CN112130231B - Super-surface system for generating column vector beams with adjustable polarization orders and construction method - Google Patents

Super-surface system for generating column vector beams with adjustable polarization orders and construction method Download PDF

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CN112130231B
CN112130231B CN202010951979.6A CN202010951979A CN112130231B CN 112130231 B CN112130231 B CN 112130231B CN 202010951979 A CN202010951979 A CN 202010951979A CN 112130231 B CN112130231 B CN 112130231B
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brick
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梁聪玲
郑国兴
李子乐
单欣
李仲阳
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Wuhan University WHU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements

Abstract

The invention provides a super-surface system for generating a column vector beam with continuously adjustable polarization order, which comprises two cascade super-surface arrays, wherein each super-surface array comprises a plurality of nano-brick structure units, and each nano-brick structure unit comprises a working surface and a nano-brick arranged on the working surface; linearly polarized light is vertically incident to the super-surface system to obtain a column vector beam; linearly polarized light enters, the first super-surface array is fixed, the second super-surface array is rotated around the optical axis, and the polarization order of the outgoing column vector light beam can be continuously adjusted; continuously changing the polarization direction of the incident linearly polarized light, and continuously changing the polarization initial azimuth angle of the emergent column vector light beam; the invention also provides a construction method of the super-surface system, which is based on the functional relation of alpha-f (r, theta)<aθ2>And pi determines the steering angle arrangement of the nano bricks. The polarization order of the column vector light beam can be continuously adjusted only by rotating the super surface of the second plate, and the polarization order adjusting device is simple to assemble and adjust, small in size, light in weight and convenient to integrate.

Description

Super-surface system for generating column vector beams with adjustable polarization orders and construction method
Technical Field
The invention belongs to the technical field of micro-nano optics, and particularly relates to a super-surface system for generating a column vector beam with an adjustable polarization order and a construction method.
Background
Polarization is one of the most important properties of light waves, and vector beams refer to beams with a spatially non-uniform distribution of polarization states. The cylindrical vector beam is the most special type of vector beam, and the polarization state of the cylindrical vector beam is distributed in an axial symmetry mode on the cross section. The cylindrical vector light beam is a characteristic solution of a Helmholtz equation under a cylindrical coordinate system, and the light intensity of the cylindrical vector light beam at the original point of the coordinate is zero due to the existence of the polarization odd point, so that the light intensity is distributed annularly. The column vector beam has great application value in the fields of laser cutting, optical information processing, optical storage, particle capture and control, high-resolution imaging and the like due to the polarization characteristic of the column vector beam.
The current methods for generating cylindrical vector beams are mainly divided into two categories: active and passive methods. The active method mainly screens a required mode in a laser by specially designing a laser resonant cavity; the passive method mainly adopts the means of interference, birefringent crystal, spatial light modulator and the like to convert the light beam with uniformly distributed polarization state space into the column vector light beam. The main defects of the active method and the passive method adopted at present are that the optical system is complex, the stability is poor, the cost is high, and the adjustment of the polarization order of the generated column vector light beam often involves the adjustment of a plurality of optical elements, so that a new technology and a new method are needed for the generation of the column vector light beam with the dynamically adjustable polarization order.
The super-surface material has the advantages of small size, light weight, convenient processing and the like, can flexibly, effectively and accurately regulate and control the amplitude, the phase, the polarization state and the like of an optical wave electromagnetic field in a sub-wavelength scale, and is widely applied to various optical fields. By utilizing the regulation and control effect of the super surface on the light wave, a new thought and a new method are hopeful to be provided for the generation of the column vector light beam.
Disclosure of Invention
The invention aims to provide a super-surface system for generating a column vector beam with adjustable polarization order aiming at the defects of the prior art, so as to solve the technical problems of complex optical system for generating the column vector beam, high installation and adjustment requirements, poor stability, high cost and difficulty in dynamically adjusting the polarization order in the prior art.
