CN109061780A - A kind of super surface lens that dual-wavelength coaxial independently focuses - Google Patents
A kind of super surface lens that dual-wavelength coaxial independently focuses Download PDFInfo
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- 239000002086 nanomaterial Substances 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 9
- 230000009977 dual effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000004088 simulation Methods 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 9
- 230000004075 alteration Effects 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 5
- 238000000799 fluorescence microscopy Methods 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000002114 nanocomposite Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 6
- 230000010354 integration Effects 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
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- G—PHYSICS
- G02—OPTICS
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
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- G02B3/0037—Arrays characterized by the distribution or form of lenses
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Abstract
The present invention relates to nanocomposite optical field, super surface lens that specially a kind of dual-wavelength coaxial independently focuses, comprising: substrate and nanostructure cuboid.By the way that a side of the substrate is divided into square shaped cells grid, then the square shaped cells grid is divided into four small squares, two small square centers on identical diagonal line process the identical nanostructure cuboid of size；Nanostructure cuboid is rotated into the phase that corresponding angle is used to modulate corresponding incident light.The super surface lens size that dual-wavelength coaxial of the invention independently focuses is small, and thickness is thin, light-weight, aberration is small, integrated level is high, and performance can be better than the combination of existing high quality object lens and Spatial transmission element, can be applied to stimulated emission dissipation super-resolution fluorescence imaging.
Description
Technical Field
The invention relates to the field of nano optics, in particular to a dual-wavelength coaxial independent focusing super-surface lens.
Background
Modern high quality objectives correct for various aberrations and chromatic aberrations better, but the usual correction is over a wider wavelength band and cannot be very thorough. In addition, the objective lens is formed by compounding a plurality of single glass lenses, the size and the weight are difficult to reduce, the objective lens needs to be rapidly positioned and scanned in a nanometer mode in many application occasions, and the objective lens with larger size is not beneficial to rapid positioning and scanning under the control of an electronic servo system. Therefore, miniaturization of the objective focusing system is a more scientifically important issue.
The focusing process of the objective lens on the laser is realized by the change of the refractive index and the thickness of the lens material, and the process is essentially the modulation of the phase of the light beam by the objective lens. The artificial microstructure material or the super-surface material manufactured by the modern micromachining technology can respectively modulate the phase, the polarization and the intensity of light, and can carry out theoretical design and processing aiming at specific wavelength, thereby providing a new path for focusing light beams. The super-surface lens is a micro-nano optical element for realizing the function.
The size, shape, orientation and material of the microstructure elements of the super-surface lens are generally determined by the laser wavelength and the tuning objective to be achieved. When the purpose of the regulation is relatively simple, the microstructure unit structure is relatively simple and basically corresponds to the laser wavelength. However, for dual wavelength laser modulation, if the modulation purpose is different, the microstructure unit is complicated.
The supermolecular structural unit is a novel supermolecular surface material suitable for independent regulation and control of multiple wavelengths, and a super surface lens which realizes independent regulation and control and focusing of double wavelengths by utilizing the supermolecular structural unit is not available at present.
Disclosure of Invention
In view of the above, there is a need to provide a dual-wavelength coaxial independent focusing super-surface lens.
The embodiment of the invention is realized in such a way that the super-surface lens with double wavelength coaxial independent focusing comprises a substrate and a nano-structure cuboid;
dividing one side surface of the substrate into square unit grids, equally dividing the square unit grids into four small squares, placing a nano-structure cuboid with the same size at the centers of two small squares on a first diagonal line, and placing another nano-structure cuboid with the same size at the centers of the other two small squares on a second diagonal line; rotating one of the nano-structure cuboids with the same size by a corresponding angle to modulate the phase of incident light corresponding to the nano-structure cuboids, and rotating the other one of the nano-structure cuboids with the same size by a corresponding angle to modulate the phase of the other one of the incident light corresponding to the nano-structure cuboids; the corresponding angle is determined by:
wherein theta is the rotation angle of the nano-structure cuboid with the bottom surface center positioned at (x, y), phi (x, y) is the additional phase modulation value of incident light at (x, y), and f and lambda are the focal length and wavelength of the incident light corresponding to the nano-structure cuboid with the same size.
