CN210629376U - Three-freedom-degree miniature electromagnetic digital actuator - Google Patents
Three-freedom-degree miniature electromagnetic digital actuator Download PDFInfo
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- CN210629376U CN210629376U CN201921787035.9U CN201921787035U CN210629376U CN 210629376 U CN210629376 U CN 210629376U CN 201921787035 U CN201921787035 U CN 201921787035U CN 210629376 U CN210629376 U CN 210629376U
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Abstract
The utility model discloses a three-degree-of-freedom miniature electromagnetic digital actuator, which comprises a control board card, wherein the control board card is connected with a power amplifier through a wire, the power amplifier is connected with a coil circuit board and a linear circuit board through a wire, a first glass plate is fixedly connected on the coil circuit board, the linear circuit board is fixedly connected on the first glass plate, a second glass plate is fixedly connected at the upper end of the linear circuit board, and an actuator is fixedly connected at the upper end of the second glass plate; the actuator comprises a supporting frame, fixed permanent magnets fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell movably embedded in a groove of the supporting frame, and a driven permanent magnet with the magnetization direction opposite to that of the fixed permanent magnet is movably arranged in the driven permanent magnet external PMMA shell. The utility model discloses simple structure, open loop control, the cost is lower, and mounting structure is compact, is driven the degree of freedom of motion that the permanent magnet has x, y, the three direction of z.
Description
Technical Field
The utility model belongs to the technical field of micro-mechanical actuator, a three degree of freedom's miniature electromagnetic digital actuator is related to.
Background
In prior art microelectromechanical systems, an actuator is a device that converts input energy into a mechanical output. The most common actuators are actuators based on analog control, their moving units can reach any position within the working stroke. Such actuators generally have the advantages of continuous control over the operating range, high performance, high reliability, etc. To achieve these advantages, closed loop control and corresponding feedback sensors are applied to this type of actuator. However, due to the application of closed-loop control and corresponding feedback sensors, control thereof can be correspondingly complicated to ensure a high level of performance or ability to accomplish complex tasks. The integration of the feedback sensor mounting may also present problems for such actuator designs, especially when such actuators are used in compact or highly integrated mems where the space constraints are present. In addition, a continuous energy input is also necessary to keep the movement unit in the desired position while resisting external disturbances. This will also have the effect of joule heating effects or system failure in such systems.
To address these drawbacks due to design principles, another actuator based on digital control has been developed. Such actuators based on digital control, the movement unit of which can be driven between certain, limited separation positions, called steady-state positions. In addition, these separation positions are determined during the machining process. While the position in the middle of the split position is a transient position, which normally cannot be maintained. Based on the digital driving design principle, the actuator has the following advantages: first, open loop control is performed. Such actuators would employ open loop control and feedback sensors would not be necessary. Secondly, the control signal is simple. Usually only a pulse of energy is required to complete the drive of the motion unit. In addition, the energy consumption is low. Such actuators employ digital control, energy input is only used to drive the motion unit to move, and no energy input is required to maintain the moving part in the disengaged position. Currently, most micromechanical actuators are subject to two problems:
1. only one to two degrees of freedom of motion result in application scenario limitations;
2. the structure is complex and not compact enough, and the integration and expansion are not convenient.
The two problems restrict the research development and the industrial application of the micro-mechanical actuator, and the design of the micro-mechanical actuator with multiple degrees of freedom by adopting a digital control mode has profound significance.
Disclosure of Invention
The utility model aims at providing a three degree of freedom's miniature electromagnetic digital actuator has solved only one to two degrees of freedom of motion that exist among the prior art, and the structure is complicated, the integrated problem of extension of being not convenient for.
The utility model adopts the technical scheme that the three-degree-of-freedom miniature electromagnetic digital actuator comprises a control board card, wherein the control board card is connected with a power amplifier through a wire, the power amplifier is connected with a coil circuit board and a linear circuit board through a wire, a first glass plate is fixedly connected on the coil circuit board, the first glass plate is fixedly connected with the linear circuit board, the upper end of the linear circuit board is fixedly connected with a second glass plate, and the upper end of the second glass plate is fixedly connected with an actuator; the actuator comprises a supporting frame, fixed permanent magnets fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell movably embedded in a groove of the supporting frame, and a driven permanent magnet with the magnetization direction opposite to that of the fixed permanent magnet is movably arranged in the driven permanent magnet external PMMA shell.
