JP2017217736A - Flexible mechanism and gantry device using the same - Google Patents

Flexible mechanism and gantry device using the same Download PDF

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JP2017217736A
JP2017217736A JP2016115037A JP2016115037A JP2017217736A JP 2017217736 A JP2017217736 A JP 2017217736A JP 2016115037 A JP2016115037 A JP 2016115037A JP 2016115037 A JP2016115037 A JP 2016115037A JP 2017217736 A JP2017217736 A JP 2017217736A
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coupling member
flexible
axial direction
bending
flexible mechanism
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JP6405341B2 (en
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何長政
Chang Cheng Ho
陳宜文
Yi Wen Chen
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Hiwin Mikrosystem Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a flexible mechanism and a gantry device using the same that compensate for a position error of a transverse beam of the gantry and solve the problem of generating hysteresis or an error reproduction due to insufficient rigidity of the flexible mechanism.SOLUTION: A flexible mechanism includes: a first coupling member; a second coupling member disposed at a distance from the first coupling member, and displaceable relatively to the first coupling member along a first axial direction; a first flexible member which is positioned in the first axial direction, bridges between the first coupling member and the second coupling member, and deforms when the first coupling member and the second coupling member are displaced relative to each other; and a second flexible member which is not positioned in the first axial direction, and bridges between the first coupling member and the second coupling member. In the flexible mechanism, the first flexible member can increase a deformation resistance capacity in the first axial direction, since rigidity of the first flexible member is larger than rigidity of the second flexible member.SELECTED DRAWING: Figure 2

Description

本発明は、移動可能な台座に関し、特に、フレキシブルメカニズムとそれを有するガントリー装置に関するものである。 The present invention relates to a movable pedestal, and more particularly to a flexible mechanism and a gantry apparatus having the same.

構造の剛性、製造、組付け及び制御技術での制限により、可動な台座が移動するときには、幾何誤差、又は面的な誤差を回避できない。位置の誤差による移動の影響を減少するために、従来、異なる技術手段により誤差を補償するメカニズムがある。すなわち、レーザー干渉計などによる移動経路の校正により、誤差を減少し、又は無くすことが可能であり、そして緩衝や変形の技術により、移動の誤差による可動な台座に対する不適切なトルクや応力を無くすことが可能である。   Due to structural rigidity, manufacturing, assembly and control technology limitations, geometric or surface errors cannot be avoided when the movable pedestal moves. In order to reduce the effects of movement due to position errors, there are conventional mechanisms for compensating the errors by different technical means. That is, errors can be reduced or eliminated by calibration of the movement path using a laser interferometer, etc., and inappropriate torque and stress on the movable base due to movement errors can be eliminated by buffering and deformation techniques. It is possible.

具体的には、図1に示す従来のガントリー1は、台座2を跨る横梁3の一側には、変形可能なフレキシブルメカニズム4が設けられている。これにより、横梁3の両端が台座2に対して相対的に移動して誤差が発生する場合には、フレキシブルメカニズム4により、当該誤差による横梁3の位置や角度が変化して、不適切な応力が発生することを回避可能である。しかしながら、フレキシブルメカニズム4自体の剛性を減少することにより、変形を許容可能であるが、フレキシブルメカニズム4の低剛性により、横梁3を移動するときにヒステリシスが発生する問題がある。このため、これは良い設計と言えない。   Specifically, the conventional gantry 1 shown in FIG. 1 is provided with a deformable flexible mechanism 4 on one side of the cross beam 3 straddling the pedestal 2. As a result, when an error occurs due to the movement of both ends of the cross beam 3 relative to the pedestal 2, the flexible mechanism 4 changes the position and angle of the cross beam 3 due to the error, resulting in inappropriate stress. Can be avoided. However, although the deformation can be allowed by reducing the rigidity of the flexible mechanism 4 itself, there is a problem that hysteresis occurs when the transverse beam 3 is moved due to the low rigidity of the flexible mechanism 4. For this reason, this is not a good design.

本発明の主な目的は、フレキシブルメカニズムの変形により、ガントリーの横梁の位置の誤差を補償し、フレキシブルメカニズムの横梁の移動方向での剛性がより高いため、フレキシブルメカニズムの剛性不足によるヒステリシスや誤差再現が発生するという問題を解決可能なフレキシブルメカニズムとそれを有するガントリー装置を提供することにある。 The main object of the present invention is to compensate for the error in the position of the transverse beam of the gantry by deformation of the flexible mechanism, and the rigidity of the flexible mechanism in the direction of movement of the transverse beam is higher. It is an object of the present invention to provide a flexible mechanism that can solve the problem of occurrence of a gantry and a gantry device having the flexible mechanism.

