TWI678253B - Flexible mechanism - Google Patents

Abstract

A flexible mechanism includes: a base; a first base body spaced from the base and displaced relative to the base in a first axial direction; most first flexible units are bridged Between the base and the first base, each of the first flexible units has elasticity in the first axial direction; a beam is provided on the base and is separated from the first base. A second base body slidably disposed on the beam and displaced relative to the beam in a second axial direction; and most second flexible units, a bridge is provided between the first base body and the second base body Meanwhile, each of the second flexible units has elasticity in the second axial direction.

Description

Flexible mechanism

The invention relates to a motion platform, and in particular relates to a flexible mechanism, which can be applied to a short-stroke precision positioning platform to improve the accuracy of the motion and the speed of the response.

With the development of semiconductor nanometer size technology, equipment with high precision and high response speed has become the target of continuous technological research and development by semiconductor equipment manufacturers, and among them, it is widely used as a motion platform for detection equipment components. Movement speed, but due to inertia, it is difficult for an item in motion to stop at a precise position in a very short time. Generally speaking, the higher the item's movement speed, the greater the degree of shaking before it completely stops. The longer the setting time is, it is not easy to quickly locate the precise position.

In order to eliminate the difficulty of setting the moving objects due to inertia, it is revealed that the flexible mechanism provides compensation for the movement error caused by the displacement, in order to reduce the setting time and improve the accuracy. It can provide compensation for the movement position error of sports articles. However, in order to ensure the accuracy of the flexible mechanism, the conventional flexible mechanism is to make all the components used to provide flexibility. The difficulty of manufacturing a flexible mechanism increases, and when there is a lack of elasticity due to local flexibility, and maintenance is required, the conventional flexible mechanism can only be removed and replaced because it is an integrated mold. Insufficient use of resources.

In addition, the conventional motion platform can be actuated by using a motor to provide the power required for the displacement of the motion platform, so that the motion platform is reciprocated on the guide track set by it. Among them, in order to enable the moving platform to move along the X-axis and Y-axis directions, two motors with different axial directions are stacked on top of each other, but the motor located below needs to carry the weight of the other motor. It is easy to be damaged due to excessive load, which will affect the service life of the motor.

In addition, in order to directly drive the motion platform, the conventional motor is usually arranged near the component pushed by it, so that the conventional motor is hidden inside the motion platform and is shielded by other components, so the heat generated by the motor operation , It will be affected by the group and cause the problem of poor heat dissipation, which will affect the efficiency of motor operation.

Therefore, the main object of the present invention is to provide a flexible mechanism, which is composed of a plurality of independent flexible units that can be separated, and can be easily manufactured, assembled and repaired.

Another object of the present invention is to provide a flexible mechanism in which the weight of the driving unit is supported by the beam, so as to prevent the other driving unit from being damaged due to excessive load.

The reason is that, in order to achieve the above object, the flexible mechanism provided by the present invention includes: a base; a first base body separated from the base and opposite to the base in a first axial direction; Displacement; most first flexible units are bridged between the base and the first base, each first flexible unit has elasticity in the first axial direction; a beam is provided on the base Is separated from the first base body; a second base body is slidably disposed on the beam and is displaced relative to the beam in a second axial direction; and most second flexible units are provided on the bridge Between the first base body and the second base body, each of the second flexible units has elasticity in the second axial direction.

The so-called first and second flexible units provide elasticity in the first and second axial directions, respectively, meaning that the first and second flexible units are flexible due to their structural design, and are arranged through the orientation. Or the change in angle makes it flexible in different directions.

In specific technical content, each of the first flexible units has a first body fixed on the base, and a second body connected to the first base is connected to the first body. Spaced apart, a first flexure is connected to the first body and the second body. The first body portion has an open end, the first flexible portion and the second body portion are located in the open end of the first body portion, and the first flexible portion has a first coupling member, a first A flexible member and two second flexible members, the first flexible member is bridged between the first coupling member and the outer side wall surface of the second body portion, and each of the second flexible members is bridged to the first The inner side wall surface of the open end of the body is between the first coupling member. Thereby, each of the first flexible units is provided with an elastic force in the first axial direction.

