CN105403999A - PSD feedback-based two dimensional rapid control reflector and control system thereof - Google Patents
PSD feedback-based two dimensional rapid control reflector and control system thereof Download PDFInfo
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- CN105403999A CN105403999A CN201510979812.XA CN201510979812A CN105403999A CN 105403999 A CN105403999 A CN 105403999A CN 201510979812 A CN201510979812 A CN 201510979812A CN 105403999 A CN105403999 A CN 105403999A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Abstract
The invention discloses a PSD feedback-based two dimensional rapid control reflector and a control system thereof. The reflector comprises a pedestal, a PSD feedback optical path structure fixed on the pedestal, a movable support structure with piezoelectric ceramics, a fixed support structure without piezoelectric ceramics, a support connected with the movable support structure and the fixed support structure, and a reflector body fixed on the support. According to the invention, the feedback optical path structure based on a position sensing detector PSD is integrated, so deflection precision of angles of the reflector is improved; via the triangular support structure, it is ensured that while reflector can deflect in two dimensions, space utilization rate of the structure is greatly increased; and the structure of the reflector is quite compact and proper.
Description
Technical field
The present invention relates to technical field of photo communication, particularly relate to a kind of two-dimensional rapid control reflector based on PSD feedback and control system thereof.
Background technology
Free space optical communication is as a kind of wireless optical communication, and adopt laser communications, have communication security good, density is high, and sense is strong, does not have the advantages such as co-channel interference.Laser scanner is as a Primary Component of free space optical communication, and its performance directly affects its communication quality.The angle control precision of scanner directly affects the channel stability of free space optical communication, and the resonance frequency of traditional turntable type mirror scanner, multiple surface rotating mirror formula scanner physical construction is low, easily cause resonance, and angle control precision is low.
Traditional scanner has turntable type mirror scanner, multiple surface rotating mirror scanner, galvanometer galvanometer scanner etc., and large multiple scan frequency is low or linearity is not high.Rapid control reflector is a kind of novel laser scanner, and it can be divided into piezoelectric ceramic type laser scanner and voice coil motor formula laser scanner according to the difference of driving element.Voice coil motor formula laser scanner scanning angle is large, but sweep frequency is less, and angular deflection precision is poor, and piezoelectric ceramic type laser scanner by comparison sweep frequency is high, and angular deflection precision is high, is suitable in free space optical communication.
Chinese patent CN201569787U discloses a kind of high speed control piezoelectric scanning device, and as shown in Figure 1a, wherein, 3 is laser instrument to this apparatus structure schematic diagram, and 4a is oval displacement equations structure, and 7a is piezoelectric ceramics, and 5 is catoptron, and 15 is Position-Sensitive Detector.Apply driving voltage contrary each other to two piezoelectric ceramics, piezoelectric ceramics telescopic direction displacement equations is made elastic hinge holder pivots by oval elastic frame, and driving voltage size determines mirror deflecting angle.In addition scanner is integrated with One Dimensional Position Sensitive Detectors, can real-time detection mirror deflecting angle, the close-loop feedback realizing mirror deflecting angle controls, and improves linearity and positioning precision further.But this invention is one dimension piezoelectric laser scanner, can only realize the deflection of a laser dimension, its mirror surface is little in addition, and feedback channel occupies very large space, structurally not compact.
Chinese patent CN103913838A discloses a kind of actuation mechanism of two-dimentional fast steering mirror, and as shown in Figure 1 b, it comprises 4 symmetrical expression actuator assemblies to this apparatus structure schematic diagram, and single driver assembly have employed lever displacement equations structure.Catoptron is made to produce respective angles deflection by the driver physical construction tensile deformation at symmetrical two ends.Two-dimentional fast steering mirror actuation mechanism in this invention have employed lever displacement equations structure, there is fast response time, the feature that angular resolution is high, but it does not have integrated feedback light path, namely real-time mirror deflecting angle is not measured, therefore can not carry out closed-loop control, in real work, be subject to external environmental interference, real-time mirror deflecting angle precision cannot be ensured.
Summary of the invention
For overcoming the deficiencies in the prior art, the object of the present invention is to provide a kind of two-dimensional rapid control reflector based on PSD feedback and control system thereof.
To achieve these goals, the technical scheme that provides of the embodiment of the present invention is as follows:
A kind of two-dimensional rapid control reflector based on PSD feedback, it is characterized in that, described two-dimensional rapid control reflector comprises: base, be fixed on the PSD feedback light path structure on described base, the band movement support structures of piezoelectric ceramics and the fixed support structure not with piezoelectric ceramics, the support be connected with fixed support structure with movement support structures, and be fixed on the catoptron on support.
