CN204130459U - The electromagnetism bistable state MEMS relay that a kind of height is integrated - Google Patents
The electromagnetism bistable state MEMS relay that a kind of height is integrated Download PDFInfo
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- CN204130459U CN204130459U CN201420508611.2U CN201420508611U CN204130459U CN 204130459 U CN204130459 U CN 204130459U CN 201420508611 U CN201420508611 U CN 201420508611U CN 204130459 U CN204130459 U CN 204130459U
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Abstract
The utility model discloses the electromagnetism bistable state MEMS relay that a kind of height is integrated.Described relay is the MEMS being integrated with all systems of relay such as comprising Electromagnetic Drive, resiliency supported, signal switching and permanent magnet on single substrate.Described electromagnetic driving system comprises multiturn helical form planar coil and closed yoke, described flexible support system comprises yoke platform, elastomeric platform, cantilever beam and supporting construction, described signal switching system comprises fixed contact, moving contact and outer signal line, exists and support formed air gap by supporting construction between fixed contact and moving contact; Described permanent magnet is positioned at above elastomeric platform.The utility model is integrated with all systems of electromagnetism bistable relay on a single substrate by MEMS technology, improve integrated level, reduce the volume of relay, reduce power consumption, ensure that relay work reliability, improve every combination property, be applicable to industrial mass manufacture.
Description
Technical field
The utility model relates to the integrated electromagnetism bistable state MEMS relay of a kind of height, belongs to micro-electronic mechanical skill field.
Background technology
Relay is the one " automatic switch " operated by Small current control big current, by automatically turning on/off change-over circuit.In circuit, by Long-distance Control, available relay realizes the function such as safeguard protection, circuit switching, is widely used in power management, instrument and meter, the automatically field such as control and communication connection.
In relay market now, communication relay has occupied the share of more than 25%.Communication relay is mainly used in network, instrument and meter, automatically control etc. can by long-range or indirect occasion of automatically carrying out switch transition.Along with the development of information technology, communication has been converted into the sophisticated signals such as collection voice, data, audio frequency and video and image from traditional voice signal and has extended to data fields, portable communication apparatus and corresponding standard have also been developed greatly and have been improved, therefore, higher requirement be it is also proposed to the electronic devices and components-communication relay of the communications field.
The first generation, second generation communication relay originate in 70 ~ eighties of 20th century, have realized the volume production of the third generation and forth generation to the nineties.Forth generation communication relay reduces 50% relative to first generation communication relay volume, lower power consumption 80%.Along with the development of the communication technology, need to increase transfer of data, reduce operating cost, this all has higher requirement to communication relay volume, power consumption and reliability, and adopts the technique of traditional precision machined midget relay to reach the limit.The appearance of microelectromechanical systems (Micro Electro Mechanical Systems is called for short MEMS) technology, breaches the development bottleneck of communication relay, for further developing of communication relay provides new concept and approach.The fusion of MEMS technology and relay, the advantages such as traditional electro-mechanical relay contacts resistance is little, insulation resistance is high, isolation is high can be kept, simultaneously, adopt micro fabrication can realize the batch micro operations of communication relay, realize the feature that made communication relay volume is little, low in energy consumption, function is many and reliability is high, and the production advantage of solid-state relay Integrated manufacture and the technical advantage of electromechanical relay electrical equipment good combination property can be inherited, represent the developing direction of future communications relay.
Along with reducing of MEMS relay device size, its drive principle of relay of various different driving mode has created larger change.Certainly, various driving type and structure also have pluses and minuses, and its performance is also not quite similar, but along with the reduction of MEMS relay size, the advantage of Electromagnetic Drive relay drives the advantage of relay more obvious compared with electrostatic.Electrostatic-driven MEMS relay is simple due to structure, be highly susceptible to processing preparation, but driving voltage is too high, be not easy to and traditional integrated circuit technique (Integrated Circuit, be called for short IC) compatible, also easily cause the insulating barrier between two electrodes to puncture, reduce device lifetime.Relative to quiet electrically driven (operated) MEMS relay, electrothermal drive type microrelay can produce larger energy density, has larger power output, demonstrates more obvious output displacement, but the radiation processes of thermal electrical relay needs the longer time usually.Relative to adopting the relay of aforementioned driven in two modes, electromagnetic drive type relay has that stroke is large, good insulation preformance, fast response time and have good power-non-linear displacement, and can adapt to various different environment, combination property is more outstanding.