The utility model is also characterized in that,
the control board card is a single chip microcomputer or a digital signal output card.
The power amplifier is a voltage-current converter or thyristor.
The coil circuit board is a printed electromagnetic coil circuit board, and the central position of a copper coil on the coil circuit board is arranged corresponding to the position of the driven permanent magnet.
The linear circuit board is a double-sided printed linear circuit board, copper wires on the linear circuit board are perpendicularly arranged in a positive and negative orthogonal mode, and the central position of the copper wires in the positive and negative orthogonal mode corresponds to the position of the driven permanent magnet.
The thickness of the first glass plate and the second glass plate is 0.5 mm.
The driven permanent magnet and the fixed permanent magnet are both cylindrical magnets or cubic magnets; when the driven permanent magnet or the fixed permanent magnet is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, and the height of the cylindrical magnet is 4-8 mm; when the driven permanent magnet or the fixed permanent magnet is a cubic magnet, the side length of the cubic magnet is 4-20 mm.
The groove on the support frame of the actuator is a convex groove, and the outer PMMA shell of the driven permanent magnet is spaced from the side surface, the upper surface and the lower surface of the convex groove.
The utility model has the advantages that:
(1) the utility model has simple structure and open-loop control, only needs current pulse based on the digital control drive actuator, and does not need to install a feedback sensor, thereby having lower cost and compact installation structure compared with the device based on the analog actuator;
(2) because the current pulse is adopted for driving, the heating is less, and the Joule effect can be effectively avoided;
(3) due to the adoption of an electromagnetic driving mode, the actuator has high driving speed, high response speed and no hysteresis;
(4) in the actuator unit, the driven permanent magnet and the fixed permanent magnet are arranged in opposite magnetization intensity, so that the driven permanent magnet is always kept at one of four corner positions in the frame under the action of static magnetic field attraction force among the permanent magnets, the state is not allowed to maintain energy and is also changed into a stable state, namely each actuator unit has four stable positions, thereby four stable states of the actuator are determined, and no energy is needed for keeping the stable states;
(5) the driven permanent magnet has the freedom of movement in the x, y and z directions.
Drawings
Fig. 1 is an exploded schematic view of a three-degree-of-freedom micro electromagnetic digital actuator according to the present invention;
fig. 2 is an assembly view of a three-degree-of-freedom micro electromagnetic digital actuator according to the present invention;
in the figure, 1 is a control board card, 2 is a power amplifier, 3 is a coil circuit board, 4 is a glass plate I, 5 is a linear circuit board, 6 is a glass plate II, 7 is an actuator, 8 is a fixed permanent magnet, 9 is a driven permanent magnet outer PMMA shell, 10 is a driven permanent magnet, 11 is a PMMA shell bottom boundary, and 12 is a conducting wire.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
The utility model relates to a three-degree-of-freedom miniature electromagnetic digital actuator, as shown in figures 1 and 2, comprising a control board 1, wherein the control board 1 is connected with a power amplifier 2 through a wire 12, the power amplifier 2 is connected with a coil circuit board 3 and a linear circuit board 5 through a wire 12, a first glass plate 4 is fixedly connected on the coil circuit board 3, a linear circuit board 5 is fixedly connected on the first glass plate 4, a second glass plate 6 is fixedly connected on the upper end of the linear circuit board 5, and an actuator 7 is fixedly connected on the upper end of the second glass plate 6; the actuator 7 comprises a supporting frame, fixed permanent magnets 8 fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell 9 movably embedded in a groove of the supporting frame, and a driven permanent magnet 10 with the magnetization direction opposite to that of the fixed permanent magnets 8 is movably arranged in the driven permanent magnet external PMMA shell 9.
The control board card 1 is a single chip microcomputer or a digital signal output card, and the control board card 1 is used for providing pulse driving current signals for the actuator array.
