CN107378514A - Mechanism with flexible elements and the gantry device containing the mechanism with flexible elements - Google Patents
Mechanism with flexible elements and the gantry device containing the mechanism with flexible elements Download PDFInfo
- Publication number
- CN107378514A CN107378514A CN201610322056.8A CN201610322056A CN107378514A CN 107378514 A CN107378514 A CN 107378514A CN 201610322056 A CN201610322056 A CN 201610322056A CN 107378514 A CN107378514 A CN 107378514A
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- China
- Prior art keywords
- engaging member
- flexible
- flexible part
- rigidity
- flexible elements
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/012—Portals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
Abstract
The present invention provides a kind of mechanism with flexible elements and the gantry device containing the mechanism with flexible elements, the mechanism with flexible elements includes the first engaging member, the second engaging member, the first flexible part, the second flexible part, the rigidity of the first flexible part is more than the rigidity of the second flexible part, to improve the first flexible part in the upward non-deformability of first axle；The gantry device includes seat, beam, the first mechanism with flexible elements, and the rigidity of the first flexible part of first mechanism with flexible elements is more than the rigidity of the second flexible part, to improve the first flexible part in the upward non-deformability of first axle.The mechanism with flexible elements of the present invention is according to this to gantry beam because locational space error caused by the factors such as kinematic error or deformation provides compensation, flexible part is lifted up rigidity in the kinematic axis that external force application is received relative to crossbeam, to avoid crossbeam from producing hysteresis phenomenon in motion.
Description
Technical field
The present invention is relevant with motion pedestal, the dragon especially with regard to a kind of mechanism with flexible elements and containing the mechanism with flexible elements
Door gear.
Background technology
The limitation being limited in structural rigidity, manufacture, assembling and control technology, motion pedestal is in motion when institute
Caused geometric error or space surface error be difficult to avoid that, and in order to reduce site error for mobile
Influence, the mechanism for having reached error compensation by different technologies means in known technology is present, and it, which is removed, has
The calibration of motion path is carried out by technologies such as laser interferometers, reduces or prevents outside the occurrence degree of error,
Also have by buffering or deformation technology, for improper torque caused by motion pedestal when avoiding the kinematic error from occurring
Or eliminate its stress.
Specifically, in the gantry device 1 that known technology as shown in Figure 1 is provided, it is in being cross-placed on pedestal 2
The side of crossbeam 3 set allowable strain mechanism with flexible elements 4, accordingly, when between the both ends of crossbeam 3 and pedestal 2
When relative motion produces error, mechanism with flexible elements 4 is tolerable with the caused position angle of crossbeam 3 under dynamic error
Change, avoids causing improperly stress to crossbeam 3；These are by cutting down the rigid skill of mechanism with flexible elements 4 itself
Effect is allowed in the deformation that art means are reached, admittedly it may achieve its expected purpose, but also will be because of mechanism with flexible elements 4
Low rigidity cause hysteresis phenomenon of the crossbeam 3 in motion, the still kindhearted design of non-category.
The content of the invention
Therefore, it is a primary object of the present invention to provide a kind of mechanism with flexible elements of high axial stiffness and scratched containing this
The gantry device of property mechanism, wherein, mechanism with flexible elements with deformation-compensated gantry beam position error, and make
The mechanism with flexible elements has higher rigidity upwards in the kinematic axis moved corresponding to crossbeam, avoids because of flexible machine
The rigid deficiency of structure causes motion sluggish or the missing of repeatability error.
To reach above-mentioned purpose, the present invention uses following technical scheme：
A kind of mechanism with flexible elements, it is to provide deformation with the flexible part of majority, and makes those flexible parts corresponding to this
Kinematic axis has higher rigidity upwards.
Those flexible parts refer to corresponding positioned at motion axial direction in the kinematic axis possessed high stiffness upwards
On flexible part rigidity, higher than the rigidity of the flexible part beyond the motion axial direction.
Wherein, to make the technological means rigidly improved positioned at the upward flexible part of the kinematic axis, will can have
Those identical rigid flexible parts, by the change on density of setting or angle, make it on different directions
With different rigidity, or the different flexible part with different rigidity can also be set, to improve spy respectively
Determine the rigidity on direction.