Furthermore, each of the second flexible units has a third body fixed on the first base, and a fourth body connected to the second base is separated from the third body. Then, a second flexure is connected to the third body and the fourth body. Wherein, the third body has an open end, the second flexure and the fourth body are located in the open end of the third body, and the second flexure has a third coupling member, a third Flexible members and two fourth flexible members, the third flexible member is bridged between the third coupling member and the outer side wall surface of the fourth body, and each of the fourth flexible members is respectively bridged to the third The inner side wall surface of the open end of the body and the third coupling member. Thereby, each of the second flexible units is provided with elasticity in the second axial direction.

In order to enable the flexible mechanism to be quickly positioned at an accurate position after a high-speed movement with a long stroke, the flexible mechanism further includes a first driving unit, which is arranged between the base and the first base body, To drive the first base body; and a second drive unit, which is arranged between the cross beam and the second base body and is used to drive the second base body. With the combination of the above components, the first and second flexible units are respectively matched with the first and second drive units to compensate the movement error of the flexible mechanism after displacement, so as to reduce the setting time and improve production. The purpose of efficiency.

In addition, since the second driving unit is arranged on the beam, meaning that the beam bears the weight of the second driving unit, the first driving unit does not need to load the weight of the second driving unit, and the first driving unit is prevented from being overloaded due to excessive load. damage. Among them, because the beam and the base are connected, the second driving unit can be shielded by other components, and the heat generated during operation can be quickly removed, which provides more effective heat dissipation for the second driving unit. Therefore, the influence of thermal energy on the operation efficiency of the second drive unit is reduced. Specifically, the beam has a beam body located above the base, and two connecting portions extending from both ends of the beam body to the base, respectively, so that the first base body is interposed between the beam body and the foundation. Between seats.

Among them, to avoid interference between various components of the flexible mechanism during operation, a clearance is provided between each of the fixing portions and the second driving unit, so as to ensure that the first driving unit drives the first base body and its connected components. The margins when the components act, meaning that even if they can operate smoothly, they will not interfere with each other.

Please refer to the first to eighth figures. The flexible mechanism provided in the first embodiment of the present invention includes: a base 10; a first base 20, which is separated from the base 10; And is displaced relative to the base 10 in a first axial direction X; most first flexible units 30 are bridged between the base 10 and the first base 20, each of the first flexible The unit 30 has elasticity in the first axial direction X to restrain the moving direction of the first base body 20; a beam 40 is arranged on the base 10 and is separated from the first base body 20; A second base body 50 is slidably disposed on the beam 40 and is displaced relative to the beam 40 in a second axial direction Y; and a plurality of second flexible units 60 are provided on the first base body 20 and the Between the second base bodies 50, each of the second flexible units 60 has elasticity in the second axial direction Y, and is used to restrain the moving direction of the second base body 50. In this example, the first base body 20 and the second base body 50 are rectangular platform structures, and the number of the first flexible unit 30 and the second flexible unit 60 are four, and are modularized design. The first flexible unit 30 and the second flexible unit 60 are respectively arranged at the end angle positions of the first base 20 and the second base 50, and each of the first flexible unit 30 and the second flexible unit 60 can be replaced independently. When one of the first flexible unit 30 or the second flexible unit 60 is fatigued and damaged, the maintenance personnel only need to replace it without replacing the entire flexible mechanism, which greatly reduces the maintenance cost of the flexible mechanism and increases the cost. Convenience of maintenance and adjustment.

Each of the first flexible units 30 has a first body portion 31 fixed on the base 10, and a second body portion 32 connected to the first base body 20 is separated from the first body portion 31. A first flexible portion 33 is connected to the first body portion 31 and the second body portion 32. Please refer to the fifth figure. In this example, the first body portion 31 has an open end 311. The first flexure portion 33 and the second body portion 32 are located in the open end 311 of the first body portion 31. The first flexible part 33 has a first coupling member 331, two first flexible members 332, and two second flexible members 333. The first flexible members 332 are bridged to the first coupling at intervals. The member 331 is between the outer wall surface of the second body portion 32, and each of the second flexible members 333 is bridged between the inner wall surface of the open end 311 of the first body portion 31 and the first coupling member 331. In addition, the relative positions, numbers, shapes, or structures of the first flexible member 332 and the second flexible member 333 are not limited to those disclosed in the above-mentioned embodiments, and may be changed according to actual situations.

