CN1397815A - Microphotoelectric machinery for regulatable light delay line - Google Patents
Microphotoelectric machinery for regulatable light delay line Download PDFInfo
- Publication number
- CN1397815A CN1397815A CN02121483A CN02121483A CN1397815A CN 1397815 A CN1397815 A CN 1397815A CN 02121483 A CN02121483 A CN 02121483A CN 02121483 A CN02121483 A CN 02121483A CN 1397815 A CN1397815 A CN 1397815A
- Authority
- CN
- China
- Prior art keywords
- silicon
- shaped
- delay line
- mirror array
- corner cube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Optical Communication System (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
An adjustable light delay line as photoelectric micromachine is disclosed. A movable right-angle reflector array is arranged on a transversely regulating axle in the front of fixed right-angle reflector array which has incident port and exit port. At the incident (exit) port, there are collimating lens, V-shaped silicon slot and optical fibre in the slot. Its advantages are high integrated level, high performance and low couple loss between optical signal and fibre.
Description
Technical field
The invention belongs to the optical instrument class, relate in particular to the device of optics low-light transmission.
Background technology
At present, have fixed delay or fixed delay variable optical delay line at interval, be used for phased array radar system.United States Patent (USP) 6351587 B1 and European patent EP 1099965 A2, EP1030534 A2 disclose the technology that adopts multiple optical fibre array to produce fixed delay variable optical delay line at interval, though this technology has obtained application in full optical data transmission system.But the variable optical delay line of this structure can not carry out continuous fine adjustment to the phase place of signal.
Summary of the invention
The purpose of this invention is to provide a kind of low-light electromechanical of variable optical delay line, solve an above-mentioned difficult problem, to realize needs the fine setting of light signal continuous phase.
The object of the present invention is achieved like this: a kind of low-light electromechanical of variable optical delay line, and it fixedly is provided with the shifting axle of lateral adjustments in the place ahead of corner cube mirror array, and shifting axle is provided with mobile corner cube mirror array; Fixedly the entrance port of corner cube mirror array is provided with collimation lens A, and collimation lens A place is provided with silicon V-shaped A, is provided with incident optical in the silicon V-shaped A; Fixedly the exit portal of corner cube mirror array is provided with collimation lens B, and collimation lens B place is provided with silicon V-shaped B, is provided with outgoing optical fiber in the silicon V-shaped B.
Because the present invention has adopted above technical scheme, thereby has following advantage:
1, adopt low-light electromechanical technology (MOEMS), design can be to the variable optical delay line of light signal phase place continuous fine adjustment, and having solved the fixed delay optical delay line can not be to the shortcoming of signal phase continuous fine adjustment; Simultaneously, adopt ripe at present bulk silicon process, make the variable optical delay line height of this structure integrated and carry out large-scale production, and improve performance and reduce cost.
2, adopt low-light electromechanical technology, the design variable optical delay line adopts multireflection technique, realizes postponing the expansion of light path scope, thereby realizes on the time domain expansion to signal delay time.
3, the V-shaped groove and the lenticule of employing silicon are realized the efficient coupling between light signal and optical fiber, have reduced coupling loss.Especially adopt square catoptron technology, realize the parallel transmission of reflected signal,, ensure the parallel transmission of signal and the correct coupling of outgoing optical fiber when axially movable catoptron produces when axle moves with respect to incoming signal.
4, the present invention can be widely used in high-speed light transmission and optical switching system, microwave data transmission and disposal system and phased-array radar.In addition, this technology also can be used in the little interference system of sweep type optics, as miniature optical Michelson interferometer etc.
5, the present invention's structure is very simple, easy to manufacture, easy to operate, can realize the unidirectional or two-way continuous phase fine setting to light signal.
Description of drawings
Fig. 1 is the type shape structural representation of the low-light electromechanical of a kind of variable optical delay line of the present invention;
Fig. 2 amplifies the type shape structural representation of analysing and observe along the A-A line among Fig. 1;
Fig. 3 amplifies the type shape structural representation of analysing and observe along the B-B line among Fig. 1.
Among the figure:
1, fixedly the corner cube mirror array 2, mobile corner cube mirror array 3, collimation lens A
4, collimation lens B 5, incident optical 6, outgoing optical fiber
7, input optical signal 8, output light signal 9, shifting axle
10, silicon V-shaped A 11, silicon V-shaped B 12, silicon V-shaped
Embodiment
Below in conjunction with accompanying drawing enforcement of the present invention is done as detailed below:
In Fig. 1, Fig. 2, Fig. 3, fixedly the place ahead of corner cube mirror array 1 is provided with the shifting axle 9 of lateral adjustments, and shifting axle 9 is provided with mobile corner cube mirror array 2.Fixedly corner cube mirror array 1 be provided with several silicon V-shaped 12, mobile corner cube mirror array 2 is provided with several silicon V-shaped 12; Silicon V-shaped 12 angle is set to 90 degree.Fixedly the entrance port of corner cube mirror array 1 is provided with collimation lens A3, and collimation lens A3 place is provided with silicon V-shaped A10, is provided with incident optical 5 in the silicon V-shaped A10.Fixedly the exit portal of corner cube mirror array 1 is provided with collimation lens B4, and collimation lens B4 place is provided with silicon V-shaped B11, is provided with outgoing optical fiber 6 in the silicon V-shaped B11.Adopt inductively coupled plasma (ICP) dry etching technology on the silicon plate of silicon V-shaped A10, silicon V-shaped B11, making angle is the catoptron of 60 degree, and is coated with highly reflecting films to improve reflectivity on reflection mirror array.
