CN105403999B - Two-dimensional rapid control reflector and its control system based on PSD feedbacks - Google Patents
Two-dimensional rapid control reflector and its control system based on PSD feedbacks Download PDFInfo
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- CN105403999B CN105403999B CN201510979812.XA CN201510979812A CN105403999B CN 105403999 B CN105403999 B CN 105403999B CN 201510979812 A CN201510979812 A CN 201510979812A CN 105403999 B CN105403999 B CN 105403999B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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Abstract
The invention discloses a kind of two-dimensional rapid control reflectors based on PSD feedbacks and its control system, the two-dimensional rapid control reflector to include：Pedestal, PSD feedback light paths structure, the movement support structures with piezoelectric ceramics and the fixed support structure without piezoelectric ceramics being fixed on the pedestal, the holder being connected with movement support structures and fixed support structure, and the speculum that is fixed on holder.The present invention is integrated with the feedback light path structure based on Position-Sensitive Detector PSD, improves mirror angle deflection precision；Triangular support structure both ensure that deflectable in two dimensions while structure space utilization rate greatly improved, and keep the more compact structure of entire speculum reasonable.
Description
Technical field
The present invention relates to technical field of photo communication, more particularly to a kind of quickly control reflection of the two dimension based on PSD feedbacks
Mirror and its control system.
Background technology
Free space optical communication has communication security good, density as a kind of wireless optic communication using laser communications
Height, sense is strong, without advantages such as co-channel interferences.A crucial device of the laser scanner as free space optical communication
Part, performance directly affect its communication quality.The angle control precision of scanner directly affects free space optical communication
Channel stability, traditional turntable type mirror scanner, the resonant frequency of multiple surface rotating mirror formula scanner mechanical structure are low, are easy
Cause resonance, and angle control precision is low.
Traditional scanner has turntable type mirror scanner, multiple surface rotating mirror scanner, galvanometer galvanometer scanner etc.,
Big multiple scan frequency is low or linearity is not high.Rapid control reflector is a kind of novel laser scanner, basis
The difference of driving element can be divided into piezoelectric ceramic type laser scanner and voice coil motor formula laser scanner.Voice coil motor formula swashs
Optical scanner's scanning angle is big, but scan frequency is smaller, and angular deflection precision is poor, and piezoelectric ceramic type laser scanner is therewith
Compared to scan frequency height, and angular deflection precision is high, suitable in free space optical communication.
201569787 U of Chinese patent CN disclose a kind of high speed control piezoelectric scanning device, the apparatus structure schematic diagram
As shown in Figure 1a, wherein 3 be laser, and 4a is oval displacement equations structure, and 7a is piezoelectric ceramics, and 5 be speculum, and 15 are
Position-Sensitive Detector.Two piezoelectric ceramics are given to apply driving voltage opposite each other, oval elastic frame is by piezoelectric ceramics
Telescopic direction displacement equations make elastic hinge holder pivots, driving voltage size determine mirror deflecting angle.In addition it scans
It is integrated with One Dimensional Position Sensitive Detectors on device, can realize mirror deflecting angle with real-time detection mirror deflecting angle
Closed loop feedback control further increases linearity and positioning accuracy.However the invention is one-dimensional piezoelectric laser scanner,
It can only realize the deflection of one dimension of laser, its mirror surface is small in addition, and feedback channel occupies very large space, in structure
It is not compact.
103913838 A of Chinese patent CN disclose a kind of actuation mechanism of two-dimentional fast steering mirror, the device knot
Structure schematic diagram is as shown in Figure 1 b comprising 4 symmetrical actuator assemblies, single driver component use lever displacement and put
Big structure.Speculum is set to generate respective angles deflection by the driver mechanical structure tensile deformation at symmetrical both ends.The invention
In two-dimentional fast steering mirror actuation mechanism use lever displacement equations structure, there is fast response time, angle point
The high feature of resolution, but it does not integrate feedback light path, i.e., real-time mirror deflecting angle do not measure, therefore cannot be into
Row closed-loop control easily can not be ensured real-time mirror deflecting angle precision in real work by external environmental interference.
