TW201739563A - Compliant mechanism and gantry with the compliant mechanism - Google Patents

Compliant mechanism and gantry with the compliant mechanism Download PDF

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TW201739563A
TW201739563A TW105114226A TW105114226A TW201739563A TW 201739563 A TW201739563 A TW 201739563A TW 105114226 A TW105114226 A TW 105114226A TW 105114226 A TW105114226 A TW 105114226A TW 201739563 A TW201739563 A TW 201739563A
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flexible
coupling member
axial direction
joint
coupling
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TW105114226A
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TWI562852B (en
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何長政
陳宜文
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大銀微系統股份有限公司
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Abstract

This present invention provides a compliant mechanism and a gantry with the compliant mechanism. The compliant mechanism can provide compensation to spatial position errors resulted from motion error or deformation of the gantry beam and the compliant component can enhance the rigidity to where opposite to the motion axis of the gantry beam applied by an external force. Therefore, the compliant mechanism of this present invention can prevent the gantry beam from delaying while working.

Description

撓性機構及含有該撓性機構之龍門裝置 Flexible mechanism and gantry device including the same

本發明係與運動台座有關,特別是關於一種撓性機構及含有該撓性機構之龍門裝置。 The present invention relates to a sports pedestal, and more particularly to a flexible mechanism and a gantry device incorporating the same.

囿於結構剛性、製造、組裝以及控制技術上之限制,運動台座於運動時所產生之幾何誤差或空間面誤差是難以避免的,而為了降低位置誤差對於移動之影響,於習知技術中已有藉由不同之技術手段達成誤差補償之機制存在,其除有藉由雷射干涉儀等技術進行運動路徑之校準,降低或消弭誤差之發生程度外,亦有藉由緩衝或變形之技術,避免運動誤差發生時對於運動台座所造成不當力矩或消除其應力者。 Due to structural rigidity, manufacturing, assembly, and control technology limitations, geometric errors or spatial surface errors caused by motion pedestals during movement are difficult to avoid, and in order to reduce the impact of positional errors on movement, it has been known in the prior art. There are mechanisms for achieving error compensation by different technical means. In addition to the calibration of the motion path by techniques such as laser interferometer, the degree of error is reduced or eliminated, and there is also a technique of buffering or deformation. Avoid improper torque or eliminate stress on the moving pedestal when motion errors occur.

具體地,如第一圖所示習知技術所提供之龍門裝置(1)中,其係於跨置於台座(2)之橫樑(3)一側設置容許變形之撓性機構(4),據此,當橫樑(3)兩端與台座(2)間之相對運動產生誤差時,該撓性機構(4)係可容許同動誤差下所造成橫樑(3)位置角度之變化,避免對橫樑(3)造成不當之應力;此等藉由削減撓性機構(4)自身剛性之技術手段所達成之變形容許功效,固可達成其預期之目的,惟亦將因撓性機構(4)之低剛性造成橫樑(3)在運動時之遲滯現象,尚非屬良善之設計。 Specifically, the gantry device (1) provided by the prior art shown in the first figure is provided with a flexible mechanism (4) for allowing deformation to be placed on the side of the beam (3) of the pedestal (2). According to this, when the relative movement between the two ends of the beam (3) and the pedestal (2) causes an error, the flexible mechanism (4) can allow the change of the position angle of the beam (3) caused by the co-moving error, avoiding The beam (3) causes undue stress; these deformation tolerances achieved by the technical means of reducing the rigidity of the flexible mechanism (4) can achieve its intended purpose, but also due to the flexible mechanism (4) The low rigidity causes the hysteresis of the beam (3) during movement, which is not a good design.

因此,本發明之主要目的乃係在提供一種高軸向剛性之撓性機構及含有該撓性機構之龍門裝置,其中,撓性機構係以之變形補償龍門橫樑位置之誤差,並使該撓性機構在對應於橫樑運動之一運動軸向上具有較高之剛性,避免因撓性機構之剛性不足造成運動遲滯或重現誤差之缺失。 Accordingly, the main object of the present invention is to provide a high axial rigidity flexible mechanism and a gantry device including the same, wherein the flexible mechanism compensates for the error of the position of the gantry beam and makes the The mechanism has a high rigidity in the axial direction corresponding to one of the beam movements, avoiding the lack of motion hysteresis or the recurring error due to insufficient rigidity of the flexible mechanism.