According to the super-surface lens with the dual-wavelength coaxial independent focusing, provided by the embodiment of the invention, one side surface of the substrate is divided into square unit grids, the square unit grids are equally divided into four small squares, and the nano-structure cuboids with the same size are placed in the centers of the two small squares on the same diagonal; the nano-structure cuboid is rotated by a corresponding angle to modulate the phase of incident light corresponding to the nano-structure cuboid. The dual-wavelength coaxial independently-focused super-surface lens has the advantages of small size, thin thickness, light weight, small aberration and high integration level, the performance of the lens is superior to that of the combination of the existing high-quality objective lens and a phase modulation element, and the lens can be applied to stimulated emission dissipation super-resolution fluorescence imaging.
Drawings
FIG. 1 is a schematic diagram illustrating the arrangement of cuboids with different sizes in a square unit grid of a dual-wavelength coaxial independent focusing super-surface lens according to an embodiment of the present invention;
FIG. 2 is a diagram of a dual-wavelength coaxial independent focusing super-surface lens structure according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of circularly polarized light incident and focusing of a dual-wavelength coaxial independent focusing super-surface lens according to an embodiment of the present invention;
FIG. 4 is a vortex phase distribution diagram obtained after phase modulation of a dual-wavelength coaxial independently focused super-surface lens provided by an embodiment of the present invention;
FIG. 5 is a spherical wave phase distribution diagram obtained after phase modulation of a dual-wavelength coaxial independently focused super-surface lens provided by an embodiment of the present invention;
fig. 6 is a phase distribution diagram after a spherical wave is superimposed with a vortex phase obtained by phase modulation of a dual-wavelength coaxial independently focused super-surface lens provided by an embodiment of the present invention;
FIG. 7 shows the wavelength λ1The circularly polarized light is incident into the inventive super watch with dual-wavelength coaxial independent focusingAnnular light spots generated by focusing behind the surface lens;
FIG. 8 shows the wavelength λ2The circularly polarized light enters the super-surface lens with the dual-wavelength coaxial independent focusing provided by the embodiment of the invention and then is focused to generate a solid light spot.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to fig. 1 to 8 and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The embodiment of the invention provides a dual-wavelength coaxial independent focusing super-surface lens, which comprises a substrate and a nano-structure cuboid;
as shown in fig. 1, one side surface of the substrate is divided into a square unit grid, the square unit grid is divided into four small squares, two small squares on a first diagonal line are placed with one type of nano-structure cuboids 1 and 3 (or 2 and 4) with the same size at the center, and the other two small squares on a second diagonal line are placed with another type of nano-structure cuboids 2 and 4 (or 1 and 3) with the same size at the center; rotating one of the nano-structure cuboids 1 and 3 (or 2 and 4) with the same size by a corresponding angle for modulating the phase of incident light corresponding to the nano-structure cuboids, and rotating the other one of the nano-structure cuboids 2 and 4 (or 1 and 3) with the same size by a corresponding angle for modulating the phase of the other one of the incident light corresponding to the nano-structure cuboids; the corresponding angle is determined by:
wherein theta is a rotation angle of the nano-structure cuboid with the bottom surface center positioned at (x, y), phi (x, y) is an additional phase modulation value of incident light at (x, y), and f and lambda are focal lengths and wavelengths of the incident light corresponding to the nano-structure cuboid with the same size;
the resulting lens structure is shown in fig. 2.
In one embodiment of the present invention, the nano-structured cuboid uses TiO2And (5) manufacturing materials. TiO 22The cuboid has the function of modulating the phase of incident light of the point by rotating a corresponding angle and realizing the phase modulation of the incident light beam by the nano-structure cuboid array.
In one embodiment of the invention, after the two-wavelength coaxial independently focused super-surface lens is subjected to phase modulation, the two light beams with different wavelengths are focused into the same or different shapes and are positioned at the same or different positions on the axis. In the invention, two key points for adjusting the phase of the incident beam are the size of the nano-structure cuboid and the respective rotation angle, and the size of the nano-structure cuboid and the rotation angle of each nano-structure cuboid can be correspondingly adjusted according to different required results.
In one embodiment of the invention, the size of the nano-structure cuboid is determined by parameter optimization and simulation by using a time domain finite difference method according to the diffraction efficiency of the dual-wavelength coaxial independently focused super-surface lens.
