JP2020112516A - Compliant mechanism - Google Patents
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Abstract
Description
本発明はモーションプラットフォームに関し、特にコンプライアント機構に関するものであり、それはショートストロークの精密定位プラットフォームに応用することでモーション精度及びレスポンス速度を向上させることができる。 The present invention relates to a motion platform, and more particularly to a compliant mechanism, which can be applied to a short stroke precision localization platform to improve motion accuracy and response speed.
ナノメートルサイズの半導体技術の発展に伴い、半導体設備製造業者においては高精度・ハイレスポンスを具備する設備の技術的な研究開発が目標とされ続けており、その中で、広く測定設備の構成ユニットとされているモーションプラットフォームは、高速の運動速度が提供可能である一方で、慣性の作用のため、運動中の物体を極めて短い時間内に精確な位置上で停止させることは実際のところ困難であり、さらに一般的には、完全に停止する前の揺れ動く程度が大きいほど、相対的に整定に要する時間は大きくなるため、精確な位置上への迅速な定位が難しくなる。 With the development of nanometer-sized semiconductor technology, semiconductor equipment manufacturers continue to aim for technological R&D of equipment equipped with high precision and high response. While the motion platform, which is said to be capable of providing a high motion velocity, it is actually difficult to stop a moving object at a precise position in a very short time due to the action of inertia. Yes, and more generally, the greater the degree of swaying before complete stop, the longer the time required for settling, and the more difficult it is to quickly localize to an accurate position.
周知技術では、運動物の慣性が招く整定の難しさを払拭するために、コンプライアント機構によって移動後に生じる運動誤差に対する補償を提供することで、整定時間を低減させるとともに精度の向上を期待するものが開示されており、こうした周知技術は確かに運動物に対して運動位置誤差の補償を提供することができるものの、コンプライアント機構自体の精度を確保するために、周知のコンプライアント機構では柔軟性を提供するための各構成部位が全て一体成形されるため、これが周知のコンプライアント機構の製造難易度を高くしており、また高コンプライアント構成の一部に弾性疲労が生じて補修を要する場合には、周知のコンプライアント機構が一体成形であるため、機構全体を取り外して交換するほかなく、資源を有効利用することができない。 In the well-known technology, in order to eliminate the difficulty of settling caused by the inertia of a moving object, a compliant mechanism is provided to compensate for a motion error that occurs after movement, thereby reducing settling time and improving accuracy. Although these known techniques can certainly provide motion position error compensation for moving objects, the known compliant mechanism is flexible in order to ensure the accuracy of the compliant mechanism itself. This makes the known compliant mechanism more difficult to manufacture because each of the component parts to provide the component is integrally molded, and when elastic fatigue occurs in a part of the highly compliant structure and repair is required. Since the well-known compliant mechanism is integrally molded, the entire mechanism cannot be effectively used without removing and replacing the entire mechanism.
そのため、本発明は、分離可能な幾つかの独立したコンプライアントユニットで構成され、製造、組立加工や補修に便利なコンプライアント機構を提供することを主な目的としている。 Therefore, the main object of the present invention is to provide a compliant mechanism which is composed of several separable independent compliant units and is convenient for manufacturing, assembling, and repairing.
上記目的を達成するために、本発明が提供するコンプライアント機構は、シャーシと、シャーシと互いに隔たれたテーブルと、シャーシとテーブルとの間に橋設され、それぞれがシャーシに固定された第１胴部と、第１胴部と互いに隔たれ、テーブルと連結された第２胴部と、第１撓性部及び第２撓性部のそれぞれにより第１胴部及び第２胴部と連結され、その中で、第１撓性部と第２撓性部は異なる次元上の弾性を有している、第３胴部とを有する、複数のコンプライアントユニットとが含まれる。 In order to achieve the above object, a compliant mechanism provided by the present invention is a chassis, a table separated from the chassis, and a first body bridged between the chassis and the table, each of which is fixed to the chassis. And a second body portion that is separated from the first body portion and is connected to the table, and is connected to the first body portion and the second body portion by the first flexible portion and the second flexible portion, respectively. Among them, the first flexible portion and the second flexible portion include a plurality of compliant units having a third body portion having different dimensional elasticity.
その中で、第３胴部は開口を有し、第１撓性部は第３胴部の開口中に位置し、第１撓性部は第１結合部材、第１可撓性部材及び２つの第２可撓性部材を有し、第１可撓性部材は第１結合部材と第２胴部との間に橋設され、各第２可撓性部材はそれぞれ第３胴部の開口の内側壁面と第１結合部材との間に橋設される。 Wherein, the third body portion has an opening, the first flexible portion is located in the opening of the third body portion, and the first flexible portion includes the first coupling member, the first flexible member and the second flexible member. Two second flexible members, the first flexible member is bridged between the first coupling member and the second body, and each second flexible member has an opening in the third body. Is bridged between the inner wall surface and the first coupling member.
その中で、第１胴部は開口を有し、第１撓性部は第１胴部の開口中に位置し、第２撓性部は第２結合部材、第３可撓性部材及び２つの第４可撓性部材を有し、第３可撓性部材は第２結合部材と第３胴部の外側壁面との間に橋設され、各第４可撓性部材はそれぞれ第１胴部の開口の内側壁面と第２結合部材との間に橋設される。 In that, the first body has an opening, the first flexible portion is located in the opening of the first body, and the second flexible portion has a second coupling member, a third flexible member and a second flexible member. Four fourth flexible members, the third flexible member is bridged between the second coupling member and the outer wall surface of the third barrel portion, and each of the fourth flexible members is the first barrel member. It is bridged between the inner wall surface of the opening of the section and the second coupling member.
その中で、第１胴部、第２胴部、第３胴部、第１撓性部及び第２撓性部の相対的な位置、数、形状又は構造は、上記の内容に限らず、実際の状況に応じて変えることができる。 Among them, the relative positions, numbers, shapes or structures of the first body portion, the second body portion, the third body portion, the first flexible portion and the second flexible portion are not limited to the above contents, It can be changed according to the actual situation.
図１〜図７を参照して、本発明の第１実施例が提供するコンプライアント機構は、シャーシ１０と、シャーシ１０と互いに隔たれたテーブル２０と、シャーシ１０とテーブル２０との間に橋設された複数のコンプライアントユニット３０とが含まれる。本実施例中、コンプライアントユニット３０の数は４つであり、且つモジュール化設計されており、シャーシ１０及びテーブル２０と組み合わせて一体型部材にすることができ、且つコンプライアントユニット３０のそれぞれはいずれも単独で交換可能である。コンプライアントユニット３０のうちの１つが疲労破損した場合には、保守担当者がそのコンプライアントユニット３０を取り換えればよく、コンプライアント機構全体を交換する必要がないため、コンプライアント機構のメンテナンスコストが大幅に低減されると同時に、メンテナンス・調整の利便性も向上する。 1 to 7, a compliant mechanism provided by a first embodiment of the present invention includes a chassis 10, a table 20 separated from the chassis 10, and a bridge installed between the chassis 10 and the table 20. A plurality of compliant units 30 are included. In this embodiment, the number of compliant units 30 is four, and the modules are modularized, and can be combined with the chassis 10 and the table 20 to form an integral member. Both can be replaced independently. When one of the compliant units 30 is damaged by fatigue, a maintenance person may replace the compliant unit 30, and it is not necessary to replace the entire compliant mechanism, which reduces maintenance costs for the compliant mechanism. It is greatly reduced and the convenience of maintenance and adjustment is improved.