緣是,為達成上述之目的,本發明所提供之撓性機構,係以多數之可撓件提供變形,並使該些可撓件在對應於該運動軸向上具有較高之剛性者。 The reason is that, in order to achieve the above object, the flexible mechanism provided by the present invention provides deformation by a plurality of flexible members and makes the flexible members have higher rigidity in the axial direction corresponding to the movement.

而所稱該些可撓件於該運動軸向上所具有之較高剛性,乃指對應位於該運動軸向上之可撓件剛性,高於該運動軸向以外之可撓件之剛性。 The higher rigidity of the flexible members in the axial direction of the movement refers to the rigidity of the flexible member corresponding to the movement axis, and the rigidity of the flexible member other than the movement axis.

其中,用以使位於該運動軸向上之可撓件剛性提高之技術手段者,係可將具有相同剛性之該些可撓件,透過設置密度或角度上之改變,使其於不同之方向上具有不同之剛性,或亦可將具有不同剛性之相異可撓件,分別設置,以提高特定方向上之剛性。 Wherein, the technical means for improving the rigidity of the flexible member located in the axial direction of the movement can change the flexible members having the same rigidity through different density or angles to make them in different directions. Different rigidity, or different flexible members with different rigidity can be separately set to improve the rigidity in a specific direction.

於具體之技術內容上,該撓性機構乃係包含有一第一結合件;一第二結合件,係與該第一結合件相隔開來,其彼此間並可於一第一軸向上相對位移;第一可撓件,位於第一軸向上而橋設於該第一結合件與該第二結合件之間,並可隨該第一結合件與該第二結合件間彼此間之相對位移而變形;以及一第二可撓件,位非該第一軸向上而橋設於該第一結合件與該第二結合件之間。而藉由上述構件之組合,係使該第一可撓件之剛性係大於該第二可撓件之剛性,用以提高該第一可撓件於該第一軸向上之抗變形能力。 In a specific technical content, the flexible mechanism includes a first coupling member; a second coupling member is spaced apart from the first coupling member and is relatively displaceable relative to each other in a first axial direction. a first flexible member, located in the first axial direction and bridged between the first coupling member and the second coupling member, and capable of being displaced relative to each other between the first coupling member and the second coupling member And deforming; and a second flexible member disposed between the first coupling member and the second coupling member in the first axial direction. By the combination of the above components, the rigidity of the first flexible member is greater than the rigidity of the second flexible member for improving the deformation resistance of the first flexible member in the first axial direction.

其中,該第一結合件係具有一開口端,該第二結合件則位於該第一結合件之開口端中,並使該第一及第二可撓件介於該第一結合件之開口端內與該第二結合件間。 The first coupling member has an open end, and the second coupling member is located in the open end of the first coupling member, and the first and second flexible members are interposed between the openings of the first coupling member. Between the end and the second coupling member.

其中,該第一可撓件之設置密度係大於該第二可撓件之設置密度。 The setting density of the first flexible member is greater than the setting density of the second flexible member.

其中,該第一及第二可撓件係分別為板狀簧片。 Wherein, the first and second flexible members are respectively plate-shaped reeds.

其中,該第一結合件與該第二結合件彼此間更可於一第二軸向上相對位移,且使位於該第二軸向上之對應第二可撓件之剛性,大於非位於該第二軸向上之對應第二可撓件之剛性。 The first coupling member and the second coupling member are relatively displaceable relative to each other in a second axial direction, and the rigidity of the corresponding second flexible member located in the second axial direction is greater than that of the second coupling member. The axial direction corresponds to the rigidity of the second flexible member.

其中,該第一及第二可撓件係分別具有不同厚度。 Wherein, the first and second flexible members respectively have different thicknesses.

進一步地,本發明所揭撓性機構係能與龍門裝置結合。具體來說,龍門裝置係包含有一第一撓性機構,而該第一撓性機構乃係使該第一結合件與該第二結合件係可彼此相對位移地分設於該龍門裝置之一樑上,從而得在該第一結合件與該第二結合件受該樑之帶動而產生相對運動時,使該些可撓件產生變形。 Further, the flexible mechanism disclosed in the present invention can be combined with a gantry device. Specifically, the gantry device includes a first flexible mechanism, and the first flexible mechanism is configured to displace the first coupling member and the second coupling member relative to each other in one of the gantry devices. The beam is deformed such that the first coupling member and the second coupling member are moved by the beam to cause relative movement.