According to the super-surface lens with the dual-wavelength coaxial independent focusing, provided by the embodiment of the invention, one side surface of the substrate is divided into square unit grids, the square unit grids are equally divided into four small squares, and the nano-structure cuboids with the same size are placed in the centers of the two small squares on the same diagonal; the nano-structure cuboid is rotated by a corresponding angle to modulate the phase of incident light corresponding to the nano-structure cuboid, so that two groups of units are formed and are respectively used for modulating the phase of light with two different wavelengths, and the independent focusing of the two wavelengths is realized under the irradiation of circularly polarized light. In the working state, as shown in fig. 3, an incident light beam 1 is incident from the smooth surface of the dual-wavelength coaxial independently focused super-surface lens 2, and a focus 3 is formed on the other surface. The dual-wavelength coaxial independently-focused super-surface lens has the advantages of small size, thin thickness, light weight, small aberration and high integration level, the performance of the lens is superior to that of the combination of the existing high-quality objective lens and a phase modulation element, and the lens can be applied to stimulated emission dissipation super-resolution fluorescence imaging.
The following describes the manufacturing and the effect of the dual-wavelength coaxial independent focusing super-surface lens according to an embodiment.
Step S1: and selecting proper two nano-structure cuboids with different sizes according to two different wavelengths of the incident circularly polarized light beams. Wavelength λ in this embodiment1＝473nm，λ2633nm, the length and width of the two nano-structure cuboids are l1＝90nm，w1＝45nm，l2＝145nm；w2105nm, and the height h of the cuboid is 320 nm.
Step S2: dividing one side surface of the substrate into square unit grids, equally dividing the square unit grids into four small squares, and placing nano-structure cuboids with the same size at the centers of the two small squares on the same diagonal; the method comprises the steps of rotating the nano-structure cuboid by corresponding angles to modulate the phase of incident light corresponding to the nano-structure cuboid to divide the phase into square unit grids, equally dividing each square unit into four small squares, placing one nano-structure cuboid with the same size at the centers of two small squares on a first diagonal line, and placing the other nano-structure cuboid with the same size at the centers of the other two small squares on a second diagonal line. As shown in fig. 1, 1 and 3, 2 and 4 respectively represent a group of nano-structured cuboids having the same size. The side length of the square structural unit is 420nm, and the side length of the small square structural unit is 210 nm.
Step S3: rotating one of the nano-structure cuboids with the same size by a certain angle theta1The corresponding wavelength lambda used for modulating the position of the small square structural unit1The phase of incident light is rotated by a certain angle theta for another nano-structure cuboid with the same size2The corresponding wavelength lambda used for modulating the position of the small square structural unit2The phase of the incident light. Fig. 2 is a schematic diagram of a dual-wavelength coaxial independent focusing super-surface lens structure according to an embodiment of the present invention, which is drawn by Matlab programming.
Wherein,
the meaning of each parameter is the same as that of the previous embodiment.
After the phase modulation of the super-surface lens with the dual-wavelength coaxial independent focusing, the two light beams with different wavelengths are focused into different shapes and can be positioned at different positions on the shaft or the same position on the shaft.
Step S4: and (3) manufacturing the electron beam lithography process BMP format graph which is drawn by Matlab programming and is shown in figure 2 into the super-surface lens by using a general process. The nano-structure cuboid material of the super-surface lens is TiO2Wherein the substrate is SiO2Material, the azimuth angle of the rotation of the single nano-structure cuboid is(the included angle between a certain straight line and the X axis of the coordinate in the plane rectangular coordinate system is positive in the anticlockwise direction from the main axis). The process flow comprises the following steps: manufacturing the superlens on a photoresist ZEP520, wherein the thickness of the photoresist is consistent with the height 320nm of the nano-structure cuboid; then utilizing atomic layer deposition technology to deposit a layer of TiO with the thickness of about 60nm on the treated photoresist2A film; TiO on top of photoresist2Removing the film by a reactive ion etching method; and finally stripping the residual electron beam photoresist.
