CN111435094A - Flexible mechanism - Google Patents
Flexible mechanism Download PDFInfo
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- CN111435094A CN111435094A CN201910035243.1A CN201910035243A CN111435094A CN 111435094 A CN111435094 A CN 111435094A CN 201910035243 A CN201910035243 A CN 201910035243A CN 111435094 A CN111435094 A CN 111435094A
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- flexible
- body part
- platform
- opening
- flexure mechanism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
Abstract
The invention discloses a flexible mechanism, comprising: a base; a platform spaced apart from the base; and a plurality of flexible units, the bridge is arranged between the base and the platform, and is respectively provided with a first body part fixed on the base, a second body part connected with the platform is separated from the first body part, a third body part is respectively connected with the first body part and the second body part through a first flexible part and a second flexible part, wherein the first flexible part and the second flexible part have different dimensional elasticity.
Description
Technical Field
The present invention relates to motion platforms, and more particularly to a flexure mechanism.
Background
With the development of semiconductor nano-scale technology, devices with high precision and high response speed have become targets of continuous technical development of semiconductor device manufacturers, and among them, the motion platform widely used as a component unit of a detection device can provide high motion speed, but due to inertia, a moving object is difficult to stop at a precise position in a very short time, and generally, the higher the motion speed of the object is, the greater the degree of shaking before complete stop is, the longer the setting time is relatively required, and the more rapid positioning at a precise position is difficult.
In order to eliminate the difficulty of setting of a moving object caused by inertia, a known technology discloses a flexible mechanism for compensating a motion error generated after displacement, which aims to reduce the setting time and improve the precision.
Disclosure of Invention
It is therefore a primary object of the present invention to provide a flexible mechanism which is composed of a plurality of separable flexible units, and which is easy to manufacture, assemble, process and maintain.
The invention adopts the following technical scheme to achieve the purpose:
a flexure mechanism comprising:
a base;
a platform spaced apart from the base; and
the flexible units are bridged between the base and the platform and respectively provided with a first body part fixed on the base, a second body part connected with the platform and the first body part are separated, a third body part is respectively connected with the first body part and the second body part through a first flexible part and a second flexible part, and the first flexible part and the second flexible part have different dimensional elasticity.
Each second body part is respectively provided with an arc-shaped block body and a groove concavely arranged at the concave arc side of the arc-shaped block body, so that the grooves of the second body parts are sequentially connected in series to form a circular ring.
The platform is provided with a platform body between the second body parts, and an annular clamping tenon is arranged on the platform body in a protruding mode and is embedded in the annular grooves which are connected in series in an annular mode.
The shape of the inner side ring surface and the outer side ring surface of the clamping tenon and the shape of the groove walls on the two sides of the grooves are in the same tapered shape.
The third body part is provided with an opening, and the first flexible part is positioned in the opening of the third body part;
the first flexible part is provided with a first combining part, a first flexible part and two second flexible parts, the first flexible part is bridged between the first combining part and the second body part, and each second flexible part is bridged between the inner side wall surface of the opening of the third body part and the first combining part respectively.
The number of the third body parts contained in the flexible unit is two, the number of the first flexible parts is two, and each first flexible part is respectively arranged in the opening of each third body part in a mode of providing elasticity with different dimensions.
The first body part is provided with an opening, and the second flexible part is positioned in the opening of the first body part;
the second flexible part is provided with a second combining part, a third flexible part and two fourth flexible parts, the third flexible part is bridged between the second combining part and the outer side wall surface of the third body part, and each fourth flexible part is bridged between the inner side wall surface of the first body part opening and the second combining part respectively.
The number of the openings of the first body part is two, the number of the second flexible parts is two, and each second flexible part is respectively arranged in the opening of each first body part in a mode of providing elasticity with different dimensions.
The flexible mechanism further comprises a driving unit arranged between the platform and the base for driving the platform.
The driving unit includes an encoder and a plurality of linear motors.
The relative positions, number, shape or structure of the first body part, the second body part, the third body part, the first flexible part and the second flexible part can be changed according to the actual situation, and the invention is not limited to the above.
