CN105842781A - Large-scale continuous adjustable delay line device based on integrated light waveguides - Google Patents
Large-scale continuous adjustable delay line device based on integrated light waveguides Download PDFInfo
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- CN105842781A CN105842781A CN201610209547.1A CN201610209547A CN105842781A CN 105842781 A CN105842781 A CN 105842781A CN 201610209547 A CN201610209547 A CN 201610209547A CN 105842781 A CN105842781 A CN 105842781A
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- delay
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- light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
Abstract
The invention provides a large-scale continuous adjustable delay line device based on integrated light waveguides. The device comprises multiple light switches cascaded sequentially, multiple integrated light waveguides, multiple micro ring resonators cascaded sequentially, multiple heat light tuners and a time-delay controller, wherein the adjacent light switches are connected through one integrated light waveguide, each heat light tuner respectively corresponds to one micro ring resonator, the time-delay controller is connected with each heat light tuner and is used for sending a time-delay control signal to each heat light tuner, resonant frequencies of the micro ring resonators are made to generate deviation by the micro ring resonators and the multiple heat light tuners according to the time-delay control signal from the time-delay controller, the time-delay amount of work frequency range signals is made to be continuous and adjustable, and the light signals after time-delay are outputted to a photoelectric detector. Through the device, 0-2.1ns continuous adjustable time-delay in 5GHz bandwidth can be provided, and properties of high integration, small dimension and high robustness are realized.
Description
Technical field
The present invention relates to micro-nano photoelectric device technical field, particularly to a kind of based on integrated light guide the most continuous
Adjustable delay line device.
Background technology
Due to restriction and the restriction of the factors such as transition time and aperture effect, phase based on the phase shifter in tradition electrical domain
Control array antenna is difficult to obtain preferable signal bandwidth, limits the lifting of Phased Array Radars.Optical control beam forms technology
The important research field of Microwave photonics, is also the core technology of smart antenna in phased-array radar and next generation wireless communication,
It is by controlling phase contrast or the delay inequality of each microwave link in array, makes specific in far field of the radiation field of each microwave radiation source
Direction produces interferes greatly, reaches the purpose of directional transmissions (or reception), has that volume is little, lightweight, electromagnetism interference, bandwidth
Greatly, without advantages such as beam tilts.
Delay line device based on photon technology is the core component of optical control beam formation technology, experienced by based on optical fiber
Delay line device development, integrated light guide technology brings leap substantially to light real time delay.By microwave light transmission and
Light real time delay system is monolithically integrated on a chip the least, be phased array antenna and radio antenna optimal
Selecting, the least lighter Beam Forming System is also the inexorable trend of following phased array antenna development, especially to volume weight
In the mobile device of sensitive power consumption, the wireless application field such as spaceborne/airborne more irreplaceable.
In prior art, typically utilize the length change of optical fiber to provide step-type delays time to control, limited by machining accuracy
System, postpones precision and can only accomplish about 0.01ns, be only applicable to the low-frequency range application such as S-band, and be limited to discrete optical fibre device
Volume weight, devices difficult accomplishes integrated and miniaturization.Delay line device based on multistage " photoswitch+waveguide " is effectively improved
Delay precision, reduces device volume, but it can only provide step-by-step movement delays time to control, limit the choosing of antenna scan angle
Select.Delay line schemes based on micro-ring resonant cavity or other all-pass filters can provide continuous time delay to regulate and control, but is difficult to protecting
On the premise of demonstrate,proving big bandwidth of operation, it is provided that sufficiently large maximum delay.
Patent CN 102681091A discloses a kind of tunable optical delay line based on coupling optical waveguide, it is possible to achieve light is believed
Number can reach low distortion transmission and the adjustable effect of time delay in a big way, but this technical scheme realizes merely with fiber waveguide
Adjustable, adjustable extent is narrower.
Summary of the invention
The purpose of the present invention is intended at least solve one of described technological deficiency.
To this end, it is an object of the invention to propose a kind of continuously adjustabe delay line device on a large scale based on integrated light guide
Part, it is provided that the continuously adjustabe time delay of 0～2.1ns in 5GHz bandwidth, has that integrated level is high, size is little, the high spy of robustness
Point.