As a further improvement on the present invention, described feedback light path structure comprises the PSD of helium-neon laser, semi-transparent semi-reflecting lens and the detection facula position set gradually along light path.
As a further improvement on the present invention, described base is provided with the first bracing frame and the second bracing frame, and helium-neon laser is fixedly installed on the first bracing frame, and semi-transparent semi-reflecting lens is fixedly installed on the second bracing frame, and it is inner that PSD is fixedly installed in the second bracing frame.
As a further improvement on the present invention, the top of described second bracing frame is obliquely installed towards the first bracing frame, and described semi-transparent semi-reflecting lens tilts to be installed on the top of described second bracing frame.
As a further improvement on the present invention, described movement support structures is two, comprises two-dimension flexible hinge, oval displacement equations structure respectively and is positioned at the piezoelectric ceramics being embedded in oval displacement amplifying mechanism.
As a further improvement on the present invention, described fixed support structure comprises two-dimension flexible hinge and support column.
As a further improvement on the present invention, described movement support structures and fixed support mechanism are in three grooves being fixed on base of triangle disposition, and are fixedly connected with support respectively.
As a further improvement on the present invention, described support comprises rack body and is fixed on the boss on rack body, and described catoptron and rack body are fixedly mounted by boss.
Correspondingly, a kind of control system of the two-dimensional rapid control reflector based on PSD feedback, described control system comprises:
Two-dimensional rapid control reflector;
PSD signal treatment circuit, comprises the filtering circuit for carrying out filtering to the PSD signal in two-dimensional rapid control reflector;
FPGA control circuit, being connected with described PSD signal treatment circuit, comprising the D/A module of collection PSD signal after PSD signal treatment circuit, for calculating the sliding mode controller of real-time control signal u (t) and the A/D module for transforming real-time control signal u (t);
Power amplification circuit, carries out power amplification for the voltage signal exported A/D module, and drives the piezoelectric ceramics in two-dimensional rapid control reflector.
As a further improvement on the present invention, described sliding mode controller also calculates real-time control signal u (t) for angular deflection amount y (t) according to real-time two-dimensional rapid control reflector, input angle ideal value r (t) with the deviate of actual angular deflection amount y (t).
The present invention has following beneficial effect:
Be integrated with the feedback light path structure of position-based sensing detector PSD, improve mirror angle deflection precision;
The movement support structures of two band piezoelectric ceramics and a triangular support mode do not formed with the fixed support structure of piezoelectric ceramics significantly improve structure space utilization factor while of both having ensure that all deflectable in two dimensions, made the more compact structure of whole catoptron reasonable;
Sliding mode controller adopts Second Order Sliding Mode Control can eliminate the input queued switches voltage chattering produced when single order synovial membrane controls, and can realize the deflection of two-dimentional catoptron high precision easily.
Accompanying drawing explanation
Fig. 1 a is the structural representation that prior art high speed piezoelectricity controls scanister, and Fig. 1 b is the structural representation of two-dimentional fast steering mirror actuation mechanism in another prior art.
Fig. 2 is the structural representation based on the two-dimensional rapid control reflector of PSD feedback in the embodiment of the invention.
Fig. 3 is the detonation configuration schematic diagram based on the two-dimensional rapid control reflector of PSD feedback in the embodiment of the invention.
Fig. 4 a, 4b are respectively the structural representation of the movement support structures with piezoelectric ceramics in the embodiment of the invention and the fixed support structure not with piezoelectric ceramics.
Fig. 5 a, 5b are respectively one-piece construction schematic diagram and the strong point structural representation of embodiment of the invention medium-height trestle.
Fig. 6 is the cross-sectional view based on the two-dimensional rapid control reflector of PSD feedback in the embodiment of the invention.
Fig. 7 is the feedback light path schematic diagram based on the two-dimensional rapid control reflector of PSD feedback in the embodiment of the invention.
Fig. 8 is the module diagram based on the two-dimensional rapid control reflector control system of PSD feedback in the embodiment of the invention.
Embodiment
Technical scheme in the present invention is understood better in order to make those skilled in the art person, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, should belong to the scope of protection of the invention.
As shown in Figure 2 and Figure 3, a kind of two-dimensional rapid control reflector based on PSD feedback is disclosed in the embodiment of the invention, comprise: base 7, be fixed on the PSD feedback light path structure on described base, the band movement support structures 3 of piezoelectric ceramics and the fixed support structure 4 not with piezoelectric ceramics, the support 2 be connected with fixed support structure with movement support structures, and be fixed on the catoptron 1 on support.Wherein, PSD feedback light path structure comprises the first bracing frame 5 with helium-neon laser and the second bracing frame 6 with semi-transparent semi-reflecting lens and PSD (PositionSensitiveDetector, Position-Sensitive Detector).
