TWI704027B - Flexible mechanism - Google Patents

Abstract

A flexible mechanism including: a base, a platform is separated from the base, and a plurality of flexible units bridged between the base and the platform. Each of the flexible unit having a first body disposed on the base, a second body connected to the platform, which is separated from the first body, and a third body having a first flexible part connected to the second body and a second flexible part connected to the first body. The first flexible part and the second flexible part are spring buffer for two different dimensions.

Description

Flexible mechanism

The present invention relates to a motion platform, and particularly relates to a flexible mechanism, which can be applied to a short-stroke precision positioning platform to improve the accuracy of motion and the speed of response.

With the development of semiconductor nanoscale technology, equipment with high precision and high response speed has become the target of continuous technological research and development by semiconductor equipment manufacturers. Among them, it is widely used as a motion platform for testing equipment, although it can provide high-speed Movement speed, but due to the effect of inertia, it is difficult for moving objects to stop at a precise position in a very short time. Generally speaking, the higher the moving speed of the object, the greater the degree of shaking before it stops completely. The longer the setting time is, it is not easy to quickly locate the precise position.

The conventional technology is to eliminate the difficulty in the adjustment of moving objects due to inertia, so it is revealed that a flexible mechanism provides compensation for the movement error generated after displacement, in order to reduce the setting time and improve the accuracy. It can provide compensation for the movement position error of the moving objects. However, in order to ensure the accuracy of the flexible mechanism, the conventional flexible mechanism is to make the various constituent parts used to provide flexibility are integrally formed, making the conventional flexible mechanism The manufacturing difficulty of the flexible mechanism has increased, and when repairs are required due to partial flexibility and insufficient elasticity, the conventional flexible mechanism can only be removed and replaced because it is integrally formed. Apostle resources were not used effectively.

Therefore, the main purpose of the present invention is to provide a flexible mechanism, which is composed of a plurality of separable independent flexible units, which can be easily manufactured, assembled, and repaired.

The reason is that, in order to achieve the above object, the flexible mechanism provided by the present invention includes: a base; a platform separated from the base; and a plurality of flexible units bridged between the base and the base. Between the platforms, there is a first body fixed on the base, a second body connected to the platform is separated from the first body, and a third body is A first flexure part and a second flexure part are respectively connected with the first body part and the second body part, wherein the first flexure part and the second flexure part have elasticity in different dimensions.

Wherein, the third body has an opening, and the first flexible portion is located in the opening of the third body; the first flexible portion has a first coupling member, a first flexible member, and two second flexible members The first flexible piece is bridged between the first coupling piece and the second body, and each of the second flexible pieces is respectively bridged between the inner wall surface of the third body opening and the first coupling piece between.

Wherein, the first body has an opening, and the first flexible portion is located in the opening of the first body; the second flexible portion has a second coupling member, a third flexible member, and two fourth flexible members The third flexible member is bridged between the second connecting member and the outer wall surface of the third body, and each of the fourth flexible members is respectively bridged between the inner wall surface of the first body opening and the first body opening. Two combination room.

Among them, the relative position, number, shape or structure of the first body, the second body, the third body, the first flexure, and the second flexure can be changed according to actual conditions, and is not limited to the foregoing.

Please refer to the first to seventh figures, the flexible mechanism provided in the first embodiment of the present invention includes: a base 10; a platform 20 separated from the base 10; and Most flexible units 30 are bridged between the base 10 and the platform 20. In this example, the number of flexible units 30 is 4, and it is a modular design, which can be combined with the base 10 and the platform 20 to form an integral component, and each flexible unit 30 can be replaced independently. When a certain flexible unit 30 is fatigued and damaged, maintenance personnel only need to replace the flexible unit 30 without replacing the entire flexible mechanism, which greatly reduces the maintenance cost of the flexible mechanism and increases the convenience of maintenance and adjustment. .