Step S5: and mounting a laser beam emitted by a laser, a linear polarizer and a quarter glass slide together by utilizing a mechanical mounting and adjusting mechanism to obtain circularly polarized light, and enabling the circularly polarized light to enter the manufactured super-surface lens with the dual-wavelength coaxial independent focusing and to be coaxially adjusted, aligned and fixed. As shown in FIG. 3, the wavelengths of the two incident laser beams are 473nm and 633nm, and a coaxial annular light spot and a solid light spot are obtained in the focus area.
FIG. 4 is a vortex phase distribution diagram obtained after phase modulation of a dual-wavelength coaxial independently focused super-surface lens provided by an embodiment of the present invention;
FIG. 5 is a spherical wave phase distribution diagram obtained after phase modulation of a dual-wavelength coaxial independently focused super-surface lens provided by an embodiment of the present invention;
fig. 6 is a phase distribution diagram of spherical waves obtained after the phase modulation is performed on the dual-wavelength coaxial independently focused super-surface lens according to the embodiment of the present invention, and the spherical waves are superimposed with a vortex phase.
The super-surface lens structure diagram with the two wavelengths coaxially and independently focused shown in fig. 2 is guided into time domain finite difference method FDTD software for simulation, and the annular light spot shown in fig. 7 and the solid light spot shown in fig. 8 can be obtained at the focal position respectively.
The invention combines the vortex phase modulation of the vortex phase plate with the topological charge of 1 directly with the spherical wave phase modulation of the objective lens, and is completed by the sub-wavelength interval nano-structure cuboid array super-surface lens in a unified way. The dual-wavelength super-surface lens has high integration level, the size is less than 1 millimeter, the thickness is thin, and the integration level can be in a micrometer level. The mass is especially light, and the aberration and chromatic aberration are better than the existing high-quality objective lens, so that the device is especially suitable for miniaturization and quick positioning and scanning of a device system.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (4)
1. A dual wavelength in-line independently focusing super-surface lens, comprising: a substrate and a nanostructured cuboid;
dividing one side surface of the substrate into square unit grids, equally dividing the square unit grids into four small squares, placing a nano-structure cuboid with the same size at the centers of two small squares on a first diagonal line, and placing another nano-structure cuboid with the same size at the centers of the other two small squares on a second diagonal line; rotating one of the nano-structure cuboids with the same size by a corresponding angle to modulate the phase of incident light corresponding to the nano-structure cuboids, and rotating the other one of the nano-structure cuboids with the same size by a corresponding angle to modulate the phase of the other one of the incident light corresponding to the nano-structure cuboids; the corresponding angle is determined by:
wherein theta is the rotation angle of the nano-structure cuboid with the bottom surface center positioned at (x, y), phi (x, y) is the additional phase modulation value of incident light at (x, y), and f and lambda are the focal length and wavelength of the incident light corresponding to the nano-structure cuboid with the same size.
2. The dual wavelength coaxial individual focusing supersurface lens of claim 1, wherein said nanostructured cuboid utilizes TiO2And (5) manufacturing materials.
3. The dual wavelength on-axis independently focusing supersurface lens of claim 1, wherein after phase modulation by said dual wavelength on-axis independently focusing supersurface lens, the two different wavelength light beams are focused into the same or different shapes and at the same or different positions on-axis.
4. The dual-wavelength coaxial independently focused super-surface lens according to claim 1, wherein the size of the nano-structured cuboid is determined by parameter optimization and simulation using time-domain finite difference method software according to the diffraction efficiency of the dual-wavelength coaxial independently focused super-surface lens.