The invention has the beneficial effects that: in the use of the flexible mechanism, after the long-stroke high-speed movement, when the flexible mechanism cannot be stopped at a preset accurate position in a very short time due to the inertia effect, the first flexible part and the second flexible part of each flexible unit are matched with the linear motors to compensate the motion error of the platform after the displacement, so that the purposes of reducing the setting time and improving the production efficiency are achieved. The invention can be applied to a short-stroke precision positioning platform to improve the precision of motion and the response speed.
Drawings
Fig. 1 is an assembled perspective view of a first embodiment of the present invention.
Fig. 2 is an exploded perspective view of the first embodiment of the present invention.
Fig. 3 is a perspective view of the flexible unit of fig. 2 in accordance with a first embodiment of the present invention.
Fig. 4 is a schematic view of the first embodiment of the present invention from another perspective as compared to fig. 3.
Fig. 5 is a top view of the first embodiment of the present invention.
Fig. 6 is a cross-sectional view of the first embodiment of the present invention taken along line 6-6 of fig. 5.
Fig. 7 is a cross-sectional view of the first embodiment of the present invention taken along line 7-7 of fig. 5.
Fig. 8 is an exploded perspective view of a second embodiment of the present invention.
The base 10, the platform 20, the table body 21, the tenon 22, the flexible unit 30, the first body 31, the opening 311, the second body 32, the arc block 321, the groove 322, the third body 33, the first flexible part 34, the first connecting part 341, the first flexible part 342, the second flexible part 343, the reinforcing rib 344, the second flexible part 35, the second connecting part 351, the third flexible part 352, the fourth flexible part 353, the reinforcing rib 354, the opening 333, the driving unit 40, the encoder 41, the linear motor 42, the X-axis dimension a1, the Y-axis dimension a2
Detailed Description
Referring to fig. 1 to 7, a flexible mechanism according to a first embodiment of the present invention includes: a base 10; a platform 20 spaced apart from the base 10; and a plurality of flexible units 30 bridged between the base 10 and the stage 20. In this embodiment, the number of the flexible units 30 is 4, and the flexible units are modular in design, and can be combined with the base 10 and the platform 20 into a single component, and each flexible unit 30 can be replaced independently. When one flexible unit 30 is damaged due to fatigue, a maintenance worker only needs to replace the flexible unit 30 without replacing the whole flexible mechanism, so that the maintenance cost of the flexible mechanism is greatly reduced, and the convenience of maintenance and adjustment is improved.
Each flexible unit 30 has a first body 31 fixed on the base 10, a second body 32 connected to the platform 20 and spaced apart from the first body 31, two third bodies 33 respectively interposed between the first body 31 and the second body 32 and spaced apart from each other, two first flexible parts 34 respectively connected to the third bodies 33 and the second body 32, and two second flexible parts 35 respectively connected to the third bodies 33 and the first body 31, wherein the flexible units have elasticity in different dimensions (for example, X-axis dimension a1 and Y-axis dimension a2) according to the arrangement positions and directions of the first flexible parts 34 and the second flexible parts 35, so as to restrict the moving direction of the platform 20. Specifically, in this embodiment, the first flexible parts 34 connected to the second body part 32 respectively provide elasticity with different dimensions of a1 and a2, and the second flexible parts 35 connected to the first body part 31 also respectively provide elasticity with different dimensions of a1 and a2, so that elasticity with two different dimensions can be obtained between the third body parts 33 and the first and second body parts 31 and 32. In terms of the space state of the combination of the components, the first body portion 31 has two openings 311 for respectively accommodating the second flexible portions 35 with different dimensional elasticity, and the third body portion 33 has an opening 333 for respectively accommodating the first flexible portions 34 with different dimensional elasticity.
Each second body 32 has an arc block 321 and a groove 322 recessed at the concave arc side of the arc block 321, and the grooves 322 of the second bodies 32 are sequentially connected in series to form a circular ring. The platform 20 has a platform body 21 between the second body portions 32, and an annular tenon 22 is protruded on the platform body 21 and is embedded in the grooves 322 connected in series in an annular shape. Wherein, the shape of the inner and outer ring surfaces of the tenon 22 and the shape of the groove walls of the grooves 322 are the same in the tapered shape.