To achieve these goals, embodiments of the invention provide one, based on integrated light guide continuously may be used on a large scale
Adjust delay line device, including: multiple photoswitches, cascade before and after the plurality of photoswitch, wherein, the described photoswitch of head end is with high
Rate modulation device is connected with optical signal after access modulation；Multiple integrated light guides, the length of the plurality of integrated light guide, its
In, connected by an integrated light guide between adjacent two described photoswitches, wherein, by controlling the switching of described photoswitch
So that described optical signal is through the described integrated light guide path of different length, obtain amount of delay；Multiple micro-ring resonators, institute
Cascade before and after stating multiple micro-ring resonator；Multiple thermo-optical tunability devices, each described thermo-optical tunability device is correspondingly arranged at one respectively
On described micro-ring resonator；Delay controller, described delay controller is connected with each described thermo-optical tunability device, for each
Described thermo-optical tunability device forward delay interval control signal；Wherein, micro-ring resonator and thermo-optical tunability device are according to from delay controller
Delay control signal, make the resonant frequency of micro-ring resonator offset, it is achieved continuous to working frequency range signal lag amount
Adjustable, the optical signal after time delay exports to photodetector.
Further, described integrated light guide is slab waveguide based on SOI substrate.
Further, integrated light guide is made up of the slab waveguide made on soi substrates, and it is followed successively by dioxy from top to bottom
SiClx cover layer, silicon core layer, silica buried layer and silicon substrate.
Further, described silica overlayer thickness is 1um, and the thickness of described silicon core layer is 220nm, described titanium dioxide
The thickness of silicon buried layer is 2um, and the thickness of described silicon substrate is 725um.
Further, described thermo-optical tunability device is made up of sputtering chromium and gold on silica overlayer.
Further, the plurality of micro-ring resonator and the plurality of thermo-optical tunability device are integrated in one single chip.
Further, in the plurality of micro-ring resonator and the plurality of thermo-optical tunability device provide 5GHz bandwidth 0～2.1ns
Continuously adjustabe amount of delay.
Continuously adjustabe delay line device on a large scale based on integrated light guide according to embodiments of the present invention, having following has
Benefit effect:
(1) integrated light guide makes based on SOI substrate, has stable performance, a feature that chip degree is high；
(2) continuous delays time to control in cascade micro-ring resonator coordinates thermo-optical tunability device can provide big bandwidth；
(3) cascaded optical switch can switch the fixing waveguide of different length thus provide bigger stepping amount of delay；
(4) the continuously adjustabe time delay of 0～2.1ns in offer 5GHz bandwidth；
(5) have that integrated level is high, size is little, robustness high.
Aspect and advantage that the present invention adds will part be given in the following description, and part will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage are from combining the accompanying drawings below description to embodiment and will become
Substantially with easy to understand, wherein:
Fig. 1 is the signal of the delay line device of continuously adjustabe on a large scale based on integrated light guide according to the embodiment of the present invention
Figure；
Fig. 2 is the 500ps constant time lag utilizing regular length integrated light guide the to realize signal according to the embodiment of the present invention
Figure；
Fig. 3 is according to continuous in the range of 20ps～400ps utilizing cascade micro-ring resonator to realize of the embodiment of the present invention
Adjustable delay schematic diagram；
Reference:
The fixing fiber waveguide 3 of 1 cascaded optical switch 2 different length cascades micro-ring resonator
4 thermo-optical tunability device 5 delays time to control unit
6 high-speed modulator 7 photodetector 8 subsequent electrical signal processing units
9 adjustable continuous laser machine 10 radio-frequency head RF
Detailed description of the invention
Embodiments of the invention are described below in detail, and the example of embodiment is shown in the drawings, the most identical
Or similar label represents same or similar element or has the element of same or like function.Retouch below with reference to accompanying drawing
The embodiment stated is exemplary, it is intended to is used for explaining the present invention, and is not considered as limiting the invention.
As it is shown in figure 1, the continuously adjustabe delay line device on a large scale based on integrated light guide of the embodiment of the present invention, bag
Include: multiple photoswitches 1, multiple integrated light guide 2, multiple micro-ring resonator 3, multiple thermo-optical tunability device 4 and delay controller 5.