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Cited By (13)
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| CN109884738A (en) * | 2019-01-08 | 2019-06-14 | 华南师范大学 | A kind of super surface vortex condenser lens of high efficiency |
| CN110780366A (en) * | 2019-11-01 | 2020-02-11 | 福州大学 | Optical super-surface focusing imaging element resistant to temperature interference and method thereof |
| CN111380612A (en) * | 2020-03-02 | 2020-07-07 | 华中科技大学 | Hyperspectral imaging system |
| CN111679351A (en) * | 2020-06-29 | 2020-09-18 | 福州大学 | Achromatic optical super-surface focusing element |
| CN111722399A (en) * | 2020-06-29 | 2020-09-29 | 福州大学 | Quasi-periodic optical super-surface imaging element |
| CN112684522A (en) * | 2020-11-26 | 2021-04-20 | 中国科学院上海微系统与信息技术研究所 | Ultraviolet and visible light common-lens double-light-path imaging detection system and manufacturing method thereof |
| CN112909566A (en) * | 2021-01-20 | 2021-06-04 | 成都第三象限未来科技有限公司 | Multifunctional vortex stack state generator |
| CN113013268A (en) * | 2021-01-26 | 2021-06-22 | 中国科学院上海技术物理研究所 | Small-pixel infrared focal plane detector based on super-surface lens |
| CN113485009A (en) * | 2020-04-24 | 2021-10-08 | 浙江舜宇光学有限公司 | Super surface imaging device |
| CN113625375A (en) * | 2021-08-02 | 2021-11-09 | 福州大学 | Quasi-periodic superlens based on genetic algorithm optimization |
| CN114153062A (en) * | 2021-12-07 | 2022-03-08 | 杭州纳境科技有限公司 | Super-surface objective lens, focusing method thereof and fluorescence microscope |
| CN114815014A (en) * | 2022-03-29 | 2022-07-29 | 中国人民解放军国防科技大学 | Superlens and superlens array for focusing vortex light beam |
| TWI800844B (en) * | 2020-06-02 | 2023-05-01 | 國立臺灣大學 | Metasurface based device for generating abrupt autofocusing beam |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109884738A (en) * | 2019-01-08 | 2019-06-14 | 华南师范大学 | A kind of super surface vortex condenser lens of high efficiency |
| CN109884738B (en) * | 2019-01-08 | 2021-03-23 | 华南师范大学 | High-efficiency super-surface vortex focusing lens |
| CN110780366A (en) * | 2019-11-01 | 2020-02-11 | 福州大学 | Optical super-surface focusing imaging element resistant to temperature interference and method thereof |
| CN111380612A (en) * | 2020-03-02 | 2020-07-07 | 华中科技大学 | Hyperspectral imaging system |
| CN113485009B (en) * | 2020-04-24 | 2023-07-18 | 浙江舜宇光学有限公司 | Super-surface imaging device |
| CN113485009A (en) * | 2020-04-24 | 2021-10-08 | 浙江舜宇光学有限公司 | Super surface imaging device |
| TWI800844B (en) * | 2020-06-02 | 2023-05-01 | 國立臺灣大學 | Metasurface based device for generating abrupt autofocusing beam |
| CN111679351A (en) * | 2020-06-29 | 2020-09-18 | 福州大学 | Achromatic optical super-surface focusing element |
| CN111722399A (en) * | 2020-06-29 | 2020-09-29 | 福州大学 | Quasi-periodic optical super-surface imaging element |
| CN112684522A (en) * | 2020-11-26 | 2021-04-20 | 中国科学院上海微系统与信息技术研究所 | Ultraviolet and visible light common-lens double-light-path imaging detection system and manufacturing method thereof |
| CN112909566B (en) * | 2021-01-20 | 2022-06-14 | 成都第三象限未来科技有限公司 | Multifunctional vortex stack state generator |
| CN112909566A (en) * | 2021-01-20 | 2021-06-04 | 成都第三象限未来科技有限公司 | Multifunctional vortex stack state generator |
| CN113013268A (en) * | 2021-01-26 | 2021-06-22 | 中国科学院上海技术物理研究所 | Small-pixel infrared focal plane detector based on super-surface lens |
| CN113625375A (en) * | 2021-08-02 | 2021-11-09 | 福州大学 | Quasi-periodic superlens based on genetic algorithm optimization |
| CN113625375B (en) * | 2021-08-02 | 2022-07-12 | 福州大学 | Quasi-periodic superlens based on genetic algorithm optimization |
| CN114153062A (en) * | 2021-12-07 | 2022-03-08 | 杭州纳境科技有限公司 | Super-surface objective lens, focusing method thereof and fluorescence microscope |
| CN114815014A (en) * | 2022-03-29 | 2022-07-29 | 中国人民解放军国防科技大学 | Superlens and superlens array for focusing vortex light beam |
| CN114815014B (en) * | 2022-03-29 | 2024-05-28 | 中国人民解放军国防科技大学 | Super lens focusing vortex light beam and super lens array |
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