本発明のフレキシブルメカニズムによると、第1結合部材と、
第1結合部材との間に距離を有し、第1軸方向に沿って第1結合部材に対して相対的に変位可能な第2結合部材と、
第1軸方向に位置し、第1結合部材と第2結合部材とをブリッジし、第1結合部材と第2結合部材とが相対的に変位すると変形する第1撓み部材と、
第1軸方向に位置せず、第1結合部材と第2結合部材とをブリッジする第2撓み部材と、
を含むフレキシブルメカニズムにおいて、
第1撓み部材は、その剛性が第2撓み部材の剛性より大きいため、第1軸方向での変形抵抗能力を増加可能であることを特徴とする。
According to the flexible mechanism of the present invention, the first coupling member;
A second coupling member having a distance from the first coupling member and displaceable relative to the first coupling member along the first axial direction;
A first bending member that is located in the first axial direction, bridges the first coupling member and the second coupling member, and deforms when the first coupling member and the second coupling member are relatively displaced;
A second bending member that is not positioned in the first axial direction and bridges the first coupling member and the second coupling member;
In a flexible mechanism including
Since the rigidity of the first bending member is larger than that of the second bending member, the deformation resistance capability in the first axial direction can be increased.

本発明のフレキシブルメカニズムによると、第1結合部材は開口端を有し、第2結合部材は、第1結合部材の開口端内に位置し、第1撓み部材と第2撓み部材とは、第1結合部材の開口端内と第2結合部材との間に介在することを特徴とする。 According to the flexible mechanism of the present invention, the first coupling member has an open end, the second coupling member is located within the open end of the first coupling member, and the first flexible member and the second flexible member are The first coupling member is interposed between the opening end of the first coupling member and the second coupling member.

本発明のフレキシブルメカニズムによると、第1撓み部材と第2撓み部材とは、それぞれ板バネであることを特徴とする。 According to the flexible mechanism of the present invention, each of the first bending member and the second bending member is a leaf spring.

本発明のフレキシブルメカニズムによると、第1結合部材と第2結合部材とは、第2軸方向に沿って相対的に変位可能であり、第2軸方向に位置する第2撓み部材の剛性が、第2軸方向に位置しない第2撓み部材の剛性より大きいことを特徴とする。 According to the flexible mechanism of the present invention, the first coupling member and the second coupling member are relatively displaceable along the second axial direction, and the rigidity of the second bending member located in the second axial direction is It is characterized by being larger than the rigidity of the second flexible member not positioned in the second axial direction.

本発明のフレキシブルメカニズムによると、第1撓み部材と第2撓み部材とは、その厚さが異なることを特徴とする。 According to the flexible mechanism of the present invention, the first flexible member and the second flexible member have different thicknesses.

本発明のガントリー装置によると、ベース本体と、二つの柱と、二つのガイド溝と、二つの駆動部材と、を有し、二つの柱は、ベース本体の上面の両端にそれぞれ固定されており、二つのガイド溝は、互いに平行するようにベース本体の上面に設けられており、二つの駆動部材は、柱の上端にそれぞれ設けられているベースと、
二つのスライド部材と、梁本体と、を有し、スライド部材は、それぞれガイド溝にスライド可能に設けられており、駆動部材とそれぞれ連接し、第1軸方向に沿って往復に変位可能であり、梁本体は、ベース本体の上方に位置し、二つのスライド部材の間に介在する梁と、
第1結合部材と、第2結合部材と、第1撓み部材と、第2撓み部材と、を有し、第1結合部材と第2結合部材とは、相対的に変位可能であるようにそれぞれ梁に設けられており、第1撓み部材は、第1軸方向に位置し、第1結合部材と第2結合部材とをブリッジし、第1結合部材と第2結合部材とが梁に駆動されて相対的に移動するときに、第1撓み部材が変形する第1フレキシブルメカニズムと、
を含むガントリー装置において、
第1撓み部材は、その剛性が第2撓み部材の剛性より大きいため、第1軸方向での変形抵抗能力を増加可能であることを特徴とする。
According to the gantry device of the present invention, it has a base body, two pillars, two guide grooves, and two drive members, and the two pillars are respectively fixed to both ends of the upper surface of the base body. The two guide grooves are provided on the upper surface of the base body so as to be parallel to each other, and the two drive members are respectively provided on the upper ends of the pillars,
It has two slide members and a beam body, and each slide member is slidably provided in the guide groove, is connected to each drive member, and can be reciprocally displaced along the first axial direction. The beam body is located above the base body and interposed between the two slide members;
A first coupling member, a second coupling member, a first deflection member, and a second deflection member, wherein the first coupling member and the second coupling member are respectively relatively displaceable. The first bending member is provided in the beam, is located in the first axial direction, bridges the first coupling member and the second coupling member, and the first coupling member and the second coupling member are driven by the beam. A first flexible mechanism in which the first flexible member is deformed when relatively moving,
In a gantry apparatus including
Since the rigidity of the first bending member is larger than that of the second bending member, the deformation resistance capability in the first axial direction can be increased.