而為因應該樑之空間位置變化,龍門裝置得更包含一第二撓性機構,與該第一撓性機構分設於該樑上。該第二撓性機構具有一第三結合件;一第四結合件,係與該第三結合件相隔開來,其彼此間並可於一第一軸向上相對位移;第三可撓件,位於第一軸向上而橋設於該第三結合件與該第四結合件之間,並可隨該第三結合件與該第四結合件間彼此間之相對位移而變形;以及一第四可撓件,位非該第一軸向上而橋設於該第三結合件與該第四結合件之間。而藉由上述構件之組合,係使該第三可撓件之 剛性係大於該第四可撓件之剛性,用以提高該第三可撓件於該第一軸向上之抗變形能力。 In order to change the spatial position of the beam, the gantry device further includes a second flexible mechanism, and the first flexible mechanism is disposed on the beam. The second flexible mechanism has a third coupling member; a fourth coupling member is spaced apart from the third coupling member and is relatively displaceable relative to each other in a first axial direction; the third flexible member, Located in the first axial direction and bridged between the third joint member and the fourth joint member, and deformable according to relative displacement between the third joint member and the fourth joint member; and a fourth The flexible member is disposed between the third coupling member and the fourth coupling member instead of the first axial direction. And by the combination of the above components, the third flexible member is The rigidity is greater than the rigidity of the fourth flexible member for improving the deformation resistance of the third flexible member in the first axial direction.

其中,該第一結合件及該第三結合件係分別固設於該樑身兩端,並且,該第二結合件及該第四結合件係分別貼設於各該滑接件上。 The first joint member and the third joint member are respectively fixed on the two ends of the beam body, and the second joint member and the fourth joint member are respectively attached to the sliding joint members.

其中,該第一撓性機構之該第一結合件與該第二結合件彼此間更可於一第二軸向上相對位移,並該第二撓性機構之該第三結合件與該第四結合件彼此間更可於一第二軸向上相對位移,且使該第一撓性機構在位於該第二軸向上之對應第二可撓件與該第二撓性機構在位於該第二軸向上之對應第四可撓件,彼此之剛性不相等。藉此使該第一及第二撓性機構在不同之方向上具有不同之剛性,以適度地因應該樑在不同方向上之位置誤差變化,具體因應該樑在一平面上運動時因同動誤差所生之旋轉及伸縮,或於熱脹冷縮下所生之變形等造成之空間位置變化。 The first coupling member and the second coupling member of the first flexible mechanism are relatively displaceable relative to each other in a second axial direction, and the third coupling member and the fourth coupling member of the second flexible mechanism The coupling members are further displaceable relative to each other in a second axial direction, and the first flexible mechanism is located on the second axis in the second axial direction corresponding to the second flexible member and the second flexible mechanism The upper corresponding fourth flexible members are not equal in rigidity to each other. Thereby, the first and second flexible mechanisms have different rigidity in different directions, so as to appropriately change the position error of the beam in different directions, specifically because the beam moves in a plane due to the same motion The positional change caused by the rotation and expansion of the error, or the deformation caused by thermal expansion and contraction.

其中,該第三結合件係具有一開口端,該第四結合件係位於該第三結合件之開口端中,並使該第三及第四可撓件介於該第三結合件之開口端內與該第四結合件間。 The third coupling member has an open end, and the fourth coupling member is located in the open end of the third coupling member, and the third and fourth flexible members are interposed between the openings of the third coupling member. Between the end and the fourth coupling member.