In the present invention, catoptron 1 has three support ends below, and wherein two is the movement support structures of band piezoelectric ceramics, and one is the fixed support structure not with piezoelectric ceramics.Movement support structures with piezoelectric ceramics is after piezoelectric ceramics powers on, piezoelectric ceramics produces axial telescopic displacement, therefore the displacement equations structure of then loading piezoelectric ceramics can be subject to the horizontal force of piezoelectric ceramics and produce longitudinal telescopic displacement, is linear relationship between the two.Then can there is two-dimensional deflection because of the length travel of displacement equations support structure point generation in catoptron.Meanwhile, the light beam of the laser beam that helium-neon laser sends after semi-transparent semi-reflecting lens reflection can produce corresponding deflection because of the two-dimensional deflection of catoptron, and corresponding change can occur in the position that its transmitted light beam again after semi-transparent semi-reflecting lens is radiated on PSD.
The invention also discloses a kind of control system of the two-dimensional rapid control reflector based on PSD feedback, the four road current signals that PSD produces are after corresponding circuits filtering and respective handling, gathered by the D/A module in FPGA control circuit, through calculating the angular deflection amount that can obtain real-time two-dimensional rapid control reflector.The deviation of sliding mode controller to angle deflecting object value and actual value of FPGA inside processes, finally obtain real-time control output voltage to form backfeed loop, eliminate the deviation of angular deflection desired value and actual value, finally make two-dimensional rapid control reflector deflect to desirable angle angle value accurately fast.
Elaborate based on the two-dimensional rapid control reflector of PSD feedback and control system thereof in the present invention below.
Shown in ginseng Fig. 3, catoptron 1 is bonded together by the boss in the middle of seccotine and support 2, support 2 has two movement support structures 3 and fixed support structures 4 not with piezoelectric ceramics being with piezoelectric ceramics below, and the screw being respectively M1.6 by four models between movement support structures 3 and fixed support structure 4 is fixed.The screw being respectively M3 by a model between three supporting constructions and base 7 is fixed.
With the first bracing frame 5 of helium-neon laser and constitute feedback light path with between semi-transparent semi-reflecting lens and second bracing frame 6 of PSD.Fix with the screw being M3 by a model between the first bracing frame 5 of helium-neon laser and base 7, fix with the screw being M1.6 by four models between second bracing frame 6 of semi-transparent semi-reflecting lens and PSD and base 7.
As shown in Figure 4, it has two kinds to this two-dimensional rapid control reflector supporting construction, and a kind of is the movement support structures 3 being with piezoelectric ceramics, and the second is the fixed support structure 4 not with piezoelectric ceramics.As shown in fig. 4 a, it is made up of two-dimension flexible hinge 31, piezoelectric ceramics 32 and oval displacement equations structure 33 movement support structures 3 with piezoelectric ceramics.As shown in Figure 4 b, the fixed support structure 4 not with piezoelectric ceramics is made up of two-dimension flexible hinge 41 and support column 42.
In present embodiment, two-dimension flexible hinge 31 is connected with oval both displacement equations structures 33 one, and piezoelectric ceramics 32 is embedded in oval displacement equations structure 33.When giving piezoelectric ceramics 32 input queued switches voltage, piezoelectric ceramics 32 can produce axial telescopic displacement, then produces acting force to the major axis two ends of oval displacement equations structure 33.Oval displacement equations structure 33 adopts the good spring steel of elasticity to make and obtains, and therefore it can produce deformation, and longitudinal direction also can produce telescopic displacement, and is about 2 ~ 3 times of the displacement of piezoelectric ceramics 32 transversal stretching.Two flexible hinges 31 are easy to produce deformation under longitudinal pressure, it is as oval displacement equations structure 33 and the link of support 2 being stained with reflecting optics, being reached by deformation makes catoptron deflect, and can not produce friction event without the need to lubrication, better than traditional bearing arrangement performance.
This two-dimensional rapid control reflector support is as shown in Fig. 5 a, 5b, support 2 comprises rack body 21 and is fixed on the boss 22 on rack body, boss 22 is used for bonding mirror surface, and 12 holes around boss 22 are to use the screw of M1.6 three supporting constructions of itself and lower end to be linked together.Three supporting construction centers lay respectively at some A, B and a C, because OA=OB=OC on Design of Mechanical Structure, therefore ABC forms isosceles right triangle.Accordingly, movement support structures and fixed support mechanism are in three grooves being fixed on base of triangle disposition.
