TWI704027B - Flexible mechanism - Google Patents
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- TWI704027B TWI704027B TW108101066A TW108101066A TWI704027B TW I704027 B TWI704027 B TW I704027B TW 108101066 A TW108101066 A TW 108101066A TW 108101066 A TW108101066 A TW 108101066A TW I704027 B TWI704027 B TW I704027B
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本發明係與運動平台有關,特別是關於一種撓性機構,其係可應用於短行程精密定位平台以提高運動之精度以及響應的速度。The present invention relates to a motion platform, and particularly relates to a flexible mechanism, which can be applied to a short-stroke precision positioning platform to improve the accuracy of motion and the speed of response.
隨著半導體奈米尺寸技術的發展,具備高精度與高響應速度的設備,已成為半導體設備廠商持續技術研發之標的,而其中,被廣泛作為檢測設備構成單元的運動平台,雖可提供高速的運動速度,但因慣性作用,運動中的物品實難以在極短時間內停止在精確位置上,且一般來說,物品的運動速度越高,完全停止前的晃動之程度亦越大,相對所需之整定時間亦越長,不易快速定位於精確之位置上。With the development of semiconductor nanoscale technology, equipment with high precision and high response speed has become the target of continuous technological research and development by semiconductor equipment manufacturers. Among them, it is widely used as a motion platform for testing equipment, although it can provide high-speed Movement speed, but due to the effect of inertia, it is difficult for moving objects to stop at a precise position in a very short time. Generally speaking, the higher the moving speed of the object, the greater the degree of shaking before it stops completely. The longer the setting time is, it is not easy to quickly locate the precise position.
習知技術為消除運動物品因慣性所致之整定不易,遂揭露有以撓性機構對位移後所產生之運動誤差提供補償,期以降低整定之時間並提高精度,是等之習知技術固可對運動物品提供運動位置誤差之補償,惟為確保撓性機構之自身精度,習知之撓性機構乃係使其用以提供撓性的各個構成部位,均係一體成型者,使得習知之撓性機構在製造上之難度增加,且在遇有局部撓性夠成之彈性疲乏,而需進行維修時,習知之撓性機構因係為一體成型者,故僅能將整個機構予以拆除更換,徒使資源未能有效利用。The conventional technology is to eliminate the difficulty in the adjustment of moving objects due to inertia, so it is revealed that a flexible mechanism provides compensation for the movement error generated after displacement, in order to reduce the setting time and improve the accuracy. It can provide compensation for the movement position error of the moving objects. However, in order to ensure the accuracy of the flexible mechanism, the conventional flexible mechanism is to make the various constituent parts used to provide flexibility are integrally formed, making the conventional flexible mechanism The manufacturing difficulty of the flexible mechanism has increased, and when repairs are required due to partial flexibility and insufficient elasticity, the conventional flexible mechanism can only be removed and replaced because it is integrally formed. Apostle resources were not used effectively.
因此,本發明之主要目的即在提供一種撓性機構,其係由可分離之若干個獨立撓性單元所構成,而可便於製造、組裝加工及維修。Therefore, the main purpose of the present invention is to provide a flexible mechanism, which is composed of a plurality of separable independent flexible units, which can be easily manufactured, assembled, and repaired.
緣是,為達成上述目的,本發明所提供之撓性機構,包含有:一基座;一平台,係與該基座相隔開來;以及多數撓性單元,係橋設於該基座與該平台之間,而分別具有一固定於該基座上之第一身部,一與該平台相接之第二身部係與該第一身部相隔開來,一第三身部係以一第一撓部及一第二撓部各自與該第一身部及該第二身部連接,其中,該第一撓部與該第二撓部係具有不同的維度上之彈性。The reason is that, in order to achieve the above object, the flexible mechanism provided by the present invention includes: a base; a platform separated from the base; and a plurality of flexible units bridged between the base and the base. Between the platforms, there is a first body fixed on the base, a second body connected to the platform is separated from the first body, and a third body is A first flexure part and a second flexure part are respectively connected with the first body part and the second body part, wherein the first flexure part and the second flexure part have elasticity in different dimensions.
其中,該第三身部具有一開口,該第一撓部位於該第三身部之開口中;該第一撓部具有一第一結合件、一第一可撓件及二第二可撓件,該第一可撓件係橋接於該第一結合件與該第二身部間,而各該第二可撓件分別橋接於該第三身部開口之內側壁面與該第一結合件間。Wherein, the third body has an opening, and the first flexible portion is located in the opening of the third body; the first flexible portion has a first coupling member, a first flexible member, and two second flexible members The first flexible piece is bridged between the first coupling piece and the second body, and each of the second flexible pieces is respectively bridged between the inner wall surface of the third body opening and the first coupling piece between.