(1)‧‧‧龍門 (1)‧‧‧Longmen

(2)‧‧‧台座 (2) ‧ ‧ pedestal

(3)‧‧‧橫樑 (3)‧‧‧ beams

(4)‧‧‧撓性機構 (4) ‧‧‧Flexible institutions

(10)‧‧‧龍門裝置 (10)‧‧‧Longmen installation

(20)‧‧‧座 (20) ‧‧‧

(21)‧‧‧座身 (21) ‧ ‧ ‧ body

(22)‧‧‧立柱 (22)‧‧‧ Column

(23)‧‧‧導槽 (23) ‧ ‧ guide slots

(24)‧‧‧驅動件 (24)‧‧‧ Drives

(30)‧‧‧樑 (30) ‧‧ ‧ beams

(31)‧‧‧第一滑接件 (31)‧‧‧First sliding joint

(32)‧‧‧第二滑接件 (32)‧‧‧Second sliding parts

(33)‧‧‧樑身 (33) ‧‧‧ beam body

(331)(332)‧‧‧端 (331) (332) ‧‧‧

(40)(40a)‧‧‧第一撓性機構 (40) (40a) ‧‧‧First flexible mechanism

(41)(41a)‧‧‧第一結合件 (41) (41a) ‧ ‧ first joint

(42)(42a)‧‧‧第二結合件 (42) (42a) ‧ ‧ second joint

(43)‧‧‧第一可撓件 (43) ‧‧‧First flexible parts

(44a)‧‧‧第二可撓件 (44a)‧‧‧Second flexible parts

(50)(50a)‧‧‧第二撓性機構 (50) (50a) ‧‧‧Second flexible mechanism

(51)‧‧‧第三結合件 (51)‧‧‧ Third joint

(52)‧‧‧第四結合件 (52) ‧ ‧ fourth joint

(53)‧‧‧第三可撓件 (53) ‧‧‧ Third flexible parts

(54)(54a)‧‧‧第四可撓件 (54) (54a) ‧‧‧Fourth flexible parts

(x)‧‧‧第一軸向 (x)‧‧‧first axial

(y)‧‧‧第二軸向 (y) ‧‧‧second axial

第一圖係一現有龍門裝置之立體示意圖。 The first figure is a perspective view of a conventional gantry device.

第二圖係本發明實施例之龍門裝置之立體圖。 The second drawing is a perspective view of the gantry device of the embodiment of the present invention.

第三圖係本發明實施例之龍門裝置之正視圖。 The third figure is a front view of the gantry apparatus of the embodiment of the present invention.

第四圖係本發明實施例之第一撓性機構之示意圖。 The fourth figure is a schematic view of the first flexible mechanism of the embodiment of the present invention.

第五圖係本發明實施例之第二撓性機構之示意圖。 The fifth drawing is a schematic view of a second flexible mechanism of an embodiment of the present invention.

第六圖係本發明實施例之龍門裝置之頂視圖。 Figure 6 is a top plan view of the gantry apparatus of the embodiment of the present invention.

第七圖係本發明另一實施例之第二撓性機構平面圖。 Figure 7 is a plan view of a second flexible mechanism in accordance with another embodiment of the present invention.

第八圖係本發明另一實施例之第一撓性機構平面圖。 Figure 8 is a plan view of a first flexible mechanism of another embodiment of the present invention.

首先,請參閱第二及三圖所示,在本發明一實施例中所提供龍門裝置(10)者,其主要乃係包含有一座(20)、一樑(30)、第一撓性機構(40)及第二撓性機構(50)。 First, please refer to the second and third figures. In the embodiment of the present invention, the gantry device (10) is mainly provided with a (20), a beam (30), and a first flexible mechanism. (40) and a second flexible mechanism (50).

座(20)係具有座身(21),二立柱(22)係分別固設於該座身上側座面之二端上,二相隔開來之導槽(23)係分設於座身(21)之上側座面上,且彼此平行地沿一直線各自延伸適當之長度,二由線性馬達所組成之驅動件(24),係分別設於該立柱(22)頂端。 The seat (20) has a seat body (21), and the two upright columns (22) are respectively fixed on the two ends of the side seat surface of the seat body, and the two spaced guide grooves (23) are respectively arranged on the seat body ( 21) The upper side seating surface, and extending parallel to each other along a straight line, and a driving member (24) composed of a linear motor is respectively disposed at the top end of the vertical column (22).

樑(30)具有第一及第二滑接件(31)(32),係分別連接各該驅動件(24)而得滑設於各導槽(23)中,並可受各導槽(23)之導引,沿著一虛擬之第一軸向(x),直線地進行往復位移,一樑身(33),係位於座身(21)上方,而介於第一及第二滑接件(31)(32)之間,並其兩端(331)(332)分別藉由第一及第二撓性機構(40)(50)之搭接,間接地橋接於第一及第二滑接件(31)(32)之間,從而使樑(30)滑設於座(20)上,使之得沿第一軸向(x)進行直線之往復位移。 The beam (30) has first and second sliding members (31) (32) which are respectively connected to the driving members (24) and are slidably disposed in the guiding grooves (23) and can be guided by the guiding grooves (23) 23) guiding, reciprocating linearly along a virtual first axial direction (x), a beam body (33), located above the seat body (21), and between the first and second slides Between the connectors (31) and (32), and the two ends (331) (332) are indirectly bridged between the first and the second by the overlapping of the first and second flexible mechanisms (40) (50) Between the two sliding members (31) (32), the beam (30) is slidably disposed on the seat (20) so as to be linearly reciprocally displaced along the first axial direction (x).