本発明のガントリー装置によると、更に、第2フレキシブルメカニズムを含み、第1フレキシブルメカニズムと第2フレキシブルメカニズムとは、梁の両端にそれぞれ設けられており、第2フレキシブルメカニズムは、第3結合部材と、第4結合部材と、第3撓み部材と、第4撓み部材と、を有し、第3結合部材と第4結合部材とは、相対的に変位可能であるように梁に設けられており、第3撓み部材は、第1軸方向に位置し、第3結合部材と第4結合部材とをブリッジし、第4撓み部材は、第1軸方向に位置せず、第3結合部材と第4結合部材とをブリッジし、第3結合部材と第4結合部材とが梁に駆動されて相対的に移動するときに、第3撓み部材が変形し、
第3撓み部材は、その剛性が第4撓み部材の剛性より大きいため、第1軸方向での変形抵抗能力を増加可能であることを特徴とする。
According to the gantry device of the present invention, it further includes a second flexible mechanism, and the first flexible mechanism and the second flexible mechanism are provided at both ends of the beam, respectively. And a fourth connecting member, a third bending member, and a fourth bending member, wherein the third connecting member and the fourth connecting member are provided on the beam so as to be relatively displaceable. The third bending member is located in the first axial direction, bridges the third coupling member and the fourth coupling member, and the fourth bending member is not located in the first axial direction, and the third coupling member and the fourth coupling member The third connecting member is deformed when the third connecting member and the fourth connecting member move relative to each other by being driven by the beam.
Since the rigidity of the third bending member is larger than that of the fourth bending member, the deformation resistance capability in the first axial direction can be increased.

本発明のガントリー装置によると、第1結合部材と第3結合部材とは、それぞれ梁本体の両端に設けられており、第2結合部材と第4結合部材とは、それぞれ各スライド部材に貼り付けるように設けられていることを特徴とする。 According to the gantry device of the present invention, the first coupling member and the third coupling member are respectively provided at both ends of the beam body, and the second coupling member and the fourth coupling member are respectively attached to the slide members. It is provided as follows.

本発明のガントリー装置によると、第1フレキシブルメカニズムの第1結合部材と第2結合部材とは、更に、第2軸方向に沿って相対的に変位可能であり、第2フレキシブルメカニズムの第3結合部材と第4結合部材とは、更に、第2軸方向に沿って相対的に変位可能であり、第1フレキシブルメカニズムの第2軸方向に位置する第2撓み部材と第2フレキシブルメカニズムの第2軸方向に位置する第4撓み部材とは、その剛性が異なることを特徴とする。 According to the gantry device of the present invention, the first coupling member and the second coupling member of the first flexible mechanism are further displaceable along the second axial direction, and the third coupling of the second flexible mechanism. The member and the fourth coupling member can be relatively displaced along the second axial direction, and the second flexible member positioned in the second axial direction of the first flexible mechanism and the second flexible mechanism second. The fourth deflecting member positioned in the axial direction is characterized in that its rigidity is different.

本発明のガントリー装置によると、第1結合部材は開口端を有し、第2結合部材は第1結合部材の開口端内に位置し、第1撓み部材と第2撓み部材とは、第1結合部材の開口端内と第2結合部材との間に介在し、
第3結合部材は開口端を有し、第4結合部材は第3結合部材の開口端内に位置し、第3撓み部材と第4撓み部材とは、第3結合部材の開口端内と第4結合部材との間に介在することを特徴とする。
According to the gantry device of the present invention, the first coupling member has an open end, the second coupling member is located in the open end of the first coupling member, and the first and second flexible members are the first and second flexible members. Interposed between the open end of the coupling member and the second coupling member;
The third coupling member has an open end, the fourth coupling member is located in the open end of the third coupling member, and the third flexible member and the fourth flexible member are in the open end of the third coupling member and It is characterized by being interposed between the four coupling members.

