CN109099830A - A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension - Google Patents
A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension Download PDFInfo
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- CN109099830A CN109099830A CN201810944068.3A CN201810944068A CN109099830A CN 109099830 A CN109099830 A CN 109099830A CN 201810944068 A CN201810944068 A CN 201810944068A CN 109099830 A CN109099830 A CN 109099830A
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- outer framework
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention discloses a kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension, including the X that successively installs from top to bottom to actuating platform, intermediate guide table and Y-direction actuating platform, intermediate guide table includes the load platform for being oriented to outer framework and four corners and being connected in guiding outer framework by flexible connecting member, X to actuating platform include the first outer framework and the X that moves in X direction of driving load platform to actuating mechanism, X is flexibly connected in the first outer framework to actuating mechanism, Y-direction actuating platform includes the Y-direction actuating mechanism that the second outer framework and driving load platform are moved along Y-direction, Y-direction actuating mechanism is flexibly connected in the second outer framework, first outer framework, it is oriented to outer framework, second outer framework is fastenedly connected, measurement load platform X is installed negative to the first displacement sensor of displacement and measurement on intermediate guide table The second displacement sensor of carrying platform Y-direction displacement.The workbench is able to achieve big stroke, high-frequency micro-displacement Scan orientation.
Description
Technical field
The invention belongs to the quick positioning fields of micro-nano, and in particular to a kind of quick micro-displacement Scan orientation work of direct drive type two dimension
Make platform.
Background technique
Currently, micro-displacement Scan orientation workbench is mainly used for the fields such as active optics system, precision manufactureing, micro-nano operation
In.
CN107240423A discloses a kind of three-dimensional manometer workbench based on flexible hinge, although can be realized three
The movement in direction (i.e. X, Y, Z-direction), but piezoelectric ceramic actuator for realizing that X-direction movement and Y-direction move is arranged for it
In the same plane, and using inside casing, center, outline border the structure type cooperated, it is size-constrained in the x direction and the y direction (to work
The length and width dimensions of platform are limited) in the case where, mobile displacement is small (i.e. stroke is small), and the motion frequency of workbench is because being pressed
The limitation of the working frequency of electroceramics driver and it is relatively low.
Summary of the invention
The object of the present invention is to provide a kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension, to realize big stroke
Micro-displacement Scan orientation.
The quick micro-displacement Scan orientation workbench of direct drive type two dimension of the present invention, including what is successively installed from top to bottom
X is to actuating platform, intermediate guide table and Y-direction actuating platform；The intermediate guide table is an integral molding structure, including guiding
Outer framework and four corners are connected to the load platform in guiding outer framework by flexible connecting member, and the X is to actuating platform
Integrated formed structure, including the first outer framework and the X that moves in X direction of driving load platform to actuating mechanism, the X is to actuating
Mechanism flexibility is connected in the first outer framework, and the Y-direction actuating platform is an integral molding structure, including the second outer framework and driving
The Y-direction actuating mechanism that load platform is moved along Y-direction, Y-direction actuating mechanism flexible connection is in the second outer framework, and described the
One outer framework, guiding outer framework, the second outer framework are fastenedly connected, and measurement load platform X is equipped on the intermediate guide table
It (is moved to the first displacement sensor of displacement (displacement moved in X direction) and the displacement of measurement load platform Y-direction along Y-direction
Dynamic displacement) second displacement sensor.Load (such as camera lens, ultrasonic probe, laser probe etc.) is mounted on load platform
On, the fine motion of X, Y-direction are done with dynamic load by load platform.