In order to solve the technical problems, the invention adopts the following technical scheme:
a super-surface system for generating a column vector beam with continuously adjustable polarization order comprises two cascaded super-surface arrays, wherein each super-surface array comprises a plurality of nano-brick structure units, and each nano-brick structure unit comprises a working surface and a nano-brick arranged on the working surface;
linearly polarized light is vertically incident to the super-surface system to obtain a column vector beam;
when linearly polarized light enters, the first super-surface array is fixed, the second super-surface array is rotated around the optical axis, and the polarization order of the vector light beam of the emergent column can be continuously adjusted;
the polarization direction of the incident linearly polarized light is continuously changed, and the polarization initial azimuth angle of the emergent column vector light beam is also continuously changed.
Preferably, in the initial state, the turning angles of the nano-bricks of the corresponding nano-brick structural units at the same position on the two super-surface arrays are the same.
Preferably, the function of the nano brick structure unit is equivalent to a micro-nano half wave plate.
Preferably, the plurality of nano-tile structural units on a single super-surface array have the same dimensional parameters but different nano-tile turning angles.
Another object of the present invention is to provide a method for constructing a super-surface system for generating a cylindrical vector beam with a continuously adjustable polarization order, comprising the following steps:
s1: optimizing under the working wavelength to obtain the size parameters of the nano brick structure unit which is functionally equivalent to a micro-nano half-wave plate;
s2: setting two mutually perpendicular diameters of the super-surface array as an x axis and a y axis respectively, establishing an xoy coordinate system by taking the center of the super-surface as a coordinate origin, wherein a nano brick steering angle alpha of a nano brick structural unit is an included angle between a long axis L of the nano brick and the x axis, and the position coordinate of the central point of the nano brick is marked as (r, theta), wherein r is the polar diameter of the central point of the nano brick, theta is the polar angle of the central point of the nano brick, and the nano brick steering angle alpha of each nano brick structural unit on each super-surface array is determined by the position coordinate (r, theta) of the central point; the functional relation that the nano-brick steering angle alpha and the position coordinates (r, theta) of the central point of the nano-brick meet is as follows: α ═ f (r, θ) ═ f<aθ2>πWherein a is a parameter and takes a non-negative constant,<M>Nrepresenting the operation of taking the modulus of M to N; according to the adjustment requirement of the polarization order and the position coordinate (r, theta) of the central point of the nano brickDetermining the arrangement of the nano brick steering angles alpha of the nano brick structural units at each position on each super surface array according to the nano brick steering angle alpha functional relation;
s3: and (4) distributing the nano brick structure units with the size parameters obtained by optimizing in the step (S1) according to the nano brick steering angle arrangement mode of the nano brick structure units on each super surface array designed in the step (S2), preparing the target super surface array by a micro-nano processing method, and cascading the two processed same super surface arrays to obtain the required super surface system.
Preferably, the value a is determined by the polarization order adjustment range of the cylindrical vector beam.
Preferably, the maximum value of a is determined by the side length C of the working surface of the nano brick structural unit and the maximum radius r of the processed super surface arraymaxDetermining that the non-negative constant a satisfies:
Figure BDA0002677292420000021
preferably, the second super-surface rotates by delta theta around the optical axis, a linearly polarized light beam with an included angle of gamma between the vibration direction and the x axis sequentially passes through the two cascaded super-surface arrays, the light wave emitted from the super-surface array is a cylindrical vector light beam, and the polarization order of the light beam is as follows: n-4 a Δ θ, with an initial azimuthal angle of polarization:
Figure BDA0002677292420000022
preferably, the value range of the rotation angle Δ θ of the second super-surface array around the optical axis is as follows: delta theta epsilon [ -pi, pi), the adjustment range of the polarization order is as follows: { n | -4a π ≦ n<4a pi, n epsilon to Z, and rotating the second sheet of the super-surface array by a certain angle
Figure BDA0002677292420000031
Namely, the adjustment between two adjacent polarization orders is realized.
Compared with the prior art, the invention has the beneficial effects that: the super-surface system for generating the column vector beams with continuously adjustable polarization orders does not need to redesign and process a super-surface array aiming at each polarization order, can realize continuous adjustment of the polarization orders of the generated column vector beams only by changing the angle of the second super-surface rotating around the optical axis, and can continuously adjust the polarization initial azimuth angle of the emergent column vector beams by continuously changing the polarization direction of incident linearly polarized light; the invention has simple structure, does not need to construct a complex optical system, is convenient to manufacture, only needs to micromachine the super-surface array and cascade the super-surface arrays, has simple adjustment process, only needs to rotate the second super-surface array, and has the advantages of high efficiency, small volume, light weight, convenient integration and the like.
