CN107037725A - The control system of full simulation high bandwidth fast mirror - Google Patents
The control system of full simulation high bandwidth fast mirror Download PDFInfo
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- CN107037725A CN107037725A CN201710170381.1A CN201710170381A CN107037725A CN 107037725 A CN107037725 A CN 107037725A CN 201710170381 A CN201710170381 A CN 201710170381A CN 107037725 A CN107037725 A CN 107037725A
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- 238000004088 simulation Methods 0.000 title claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims description 34
- 230000008569 process Effects 0.000 claims description 34
- 230000003321 amplification Effects 0.000 claims description 27
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 27
- 230000002463 transducing effect Effects 0.000 claims description 15
- 230000004044 response Effects 0.000 abstract description 9
- 230000011514 reflex Effects 0.000 abstract description 3
- 230000005693 optoelectronics Effects 0.000 abstract description 2
- 238000001914 filtration Methods 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 230000011664 signaling Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/01—Frequency selective two-port networks
- H03H7/06—Frequency selective two-port networks including resistors
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- Automation & Control Theory (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
A kind of full simulation high bandwidth fast mirror control system includes the fast mirror of two-dimensional piezoelectric ceramic driving type, constant-voltage control circuit, the control circuit and the control circuit of Y-axis of W axles, the present invention effectively increases the control bandwidth of fast mirror control system, field is tracked suitable for the optoelectronic scanning of wide-angle high-frequency, existing Piezoelectric Ceramic type quick reflex mirror driver is solved in the case of wide-angle high frequency scan, the problem of there is larger decay to the amplitude response of control voltage as frequency increases in scanning range, the response speed of system is also effectively improved simultaneously.
Description
Technical field
The present invention relates to fast mirror, particularly a kind of control system of full simulation high bandwidth fast mirror.
Background technology
Fast mirror is a kind of core devices that accurate control is pointed to for spatial laser beam, with response speed
It hurry up, the advantages of resonant frequency is high, pointing accuracy is high, be widely used in composite shaft precision control, the neck such as adaptive optics
Domain.
Fast mirror is divided into voice coil motor fast mirror and piezoelectric ceramics fast mirror by driving principle, relates to herein
And be the ceramic fast mirror of two-dimensional piezoelectric.The driver of piezoelectric ceramics fast mirror is divided into analog driver and numeric type
Driver, numeric type driver (principle is as shown in Figure 2) is due to signal acquisition, and the delay that the process such as processing is caused is larger so that band
Wide critical constraints, and analogue type driver is due to using full analog circuit, therefore its control system volume can be made
It is small, and response is very fast, bandwidth of operation is greatly improved than numeric type driver.No matter numeric type driver or analogue type drive
The final bandwidth of operation of dynamic device can all be influenceed by last power amplification circuit driving force, particularly drive deflection angle
Larger Piezoelectric fast mirror, the capacitive load effect of power amplifier causes circuit bandwidth to be difficult to a wide range of raising.
A kind of raising fast mirror control bandwidth is provided in Chinese invention patent CN1050451141 specification
Analog control circuit, the circuit is capable of the structure resonance of real-Time Compensation fast mirror, improves the amplitude versus frequency characte of fast mirror,
But it is not enough of both having：First, be not provided with special filter circuit module come filtering circuit signal intermediate frequency rate be equal to or
Close to the higher hamonic wave of fast mirror resonant frequency, this can make the precision of fast mirror be affected, in some instances it may even be possible to meeting
Cause fast mirror structure resonance and damage piezoelectric ceramic piece；Second, single pid algorithm circuit is nonlinear in itself,
The bandwidth meeting critical constraints of circuit particularly in the case of high frequency sweep, this causes fast mirror should in wide-angle high frequency scan
Diminished with middle scanning range.
The content of the invention
The present invention proposes a kind of control system of full simulation high bandwidth fast mirror.The system is effectively increased quickly
The control bandwidth of micromirror control system, it is adaptable to which the optoelectronic scanning of wide-angle high-frequency tracks field, solves existing piezoelectricity pottery
The driving quick reflex mirror driver of porcelain is in the case of wide-angle high frequency scan, amplitude response of the scanning range to control voltage
The problem of there is larger decay as frequency increases, while being also effectively improved the response speed of system.