其中,該第一身部具有一開口,該第一撓部位於該第一身部之開口中;該第二撓部具有一第二結合件、一第三可撓件及二第四可撓件,該第三可撓件係橋接於該第二結合件與該第三身部之外側壁面間,而各該第四可撓件分別橋接於該第一身部開口之內側壁面與該第二結合件間。Wherein, the first body has an opening, and the first flexible portion is located in the opening of the first body; the second flexible portion has a second coupling member, a third flexible member, and two fourth flexible members The third flexible member is bridged between the second connecting member and the outer wall surface of the third body, and each of the fourth flexible members is respectively bridged between the inner wall surface of the first body opening and the first body opening. Two combination room.
其中,第一身部、第二身部、第三身部、第一撓部及第二撓部的相對位置、數量、形狀或構造可依據實際情形實施變化,並不以前述內容為限。Among them, the relative position, number, shape or structure of the first body, the second body, the third body, the first flexure, and the second flexure can be changed according to actual conditions, and is not limited to the foregoing.
請參閱第一圖至第七圖所示,在本發明第一實施例中所提供之撓性機構,包含有:一基座10;一平台20,係與該基座10相隔開來;以及多數撓性單元30,係橋設於該基座10與該平台20之間。在本例中,撓性單元30的數量為4個,並為模組化設計,而可與基座10及平台20組合成一整體構件,且每一個撓性單元30皆可獨立更換。當某一個撓性單元30疲勞損壞時,維修人員只要抽換掉該撓性單元30,不需將整個撓性機構都更換,大幅降低撓性機構的維修成本,同時增加維修、調整的便利性。Please refer to the first to seventh figures, the flexible mechanism provided in the first embodiment of the present invention includes: a
各該撓性單元30分別具有一固定於該基座10上之第一身部31,一與該平台20相接之第二身部32係與該第一身部31相隔開來,二第三身部33係分別介於該第一身部31與該第二身部32之間,且彼此相隔開來,二第一撓部34係分別連接各該第三身部33與該第二身部32,二第二撓部35則分別連接各該第三身部33與該第一身部31,其中,根據該第一撓部34與該第二撓部35的配置位置及方向,而具有不同的維度上之彈性(例如:X軸維度A1、Y軸維度A2),用以拘束平台20的移動方向。具體地在本例上來說,與該第二身部32連接之各該第一撓部34係分別提供了A1與A2的不同維度彈性,而與該第一身部31連接之各該第二撓部35亦分別提供了A1與A2方向的不同維度彈性,從而得以在各該第三身部33與該第一身部31、該第二身部32間均得以獲得兩個不同維度方向的彈性。再者就元件間結合之空間狀態上來說,則使該第一身部31具有二開口311來分別容設具有不同維度彈性之各該第二撓部35,以及使各該第三身部33分別具有一開口333,用以容設具有不同維度彈性之各該第一撓部34。Each
各該第二身部32係分別具有一弧狀塊體321以及一凹設於該弧狀塊體321凹弧側之溝槽322,並使各該第二身部32之溝槽322彼此依序串聯呈圓環狀。該平台20係具有一介於各該第二身部32間之台身21,一圓環狀之卡榫22係突設於該台身21上並嵌接於該些串接呈圓環狀之溝槽322中。其中,該卡榫22內外側環面之形狀及該些溝槽322兩側槽壁之形狀係呈相同之推拔狀。Each
該第一撓部34具有一第一結合件341、二第一可撓件342及二第二可撓件343,該第一可撓件342係橋接於該第一結合件341與該第二身部32間,而各該第二可撓件343分別橋接於該第三身部33開口333之內側壁面與該第一結合件341間。詳細來說,該第一撓部34之兩第一可撓件342係與該些第二可撓件343以並列的方式配置於該第三身部33之開口333中,且分別對應連接第一結合件341、第二身部32及第三身部33開口333之內側壁面。其中,該些第一可撓件342及該些第二可撓件343的相對位置、數量、形狀或構造不僅以上揭實施例所揭者為限,可依據實際情形實施變化。The first
此外,第一可撓件342及第二可撓件343分別一體凸設有一補强肋344,用以提高抗變形能力。In addition, the first
該第二撓部35具有之第二結合件351、第三可撓件352及第四可撓件353係等相同於第一撓部34之構件,其係有別於該第一撓部34將第三可撓件352橋接於該第二結合件351與該第三身部33之外側壁面間,而各該第四可撓件353分別橋接於該第一身部31開口之內側壁面與該第二結合件351間。此外,第三可撓件352及第四可撓件353分別一體凸設有一補强肋 354,用以提高抗變形能力。The second connecting
在本例中,由於該些撓性單元30為模組化設計,具有易於製造、組裝與拆卸的作用,而可將4個撓性單元30以相互嵌合方式將平台20嵌入固定,同時透過卡榫22與溝槽322相對應的結構設計,使平台20能實現自動調整嵌合於該些撓性單元30上。而后各個撓性單元30再利用一調整螺絲(圖未示)與平台20間進行精確微調整,藉以改善俯仰度(Pitch)、偏搖度(Yaw)及滾動度(Roll)的角度誤差,進而提升其組裝精度。In this example, since the
