CN109186747B - Test system and test method - Google Patents
Test system and test method Download PDFInfo
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- CN109186747B CN109186747B CN201810865529.8A CN201810865529A CN109186747B CN 109186747 B CN109186747 B CN 109186747B CN 201810865529 A CN201810865529 A CN 201810865529A CN 109186747 B CN109186747 B CN 109186747B
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- G01H13/00—Measuring resonant frequency
Abstract
The embodiment of the application provides a test system and a test method, wherein the test system comprises: the MEMS testing device comprises a processor, a signal generator and a data acquisition unit, wherein the signal generator and the data acquisition unit are respectively connected with the processor and the MEMS to be tested. The signal generator sends a pulse signal to the MEMS to be tested based on a signal generation instruction so as to enable a scanning galvanometer slow axis of the MEMS to be tested to deflect for a certain angle, and the pulse signal is damped and vibrated at a resonance frequency after the pulse signal disappears. And the data acquisition unit acquires a vibration signal when the scanning galvanometer slow shaft does the damping vibration based on a signal acquisition instruction, and sends the vibration signal to the processor. The processor is used for sending the signal generation instruction to the signal generator; sending the signal acquisition instruction to the data acquisition unit; and determining the resonance frequency of the slow axis of the scanning galvanometer based on the vibration signal acquired by the data acquisition unit. The method and the device can test and obtain the resonant frequency of the scanning galvanometer slow axis of the MEMS to be tested.
Description
Technical Field
The embodiment of the application relates to the technical field of virtual reality, in particular to a test system and a test method.
Background
Scanning galvanometers in MEMS (micro electro mechanical Systems) are key components in laser scanning projection equipment. Laser beams emitted by the laser device need to be reflected to different positions on the light curtain through the rapid vibration of the scanning galvanometer, so that the rapid point scanning of the image to be scanned is realized, and the image to be scanned is finally presented.
The scanning galvanometer can be divided into fast axis scanning and slow axis scanning. The fast axis scanning utilizes the resonance of the fast axis of the scanning galvanometer to realize fast scanning, and the slow axis scanning utilizes external forces such as electromagnetic force or electrostatic force to drive the slow axis of the scanning galvanometer to realize uniform scanning. The frequency of the driving signal of the scanning galvanometer slow shaft needs to be far away from the resonance frequency of the scanning galvanometer slow shaft, and because the driving signal of the scanning galvanometer slow shaft contains the resonance frequency equal to or close to the resonance frequency of the scanning galvanometer slow shaft, a resonance effect can be generated, so that the scanning galvanometer slow shaft cannot realize uniform scanning, and the imaging quality of an image to be projected is influenced. In order to avoid the resonant frequency of the scanning galvanometer slow axis contained in the driving signal of the scanning galvanometer slow axis, a filter circuit can be added in the driving circuit of the scanning galvanometer slow axis to filter the resonant frequency in the driving signal. However, different scanning galvanometers have different scanning galvanometer slow axis resonant frequencies, so that the resonant frequency of the scanning galvanometer slow axis needs to be obtained in advance when the laser scanning projection equipment is produced, so as to realize circuit design in the laser scanning projection equipment.
Disclosure of Invention
The embodiment of the application provides a test method and a test system, which are used for obtaining the resonant frequency of a scanning galvanometer slow axis in an MEMS to be tested through testing.
The application provides a test system, including: the system comprises a processor, a signal generator and a data acquisition unit, wherein the signal generator and the data acquisition unit are respectively connected with the processor and the MEMS to be tested;
the signal generator sends a pulse signal to the MEMS to be tested based on a signal generation instruction so as to enable a scanning galvanometer slow axis of the MEMS to be tested to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears;
the data acquisition unit acquires a vibration signal when the scanning galvanometer slow shaft performs damping vibration based on a signal acquisition instruction, and sends the vibration signal to the processor;
the processor is used for sending the signal generation instruction to the signal generator; sending the signal acquisition instruction to the data acquisition unit; and determining the resonance frequency of the slow axis of the scanning galvanometer based on the vibration signal acquired by the data acquisition unit.
Preferably, the MEMS to be detected comprises a coil connected with the scanning galvanometer slow shaft and a sensing component used for detecting the angular displacement of the scanning galvanometer slow shaft;
the signal generator is connected with a coil of the MEMS to be tested and used for sending a pulse signal to the MEMS to be tested, so that the coil is twisted based on the pulse signal and triggers a scanning galvanometer slow shaft connected with the coil to deflect by a certain angle;
the data acquisition unit is connected with the sensing assembly and used for acquiring a vibration signal generated by the sensing assembly when the sensing assembly detects the angular displacement changes along with time when the scanning galvanometer slow shaft performs damping vibration, and transmitting the vibration signal to the processor.