併請參閱第二圖及第四圖所示,第一撓性機構(40)具有第一結合件(41)、第二結合件(42)及第一可撓件(43)。第一結合件(41)係具有一開口端,而以開口端朝第一滑接件(31)之方向貼接固設於樑身(33)之一端(331)上。第二結合件(42)係貼接固設於第一滑接件(31)上,並位於第一結合件(41)之開口端中。第一可撓件(43)係分別為具有彈性之板狀簧片,並且,第一可 撓件(43)之長軸向外延伸後,彼此會交集於第一撓性機構(40)之旋轉中心。而第一可撓件(43)係橋接於第一結合件(41)開口端之內側壁面與第二結合件(42)間,並增加第一可撓件(43)位於第一軸向(x)上之設置密度,以提高第一可撓件(43)於第一軸向(x)上之剛性。藉此,當樑(30)沿著第一軸向(x)進行直線往復位移時,設置數量相對較多之第一可撓件(43)乃得以提供較高之剛性,以避免習知缺失之發生。 Referring to the second and fourth figures, the first flexible mechanism (40) has a first coupling member (41), a second coupling member (42) and a first flexible member (43). The first coupling member (41) has an open end and is fixedly attached to one end (331) of the beam body (33) with the open end facing the first sliding member (31). The second coupling member (42) is fixedly attached to the first sliding member (31) and located in the open end of the first coupling member (41). The first flexible member (43) is respectively a plate-shaped reed having elasticity, and the first After the long axial extension of the flexures (43), they will intersect each other at the center of rotation of the first flexible mechanism (40). The first flexible member (43) is bridged between the inner side wall surface of the open end of the first joint member (41) and the second joint member (42), and increases the first flexible member (43) in the first axial direction ( The density is set on x) to increase the rigidity of the first flexible member (43) in the first axial direction (x). Thereby, when the beam (30) is linearly reciprocally displaced along the first axial direction (x), the relatively large number of first flexible members (43) are provided to provide higher rigidity to avoid the conventional missing It happened.

再請參閱第二圖與第五圖所示,第二撓性機構(50)所具有之第三結合件(51)、第四結合件(52)與第三可撓件(53)等相同於第一撓性機構(40)之構件外,其係有別於第一撓性機構(40)地進一步增加第四可撓件(54),其係位於另一虛擬之第二軸向(y)上。透過增加第四可撓件(54)之設置密度係能提高第四可撓件(54)位於第二軸向(y)上之剛性。 Referring to the second and fifth figures, the second coupling member (51) and the fourth coupling member (52) of the second flexible mechanism (50) are the same as the third flexible member (53). The fourth flexible member (54) is further added to the second flexible mechanism (40) in addition to the first flexible mechanism (40), which is located in the other virtual second axial direction ( y). The rigidity of the fourth flexible member (54) in the second axial direction (y) can be increased by increasing the density of the fourth flexible member (54).

藉由上述構件之組成,龍門裝置(10)於使用上,係可藉由第一及第二撓性機構(40)(50)中的第一及第三可撓件(43)(53)提高第一軸向(x)上可撓件之剛性,使樑(30)在受外力而沿第一軸向(x)進行往復之直線運動時,得使其遲滯之現象獲得改善,同時,透過第一及第二可撓件(43)(53)自身之彈性,以減弱其在非運動軸向上之剛性,而可如第六圖所示般,當樑(30)兩端於各導槽(23)中之同動產生誤差時,第一及第二撓性機構(40)(50)係可容許產生樑(30)於旋轉變形下所產生之位置變化,以免樑(30)兩端之同動誤差產生不當應力,同時,亦可透過外部之控制系統來對樑(30)進行旋轉控制。 By means of the above-mentioned components, the gantry device (10) can be used by the first and third flexible members (43) (53) of the first and second flexible mechanisms (40) (50). Increasing the rigidity of the flexible member in the first axial direction (x), so that the beam (30) is improved in the linear motion of the reciprocating motion in the first axial direction (x) by an external force, and at the same time, the phenomenon of hysteresis is improved. Through the elasticity of the first and second flexible members (43) (53) themselves to weaken their rigidity in the non-moving axial direction, as shown in the sixth figure, when the beam (30) is at both ends When the same motion in the slot (23) causes an error, the first and second flexible mechanisms (40) (50) are allowed to generate a positional change of the beam (30) under rotational deformation, so as to avoid the beam (30) The co-rotation error of the end generates an improper stress, and the beam (30) can also be rotated and controlled by an external control system.