The X to actuating mechanism be front and back symmetrical structure, including two X to actuator constraint mechanism and along Y-direction arrange
The first link block, X pre-pressing into actuator constraint mechanism stacks type piezoelectric ceramic actuator, and X constrains machine to actuator
The X of structure changes to length with the length for stacking type piezoelectric ceramic actuator, and X passes through flexibility to the right end of actuator constraint mechanism
Hinge is connect with the right inner wall of the first outer framework, left end is connect by flexible hinge with the one end of the first link block, and first connects
The end of block is connect to connect by the first L shape flexibility leaf spring with the left inside wall of the first outer framework, first link block with it is described
The left side of load platform is fastenedly connected.When stacked piezoelectric ceramic actuator elongates or shortens under driving voltage effect,
Two X will drive the first link block to actuator constraint mechanism and do fine motion in X direction relative to the first outer framework.X is to actuating
Mechanism is front and back symmetrical structure, and the displacement comprehensive function that the first link block exports two X to actuator constraint mechanism is in load
Platform moves load platform in X direction more stable, and flexible hinge, the first L shape flexibility leaf spring avoid assembly bring size
Error ensure that the X of micro-displacement Scan orientation workbench to displacement accuracy.
The Y-direction actuating mechanism is bilateral symmetry, including two Y-direction actuator constraint mechanisms and is arranged in X direction
The second link block, pre-pressing stacks type piezoelectric ceramic actuator in Y-direction actuator constraint mechanism, and Y-direction actuator constrains machine
The Y-direction length of structure changes with the length for stacking type piezoelectric ceramic actuator, and the front end of Y-direction actuator constraint mechanism passes through flexibility
Hinge is connect with the preceding inner wall of the second outer framework, rear end is connect by flexible hinge with the one end of the second link block, and second connects
The end of block is connect to connect by the 2nd L shape flexibility leaf spring with the rear inner wall of the second outer framework, second link block with it is described
The rear lateral portion of load platform is fastenedly connected.When stacked piezoelectric ceramic actuator elongates or shortens under driving voltage effect,
Two Y-direction actuator constraint mechanisms will drive the second link block and do fine motion along Y-direction relative to the second outer framework.Y-direction actuating
Mechanism is bilateral symmetry, and the displacement comprehensive function that the second link block exports two Y-direction actuator constraint mechanisms is in load
Platform moves load platform along Y-direction more stable, and flexible hinge, the 2nd L shape flexibility leaf spring avoid assembly bring size
Error ensure that the Y-direction displacement accuracy of micro-displacement Scan orientation workbench.
The X is symmetrical oval flexible sheets spring structure to actuator constraint mechanism, and Y-direction actuator constraint mechanism is pair
The oval flexible sheets spring structure of title.
First displacement sensor be capacitance micro-displacement sensor, including with first support the first movable plate electrode and
The first fixed plate with the first mounting base, first support are fixedly connected on the right side upper surface of the load platform, and first
Mounting base is fixedly connected on the right side upper surface of the guiding outer framework, and the first movable plate electrode and the first fixed plate are vertically just
It is right.The second displacement sensor is capacitance micro-displacement sensor, including the second movable plate electrode with second support and is had
Second fixed plate of the second mounting base, second support are fixedly connected on the front side lower surface of the load platform, the second installation
Seat is fixedly connected on the front side lower surface of the guiding outer framework, and the second movable plate electrode and the vertical face of the second fixed plate.The
One, the second movable plate electrode is moved with load platform, generates variation with the spacing of the first, second fixed plate, capacitance occurs corresponding
Variation, as feedback signal, stacks type piezoelectric ceramics by control circuit driving to detect the moving displacement of load platform
Actuator realizes closed-loop control.
The both ends of first mounting base offer the first installation strip-shaped hole, determine for adjusting the first movable plate electrode and first
Initial distance between pole plate；The both ends of second mounting base offer the second installation strip-shaped hole, dynamic for adjusting second
Initial distance between pole plate and the second fixed plate.
The pre-amplifying module being electrically connected with first, second displacement sensor is mounted on upper table of the X to actuating platform
Face, the distance between the first, second displacement sensor and pre-amplifying module are relatively close, to improve anti-interference ability, accordingly
Ground improves system performance.