The first flexible portion 34 has a first connecting member 341, two first flexible members 342 and two second flexible members 343, the first flexible member 342 is bridged between the first connecting member 341 and the second body portion 32, and each of the second flexible members 343 is bridged between the inner sidewall of the opening 333 of the third body portion 33 and the first connecting member 341. In detail, the two first flexible pieces 342 and the second flexible pieces 343 of the first flexible portion 34 are disposed in the opening 333 of the third body portion 33 in parallel, and are respectively connected to the inner sidewall surfaces of the opening 333 of the first coupling member 341, the second body portion 32, and the third body portion 33. The relative positions, number, shape or configuration of the first flexible members 342 and the second flexible members 343 are not limited to those disclosed in the above embodiments, and may be changed according to actual situations.
In addition, the first flexible element 342 and the second flexible element 343 are respectively integrally protruded with a reinforcing rib 344 for improving the deformation resistance.
The second flexible portion 35 includes a second coupling member 351, a third flexible member 352, a fourth flexible member 353 and the like identical to the first flexible portion 34, wherein the third flexible member 352 is bridged between the second coupling member 351 and the outer side wall surface of the third body portion 33, and each of the fourth flexible members 353 is bridged between the inner side wall surface of the opening of the first body portion 31 and the second coupling member 351, respectively, different from the first flexible portion 34. In addition, a reinforcing rib 354 is integrally protruded on each of the third flexible element 352 and the fourth flexible element 353 for improving the deformation resistance.
In this embodiment, since the flexible units 30 are of modular design, they are easy to manufacture, assemble and disassemble, and the platform 20 can be fixed by fitting 4 flexible units 30 into each other, and the platform 20 can be automatically adjusted and fitted on the flexible units 30 by the structural design of the tenon 22 corresponding to the groove 322. Then, each flexible unit 30 is precisely adjusted to the platform 20 by an adjusting screw (not shown), so as to improve the angle errors of Pitch, Yaw and Roll, thereby improving the assembling precision.
Between the platform 20 and the base 10, there is a driving unit 40, and the driving unit 40 includes an encoder 41 and a plurality of linear motors 42.
With the above components, when the flexible mechanism of the present invention cannot stop at a predetermined precise position in a very short time due to inertia after moving at a high speed with a long stroke, the first flexible portion 34 and the second flexible portion 35 of each flexible unit 30 are used in combination with the linear motors 42 to compensate for the motion error of the platform 20 after moving, thereby achieving the purposes of reducing the setting time and improving the production efficiency.
As shown in fig. 8, the second embodiment of the present invention is different from the first embodiment mainly in that the number of the flexible units 30 is 8, and the platform 20 is fixed by fitting with each other. In addition, the flexible unit 30 has a first body portion 31 fixed on the base 10, a second body portion 32 connected to the platform 20 and spaced apart from the first body portion 31, and a third body portion 33 connected to the first body portion 31 and the second body portion 32 by a first flexible portion 34 and a second flexible portion 35, respectively.
Claims (10)
1. A flexure mechanism, comprising: comprises the following steps:
a base;
a platform spaced apart from the base; and
the flexible units are bridged between the base and the platform and respectively provided with a first body part fixed on the base, a second body part connected with the platform and the first body part are separated, a third body part is respectively connected with the first body part and the second body part through a first flexible part and a second flexible part, and the first flexible part and the second flexible part have different dimensional elasticity.
2. The flexure mechanism of claim 1 wherein: each second body part is respectively provided with an arc-shaped block body and a groove concavely arranged at the concave arc side of the arc-shaped block body, so that the grooves of the second body parts are sequentially connected in series to form a circular ring.
3. The flexure mechanism of claim 2 wherein: the platform is provided with a platform body between the second body parts, and an annular clamping tenon is arranged on the platform body in a protruding mode and is embedded in the annular grooves which are connected in series in an annular mode.
4. The flexure mechanism of claim 3 wherein: the shape of the inner side ring surface and the outer side ring surface of the clamping tenon and the shape of the groove walls on the two sides of the grooves are in the same tapered shape.
5. The flexure mechanism of any one of claims 1-4, wherein:
the third body part is provided with an opening, and the first flexible part is positioned in the opening of the third body part;
the first flexible part is provided with a first combining part, a first flexible part and two second flexible parts, the first flexible part is bridged between the first combining part and the second body part, and each second flexible part is bridged between the inner side wall surface of the opening of the third body part and the first combining part respectively.