The power amplifier 2 is a voltage to current converter or thyristor that amplifies the system drive current signal to provide large current pulses to the device, thereby producing a large lorentz drive force on the driven actuator.
The coil circuit board 3 is a printed electromagnetic coil circuit board, and the center position of a copper coil on the coil circuit board 3 is arranged corresponding to the position of the driven permanent magnet 10.
The linear circuit board 5 is a double-sided printed linear circuit board, copper wires on the linear circuit board 5 are perpendicularly arranged in a positive and negative orthogonal mode, and the center position of the copper wires in the positive and negative orthogonal mode corresponds to the position of the driven permanent magnet 10.
The thicknesses of the first glass plate 4 and the second glass plate 6 are 0.5mm, the shapes of the first glass plate 4 and the second glass plate 6 are square, the area size can be correspondingly adjusted according to the required actuator and the size of the circuit board, the first glass plate 4 and the second glass plate 6 are mainly used for electromagnetic isolation, and the glass plates are placed between the linear circuit board and the magnet of the actuator and between the coil circuit board and the linear circuit board and are supported by the actuator structure body.
As shown in fig. 1 and 2, the driven permanent magnet 10 and the fixed permanent magnet 8 are both cylindrical magnets or cubic magnets, and the support frame is rectangular; when the driven permanent magnet 10 or the fixed permanent magnet 8 is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, and the height of the cylindrical magnet is 4-8 mm; when the driven permanent magnet 10 or the fixed permanent magnet 8 is a cubic magnet, the side length of the cubic magnet is 4 to 20mm, and the magnets of the same shape may be the same or different in size.
The groove on the support frame of the actuator 7 is a convex groove, the distance is reserved between the PMMA shell 9 outside the driven permanent magnet and the side surface, the upper surface and the lower surface of the convex groove, and the distance is reserved between the bottom boundary 11 of the PMMA shell and the side surface of the convex groove. The actuator 7 may be fixed to the work platform by a screw connection.
The utility model relates to a three degree of freedom's miniature electromagnetism digital actuator's theory of operation as follows: the actuator 7 adopts an electromagnetic driving principle, Lorentz force is generated on the driven permanent magnet 10 of the actuator 7 in a mode of controlling current pulse, and the driven permanent magnet 10 in the actuator 7 is driven to generate displacement under the action of the Lorentz force;
state retention mode: in order to realize stable in-plane displacement output, 4 stable positions are designed on the actuator unit, namely 4 fixed permanent magnets which are arranged at four angular positions in the supporting frame are used, the magnetization direction of the fixed permanent magnets is opposite to that of the driven permanent magnets, so that in a static state, the driven permanent magnets are subjected to static magnetic attraction force from the fixed permanent magnets, and are determined to be only positioned at the four angular positions closest to the 4 fixed permanent magnets when in the supporting frame, and under the condition that external interference is not large, the driven permanent magnets 10 are always kept at one of the four positions, namely, the four stable positions are called;
the motion mode is as follows: namely, the driven permanent magnet 10 in the actuator 7 moves, the four stable states are also positioned at four vertexes of a rectangular structure in the supporting frame, so that the driven permanent magnet 10 can be driven only by electrifying corresponding conducting wires and coils at the bottom of the actuator 7 for pulse, namely, from one stable state position to another stable state position, and in the process, the electromagnetic driving force is required to be larger than the static magnetic attraction force;
the logic control mode is as follows: the power-on logic control sequence of the actuator 7 adopts a parallel dual-path control, and a mode of bit rising, bit driving, bit falling and bit returning is as follows: firstly, applying current in a corresponding direction to a coil on an electromagnetic coil circuit board 3 at the bottom of an actuator 7, and keeping a driven permanent magnet 10 and a PMMA shell 9 outside the driven permanent magnet to be subjected to magnetic levitation force to be in a magnetic levitation state; as the driven permanent magnet 10 and the driven permanent magnet outer PMMA housing 9 rise, the driven permanent magnet outer PMMA housing 9 contacts with the actuator 7 bottom frame, so that the driven permanent magnet 10 remains stationary in the z direction; in addition, the driven permanent magnet 10 is also in one of the four stable states, so that it remains stationary in the x and y directions as well; the second step is that: pulse current is sent to corresponding conducting wires on the linear circuit board 5, and the generated driving force drives the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet to move from one stable position to the other stable position, so that the motion of the actuator is realized; the third step: stopping or reversing the current applied to the coil on the electromagnetic coil circuit board 3 at the bottom of the actuator 7, so that the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet fall back to the second glass plate 6 due to gravity or electromagnetic attraction, the degree of freedom of movement in the z direction is statically determined, and the driven permanent magnet 10 is also in one of four stable states, so that the driven permanent magnet is also statically determined in the x direction and the y direction; the fourth step: and (3) sending reverse pulse current to corresponding conducting wires on the linear circuit board 5 to enable the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet to return to the initial stable position, and continuously repeating the steps to enable the actuator to continuously move so as to realize three-degree-of-freedom movement of the actuator.