本発明のフレキシブルメカニズムとそれを有するガントリー装置によれば、フレキシブルメカニズムの変形により、ガントリーの横梁の位置の誤差を補償し、フレキシブルメカニズムの横梁の移動方向での剛性がより高いため、フレキシブルメカニズムの剛性不足によるヒステリシスや誤差再現が発生するという問題を解決可能であるという効果を有する。 According to the flexible mechanism of the present invention and the gantry device having the flexible mechanism, the deformation of the flexible mechanism compensates for an error in the position of the lateral beam of the gantry, and the rigidity of the flexible mechanism in the direction of movement of the lateral beam is higher. This has the effect that the problem of hysteresis and error reproduction due to insufficient rigidity can be solved.

従来のガントリー装置を示す斜視図である。It is a perspective view which shows the conventional gantry apparatus. 本発明の第1の実施形態に係るガントリー装置を示す斜視図である。1 is a perspective view showing a gantry device according to a first embodiment of the present invention. 本発明の第1の実施形態に係るガントリー装置を示す正面図である。It is a front view which shows the gantry apparatus which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係る第1フレキシブルメカニズムを示す斜視図である。It is a perspective view which shows the 1st flexible mechanism which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係る第2フレキシブルメカニズムを示す斜視図である。It is a perspective view which shows the 2nd flexible mechanism which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係るガントリー装置を示す平面図である。It is a top view which shows the gantry apparatus which concerns on the 1st Embodiment of this invention. 本発明の第2の実施形態に係る第2フレキシブルメカニズムを示す平面図である。It is a top view which shows the 2nd flexible mechanism which concerns on the 2nd Embodiment of this invention. 本発明の第2の実施形態に係る第1フレキシブルメカニズムを示す平面図である。It is a top view which shows the 1st flexible mechanism which concerns on the 2nd Embodiment of this invention.

以下、本発明の実施の形態を図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(第1の実施形態)
図2及び図3を参照する。本実施形態に係るガントリー装置10は、ベース20と、梁30と、第1フレキシブルメカニズム40と、第2フレキシブルメカニズム50と、を含む。
(First embodiment)
Please refer to FIG. 2 and FIG. The gantry device 10 according to the present embodiment includes a base 20, a beam 30, a first flexible mechanism 40, and a second flexible mechanism 50.

ベース20は、ベース本体21と、二つの柱22と、二つのガイド溝23と、二つの駆動部材24と、を有する。二つの柱22は、ベース本体21の上面の両端にそれぞれ固定されている。二つのガイド溝23は、互いに平行するようにベース本体21の上面に設けられており、適当の長さをそれぞれ有する。二つの駆動部材24は、リニアモータで構成され、柱22の上端にそれぞれ設けられている。 The base 20 includes a base body 21, two pillars 22, two guide grooves 23, and two drive members 24. The two pillars 22 are respectively fixed to both ends of the upper surface of the base body 21. The two guide grooves 23 are provided on the upper surface of the base body 21 so as to be parallel to each other, and each has an appropriate length. The two drive members 24 are composed of linear motors and are provided at the upper ends of the columns 22.

梁30は、第1スライド部材31と、第2スライド部材32と、梁本体33と、を有する。第1スライド部材31と第2スライド部材32とは、駆動部材24とそれぞれ連接し、それぞれガイド溝23にスライド可能に設けられており、仮想の第1軸方向xに沿って往復に変位可能である。梁本体33は、ベース本体21の上方に位置し、第1スライド部材31と第2スライド部材32との間に介在し、その両端331,332が、第1フレキシブルメカニズム40と第2フレキシブルメカニズム50とを介して、第1スライド部材31と第2スライド部材32とをブリッジする。これにより、梁30は、第1軸方向xに沿って、ベース20を往復にスライドすることが可能である。   The beam 30 includes a first slide member 31, a second slide member 32, and a beam body 33. The first slide member 31 and the second slide member 32 are respectively connected to the drive member 24 and are slidably provided in the guide grooves 23, respectively, and can be displaced reciprocally along the virtual first axial direction x. is there. The beam main body 33 is located above the base main body 21 and is interposed between the first slide member 31 and the second slide member 32, and both ends 331 and 332 thereof are the first flexible mechanism 40 and the second flexible mechanism 50. And the first slide member 31 and the second slide member 32 are bridged. As a result, the beam 30 can slide back and forth on the base 20 along the first axial direction x.