The technical solution of the present invention is as follows：
A kind of full simulation high bandwidth fast mirror control system, described fast mirror is two-dimensional piezoelectric ceramic driving
Fast mirror, including the first piezoelectric ceramic stack positioned at W axles, the second piezoelectric ceramic stack, first position sensor and second
Sensor is put, positioned at the 3rd piezoelectric ceramic stack and the 4th piezoelectric ceramic stack, the 3rd position sensor and the 4th position sensing of Y-axis
Device；Described first position sensor and second place sensor measures the first piezoelectric ceramic stack and the second piezoelectric ceramic stack respectively
Collapsing length, the 3rd position sensor and the 4th position sensor measure the 3rd piezoelectric ceramic stack of pressure and the 4th piezoelectricity pottery respectively
The collapsing length of porcelain heap, includes the control circuit and the control circuit of Y-axis of constant-voltage control circuit, W axles：
Described constant-voltage control circuit is made up of reference voltage circuit successively and the 3rd power amplification circuit, and described
The output end of three power amplification circuits is connected with the positive pole of the first piezoelectric ceramic stack and the positive pole of the 3rd piezoelectric ceramic stack；
The circuit of described W axles includes：The output end of the output end of first control signal process circuit and the first subtracter
The connection of an input, the output end of the first transducing signal process circuit is connected with another input of the first subtracter,
The output end of first subtracter is connected with the input of the first pid algorithm circuit, the output end and first of the first pid algorithm circuit
Two inputs of adder are connected, and the output end of first adder connects the input of the first filter circuit, the first filter circuit
Output end connect the first power amplification circuit input；The output end of first power amplification circuit and the first described piezoelectricity
The negative pole of ceramic stack is connected with the positive pole of the second piezoelectric ceramic stack, the output end of first position sensor and second place sensor
It is connected with the input of the first transducing signal process circuit two；
The circuit of described Y-axis includes：At one output end of the second control signal process circuit and the second transducing signal
The output end of reason circuit is connected with two inputs of the second subtracter respectively, the second subtractor outputs and the second pid algorithm
Circuit input end is connected, and two inputs of the output end second adder of the second pid algorithm circuit are connected, second adder it is defeated
Go out the input of the second filter circuit of end connection, the output end of the second filter circuit connects the input of the second power amplification circuit
End, the output end of the second power amplification circuit and the negative pole and the positive pole of the 4th piezoelectric ceramic stack of the 3rd described piezoelectric ceramic stack
It is connected, the output end of the 3rd position sensor and the output end of the 4th position sensor and the second transducing signal process circuit two are defeated
Enter end to be connected；
The negative pole of the second described piezoelectric ceramic stack and the negative pole of the 4th piezoelectric ceramic stack connect the ground level of circuit, its feature
It is：
The first control signal process circuit of the circuit of described W axles output end and first adder input it
Between have additional the first feedforward arithmetic circuit；In the output end and the of the second control signal process circuit of the circuit of described Y-axis
The second feedforward arithmetic circuit is had additional between the input of two adders, described the first filter circuit and the second filter circuit is
Double T trappers.
The first described feedforward arithmetic circuit and the proportional amplifier that the second feedforward arithmetic circuit is fixed gain.
Described double T trappers are that the cascade of one or two pair of T trapper is made.
Described first position sensor and second place sensor are to detect the first piezoelectric ceramic stack on W direction of principal axis
With the stroke of the second piezoelectric ceramic stack, the deflection of W axles can be reacted by being produced after the first transducing signal process circuit differential amplification
The position signalling of angle.The external input control signal of W axles is inclined with above-mentioned W axles after the first control signal processing circuit processes
The position signalling of gyration makes the difference through the first described subtracter and obtains error signal, then after the first pid algorithm processing of circuit
The thermal compensation signal of W axles is obtained, the signal of the thermal compensation signal and the first feedforward arithmetic circuit output is summed through first adder obtains W
The controlled quentity controlled variable of axle, then the control W axle deflections after the filtering of the first filter circuit and the amplification of the first power amplification circuit.