此外,當樑(30)受溫度之作用產生熱脹冷縮之尺寸變化時,其尺寸變化之伸縮方向係與第二軸向(y)相仿,此際,則可藉由第二撓性機構(40)之第四可撓件(54),提供對應於第二軸向(y)上之變形,以補償樑(30) 之尺寸變化。 In addition, when the beam (30) is subjected to the dimensional change of the thermal expansion and contraction due to the temperature, the dimensional change of the beam is similar to the second axial direction (y), and the second flexible mechanism can be used. a fourth flexible member (54) of (40) providing a deformation corresponding to the second axial direction (y) to compensate the beam (30) The size changes.

除上述具體之功效外,第一及第二撓性機構(40)(50)相對於習知技術而言係具有更小之體積,除不占空間外,亦可避免增加高度,而得使運動中心與用以提供位移動力之外部驅動元件位於同一水平面上,以減少多餘力矩之產生。 In addition to the specific effects described above, the first and second flexible mechanisms (40) (50) have a smaller volume than the prior art, and in addition to occupying no space, it is also possible to avoid increasing the height, and The motion center is on the same level as the external drive components used to provide displacement power to reduce the generation of excess torque.

再者,用以增加可撓件於運動軸向上剛性之技術手段,亦不僅以上揭實施例所揭者為限,亦即除可透過可撓件集中或分散之設置密度改變,以增加特定方向上之剛性外,亦可將具有不同剛性之相異可撓件加以組合配置以達成者,例如第七圖所示第二撓性機構(50a),具有位於非第二軸向上之第四可撓件(54a),其設置密度係小於位於第二軸向上之第四可撓件(54a);又如第八圖所示第一撓性機構(40a)之另一實施態樣,第一撓性機構(40a)更包含第二可撓件(44a),位於非第一軸向上而橋設於該第一結合件(41a)與該第二結合件(42a)之間。換言之,無論係藉由數量上之改變、物品形狀或構造上之改變,凡得以達到提高運動軸向上之可撓件之剛性者,均屬本發明所應受保護之範躊。 Furthermore, the technical means for increasing the rigidity of the flexible member in the axial direction of the movement is not limited to the above-mentioned embodiments, that is, the density of the setting can be increased by the concentration or dispersion of the flexible member to increase the specific direction. In addition to the rigidity, the dissimilar flexible members having different rigidity may be combined to achieve the same. For example, the second flexible mechanism (50a) shown in FIG. 7 has the fourth non-second axial direction. The flexible member (54a) has a lower density than the fourth flexible member (54a) located in the second axial direction; and another embodiment of the first flexible mechanism (40a) as shown in the eighth embodiment, the first The flexible mechanism (40a) further includes a second flexible member (44a) disposed in the non-first axial direction and bridged between the first coupling member (41a) and the second coupling member (42a). In other words, regardless of the change in quantity, the shape or the structural change of the article, any increase in the rigidity of the flexible member in the axial direction of the motion is a form of protection of the present invention.

(10)‧‧‧龍門裝置 (10)‧‧‧Longmen installation

(20)‧‧‧座 (20) ‧‧‧

(21)‧‧‧座身 (21) ‧ ‧ ‧ body

(22)‧‧‧立柱 (22)‧‧‧ Column

(23)‧‧‧導槽 (23) ‧ ‧ guide slots

(24)‧‧‧驅動件 (24)‧‧‧ Drives

(30)‧‧‧樑 (30) ‧‧ ‧ beams

(31)‧‧‧第一滑接件 (31)‧‧‧First sliding joint

(32)‧‧‧第二滑接件 (32)‧‧‧Second sliding parts

(33)‧‧‧樑身 (33) ‧‧‧ beam body

(331)(332)‧‧‧端 (331) (332) ‧‧‧

(40)‧‧‧第一撓性機構 (40) ‧‧‧First flexible mechanism

(50)‧‧‧第二撓性機構 (50) ‧‧‧Second flexible mechanism

(x)‧‧‧第一軸向 (x)‧‧‧first axial

Claims (10)