Specifically, cascade before and after multiple photoswitches 1.Wherein, the photoswitch being positioned at head end is connected with high-speed modulator 6, connects
Enter the optical signal after modulation.Wherein, high-speed modulator 6 is connected with adjustable continuous laser machine 9 and radio frequency end 10 respectively, for right
Adjustable continuous laser signal and the radio frequency rf signal of input are modulated, and with the optical signal after being modulated, output is to photoswitch 1
The length of multiple integrated light guides 2.Wherein, by an integrated light wave between two adjacent photoswitches 1
Lead 2 connections.
In one embodiment of the invention, integrated light guide 2 is slab waveguide based on SOI substrate.Specifically, integrated
Fiber waveguide 2 is made up of the slab waveguide made on soi substrates, its be followed successively by from top to bottom silica overlayer, silicon core layer,
Silica buried layer and silicon substrate.
Preferably, the thickness of silica overlayer is 1um, and the thickness of silicon core layer is 220nm, silica buried layer
Thickness is 2um, and the thickness of silicon substrate is 725um.
By control photoswitch 1 switching so that optical signal can through the integrated light guide path of different length, thus
Obtain amount of delay.Specifically, utilize photoswitch 1 to switch light-path, make optical signal through the integrated light guide 2 of different length, from
And make device can provide a series of stepping amount of delay, Δ T, 2 Δ T, 3 Δ T ... n Δ T etc..
To sum up, the present invention uses multistage " fiber waveguide of photoswitch+different length " that make based on SOI substrate to provide stepping
Delays time to control.
As in figure 2 it is shown, " fiber waveguide of photoswitch+different length " of the embodiment of the present invention, it is provided that a kind of fixing long
Degree integrated waveguide realizes 500ps time delay.Preferably, integrated light guide 2 is slab waveguide based on SOI substrate, designs cross section
For 450nm x 220nm so that waveguide group index is 4.26.Based on this, use the waveguide of a length of 35mm, it is possible to achieve
The time delay of 500ps.
Cascade before and after multiple micro-ring resonators 3.Wherein, cascade micro-ring resonator is a class all-pass based on integrated light guide
Filtering device, its frequency response characteristic can provide different transmitances to the signal of different frequency, and different time delays rings
Should.
Each thermo-optical tunability device 4 is correspondingly arranged on a micro-ring resonator 3 respectively.The resonator of cascade can linearly be folded
Add the frequency response characteristic of single micro-loop, thus bigger design flexibility is provided.
In one embodiment of the invention, thermo-optical tunability device 4 is made up of sputtering chromium and gold on silica overlayer.
Further, multiple micro-ring resonators 3 and multiple thermo-optical tunability device 4 are integrated in one single chip.
Delay controller 5 is connected with each thermo-optical tunability device 4, for controlling letter to each thermo-optical tunability device 4 forward delay interval
Number.
Specifically, micro-ring resonator 3 and thermo-optical tunability device 4, according to the delay control signal from delay controller 5, make micro-
The resonant frequency of ring resonator 3 offsets, thus changes the time-delay characteristics of micro-ring resonator 3, it is achieved to working frequency range signal
The continuously adjustabe of amount of delay, the optical signal output after time delay to photodetector 7, then by photodetector 7 by the light letter of input
Number be converted to the corresponding signal of telecommunication, export the subsequent electrical signal processing unit to rear class.
The present invention is by the design to key parameters such as micro-loop length, coupling space, coupling length, micro-loop quantity, permissible
Obtain frequency response characteristic and the time-delay characteristics meeting application demand.Thermo-optical tunability device 4 is the thermo-optic effect utilizing device material
Changing device time-delay characteristics, it is achieved electricity manipulation device time-delay characteristics, the programmable operations for delay line device provides feasibility,
It is achieved thereby that a set of device meets the demand of wide range of frequencies application.
By design cascade micro-ring resonator parameter, and it is aided with thermo-optical tunability, it is possible to obtain little scope is continuously adjustable prolongs
Time amount (0～Δ T).Wherein, in utilization cascade micro-ring resonator 3 can be implemented in 5GHz bandwidth, the continuously adjustabe of 0～300ps prolongs
Time.Utilize thermo-optical tunability device 3 and the control system of delay controller 4 composition, it is achieved amount of delay continuously adjustabe.Based on cascade micro-loop
Resonator combines the continuous delays time to control in thermo-optical tunability device can provide big bandwidth of operation.