In on specific technology contents, the mechanism with flexible elements includes one first engaging member；One second engaging member,
It is spaced to come with first engaging member, it is to each other and can be in the upward relative displacement of a first axle；First is flexible
Part, positioned at first axle upwards and bridge is located between first engaging member and second engaging member, and can with this
Relative displacement between one engaging member and second engaging member to each other and deform；And one second flexible part, position
In the non-first axle upwards and bridge be located between first engaging member and second engaging member.Pass through above-mentioned component
Combination, the rigidity of the first flexible part is more than the rigidity of the second flexible part, first can to improve this
Part is scratched in the upward non-deformability of the first axle.
Wherein, first engaging member has an openend, and second engaging member is located at opening for first engaging member
In mouthful end, and first and second flexible part is set second to be combined with this in the openend of first engaging member
Between part.
Wherein, the density of setting of the first flexible part is more than the density of setting of the second flexible part.
Wherein, first and second flexible part is respectively tabular reed.
Wherein, first engaging member to each other can also be in the upper relative position in one second axial direction with second engaging member
Move, and make the rigidity of the second flexible part of correspondence on second axial direction, more than non-positioned at second axial direction
On the second flexible part of correspondence rigidity.
Wherein, first and second flexible part has different-thickness respectively.
Further, the present invention, which takes off mechanism with flexible elements, to be combined with gantry device.Specifically, gantry device
Include one first mechanism with flexible elements, and first mechanism with flexible elements makes first engaging member can with second engaging member
Be divided into displacement on a beam of the gantry device toward each other, so as to first engaging member and this second
When engaging member is produced relative motion by the drive of the beam, it is deformed those flexible parts.
For the spatial position change in response to the beam, gantry device also includes one second mechanism with flexible elements, with this first
Mechanism with flexible elements is divided on the beam.Second mechanism with flexible elements has one the 3rd engaging member；One the 4th engaging member,
It is spaced to come with the 3rd engaging member, it is to each other and can be in the upward relative displacement of a first axle；3rd is flexible
Part, positioned at first axle upwards and bridge is located between the 3rd engaging member and the 4th engaging member, and can with this
Relative displacement between three engaging members and the 4th engaging member to each other and deform；And one the 4th flexible part, position
The non-first axle is upward and bridge is located between the 3rd engaging member and the 4th engaging member.And pass through above-mentioned component
Combination, make the 3rd flexible part rigidity be more than the 4th flexible part rigidity, can to improve the 3rd
Part is scratched in the upward non-deformability of the first axle.
Wherein, first engaging member and the 3rd engaging member are fixedly arranged on the beam body both ends respectively, also, this
Two engaging members and the 4th engaging member are attached at respectively on the sliding part respectively.
Wherein, first engaging member of first mechanism with flexible elements and second engaging member to each other can also be in one the
Two axially upper relative displacements, and the 3rd engaging member of second mechanism with flexible elements and the 4th engaging member are to each other
Can also be in one second axially upper relative displacement, and make first mechanism with flexible elements in pair on second axial direction
The second flexible part and second mechanism with flexible elements are answered in the corresponding 4th flexible part on second axial direction, each other
Rigidity it is unequal.First and second mechanism with flexible elements is set to have in a different direction with this different firm
Property, moderately to change in response to the site error of the beam in different directions, specifically in response to the beam in a plane
Because of the rotation given birth to dynamic error and flexible during upper motion, or caused by lower given birth to deformation etc. of expanding with heat and contract with cold
Spatial position change.
Wherein, the 3rd engaging member has an openend, and the 4th engaging member is located at opening for the 3rd engaging member
In mouth end, and the 3rd and the 4th flexible part is set to be combined in the openend of the 3rd engaging member with the 4th
Between part.