Wherein, fixedly corner cube mirror array 1 and mobile corner cube mirror array 2, adopt inductively coupled plasma (ICP) dry etching technology, on silicon V-shaped 12, be shaped on several identical and match square catoptrons, and on reflection mirror array, be coated with highly reflecting films to improve reflectivity.Shifting axle 9 can adopt the silicon actuator, and under the driving voltage effect, it moves axially distance can realize continuous fine adjustment, thereby by adopting the corner cube mirror array to realize continuous fine adjustment to the light signal phase place.When shifting axle 9 produces from the axle deviation, can ensure the parallel transmission of reflected signal with respect to incoming signal in adjustment process.For transmission and the coupling loss that reduces light signal, adopt collimation microlens A3 that the input optical signal collimation is directional light; Adopt collimation microlens B4 that the parallel optical signal of output is focused on coupling and reach outgoing optical fiber 6.
In practical operation is used, adopt low-light electromechanical technology, can realize variable optical delay line with reflection configuration repeatedly.When the incident optical 5 of input optical signal 7 in V-shaped groove 12, when seeing through the collimation lens A3 of little shape optically focused, fixedly corner cube mirror array 1 and mobile corner cube mirror array 2 silicon V-shaped 12 between form the transmission of multichannel linear, reflected signal is with respect to the parallel transmission of incoming signal.At last at the fixing exit portal of corner cube mirror array 1, through the collimation lens B4 of little shape optically focused, and be arranged at outgoing optical fiber 6 in the V-shaped groove 12, outwards transmit and export light signal 8.Especially adopt silicon V-shaped 12 and lenticular collimation lens A3, collimation lens B4, can realize the coupling of the collimation of incident optical signal 7 and light signal to outgoing optical fiber 6.
In order to realize continuous adjustment to the light signal phase place, can regulate the fixedly distance between the corner cube mirror array 1 and mobile corner cube mirror array 2 by shifting axle 9, it regulate to close and to be: when the order of reflection of light signal is n=2,6,10,14 ... the time, the adjustable light path variation range (OPD) of realization is:
OPD＝2s+(n-2)·s/2，
Wherein, s is the maximum axial displacement of removable corner cube mirror array.Shifting axle 9 can adopt the silicon actuator, can realize that continuous axial moves under voltage signal drives.
In said process, input optical signal 7 also can repeat the reverse process of above-mentioned optical signal transmission through outgoing optical fiber 6, outwards transmits output light signal 8 by incident optical 5, thereby can realize the continuous adjustment of transmitted in both directions phase place to light signal.
The low-light electromechanical technology of variable optical delay line technology of the present invention can be used for Optical Time Division Multiplexing (OTDM) system, optical wavelength-division multiplex (WDM) system, is used for realizing that the phase place to light signal adjusts, and realizes multiplexed.Also can be used for the light digital information processing system, realize the phase matching of data-signal and clock signal; Also can be used for microwave data transmission system or phased-array radar, produce accurate delay the high-speed microwave data-signal.
Claims (6)
1. the low-light electromechanical of a variable optical delay line is characterized in that, fixedly the place ahead of corner cube mirror array is provided with the shifting axle of lateral adjustments, and shifting axle is provided with mobile corner cube mirror array; Fixedly the entrance port of corner cube mirror array is provided with collimation lens A, and collimation lens A place is provided with silicon V-shaped A, is provided with incident optical in the silicon V-shaped A; Fixedly the exit portal of corner cube mirror array is provided with collimation lens B, and collimation lens B place is provided with silicon V-shaped B, is provided with outgoing optical fiber in the silicon V-shaped B.
2. the low-light electromechanical of a sharp variable optical delay line according to claim 1 is characterized in that, fixedly the corner cube mirror array be provided with several silicon V-shaped.
3. the low-light electromechanical of a kind of variable optical delay line according to claim 1 is characterized in that, mobile corner cube mirror array be provided with several silicon V-shaped.
4. according to the low-light electromechanical of claim 2 or 3 described a kind of variable optical delay lines, it is characterized in that silicon V-shaped angle is 90 degree.
5. the low-light electromechanical of a kind of variable optical delay line according to claim 1 is characterized in that, the angle of silicon V-shaped A, silicon V-shaped B is 60 degree.