The flexible connecting member is made of the first, second, third flexible hinge and the first, second linking arm, the first flexible hinge
Side connect with the inner wall of guiding outer framework, the other side is connect with the side of the first linking arm, the other side of the first linking arm
It is connect with the side of the second flexible hinge, the other side of the second flexible hinge is connect with the side of the second linking arm, the second linking arm
The other side is connect with the side of third flexible hinge, and the other side of third flexible hinge is connect with the corner outer wall of the load platform.
Flexible connecting member avoids assembly bring scale error, ensure that the displacement accuracy of micro-displacement Scan orientation workbench.
The present invention will be realized due to will realize that the X of X-direction movement is mounted on the upper surface of intermediate guide table to actuating platform
The Y-direction actuating platform of Y-direction movement is mounted below intermediate guide table, and X is mutually only to actuating platform and Y-direction actuating platform
Vertical work, will not interact, in the case where size-constrained in the x direction and the y direction (i.e. the length and width dimensions of workbench are limited),
Still the micro-displacement Scan orientation of big stroke is realized, and with 0.027 ‰ displacement accuracy (0.8 under i.e. 30 μm of stroke
The location error of nm), displacement accuracy is high, and compact-sized；It is directly driven, is realized by stacking type piezoelectric ceramic actuator
The micro-displacement Scan orientation of high-frequency (identical as the working frequency for stacking type piezoelectric ceramic actuator).
Detailed description of the invention
Fig. 1 is decomposition diagram of the invention.
Fig. 2 is axonometric drawing of the invention.
Fig. 3 is top view of the invention.
Fig. 4 is bottom view of the invention.
Fig. 5 is the assembling relationship figure of the first, second displacement sensor and intermediate guide table in the present invention.
Fig. 6 is top view of the X in the present invention to actuating platform.
Fig. 7 is the bottom view of the first displacement sensor in the present invention.
Fig. 8 is the top view of the second displacement sensor in the present invention.
Fig. 9 is the functional block diagram controlled the present invention.
Figure 10 is the circuit block diagram controlled the present invention.
Specific embodiment
It elaborates with reference to the accompanying drawing to the present invention.
The quick micro-displacement Scan orientation workbench of direct drive type two dimension as shown in Figures 1 to 8, including successively pacify from top to bottom
The X of dress is to actuating platform 2, intermediate guide table 1 and Y-direction actuating platform 3.
As shown in figure 5, intermediate guide table 1 is an integral molding structure, including guiding outer framework 10 and four corners pass through
Flexible connecting member 11 is connected to the load platform 12 in guiding outer framework 10.Flexible connecting member 11 is by the first flexible hinge 111, second
Flexible hinge 112, third flexible hinge 113, the first linking arm 114 and the second linking arm 115 are constituted, the first linking arm 114 and second
Linking arm 115 is vertical, and the side of the first flexible hinge 111 connect with the inner wall of guiding outer framework 10, the other side and the first linking arm
114 side connection, the other side of the first linking arm 114 are connect with the side of the second flexible hinge 112, the second flexible hinge 112
The other side is connect with the side of the second linking arm 115, and the other side of the second linking arm 115 and the side of third flexible hinge 113 connect
It connects, the other side of third flexible hinge 113 is connect with the corner outer wall of load platform 12.
As shown in Fig. 1, Fig. 5, Fig. 7, Fig. 8, measurement load platform X first to displacement is installed on intermediate guide table 1
The second displacement sensor 5 of displacement sensor 4 and measurement load platform Y-direction displacement.First displacement sensor 4 is condenser type microbit
Displacement sensor, including the first movable plate electrode 41 with first support 40 and with the first fixed plate 43 of the first mounting base 42,
The both ends of one mounting base 42 offer the first installation strip-shaped hole 44, and first support 40 is fixedly connected on load by lock-screw
The right side upper surface of platform 12, the first mounting base 42 fix company by the cooperation of lock-screw and the first installation strip-shaped hole 44
It connects in the right side upper surface of guiding outer framework 10, and the first movable plate electrode 41 and the vertical face of the first fixed plate 43.Second displacement
Sensor 5 is capacitance micro-displacement sensor, including the second movable plate electrode 51 with second support 50 and has the second mounting base
52 the second fixed plate 53, the both ends of the second mounting base 52 offer the second installation strip-shaped hole 54, and second support 50 passes through lock
Tight screw is fixedly connected on the front side lower surface of load platform 12, and the second mounting base 52 passes through lock-screw and the second mounting bar
The cooperation in shape hole 54 and the front side lower surface for being fixedly connected on guiding outer framework 10, and the second movable plate electrode 51 and the second fixed plate
53 vertical faces.