一種撓性機構,包含有:一第一結合件;一第二結合件,係與該第一結合件相隔開來,其彼此間並可於一第一軸向上相對位移;一第一可撓件,位於該第一軸向上而橋設於該第一結合件與該第二結合件之間,並可隨該第一結合件與該第二元件間彼此間之相對位移而變形;以及一第二可撓件,位非該第一軸向上而橋設於該第一結合件與該第二結合件之間;其特徵在於:該第一可撓件之剛性係大於該第二可撓件之剛性,用以提高該第一可撓件於該第一軸向上之抗變形能力。 A flexible mechanism includes: a first coupling member; a second coupling member spaced apart from the first coupling member, and mutually displaceable relative to each other in a first axial direction; a first flexible a member, located in the first axial direction and bridged between the first joint member and the second joint member, and deformable according to relative displacement between the first joint member and the second member; and The second flexible member is disposed between the first coupling member and the second coupling member instead of the first axial direction; and the first flexible member has a rigidity greater than the second flexible portion The rigidity of the piece is used to improve the deformation resistance of the first flexible member in the first axial direction. 依據申請專利範圍第1項所述之撓性機構,其中,該第一結合件係具有一開口端,該第二結合件則位於該第一結合件之開口端中,並使該第一及第二可撓件介於該第一結合件之開口端內與該第二結合件間。 The flexible mechanism of claim 1, wherein the first coupling member has an open end, and the second coupling member is located in the open end of the first coupling member, and the first The second flexible member is interposed between the open end of the first coupling member and the second coupling member. 依據申請專利範圍第1或2項所述之撓性機構,其中,該第一及第二可撓件係分別為板狀簧片。 The flexible mechanism of claim 1 or 2, wherein the first and second flexible members are respectively plate-shaped reeds. 依據申請專利範圍第1項所述之撓性機構,其中,該第一結合件與該第二結合件彼此間更可於一第二軸向上相對位移,且使位於該第二軸向上之對應第二可撓件之剛性,大於非位於該第二軸向上之對應第二可撓件之剛性。 The flexible mechanism of claim 1, wherein the first coupling member and the second coupling member are relatively displaceable relative to each other in a second axial direction, and the corresponding position is located in the second axial direction. The rigidity of the second flexible member is greater than the rigidity of the corresponding second flexible member that is not located in the second axial direction. 依據申請專利範圍第1項所述之撓性機構,其中,該第一及第二可撓件係分別具有不同厚度。 The flexible mechanism of claim 1, wherein the first and second flexible members each have a different thickness. 一種龍門裝置,包含有:一座,具有一座身、二立柱、二導槽及二驅動件,其中,該二立柱係分別固設於該座身上側座面之二端上;該二導槽係彼此平行地分設於該座身之上側座面上;以及該二驅動件係分別設於該立柱頂端;一樑,具有二滑接件及一樑身,其中,各該滑接件分別滑設於各該導槽中,並分別連接各該驅動件,以沿一第一軸向進行往復位移;該樑身係位於該座身上方而介於該二滑接件之間;以及一第一撓性機構,具有一第一結合件、一第二結合件、一第一可撓件及一第二可撓件,其中,該第一結合件與該第二結合件係可彼此相對位移地分設於該樑上;該第一可撓件則係位於第一軸向上而橋接於該第一結合件與該第二結合件間;該第二可撓件係位於非該第一軸向上而橋設於該第一結合件與該第二結合件之間,據此,當該第一結合件與該第二結合件受該樑之帶動而產生相對運動時,即令該第一可撓件產生變形;其特徵在於:該第一可撓件之剛性係大於該第二可撓件之剛性,用以提高該第一可撓件於該第一軸向上之抗變形能力。 A gantry device comprising: a body having two bodies, two columns, two guiding grooves and two driving members, wherein the two columns are respectively fixed on two ends of the side seat surface of the body; the two guiding channels are Separately disposed on the side surface of the seat body in parallel with each other; and the two driving members are respectively disposed at the top end of the column; a beam having two sliding members and a beam body, wherein each of the sliding members is respectively slid Provided in each of the guide grooves, and respectively connected to the driving members to reciprocately move along a first axial direction; the beam body is located above the seat body between the two sliding members; and a first a flexible mechanism having a first coupling member, a second coupling member, a first flexible member and a second flexible member, wherein the first coupling member and the second coupling member are displaceable relative to each other The ground is disposed on the beam; the first flexible member is located in the first axial direction and bridges between the first joint member and the second joint member; the second flexible member is located not on the first shaft Upwardly bridged between the first joint member and the second joint member, according to which, when the first joint member and the first joint member When the two coupling members are moved by the beam to cause relative movement, the first flexible member is deformed; and the first flexible member has a rigidity greater than a rigidity of the second flexible member for improving The first flexible member is resistant to deformation in the first axial direction. 