図2及び図4を参照する。第1フレキシブルメカニズム40は、第1結合部材41と、第2結合部材42と、第1撓み部材43と、を有する。第1結合部材41は開口端を有する。第1結合部材41は、前記開口端が第1スライド部材31に向くように、梁本体33の一端331に固定されている。第2結合部材42は、第1スライド部材31に固定されており、第1結合部材41の前記開口端内に位置する。第1撓み部材43は、弾性を有する板バネである。第1撓み部材43は、その仮想の延び線が第1フレキシブルメカニズム40の回転中心で交差する。第1撓み部材43は、第1結合部材41の前記開口端の内側の壁面と第2結合部材42とをブリッジする。第1撓み部材43の第1軸方向xでの設置密度を増加することにより、第1撓み部材43の第1軸方向xにおける剛性を増加可能である。これにより、第1軸方向xに沿って梁30を往復に直線的に変位するときには、第1撓み部材43の数量が多いため、剛性が高くなり、従来のものによる欠点を解決可能である。   Please refer to FIG. 2 and FIG. The first flexible mechanism 40 includes a first coupling member 41, a second coupling member 42, and a first bending member 43. The first coupling member 41 has an open end. The first coupling member 41 is fixed to one end 331 of the beam main body 33 so that the opening end faces the first slide member 31. The second coupling member 42 is fixed to the first slide member 31 and is located in the open end of the first coupling member 41. The first bending member 43 is an elastic leaf spring. The first flexible member 43 has an imaginary extension line intersecting at the rotation center of the first flexible mechanism 40. The first bending member 43 bridges the wall surface inside the opening end of the first coupling member 41 and the second coupling member 42. By increasing the installation density of the first flexible member 43 in the first axial direction x, the rigidity of the first flexible member 43 in the first axial direction x can be increased. Thereby, when the beam 30 is linearly displaced back and forth along the first axial direction x, since the number of the first bending members 43 is large, the rigidity becomes high, and the drawbacks of the conventional one can be solved.

図2及び図5を参照する。第2フレキシブルメカニズム50は、第3結合部材51と、第4結合部材52と、第3撓み部材53と、を有し、これらが第1フレキシブルメカニズム40の部材に相当するが、更に、第4撓み部材54を有する。第4撓み部材54は、仮想の第2軸方向yに位置する。第4撓み部材54の設置密度を増加することにより、第4撓み部材54の第2軸方向yにおける剛性を増加可能である。   Please refer to FIG. 2 and FIG. The second flexible mechanism 50 has a third coupling member 51, a fourth coupling member 52, and a third bending member 53, which correspond to the members of the first flexible mechanism 40. A deflection member 54 is provided. The fourth bending member 54 is located in the virtual second axial direction y. By increasing the installation density of the fourth bending member 54, the rigidity of the fourth bending member 54 in the second axial direction y can be increased.

上記の構成によれば、第1フレキシブルメカニズム40の第1撓み部材43と第2フレキシブルメカニズム50の第3撓み部材53とにより、第1軸方向xにおける剛性を増加可能である。梁30が外力を受けながら、第1軸方向xに沿って往復に直線的に移動するときに、ヒステリシスが減少されると同時に、第1撓み部材43と第3撓み部材53との自体の弾性により、移動方向以外の方向での剛性が減少される。これにより、図6に示すように、梁30の両端がガイド溝23を同期に移動するときに誤差が発生する場合には、第1フレキシブルメカニズム40と第2フレキシブルメカニズム50とにより、梁30が旋回して変形するときに発生する位置の変化が許容され、当該誤差による不適切な応力の発生を回避可能である。そして外部の制御システムにより、梁30の旋回を制御してもよい。 According to the above configuration, the rigidity in the first axial direction x can be increased by the first bending member 43 of the first flexible mechanism 40 and the third bending member 53 of the second flexible mechanism 50. When the beam 30 linearly moves in a reciprocating manner along the first axial direction x while receiving an external force, the hysteresis is reduced, and at the same time, the elasticity of the first bending member 43 and the third bending member 53 itself. Thus, the rigidity in a direction other than the moving direction is reduced. Accordingly, as shown in FIG. 6, when an error occurs when both ends of the beam 30 move in the guide groove 23 synchronously, the first flexible mechanism 40 and the second flexible mechanism 50 cause the beam 30 to be A change in the position that occurs when turning and deforming is allowed, and generation of inappropriate stress due to the error can be avoided. Then, the turning of the beam 30 may be controlled by an external control system.

梁30が温度による熱膨張により、寸法が変化する場合には、その寸法の伸縮方向が第2軸方向yに対応するため、第2フレキシブルメカニズム50の第4撓み部材54により、梁30の第2軸方向yでの寸法の変化が補償される。   When the dimension of the beam 30 changes due to thermal expansion due to temperature, the expansion / contraction direction of the dimension corresponds to the second axial direction y. Therefore, the fourth bending member 54 of the second flexible mechanism 50 causes the first deformation of the beam 30. The change in dimension in the biaxial direction y is compensated.