Moreover, the third body portion 61, the fourth body portion 62, and the second flexible portion 63 included in each of the second flexible units 60 are the same members as the first flexible unit 30, and the second flexible portion 63 The third joint member 631, the third flexible member 632, and the fourth flexible member 633 are also the same as the first flexible portion 33 (as shown in the sixth figure), and the difference is only in the third body portion 61 is connected to the first base body 20, and the fourth body portion 62 is connected to the second base body 50.

In order to enable the flexible mechanism to be quickly positioned at an accurate position after a high-speed movement with a long stroke, the flexible mechanism further includes a first driving unit 70 provided between the base 10 and the first base 20. For driving the first base body 20; and a second driving unit 80 for driving the second base body 50 between the beam 40 and the second base body 50. With the combination of the above-mentioned components, the first flexible unit 30 and the second flexible unit 60 are respectively matched with the first driving unit 70 and the second driving unit 80, respectively, to perform a movement error on the displaced flexible mechanism. Compensation to achieve the purpose of reducing the setting time and improving production efficiency.

The first driving unit 70 has a first stator member 71 provided on the base 10 and a first mover member 72 provided on the first base 20 and adjacent to one end surface of the base 10, and The first moving element 72 can be driven by the magnetic field generated between the adjacent first stator elements 71 to drive the first base 20 to reciprocate along the first axis X. Furthermore, the second stator member 81 and the second moving member 82 of the second driving unit 80 are equivalent to the components of the first driving unit 70, and are used to drive the second base body 50 along the second axis Y Back and forth displacement. In this example, the first base 20 has a first groove 21 for receiving the first mover 72, and the second base 50 has a second groove for receiving the second mover 82 52. The numbers of the first grooves 21 and the second grooves 52 are respectively corresponding to the first mover 72 and the second mover 82.

In addition, since the second driving unit 80 is arranged on the cross beam 40, thereby carrying the weight of the second stator member 81, the first driving unit 70 does not need to load the weight of the second mover member 82 and avoids the first driving The unit 70 is damaged due to excessive load. Among them, because the cross beam 40 is connected to the base 10, the second driving unit 80 can be shielded by other components, and the thermal energy generated during operation can be quickly taken away. The more effective heat dissipation method, so the influence of thermal energy on the operation efficiency of the second driving unit 80 is reduced. Specifically, the beam 40 has a beam body 41 located above the base 10, and two connecting portions 42 extending from both ends of the beam body 41 to the base 10, respectively, so that the first base body 20 is interposed. Between the beam body 41 and the base 10. The second stator member 81 of the second driving unit 80 is disposed on the beam 41.

In this example, the first base body 20 or the second base body 50 can be hollowed, which can greatly reduce the weight to save costs and meet the demand for strength. Thereby, the load of the first driving unit 70 can be further reduced, and the thermal energy generated by the operation of the first driving unit 70 can be further reduced.

In addition, a plurality of fixing portions 51 are provided on the bottom surface of the second base body 50 and are respectively connected to the fourth body portions 62 of the second flexible units 60. In this example, fixing portions 51 are provided at each end angular position of the second base body 50, so that the bottom surface of the second base body 50 and the fixing portions 51 form a space for accommodating the second driving unit 80.

Among them, in order to avoid interference between various components of the flexible mechanism during operation, there is a clearance W between each of the fixing portions 51 and the second driving unit 80 to ensure that the first driving unit 70 drives the first base body. The margin when 20 and its connected components operate, meaning that even if they can operate smoothly, they will not be hindered.