依據申請專利範圍第6項所述龍門裝置,其更包含有一第二撓性機構,與該第一撓性機構分設於該樑兩端,該第二撓性機構具有一第三結合件、一第四結合件、一第三可撓件及一第四可撓件,其中,該第三結合件與該第四結合件係可彼此相對位移地分設於該樑上;該第三可撓件位於第 一軸向上而橋接於該第三結合件與該第四結合件間;該第四可撓件係位於非該第一軸向上而橋設於該第三結合件與該第四結合件之間,據此,當該第三結合件與該第四結合件受該樑之帶動而產生相對運動時,即令該第三可撓件產生變形;其特徵在於:該第三可撓件之剛性係大於該第四可撓件之剛性,用以提高該第三可撓件於該第一軸向上之抗變形能力。 The gantry device according to claim 6, further comprising a second flexible mechanism, the first flexible mechanism being disposed at two ends of the beam, the second flexible mechanism having a third coupling member, a fourth coupling member, a third flexible member and a fourth flexible member, wherein the third coupling member and the fourth coupling member are detachably disposed on the beam relative to each other; the third The flexure is located at the first An axially bridged between the third coupling member and the fourth coupling member; the fourth flexible member is disposed between the third coupling member and the fourth coupling member. According to this, when the third coupling member and the fourth coupling member are relatively moved by the beam, the third flexible member is deformed; and the third flexible member has a rigidity greater than The rigidity of the fourth flexible member is used to improve the deformation resistance of the third flexible member in the first axial direction. 依據申請專利範圍第7項所述龍門裝置,其中,該第一結合件及該第三結合件係分別固設於該樑身兩端,並且,該第二結合件及該第四結合件係分別貼設於各該滑接件上。 The gantry device according to the seventh aspect of the invention, wherein the first joint member and the third joint member are respectively fixed at two ends of the beam body, and the second joint member and the fourth joint member are respectively They are respectively attached to the respective sliding members. 依據申請專利範圍第7項所述龍門裝置,其中:該第一撓性機構之該第一結合件與該第二結合件彼此間更可於一第二軸向上相對位移;該第二撓性機構之該第三結合件與該第四結合件彼此間更可於一第二軸向上相對位移;並且,該第一撓性機構在位於該第二軸向上之對應第二可撓件與該第二撓性機構在位於該第二軸向上之對應第四可撓件,彼此之剛性不相等。 The gantry device of claim 7, wherein the first coupling member and the second coupling member of the first flexible mechanism are relatively displaceable relative to each other in a second axial direction; the second flexibility The third coupling member and the fourth coupling member are more displaceable relative to each other in a second axial direction; and the first flexible mechanism is corresponding to the second flexible member in the second axial direction The second flexible mechanism is unequal in rigidity to each other in the corresponding fourth flexible member located in the second axial direction. 依據申請專利範圍第7項所述之龍門裝置,其中:該第一結合件係具有一開口端,該第二結合件係位於該第一結合件之開口端中,並使該第一及第二可撓件介於該第一結合件之開口端內與該第二結合件間;以及該第三結合件係具有一開口端,該第四結合件係位於該第三結合件之開口端中,並使該第三及第四可撓件介於該第三結合件之開口端內與該第四結 合件間。 The gantry device of claim 7, wherein the first coupling member has an open end, the second coupling member is located in the open end of the first coupling member, and the first and the first The second flexible member is disposed between the open end of the first joint member and the second joint member; and the third joint member has an open end, and the fourth joint member is located at the open end of the third joint member Middle, and the third and fourth flexible members are located in the open end of the third joint member and the fourth knot Joint room.
TW105114226A 2016-05-06 2016-05-06 Compliant mechanism and gantry with the compliant mechanism TWI562852B (en)

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