上記の効果以外、第1フレキシブルメカニズム40と第2フレキシブルメカニズム50とは、その体積が従来のものより小さく、占めるスペースを減少可能であり、高さが減少する。これにより、移動の中心と、移動力を提供する外部の駆動部材とは、同じ平面に位置するため、余計なトルクを減少可能である。   In addition to the above effects, the first flexible mechanism 40 and the second flexible mechanism 50 have a smaller volume than the conventional one, can occupy less space, and have a reduced height. Thereby, since the center of movement and the external drive member which provides a moving force are located in the same plane, an extra torque can be reduced.

(第2の実施形態)
もちろん、撓み部材の移動方向での剛性を増加するための技術手段は、これらに限定されない。撓み部材の設置を集中し、又は分散することにより、特定の方向での剛性を増加してもよく、異なる剛性を有する撓み部材を組み合わせてもよい。例えば図7に示すように、第2フレキシブルメカニズム50aは、第2軸方向に位置しない第4撓み部材54aを有する。第2軸方向に位置しない第4撓み部材54aの設置の密度は、第2軸方向に位置する第4撓み部材54aの設置の密度より小さい。図8に示す第1フレキシブルメカニズム40aは、更に、第2撓み部材44aを含む。第2撓み部材44aは、第1軸方向に位置せず、第1結合部材41aと第2結合部材42aとをブリッジする。換言すると、撓み部材の移動方向での剛性を増加できれば、撓み部材の数量、形状または構造の変更は、全て本発明の範囲に属する。
(Second Embodiment)
Of course, the technical means for increasing the rigidity in the moving direction of the bending member is not limited to these. By concentrating or distributing the installation of the bending members, the rigidity in a specific direction may be increased, or bending members having different rigidity may be combined. For example, as shown in FIG. 7, the second flexible mechanism 50a has a fourth deflecting member 54a that is not positioned in the second axial direction. The density of installation of the fourth bending member 54a not positioned in the second axial direction is smaller than the density of installation of the fourth bending member 54a positioned in the second axial direction. The first flexible mechanism 40a shown in FIG. 8 further includes a second deflecting member 44a. The second bending member 44a is not positioned in the first axial direction, and bridges the first coupling member 41a and the second coupling member 42a. In other words, as long as the rigidity in the moving direction of the bending member can be increased, all changes in the number, shape, or structure of the bending member belong to the scope of the present invention.

本発明は、ガントリーに適用することができる。 The present invention can be applied to a gantry.

1 ガントリー
2 台座
3 横梁
4 フレキシブルメカニズム
10 ガントリー装置
20 ベース
21 ベース本体
22 柱
23 ガイド溝
24 駆動部材
30 梁
31 第1スライド部材
32 第2スライド部材
33 梁本体
40,40a 第1フレキシブルメカニズム
41,41a 第1結合部材
42,42a 第2結合部材
43 第1撓み部材
44a 第2撓み部材
50,50a 第2フレキシブルメカニズム
51 第3結合部材
52 第4結合部材
53 第3撓み部材
54,54a 第4撓み部材
331,332 端
x 第1軸方向
y 第2軸方向
DESCRIPTION OF SYMBOLS 1 Gantry 2 Base 3 Horizontal beam 4 Flexible mechanism 10 Gantry apparatus 20 Base 21 Base main body 22 Column 23 Guide groove 24 Drive member 30 Beam 31 First slide member 32 Second slide member 33 Beam main body 40, 40a First flexible mechanism 41, 41a First coupling member 42, 42a Second coupling member 43 First deflection member 44a Second deflection member 50, 50a Second flexible mechanism 51 Third coupling member 52 Fourth coupling member 53 Third deflection member 54, 54a Fourth deflection member 331,332 end x first axis direction y second axis direction

Claims (10)