The 3rd described position sensor and the 4th position sensor are to detect the 3rd piezoelectric ceramic stack in Y direction
With the stroke of the 4th piezoelectric ceramic stack, Y-axis deflection can be reacted by being produced after the second transducing signal process circuit differential amplification
The position signalling of angle.The external input signal of Y-axis after the second control signal processing circuit processes with above-mentioned Y-axis deflection angle
The position signalling of degree makes the difference through the second described subtracter and obtains error signal, then obtains Y after the second pid algorithm processing of circuit
The signal of the thermal compensation signal of axle, the thermal compensation signal and the second feedforward arithmetic circuit output is summed through second adder obtains Y-axis
Controlled quentity controlled variable, the control Y-axis deflection after the filtering of the second filter circuit and the amplification of the second power amplification circuit.
Described the first feedforward arithmetic circuit and the second feedforward arithmetic circuit is made up of the proportional amplifier of fixed gain, is made
With the gain for being regulation control signal so that control signal directly presses the amount of deflection of certain weights influence fast mirror.
Described filter circuit 5 and 13 is made up of double T trappers, and trapper can be one or two pair of T trapper
What cascade was made, if using a double T trapper, its centre frequency with suppressed frequency band is equal to the structure resonance of fast mirror
Frequency, if cascaded using two double T trappers, the band resistance centre frequency of two double T trappers is respectively fast mirror
The resonant frequency of structural resonance frequency and piezoelectric ceramic piece.
The solution have the advantages that：
The feedforward arithmetic circuit that control system of the present invention is added, compensate for the deficiency of simple pid algorithm circuit, can be effective
Amplitude versus frequency characte and phase-frequency characteristic of the improvement two-dimensional piezoelectric ceramic mould fast mirror in the case of wide-angle high frequency scan, make
The scanning angle scope for the system of obtaining is smaller with the increase decay of scan frequency to the amplitude response of control voltage.Described filter
Wave circuit employs double T trappers, and the particular harmonic frequency of fast mirror unstable operation can be caused by eliminating in circuit,
Enhance circuit stability.
Brief description of the drawings
Fig. 1 is the schematic diagram of full simulation high bandwidth fast mirror control system embodiment of the invention
Fig. 2 is the control block diagram of existing conventional numeric type driver
Embodiment
With reference to embodiment and accompanying drawing, the invention will be further described, but the protection model of the present invention should not be limited with this
Enclose.
Please referring initially to Fig. 1, Fig. 1 is the schematic diagram of full simulation high bandwidth fast mirror control system embodiment of the invention,
As seen from the figure, the full simulation high bandwidth fast mirror control system of the present invention, described fast mirror is two-dimensional piezoelectric ceramics
Fast mirror is driven, including positioned at the first piezoelectric ceramic stack 19, the second piezoelectric ceramic stack 20, first position sensor of W axles
15th, second place sensor 16, positioned at the 3rd piezoelectric ceramic stack 21 of Y-axis and the 4th piezoelectric ceramic stack 22, the 3rd position sensing
The position sensor 18 of device 17 and the 4th；Described first position sensor 15 and second place sensor 16 measure the first pressure respectively
The collapsing length of the piezoelectric ceramic stack 20 of electroceramics heap 19 and second, the 3rd position sensor 17 and the 4th position sensor 18 are distinguished
The collapsing length of measurement the 3rd piezoelectric ceramic stack 21 of pressure and the 4th piezoelectric ceramic stack 22, in addition to constant-voltage control circuit, the control of W axles
The control circuit of circuit processed and Y-axis：
Described constant-voltage control circuit is made up of the power amplification circuit 8 of reference voltage circuit 7 and the 3rd successively, described
The output end of 3rd power amplification circuit 8 connects with the positive pole of the first piezoelectric ceramic stack 19 and the positive pole of the 3rd piezoelectric ceramic stack 21
Connect；
The circuit of described W axles includes：The output end of first control signal process circuit 1 and the first feedforward arithmetic circuit 4
Input be connected, the output end of the first control signal process circuit 1 is also connected with an input of the first subtracter, first
The output end of transducing signal process circuit 2 is connected with another input of the first subtracter, the output end of the first subtracter with
The input of first pid algorithm circuit 3 is connected, the output end of the first pid algorithm circuit 3 and the first feedforward arithmetic circuit 4 it is defeated
Go out end with two inputs of first adder to be connected, the output end of first adder connects the input of the first filter circuit 5, the
The output end of one filter circuit 5 connects the input of the first power amplification circuit 6；The output end of first power amplification circuit 6 with
The negative pole of the first described piezoelectric ceramic stack 19 is connected with the positive pole of the second piezoelectric ceramic stack 20, first position sensor 15 and
2 liang of inputs of the output end of two position sensors 16 and the first transducing signal process circuit are connected；
The circuit of described Y-axis includes：One output end of the second control signal process circuit 9 and the second feedforward arithmetic electricity
The input on road 10 is connected, another output end of the second control signal process circuit 9 and the second transducing signal process circuit 12
Output end is connected with two inputs of the second subtracter respectively, and the second subtractor outputs are inputted with the second pid algorithm circuit 11
End is connected, and the two of the output end and second adder of the output end of the second pid algorithm circuit 11 and the second feedforward arithmetic circuit 10
Input is connected, and the output end of second adder connects the input of the second filter circuit 13, the output of the second filter circuit 13
The input of the second power amplification circuit 14 of end connection, the output end of the second power amplification circuit 14 is made pottery with the 3rd described piezoelectricity
The positive pole of the negative pole of porcelain heap 21 and the 4th piezoelectric ceramic stack 22 is connected, and the output end of the 3rd position sensor 17 and the 4th position are passed
12 liang of inputs of the output end of sensor 18 and the second transducing signal process circuit are connected；
The described negative pole of the second piezoelectric ceramic stack 20 and the negative pole of the 4th piezoelectric ceramic stack 22 connects the ground level of circuit.