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FIG. 1 is a schematic optical path diagram of a super-surface system for generating a cylindrical vector beam with a continuously adjustable polarization order according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a nano-brick structural unit in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a super-surface array in an embodiment of the present invention;
FIG. 4 is a schematic diagram of the arrangement of the nano-brick structural units in the embodiment of the present invention;
FIG. 5 shows the simulation result of the response characteristics of the nano-brick structure unit functionally equivalent to the micro-nano half-wave plate in the embodiment of the present invention;
FIG. 6 is a distribution diagram of polar angle θ in the coordinates of the center point of the nano-brick in the embodiment of the present invention;
FIG. 7 is a graph of the distribution of the nano-brick turning angle α of the nano-brick structural units of the first sheet of the super-surface in an example of the invention;
fig. 8 is a distribution diagram of the nano-brick turning angle α of the nano-brick structural unit after the second super-surface is rotated by Δ θ ═ pi/6 in the embodiment of the present invention;
FIG. 9 is a cross-sectional polarization distribution plot of a cylindrical vector beam of different polarization orders and different initial azimuthal angles of polarization in an embodiment of the present invention;
wherein 1 is an incident polarized light wave; 2 is a first sheet of a super-surface array; 3 is a second sheet of the super-surface array; 4 is the vector beam of the emergent column; 5 is a nano brick; and 6 is the working surface of the nano brick structural unit.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the following embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The present invention is further illustrated by the following examples, which are not to be construed as limiting the invention.
The invention provides a super-surface system for generating a column vector beam with continuously adjustable polarization order, which comprises two cascaded super-surface arrays, wherein each super-surface array comprises a plurality of nano-brick structure units, and each nano-brick structure unit comprises a working surface and a nano-brick arranged on the working surface;
linearly polarized light is vertically incident to the super-surface system to obtain a column vector beam;
when linearly polarized light enters, the first super-surface array is fixed, the second super-surface array is rotated around the optical axis, and the polarization order of the vector light beam of the emergent column can be continuously adjusted;
the polarization direction of the incident linearly polarized light is continuously changed, and the polarization initial azimuth angle of the emergent column vector light beam is also continuously changed.
In an initial state, the nano-brick steering angles of the corresponding nano-brick structural units at the same position on the two super-surface arrays are the same. The dimension parameters of the plurality of nano-brick structural units on a single super-surface array are the same but the nano-brick steering angles are different.
The construction method of the super-surface system for generating the column vector beam with the adjustable polarization order comprises the following steps:
s1: optimizing under the working wavelength to obtain the size parameters of the nano brick structure unit which is functionally equivalent to a micro-nano half-wave plate;
s2: setting two mutually perpendicular diameters of the super-surface array as an x axis and a y axis respectively, establishing an xoy coordinate system by taking the center of the super-surface as a coordinate origin, wherein a nano brick steering angle alpha of a nano brick structural unit is an included angle between a long axis L of the nano brick and the x axis, and the position coordinate of the central point of the nano brick is marked as (r, theta), wherein r is the polar diameter of the central point of the nano brick, theta is the polar angle of the central point of the nano brick, and the nano brick steering angle alpha of each nano brick structural unit on each super-surface array is determined by the position coordinate (r, theta) of the central point; the functional relation that the nano-brick steering angle alpha and the position coordinates (r, theta) of the central point of the nano-brick meet is as follows: α ═ f (r, θ) ═ f<aθ2>πWherein a is a parameter and takes a non-negative constant,<M>Nrepresenting the operation of taking the modulus of M to N; determining the arrangement of the nano-brick steering angles alpha of the nano-brick structural units at each position on each super-surface array according to the polarization order adjustment requirement, the position coordinates (r, theta) of the central points of the nano-bricks and the functional relation of the nano-brick steering angles alpha;
s3: and (4) distributing the nano brick structure units with the size parameters obtained by optimizing in the step (S1) according to the nano brick steering angle arrangement mode of the nano brick structure units on each super surface array designed in the step (S2), preparing the target super surface array by a micro-nano processing method, and cascading the two processed same super surface arrays to obtain the required super surface system.