Invention content
In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a kind of quickly controls of the two dimension based on PSD feedbacks
Speculum processed and its control system.
To achieve the goals above, technical solution provided in an embodiment of the present invention is as follows：
A kind of two-dimensional rapid control reflector based on PSD feedbacks, which is characterized in that the two-dimensional rapid control reflector
Including：Pedestal is fixed on the PSD feedback light paths structure on the pedestal, movement support structures with piezoelectric ceramics and not with pressure
The fixed support structure of electroceramics, the holder being connected with movement support structures and fixed support structure, and be fixed on holder
Speculum.
As a further improvement on the present invention, the feedback light path structure includes the He-Ne Lasers set gradually along light path
Device, semi-transparent semi-reflecting lens and the PSD for detecting facula position.
As a further improvement on the present invention, the pedestal is equipped with the first supporting rack and the second supporting rack, He-Ne Lasers
Device is fixedly installed on the first supporting rack, and semi-transparent semi-reflecting lens are fixedly installed on the second supporting rack, and PSD is fixedly installed in second
Inside support.
As a further improvement on the present invention, the top of second supporting rack is obliquely installed towards the first supporting rack, institute
It states semi-transparent semi-reflecting lens and tilts the top for being installed on second supporting rack.
As a further improvement on the present invention, the movement support structures are two, respectively include two-dimension flexible hinge, ellipse
Round displacement enlarged structure and positioned at the piezoelectric ceramics being embedded in oval displacement amplifying mechanism.
As a further improvement on the present invention, the fixed support structure includes two-dimension flexible hinge and support column.
As a further improvement on the present invention, the movement support structures and fixed supporting mechanism are fixed in triangle disposition
In three grooves on pedestal, and it is fixedly connected respectively with holder.
As a further improvement on the present invention, the holder includes rack body and the boss that is fixed on rack body,
The speculum is fixedly mounted with rack body by boss.
Correspondingly, a kind of control system of the two-dimensional rapid control reflector based on PSD feedbacks, the control system packet
It includes：
Two-dimensional rapid control reflector；
PSD signal processing circuit includes the filtering for being filtered to the PSD signal in two-dimensional rapid control reflector
Circuit；
FPGA control circuit is connected with the PSD signal processing circuit, including acquisition is after PSD signal processing circuit
The D/A module of PSD signal, the sliding mode controller for calculating real-time control signal u (t) and for converting real-time control signal
The A/D module of u (t)；
Power amplification circuit, the voltage signal for being exported to A/D module carry out power amplification, and drive two-dimentional quickly control
Piezoelectric ceramics in speculum processed.
As a further improvement on the present invention, the sliding mode controller is additionally operable to according to the quickly control reflection of two dimension in real time
Angular deflection amount y (t), the input angle ideal value r (t) of mirror calculate control in real time with the deviation of actual angular deflection amount y (t)
Signal u (t) processed.
The invention has the advantages that：
It is integrated with the feedback light path structure based on Position-Sensitive Detector PSD, improves mirror angle deflection precision；
Two movement support structures with piezoelectric ceramics and a fixed support structure without piezoelectric ceramics are formed
Triangular support mode both ensure that deflectable in two dimensions while structure space utilization rate greatly improved, make whole
The more compact structure of a speculum is reasonable；
Sliding mode controller can eliminate the input driving voltage shake generated when the control of single order synovial membrane using Second Order Sliding Mode Control
It quivers phenomenon, it may be convenient to realize that two-dimentional speculum high-precision deflects.
Description of the drawings
Fig. 1 a be in the prior art high-speed piezoelectric control scanning means structural schematic diagram, Fig. 1 b be it is another in the prior art
The structural schematic diagram of two-dimentional fast steering mirror actuation mechanism.