It is an advantage of the invention that：
The mechanism with flexible elements of the present invention with deformation-compensated gantry beam position error, and the mechanism with flexible elements is existed
There is higher rigidity upwards corresponding to a kinematic axis of crossbeam motion, avoid the rigidity deficiency because of mechanism with flexible elements
Cause motion sluggishness or the missing of repeatability error.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of an existing gantry device.
Fig. 2 is the three-dimensional structure diagram of the gantry device of the embodiment of the present invention.
Fig. 3 is the front view of the gantry device of the embodiment of the present invention.
Fig. 4 is the structural representation of the first mechanism with flexible elements of the embodiment of the present invention.
Fig. 5 is the structural representation of the second mechanism with flexible elements of the embodiment of the present invention.
Fig. 6 is the top view of the gantry device of the embodiment of the present invention.
Fig. 7 is the plan of second mechanism with flexible elements of another embodiment of the present invention.
Fig. 8 is the plan of first mechanism with flexible elements of another embodiment of the present invention.
Embodiment
First, Fig. 2 is referred to, shown in 3, in an embodiment of the present invention provided gantry device 10, its
Consist predominantly of 20, one beam 30, the first mechanism with flexible elements 40 and the second mechanism with flexible elements 50.
Seat 20 has seat body 21, and two columns 22 are fixedly arranged on this on the both ends of side seat surface respectively, two-phase
Separate the guide groove 23 come to be divided on the upside seat surface of a body 21, and each prolong along a straight line in parallel with each other
Appropriate length is stretched, two actuators 24 being made up of linear motor, is respectively arranged on the top of column 22.
Beam 30 has first and second sliding part 31,32, connects each actuator 24 respectively and must be slidedly arranged on each
In guide groove 23, and the first axial x virtual along one, can point-blank it be carried out by the guiding of each guide groove 23
Shift reciprocately, a beam body 33, above seat body 21, and slips part 31,32 between first and second
Between, and its both ends 331,332 is respectively by the overlap joint of first and second mechanism with flexible elements 40,50, indirectly
Ground is bridged between first and second sliding part 31,32, so that beam 30 is slidedly arranged on seat 20, is allowed to
Obtain the shift reciprocately that straight line is carried out along the first axial x.
And referring to Fig. 2, shown in 4, the first mechanism with flexible elements 40 has the first engaging member 41, the second engaging member
42 and the first flexible part 43.First engaging member 41 has an openend, and slips part towards first with openend
31 direction, which is amplexiformed, to be fixedly arranged on one end 331 of beam body 33.Second engaging member 42, which amplexiforms, is fixedly arranged on the first cunning
On fitting 31, and in the openend of the first engaging member 41.First flexible part 43 is respectively to have bullet
The tabular reed of property, also, after the major axis of the first flexible part 43 stretches out, can occur simultaneously in first each other
The pivot of mechanism with flexible elements 40.And the first flexible part 43 bridges at the interior of the openend of the first engaging member 41
Between side wall and the second engaging member 42, and it is close to increase the setting that the first flexible part 43 is located on the first axial x
Degree, to improve the first flexible part 43 in the rigidity on the first axial x.With this, when beam 30 is along first axle
When carrying out linear reciprocation displacement to x, the relatively large number of first flexible part 43 of quantity is set to provide higher
Rigidity, to avoid the generation of known missing.
Fig. 2 is referred to again, shown in 5, the 3rd engaging member 51, the 4th knot possessed by the second mechanism with flexible elements 50
52 and the 3rd flexible part 53 of component etc. is same as outside the component of the first mechanism with flexible elements 40, and it is different from first
The ground of mechanism with flexible elements 40 further increases by the 4th flexible part 54, and it is on another the second virtual axial y.
Density of setting by increasing by the 4th flexible part 54 can improve the 4th flexible part 54 and be located on the second axial y
Rigidity.