該平台20與該基座10之間具有一驅動單元40,該驅動單元40包括有一編碼器41及多數線性馬達42。There is a
藉由上述構件之組成,本發明之撓性機構的使用上,係於長行程的高速的移動後,由於慣性作用而無法在極短時間內停止在預定的精確位置時,即可藉由各該撓性單元30之該第一撓部34與該第二撓部35搭配該些線性馬達42,而對位移後的平台20進行運動誤差補償,達到減少整定時間,提升生產效率之目的。By the composition of the above-mentioned components, the flexible mechanism of the present invention is used when it is unable to stop at a predetermined precise position in a very short time due to the effect of inertia after a long-stroke and high-speed movement. The
如第八圖所示,係本發明第二實施例,其與第一實施例的主要差異在於撓性單元30的數量為8個,且同樣地透過相互嵌合方式將平台20嵌入固定。此外,撓性單元30具有一固定於該基座10上之第一身部31,一與該平台20相接之第二身部32係與該第一身部31相隔開來,一第三身部33係以一第一撓部34及一第二撓部35各自與該第一身部31及該第二身部32連接。As shown in the eighth figure, it is the second embodiment of the present invention. The main difference from the first embodiment is that the number of
基座10 平台20 台身21 卡榫22 撓性單元30 第一身部31 開口311 第二身部32 弧狀塊體321 溝槽322 第三身部33 第一撓部34 第一結合件341 第一可撓件342 第二可撓件343 補强肋 344 第二撓部35 第二結合件351 第三可撓件352 第四可撓件353 補强肋354 開口333 驅動單元40 編碼器41 線性馬達42 X軸維度A1 Y軸維度A2
第一圖係本發明第一實施例之組合立體圖。 第二圖係本發明第一實施例之分解立體圖。 第三圖係本發明第一實施例就第二圖之撓性單元的立體示意圖。 第四圖係本發明第一實施例就第三圖之另一視角的示意圖。 第五圖係本發明第一實施例之俯視圖。 第六圖係本發明第一實施例就第五圖沿6-6割面線之剖視圖。 第七圖係本發明第一實施例就第五圖沿7-7割面線之剖視圖。 第八圖係本發明第二實施例之分解立體圖。The first figure is a combined perspective view of the first embodiment of the present invention. The second figure is an exploded perspective view of the first embodiment of the present invention. The third figure is a three-dimensional schematic diagram of the flexible unit of the second figure according to the first embodiment of the present invention. The fourth figure is a schematic diagram of the first embodiment of the present invention from another perspective of the third figure. The fifth figure is a top view of the first embodiment of the present invention. The sixth figure is a cross-sectional view of the first embodiment of the present invention taken along the line 6-6 of the fifth figure. The seventh figure is a cross-sectional view of the first embodiment of the present invention along the line 7-7 of the fifth figure. Figure 8 is an exploded perspective view of the second embodiment of the present invention.
基座10 平台20 台身21 卡榫22 撓性單元30 第一身部31 第二身部32 弧狀塊體321 溝槽322 第三身部33 第一撓部34 第二撓部35 驅動單元40 編碼器41 線性馬達42
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US6817104B2 (en) * | 2002-05-15 | 2004-11-16 | Sumitomo Heavy Industries, Ltd. | X-Y stage apparatus |
US9144867B2 (en) * | 2012-08-14 | 2015-09-29 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Clamping mechanism |
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US6817104B2 (en) * | 2002-05-15 | 2004-11-16 | Sumitomo Heavy Industries, Ltd. | X-Y stage apparatus |
US9144867B2 (en) * | 2012-08-14 | 2015-09-29 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Clamping mechanism |
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