Preferably, the device further comprises a power supply module connected with the processor; the processor is used for sending a power supply control instruction to the power supply module;
the power supply module is connected with the sensing assembly and used for providing a bias power supply for the sensing assembly according to the power supply control instruction.
Preferably, the sensing component comprises a first variable resistor, a second resistor, a third resistor and a fourth resistor;
the resistance values of the first variable resistor and the third resistor are equal, and the resistance values of the second resistor and the fourth resistor are equal;
the scanning galvanometer slow axis deflection causes the resistance value of the first variable resistor to change; wherein the resistance change of the first variable resistor is related to the angular displacement of the scanning galvanometer slow shaft;
the first variable resistor, the second resistor, the third resistor and the fourth resistor form a bridge circuit of the scanning galvanometer slow axis.
Preferably, the connection node corresponding to the first diagonal line of the bridge circuit is connected to the power supply module;
the connection node corresponding to the second diagonal line of the bridge circuit is connected with the data acquisition unit;
the data acquisition unit acquires and obtains a voltage signal output by the bridge circuit based on the connection node corresponding to the second diagonal line;
the processor determines the resonance frequency of the scanning galvanometer slow axis based on the vibration signal acquired by the data acquisition unit, and determines the resonance frequency of the scanning galvanometer slow axis based on the voltage signal acquired by the data acquisition unit.
Preferably, the first variable resistor comprises a varistor.
The application also provides a test method, which comprises the following steps:
sending a pulse signal to an MEMS to be detected, enabling a scanning galvanometer slow axis of the MEMS to be detected to deflect for a certain angle, and damping vibration at a resonance frequency after the pulse signal disappears;
collecting a vibration signal when the slow axis of the scanning galvanometer performs the damping vibration;
and determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
Preferably, the determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal comprises:
carrying out Fourier transform on the vibration signal to obtain a vibration signal of a frequency domain;
and determining the frequency with the maximum amplitude in the vibration signals of the frequency domain as the resonance frequency of the slow axis of the scanning galvanometer.
Preferably, the method is used for testing a system; the test system comprises a processor, a signal generator and a data collector, wherein the signal generator and the data collector are respectively connected with the processor and the MEMS to be tested;
the sending of the pulse signal to the MEMS to be tested comprises:
sending a signal generation instruction to the signal generator;
controlling the signal generator to send a pulse signal to the MEMS to be tested;
the collecting of the vibration signal when the scanning galvanometer slow axis does the damping vibration comprises:
sending a signal acquisition instruction to the data acquisition unit;
and controlling the data acquisition unit to acquire vibration signals when the scanning galvanometer slow shaft performs damping vibration and acquiring the vibration signals acquired by the data acquisition unit.
Preferably, the MEMS to be tested comprises a sensing component;
the control of the data acquisition unit for acquiring the vibration signal of the scanning galvanometer slow shaft during damping vibration comprises the following steps:
and controlling the data acquisition unit to acquire a vibration signal generated by the sensing assembly when the scanning galvanometer slow shaft is subjected to damping vibration and the angular displacement changes along with time.
The embodiment of the application provides a test system and a test method, wherein the test system comprises a processor, and a signal generator and a data acquisition unit which are respectively connected with the processor and an MEMS to be tested. The signal generator sends a pulse signal to the MEMS to be tested so as to enable a scanning galvanometer slow axis of the MEMS to be tested to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears. And the data acquisition unit acquires a vibration signal when the scanning galvanometer slow shaft does the damping vibration and sends the vibration signal to the processor. And the processor determines the resonance frequency of the slow axis of the scanning galvanometer based on the vibration signals acquired by the data acquisition unit. This application is through increasing pulse signal on waiting to scan MEMS for scan galvanometer slow axis deflects certain angle after receiving external force drive, and when this pulse signal cancellation back, the external force that scan galvanometer slow axis received disappears, just can do damping vibration near the equilibrium position and get back to the equilibrium position static gradually, and the resonant frequency of scanning galvanometer slow axis is promptly scanned to the vibration frequency when scanning galvanometer slow axis carries out damping vibration. Therefore, a vibration signal generated when the scanning galvanometer slow shaft performs damping vibration is collected through the data collector. The resonant frequency of the scanning galvanometer slow axis can be determined based on the vibration signal, and a foundation is laid for subsequent design and production of laser scanning projection equipment.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram illustrating an embodiment of a test system provided herein;
FIG. 2 is a schematic diagram illustrating a test system according to another embodiment of the present application;
FIG. 3 shows a schematic diagram of the data acquisition unit provided by the present application acquiring and obtaining a voltage signal of a slow axis of a scanning galvanometer of any MEMS to be tested;
FIG. 4 is a schematic diagram illustrating a frequency domain signal corresponding to a voltage signal of a slow axis of a scanning galvanometer acquired in the embodiment of FIG. 3 provided in the present application;
FIG. 5 illustrates a flow chart of one embodiment of a testing method provided herein;
FIG. 6 illustrates a flow chart of yet another embodiment of a testing method provided herein;
FIG. 7 is a schematic diagram illustrating an embodiment of a testing apparatus provided herein;
fig. 8 shows a schematic structural diagram of an embodiment of a testing apparatus provided in the present application.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.