Each flexible unit 30 has a first body 31 fixed on the base 10, a second body 32 connected to the platform 20 is separated from the first body 31, and a second body 31 The three body parts 33 are respectively interposed between the first body part 31 and the second body part 32 and are separated from each other. The two first flexure parts 34 respectively connect the third body part 33 and the second body part 32. The body portion 32 and the two second flexure portions 35 respectively connect the third body portion 33 and the first body portion 31, wherein, according to the arrangement position and direction of the first flexure portion 34 and the second flexure portion 35, It has flexibility in different dimensions (for example, X-axis dimension A1, Y-axis dimension A2) to restrict the moving direction of the platform 20. Specifically, in this example, each of the first flexures 34 connected to the second body 32 provides elasticity of different dimensions A1 and A2, and each of the second flexures 34 connected to the first body 31 The flexure 35 also provides elasticity in different dimensions in the A1 and A2 directions respectively, so that two different dimensional directions can be obtained between each of the third body 33 and the first body 31 and the second body 32. elasticity. Furthermore, in terms of the spatial state of the combination of elements, the first body portion 31 has two openings 311 to respectively accommodate the second flexible portions 35 with different dimensions of elasticity, and the third body portions 33 Each has an opening 333 for accommodating each of the first flexible portions 34 with different dimensions of elasticity.

Each second body 32 has an arc block 321 and a groove 322 recessed on the concave arc side of the arc block 321, and the grooves 322 of each second body 32 are dependent on each other. The sequence series are circular. The platform 20 has a table body 21 between each of the second body parts 32, and a ring-shaped tenon 22 is projected on the table body 21 and embedded in the grooves that are connected in a circular ring shape. Slot 322. The shape of the inner and outer ring surfaces of the tenon 22 and the shape of the groove walls on both sides of the grooves 322 are in the same push-pull shape.

The first flexible portion 34 has a first connecting piece 341, two first flexible pieces 342, and two second flexible pieces 343. The first flexible piece 342 is bridged between the first connecting piece 341 and the second The second flexible member 343 bridges between the inner wall surface of the opening 333 of the third body 33 and the first coupling member 341 respectively. In detail, the two first flexible parts 342 of the first flexible part 34 and the second flexible parts 343 are arranged side by side in the opening 333 of the third body part 33, and are respectively connected to the first flexible part 33. A connecting piece 341, the inner side wall surface of the opening 333 of the second body portion 32 and the third body portion 33. Wherein, the relative positions, numbers, shapes, or structures of the first flexible members 342 and the second flexible members 343 are not limited to those disclosed in the above-mentioned embodiments, and can be changed according to actual situations.

In addition, the first flexible member 342 and the second flexible member 343 are respectively integrally protruded with a reinforcing rib 344 to improve the resistance to deformation.

The second connecting member 351, the third flexible member 352, and the fourth flexible member 353 of the second flexible portion 35 are the same members as the first flexible portion 34, which are different from the first flexible portion 34 The third flexible member 352 is bridged between the second coupling member 351 and the outer wall surface of the third body 33, and each fourth flexible member 353 is respectively bridged between the inner wall surface of the opening of the first body 31 and The second connecting member 351 is between. In addition, the third flexible member 352 and the fourth flexible member 353 are respectively integrally protruded with a reinforcing rib 354 to improve the resistance to deformation.

In this example, since the flexible units 30 are modular in design, they are easy to manufacture, assemble and disassemble, and the platform 20 can be embedded and fixed by the four flexible units 30 in a mutual fitting manner while passing through The structural design corresponding to the tenon 22 and the groove 322 enables the platform 20 to automatically adjust and fit on the flexible units 30. Then each flexible unit 30 uses an adjustment screw (not shown) to perform precise fine adjustments with the platform 20 to improve the angle errors of pitch, yaw, and roll, and then Improve its assembly accuracy.

There is a driving unit 40 between the platform 20 and the base 10, and the driving unit 40 includes an encoder 41 and a plurality of linear motors 42.

By the composition of the above-mentioned components, the flexible mechanism of the present invention is used when it is unable to stop at a predetermined precise position in a very short time due to the effect of inertia after a long-stroke and high-speed movement. The first flexure 34 and the second flexure 35 of the flexible unit 30 are matched with the linear motors 42 to compensate the movement error of the platform 20 after displacement, so as to reduce the setting time and improve the production efficiency.

