
Optical signal in one light timing circuit passes through free space optical delay module from the lower road output terminal output of i-th of photoswitch
After middle light path reflexed coupling input to i+1 photoswitch upper road input terminal.
3. i-stage tunable optical delay unit as described in claim 1, it is characterised in that：In one of light timing circuit
Upper road output terminal of the optical signal through i-th of optical switch element exports, by Lens Coupling to free space, by free space optical
The speculum of time delay module realizes light path reflexed, then the upper road input terminal by Lens Coupling to i+1 optical switch element, separately
Optical signal in one light timing circuit passes through free space optical delay module from the lower road output terminal output of i-th of photoswitch
After middle light path reflexed coupling input to i+1 photoswitch lower road input terminal.
4. light delay unit as described in claim 1, timing circuit can be delayed by adjacent optical switch element+free space
It constructs, can also be constructed by the optical switch element+free space delay being spaced.
5. N grades of tunable optical delay unit as described in claim 1 need to only form N number of length as described in claim 1 and differ
Optical path difference, but the sequencing of smooth delay units construction optical path differences at different levels is not intended to limit.
6. optical switch chip as described in claim 1, can utilize thermo-optic effect, electrooptic effect, plasma dispersion effect or
MEMS physical mechanisms are realized, can be based on silicon, organic polymer material is realized.
7. optical switch chip as described in claim 1, it is characterised in that：By carrying out vertical tiltedly polishing to chip waveguide end face
It handles to increase return loss.
8. optical switch chip as described in claim 1, it is characterised in that：By carrying out horizontal tiltedly polishing to chip waveguide end face
It handles to increase return loss.
9. optical switch chip as described in claim 1, it is characterised in that：Design makes chip input/output waveguide and die terminals
The angled inclination of face normal.
10. lens array as described in claim 1, it is characterised in that：Each lens unit is using non-homogeneous or uniform focal length.
11. free space time delay module as described in claim 1, it is characterised in that：By etching forming position on substrate
Graticule realizes being accurately positioned for speculum.
12. pedestal as described in claim 1 and free space time delay module substrate, it is characterised in that：It avoids selecting temperature quick
Ability and mechanical structure.
13. input/output optical fiber Pigtail as described in claim 1, it is characterised in that：It is the optical fiber with GRIN Lens
Tail optical fiber.
14. optical time delay unit as claimed in claim 8, it is characterised in that：Each lens unit of lens array uses tilting
Design.
15. optical time delay unit as claimed in claim 9, it is characterised in that：Each lens unit of lens array uses tilting
Design.
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| CN201611149460.6A CN108227079A (en) | 2016-12-09 | 2016-12-09 | A kind of high-precision N-bit adjustable light delays |
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| CN113376753A (en) * | 2021-06-18 | 2021-09-10 | 中国电子科技集团公司第三十四研究所 | Multi-order cascade optical signal delay amount adjustable delay device |
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