In some of the flows described in the specification and claims of this application and in the above-described figures, a number of operations are included that occur in a particular order, but it should be clearly understood that these operations may be performed out of order or in parallel as they occur herein, the number of operations, e.g., 101, 102, etc., merely being used to distinguish between various operations, and the number itself does not represent any order of performance. Additionally, the flows may include more or fewer operations, and the operations may be performed sequentially or in parallel. It should be noted that, the descriptions of "first", "second", etc. in this document are used for distinguishing different messages, devices, modules, etc., and do not represent a sequential order, nor limit the types of "first" and "second" to be different.
In order to obtain the resonant frequency of the slow axis of different scanning galvanometers, the inventor provides the scheme of the application through a plurality of researches. The application provides a test system and a test method, wherein the test system comprises a processor, a signal generator and a data acquisition unit, wherein the signal generator and the data acquisition unit are respectively connected with the processor and an MEMS to be tested. The signal generator sends a pulse signal to the MEMS to be tested so as to enable a scanning galvanometer slow axis of the MEMS to be tested to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears. And the data acquisition unit acquires a vibration signal when the scanning galvanometer slow shaft does the damping vibration and sends the vibration signal to the processor. And the processor determines the resonance frequency of the slow axis of the scanning galvanometer based on the vibration signals acquired by the data acquisition unit. This application is through increasing pulse signal on waiting to scan MEMS for scan galvanometer slow axis deflects certain angle after receiving external force drive, and when this pulse signal cancellation back, the external force that scan galvanometer slow axis received disappears, just can do damping vibration near the equilibrium position and get back to the equilibrium position static gradually, and the resonant frequency of scanning galvanometer slow axis is promptly scanned to the vibration frequency when scanning galvanometer slow axis carries out damping vibration. Therefore, a vibration signal generated when the scanning galvanometer slow shaft performs damping vibration is collected through the data collector. The resonant frequency of the scanning galvanometer slow axis can be determined based on the vibration signal, and a foundation is laid for subsequent design and production of laser scanning projection equipment.
The technical solution of the present application will be described in detail below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of an embodiment of a test system according to an embodiment of the present disclosure, where the test system may include a processor 101, a signal generator 102 and a data collector 103, which are respectively connected to the processor 101 and a MEMS to be tested.
The signal generator 102 sends a pulse signal to the MEMS to be measured based on the signal generation instruction, so that the scanning galvanometer slow axis of the MEMS to be measured deflects by a certain angle, and performs damping vibration at a resonance frequency after the pulse signal disappears.
According to different requirements of the MEMS to be tested or the test environment, the signal generator 102 may generate a pulse signal based on the signal generation instruction generated by the processor 101, and send the pulse signal to the MEMS to be tested, where the amplitude and duration of the pulse signal are not specifically limited. For example, the pulse signal may be a pulse signal having an amplitude of 200mV (millivolts) and a width of 2ms (milliseconds). The pulse signal can provide direct current driving voltage with the duration of 2ms and the voltage value of 200mV for the MEMS to be tested, so that the scanning galvanometer slow shaft of the MEMS to be tested is driven by external force to deviate by a certain angle. The size of the offset angle of the scanning galvanometer slow shaft is in positive correlation with the amplitude of the pulse signal, namely the larger the amplitude of the pulse signal is, the larger the stress of the scanning galvanometer slow shaft is, the larger the offset angle of the scanning galvanometer slow shaft is, and otherwise, the smaller the offset angle of the scanning galvanometer slow shaft is.
Because the MEMS system to be tested can be equivalent to an elastic system, when the direct current driving voltage of the pulse signal disappears, the external force applied to the scanning galvanometer slow shaft disappears, at the moment, the scanning galvanometer slow shaft can perform damping vibration near the balance position, and the amplitude of the scanning galvanometer slow shaft gradually attenuates along with time due to factors such as friction, medium resistance or other energy consumption and the like, and then gradually returns to the balance position to be static. And the vibration frequency when the scanning galvanometer slow shaft does damping vibration is the natural frequency of the scanning galvanometer slow shaft, namely the resonance frequency.
The data acquisition unit 103 acquires a vibration signal when the scanning galvanometer slow axis performs damping vibration based on a signal acquisition instruction, and sends the vibration signal to the processor 101.
Because the scanning galvanometer slow shaft performs damping vibration at the resonance frequency after the pulse signal disappears, the vibration signal of the scanning galvanometer slow shaft during damping vibration can be obtained according to the vibration amplitude of the scanning galvanometer slow shaft changing along with time. The vibration amplitude when the slow axis of the scanning galvanometer is subjected to damping vibration is the angular displacement when the slow axis of the scanning galvanometer deflects to the maximum offset angle.
In practical applications, the processor 101 may be a computer, a server, or the like. The processor 101 is configured to send the signal generation instruction to the signal generator 102; sending the signal acquisition instruction to the data acquisition unit 103; and determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal acquired by the data acquisition unit 103.
The vibration signal represents the vibration amplitude change of the scanning galvanometer slow shaft during damping vibration along with the time change and is a time domain signal. Although the vibration amplitude of the slow axis of the scanning galvanometer is attenuated along with the change of time, because the vibration frequency is the resonance frequency of the slow axis of the scanning galvanometer, a frequency domain signal for damping vibration of the slow axis of the scanning galvanometer is obtained by carrying out Fourier change on the vibration signal, and the frequency with the maximum amplitude in the frequency domain signal can be determined to be the resonance frequency of the slow axis of the scanning galvanometer by obtaining the frequency information of the damping vibration.
The test system provided by the embodiment of the application is suitable for testing any MEMS to be tested to obtain the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, has a simple system structure, is easy to realize the rapid detection of the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, and lays a foundation for the design of a subsequent scanning galvanometer slow axis driving circuit, the design of a filter circuit and the production of laser scanning projection equipment.
Fig. 2 is a schematic structural diagram of another embodiment of a test system provided in an embodiment of the present application, where the test system may further include a power module 104 connected to the processor, in addition to the processor 101, the signal generator 102, and the data collector 103 in the embodiment of fig. 1.
Optionally, the MEMS to be tested may include a coil connected to the scanning galvanometer slow axis and a sensing component for detecting the angular displacement of the scanning galvanometer slow axis.
In practical application, a coil of the MEMS to be tested can be connected with a scanning galvanometer slow shaft, and the scanning galvanometer slow shaft is driven by the coil to deflect.
The signal generator 102 is connected with a coil of the MEMS to be tested and used for sending a pulse signal to the MEMS to be tested, so that the coil is twisted based on the pulse signal and triggers a scanning galvanometer slow axis connected with the coil to deflect by a certain angle.
After receiving the pulse signal sent by the signal generator 102, the MEMS to be measured generates a direct current driving voltage on the coil based on the pulse signal, and because the coil is under the action of a magnetic field, an electromagnetic acting force is generated after the coil is connected with the direct current driving voltage, so that the coil is twisted to drive the scanning galvanometer slow axis connected with the coil to deflect at a certain angle, and the deflection angle is positively correlated with the magnitude of the electromagnetic acting force received by the coil. The coil can be equivalent to an elastic system, so that after the direct current driving voltage disappears, the electromagnetic acting force of the coil disappears, at the moment, the coil rebounds from the deflection position to the balance position to generate elastic vibration, the coil drives the scanning galvanometer slow shaft to perform damping vibration under the action of system friction, medium resistance or other energy consumption and other factors, and the vibration frequency is the resonance frequency of the scanning galvanometer slow shaft.
The data acquisition unit 103 is connected to the sensing component, and is configured to acquire a vibration signal generated by the sensing component when the sensing component detects that the scanning galvanometer slow axis performs damping vibration and angular displacement changes with time, and transmit the vibration signal to the processor 101.
Because the data acquisition unit can not directly acquire the amplitude of the scanning galvanometer slow shaft during damping vibration, the sensing assembly in the MEMS to be detected is used for acquiring a vibration signal generated by the change of the angular displacement along with the time when the scanning galvanometer slow shaft performs damping vibration.
Alternatively, in some embodiments, the sensing component can be a scanning galvanometer slow axis position information feedback circuit or other circuit structure of the MEMS to be tested. In order to make the sensing component perform the detection operation, a bias power supply needs to be provided, so the power supply module 104 is connected to the sensing component and is configured to provide the bias power supply to the sensing component according to the power supply control instruction.
Wherein the power control instruction is sent to the power module 104 by the processor 101.
Optionally, in some embodiments, the sensing component includes a first variable resistor, a second resistor, a third resistor, and a fourth resistor.
The first variable resistor and the third resistor have the same resistance value, and the second resistor and the fourth resistor have the same resistance value.
The scanning galvanometer slow axis deflection causes the resistance value of the first variable resistor to change; wherein the resistance change of the first variable resistor is related to the angular displacement of the slow axis of the scanning galvanometer.
The first variable resistor, the second resistor, the third resistor and the fourth resistor form a bridge circuit of the scanning galvanometer slow axis.
Alternatively, the variable resistor may be a piezo-resistor. The first variable resistor is adjacent to the coil for detecting a torsion angle of the coil.
When the coil is twisted to different angles, different pressure values are generated for the piezoresistor, for example, the pressure value generated when the coil is located at the balance position is the largest, and the resistance value of the piezoresistor is larger at the moment; when the deflection angle is larger, the pressure on the piezoresistor is smaller, and the resistance value of the piezoresistor is smaller at the moment. Therefore, the resistance value of the first variable resistor is not equal to the resistance value of the third resistor, so that the bridge circuit generates a potential difference and outputs a voltage difference value.
Optionally, in some embodiments, the connection nodes corresponding to the first diagonal of the bridge circuit are connected to the power module 104. And the connecting nodes corresponding to the second diagonal line of the bridge circuit are connected with the data acquisition unit. And the data acquisition unit acquires and acquires the voltage signal output by the bridge circuit based on the connecting node corresponding to the second diagonal line. When the resistance value of the first variable resistor is not changed, the voltage value output by the first output node and the voltage value output by the second output node are equal, the voltage signal output by the data collector is zero, when the first variable resistor is changed, the voltage signal output by the data collector is unequal to the third resistor, the bridge circuit is unbalanced, the voltage values output by the first output node and the second output node have potential difference, and the voltage signal collected by the data collector is the voltage difference output by the bridge circuit. Because the change of the voltage difference value is related to the change of the resistance value of the first variable resistor, and the change of the resistance value of the first variable resistor is caused by the twisting of the coil, the angular displacement information of the scanning galvanometer slow shaft can be obtained by collecting the voltage signal output by the bridge circuit, and the voltage signal can be used as the vibration signal of the scanning galvanometer slow shaft.
Fig. 3 shows the voltage signal of the scanning galvanometer slow axis acquired by the data acquisition unit 103.
The processor 101 determines the resonant frequency of the scanning galvanometer slow axis based on the vibration signal collected by the data collector 103, and determines the resonant frequency of the scanning galvanometer slow axis based on the voltage signal collected by the data collector.
The processor 101 performs fourier transform on the time domain voltage signal to convert the time domain voltage signal into a frequency domain signal, so as to determine the frequency with the maximum amplitude as the resonant frequency of the slow axis of the scanning galvanometer. Fig. 4 shows a frequency domain signal obtained by fourier transforming the voltage signal of fig. 3. The direct current component is generated because the balance position of the slow axis of the scanning galvanometer, which is obtained by detection of the sensing assembly and is used for damping vibration, deviates to a certain extent. The magnitude of the dc component is related to the offset of the equilibrium position of the time domain voltage signal, and the dc component is zero when the magnitude of the voltage signal vibrates at the equilibrium position where the voltage magnitude is 0V (volts), as shown in fig. 3, the offset of the voltage signal corresponds to the magnitude of the dc component in fig. 4.
In the embodiment of the application, the sensing component of the MEMS to be detected obtains a voltage signal by detecting the angular displacement information of the slow shaft of the scanning galvanometer and converting the angular displacement information into an electric signal. The data acquisition unit acquires the voltage signal generated by the sensing assembly, the voltage signal is sent to the processor as a vibration signal, and the processor determines the resonance frequency of the scanning galvanometer based on the voltage signal. The system has simple structure, is easy to realize the rapid detection of the resonant frequency of the slow axis of the MEMS scanning galvanometer to be detected, and lays a foundation for the design of a driving circuit of the slow axis of the scanning galvanometer, the design of a filter circuit and the production of laser scanning projection equipment.
FIG. 5 is a flow chart illustrating one embodiment of a testing method provided herein, which may include:
501: and sending a pulse signal to the MEMS to be tested so as to enable the scanning galvanometer slow axis of the MEMS to be tested to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears.
502: and collecting a vibration signal when the slow axis of the scanning galvanometer is subjected to damping vibration.
503: and determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
In practical application, the test method can be applied to any test equipment, test system or service end which can realize the steps, and pulse signals are transmitted to the MEMS to be tested through connection with the MEMS to be tested. Since the MEMS to be measured can be equivalent to an elastic system, it can be known from the above that the scanning galvanometer slow axis of the MEMS to be measured deflects by a certain angle based on the pulse signal and performs damping vibration at the resonance frequency after the pulse signal disappears. The vibration signal is obtained by damping the vibration of the slow axis of the scanning galvanometer, and the vibration signal necessarily contains the resonance frequency of the slow axis of the scanning galvanometer. Therefore, the resonant frequency of the slow axis of the scanning galvanometer can be obtained based on the vibration signal.
Optionally, in some embodiments, the determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal may include;
carrying out Fourier transform on the vibration signal to obtain a vibration signal of a frequency domain;
and determining the frequency with the maximum amplitude in the vibration signals of the frequency domain as the resonance frequency of the slow axis of the scanning galvanometer.
In practice, the acquired resonance signal of the scanning galvanometer slow axis is a time domain signal, the time domain signal comprises frequency information of the scanning galvanometer slow axis for damping vibration, corresponding frequency information is obtained by performing fourier transform on the vibration signal, and the frequency with the maximum amplitude in the frequency domain vibration signal is determined to be the resonance frequency of the scanning galvanometer slow axis.
The foregoing detailed description is provided for the specific implementation method of the embodiments of the present application, and is not repeated herein.
In the embodiment of the application, the MEMS to be tested can be equivalent to an elastic system, so that the vibration frequency of the scanning galvanometer slow shaft during damping vibration is the resonance frequency of the scanning galvanometer slow shaft. Therefore, after the scanning galvanometer slow shaft is driven to deflect for a certain angle by the pulse signal, the scanning galvanometer slow shaft is made to vibrate in a damping mode. And acquiring a vibration signal when the slow axis of the scanning galvanometer performs damping vibration. The resonant frequency of the scanning galvanometer slow axis can be determined based on the vibration signal, and a foundation is laid for subsequent design and production of laser scanning projection equipment.
FIG. 6 illustrates a flow chart of yet another embodiment of a testing method provided herein, which may be used in a testing system; the test system comprises a processor, a signal generator and a data acquisition unit, wherein the signal generator and the data acquisition unit are respectively connected with the processor and the MEMS to be tested.
The method can comprise the following steps:
601: sending a signal generation instruction to the signal generator.
602: and controlling the signal generator to send a pulse signal to the MEMS to be tested so as to deflect the scanning galvanometer slow axis of the MEMS to be tested by a certain angle, and damping vibration at a resonance frequency after the pulse signal disappears.
603: and sending a signal acquisition instruction to the data acquisition unit.
604: and controlling the data acquisition unit to acquire vibration signals when the scanning galvanometer slow shaft performs damping vibration and acquiring the vibration signals acquired by the data acquisition unit.
605: and determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
Optionally, in some embodiments, the MEMS under test comprises a sensing component;
the controlling the data acquisition unit to acquire the vibration signal when the scanning galvanometer slow axis is subjected to the damping vibration may include:
and controlling the data acquisition unit to acquire a vibration signal generated by the sensing assembly when the sensing assembly detects the angular displacement changes along with time when the scanning galvanometer slow shaft performs damping vibration, wherein the vibration signal is a voltage signal.
In practice, the sensing assembly is composed of a circuit structure, and outputs a voltage signal related to the angular displacement change by detecting the angular displacement change of the slow shaft of the scanning galvanometer. The data signal collector collects the voltage signal output by the sensing assembly, the voltage signal is used as a vibration signal, and the change of the voltage amplitude along with time can represent the change of the vibration amplitude along with time when the scanning galvanometer slow shaft does damping vibration, so that the resonance signal of the scanning galvanometer slow shaft can be determined based on the collected voltage signal.
The foregoing detailed description is provided for the specific implementation method of the embodiments of the present application, and is not repeated herein.
The testing method provided by the embodiment of the application can be suitable for a testing system to realize the testing of any MEMS to be tested to obtain the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, and the testing system is simple in structure, is easy to realize the rapid detection of the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, and lays a foundation for the design of a driving circuit of the slow axis of the scanning galvanometer, the design of a filter circuit and the production of laser scanning projection equipment.