By the composition of above-mentioned component, gantry device 10 is upper in using, and can pass through first and second flexible machine
The flexible part 43,53 of first and the 3rd in structure 40,50 improves the rigidity of flexible part on the first axial x, makes
When being carried out reciprocal linear motion along the first axial x by external force, the phenomenon that its must be made sluggish obtains beam 30
It must improve, meanwhile, by first and the 3rd flexible elasticity of itself of part 43,53, to weaken it in non-fortune
The upward rigidity of moving axis, and can as shown in Figure 6 as, when the both ends of beam 30 in each guide groove 23 same movable property life
During error, the tolerable beam 30 that produces of first and second mechanism with flexible elements 40,50 is caused by under rotational deformation
Change in location, in case the same dynamic error at the both ends of beam 30 produces improper stress, meanwhile, it can also pass through outside
Control system to beam 30 carries out rotation control.
In addition, when beam 30 is produced the change in size expanded with heat and contract with cold by temperature action, its change in size is stretched
Contracting direction and the second axial y are similar, hereat, then can by the 4th flexible part 54 of the second mechanism with flexible elements 50,
The deformation corresponded on the second axial y is provided, to compensate the change in size of beam 30.
In addition to above-mentioned specific effect, first and second mechanism with flexible elements 40,50 has for known technology
Have smaller volume, in addition to not taking up space, can also avoid increase height, and must make the centre of motion with carrying
It is located at for the external drive component of displacement power in same level, to reduce the generation of Surplus Moment.
Furthermore to increase flexible part in kinematic axis rigid technological means upwards, also not only more than take off implementation
It is limited disclosed in example, that is, removes and can be changed by the centralised or decentralised density of setting of flexible part, it is specific to increase
Rigidity on direction is outer, the different flexible part with different rigidity can be also combined to configuration to reach, example
Second mechanism with flexible elements 50a as shown in Figure 7, there is the 4th flexible part 54a on non-second axial direction, its
Density of setting is less than the 4th flexible part 54a on the second axial direction；First mechanism with flexible elements as shown in Figure 8 again
40a another embodiment, the first mechanism with flexible elements 40a also includes the second flexible part 44a, positioned at non-first axle
Upwards and bridge be located between the first engaging member 41a and the second engaging member 42a.In other words, no matter number is passed through
The change in change, contoured article or construction in amount, it is all to be able to reach the upward flexible part of raising kinematic axis
Rigidity, category the present invention answers shielded category.
The technical principle described above for being presently preferred embodiments of the present invention and its being used, for the skill of this area
It is without departing from the spirit and scope of the present invention, any to be based on the technology of the present invention side for art personnel
Equivalent transformation on the basis of case, it is simple replace etc. it is obvious change, belong to the scope of the present invention it
It is interior.
Claims (10)
1. a kind of mechanism with flexible elements, includes：
One first engaging member；
One second engaging member, it is spaced to come with first engaging member, it is to each other and can be upward in a first axle
Relative displacement；
One first flexible part, positioned at the first axle upwards and bridge located at first engaging member and second engaging member
Between, and can be deformed with the relative displacement of first engaging member and second interelement to each other；And
One second flexible part, positioned at the non-first axle upwards and bridge second is combined located at first engaging member with this
Between part；
It is characterized in that：
The rigidity of the first flexible part be more than the second flexible part rigidity, to improve the first flexible part in
The upward non-deformability of the first axle.
2. mechanism with flexible elements according to claim 1, it is characterised in that first engaging member has
One openend, second engaging member are located in the openend of first engaging member, and make described first and
Second flexible part is in the openend of first engaging member between second engaging member.
3. mechanism with flexible elements according to claim 1 or 2, it is characterised in that it is described first and second
Flexible part is respectively tabular reed.
4. mechanism with flexible elements according to claim 1, it is characterised in that first engaging member and
Two engaging members to each other can be in one second axially upper relative displacement, and makes correspondence on second axial direction the
The rigidity of two flexible parts, more than the rigidity of non-the second flexible part of correspondence on second axial direction.
5. mechanism with flexible elements according to claim 1, it is characterised in that described first and second is flexible
Part has different-thickness respectively.