Due to W axles and Y-axis vertical distribution, the coupling in the absence of motion is completely independent in theory, therefore its control strategy is complete
Complete the same, following specific embodiment is illustrated by taking the control of W axles as an example：
The W axles that first transducing signal process circuit 2 measures first position sensor 15 and second place sensor 16
The stroke of first piezoelectric ceramic stack 19 and the second piezoelectric ceramic stack 20 is transformed into voltage signal after differential amplification computing, obtains
The deflection angle feedback quantity U1 of W axles (voltage form is represented).
W axles external control signal obtains the set amount U2 of position after the processing of the first external control signal process circuit 1.
W shaft position feedback quantity U1 and position set amount U2 subtract each other through the first subtracter obtains position error signal △ U1, warp
Cross the compensation rate △ U2 needed after the processing of the first pid algorithm circuit 3.
Position set amount U2 obtains feed-forward signal U3 after the first feedforward arithmetic circuit 4 amplifies by a certain percentage.
The master control signal U4 that feed-forward signal U3 and compensation rate △ U2 are needed after being summed through first adder.
Control signal U4 filters out the height for the specific frequency that can cause fast mirror resonance through the first filter circuit of W axles 5
The first piezoelectric ceramic stack 19 and the second pressure of fast mirror are driven after subharmonic, after being amplified by the first power amplification circuit of W axles 6
The stretching motion of electroceramics heap 20, makes fast mirror W direction of principal axis deflect.
First position sensor 15 and second place sensor 16 in the present embodiment are strain resistor position sensors, are adopted
Power amplifier is that (as reference, present case uses the PA96CE power that APEX companies produce to MOSTET amplifiers
Amplifier), the concrete form of feedforward arithmetic circuit 4 of use can be the proportional amplifier of certain certain gain, additionally, due to quick
The deflection of speculum belongs to mechanical movement, in order to prevent the yaw motion under fortuitous event to be obstructed, described pid algorithm circuit 3
Anti-windup saturation pid algorithm circuit can be used.
First filter circuit 5 of the present embodiment uses double T trappers, it is therefore an objective to which quick reflex may be caused by filtering out
Mirror resonance, the higher hamonic wave in the circuit equal or close with piezoelectric ceramic piece resonant frequency f2 with structural resonance frequency f1.
The order of closed loop after first open loop is answered in the design parameter tuning process of the present embodiment：
Signal flow direction, which is followed successively by from external signal, during open loop parameter tuning is input to the first control signal process circuit,
First feedforward arithmetic circuit, summing circuit, the first filter circuit, the first power amplification circuit, the electrode of piezoelectric ceramic stack；
Wherein external control signal excursion △ U5 fast mirrors corresponding with power amplifier output area △ U6 are maximum
Stroke is deflected, then a=△ U6/ △ U5 are the product of control signal process circuit and feedforward arithmetic circuit multiplication factor；
The position feed back signal U1 that obtains sensor processing unit and above-mentioned control are needed in closed-loop parameters tuning process
The control signal U2 that signal processing unit is obtained, which subtracts each other, obtains error signal, is understood by PID control theory any fast under stable state
The corresponding U1 and U2 of fast mirror deflecting angle must be equal, i.e., U1 excursion is equal with U2 excursion, and considers
To the stability of circuit, excursion should be equal to 80% or so of analog hardware circuit maximum output value.