Fig. 7 is a schematic structural diagram illustrating an embodiment of a testing apparatus provided in the present application, where the apparatus may include:
the sending module 701 is configured to send a pulse signal to the MEMS to be detected, so that the scanning galvanometer slow axis of the MEMS to be detected deflects by a certain angle, and performs damping vibration at a resonance frequency after the pulse signal disappears.
And the acquisition module 702 is used for acquiring a vibration signal when the slow axis of the scanning galvanometer performs the damping vibration.
A resonant frequency determining module 703, configured to determine a resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
Optionally, in some embodiments, the resonance frequency determination module 703 may be specifically configured to;
carrying out Fourier transform on the vibration signal to obtain a vibration signal of a frequency domain;
and determining the frequency with the maximum amplitude in the vibration signals of the frequency domain as the resonance frequency of the slow axis of the scanning galvanometer.
In practice, the acquired resonance signal of the scanning galvanometer slow axis is a time domain signal, the time domain signal comprises frequency information of the scanning galvanometer slow axis for damping vibration, corresponding frequency information is obtained by performing fourier transform on the vibration signal, and the frequency with the maximum amplitude in the frequency domain vibration signal is determined to be the resonance frequency of the scanning galvanometer slow axis.
The foregoing detailed description is provided for the specific implementation method of the embodiments of the present application, and is not repeated herein.
In the embodiment of the application, the MEMS to be tested can be equivalent to an elastic system, so that the vibration frequency of the scanning galvanometer slow shaft during damping vibration is the resonance frequency of the scanning galvanometer slow shaft. Therefore, after the scanning galvanometer slow shaft is driven to deflect for a certain angle by the pulse signal, the scanning galvanometer slow shaft is made to vibrate in a damping mode. And acquiring a vibration signal when the slow axis of the scanning galvanometer performs damping vibration. The resonant frequency of the scanning galvanometer slow axis can be determined based on the vibration signal, and a foundation is laid for subsequent design and production of laser scanning projection equipment.
FIG. 8 is a schematic diagram illustrating one embodiment of a test apparatus that may be used in a test system; the test system comprises a processor, a signal generator and a data acquisition unit, wherein the signal generator and the data acquisition unit are respectively connected with the processor and the MEMS to be tested.
The apparatus may include:
the sending module 801 is configured to send a pulse signal to the MEMS to be tested, so that the scanning galvanometer slow axis of the MEMS to be tested deflects by a certain angle, and damp vibration at a resonant frequency after the pulse signal disappears.
Optionally, the sending module 801 may include:
the first sending unit 811 is configured to send a signal generation instruction to the signal generator.
And the first control unit 812 is used for controlling the signal generator to send a pulse signal to the MEMS to be detected, so that the scanning galvanometer slow axis of the MEMS to be detected deflects by a certain angle, and performs damping vibration at a resonance frequency after the pulse signal disappears.
And the acquisition module 802 is used for acquiring a vibration signal when the scanning galvanometer slow axis does the damping vibration.
Optionally, the acquisition module 802 may include;
a second sending unit 813, configured to send a signal acquisition instruction to the data acquisition unit.
The second control unit 814 is configured to control the data collector to collect a vibration signal when the scanning galvanometer slow axis performs the damping vibration and obtain the vibration signal collected by the data collector.
A resonant frequency determining module 803, configured to determine a resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
Optionally, in some embodiments, the MEMS under test may include a sensing component;
the second control unit 814 may specifically be configured to:
and controlling the data acquisition unit to acquire a vibration signal generated by the sensing assembly when the scanning galvanometer slow shaft is subjected to damping vibration and the angular displacement changes along with time.
In practice, the sensing assembly is composed of a circuit structure, and outputs a voltage signal related to the angular displacement change by detecting the angular displacement change of the slow shaft of the scanning galvanometer. The data signal collector collects the voltage signal output by the sensing assembly, the voltage signal is used as a vibration signal, and the change of the voltage amplitude along with time can represent the change of the vibration amplitude along with time when the scanning galvanometer slow shaft does damping vibration, so that the resonance signal of the scanning galvanometer slow shaft can be determined based on the collected voltage signal.
The foregoing detailed description is provided for the specific implementation method of the embodiments of the present application, and is not repeated herein.