6. the low-light electromechanical of a kind of variable optical delay line according to claim 1 is characterized in that, shifting axle is the silicon actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021214832A CN1156716C (en) | 2002-06-26 | 2002-06-26 | Microphotoelectric machinery for regulatable light delay line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021214832A CN1156716C (en) | 2002-06-26 | 2002-06-26 | Microphotoelectric machinery for regulatable light delay line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1397815A true CN1397815A (en) | 2003-02-19 |
| CN1156716C CN1156716C (en) | 2004-07-07 |
Family
ID=4744988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021214832A Expired - Fee Related CN1156716C (en) | 2002-06-26 | 2002-06-26 | Microphotoelectric machinery for regulatable light delay line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1156716C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1320401C (en) * | 2003-12-11 | 2007-06-06 | 上海大学 | Decimal programmable light time delay device |
| CN100383551C (en) * | 2005-09-08 | 2008-04-23 | 上海交通大学 | Circulation controlling means of radar fiber delay line |
| CN102353520A (en) * | 2011-06-10 | 2012-02-15 | 北京航空航天大学 | Delay amount measuring method applied for fiber delay line measuring system and realization apparatus thereof |
| CN105891958A (en) * | 2016-06-15 | 2016-08-24 | 中国工程物理研究院流体物理研究所 | Large-stroke high-scanning frequency optical fiber delay line |
| CN106764600A (en) * | 2016-11-25 | 2017-05-31 | 沈阳师范大学 | Using light as curtain wall space structure design |
| CN108227079A (en) * | 2016-12-09 | 2018-06-29 | 上海信及光子集成技术有限公司 | A kind of high-precision N-bit adjustable light delays |
| CN108398780A (en) * | 2018-04-26 | 2018-08-14 | 中国工程物理研究院计量测试中心 | A kind of high speed optical delay line |
| CN112014348A (en) * | 2020-05-09 | 2020-12-01 | 中国航空工业集团公司北京长城航空测控技术研究所 | Optical delay line structure for time delay |
-
2002
- 2002-06-26 CN CNB021214832A patent/CN1156716C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1320401C (en) * | 2003-12-11 | 2007-06-06 | 上海大学 | Decimal programmable light time delay device |
| CN100383551C (en) * | 2005-09-08 | 2008-04-23 | 上海交通大学 | Circulation controlling means of radar fiber delay line |
| CN102353520A (en) * | 2011-06-10 | 2012-02-15 | 北京航空航天大学 | Delay amount measuring method applied for fiber delay line measuring system and realization apparatus thereof |
| CN102353520B (en) * | 2011-06-10 | 2013-06-19 | 北京航空航天大学 | Delay amount measuring method applied for fiber delay line measuring system and realization apparatus thereof |
| CN105891958A (en) * | 2016-06-15 | 2016-08-24 | 中国工程物理研究院流体物理研究所 | Large-stroke high-scanning frequency optical fiber delay line |
| CN106764600A (en) * | 2016-11-25 | 2017-05-31 | 沈阳师范大学 | Using light as curtain wall space structure design |
| CN106764600B (en) * | 2016-11-25 | 2018-06-19 | 沈阳师范大学 | Using space structure design of the light as curtain wall |
| CN108227079A (en) * | 2016-12-09 | 2018-06-29 | 上海信及光子集成技术有限公司 | A kind of high-precision N-bit adjustable light delays |
| CN108398780A (en) * | 2018-04-26 | 2018-08-14 | 中国工程物理研究院计量测试中心 | A kind of high speed optical delay line |
| CN112014348A (en) * | 2020-05-09 | 2020-12-01 | 中国航空工业集团公司北京长城航空测控技术研究所 | Optical delay line structure for time delay |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1156716C (en) | 2004-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6934431B2 (en) | Variable optical delay lines and methods for making same | |
| CN102576124B (en) | Optical waveguide device | |
| KR100549496B1 (en) | Multi-channel optical switch | |
| KR100422037B1 (en) | Variable optical attenuator of optical path conversion | |
| KR20040036929A (en) | Free-space wavelength routing systems with interleaved channels | |
| CN1156716C (en) | Microphotoelectric machinery for regulatable light delay line | |
| US20030012509A1 (en) | Switch and variable optical attenuator for single or arrayed optical channels | |
| CA2323914C (en) | Mems variable optical delay lines | |
| CN108415154B (en) | Light-adjustable delay line with three-dimensional structure | |
| GB2488424A (en) | Optical transceiver separating incoming and outgoing signals of same wavelength | |
| WO2023138026A1 (en) | Tunable optical filter and light channel monitoring module | |
| CN1446438A (en) | Reconfigurable optical switch | |
| US7231111B2 (en) | Tunable dispersion compensator | |
| US6782185B2 (en) | Optical variable attenuator and optical module | |
| CN102317815A (en) | Spectral device, optical multiplexer and method, optical add-drop multiplexer | |
| US7062120B2 (en) | Optical device and movable reflector | |
| CN1133084C (en) | Comb method for dividing waves | |
| CN101881863A (en) | Comb filter | |
| CN1093268C (en) | Band dividing and sharing method and device | |
| CN200983019Y (en) | 1xn mechanical light switch | |
| CN1576927A (en) | Multi-channel optical switch and method for manufacturing the same | |
| CN1451991A (en) | Tunable light filter | |
| CN1253737C (en) | Optical switch | |
| CN211061729U (en) | MEMS photoswitch with filtering function | |
| CN214310984U (en) | Miniature polarization-maintaining delay line based on piezoelectric ceramics |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |