CN107378514B - Mechanism with flexible elements and gantry device containing the mechanism with flexible elements - Google Patents
Mechanism with flexible elements and gantry device containing the mechanism with flexible elements Download PDFInfo
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- CN107378514B CN107378514B CN201610322056.8A CN201610322056A CN107378514B CN 107378514 B CN107378514 B CN 107378514B CN 201610322056 A CN201610322056 A CN 201610322056A CN 107378514 B CN107378514 B CN 107378514B
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- engaging member
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- flexible part
- rigidity
- flexible elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/012—Portals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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Abstract
The present invention provides a kind of mechanism with flexible elements and the gantry device containing the mechanism with flexible elements, the mechanism with flexible elements includes the first engaging member, the second engaging member, the first flexible part, the second flexible part, the rigidity of the first flexible part is greater than the rigidity of the second flexible part, to improve the first flexible part in the non-deformability in first axis；The gantry device includes seat, beam, the first mechanism with flexible elements, and the rigidity of the flexible part of the first of first mechanism with flexible elements is greater than the rigidity of the second flexible part, to improve the first flexible part in the non-deformability in first axis.Mechanism with flexible elements of the invention is accordingly to gantry beam because locational space error caused by the factors such as kinematic error or deformation provides compensation, flexible part is lifted up rigidity in the kinematic axis for receiving external force application relative to crossbeam, generates hysteresis phenomenon during exercise to avoid crossbeam.
Description
Technical field
The present invention is related with movement pedestal, and especially with regard to a kind of mechanism with flexible elements and gantry containing the mechanism with flexible elements fills
It sets.
Background technique
The limitation being limited in structural rigidity, manufacture, assembling and control technology, movement pedestal are generated several when movement
What error or space surface error be difficult to avoid that, and in order to reduce location error for mobile influence, in known technology
Have and exist by the mechanism that different technologies means reach error compensation, is moved except having by technologies such as laser interferometers
The calibration in path, reduces or prevents outside the occurrence degree of error, also has through buffering or deformation technology, avoids kinematic error
When for improper torque or eliminating its stress caused by movement pedestal.
Specifically, in gantry device 1 provided by known technology as shown in Figure 1, in the crossbeam 3 one for being cross-placed on pedestal 2
The mechanism with flexible elements 4 of allowable strain is arranged in side, accordingly, flexible when the relative motion between 3 both ends of crossbeam and pedestal 2 generates error
The tolerable variation with caused 3 position angle of crossbeam under dynamic error of mechanism 4, avoids causing improperly stress to crossbeam 3；These
Effect is allowed in the deformation that technological means by cutting down mechanism with flexible elements 4 itself rigidity is reached, admittedly it may achieve its expected purpose,
But it is still non-to belong to kindhearted design also by the hysteresis phenomenon of crossbeam 3 during exercise caused by the low rigidity because of mechanism with flexible elements 4.
Summary of the invention
Therefore, the main purpose of the present invention is to provide a kind of mechanism with flexible elements of high axial stiffness and contain the mechanism with flexible elements
Gantry device, wherein mechanism with flexible elements with deformation-compensated gantry beam position error, and corresponding to the mechanism with flexible elements
The kinematic axis rigidity with higher upwards of crossbeam movement avoids moving caused by the rigid deficiency because of mechanism with flexible elements sluggish or again
The missing of existing error.
To reach above-mentioned purpose, the invention adopts the following technical scheme:
A kind of mechanism with flexible elements is to provide deformation with most flexible parts, and those flexible parts is made to correspond to the kinematic axis
Upward rigidity with higher.
Those flexible parts in the kinematic axis upwards possessed by high stiffness, refer to it is corresponding be located at the kinematic axis it is upward can
Part rigidity is scratched, higher than the rigidity of the flexible part other than the movement axial direction.
Wherein, to the technological means for making rigidly to improve positioned at the upward flexible part of the kinematic axis, can will have identical rigid
Property those flexible parts, by the change on density of setting or angle, make its on different directions have different rigidity, or
Also the different flexible part with different rigidity can be respectively set, to improve the rigidity on specific direction.
In on specific technology contents, which includes one first engaging member；One second engaging member, with this first
Engaging member, which is spaced, to be come, to each other and can be in relative displacement in a first axis；First flexible part, be located at first axis on and
Bridge be set between first engaging member and second engaging member, and can between first engaging member and second engaging member to each other
Relative displacement and deform；And one second flexible part, be located in the non-first axis and bridge be set to first engaging member with should
Between second engaging member.By the combination of above-mentioned component, the rigidity of the first flexible part is made to be greater than the rigidity of the second flexible part,
To improve the first flexible part in the non-deformability in the first axis.