As shown in fig. 1, a linear polarized light 1 is vertically incident to a super-surface system to obtain a column vector beam 4; when linearly polarized light is incident, the first super-surface array 2 is fixed, the second super-surface array 3 is rotated around the optical axis, and the polarization order of the emergent column vector beam 4 can be continuously adjusted; and the polarization direction of the incident linearly polarized light 1 is continuously changed, and the initial polarization azimuth angle of the emergent cylindrical vector beam 4 can also be continuously changed.
As shown in fig. 2, the nano-brick structural unit includes a work surface 6 and a nano-brick 5 disposed on the work surface. Each super-surface array structure is as shown in fig. 3, and an xoy coordinate system as shown in fig. 4 is established by taking the center point of the super-surface array as the origin and taking two mutually perpendicular diameters of the super-surface array as the x axis and the y axis respectively, wherein the directions of the two edges of the working surface are parallel to the x axis and the y axis respectively. The structural parameters of the nano brick structural unit comprise the dimensions of a long axis L, a short axis W, a height H and the side length C of a working face of the nano brick, the nano brick is provided with the long axis L and the short axis W on a face parallel to the working face, the long axis L is not equal to the short axis W, the turning angle alpha of the nano brick is the included angle between the long axis L and the x axis of the nano brick, and alpha belongs to [0, pi ].
The size parameters of the nano brick structure units are optimized through electromagnetic simulation software, so that the function of the nano brick structure units after optimized design is equivalent to a micro-nano half-wave plate, namely, when circularly polarized light is normally incident to the nano brick structure units under the working wavelength, the transmittance of reverse circularly polarized light carrying additional phase delay is maximum, and the transmittance of homodromous circularly polarized light without additional phase delay is minimum. In this embodiment, the working wavelength is 633nm, the nano-brick is silicon nano-brick, the working surface material is silicon dioxide, and the size parameter of the optimized nano-brick 5 is L150 nm, W80 nm, H385 nm, and C300 nm. The transmission of the nano-brick structural units at this size parameter is shown in FIG. 5, where T iscross、TcoRespectively, the transmittance of the reverse circularly polarized light and the transmittance of the same circularly polarized light. As can be seen from fig. 5, when the wavelength of incident light is 633nm, the transmittance of the reverse circularly polarized light carrying the additional phase retardation is higher than 87%, and the transmittance of the same-direction circularly polarized light without the additional phase retardation is lower than 1%, and the result shows that the optimized nano-brick structural unit has the function of a half-wave plate.
When the nano brick structure unit is functionally equivalent to a micro-nano half wave plate, and when the nano brick steering angle is phi, the Jones matrix is as follows:
Figure BDA0002677292420000051
in the formula, R (phi) is a rotation matrix, and phi is an included angle between the long axis direction of the nano brick and the x axis.
When a linearly polarized light beam with the vibration direction and the x axis forming an included angle of gamma passes through the nano brick in turn with the steering angle of phi1、φ2Half-wave plate of (1), emergent lightThe jones vector of (a) is:
Figure BDA0002677292420000061
namely the angle between the outgoing light wave as the vibration direction and the x axis is (2 phi)2-2φ1+ γ) linearly polarized light.
In an initial state, the turning angles α of the nano-bricks of the nano-brick structural units corresponding to the same position on the two super-surface arrays are the same, that is, the distribution function of the turning angles α of the nano-brick structural units corresponding to the same position on the two super-surface arrays is:
α1(r,θ)=α2(r,θ)=<aθ2>π
in the formula, alpha1A nanoblock divert angle distribution, α, representing nanoblock structural units on a first sheet of metamaterial material2Representing a distribution of nano-brick steering angles of nano-brick structural units on the second piece of meta-surface material, theta being an azimuth angle of a center point of the nano-brick, a being a parameter and taking a non-negative constant determined by an adjustment range of polarization order of the column vector beam,<M>Nrepresenting the modulo operation of M on N.
Due to the rotational symmetry of the cuboid nano-brick structure units, the modulus operation ensures that the value range of the steering angle alpha is [0, pi ], and the actual arrangement mode of the nano-brick structure units is not influenced, so that modulus symbols are partially omitted in the formula derivation process.