Preferably, the company of 0～2.1ns in multiple micro-ring resonators 3 and multiple thermo-optical tunability device 4 can provide 5GHz bandwidth
Continuous adjustable delay amount.
As it is shown on figure 3, this example provides a kind of continuously adjustabe time delay device based on cascade micro-ring resonator, level is associated with
8 identical micro-ring resonator 3 mid frequencyes are f0), it is divided into 2 groups, often 4 micro-loop of group, each micro-loop is provided with conformal hot light
Electrode (thermo-optical tunability device 3).Modulate by two groups of micro-ring resonators 3 being done respectively rightabout carrier deviation, can be real
Now to the signal lag 25～400ps that frequency is f0.Considering the bandwidth of operation of 5GHz, this device can realize 25～325ps prolong
Time regulation.
To sum up, the present invention passes through appropriate design device parameters, makes this device realize continuously adjustabe delays time to control on a large scale.Device
Part maximum delay amount is up to 2ns, and amount of delay span of control is up to 0～2.1ns, and time delay bandwidth can reach more than 5GHz, thus
Make this device can meet S-band to the delays time to control demand of Ku wave band (2GHz～18GHz) interior microwave applications.
Continuously adjustabe delay line device on a large scale based on integrated light guide according to embodiments of the present invention, having following has
Benefit effect:
(1) integrated light guide makes based on SOI substrate, has stable performance, a feature that chip degree is high；
(2) continuous delays time to control in cascade micro-ring resonator coordinates thermo-optical tunability device can provide big bandwidth；
(3) cascaded optical switch can switch the fixing waveguide of different length thus provide bigger stepping amount of delay；
(4) the continuously adjustabe time delay of 0～2.1ns in offer 5GHz bandwidth；
(5) have that integrated level is high, size is little, robustness high.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show
Example " or the description of " some examples " etc. means to combine this embodiment or example describes specific features, structure, material or spy
Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Necessarily refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
Although above it has been shown and described that embodiments of the invention, it is to be understood that above-described embodiment is example
Property, it is impossible to be interpreted as limitation of the present invention, those of ordinary skill in the art is without departing from the principle of the present invention and objective
In the case of above-described embodiment can be changed within the scope of the invention, revise, replace and modification.The scope of the present invention
Extremely it is equal to by claims and limits.
Claims (7)
1. a continuously adjustabe delay line device on a large scale based on integrated light guide, it is characterised in that including:
Multiple photoswitches, before and after the plurality of photoswitch cascade, wherein, the described photoswitch of head end be connected with high-speed modulator with
Access optical signal after modulation；
Multiple integrated light guides, the length of the plurality of integrated light guide, wherein, logical between adjacent two described photoswitches
Cross integrated light guide to connect, wherein, be switched so that described optical signal is long through difference by control described photoswitch
The described integrated light guide path of degree, obtains amount of delay；
Multiple micro-ring resonators, cascade before and after the plurality of micro-ring resonator；
Multiple thermo-optical tunability devices, each described thermo-optical tunability device is correspondingly arranged on a described micro-ring resonator respectively；
Delay controller, described delay controller is connected with each described thermo-optical tunability device, for each described thermo-optical tunability
Device forward delay interval control signal；
Wherein, described micro-ring resonator and described thermo-optical tunability device, according to the delay control signal from delay controller, make institute
The resonant frequency stating micro-ring resonator offsets, it is achieved the continuously adjustabe to working frequency range signal lag amount, the light after time delay
Signal exports to photodetector.
2. continuously adjustabe delay line device on a large scale based on integrated light guide as claimed in claim 1, it is characterised in that institute
Stating integrated light guide is slab waveguide based on SOI substrate.
3. continuously adjustabe delay line device on a large scale based on integrated light guide as claimed in claim 2, it is characterised in that collection
Becoming fiber waveguide to be made up of the slab waveguide made on soi substrates, it is followed successively by silica overlayer, silicon core from top to bottom
Layer, silica buried layer and silicon substrate.