Fig. 2 is the structural representation of the two-dimensional rapid control reflector based on PSD feedbacks in the embodiment of the invention
Figure.
Fig. 3 is the detonation configuration of the two-dimensional rapid control reflector based on PSD feedbacks in the embodiment of the invention
Schematic diagram.
Fig. 4 a, 4b are respectively movement support structures with piezoelectric ceramics and without piezoelectricity in the embodiment of the invention
The structural schematic diagram of the fixed support structure of ceramics.
Fig. 5 a, 5b be respectively in the embodiment of the invention overall structure diagram of holder and supporting point structure show
It is intended to.
Fig. 6 is the cross-section structure of the two-dimensional rapid control reflector based on PSD feedbacks in the embodiment of the invention
Schematic diagram.
Fig. 7 is the feedback light path of the two-dimensional rapid control reflector based on PSD feedbacks in the embodiment of the invention
Schematic diagram.
Fig. 8 is the two-dimensional rapid control reflector control system based on PSD feedbacks in the embodiment of the invention
Module diagram.
Specific implementation mode
In order to make those skilled in the art more fully understand the technical solution in the present invention, below in conjunction with of the invention real
The attached drawing in example is applied, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
The every other embodiment that technical staff is obtained without making creative work, should all belong to protection of the present invention
Range.
As shown in Figure 2 and Figure 3, a kind of two dimension fed back based on PSD quickly control is disclosed in the embodiment of the invention
Speculum processed, including：Pedestal 7 is fixed on the PSD feedback light paths structure on the pedestal, the movable supporting knot with piezoelectric ceramics
Structure 3 and fixed support structure 4 without piezoelectric ceramics, the holder 2 being connected with movement support structures and fixed support structure, with
And it is fixed on the speculum 1 on holder.Wherein, PSD feedback light paths structure includes 5 He of the first supporting rack with He-Ne laser
The second supporting rack 6 with semi-transparent semi-reflecting lens Yu PSD (Position Sensitive Detector, Position-Sensitive Detector).
Speculum 1 is below there are three support end in the present invention, and two of which is the movement support structures with piezoelectric ceramics, and one
A is the fixed support structure without piezoelectric ceramics.Movement support structures with piezoelectric ceramics piezoelectric ceramics after the power is turned on, piezoelectricity
Ceramics generate axial telescopic displacement, and the displacement equations structure for then loading piezoelectric ceramics therefore can be by the transverse direction of piezoelectric ceramics
Active force and generate longitudinal telescopic displacement, be linear relationship between the two.Then speculum can be because of displacement equations structure branch
Support point generate length travel and two-dimensional deflection occurs.At the same time, the laser beam that He-Ne laser is sent out is through semi-transparent semi-reflecting
Light beam after mirror reflection can generate corresponding deflection because of the two-dimensional deflection of speculum, after again passing by semi-transparent semi-reflecting lens
Transmitted light beam, which is radiated at the position on PSD, can occur to change accordingly.
The invention also discloses it is a kind of based on PSD feedback two-dimensional rapid control reflector control system, PSD generate
Four road current signals are acquired after corresponding circuits filtering and respective handling by the D/A module in FPGA control circuit, by meter
The angular deflection amount of real-time two-dimensional rapid control reflector can be obtained by calculating.Sliding mode controller inside FPGA is to angular deflection
The deviation of desired value and actual value is handled, and is finally obtained and is controlled output voltage in real time to form backfeed loop, eliminates angle
The deviation for spending deflecting object value and actual value, finally makes two-dimensional rapid control reflector quickly accurately deflect to desired angle
Value.
Below to being elaborated based on the PSD two-dimensional rapid control reflectors fed back and its control system in the present invention.
Join shown in Fig. 3, speculum 1 is bonded together by the boss among seccotine and holder 2, and holder 2 has two below
A movement support structures 3 with piezoelectric ceramics and a fixed support structure 4 without piezoelectric ceramics, 3 He of movement support structures
It is respectively fixed by the screw of four model M1.6 between fixed support structure 4.It is each between three support constructions and pedestal 7
It is fixed by the screw of a model M3.