Wherein, which has an open end, which is located in the open end of first engaging member,
And make first and second flexible part between in the open end of first engaging member between second engaging member.
Wherein, the density of setting of the first flexible part is greater than the density of setting of the second flexible part.
Wherein, which is respectively plate reed.
Wherein, first engaging member and second engaging member to each other can also be in one second axial upper relative displacements, and make
The rigidity of the flexible part of correspondence second in second axial direction, greater than the non-flexible part of correspondence second in second axial direction
Rigidity.
Wherein, which is respectively provided with different-thickness.
Further, the taken off mechanism with flexible elements of the present invention can be in conjunction with gantry device.Specifically, gantry device includes one
First mechanism with flexible elements, and first mechanism with flexible elements set up first engaging member can with displacement opposite to each other separately with second engaging member
In on a beam of the gantry device, generated relatively with second engaging member by the drive of the beam to obtain in first engaging member
When movement, it is deformed those flexible parts.
For because should beam spatial position change, gantry device also includes one second mechanism with flexible elements, with the first flexible machine
Structure is divided on the beam.Second mechanism with flexible elements has a third engaging member；One the 4th engaging member is separated by with the third engaging member
It comes, it to each other and can be in relative displacement in a first axis；The flexible part of third, be located in first axis and bridge be set to this
Between three engaging members and the 4th engaging member, and can be with the relative displacement between the third engaging member and the 4th engaging member to each other
And it deforms；And one the 4th flexible part, in the non-first axis in position and bridge be set to the third engaging member and the 4th engaging member it
Between.And by the combination of above-mentioned component, so that the rigidity of the flexible part of the third is greater than the rigidity of the 4th flexible part, to improve this
The flexible part of third is in the non-deformability in the first axis.
Wherein, first engaging member and the third engaging member are fixedly arranged on the beam body both ends, also, second engaging member respectively
And the 4th engaging member be attached on the respectively sliding part respectively.
Wherein, first engaging member of first mechanism with flexible elements and second engaging member to each other can also be axial in one second
Upper relative displacement, and the third engaging member of second mechanism with flexible elements and the 4th engaging member to each other can also be axial in one second
Upper relative displacement, and make first mechanism with flexible elements in the flexible part of correspondence second being located in second axial direction and the second flexible machine
For structure in the flexible part of correspondence the 4th being located in second axial direction, mutual rigidity is unequal.Making this with this, first and second is flexible
Mechanism has different rigidity in a different direction, with moderately because should beam in different directions location error variation,
It is specific because should beam when being moved in a plane because with moving the rotation and stretch that error is given birth to, or in lower given birth to change of expanding with heat and contract with cold
Spatial position change caused by shape etc..
Wherein, which has an open end, and the 4th engaging member is located in the open end of the third engaging member,
And make the third and the 4th flexible part in the open end of the third engaging member between the 4th engaging member.
The invention has the advantages that
Mechanism with flexible elements of the invention with deformation-compensated gantry beam position error, and corresponding to the mechanism with flexible elements
The kinematic axis rigidity with higher upwards of crossbeam movement avoids moving caused by the rigid deficiency because of mechanism with flexible elements sluggish or again
The missing of existing error.
Detailed description of the invention
Fig. 1 is the schematic perspective view of an existing gantry device.
Fig. 2 is the three-dimensional structure diagram of the gantry device of the embodiment of the present invention.
Fig. 3 is the front view of the gantry device of the embodiment of the present invention.
Fig. 4 is the structural schematic diagram of the first mechanism with flexible elements of the embodiment of the present invention.
Fig. 5 is the structural schematic diagram of the second mechanism with flexible elements of the embodiment of the present invention.
Fig. 6 is the top view of the gantry device of the embodiment of the present invention.
Fig. 7 is the plan view of second mechanism with flexible elements of another embodiment of the present invention.
Fig. 8 is the plan view of first mechanism with flexible elements of another embodiment of the present invention.
Specific embodiment
Firstly, please refer to Fig. 2, shown in 3, provided gantry device 10 in an embodiment of the present invention mainly includes
One 20, one beam 30, the first mechanism with flexible elements 40 and the second mechanism with flexible elements 50.
Seat 20 has seat body 21, two columns 22 are fixedly arranged on respectively with this on the both ends of side seat surface, and two are spaced
Guide groove 23 is divided on the upside seat surface of a body 21, and respectively extends length appropriate along a straight line in parallel with each other, and two by line
Actuator 24 composed by property motor, is respectively arranged on 22 top of column.