" Electromagnetic Drive bistable state driver first ultralow switching power loss and modeling " (" Sensors and Actuators " A that Gary D.Gray Jr. etc. delivers at " sensor and actuator " magazine, Vol119, 2005, 489 ~ 501 " Magnetically bistable actuator Part 1.Ultra-low switching energy and modeling) in a literary composition, the electromagnetism MEMS relay that a kind of two-piece type is assembled is proposed, upper slice substrate prepares planar coil, bottom sheet substrate prepares cantilever beam and supporting construction, upper and lower substrate is undertaken supporting and encapsulating by beacon, cantilever beam is in first stable state in the magnetic field that permanent magnet produces, pulse current is passed into along with in coil, the effect incision of cantilever beam electromagnetic force outside commutates another stable state, and the maintenance of second stable state is realized by means of permanent magnet, its basic functional principle is by means of passing into pulse current to realize bistable switching in the coil of upper substrate, realize keeping by means of permanent magnet.This relay output displacement is large, and fast response time is low in energy consumption.But in this design, the assembling based on two substrate formulas is difficult to realize that the height of electromagnetic relay is integrated, batch micro operations.
B.Rogger etc. are at the 8th microelectronic sensor and actuator meeting (TRANSDUCERS, 95the 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX) in " the integrated electric magnetic driven device based on two-layer LIGA technique " (Fully batch fabricated magnetic microactuators using two layer LIGA process) literary composition of delivering, propose the electromagnetic relay adopting X-ray lithography technology (LIGA technology) preparation based on three-dimensional helical coil structure, it realizes iron nickel magnetic core by polymethyl methacrylate (PMMA) sacrificial layer technology in conjunction with secondary LIGA technology and three-dimensional helical coil forms.After passing into electric current, cantilever beam realizes reciprocating motion in face, disconnects or closing contact.But the preparation method of three-dimensional solenoid coil is complicated, and LIGA technical costs is higher, and efficiency is low, and the restriction by overall dimension is many, and the coil turn that monolithic manufactures receive coil will lack relatively.
Utility model content
For the problems referred to above that prior art exists, the purpose of this utility model is to provide the integrated electromagnetism bistable state MEMS relay of a kind of height, volume is little, low in energy consumption, integrated level is high, good combination property to make it meet, and easy to prepare, production cost is low, be easy to the requirement of industrialized mass production.
For reaching above-mentioned purpose, the utility model adopts following technical scheme:
The electromagnetism bistable state MEMS relay that height is integrated, comprises substrate and is integrated in on-chip electromagnetic driving system, flexible support system and permanent magnet, it is characterized in that: substrate is also integrated with signal switching system; Described electromagnetic driving system comprises multiturn helical form planar coil and closed yoke, and closed yoke is distributed in the central authorities of planar coil, bottom and edge; Described flexible support system comprises yoke platform and the elastomeric platform be stacked in above yoke platform and four cantilever beams be fixedly connected with respectively with four limits of elastomeric platform, and the other end of each cantilever beam is all fixedly connected with a supporting construction; Described permanent magnet is positioned at the upper surface of the elastomeric platform of flexible support system; Described signal switching system comprises fixed contact, moving contact and two outer signal lines, described fixed contact is positioned at the upper surface of electromagnetic driving system, be connected with an outer signal line, described moving contact is positioned at the bottom of flexible support system, is connected with another outer signal line; Exist between moving contact and fixed contact and support by four supporting constructions the air gap formed.
Preferably, be provided with insulating barrier between coil, the thickness of described insulating barrier is 10 ~ 24 μm.
Preferably, the shape of described planar coil is square, rectangle or circle.
Preferably, described planar coil is single layer coil, and the thickness of coil is 22 ~ 26 μm, and width is 12 ~ 15 μm.
Preferably, described supporting construction is located between electromagnetic driving system and flexible support system.
Preferably, the spacing of described air gap is 155 ~ 165 μm.
The operation principle of the electromagnetism bistable state MEMS relay that a kind of height that the utility model provides is integrated is as follows:
The magnetic flux density major part that the magnetic circuit of electromagnetism bistable state MEMS relay equivalence produces all concentrates between air gap, and therefore, between air gap, the size of electromagnetic force determines the operating state of relay.When air-gap separation diminishes gradually, magnetic force increases, thus attracts elastic cantilever to make relay closes.On the contrary, when air-gap separation becomes large, magnetic force reduces, and cantilever beam returns back to initial condition under the effect of elastic-restoring force, and relay disconnects.
Therefore, when relay is switched to closure state by off-state by needs, need to pass into electric current in planar coil, increase the magnetic flux density in air gap, the magnetic force acted on elastic support structure is increased, until magnetic force overcomes elastic deformation force, elastomeric platform is attracted downwards, until fixed contact and moving contact close, external circuits forms path.Because permanent magnet is arranged on the upper surface of flexible support system, therefore, after planar coil energising, along with the reduction gradually of air-gap separation, the magnetic field produced can increase magnetic flux density in air gap, strengthens the conjunction magnetic force in air gap.When after relay closes, the magnetic force that permanent magnet produces can remain on closure state by latching relay, without the need to again to planar coil energising, because this reducing quiescent dissipation.And when relay is switched to off-state by closure state by needs, then can pass into reverse current, the magnetic force making planar coil produce reverse electromagnetic force to produce to weaken permanent magnet, thus make to act on conjunction magnetic force total on elastomeric platform and reduce.When closing magnetic force and being less than elastic-restoring force, elastomeric platform moves to away from electromagnetic driver direction under the effect of selfer power, and fixed contact is separated with moving contact, disconnects external circuits.