各コンプライアントユニット３０はそれぞれがシャーシ１０に固定された第１胴部３１と、第１胴部３１と互いに隔たれ、テーブル２０と連結された第２胴部３２と、第１胴部３１と第２胴部３２との間にそれぞれ位置し、且つ互いに隔たれた２つの第３胴部３３と、各第３胴部３３及び第２胴部３２にそれぞれ連結された２つの第１撓性部３４と、各第３胴部３３及び第１胴部３１にそれぞれ連結された２つの第２撓性部３５とを含み、その中で、テーブル２０の移動方向を制限するための、第１撓性部３４と第２撓性部３５の配置位置及び方向に基づく異なる次元上の弾性（例えばＸ軸の次元Ａ１、Ｙ軸の次元Ａ２）を有する。本実施例において、具体的には、第２胴部３２と連結される各第１撓性部３４がそれぞれＡ１及びＡ２の次元の異なる弾性を提供し、第１胴部３１と連結される各第２撓性部３５がそれぞれＡ１及びＡ２方向の次元の異なる弾性を提供し、これにより、各第３胴部３３が第１胴部３１、第２胴部３２との間でいずれとも次元方向の異なる２つの弾性を得ることができる。また部材間の結合における空間状態については、第１胴部３１に２つの開口３１１を備えて、それぞれに次元の異なる弾性を有する各第２撓性部３５を収容させて設けており、また各第３胴部３３それぞれに、次元の異なる弾性を有する各第１撓性部３４を収容させて設けるための開口３３３を備えている。 Each compliant unit 30 has a first body 31 fixed to the chassis 10, a second body 32 separated from the first body 31 and connected to the table 20, a first body 31 and a first body 31. Two third body portions 33 that are respectively located between the two body portions 32 and are separated from each other, and two first flexible portions 34 that are respectively connected to the third body portion 33 and the second body portion 32. And two second flexible portions 35 connected to the third body portion 33 and the first body portion 31, respectively, in which the first flexible portion for limiting the moving direction of the table 20 is included. The portions 34 and the second flexible portion 35 have different dimensional elasticity (for example, X-axis dimension A1 and Y-axis dimension A2) based on the arrangement positions and directions. In the present embodiment, specifically, each of the first flexible portions 34 connected to the second body 32 provides elasticity of different dimensions of A1 and A2, and is connected to the first body 31. The second flexible portions 35 provide elasticity of different dimensions in the A1 and A2 directions, respectively, so that each of the third body parts 33 is dimensionally oriented between the first body part 31 and the second body part 32. It is possible to obtain two different elasticity. Regarding the space state in the connection between the members, the first body portion 31 is provided with two openings 311 to accommodate the respective second flexible portions 35 having different dimensions of elasticity, and Each of the third body parts 33 is provided with an opening 333 for accommodating and providing each of the first flexible parts 34 having different elasticity.
各第２胴部３２は、それぞれが円弧状ブロック３２１及び円弧状ブロック３２１の凹弧側に凹設された溝３２２を有し、且つ各第２胴部３２の溝３２２が互いに順次繋ぎ合わされて円環状を呈するようにさせている。テーブル２０は、各第２胴部３２間の間に位置するテーブル体２１と、テーブル体２１に突設され、且つ円環状を呈するように連結された溝３２２中に嵌合接続される円環状のほぞ２２とを有する。その中で、ほぞ２２の内・外側円環面の形状及び溝３２２の溝壁の両側の形状は同じテーパー状を呈している。 Each second body portion 32 has an arcuate block 321 and a groove 322 recessed on the concave arc side of the arcuate block 321, and the grooves 322 of each second body portion 32 are sequentially connected to each other. It has an annular shape. The table 20 has a table body 21 located between the respective second body portions 32, and an annular shape fitted and connected to a groove 322 that is provided so as to project from the table body 21 and that is connected so as to have an annular shape. And a tenon 22. Among them, the shape of the inner and outer annular surfaces of the tenon 22 and the shape of both sides of the groove wall of the groove 322 have the same taper shape.
第１撓性部３４は第１結合部材３４１、２つの第１可撓性部材３４２及び２つの第２可撓性部材３４３を有し、第１可撓性部材３４２は第１結合部材３４１と第２胴部３２との間に橋設され、各第２可撓性部材３４３はそれぞれ第３胴部３３の開口３３３の内側壁面と第１結合部材３４１との間に橋設される。詳述すると、第１撓性部３４の２つの第１可撓性部材３４２は、第２可撓性部材３４３と並列方式で第３胴部３３の開口３３３中に配置され、且つそれぞれ対応する第１結合部材３４１、第２胴部３２及び第３胴部３３の開口３３３の内側壁面に連結される。その中で、第１可撓性部材３４２及び第２可撓性部材３４３の相対的な位置、数、形状又は構造は、上記の実施例が開示するものに限らず、実際の状況に応じて変えることができる。 The first flexible portion 34 has a first coupling member 341, two first flexible members 342 and two second flexible members 343, and the first flexible member 342 is connected to the first coupling member 341. The second flexible member 343 is bridged between the second body 32 and the inner wall surface of the opening 333 of the third body 33 and the first coupling member 341. More specifically, the two first flexible members 342 of the first flexible portion 34 are arranged in parallel with the second flexible member 343 in the opening 333 of the third body portion 33, and correspond to each other. The first coupling member 341, the second body portion 32, and the third body portion 33 are connected to inner wall surfaces of the opening 333. Among them, the relative positions, numbers, shapes, or structures of the first flexible member 342 and the second flexible member 343 are not limited to those disclosed in the above embodiment, and may be changed depending on the actual situation. Can be changed.