As shown in fig. 6, X is an integral molding structure to actuating platform 2, including the first outer framework 20 and it is located at the first outer framework
In 20 and the X that drives load platform 12 to move in X direction is to actuating mechanism, X to actuating mechanism be front and back symmetrical structure, including two
The first link block 21 that a X is arranged to actuator constraint mechanism 22 and one along Y-direction, X to actuator constraint mechanism 22 be pair
The oval flexible sheets spring structure of title, X pre-pressing into actuator constraint mechanism 22 stack type piezoelectric ceramic actuator 6, X
Change to the X of actuator constraint mechanism 22 to length with the length for stacking type piezoelectric ceramic actuator 6, one of X is to holding
The right end of row device constraint mechanism 22 is connect by flexible hinge with the right back interior wall of the first outer framework 20, left end passes through flexible hinge
It is connect on the right side of chain and the rear end of the first link block 21, it is flexible by a first L shape on the left of the rear end of the first link block 21
Leaf spring 23 is connect with the left back interior wall of the first outer framework 20, another X passes through flexibility to the right end of actuator constraint mechanism 22
Hinge is connect with the right inner wall front of the first outer framework 20, left end passes through on the right side of the front end of flexible hinge and the first link block 21
Connection passes through the left inside of another the first L shape flexibility leaf spring 23 and the first outer framework 20 on the left of the front end of the first link block 21
The connection of wall front, the first link block 21 are fastenedly connected by the left side of lock-screw and load platform 12.
Y-direction actuating platform 3 is an integral molding structure, including the second outer framework 30 and be located at the second outer framework 30 in and drive
The Y-direction actuating mechanism that load platform is moved along Y-direction, Y-direction actuating mechanism are bilateral symmetry, including two Y-direction actuators
Constraint mechanism 32 and second link block 31 arranged in X direction, Y-direction actuator constraint mechanism 32 are that symmetrical ellipse is soft
Property piece spring structure, pre-pressing stacks type piezoelectric ceramic actuator 6 in Y-direction actuator constraint mechanism 32, and Y-direction actuator constrains machine
The Y-direction length of structure 32 changes, one of Y-direction actuator constraint mechanism 32 with the length for stacking type piezoelectric ceramic actuator 6
Front end connect with the preceding inner wall left part of the second outer framework 30 by flexible hinge, rear end passes through flexible hinge and the second link block
The left part rear side of connection on front side of 31 left part, the second link block 31 passes through outside a 2nd L shape flexibility leaf spring 33 and second
The rear inner wall left part of frame 30 connects, and the front end of another Y-direction actuator constraint mechanism 32 passes through flexible hinge and the second outline border
The preceding inner wall right part connection of frame 30, rear end are connect by the right part of flexible hinge and the second link block 31 front side, the second connection
It is connect by another the 2nd L shape flexibility leaf spring 33 with the rear inner wall right part of the second outer framework 30 on rear side of the right part of block 31, the
Two link blocks 31 are fastenedly connected by the rear lateral portion of lock-screw and load platform 12.
The first outer framework 20, guiding outer framework 10, the second outer framework 30 are positioned by shop bolt, and passed through from top to bottom
Lock-screw is fastenedly connected.Load (such as camera lens, ultrasonic probe, laser probe etc.) is mounted on load platform 12, is passed through
Load platform 12 does the fine motion of X, Y-direction with dynamic load.Before being electrically connected with the first displacement sensor 4, second displacement sensor 5
It sets amplification module 7 and is mounted on X to the upper surface of actuating platform 2.