10‧‧‧ base

20‧‧‧First Block

21‧‧‧first groove

30‧‧‧ the first flexible unit

31‧‧‧First Body

311‧‧‧ open end

32‧‧‧Second Body

33‧‧‧First flex

331‧‧‧first combination

332‧‧‧The first flexible piece

333‧‧‧Second flexible member

40‧‧‧ beam

41‧‧‧Beam

42‧‧‧ Connection Department

50‧‧‧Second Block

51‧‧‧Fixed section

52‧‧‧Second groove

60‧‧‧Second flexible unit

61‧‧‧Third Body

611‧‧‧ open end

62‧‧‧ Fourth Body

63‧‧‧Second Torsion

631‧‧‧third combination

632‧‧‧Third flexible piece

633‧‧‧ Fourth Flexible

70‧‧‧first drive unit

71‧‧‧First stator

72‧‧‧ the first mover

80‧‧‧Second drive unit

81‧‧‧Second stator

82‧‧‧ second mover

X‧‧‧first axis

Y‧‧‧ second axis

W‧‧‧ clearance

The first diagram is a three-dimensional combined diagram of the first embodiment of the present invention. The second figure is a perspective view of the first embodiment of the present invention with the second base body hidden from the first figure. The third figure is a perspective view of the first embodiment of the present invention with respect to the second figure of the hidden beam and the second flexible unit. The fourth figure is an exploded perspective view of the first embodiment of the present invention. The fifth figure is a top view of the first flexible unit according to the first embodiment of the present invention. The sixth figure is a top view of the second flexible unit according to the first embodiment of the present invention. The seventh diagram is a first cross-sectional operation diagram of the first embodiment of the present invention, which shows that the first driving unit drives the first base body and links the components connected to the first base body in the first axial direction. Back and forth displacement. The eighth diagram is the second embodiment of the first embodiment of the present invention, which is a cross-sectional view of the second diagram. It shows that the second driving unit drives the second base, and cooperates with the second flexible unit to reciprocate in the second axis .

Claims (9)

A flexible mechanism includes: a base; a first base body spaced from the base and displaced relative to the base in a first axial direction; most first flexible units are bridged Between the base and the first base, each of the first flexible units has elasticity in the first axial direction; a beam is provided on the base and is separated from the first base. Having a beam body located above the base and two connecting portions extending from both ends of the beam body to the base, respectively, so that the first base body is interposed between the beam body and the base; A second base body slidably disposed on the beam and displaced relative to the beam in a second axial direction; and most second flexible units, a bridge is provided between the first base body and the second base body, Each of the second flexible units has elasticity in the second axial direction. The flexible mechanism according to claim 1, wherein each of the first flexible units has a first body fixed on the base, and a second body connected to the first base. Spaced apart from the first body, a first flexure is connected to the first body and the second body. The flexible mechanism according to claim 2, wherein each of the second flexible units has a third body fixed on the first base, and a fourth body connected to the second base. The department is separated from the third body, and a second flexure is connected to the third body and the fourth body. The flexible mechanism according to claim 3, wherein the first body portion has an open end, the first flexible portion and the second body portion are located in the open end of the first body portion, and the first flexible portion The portion has a first coupling member, a first flexible member, and two second flexible members. The first flexible member is bridged between the first coupling member and the outer side wall surface of the second body portion. The second flexible member is bridged between the inner side wall surface of the open end of the first body portion and the first coupling member. The flexible mechanism according to claim 4, wherein the third body portion has an open end, the second flexible portion and the fourth body portion are located in the open end of the third body portion, and the second flexible portion The portion has a third coupling member, a third flexible member, and two fourth flexible members. The third flexible member is bridged between the third coupling member and the outer side wall surface of the fourth body portion. The fourth flexible member is bridged between the inner side wall surface of the open end of the third body portion and the third coupling member. The flexible mechanism according to claim 5, wherein the bottom surface of the second base body has a plurality of fixing portions, which are respectively connected to the fourth body portion of each of the second flexible units. The flexible mechanism according to claim 6, further comprising a first driving unit, which is disposed between the base and the first base body for driving the first base body. The flexible mechanism according to any one of claims 1 to 7, further comprising a second driving unit, which is disposed between the beam and the second base body for driving the second base body. The flexible mechanism according to claim 8, wherein a clearance is provided between each of the fixing portions and the second driving unit.