Electromagnetic driving system, flexible support system, signal switching system and permanent magnet are become one by MEMS technology by the integrated electromagnetism bistable state MEMS relay of a kind of height provided due to the utility model, therefore, the volume of relay can less, functional reliability is higher, and by accurately controlling the air gap between moving contact and fixed contact, realize the accurate control of drive displacement and insulation property, realize the reliable switching of relay to circuit by the size accurately controlling electromagnetic force.
Compared with prior art, the beneficial effects of the utility model are:
1) improve the integrated level of electromagnetism bistable state MEMS relay, the volume reducing relay, the power consumption reducing relay, ensure that the reliability of relay work, improve every combination property of relay;
2) achieve the over all Integration manufacture of each system of relay on monocrepid, simplify production technology, shorten process cycle, reduce manufacture difficulty, for industrial mass manufacture provides a kind of low cost, high efficiency production method.
3) owing to have employed design permanent magnet being arranged on flexible support system upper surface, therefore, under the prerequisite of idle, the maintenance of relay closes operating state can be realized.
Accompanying drawing explanation
Fig. 1 is the perspective view of the integrated electromagnetism bistable state MEMS relay of a kind of height that the utility model provides.
Fig. 2 is the planar structure schematic diagram of a kind of electromagnetic driving system provided by the utility model.
Fig. 3 is the planar structure schematic diagram of a kind of flexible support system that the utility model provides.
Fig. 4 is the planar structure schematic diagram of a kind of signal switching system that the utility model provides.
In figure: 10, substrate; 20, electromagnetic driving system; 21, planar coil; 22, closed yoke; 30, flexible support system; 31, yoke platform; 32, elastomeric platform; 33, cantilever beam; 34, supporting construction; 40, signal switching system; 41, fixed contact; 42, moving contact; 43, outer signal line I; 44, outer signal line II; 50, permanent magnet.
Embodiment
Below in conjunction with drawings and Examples, the technical solution of the utility model is described in further detail and completely.
Embodiment
As shown in Figure 1, the electromagnetism bistable state MEMS relay that a kind of height that the utility model provides is integrated, comprise: substrate 10 and the electromagnetic driving system 20, flexible support system 30, signal switching system 40 and the permanent magnet 50 that are integrated on substrate 10, permanent magnet 50 is positioned at above flexible support system 30.
As shown in Figure 2, described electromagnetic driving system 20 comprises multiturn helical form planar coil 21 and closed yoke 22, and closed yoke 22 is distributed in the central authorities of planar coil 21, bottom and edge; Insulating barrier is provided with between coil; Or the shape of planar coil can be square, rectangle circle, be square in the present embodiment; Described planar coil 21 is preferably single layer coil, and the thickness of coil is preferably 22 ~ 26 μm, and width is preferably 12 ~ 15 μm.
As shown in Figure 3, described flexible support system 30 comprises yoke platform 31 and the elastomeric platform 32 be stacked in above yoke platform 31 and four cantilever beams 33 be fixedly connected with respectively with four limits of elastomeric platform 32, and the other end of each cantilever beam 33 is all fixedly connected with a supporting construction 34.
As shown in Figure 4, described signal switching system 40 comprises fixed contact 41, moving contact 42 and two outer signal lines, described fixed contact 41 is positioned at the upper surface of electromagnetic driving system 20, with outer signal line II 44 (in figure, because holding wire 44 is blocked, only represent with its wiring pile) connect, described moving contact 42 is positioned at the bottom of flexible support system 30, be connected with outer signal line I 43, moving contact 42 position shown in figure is moving contact 42 and the status architecture of fixed contact 41 when contacting; Exist between moving contact 42 and fixed contact 41 and support formed air gap by four supporting constructions 34, the spacing of air gap is preferably 155 ~ 165 μm.
The electromagnetism bistable state MEMS relay that a kind of height that the utility model provides is integrated, its switching function is achieved in that
First, electric current is passed in the planar coil 21 of electromagnetism bistable state MEMS relay electromagnetic driving system 20, the magnetic field produced after being energized by planar coil 21 changes the size of total magnetic flux in magnetic circuit, increase or reduce the conjunction magnetic force in air gap, by means of the change between magnetic force and the elastic deformation force of flexible support system 30, realizing relay closing the switching between off-state, then, realizing the maintenance of stable state by means of permanent magnet 50.