The utility model has simple structure, open loop control, only needs current pulse based on digital control drive actuator, and does not need to install feedback sensor, so compared with the device based on analog actuator, the cost is lower, the installation structure is compact, the control is convenient, the industrial application potential is huge, and in the occasion of compact space, the traditional analog actuator can be replaced; the driven permanent magnet has the freedom of movement in the x, y and z directions.
Example 1
The structure of the three-degree-of-freedom electromagnetic digital actuator device is shown in fig. 1 and 2, and the three-degree-of-freedom electromagnetic digital actuator device comprises a control board card 1, wherein the control board card 1 is connected with a power amplifier 2 through a lead 12, and the power amplifier 2 is respectively connected with a coil circuit board 3 and a linear circuit board 5 through leads; as shown in fig. 2, the coil circuit board 3 and the linear circuit board 5 are separated by a layer of glass plate one 4, a glass plate two 6 is disposed above the linear circuit board 5, and an actuator 7 is disposed above the glass plate two 6. The actuator 7 is composed of 4 fixed permanent magnets 8, a driven permanent magnet 10 and a PMMA housing 9 outside the driven permanent magnet, and the precision of the movement is 0.2mm in the x and y directions and 0.5mm in the z direction.
The driven permanent magnet 10 is a cubic magnet with dimensions of 4mm x 4mm x 2 mm; the fixed permanent magnet 8 is a cubic magnet with dimensions of 4mm x 4mm x 2 mm.
The control board card 1 has at least 3 digital signal output ports, and transmits the current pulse signal to the coil circuit board 3 and the linear circuit board 5 through the power amplifier 2 to form a conductive loop.
The power amplifier 2 is a voltage-current converter, converts a voltage signal of the control board 1 into a pulse current signal, and the driving current can be generally 1-10A.
The thickness of the first glass plate 4 and the second glass plate 6 is 0.5 mm.
The distance between the outer side surface of the exterior PMMA housing 9 of the driven permanent magnet and the inner side surface of the convex groove of the actuator 7 is 200 μm.
The designed distance between the upper surface of the lower part of the exterior PMMA housing 9 of the driven permanent magnet and the lower surface of the convex groove of the actuator 7 is 500 μm.
By adopting the above driving mode, displacement output of 200 μm in x and y directions can be obtained by driving the driven permanent magnet 10, and displacement output of 500 μm can be obtained by driving in z direction.
Example 2
The structure of the three-degree-of-freedom electromagnetic digital actuator device is shown in fig. 1 and 2, and the three-degree-of-freedom electromagnetic digital actuator device comprises a control board card 1, wherein the control board card 1 is connected with a power amplifier 2 through a lead 12, and the power amplifier 2 is respectively connected with a coil circuit board 3 and a linear circuit board 5 through leads; as shown in fig. 2, the coil circuit board 3 and the linear circuit board 5 are separated by a layer of glass plate one 4, a glass plate two 6 is disposed above the linear circuit board 5, and an actuator 7 is disposed above the glass plate two 6. The actuator 7 is composed of 4 fixed permanent magnets 8, a driven permanent magnet 10 and a PMMA housing 9 outside the driven permanent magnet, and the precision of the movement is 0.5mm in the x and y directions and 0.8mm in the z direction.