第1結合部材と、
前記第1結合部材との間に距離を有し、第1軸方向に沿って前記第1結合部材に対して相対的に変位可能な第2結合部材と、
前記第1軸方向に位置し、前記第1結合部材と前記第2結合部材とをブリッジし、前記第1結合部材と前記第2結合部材とが相対的に変位すると変形する第1撓み部材と、
前記第1軸方向に位置せず、前記第1結合部材と前記第2結合部材とをブリッジする第2撓み部材と、
を含むフレキシブルメカニズムにおいて、
前記第1撓み部材は、その剛性が前記第2撓み部材の剛性より大きいため、前記第1軸方向での変形抵抗能力を増加可能であることを特徴とするフレキシブルメカニズム。
A first coupling member;
A second coupling member having a distance between the first coupling member and being displaceable relative to the first coupling member along a first axial direction;
A first bending member that is located in the first axial direction, bridges the first coupling member and the second coupling member, and is deformed when the first coupling member and the second coupling member are relatively displaced; ,
A second bending member that is not positioned in the first axial direction and bridges the first coupling member and the second coupling member;
In a flexible mechanism including
The first flexible member has a rigidity higher than that of the second flexible member, so that the deformation resistance capability in the first axial direction can be increased.
前記第1結合部材は開口端を有し、前記第2結合部材は、前記第1結合部材の前記開口端内に位置し、前記第1撓み部材と前記第2撓み部材とは、前記第1結合部材の前記開口端内と前記第2結合部材との間に介在することを特徴とする、請求項1に記載のフレキシブルメカニズム。   The first coupling member has an opening end, the second coupling member is located in the opening end of the first coupling member, and the first bending member and the second bending member are the first The flexible mechanism according to claim 1, wherein the flexible mechanism is interposed between the opening end of the coupling member and the second coupling member. 前記第1撓み部材と前記第2撓み部材とは、それぞれ板バネであることを特徴とする、請求項1又は2に記載のフレキシブルメカニズム。   The flexible mechanism according to claim 1, wherein each of the first bending member and the second bending member is a leaf spring. 前記第1結合部材と前記第2結合部材とは、第2軸方向に沿って相対的に変位可能であり、前記第2軸方向に位置する前記第2撓み部材の剛性が、前記第2軸方向に位置しない前記第2撓み部材の剛性より大きいことを特徴とする、請求項1に記載のフレキシブルメカニズム。   The first coupling member and the second coupling member are relatively displaceable along the second axis direction, and the rigidity of the second bending member located in the second axis direction is the second axis. The flexible mechanism according to claim 1, wherein the flexible mechanism is larger than a rigidity of the second deflecting member not positioned in a direction. 前記第1撓み部材と前記第2撓み部材とは、その厚さが異なることを特徴とする、請求項1に記載のフレキシブルメカニズム。   The flexible mechanism according to claim 1, wherein the first flexible member and the second flexible member have different thicknesses. ベース本体と、二つの柱と、二つのガイド溝と、二つの駆動部材と、を有し、二つの前記柱は、前記ベース本体の上面の両端にそれぞれ固定されており、二つの前記ガイド溝は、互いに平行するように前記ベース本体の上面に設けられており、二つの前記駆動部材は、前記柱の上端にそれぞれ設けられているベースと、
二つのスライド部材と、梁本体と、を有し、前記スライド部材は、それぞれ前記ガイド溝にスライド可能に設けられており、前記駆動部材とそれぞれ連接し、前記第1軸方向に沿って往復に変位可能であり、前記梁本体は、前記ベース本体の上方に位置し、二つの前記スライド部材の間に介在する梁と、
第1結合部材と、第2結合部材と、第1撓み部材と、第2撓み部材と、を有し、前記第1結合部材と前記第2結合部材とは、相対的に変位可能であるようにそれぞれ前記梁に設けられており、前記第1撓み部材は、前記第1軸方向に位置し、前記第1結合部材と前記第2結合部材とをブリッジし、前記第1結合部材と前記第2結合部材とが前記梁に駆動されて相対的に移動するときに、前記第1撓み部材が変形する第1フレキシブルメカニズムと、
を含むガントリー装置において、
前記第1撓み部材は、その剛性が前記第2撓み部材の剛性より大きいため、第1軸方向での変形抵抗能力を増加可能であることを特徴とするガントリー装置。
A base body, two pillars, two guide grooves, and two drive members, the two pillars being respectively fixed to both ends of the upper surface of the base body, and the two guide grooves Are provided on the upper surface of the base body so as to be parallel to each other, and the two drive members are respectively provided on the upper ends of the pillars,
Two slide members and a beam main body, and each of the slide members is slidably provided in the guide groove, is connected to the drive member, and reciprocates along the first axial direction. The beam body is positioned above the base body and interposed between the two slide members;
A first coupling member; a second coupling member; a first deflection member; and a second deflection member, wherein the first coupling member and the second coupling member are relatively displaceable. And the first flexible member is positioned in the first axial direction, bridges the first coupling member and the second coupling member, and the first coupling member and the first coupling member. A first flexible mechanism in which the first flexible member is deformed when the two connecting members move relative to each other when driven by the beam;
In a gantry apparatus including
The first deflecting member has a rigidity higher than that of the second deflecting member, so that the deformation resistance capability in the first axial direction can be increased.