4. continuously adjustabe delay line device on a large scale based on integrated light guide as claimed in claim 3, it is characterised in that institute
The thickness stating silica overlayer is 1um, and the thickness of described silicon core layer is 220nm, the thickness of described silica buried layer
For 2um, the thickness of described silicon substrate is 725um.
5. continuously adjustabe delay line device on a large scale based on integrated light guide as claimed in claim 1, it is characterised in that institute
State thermo-optical tunability device to be made up of sputtering chromium and gold on silica overlayer.
6. continuously adjustabe delay line device on a large scale based on integrated light guide as claimed in claim 1, it is characterised in that institute
State multiple micro-ring resonator and the plurality of thermo-optical tunability device is integrated in one single chip.
7. the continuously adjustabe delay line device on a large scale based on integrated light guide as described in claim 1 or 6, its feature exists
In, the continuously adjustabe time delay of 0～2.1ns in the plurality of micro-ring resonator and the plurality of thermo-optical tunability device offer 5GHz bandwidth
Amount.
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Cited By (8)
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| CN107861194A (en) * | 2017-11-03 | 2018-03-30 | 电子科技大学 | A kind of N channel M positions integrated light guide tunable delay line |
| CN108227079A (en) * | 2016-12-09 | 2018-06-29 | 上海信及光子集成技术有限公司 | A kind of high-precision N-bit adjustable light delays |
| CN110161629A (en) * | 2019-04-17 | 2019-08-23 | 中山大学 | It is a kind of that adjustable optical delay line and preparation method thereof is integrated based on micro-loop array |
| CN110501779A (en) * | 2019-08-26 | 2019-11-26 | 南京航空航天大学 | Micro-loop delay matrix and microwave photon integrate multi-beam phased array chip, system |
| CN111431616A (en) * | 2020-03-31 | 2020-07-17 | 联合微电子中心有限责任公司 | Tunable true delay device and adjusting method |
| CN111913330A (en) * | 2020-08-17 | 2020-11-10 | 中国电子科技集团公司第四十四研究所 | High extinction ratio light time delay regulation and control structure and device |
| CN112444912A (en) * | 2020-10-22 | 2021-03-05 | 中国电子科技集团公司第五十五研究所 | High-speed integrated adjustable light delay line and preparation method thereof |
| CN116300151A (en) * | 2023-04-07 | 2023-06-23 | 武汉安湃光电有限公司 | Electro-optical frequency comb chip based on film lithium niobate |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108227079A (en) * | 2016-12-09 | 2018-06-29 | 上海信及光子集成技术有限公司 | A kind of high-precision N-bit adjustable light delays |
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| CN107861194B (en) * | 2017-11-03 | 2020-06-09 | 电子科技大学 | N-channel M-bit integrated optical waveguide tunable delay line |
| CN110161629A (en) * | 2019-04-17 | 2019-08-23 | 中山大学 | It is a kind of that adjustable optical delay line and preparation method thereof is integrated based on micro-loop array |
| CN110501779A (en) * | 2019-08-26 | 2019-11-26 | 南京航空航天大学 | Micro-loop delay matrix and microwave photon integrate multi-beam phased array chip, system |
| CN110501779B (en) * | 2019-08-26 | 2020-04-28 | 南京航空航天大学 | Micro-ring delay matrix and microwave photon integrated multi-beam phased array chip and system |
| CN111431616A (en) * | 2020-03-31 | 2020-07-17 | 联合微电子中心有限责任公司 | Tunable true delay device and adjusting method |
| CN111431616B (en) * | 2020-03-31 | 2021-07-09 | 联合微电子中心有限责任公司 | Tunable true delay device and adjusting method |
| CN111913330A (en) * | 2020-08-17 | 2020-11-10 | 中国电子科技集团公司第四十四研究所 | High extinction ratio light time delay regulation and control structure and device |
| CN112444912A (en) * | 2020-10-22 | 2021-03-05 | 中国电子科技集团公司第五十五研究所 | High-speed integrated adjustable light delay line and preparation method thereof |
| CN116300151A (en) * | 2023-04-07 | 2023-06-23 | 武汉安湃光电有限公司 | Electro-optical frequency comb chip based on film lithium niobate |
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