Beam 30 has first and second sliding part 31,32, is separately connected each actuator 24 and must be slidedly arranged in each guide groove 23,
And shift reciprocately can be linearly carried out along a virtual first axis x by the guiding of each guide groove 23, a beam body 33 is located at seat
21 top of body, and slipped between part 31,32 between first and second, and its both ends 331,332 is scratched by first and second respectively
Property mechanism 40,50 overlap joint, bridged between first and second sliding part 31,32 indirectly, so that beam 30 be made to be slidedly arranged on seat 20
On, it is allowed to carry out the shift reciprocately of straight line along first axis x.
And please referring to Fig. 2, shown in 4, the first mechanism with flexible elements 40 has the first engaging member 41, the second engaging member 42 and first can
Scratch part 43.First engaging member 41 has an open end, and is amplexiformed with the direction of open end towards the first sliding part 31 and be fixedly arranged on beam body
On 33 one end 331.Second engaging member 42, which amplexiforms, to be fixedly arranged on the first sliding part 31, and is located at the open end of the first engaging member 41
In.After first flexible part 43 is respectively flexible plate reed, also, the long axis of the first flexible part 43 extends outwardly, that
This meeting intersection is in the rotation center of the first mechanism with flexible elements 40.And the first flexible part 43 bridges at the interior of 41 open end of the first engaging member
Between side wall surface and the second engaging member 42, and increase by the first flexible part 43 and be located at the density of setting on first axis x, to improve first
Flexible part 43 is in the rigidity on first axis x.Number is set when beam 30 carries out linear reciprocation displacement along first axis x with this
Higher rigidity can be provided by measuring the relatively large number of first flexible part 43, to avoid the generation of known missing.
Fig. 2 is please referred to again, shown in 5, third engaging member 51 possessed by the second mechanism with flexible elements 50, the 4th engaging member 52 and
Three flexible parts 53 etc. are identical to outside the component of the first mechanism with flexible elements 40, are different from 40 ground of the first mechanism with flexible elements and are further increased
Four flexible parts 54 are located on another the second virtual axial direction y.Density of setting by increasing by the 4th flexible part 54 can improve the
Four flexible parts 54 are located at the rigidity on the second axial direction y.
By the composition of above-mentioned component, gantry device 10 is upper in using, can be by first and second mechanism with flexible elements 40,50
The flexible part 43,53 of first and third improve the rigidity of flexible part on first axis x, make beam 30 by external force and along first axis
When x carries out reciprocal linear motion, the phenomenon that it must be made sluggish is improved, meanwhile, pass through first and the flexible part 43,53 of third
The elasticity of itself, to weaken its rigidity in non-athletic axial direction, and can as shown in Figure 6 as, when 30 both ends of beam are in each guide groove 23
In same movable property raw error when, first and second mechanism with flexible elements 40,50 is tolerable generate beam 30 under rotational deformation caused by
Change in location, in case the same dynamic error at 30 both ends of beam generates improper stress, meanwhile, it also can be by external control system come to beam
30 carry out rotation control.
In addition, when beam 30 by temperature action generate expand with heat and contract with cold change in size when, the telescopic direction of change in size with
Second axial direction y is similar, hereat, then can be provided by the 4th flexible part 54 of the second mechanism with flexible elements 50 corresponding on the second axial direction y
Deformation, to compensate the change in size of beam 30.
In addition to above-mentioned specific effect, first and second mechanism with flexible elements 40,50 has smaller for known technology
Volume, in addition to not taking up space, also can avoid increase height, and must make the centre of motion with to provide be displaced power external drive
Element is located in same level, to reduce the generation of Surplus Moment.
Furthermore it to increase flexible part in the technological means of the upward rigidity of kinematic axis, also not only takes off embodiment above and is taken off
It is shown as limiting, that is, except that can change by the centralised or decentralised density of setting of flexible part, to increase outside the rigidity on specific direction, also
Different flexible part with different rigidity can be combined to configuration to reach, such as the second mechanism with flexible elements 50a shown in Fig. 7, tool
There is the 4th flexible part 54a being located in non-second axial direction, density of setting is less than the 4th flexible part being located in the second axial direction
54a；Another embodiment of first mechanism with flexible elements 40a as also shown in fig. 8, the first mechanism with flexible elements 40a also include the second flexible part
44a, is located in non-first axis and bridge is set between the first engaging member 41a and the second engaging member 42a.In other words, no matter lead to
Cross it is quantitative change, contoured article or change structurally, it is all to be able to reach the rigidity for improving the upward flexible part of kinematic axis,
Belong to the present invention and answers shielded scope.