The first supporting rack 5 with He-Ne laser and with being constituted between semi-transparent semi-reflecting lens and the second supporting rack 6 of PSD
Feedback light path.It the first supporting rack 5 with He-Ne laser and is fixed by the screw of a model M3 between pedestal 7,
With being fixed by the screw of four model M1.6 between semi-transparent semi-reflecting lens and the second supporting rack 6 and pedestal 7 of PSD.
This two-dimensional rapid control reflector support construction is as shown in figure 4, there are two types of it, and one is the activities with piezoelectric ceramics
Support construction 3 is for second the fixed support structure 4 without piezoelectric ceramics.Movement support structures 3 such as Fig. 4 a with piezoelectric ceramics
It is shown, it is made of two-dimension flexible hinge 31, piezoelectric ceramics 32 and oval displacement equations structure 33.As shown in Figure 4 b,
It is made of two-dimension flexible hinge 41 and support column 42 without the fixed support structure 4 of piezoelectric ceramics.
Both two-dimension flexible hinge 31 and oval displacement equations structure 33 are integrally connected in present embodiment, piezoelectricity
Ceramics 32 are embedded in oval displacement equations structure 33.When inputting driving voltage to piezoelectric ceramics 32,32 meeting of piezoelectric ceramics
Axial telescopic displacement is generated, power then is acted to the long axis both ends of oval displacement equations structure 33.Oval displacement
Enlarged structure 33 is that using elasticity, spring steel is prepared well, therefore it will produce deformation, also will produce and stretches on longitudinal direction
It condenses shifting, and is about 2~3 times of 32 transversal stretching displacement of piezoelectric ceramics.Two flexible hinges 31 are easy in longitudinal pressure
Lower generation deformation, as the connecting pin of oval displacement equations structure 33 and the holder 2 for being stained with reflecting optics, by deformation come
Reaching makes speculum into horizontal deflection, not will produce and rubs so there is no need to lubricate, more preferable than traditional bearing arrangement performance.
For this two-dimensional rapid control reflector holder as shown in Fig. 5 a, 5b, holder 2 is including rack body 21 and is fixed on holder
Boss 22 in main body, boss 22 are used for bonding mirror surface, and 12 holes around boss 22 are to use the screw of M1.6
Three support constructions of itself and lower end are linked together.Three support construction centers are located at point A, B and C, because mechanical
OA=OB=OC in structure design, therefore ABC constitutes isosceles right triangle.Accordingly, movement support structures and fixed support
Mechanism is in three grooves that triangle disposition is fixed on the base.
In three support constructions, what it is positioned at point A and point C is the movement support structures 3 with piezoelectric ceramics, and what it is positioned at point B is
Without the fixed support structure 4 of piezoelectric ceramics.The movement support structures with piezoelectric ceramics at point A are in driving piezoelectric ceramics
It will produce longitudinal telescopic displacement afterwards, since the support construction at point B is fixing end, entire speculum can be generated around Y-axis
Deflection angle；Similarly the movement support structures with piezoelectric ceramics at point C will produce longitudinal after driving piezoelectric ceramics
Telescopic displacement, since the support construction at point B is fixing end, entire speculum can generate deflection angle around X-axis, to real
The now two dimension angular deflection of the rapid control reflector.
This two-dimensional rapid control reflector feedback arrangement diagrammatic cross-section is as shown in fig. 6, entire feedback arrangement includes He-Ne
Laser 51, the first supporting rack 52, semi-transparent semi-reflecting lens 61, the second supporting rack 62 and Position-Sensitive Detector 63 form.He-Ne
Laser 51 is fixed on the first supporting rack 52, and semi-transparent semi-reflecting lens 61 are bonded in 45 ° of inclinations on the second supporting rack 62, and position is quick
Feel detector (PSD) 63 to be mounted on inside the second supporting rack 62.