The course of work of the invention is as follows:
When needing, load platform 12 is mobile in X direction it is expected displacement xdWhen, control circuit output voltage signal, pre-pressing X to
Stacking in actuator constraint mechanism 22 be after type piezoelectric ceramic actuator 6 receives the voltage signal, elongation or shortens, X to
The corresponding elongation in X direction of actuator constraint mechanism 22 perhaps shortens X and pushes or pull first to actuator constraint mechanism 22
Link block 21 moves in X direction, and the first link block 21 drives load platform 12 to move in X direction, and the of the first displacement sensor 4
The distance between one movable plate electrode 41 and the first fixed plate 43 increase or reduce, the first displacement sensor 4 output reflection in real time the
The electric signal of the distance between one movable plate electrode 41 and the first fixed plate 43 variation, amplifies through pre-amplifying module 7, then through corresponding position
After reason, it is converted to the variable quantity of the moving displacement in X direction of load platform 12, and feeds back to control circuit, is realized to load platform
The closed-loop control of 12 moving displacements in X direction.
Y is displaced when needing load platform 12 to move expectation along Y-directiondWhen, control circuit output voltage signal, pre-pressing exists
Stacking in Y-direction actuator constraint mechanism 32 be after type piezoelectric ceramic actuator 6 receives the voltage signal, elongation or shortens, Y
Perhaps shorten Y-direction actuator constraint mechanism 32 along Y-direction elongation accordingly to actuator constraint mechanism 32 and pushes or pull the
Two link blocks 31 are moved along Y-direction, and the second link block 31 drives load platform 12 to move along Y-direction, second displacement sensor 5
The distance between second movable plate electrode 51 and the second fixed plate 53 increase or reduce, the output reflection in real time of second displacement sensor 5
The electric signal of the distance between second movable plate electrode 51 and the second fixed plate 53 variation, amplifies through pre-amplifying module 7, then through corresponding
After processing, load platform 12 is converted to along the variable quantity of Y-direction moving displacement, and feed back to control circuit, realize flat to load
Closed-loop control of the platform 12 along Y-direction moving displacement.
As shown in figure 9, can be adjusted using input front signal when controlling micro-displacement Scan orientation workbench+preceding
The hybrid algo-rithm of feedback and feedback, wherein input front signal adjusting mainly filters out the frequency of workbench natural resonance frequency section
Component signal avoids workbench free oscillation campaign, and feed-forward control algorithm is mainly used for improving the fast response time of workbench,
And establish stack type piezoelectric ceramic actuator nonlinear model it is non-linear to compensate its, PID/feedback control is mainly used for the
One, the signal of second displacement sensor feedback carries out accurate amendment, guarantees that high-precision exports.
As shown in Figure 10, the control circuit controlled micro-displacement Scan orientation workbench includes FPGA, the first DAC
(i.e. the first D/A converter), the 2nd DAC, ADC(, that is, A/D converter), sensor demodulator circuit and driver.By FPGA and
One DAC conversion circuit constitutes DDS digital frequency synthesizer, generate the sinusoidal reference signal of high stable for motivating first, the
X is converted to amplitude-modulated signal to displacement signal by two displacement sensors, the first displacement sensor, and second displacement sensor is by Y-direction position
Shifting signal is converted to amplitude-modulated signal, is demodulated to corresponding X by sensor demodulator circuit and (believes to, Y-direction displacement signal for simulation
Number), FPGA is fed back to using ADC, FPGA receives the signal sent by host computer and carries out corresponding feedback control processing
Two-way piezoelectricity control signal (for analog signal) is converted to by the 2nd DAC afterwards, and is separately input to the input terminal of driver, is driven
Output is to type piezoelectric ceramic actuator is stacked accordingly after the signal is carried out power amplification by dynamic device, and then FPGA sends signal
Return host computer.