The above is presently preferred embodiments of the present invention and its technical principle used, for those skilled in the art
For, without departing from the spirit and scope of the present invention, any equivalent change based on the basis of technical solution of the present invention
Change, simple replacement etc. is obvious changes, all fall within the protection scope of the present invention.
Claims (5)
1. a kind of gantry device, which is characterized in that include:
One, there are a body, two columns, two guide grooves and two actuators, wherein two column is fixedly arranged on side with the seat respectively
On the both ends of seat surface；Two guide groove is divided into parallel with each other on the upside seat surface of this body；And two actuator is set respectively
In the column top；
One beam has two sliding parts and a beam body, wherein each sliding part is slidedly arranged on respectively in each guide groove, and is separately connected each drive
Moving part, to carry out shift reciprocately along a first axis；The beam body is located at the seat just and between the two sliding part；And
One first mechanism with flexible elements has one first engaging member, one second engaging member, one first flexible part and one second flexible part,
Wherein, first engaging member and second engaging member can be divided into displacement on the beam opposite to each other；The first flexible part is located at
It is bridged in first axis between first engaging member and second engaging member；The second flexible part is located in the non-first axis
And bridge is set between first engaging member and second engaging member, accordingly, when first engaging member and second engaging member are by this
The drive of beam and when generating relative motion, even the first flexible part is deformed；
It is characterized by:
The rigidity of the first flexible part is greater than the rigidity of the second flexible part, to improve the first flexible part in the first axis
On non-deformability.
2. gantry device according to claim 1 also includes one second mechanism with flexible elements, sets up separately with first mechanism with flexible elements
In the both ends of the beam, which has a third engaging member, one the 4th engaging member, the flexible part of a third and one the
Four flexible parts, wherein the third engaging member and the 4th engaging member can be divided into displacement on the beam opposite to each other；The third
Flexible part is located in the first axis and bridges between the third engaging member and the 4th engaging member；4th flexible part is located at
In the non-first axis and bridge be set between the third engaging member and the 4th engaging member, accordingly, when the third engaging member with
4th engaging member by the beam drive and when generating relative motion, even the flexible part of the third is deformed；
It is characterized by:
The rigidity of the flexible part of the third is greater than the rigidity of the 4th flexible part, to improve the flexible part of the third in the first axle
Upward non-deformability.
3. gantry device according to claim 2, which is characterized in that first engaging member and third engaging member are solid respectively
Set on beam body both ends, second engaging member and the 4th engaging member are attached at respectively on each sliding part.
4. gantry device according to claim 2, it is characterised in that: first engaging member of first mechanism with flexible elements
It to each other can also be in one second axial upper relative displacement with the second engaging member；The third engaging member of second mechanism with flexible elements
It to each other can also be in one second axial upper relative displacement with the 4th engaging member；First mechanism with flexible elements is being located at second axial direction
On the flexible part of correspondence second and second mechanism with flexible elements in the corresponding 4th flexible part being located in second axial direction, it is mutual just
Property is unequal.
5. gantry device according to claim 2, it is characterised in that:
First engaging member has an open end, and second engaging member is located in the open end of first engaging member, and
Make the described first flexible part and the second flexible part in the open end of first engaging member between second engaging member；With
And
The third engaging member has an open end, and the 4th engaging member is located in the open end of the third engaging member, and
Make the flexible part of the third and the 4th flexible part in the open end of the third engaging member between the 4th engaging member.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610322056.8A CN107378514B (en) | 2016-05-16 | 2016-05-16 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610322056.8A CN107378514B (en) | 2016-05-16 | 2016-05-16 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
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| CN107378514A CN107378514A (en) | 2017-11-24 |
| CN107378514B true CN107378514B (en) | 2019-02-05 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3670067B1 (en) | 2018-12-20 | 2022-07-27 | Etel S.A. | Positioning device in portal design |
| CN111434969B (en) * | 2019-01-15 | 2021-10-15 | 大银微系统股份有限公司 | Flexible mechanism |
| CN111435094A (en) * | 2019-01-15 | 2020-07-21 | 大银微系统股份有限公司 | Flexible mechanism |
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| US6188150B1 (en) * | 1999-06-16 | 2001-02-13 | Euv, Llc | Light weight high-stiffness stage platen |
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