また、第１可撓性部材３４２及び第２可撓性部材３４３のそれぞれには、耐変形能を向上させるための補強リブ３４４が一体に凸設されている。 Reinforcing ribs 344 for improving the deformation resistance are integrally formed on the first flexible member 342 and the second flexible member 343, respectively.
第２撓性部３５が有する第２結合部材３５１、第３可撓性部材３５２及び第４可撓性部材３５３は、いずれも第１撓性部３４の部材と同一であり、異なる点として、第１撓性部３４では第３可撓性部材３５２が第２結合部材３５１と第３胴部３３の外側壁面との間に橋設され、各第４可撓性部材３５３が第１胴部３１の開口の内側壁面と第２結合部材３５１との間に橋設される。また、第３可撓性部材３５２及び第４可撓性部材３５３のそれぞれには、耐変形能を向上させるための補強リブ３５４が一体に凸設されている。 The second coupling member 351, the third flexible member 352, and the fourth flexible member 353 of the second flexible portion 35 are all the same as the members of the first flexible portion 34, and different points are as follows. In the first flexible portion 34, the third flexible member 352 is bridged between the second coupling member 351 and the outer wall surface of the third body portion 33, and each fourth flexible member 353 is the first body portion. It is bridged between the inner wall surface of the opening of 31 and the second coupling member 351. Reinforcing ribs 354 for improving the deformation resistance are integrally provided on the third flexible member 352 and the fourth flexible member 353, respectively.
本実施例中、コンプライアントユニット３０はモジュール化設計であるため、製造、組立及び取り外しが容易になる作用を有しており、４つのコンプライアントユニット３０は、互いに嵌合される方式によってテーブル２０を嵌入して固定することができると同時に、ほぞ２２と溝３２２の対応し合う構造設計によってテーブル２０が自動的にコンプライアントユニット３０上に調整されて嵌合されることを実現可能にしている。その後は、調整ねじ（図示しない）を用いて各コンプライアントユニット３０とテーブル２０との間を精確に微調整し、ピッチ（Ｐｉｔｃｈ）、ヨー（Ｙａｗ）、ロール（Ｒｏｌｌ）の角度誤差を改善することにより、組立精度を向上させる。 In this embodiment, since the compliant unit 30 has a modular design, it has an effect of facilitating manufacturing, assembling and disassembling, and the four compliant units 30 are fitted to each other in the table 20. Can be fitted and fixed, while the corresponding structural design of the tenon 22 and the groove 322 allows the table 20 to be automatically adjusted and fitted onto the compliant unit 30. .. After that, an adjustment screw (not shown) is used to perform precise fine adjustment between each compliant unit 30 and the table 20 to improve the angle error of the pitch, the yaw, and the roll. As a result, the assembly accuracy is improved.
テーブル２０とシャーシ１０との間は駆動ユニット４０を有し、駆動ユニット４０はエンコーダー４１及び複数のリニアモーター４２を含む。 A drive unit 40 is provided between the table 20 and the chassis 10, and the drive unit 40 includes an encoder 41 and a plurality of linear motors 42.
上記部材の構成により、本発明のコンプライアント機構は、使用において、ロングストロークの高速移動後、慣性の作用により極めて短い時間内に所定の精確な位置で停止させることができない場合に、各コンプライアントユニット３０の第１撓性部３４及び第２撓性部３５とリニアモーター４２との組み合わせによって、移動後のテーブル２０に対して運動誤差の補償を行うことで、整定時間を低減し、生産効率を向上させるという目的を達成することができる。 With the configuration of the above-described members, the compliant mechanism of the present invention, in use, after each high-speed movement of a long stroke, when the compliant mechanism cannot stop at a predetermined precise position within an extremely short time due to the action of inertia, The first flexible portion 34 and the second flexible portion 35 of the unit 30 and the linear motor 42 are combined to compensate the motion error of the table 20 after the movement, thereby reducing the settling time and increasing the production efficiency. It is possible to achieve the purpose of improving.