Adjusting for pid parameter is carried out in the case of the access circuit work of feedforward arithmetic unit, is integrated according to after first ratio
Principle, select suitable pid parameter.
The present embodiment is by taking the model P33.T8S fast mirrors of domestic core company's tomorrow as an example, and the model is quickly anti-
The nominal single shaft equivalent capacity of mirror is penetrated for 14.5uF, control voltage is -15 to 120V, the control effect being finally reached is：Sine letter
Number control down to do frequency for 1k, scanning angle is 1mrad vibrations, and response amplitude can be accomplished close to 100% response, phase
Delay is less than 90 degree, and signal ripple is less than 10mv.
Claims (3)
1. a kind of full simulation high bandwidth fast mirror control system, described fast mirror is that two-dimensional piezoelectric ceramic driving is fast
Fast speculum, including positioned at the first piezoelectric ceramic stack (19), the second piezoelectric ceramic stack (20), first position sensor of W axles
(15), second place sensor (16), positioned at the 3rd piezoelectric ceramic stack (21) of Y-axis and the 4th piezoelectric ceramic stack (22), the 3rd
Position sensor (17) and the 4th position sensor (18)；Described first position sensor (15) and second place sensor
(16) collapsing length of the first piezoelectric ceramic stack (19) and the second piezoelectric ceramic stack (20), the 3rd position sensor are measured respectively
And the 4th position sensor (18) respectively measures the 3rd piezoelectric ceramic stack (21) of pressure and the 4th piezoelectric ceramic stack (22) are stretched (17)
Contracting length, includes the control circuit and the control circuit of Y-axis of constant-voltage control circuit, W axles：
Described constant-voltage control circuit is made up of reference voltage circuit (7) and the 3rd power amplification circuit (8) successively, described
The output end of 3rd power amplification circuit (8) and the positive pole of the first piezoelectric ceramic stack (19) and the 3rd piezoelectric ceramic stack (21) are just
Pole is connected；
The circuit of described W axles includes：The output end of first control signal process circuit (1) and an input of the first subtracter
End connection, the output end of the first transducing signal process circuit (2) is connected with another input of the first subtracter, the first subtraction
The output end of device is connected with the input of the first pid algorithm circuit (3), and the output end of the first pid algorithm circuit (3) adds with first
Two inputs of musical instruments used in a Buddhist or Taoist mass are connected, and the output end of first adder connects the input of the first filter circuit (5), the first filter circuit
(5) output end connects the input of the first power amplification circuit (6)；The output end of first power amplification circuit (6) with it is described
The negative pole of the first piezoelectric ceramic stack (19) be connected with the positive pole of the second piezoelectric ceramic stack (20), first position sensor (15) and
The output end of second place sensor (16) is connected with the input of the first transducing signal process circuit (2) two；
The circuit of described Y-axis includes：The output end and the second transducing signal process circuit of second control signal process circuit (9)
(12) output end is connected with two inputs of the second subtracter respectively, the second subtractor outputs and the second pid algorithm circuit
(11) input is connected, and the output end of the second pid algorithm circuit (11) is connected with an input of second adder, and second adds
The output end of musical instruments used in a Buddhist or Taoist mass connects the input of the second filter circuit (13), and the output end of the second filter circuit (13) connects the second power
The input of amplifying circuit (14), the output end of the second power amplification circuit (14) and the 3rd described piezoelectric ceramic stack (21)
The positive pole of negative pole and the 4th piezoelectric ceramic stack (22) is connected, the output end and the 4th position sensor of the 3rd position sensor (17)
(18) output end is connected with the input of the second transducing signal process circuit (12) two；
The negative pole of described the second piezoelectric ceramic stack (20) and the negative pole of the 4th piezoelectric ceramic stack (22) connect the ground level of circuit；Its
It is characterised by：
The first control signal process circuit (1) of the circuit of described W axles output end and first adder input it
Between have additional the first feedforward arithmetic circuit (4)；In the output of the second control signal process circuit (9) of the circuit of described Y-axis
Have additional the second feedforward arithmetic circuit (10) between end and the input of second adder, described the first filter circuit (5) and
Second filter circuit (13) is double T trappers.