As shown in the eighth figure, it is the second embodiment of the present invention. The main difference from the first embodiment is that the number of flexible units 30 is 8, and the platform 20 is also embedded and fixed by mutual fitting. In addition, the flexible unit 30 has a first body 31 fixed on the base 10, a second body 32 connected to the platform 20 is spaced apart from the first body 31, and a third body The body 33 is connected to the first body 31 and the second body 32 by a first flexure 34 and a second flexure 35 respectively.

Base 10 Platform 20 Table Body 21 Tenon 22 Flexible Unit 30 First Body 31 Opening 311 Second Body 32 Arc Block 321 Groove 322 Third Body 33 First Flexure 34 First Joint 341 First flexible member 342 Second flexible member 343 Reinforcing rib 344 Second flexible portion 35 Second coupling member 351 Third flexible member 352 Fourth flexible member 353 Reinforcing rib 354 Opening 333 Drive unit 40 Encoder 41 Linear Motor 42 X-axis dimension A1 Y-axis dimension A2

The first figure is a combined perspective view of the first embodiment of the present invention. The second figure is an exploded perspective view of the first embodiment of the present invention. The third figure is a three-dimensional schematic diagram of the flexible unit of the second figure according to the first embodiment of the present invention. The fourth figure is a schematic diagram of the first embodiment of the present invention from another perspective of the third figure. The fifth figure is a top view of the first embodiment of the present invention. The sixth figure is a cross-sectional view of the first embodiment of the present invention taken along the line 6-6 of the fifth figure. The seventh figure is a cross-sectional view of the first embodiment of the present invention along the line 7-7 of the fifth figure. Figure 8 is an exploded perspective view of the second embodiment of the present invention.

Base 10 Platform 20 Table Body 21 Tenon 22 Flexible Unit 30 First Body 31 Second Body 32 Arc Block 321 Groove 322 Third Body 33 First Deflection Part 34 Second Deflection Part 35 Drive Unit 40 encoder 41 linear motor 42

Claims (9)

A flexible mechanism includes: a base; a platform separated from the base; and a plurality of flexible units, the bridge is set between the base and the platform, and each has a fixed The first body on the base, a second body connected to the platform are separated from the first body, and a third body is separated from the first body by a first flexure and a second flexure. Connected with the first body and the second body, wherein the first flexure and the second flexure have elasticity in different dimensions; wherein each of the second bodies has an arc shape The block body and a groove recessed on the concave arc side of the arc-shaped block body, and the grooves of the second body parts are connected in series to form a circular ring. The flexible mechanism according to claim 1, wherein the platform has a table body between each of the second bodies, and a ring-shaped tenon is projected on the table body and embedded in the series Connected in a ring-shaped groove. The flexible mechanism according to claim 2, wherein the shape of the inner and outer ring surfaces of the tenon and the shape of the groove walls on both sides of the grooves are in the same push-pull shape. The flexible mechanism according to any one of claims 1 to 3, wherein the third body has an opening, the first flexure is located in the opening of the third body, and the first flexure has A first connecting piece, a first flexible piece and two second flexible pieces, the first flexible piece is bridged between the first connecting piece and the second body, and each of the second flexible pieces They are respectively bridged between the inner wall surface of the third body opening and the first coupling member. The flexible mechanism according to claim 4, wherein the number of the third body included in the flexible unit is two, and the number of the first flexure is two, and each of the first flexures is The ways to provide flexibility in different dimensions are separately arranged in the openings of the third body. The flexible mechanism according to claim 5, wherein the first body has an opening, the second flexure is located in the opening of the first body; the second flexure has a second coupling member, a The third flexible member and the second fourth flexible member are bridged between the second coupling member and the outer side wall surface of the third body, and each fourth flexible member is respectively bridged to the Between the inner side wall surface of the first body opening and the second coupling member. The flexible mechanism according to claim 6, wherein the number of openings of the first body is two, and the number of the second flexures is two, and each of the second flexures provides The elastic modes of different dimensions are separately arranged in the openings of the first body. The flexible mechanism according to claim 1, further comprising a driving unit, which is arranged between the platform and the base for driving the platform. The flexible mechanism according to claim 8, wherein the drive unit includes an encoder and a plurality of linear motors.

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