Claims (8)
1. a kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension, it is characterised in that: including successively installing from top to bottom
X to actuating platform (2), intermediate guide table (1) and Y-direction actuating platform (3)；The intermediate guide table (1) is integrated into
Type structure is connected in guiding outer framework (10) including guiding outer framework (10) and four corners by flexible connecting member (11)
Load platform (12), the X are an integral molding structure to actuating platform (2), including the first outer framework (20) and driving load are put down
The X that platform moves in X direction is flexibly connected in the first outer framework (20) to actuating mechanism, the X to actuating mechanism, the Y-direction
Actuating platform (3) is an integral molding structure, and is caused including the second outer framework (30) and driving load platform along the Y-direction that Y-direction moves
Motivation structure, the Y-direction actuating mechanism flexible connection is in the second outer framework (30), first outer framework (20), guiding outline border
Frame (10), the second outer framework (30) are fastenedly connected, and measurement load platform X is equipped on the intermediate guide table (1) to displacement
The first displacement sensor (4) and measurement load platform Y-direction displacement second displacement sensor (5).
2. the quick micro-displacement Scan orientation workbench of direct drive type two dimension according to claim 1, it is characterised in that: the X
It is front and back symmetrical structure to actuating mechanism, including two X to actuator constraint mechanism (22) and along the first connection of Y-direction arrangement
Block (21), X are stacked type piezoelectric ceramic actuator (6) to actuator constraint mechanism (22) interior pre-pressing, and X constrains machine to actuator
The X of structure (22) changes to length with the length for stacking type piezoelectric ceramic actuator (6), and X is to actuator constraint mechanism (22)
Right end is connect by flexible hinge with the right inner wall of the first outer framework (20), left end passes through flexible hinge and the first link block (21)
One end connection, the end of the first link block (21) passes through the first L shape flexibility leaf spring (23) and the first outer framework (20)
Left inside wall connection, first link block (21) and the left side of the load platform (12) are fastenedly connected.
3. the quick micro-displacement Scan orientation workbench of direct drive type two dimension according to claim 1 or 2, it is characterised in that: institute
Stating Y-direction actuating mechanism is bilateral symmetry, second arranged including two Y-direction actuator constraint mechanisms (32) and in X direction
Link block (31), Y-direction actuator constraint mechanism (32) interior pre-pressing stack type piezoelectric ceramic actuator (6), and Y-direction actuator is about
The Y-direction length of beam mechanism (32) changes, Y-direction actuator constraint mechanism with the length for stacking type piezoelectric ceramic actuator (6)
(32) front end is connect by flexible hinge with the preceding inner wall of the second outer framework (30), rear end is connect by flexible hinge with second
The one end of block (31) connects, and the end of the second link block (31) passes through the 2nd L shape flexibility leaf spring (33) and the second outer framework
(30) rear inner wall connection, second link block (31) and the rear lateral portion of the load platform (12) are fastenedly connected.
4. the quick micro-displacement Scan orientation workbench of direct drive type two dimension according to claim 3, it is characterised in that: the X
It is symmetrical oval flexible sheets spring structure to actuator constraint mechanism (22), the Y-direction actuator constraint mechanism (32) is pair
The oval flexible sheets spring structure of title.
5. quickly micro-displacement Scan orientation workbench, feature exist direct drive type two dimension according to any one of claims 1 to 4
In:
First displacement sensor (4) is capacitance micro-displacement sensor, including the first dynamic pole with first support (40)
Plate (41) and first fixed plate (43) with the first mounting base (42), first support (40) are fixedly connected on the load platform
(12) right side upper surface, the first mounting base (42) are fixedly connected on the right side upper surface of guiding outer framework (10),
And first movable plate electrode (41) and the first fixed plate (43) vertical face；
The second displacement sensor (5) is capacitance micro-displacement sensor, including the second dynamic pole with second support (50)
Plate (51) and second fixed plate (53) with the second mounting base (52), second support (50) are fixedly connected on the load platform
(12) front side lower surface, the second mounting base (52) are fixedly connected on the front side lower surface of guiding outer framework (10),
And second movable plate electrode (51) and the second fixed plate (53) vertical face.