After the second super-surface rotates by delta theta around the optical axis, a linearly polarized light beam with an included angle gamma between the vibration direction and the x axis sequentially passes through the two cascaded super-surface arrays, and the Jones vector at the coordinate (r, theta) on the cross section of the emergent light beam is as follows:
Figure BDA0002677292420000062
the included angle between the vibration direction of the electric field and the x axis at the coordinate (r, theta) on the cross section of the emergent beam is as follows:
Figure BDA0002677292420000063
therefore, emergent light from the super-surface array is a cylindrical vector beam, and the polarization order of the emergent cylindrical vector beam is as follows:
n=-4aΔθ
the polarization initial azimuth angle is as follows:
Figure BDA0002677292420000071
and it can be seen from the formula that when the polarization direction γ of the incident linearly polarized light 1 is continuously changed, the polarization initial azimuth angle of the outgoing column vector beam 4 can be continuously changed.
The value range of the rotation angle delta theta of the second super-surface array around the optical axis is as follows: delta theta epsilon [ -pi, pi), so the polarization order adjustment range is as follows: { n | -4a pi ≦ n <4a pi, n ∈ Z }.
To realize the adjustment between two adjacent polarization orders, the rotation angle change amount of the second sheet super-surface array is as follows:
Figure BDA0002677292420000072
when a is 0.25, the emergent light is a cylindrical vector beam, and the polarization order of the emergent light is as follows:
n=-Δθ
the polarization initial azimuth angle is as follows:
Figure BDA0002677292420000073
at this time, the value range of the rotation angle Δ θ of the second super-surface array around the optical axis is: Δ θ ∈ [ - π, π). Therefore, the adjustment range of the polarization order is as follows: n belongs to { -3, -2, -1,0,1,2,3}, and the adjustment between two adjacent polarization orders is realized, and the rotation angle change amount of the second sheet super-surface array is as follows: Δ θ is 1 (rad).
When a is 1, the emergent light is a cylindrical vector beam, and the polarization order of the emergent light is as follows:
n=-4Δθ
the polarization initial azimuth angle is as follows:
Figure BDA0002677292420000074
the value range of the rotation angle delta theta of the second super-surface array around the optical axis is as follows: delta theta epsilon [ -pi, pi), so the polarization order adjustment range is as follows: n ∈ { -12, -11, -10, …, …,10,11,12}, and the adjustment between two adjacent polarization orders is realized, and the rotation angle change amount of the second sheet super-surface array is:
Figure BDA0002677292420000075
from the above, when the functional relationship α, which is satisfied by the nano-brick steering angle α of the nano-brick structural unit on the super-surface array and the center point position coordinate (r, θ), is f (r, θ)<aθ2>πWhen the linear polarized light enters, the polarization order n of the emergent cylindrical vector light beam is equal to-4 a delta theta, so that the polarization order is determined by the parameter a and the rotation angle delta theta of the second super-surface array. When designing the nano brick steering angle alpha of the nano brick structure unit on the super surface array, according to the adjustment range and the adjustment precision of the polarization order and the polarization order formula: n-4 a Δ θ and a:
Figure BDA0002677292420000076
determining a value a, and then according to the value a, the position coordinates (r, theta) of the central point of the nano brick and the functional relation alpha, f (r, theta)<aθ2>πAnd calculating to obtain the steering angle alpha value of each nano brick structure unit on the super-surface array. And (3) laying the nano brick structure units with the optimized size parameters according to the calculated arrangement mode of the turning angle alpha values of the nano bricks to obtain the required super-surface array.
In the implementation of the present invention, the distribution of the polar angle θ in the coordinates of the center point of the nano-brick is shown in fig. 6, and when a is 1, the distribution of the turning angle α of the nano-brick structural unit corresponding to the first super-surface array is shown in fig. 7.
After rotating the second sheet of the array of hypersurfaces by Δ θ around the optical axis, the orientation angles are distributed as:
α2(r,θ;Δθ)=<a(θ-Δθ)2>π
when Δ θ is pi/6, the distribution of the turning angle α of the nano-brick structural unit corresponding to the second super-surface array is shown in fig. 8.
The polarization distribution diagram of the cross section of the emergent cylindrical vector light beam with different polarization orders and different polarization initial azimuth angles is shown in fig. 9. Therefore, the super-surface system provided by the embodiment of the invention can realize the generation of the columnar vector beams and the continuous adjustment of the polarization order and the polarization initial azimuth angle.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.