PSD feedback light paths are as shown in fig. 7, He-Ne laser 51 generates horizontal laser beam, through the reflection of semi-transparent semi-reflecting lens 61
Light beam afterwards can generate corresponding two-dimensional deflection because of the two-dimensional deflection of speculum 1, after again passing by semi-transparent semi-reflecting lens 61
The position that is radiated on Position-Sensitive Detector 63 of transmitted light beam can occur to change accordingly.By laser facula in position sensing
Location variation on detector 63 can acquire the two dimension angular amount of deflection of rapid control reflector.
As shown in figure 8, the control system of the two-dimensional rapid control reflector based on PSD feedbacks in present embodiment, specifically
Including：
Two-dimensional rapid control reflector 110；
PSD signal processing circuit 120 includes for being filtered to the PSD signal in two-dimensional rapid control reflector 110
Filter circuit；
FPGA control circuit 130 is connected with PSD signal processing circuit 120, including PSD signal processing circuit is passed through in acquisition
Afterwards the D/A module 131 of PSD signal, the sliding mode controller 132 for calculating real-time control signal u (t) and for convert in real time
Control the A/D module 133 of signal u (t)；
Power amplification circuit 140, the voltage signal for being exported to A/D module 133 carries out power amplification, and drives two dimension
Piezoelectric ceramics in rapid control reflector 110.
Preferably, sliding mode controller 132 is additionally operable to the angular deflection amount y according to real-time two-dimensional rapid control reflector
(t), input angle ideal value r (t) and the deviation of actual angular deflection amount y (t) calculate real-time control signal u (t).
In present embodiment, sliding mode controller 132 uses Second Order Sliding Mode Control, is generated when can eliminate the control of single order synovial membrane
Input driving voltage chattering, it may be convenient to realize that two-dimentional speculum high-precision deflects.
Specifically, light beam of the laser beam that He-Ne laser is sent out after semi-transparent semi-reflecting lens reflect can be because of speculum
Two-dimensional deflection and generate corresponding deflection, again pass by the position meeting that the transmitted light beam after semi-transparent semi-reflecting lens is radiated on PSD
Corresponding variation occurs.The four road current signals that PSD is generated are after the filtering of PSD signal processing circuit and respective handling, quilt
D/A module acquisition in FPGA control circuit, the angular deflection of real-time two-dimensional rapid control reflector can be obtained by calculating
Measure y (t).The deviation of input angle ideal value r (t) and actual angular deflection amount y (t) is (in the presence of external interference d (t)
Under) by modulus AD conversions, obtain real-time control signal u after being calculated by the sliding mode controller of FPGA control circuit internal curing
(t), digital-to-analogue DA conversions are then carried out, power amplification is carried out using power amplification circuit, finally obtains the driving of piezoelectric ceramics
Voltage drives rapid control reflector and reaches ideal deflection angle r (t).
As can be seen from the above technical solutions, the invention has the advantages that：
It is integrated with the feedback light path structure based on Position-Sensitive Detector PSD, improves mirror angle deflection precision；
Two movement support structures with piezoelectric ceramics and a fixed support structure without piezoelectric ceramics are formed
Triangular support mode both ensure that deflectable in two dimensions while structure space utilization rate greatly improved, make whole
The more compact structure of a speculum is reasonable；
Sliding mode controller can eliminate the input driving voltage shake generated when the control of single order synovial membrane using Second Order Sliding Mode Control
It quivers phenomenon, it may be convenient to realize that two-dimentional speculum high-precision deflects.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Profit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent requirements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (7)
1. a kind of two-dimensional rapid control reflector based on PSD feedbacks, which is characterized in that the two-dimensional rapid control reflector packet
It includes：Pedestal is fixed on the PSD feedback light paths structure on the pedestal, the movement support structures with piezoelectric ceramics and without piezoelectricity
The fixed support structure of ceramics, the holder being connected with movement support structures and fixed support structure, and be fixed on holder
Speculum；
The pedestal is equipped with the first supporting rack and the second supporting rack, and He-Ne laser is fixedly installed on the first supporting rack, and half
Saturating semi-reflective mirror is fixedly installed on the second supporting rack, and PSD is fixedly installed in inside the second supporting rack；
The top of second supporting rack is obliquely installed towards the first supporting rack, and the semi-transparent semi-reflecting lens inclination is installed on described the
The top of two supporting racks；
The movement support structures are two, respectively include two-dimension flexible hinge, oval displacement amplifying mechanism and positioned at embedding
Enter the piezoelectric ceramics in oval displacement amplifying mechanism；
Two movement support structures and fixed supporting mechanism are fixed on the base in triangle disposition.