6. The flexure mechanism of claim 5 wherein: the number of the third body parts contained in the flexible unit is two, the number of the first flexible parts is two, and each first flexible part is respectively arranged in the opening of each third body part in a mode of providing elasticity with different dimensions.
7. The flexure mechanism of claim 6 wherein:
the first body part is provided with an opening, and the second flexible part is positioned in the opening of the first body part;
the second flexible part is provided with a second combining part, a third flexible part and two fourth flexible parts, the third flexible part is bridged between the second combining part and the outer side wall surface of the third body part, and each fourth flexible part is bridged between the inner side wall surface of the first body part opening and the second combining part respectively.
8. The flexure mechanism of claim 7 wherein: the number of the openings of the first body part is two, the number of the second flexible parts is two, and each second flexible part is respectively arranged in the opening of each first body part in a mode of providing elasticity with different dimensions.
9. The flexure mechanism of claim 1 wherein: the driving unit is arranged between the platform and the base and used for driving the platform.
10. The flexure mechanism of claim 9 wherein: the driving unit includes an encoder and a plurality of linear motors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910035243.1A CN111435094A (en) | 2019-01-15 | 2019-01-15 | Flexible mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910035243.1A CN111435094A (en) | 2019-01-15 | 2019-01-15 | Flexible mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111435094A true CN111435094A (en) | 2020-07-21 |
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ID=71580689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910035243.1A Withdrawn CN111435094A (en) | 2019-01-15 | 2019-01-15 | Flexible mechanism |
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| CN (1) | CN111435094A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030213135A1 (en) * | 2002-05-15 | 2003-11-20 | Makoto Kaneko | X-Y stage apparatus |
| US20070157479A1 (en) * | 2006-01-09 | 2007-07-12 | Samsung Electronics Co., Ltd. | XY stage module, storage system employing the same and method for fabricating the XY stage module |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| US20170087677A1 (en) * | 2015-06-08 | 2017-03-30 | Guangdong University Of Technology | Macro-micro integrated compound platform with adjustable dynamic characteristics |
| CN107378514A (en) * | 2016-05-16 | 2017-11-24 | 大银微系统股份有限公司 | Mechanism with flexible elements and the gantry device containing the mechanism with flexible elements |
| DE102016110606A1 (en) * | 2016-06-08 | 2017-12-14 | Hiwin Mikrosystem Corp. | Flexible mechanism and a flexible mechanism having portal device |
| CN108386447A (en) * | 2018-03-05 | 2018-08-10 | 广东工业大学 | A kind of Coupled Rigid-flexible sliding block and motion platform |
| CN109129412A (en) * | 2018-10-22 | 2019-01-04 | 广东工业大学 | A kind of two dimension decoupling macro/micromotion platform and its compensation method |
-
2019
- 2019-01-15 CN CN201910035243.1A patent/CN111435094A/en not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030213135A1 (en) * | 2002-05-15 | 2003-11-20 | Makoto Kaneko | X-Y stage apparatus |
| US20070157479A1 (en) * | 2006-01-09 | 2007-07-12 | Samsung Electronics Co., Ltd. | XY stage module, storage system employing the same and method for fabricating the XY stage module |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| US20170087677A1 (en) * | 2015-06-08 | 2017-03-30 | Guangdong University Of Technology | Macro-micro integrated compound platform with adjustable dynamic characteristics |
| CN107378514A (en) * | 2016-05-16 | 2017-11-24 | 大银微系统股份有限公司 | Mechanism with flexible elements and the gantry device containing the mechanism with flexible elements |
| DE102016110606A1 (en) * | 2016-06-08 | 2017-12-14 | Hiwin Mikrosystem Corp. | Flexible mechanism and a flexible mechanism having portal device |
| CN108386447A (en) * | 2018-03-05 | 2018-08-10 | 广东工业大学 | A kind of Coupled Rigid-flexible sliding block and motion platform |
| CN109129412A (en) * | 2018-10-22 | 2019-01-04 | 广东工业大学 | A kind of two dimension decoupling macro/micromotion platform and its compensation method |
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Application publication date: 20200721 |
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| WW01 | Invention patent application withdrawn after publication |