Claims (10)

1. The super-surface system is characterized by comprising two cascaded super-surface arrays, wherein each super-surface array comprises a plurality of nano-brick structure units, and each nano-brick structure unit comprises a working surface and a nano-brick arranged on the working surface;
linearly polarized light is vertically incident to the super-surface system to obtain a column vector beam;
when linearly polarized light enters, the first super-surface array is fixed, the second super-surface array is rotated around the optical axis, and the polarization order of the outgoing column vector light beam can be continuously adjusted;
the polarization direction of the incident linearly polarized light is continuously changed, and the polarization initial azimuth angle of the emergent column vector light beam is also continuously changed.
2. The system of claim 1, wherein the turning angles of the nano-bricks of the corresponding nano-brick structural units at the same position on the two super-surface arrays are the same in the initial state.
3. The super-surface system for generating a column vector beam with a continuously adjustable polarization order of claim 1, wherein the nano-brick structure unit is functionally equivalent to a micro-nano half-wave plate.
4. The super-surface system for generating a cylindrical vector light beam with a continuously adjustable polarization order of claim 1, wherein the dimension parameters of the nano-brick structure units on a single super-surface array are the same but the turning angles of the nano-bricks are different.
5. A method of constructing a super-surface system for generating a cylindrical vector beam with a continuously adjustable polarization order according to any one of claims 1-2, comprising the steps of:
s1: optimizing under the working wavelength to obtain the size parameters of the nano brick structure unit which is functionally equivalent to a micro-nano half-wave plate;
s2: setting two mutually perpendicular diameters of the super-surface array as an x axis and a y axis respectively, establishing an xoy coordinate system by taking the center of the super-surface as a coordinate origin, wherein a nano brick steering angle alpha of a nano brick structural unit is an included angle between a long axis L of the nano brick and the x axis, and the position coordinate of the central point of the nano brick is marked as (r, theta), wherein r is the polar diameter of the central point of the nano brick, theta is the polar angle of the central point of the nano brick, and the nano brick steering angle alpha of each nano brick structural unit on each super-surface array is determined by the position coordinate (r, theta) of the central point of the nano brick; the functional relation that the nano-brick steering angle alpha and the position coordinates (r, theta) of the central point of the nano-brick meet is as follows: α ═ f (r, θ) ═ f<aθ2>πWherein a is a parameter and takes a non-negative constant,<M>Nrepresenting the operation of taking the modulus of M to N; determining the nano brick steering angle alpha of the nano brick structural unit at each position on each super surface array according to the polarization order regulation requirement, the position coordinates (r, theta) of the central point of the nano brick and the functional relation of the nano brick steering angle alphaArranging;
s3: and (4) distributing the nano brick structure units with the size parameters obtained by optimizing in the step (S1) according to the nano brick steering angle arrangement mode of the nano brick structure units on each super surface array designed in the step (S2), preparing the super surface array by a micro-nano processing method, and cascading the two processed same super surface arrays to obtain the required super surface system.
6. The method of claim 5, wherein the value of a is determined by the range of polarization order adjustment of the cylindrical vector beam.
7. The method as claimed in claim 5 or 6, wherein the maximum value of a is defined by the working face side length C of the nano-brick structure unit and the maximum radius r of the processed super-surface arraymaxDetermining that the non-negative constant a satisfies:
Figure FDA0003379575680000021
8. the method as claimed in claim 5, wherein the second super-surface is rotated by Δ θ around the optical axis, a linearly polarized light beam with an included angle γ between the vibration direction and the x-axis sequentially passes through the two cascaded super-surface arrays, the light wave exiting from the super-surface arrays is a column vector light beam, and the polarization order is: n-4 a Δ θ, with an initial azimuthal angle of polarization:
Figure FDA0003379575680000022
9. the method of claim 8, wherein the second array of metasurfaces is rotated at an angle Δ θ about the optical axisThe value range is as follows: delta theta epsilon [ -pi, pi), the adjustment range of the polarization order is as follows: { n | -4a pi ≦ n <4a pi, n ∈ Z }, and rotating the second sheet of the super-surface array by a certain angle
Figure FDA0003379575680000023
The adjustment between two adjacent polarization orders can be realized.
10. The method of claim 5, wherein the nano-brick is made of silicon material and the working surface is made of silicon dioxide.
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