6. a kind of gantry device, it is characterised in that include：
One, there are a body, two columns, two guide grooves and two actuators, wherein, two column is solid respectively
On the both ends of side seat surface with this；Two guide groove is divided into the upside seat surface of this body in parallel with each other
On；And two actuator is respectively arranged on the column top；
One beam, there are two sliding parts and a beam body, wherein, each sliding part is slidedly arranged in each guide groove respectively, and
Each actuator is connected respectively, axially to carry out shift reciprocately along one first；The beam body be located at side with the seat and
Between the two sliding part；And
One first mechanism with flexible elements, there is one first engaging member, one second engaging member, one first flexible part and one
Second flexible part, wherein, first engaging member can be divided into this with displacement toward each other with second engaging member
Liang Shang；The first flexible part is located at first axle and bridges at first engaging member and second engaging member upwards
Between；The second flexible part is located at the non-first axle upwards and bridge is located at first engaging member and second engaging member
Between, accordingly, when first engaging member is produced relative motion with second engaging member by the drive of the beam,
Even the first flexible part is deformed；
It is characterized in that：
The rigidity of the first flexible part be more than the second flexible part rigidity, to improve the first flexible part in
The upward non-deformability of the first axle.
7. gantry device according to claim 6, also include one second mechanism with flexible elements, with this
One mechanism with flexible elements is divided into the both ends of the beam, and second mechanism with flexible elements has one the 3rd engaging member, one the 4th
Engaging member, one the 3rd flexible part and one the 4th flexible part, wherein, the 3rd engaging member and the 4th engaging member
It can be divided into displacement on the beam toward each other；3rd flexible part is located at the first axle and bridged upwards
Between the 3rd engaging member and the 4th engaging member；4th flexible part is located at non-first axle bridge upwards
Between the 3rd engaging member and the 4th engaging member, accordingly, when the 3rd engaging member is combined with the 4th
When part is produced relative motion by the drive of the beam, even the 3rd flexible part is deformed；
It is characterized in that：
The rigidity of 3rd flexible part be more than the 4th flexible part rigidity, to improve the 3rd flexible part in
The upward non-deformability of the first axle.
8. gantry device according to claim 7, it is characterised in that first engaging member and
Three engaging members are fixedly arranged on the beam body both ends respectively, and second engaging member and the 4th engaging member are attached at respectively
On each sliding part.
9. gantry device according to claim 7, it is characterised in that：First mechanism with flexible elements
First engaging member and the second engaging member to each other can also be in one second axially upper relative displacements；Described second
The 3rd engaging member and the 4th engaging member of mechanism with flexible elements to each other can also be in the upper relative positions in one second axial direction
Move；First mechanism with flexible elements is in the second flexible part of correspondence on second axial direction and the second flexible machine
Structure is unequal in the 4th flexible part of correspondence on second axial direction, mutual rigidity.
10. gantry device according to claim 7, it is characterised in that：
First engaging member has an openend, and second engaging member is located at opening for first engaging member
In mouthful end, and make the described first flexible part and the second flexible part in the openend of first engaging member with
Between second engaging member；And
3rd engaging member has an openend, and the 4th engaging member is located at opening for the 3rd engaging member
In mouthful end, and make the 3rd flexible part and the 4th flexible part in the openend of the 3rd engaging member with
Between 4th engaging member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610322056.8A CN107378514B (en) | 2016-05-16 | 2016-05-16 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610322056.8A CN107378514B (en) | 2016-05-16 | 2016-05-16 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107378514A true CN107378514A (en) | 2017-11-24 |
| CN107378514B CN107378514B (en) | 2019-02-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610322056.8A Active CN107378514B (en) | 2016-05-16 | 2016-05-16 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
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| EP3670067A1 (en) * | 2018-12-20 | 2020-06-24 | Etel S. A.. | Positioning device in portal design |
| CN111435094A (en) * | 2019-01-15 | 2020-07-21 | 大银微系统股份有限公司 | Flexible mechanism |
| CN111434969A (en) * | 2019-01-15 | 2020-07-21 | 大银微系统股份有限公司 | Flexible mechanism |
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| CN111434969B (en) * | 2019-01-15 | 2021-10-15 | 大银微系统股份有限公司 | Flexible mechanism |
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| Publication number | Publication date |
|---|---|
| CN107378514B (en) | 2019-02-05 |
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