In three supporting constructions, what be positioned at an A and some C is the movement support structures 3 of band piezoelectric ceramics, and what be positioned at a B is fixed support structure 4 not with piezoelectric ceramics.The movement support structures being positioned at the band piezoelectric ceramics at an A place can produce longitudinal telescopic displacement after driving piezoelectric ceramics, and because a supporting construction at B place is stiff end, therefore whole catoptron can produce deflection angle around Y-axis; The movement support structures being in like manner positioned at the band piezoelectric ceramics at a C place can produce longitudinal telescopic displacement after driving piezoelectric ceramics, because a supporting construction at B place is stiff end, therefore whole catoptron can produce deflection angle around X-axis, thus realizes the two dimension angular deflection of this rapid control reflector.
As shown in Figure 6, whole feedback arrangement comprises helium-neon laser 51 to this two-dimensional rapid control reflector feedback arrangement diagrammatic cross-section, the first bracing frame 52, and semi-transparent semi-reflecting lens 61, the second bracing frame 62 and Position-Sensitive Detector 63 form.Helium-neon laser 51 is fixed on the first bracing frame 52, and semi-transparent semi-reflecting lens 61 is bonded on the second bracing frame 62 in 45 ° of inclinations, and it is inner that Position-Sensitive Detector (PSD) 63 is arranged on the second bracing frame 62.
PSD feedback light path as shown in Figure 7, helium-neon laser 51 produces the laser beam of level, light beam after semi-transparent semi-reflecting lens 61 reflects can produce corresponding two-dimensional deflection because of the two-dimensional deflection of catoptron 1, and corresponding change can occur in the position that its transmitted light beam again after semi-transparent semi-reflecting lens 61 is radiated on Position-Sensitive Detector 63.The two dimension angular amount of deflection of rapid control reflector can be tried to achieve by the location variation of laser facula on Position-Sensitive Detector 63.
As shown in Figure 8, based on the control system of the two-dimensional rapid control reflector of PSD feedback in present embodiment, specifically comprise:
Two-dimensional rapid control reflector 110;
PSD signal treatment circuit 120, comprises the filtering circuit for carrying out filtering to the PSD signal in two-dimensional rapid control reflector 110;
FPGA control circuit 130, being connected with PSD signal treatment circuit 120, comprising the D/A module 131 of collection PSD signal after PSD signal treatment circuit, for calculating the sliding mode controller 132 of real-time control signal u (t) and the A/D module 133 for transforming real-time control signal u (t);
Power amplification circuit 140, carries out power amplification for the voltage signal exported A/D module 133, and drives the piezoelectric ceramics in two-dimensional rapid control reflector 110.
Preferably, sliding mode controller 132 also calculates real-time control signal u (t) for angular deflection amount y (t) according to real-time two-dimensional rapid control reflector, input angle ideal value r (t) with the deviate of actual angular deflection amount y (t).
In present embodiment, sliding mode controller 132 adopts Second Order Sliding Mode Control, can eliminate the input queued switches voltage chattering produced when single order synovial membrane controls, and can realize the deflection of two-dimentional catoptron high precision easily.
Particularly, the light beam of the laser beam that helium-neon laser sends after semi-transparent semi-reflecting lens reflection can produce corresponding deflection because of the two-dimensional deflection of catoptron, and corresponding change can occur in the position that its transmitted light beam again after semi-transparent semi-reflecting lens is radiated on PSD.The four road current signals that PSD produces, after the filtering of PSD signal treatment circuit and respective handling, are gathered by the D/A module in FPGA control circuit, through calculating angular deflection amount y (t) that can obtain real-time two-dimensional rapid control reflector.Input angle ideal value r (t) transforms through modulus AD with the deviate (under the existence of external interference d (t)) of actual angular deflection amount y (t), real-time control signal u (t) is obtained after being calculated by the sliding mode controller of FPGA control circuit inside solidification, then digital-to-analogue DA conversion is carried out, carry out power amplification through power amplification circuit again, finally obtain the driving voltage of piezoelectric ceramics to drive rapid control reflector and to make it reach desirable deflection angle r (t).