更に、第2フレキシブルメカニズムを含み、前記第1フレキシブルメカニズムと前記第2フレキシブルメカニズムとは、前記梁の両端にそれぞれ設けられており、前記第2フレキシブルメカニズムは、第3結合部材と、第4結合部材と、第3撓み部材と、第4撓み部材と、を有し、前記第3結合部材と前記第4結合部材とは、相対的に変位可能であるように前記梁に設けられており、前記第3撓み部材は、前記第1軸方向に位置し、前記第3結合部材と前記第4結合部材とをブリッジし、前記第4撓み部材は、前記第1軸方向に位置せず、前記第3結合部材と前記第4結合部材とをブリッジし、前記第3結合部材と前記第4結合部材とが前記梁に駆動されて相対的に移動するときに、前記第3撓み部材が変形し、
前記第3撓み部材は、その剛性が前記第4撓み部材の剛性より大きいため、前記第1軸方向での変形抵抗能力を増加可能であることを特徴とする、請求項6に記載のガントリー装置。
In addition, a second flexible mechanism is included, and the first flexible mechanism and the second flexible mechanism are respectively provided at both ends of the beam, and the second flexible mechanism includes a third coupling member and a fourth coupling mechanism. A member, a third bending member, and a fourth bending member, wherein the third coupling member and the fourth coupling member are provided on the beam so as to be relatively displaceable, The third bending member is located in the first axial direction, bridges the third coupling member and the fourth coupling member, and the fourth bending member is not located in the first axial direction, When the third coupling member and the fourth coupling member are bridged, and the third coupling member and the fourth coupling member are driven relative to each other by the beam, the third bending member is deformed. ,
The gantry apparatus according to claim 6, wherein the third bending member has a rigidity larger than that of the fourth bending member, so that the deformation resistance capability in the first axial direction can be increased. .
前記第1結合部材と前記第3結合部材とは、それぞれ前記梁本体の両端に設けられており、前記第2結合部材と前記第4結合部材とは、それぞれ前記各スライド部材に貼り付けるように設けられていることを特徴とする、請求項7に記載のガントリー装置。   The first coupling member and the third coupling member are provided at both ends of the beam body, respectively, and the second coupling member and the fourth coupling member are respectively attached to the slide members. The gantry device according to claim 7, wherein the gantry device is provided. 前記第1フレキシブルメカニズムの前記第1結合部材と前記第2結合部材とは、更に、第2軸方向に沿って相対的に変位可能であり、前記第2フレキシブルメカニズムの前記第3結合部材と前記第4結合部材とは、更に、前記第2軸方向に沿って相対的に変位可能であり、前記第1フレキシブルメカニズムの前記第2軸方向に位置する前記第2撓み部材と前記第2フレキシブルメカニズムの前記第2軸方向に位置する前記第4撓み部材とは、その剛性が異なることを特徴とする、請求項7に記載のガントリー装置。   The first coupling member and the second coupling member of the first flexible mechanism are further displaceable relatively along a second axial direction, and the third coupling member of the second flexible mechanism and the The fourth coupling member is further displaceable relatively along the second axial direction, and the second flexible member and the second flexible mechanism located in the second axial direction of the first flexible mechanism. The gantry apparatus according to claim 7, wherein the fourth deflecting member positioned in the second axial direction of the gantry is different in rigidity. 前記第1結合部材は開口端を有し、前記第2結合部材は前記第1結合部材の前記開口端内に位置し、前記第1撓み部材と前記第2撓み部材とは、前記第1結合部材の前記開口端内と前記第2結合部材との間に介在し、
前記第3結合部材は開口端を有し、前記第4結合部材は前記第3結合部材の前記開口端内に位置し、前記第3撓み部材と前記第4撓み部材とは、前記第3結合部材の前記開口端内と前記第4結合部材との間に介在することを特徴とする、請求項7に記載のガントリー装置。
The first coupling member has an opening end, the second coupling member is located in the opening end of the first coupling member, and the first bending member and the second bending member are connected to the first coupling member. Interposed between the open end of the member and the second coupling member;
The third coupling member has an opening end, the fourth coupling member is located in the opening end of the third coupling member, and the third bending member and the fourth bending member are connected to the third coupling member. The gantry device according to claim 7, wherein the gantry device is interposed between the opening end of the member and the fourth coupling member.
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CN114393417A (en) * 2022-01-24 2022-04-26 江苏新恒基特种装备股份有限公司 Displacement absorption assembly
CN115402015A (en) * 2022-10-31 2022-11-29 广东工业大学 Flexible connection joint system for self-eliminating thermal distortion of gantry system

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CN114393417A (en) * 2022-01-24 2022-04-26 江苏新恒基特种装备股份有限公司 Displacement absorption assembly
CN115402015A (en) * 2022-10-31 2022-11-29 广东工业大学 Flexible connection joint system for self-eliminating thermal distortion of gantry system

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