図８が示す通り、本発明の第２実施例は、コンプライアントユニット３０の数が８つであるという点が第１実施例とは主に異なり、同様に互いに嵌合される方式によってテーブル２０を嵌入して固定する。また、コンプライアントユニット３０は、シャーシ１０に固定された第１胴部３１と、第１胴部３１と互いに隔たれ、テーブル２０と連結された第２胴部３２と、第１撓性部３４及び第２撓性部３５のそれぞれにより第１胴部３１及び第２胴部３２と連結される第３胴部３３とを有する。 As shown in FIG. 8, the second embodiment of the present invention is mainly different from the first embodiment in that the number of compliant units 30 is eight, and the table 20 is also fitted to each other by a similar manner. Insert and fix. Further, the compliant unit 30 includes a first body portion 31 fixed to the chassis 10, a second body portion 32 which is separated from the first body portion 31 and is connected to the table 20, a first flexible portion 34, and It has the 3rd body part 33 connected with the 1st body part 31 and the 2nd body part 32 by each of the 2nd flexible part 35.
Claims (10)
前記シャーシと互いに隔たれたテーブルと、
前記シャーシと前記テーブルとの間に橋設され、それぞれが前記シャーシに固定された第１胴部と、前記第１胴部と互いに隔たれ、前記テーブルと連結された第２胴部と、第１撓性部及び第２撓性部のそれぞれにより前記第１胴部及び前記第２胴部と連結され、その中で、前記第１撓性部と前記第２撓性部は異なる次元上の弾性を有している、第３胴部とを有する、複数のコンプライアントユニットと、を含むことを特徴とするコンプライアント機構。 Chassis,
A table separated from the chassis,
A first body part that is bridged between the chassis and the table and is fixed to the chassis; and a second body part that is separated from the first body part and that is connected to the table; A flexible portion and a second flexible portion are respectively connected to the first body portion and the second body portion, in which the first flexible portion and the second flexible portion have different dimensional elasticity. And a plurality of compliant units having a third body portion having a.
前記第１撓性部は第１結合部材、第１可撓性部材及び２つの第２可撓性部材を有し、前記第１可撓性部材は前記第１結合部材と前記第２胴部との間に橋設され、各前記第２可撓性部材はそれぞれ前記第３胴部の開口の内側壁面と前記第１結合部材との間に橋設されることを特徴とする請求項１から請求項４までのいずれか１項に記載のコンプライアント機構。 The third body has an opening, the first flexible portion is located in the opening of the third body,
The first flexible member has a first connecting member, a first flexible member, and two second flexible members, and the first flexible member has the first connecting member and the second body. 2. The second flexible member is bridged between the inner wall surface of the opening of the third body portion and the first coupling member, respectively. The compliant mechanism according to any one of claims 1 to 4.
前記第２撓性部は第２結合部材、第３可撓性部材及び２つの第４可撓性部材を有し、前記第３可撓性部材は前記第２結合部材と前記第３胴部の外側壁面との間に橋設され、各前記第４可撓性部材はそれぞれ前記第１胴部の開口の内側壁面と第２結合部材との間に橋設されることを特徴とする請求項６に記載のコンプライアント機構。 The first body has an opening, the second flexible portion is located in the opening of the first body,
The second flexible portion has a second coupling member, a third flexible member and two fourth flexible members, and the third flexible member has the second coupling member and the third body portion. And the fourth flexible member is bridged between the inner wall surface of the opening of the first body portion and the second coupling member, respectively. Item 7. The compliant mechanism according to Item 6.
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| JP2019005437A JP2020112516A (en) | 2019-01-16 | 2019-01-16 | Compliant mechanism |
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| JP2019005437A JP2020112516A (en) | 2019-01-16 | 2019-01-16 | Compliant mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018212775A1 (en) | 2017-05-18 | 2018-11-22 | Gkn Driveline North America, Inc. | Contoured differential gear washer with defined fluid flow path |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018212775A1 (en) | 2017-05-18 | 2018-11-22 | Gkn Driveline North America, Inc. | Contoured differential gear washer with defined fluid flow path |
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