As can be seen from the above technical solutions, the present invention has following beneficial effect:
Be integrated with the feedback light path structure of position-based sensing detector PSD, improve mirror angle deflection precision;
The movement support structures of two band piezoelectric ceramics and a triangular support mode do not formed with the fixed support structure of piezoelectric ceramics significantly improve structure space utilization factor while of both having ensure that all deflectable in two dimensions, made the more compact structure of whole catoptron reasonable;
Sliding mode controller adopts Second Order Sliding Mode Control can eliminate the input queued switches voltage chattering produced when single order synovial membrane controls, and can realize the deflection of two-dimentional catoptron high precision easily.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and when not deviating from spirit of the present invention or essential characteristic, the present invention can be realized in other specific forms.Therefore, no matter from which point, all should embodiment be regarded as exemplary, and be nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the present invention.Any Reference numeral in claim should be considered as the claim involved by limiting.
In addition, be to be understood that, although this instructions is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should by instructions integrally, and the technical scheme in each embodiment also through appropriately combined, can form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. the two-dimensional rapid control reflector based on PSD feedback, it is characterized in that, described two-dimensional rapid control reflector comprises: base, be fixed on the PSD feedback light path structure on described base, the band movement support structures of piezoelectric ceramics and the fixed support structure not with piezoelectric ceramics, the support be connected with fixed support structure with movement support structures, and be fixed on the catoptron on support.
2. the two-dimensional rapid control reflector based on PSD feedback according to claim 1, is characterized in that, described feedback light path structure comprises the PSD of helium-neon laser, semi-transparent semi-reflecting lens and the detection facula position set gradually along light path.
3. the two-dimensional rapid control reflector based on PSD feedback according to claim 1, it is characterized in that, described base is provided with the first bracing frame and the second bracing frame, helium-neon laser is fixedly installed on the first bracing frame, semi-transparent semi-reflecting lens is fixedly installed on the second bracing frame, and it is inner that PSD is fixedly installed in the second bracing frame.
4. the two-dimensional rapid control reflector based on PSD feedback according to claim 3, it is characterized in that, the top of described second bracing frame is obliquely installed towards the first bracing frame, and described semi-transparent semi-reflecting lens tilts to be installed on the top of described second bracing frame.
5. the two-dimensional rapid control reflector based on PSD feedback according to claim 1, it is characterized in that, described movement support structures is two, comprises two-dimension flexible hinge, oval displacement equations structure respectively and is positioned at the piezoelectric ceramics being embedded in oval displacement amplifying mechanism.
6. the two-dimensional rapid control reflector based on PSD feedback according to claim 5, it is characterized in that, described fixed support structure comprises two-dimension flexible hinge and support column.
7. the two-dimensional rapid control reflector based on PSD feedback according to claim 6, is characterized in that, described movement support structures and fixed support mechanism are in three grooves being fixed on base of triangle disposition, and are fixedly connected with support respectively.
8. the two-dimensional rapid control reflector based on PSD feedback according to claim 1, it is characterized in that, described support comprises rack body and is fixed on the boss on rack body, and described catoptron and rack body are fixedly mounted by boss.
9., based on a control system for the two-dimensional rapid control reflector of PSD feedback, it is characterized in that, described control system comprises:
Two-dimensional rapid control reflector according to any one of claim 1 ~ 8;
PSD signal treatment circuit, comprises the filtering circuit for carrying out filtering to the PSD signal in two-dimensional rapid control reflector;
FPGA control circuit, being connected with described PSD signal treatment circuit, comprising the D/A module of collection PSD signal after PSD signal treatment circuit, for calculating the sliding mode controller of real-time control signal u (t) and the A/D module for transforming real-time control signal u (t);
Power amplification circuit, carries out power amplification for the voltage signal exported A/D module, and drives the piezoelectric ceramics in two-dimensional rapid control reflector.
10. control system according to claim 9, it is characterized in that, described sliding mode controller also calculates real-time control signal u (t) for angular deflection amount y (t) according to real-time two-dimensional rapid control reflector, input angle ideal value r (t) with the deviate of actual angular deflection amount y (t).
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| CN107037725A (en) * | 2017-03-21 | 2017-08-11 | 中国科学院上海光学精密机械研究所 | The control system of full simulation high bandwidth fast mirror |
| CN108205193A (en) * | 2016-12-16 | 2018-06-26 | 深圳先进技术研究院 | Two dimensional control speculum and its control method are with including its laser scanner |
| CN109186747A (en) * | 2018-08-01 | 2019-01-11 | 歌尔股份有限公司 | Test macro and test method |
| CN113411020A (en) * | 2021-05-19 | 2021-09-17 | 西安理工大学 | Neural network sliding mode control method of two-axis voice coil fast reflector |
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| CN113411020B (en) * | 2021-05-19 | 2022-07-01 | 西安理工大学 | Neural network sliding mode control method of two-axis voice coil fast reflector |
| CN114647076A (en) * | 2022-03-23 | 2022-06-21 | 优尼科(青岛)微电子有限公司 | Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip |
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