2. full simulation high bandwidth fast mirror control system according to claim 1, it is characterised in that:Described first
Feedforward arithmetic circuit (4) and the proportional amplifier that the second feedforward arithmetic circuit (10) is fixed gain.
3. full simulation high bandwidth fast mirror control system according to claim 1 or 2, it is characterised in that:Described
Double T trappers are that the cascade of one or two pair of T trapper is made.
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| CN201710170381.1A CN107037725A (en) | 2017-03-21 | 2017-03-21 | The control system of full simulation high bandwidth fast mirror |
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| CN201710170381.1A CN107037725A (en) | 2017-03-21 | 2017-03-21 | The control system of full simulation high bandwidth fast mirror |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107450178A (en) * | 2017-09-06 | 2017-12-08 | 北京航天长征飞行器研究所 | A kind of two-dimentional MEMS micromirror driving control system and method |
| CN112904712A (en) * | 2020-12-14 | 2021-06-04 | 天津津航技术物理研究所 | State matrix-based optimal feedback control method applied to composite axis system |
| CN113156871A (en) * | 2021-05-17 | 2021-07-23 | 中国科学院长春光学精密机械与物理研究所 | Digital control device, control method thereof, control system thereof and storage medium |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280572A (en) * | 2011-04-15 | 2011-12-14 | 重庆大学 | Composite linear control method of hysteresis characteristic of piezoelectric ceramic actuator and realization circuit thereof |
| CN102621889A (en) * | 2012-03-27 | 2012-08-01 | 中国科学院光电技术研究所 | Composite control method for piezoelectric ceramic positioning |
| CN102749873A (en) * | 2012-07-27 | 2012-10-24 | 吉林大学 | Electromagnetic drive type phased source phase compensation control system and compensation control method |
| CN104122798A (en) * | 2014-07-24 | 2014-10-29 | 上海交通大学 | High-speed nano precision movement control method and system for piezoelectric ceramic driver |
| CN105045141A (en) * | 2015-05-27 | 2015-11-11 | 中国科学院光电技术研究所 | Analog control circuit capable of enlarging control bandwidth of fast steering mirror |
| CN105403999A (en) * | 2015-12-23 | 2016-03-16 | 深圳先进技术研究院 | PSD feedback-based two dimensional rapid control reflector and control system thereof |
-
2017
- 2017-03-21 CN CN201710170381.1A patent/CN107037725A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280572A (en) * | 2011-04-15 | 2011-12-14 | 重庆大学 | Composite linear control method of hysteresis characteristic of piezoelectric ceramic actuator and realization circuit thereof |
| CN102621889A (en) * | 2012-03-27 | 2012-08-01 | 中国科学院光电技术研究所 | Composite control method for piezoelectric ceramic positioning |
| CN102749873A (en) * | 2012-07-27 | 2012-10-24 | 吉林大学 | Electromagnetic drive type phased source phase compensation control system and compensation control method |
| CN104122798A (en) * | 2014-07-24 | 2014-10-29 | 上海交通大学 | High-speed nano precision movement control method and system for piezoelectric ceramic driver |
| CN105045141A (en) * | 2015-05-27 | 2015-11-11 | 中国科学院光电技术研究所 | Analog control circuit capable of enlarging control bandwidth of fast steering mirror |
| CN105403999A (en) * | 2015-12-23 | 2016-03-16 | 深圳先进技术研究院 | PSD feedback-based two dimensional rapid control reflector and control system thereof |
Non-Patent Citations (1)
| Title |
|---|
| 林俊兰: ""基于模拟电路的快速反射镜控制技术研究"", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107450178A (en) * | 2017-09-06 | 2017-12-08 | 北京航天长征飞行器研究所 | A kind of two-dimentional MEMS micromirror driving control system and method |
| CN107450178B (en) * | 2017-09-06 | 2020-05-12 | 北京航天长征飞行器研究所 | Two-dimensional MEMS micro-mirror driving control system and method |
| CN112904712A (en) * | 2020-12-14 | 2021-06-04 | 天津津航技术物理研究所 | State matrix-based optimal feedback control method applied to composite axis system |
| CN113156871A (en) * | 2021-05-17 | 2021-07-23 | 中国科学院长春光学精密机械与物理研究所 | Digital control device, control method thereof, control system thereof and storage medium |
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