The driven permanent magnet 10 is a cubic magnet having a size of 5mm x 5mm x 2 mm; the fixed permanent magnet 8 is a cubic magnet having a size of 5mm x 5mm x 2 mm.
The control board card 1 has at least 3 digital signal output ports, and transmits the current pulse signal to the coil circuit board 3 and the linear circuit board 5 through the power amplifier 2 to form a conductive loop.
The power amplifier 2 is a voltage-current converter, converts a voltage signal of the control board 1 into a pulse current signal, and the driving current can be generally 1-10A.
The thickness of the first glass plate 4 and the second glass plate 6 is 0.5 mm.
The distance between the outer side surface of the exterior PMMA housing 9 of the driven permanent magnet and the inner side surface of the convex groove of the actuator 7 is 500 μm.
The designed distance between the upper surface of the lower part of the exterior PMMA shell 9 of the driven permanent magnet and the lower surface of the convex groove of the actuator 7 is 800 μm.
By adopting the driving mode, the displacement output of 500 μm in the x and y directions can be obtained by driving the driven permanent magnet 10, and the displacement output of 800 μm can be obtained by driving in the z direction.
Claims (8)
1. The three-degree-of-freedom micro electromagnetic digital actuator is characterized by comprising a control board card (1), wherein the control board card (1) is connected with a power amplifier (2) through a lead (12), the power amplifier (2) is connected with a coil circuit board (3) and a linear circuit board (5) through the lead (12), a first glass plate (4) is fixedly connected onto the coil circuit board (3), the linear circuit board (5) is fixedly connected onto the first glass plate (4), a second glass plate (6) is fixedly connected onto the upper end of the linear circuit board (5), and an actuator (7) is fixedly connected onto the upper end of the second glass plate (6); the actuator (7) comprises a supporting frame, fixed permanent magnets (8) fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell (9) movably embedded in a groove of the supporting frame, and a driven permanent magnet (10) with the magnetization direction opposite to that of the fixed permanent magnets (8) is movably placed in the driven permanent magnet external PMMA shell (9).
2. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the control board card (1) is a single chip or a digital signal output card.
3. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the power amplifier (2) is a voltage-to-current converter or a thyristor.
4. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the coil circuit board (3) is a printed electromagnetic coil circuit board, and the center position of a copper coil on the coil circuit board (3) is arranged corresponding to the position of the driven permanent magnet (10).
5. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the linear circuit board (5) is a double-sided printed linear circuit board, copper wires on the linear circuit board (5) are orthogonally and perpendicularly arranged, and the central positions of the orthogonally and orthogonally arranged copper wires are arranged corresponding to the positions of the driven permanent magnets (10).
6. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the thickness of the first glass plate (4) and the second glass plate (6) are both 0.5 mm.
7. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, characterized in that the driven permanent magnet (10) and the fixed permanent magnet (8) are both cylindrical magnets or cubic magnets; when the driven permanent magnet (10) or the fixed permanent magnet (8) is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, and the height of the cylindrical magnet is 4-8 mm; when the driven permanent magnet (10) or the fixed permanent magnet (8) is a cubic magnet, the side length of the cubic magnet is 4-20 mm.
8. The three-degree-of-freedom micro electromagnetic digital actuator according to claim 1, wherein the grooves on the support frame of the actuator (7) are convex grooves, and the driven permanent magnet exterior PMMA housing (9) is spaced apart from the sides, upper and lower surfaces of the convex grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921787035.9U CN210629376U (en) | 2019-10-23 | 2019-10-23 | Three-freedom-degree miniature electromagnetic digital actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921787035.9U CN210629376U (en) | 2019-10-23 | 2019-10-23 | Three-freedom-degree miniature electromagnetic digital actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210629376U true CN210629376U (en) | 2020-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921787035.9U Expired - Fee Related CN210629376U (en) | 2019-10-23 | 2019-10-23 | Three-freedom-degree miniature electromagnetic digital actuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210629376U (en) |
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2019
- 2019-10-23 CN CN201921787035.9U patent/CN210629376U/en not_active Expired - Fee Related
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200526 Termination date: 20201023 |