6. the quick micro-displacement Scan orientation workbench of direct drive type two dimension according to claim 5, it is characterised in that:
The both ends of first mounting base (42) offer the first installation strip-shaped hole (44), and the two of second mounting base (52)
End offers the second installation strip-shaped hole (54).
7. the quick micro-displacement Scan orientation workbench of direct drive type according to claim 6 two dimension, it is characterised in that: with it is described
The pre-amplifying module (7) of first, second displacement sensor (4,5) electrical connection is mounted on upper surface of the X to actuating platform (2).
8. the quick micro-displacement Scan orientation workbench of direct drive type two dimension according to claim 7, it is characterised in that: described soft
Property connector (11) is by the first, second, third flexible hinge (111,112,113) and the first, second linking arm (114,115) structure
Connect at the side of, the first flexible hinge (111) with the inner wall of guiding outer framework (10), the other side and the first linking arm (114)
Side connection, the other side of the first linking arm (114) are connect with the side of the second flexible hinge (112), the second flexible hinge (112)
The other side is connect with the side of the second linking arm (115), the other side and third flexible hinge (113) of the second linking arm (115)
Side connection, the other side of third flexible hinge (113) is connect with the corner outer wall of the load platform (12).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110508996A (en) * | 2019-09-24 | 2019-11-29 | 吉林大学 | Timing control surface micro-structure array processing unit (plant) and method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215275A (en) * | 1987-03-04 | 1988-09-07 | Matsushita Electric Ind Co Ltd | Slight displacement device for solid-state pickup device |
| JPH1047931A (en) * | 1996-08-01 | 1998-02-20 | Hitachi Denshi Ltd | Two-dimensional measuring device |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN2726829Y (en) * | 2004-09-10 | 2005-09-21 | 哈尔滨工业大学博实精密测控有限责任公司 | Large displacement micro-motion working bench of two-dimensional modular elliptical enlarging mechanism |
| CN101359082A (en) * | 2008-09-02 | 2009-02-04 | 厦门大学 | Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN203171265U (en) * | 2013-03-11 | 2013-09-04 | 东莞华中科技大学制造工程研究院 | Two-dimensional decoupling motion platform |
| CN204397857U (en) * | 2015-01-20 | 2015-06-17 | 哈尔滨溶智纳芯科技有限公司 | A kind of two degrees of freedom combined type closed-loop nanoscale micromotion platform |
| CN106373617A (en) * | 2016-09-27 | 2017-02-01 | 沈阳工业大学 | Piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform |
-
2018
- 2018-08-18 CN CN201810944068.3A patent/CN109099830B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215275A (en) * | 1987-03-04 | 1988-09-07 | Matsushita Electric Ind Co Ltd | Slight displacement device for solid-state pickup device |
| JPH1047931A (en) * | 1996-08-01 | 1998-02-20 | Hitachi Denshi Ltd | Two-dimensional measuring device |
| CN2726829Y (en) * | 2004-09-10 | 2005-09-21 | 哈尔滨工业大学博实精密测控有限责任公司 | Large displacement micro-motion working bench of two-dimensional modular elliptical enlarging mechanism |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN101359082A (en) * | 2008-09-02 | 2009-02-04 | 厦门大学 | Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control |
| CN203171265U (en) * | 2013-03-11 | 2013-09-04 | 东莞华中科技大学制造工程研究院 | Two-dimensional decoupling motion platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN204397857U (en) * | 2015-01-20 | 2015-06-17 | 哈尔滨溶智纳芯科技有限公司 | A kind of two degrees of freedom combined type closed-loop nanoscale micromotion platform |
| CN106373617A (en) * | 2016-09-27 | 2017-02-01 | 沈阳工业大学 | Piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform |
Non-Patent Citations (1)
| Title |
|---|
| 黄挺朋: "压电驱动微动定位平台系统设计与开发", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110508996A (en) * | 2019-09-24 | 2019-11-29 | 吉林大学 | Timing control surface micro-structure array processing unit (plant) and method |
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