The testing method provided by the embodiment of the application can be suitable for a testing system to realize the testing of any MEMS to be tested to obtain the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, and the testing system is simple in structure, is easy to realize the rapid detection of the resonant frequency of the slow axis of the MEMS scanning galvanometer to be tested, and lays a foundation for the design of a driving circuit of the slow axis of the scanning galvanometer, the design of a filter circuit and the production of laser scanning projection equipment.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware. With this understanding in mind, the above-described technical solutions may be embodied in the form of a software product, which can be stored in a computer-readable storage medium such as ROM/RAM, magnetic disk, optical disk, etc., and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the methods described in the embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
Claims (8)
1. A test system, comprising: the MEMS to be detected comprises a coil connected with a scanning galvanometer slow shaft and a sensing component used for detecting the scanning galvanometer slow shaft angular displacement;
the signal generator is connected with a coil of the MEMS to be tested, and sends a pulse signal to the MEMS to be tested based on a signal generation instruction, so that the coil is twisted based on the pulse signal and triggers a scanning galvanometer slow shaft connected with the coil to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears;
the data acquisition unit is connected with the sensing assembly, acquires a vibration signal generated by the sensing assembly when the sensing assembly detects that the scanning galvanometer slow shaft performs damping vibration along with the change of angular displacement along with time based on a signal acquisition instruction, and sends the vibration signal to the processor;
the processor is used for sending the signal generation instruction to the signal generator; sending the signal acquisition instruction to the data acquisition unit; and determining the resonance frequency of the slow axis of the scanning galvanometer based on the vibration signal acquired by the data acquisition unit.
2. The system of claim 1, further comprising a power module coupled to the processor; the processor is used for sending a power supply control instruction to the power supply module;
the power supply module is connected with the sensing assembly and used for providing a bias power supply for the sensing assembly according to the power supply control instruction.
3. The system of claim 2, wherein the sensing component comprises a first variable resistor, a second resistor, a third resistor, and a fourth resistor;
the resistance values of the first variable resistor and the third resistor are equal, and the resistance values of the second resistor and the fourth resistor are equal;
the scanning galvanometer slow axis deflection causes the resistance value of the first variable resistor to change; wherein the resistance change of the first variable resistor is related to the angular displacement of the scanning galvanometer slow shaft;
the first variable resistor, the second resistor, the third resistor and the fourth resistor form a bridge circuit of the scanning galvanometer slow axis.
4. The system of claim 3,
the connecting node corresponding to the first diagonal line of the bridge circuit is connected with the power supply module;
the connection node corresponding to the second diagonal line of the bridge circuit is connected with the data acquisition unit;
the data acquisition unit acquires and obtains a voltage signal output by the bridge circuit based on the connection node corresponding to the second diagonal line;
the processor determines the resonance frequency of the scanning galvanometer slow axis based on the vibration signal acquired by the data acquisition unit, and determines the resonance frequency of the scanning galvanometer slow axis based on the voltage signal acquired by the data acquisition unit.
5. The system of claim 3, wherein the first variable resistor comprises a voltage dependent resistor.
6. A method of testing, comprising:
sending a pulse signal to an MEMS to be detected, so that a coil of the MEMS to be detected is twisted based on the pulse signal and triggers a scanning galvanometer slow shaft connected with the coil to deflect for a certain angle, and damping vibration is carried out at a resonance frequency after the pulse signal disappears, wherein the MEMS to be detected comprises a coil and a sensing component;
collecting a vibration signal generated by the angular displacement along with the time change when the sensing assembly detects that the scanning galvanometer slow shaft performs the damping vibration;
and determining the resonant frequency of the slow axis of the scanning galvanometer based on the vibration signal.
7. The method of claim 6, wherein determining the resonant frequency of the scanning galvanometer slow axis based on the vibration signal comprises:
carrying out Fourier transform on the vibration signal to obtain a vibration signal of a frequency domain;
and determining the frequency with the maximum amplitude in the vibration signals of the frequency domain as the resonance frequency of the slow axis of the scanning galvanometer.
8. The method of claim 6, wherein the method is used for testing a system; the test system comprises a processor, a signal generator and a data collector, wherein the signal generator and the data collector are respectively connected with the processor and the MEMS to be tested;
the sending of the pulse signal to the MEMS to be tested comprises:
sending a signal generation instruction to the signal generator;
controlling the signal generator to send a pulse signal to the MEMS to be tested;
the collecting of the vibration signal generated by the angular displacement along with the time change when the sensing assembly detects that the scanning galvanometer slow shaft does the damping vibration comprises the following steps:
sending a signal acquisition instruction to the data acquisition unit;
and controlling the data acquisition unit to acquire a vibration signal generated by the sensing assembly when the scanning galvanometer slow shaft performs damping vibration and angular displacement changes along with time, and acquiring the vibration signal acquired by the data acquisition unit, wherein the vibration signal is a voltage signal.
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