2. the two-dimensional rapid control reflector according to claim 1 based on PSD feedbacks, which is characterized in that the feedback
Light channel structure includes He-Ne laser, semi-transparent semi-reflecting lens and the PSD for detecting facula position set gradually along light path.
3. the two-dimensional rapid control reflector according to claim 1 based on PSD feedbacks, which is characterized in that the fixation
Support construction includes two-dimension flexible hinge and support column.
4. the two-dimensional rapid control reflector according to claim 3 based on PSD feedbacks, which is characterized in that the activity
In three grooves that support construction and fixed supporting mechanism are fixed on the base in triangle disposition, and fixes connect with holder respectively
It connects.
5. the two-dimensional rapid control reflector according to claim 1 based on PSD feedbacks, which is characterized in that the holder
Including rack body and the boss being fixed on rack body, the speculum is fixedly mounted with rack body by boss.
6. a kind of control system of the two-dimensional rapid control reflector based on PSD feedbacks, which is characterized in that the control system packet
It includes：
Two-dimensional rapid control reflector according to any one of claims 1 to 5；
PSD signal processing circuit includes the filtered electrical for being filtered to the PSD signal in two-dimensional rapid control reflector
Road；
FPGA control circuit is connected with the PSD signal processing circuit, including acquisition PSD after PSD signal processing circuit believes
Number D/A module, the sliding mode controller for calculating real-time control signal u (t) and for converting real-time control signal u (t)
A/D module；
Power amplification circuit, the voltage signal for being exported to A/D module carry out power amplification, and drive two-dimentional quickly control anti-
Penetrate the piezoelectric ceramics in mirror.
7. control system according to claim 6, which is characterized in that the sliding mode controller is additionally operable to according to real-time two
Angular deflection amount y (t), the input angle ideal value r (t) of dimension rapid control reflector are inclined with actual angular deflection amount y (t)
Mathematic interpolation real-time control signal u (t).
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108205193B (en) * | 2016-12-16 | 2020-10-16 | 深圳先进技术研究院 | Two-dimensional control reflector, control method thereof and laser scanner comprising two-dimensional control reflector |
| CN106735865A (en) * | 2016-12-26 | 2017-05-31 | 西安中科微精光子制造科技有限公司 | A kind of ultrafast laser machining system and method based on closed-loop control |
| CN106526785B (en) | 2016-12-27 | 2017-09-12 | 西安交通大学 | Yawing axis intersects at the low clearance twin shaft arrangement for deflecting and method of mirror surface |
| CN107037725A (en) * | 2017-03-21 | 2017-08-11 | 中国科学院上海光学精密机械研究所 | The control system of full simulation high bandwidth fast mirror |
| CN109186747B (en) * | 2018-08-01 | 2020-12-01 | 歌尔光学科技有限公司 | Test system and test method |
| CN113411020B (en) * | 2021-05-19 | 2022-07-01 | 西安理工大学 | Neural network sliding mode control method of two-axis voice coil fast reflector |
| CN114647076B (en) * | 2022-03-23 | 2024-08-13 | 优尼科(青岛)微电子有限公司 | Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip |
| CN117849765B (en) * | 2024-01-08 | 2024-09-10 | 重庆大学 | Method for precisely positioning and controlling posture of polygon turning mirror laser |
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