When relay is switched to closure state by off-state by needs, electric current is passed in planar coil 21, total magnetic flux in air gap is increased, the magnetic force acting on elastomeric platform 32 increases to overcome elastic deformation force, thus yoke platform 31 is pulled down to attracted position, connect external circuits, subsequently without the need to energising, the magnetic force by means of permanent magnet 50 makes relay remain on closure state.Because without the need to energising, thus there is no energy consumption.When relay is switched to off-state by closure state by needs, can pass into reverse current, the total magnetic flux in air gap is reduced, the magnetic force acted on central elastic platform 32 reduces, and is less than elastic-restoring force.Elastomeric platform 32 is away from electromagnetic driving system 20 under the effect of elastic-restoring force, and fixed contact 41 is separated with moving contact 42, disconnects external circuits, realizes its switching function.
Effect test
Utilize testing apparatus, test experiments is carried out to the above-mentioned height integrated electric magnetic bi-stable micro-MEMS relay dynamic response characteristic prepared and bistable operation mechanism.Testing apparatus is made up of power amplifier, waveform generator, DC power supply and oscilloscope.
By micro-for above-mentioned height integrated electric magnetic bi-stable MEMS relay access testing apparatus, pass into pulse current, this relay of oscilloscope display is in closure state, and external circuits is connected; When stopping passes into electric current, external circuits can remain on on-state always, illustrates that this relay can make relay remain on closure state by means of the magnetic force of permanent magnet 50.When relay, to pass into size identical but after the driving voltage that direction is contrary, relay disconnects external circuits open circuit simultaneously, illustrate that the integrated electromagnetism bistable state MEMS relay of height that the utility model provides has good bistable characteristic, reliable working performance, stable.
Observe the time difference between input, output voltage by oscilloscope, the response time of relay can be tested out.Test result shows, the height that the utility model provides integrated electromagnetism bistable state MEMS relay response time is 0.96 millisecond, and combination property is good, reaches the purpose of this utility model.
Finally be necessary described herein:
Above-described embodiment, only for being described in further details the technical solution of the utility model, only being understood technology contents of the present utility model for helping, can not be interpreted as the restriction to the utility model protection range.Those skilled in the art improves according to the non-intrinsically safe that foregoing of the present utility model is made and adjusts the protection range all belonged to required by the utility model.
Claims (6)
1. a highly integrated electromagnetism bistable state MEMS relay, comprises substrate and is integrated in on-chip electromagnetic driving system, flexible support system and permanent magnet, it is characterized in that: substrate is also integrated with signal switching system; Described electromagnetic driving system comprises multiturn helical form planar coil and closed yoke, and closed yoke is distributed in the central authorities of planar coil, bottom and edge; Described flexible support system comprises yoke platform and the elastomeric platform be stacked in above yoke platform and four cantilever beams be fixedly connected with respectively with four limits of elastomeric platform, and the other end of each cantilever beam is all fixedly connected with a supporting construction; Described permanent magnet is positioned at the upper surface of the elastomeric platform of flexible support system; Described signal switching system comprises fixed contact, moving contact and two outer signal lines, described fixed contact is positioned at the upper surface of electromagnetic driving system, be connected with an outer signal line, described moving contact is positioned at the bottom of flexible support system, is connected with another outer signal line; Exist between moving contact and fixed contact and support by four supporting constructions the air gap formed.
2. electromagnetism bistable state MEMS relay as claimed in claim 1, it is characterized in that: be provided with insulating barrier between coil, the thickness of described insulating barrier is 10 ~ 24 μm.
3. electromagnetism bistable state MEMS relay as claimed in claim 1, is characterized in that: the shape of described planar coil is square, rectangle or circle.
4. the electromagnetism bistable state MEMS relay as described in claim 1 or 3, is characterized in that: described planar coil is single layer coil, and the thickness of coil is 22 ~ 26 μm, and width is 12 ~ 15 μm.
5. electromagnetism bistable state MEMS relay as claimed in claim 1, is characterized in that: described supporting construction is located between electromagnetic driving system and flexible support system.
6. electromagnetism bistable state MEMS relay as claimed in claim 1, is characterized in that: the spacing of described air gap is 155 ~ 165 μm.
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| CN201420508611.2U CN204130459U (en) | 2014-09-04 | 2014-09-04 | The electromagnetism bistable state MEMS relay that a kind of height is integrated |
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| CN201420508611.2U CN204130459U (en) | 2014-09-04 | 2014-09-04 | The electromagnetism bistable state MEMS relay that a kind of height is integrated |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
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2014
- 2014-09-04 CN CN201420508611.2U patent/CN204130459U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
| CN113376377B (en) * | 2021-04-21 | 2023-11-24 | 上海工程技术大学 | MEMS sensor for sustainable detection of glucose concentration |
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Legal Events
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150128 Termination date: 20180904 |