CN107979223A - A kind of portable high acceleration macro/micromotion platform - Google Patents

A kind of portable high acceleration macro/micromotion platform Download PDF

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Publication number
CN107979223A
CN107979223A CN201711468380.1A CN201711468380A CN107979223A CN 107979223 A CN107979223 A CN 107979223A CN 201711468380 A CN201711468380 A CN 201711468380A CN 107979223 A CN107979223 A CN 107979223A
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CN
China
Prior art keywords
axis
platform
base
micromotion
portable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711468380.1A
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Chinese (zh)
Inventor
张璐凡
李勤良
田海龙
冯伟
杨丽彦
陈晨
李雪丽
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Henan University of Technology
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Henan University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Henan University of Technology filed Critical Henan University of Technology
Priority to CN201711468380.1A priority Critical patent/CN107979223A/en
Publication of CN107979223A publication Critical patent/CN107979223A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06Means for converting reciprocating motion into rotary motion or vice versa
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/116Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears

Abstract

The invention belongs to microelectronic manufacturing technology field,More particularly to a kind of portable high acceleration macro/micromotion platform,Including base,Platform base is provided with base,X-axis platform is provided with platform base,Y-axis platform is provided with X-axis platform,Electric rotating machine is provided with base,Gear is fixedly installed on the output shaft of electric rotating machine,The bottom sides of X-axis platform are provided with X-axis rack,The bottom sides of Y-axis platform are provided with Y-axis rack,Gear is engaged with X-axis rack and Y-axis rack at the same time,XY micromotion platforms are provided with above Y-axis platform,X-axis guide rail pair is equipped between X-axis platform and platform base,Y-axis guide rail pair is equipped between X-axis platform and Y-axis platform,The portable macro/micromotion platform employs electric rotating machine and drives X-axis platform and Y-axis platform at the same time,Solve the problems, such as that traditional platform takes big quantity space and can not save complete machine space and cost,Make X/Y shaft platforms are high to accelerate linear motion at the same time,Platform is set to realize fast positioning.

Description

A kind of portable high acceleration macro/micromotion platform
Technical field
The invention belongs to microelectronic manufacturing technology field, and in particular to a kind of portable high acceleration macro/micromotion platform.
Background technology
The current macro/micromotion platform as critical equipment has been the fast-developing raising with productivity of microelectronic industry Important technical support is provided, especially in the field of microelectronic fabrication such as wire bonding and photoetching, more its development provides Strong power support.At present, in order to complete the targets such as the high speed of macro/micromotion platform and Ultra-precision positioning, phase is often provided The grand dynamic motor of large volume is driven and completes target, and to make to occupy space big for two linear electric motor in parallel drivings, can not contract Subtracting, this is carried out in the case of often leaving device space resource out of consideration, and it is passive and unreasonable in turn result in space layout, Even produce that production efficiency is low and wasting of resources phenomenon.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, and a kind of portable high acceleration macro/micromotion provided is put down Platform, the portable macro/micromotion platform solve parallel drive motor and take big quantity space and can not save complete machine space and cost The problem of.
What the present invention was realized in:A kind of portable height accelerates macro/micromotion platform, including base, is provided with base Platform base, is provided with X-axis platform on platform base, Y-axis platform is provided with X-axis platform, it is characterised in that:The base Centre position is provided with electric rotating machine, and gear is fixedly installed on the output shaft of electric rotating machine, and the interposition of platform base installs Platform base through hole is equipped with, the step of X-direction is provided through above platform base, the centre position of X-axis platform is provided with X Shaft platform through hole, the step and groove that are provided through X-direction below X-axis platform, the groove one side of X-axis platform are set X-axis rack is equipped with, is provided through the step of Y direction above X-axis platform, Y-axis is provided through below Y-axis platform The step and groove in direction, the groove one side of Y-axis platform are provided with Y-axis rack, XY fine motions are provided with above Y-axis platform and are put down Platform, is provided with X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator on XY micromotion platforms, X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator is connected by flexible hinge with XY micromotion platforms, is set at the step between X-axis platform and platform base The second guideway of the first guideway of X-axis and X-axis is equipped with, being provided with Y-axis first at the step between X-axis platform and Y-axis platform leads Rail is secondary and the second guideway of Y-axis, gear are engaged with X-axis rack and Y-axis rack at the same time.
The platform base through hole and X-axis platform through hole passes through for gear.
The upper plane of the platform base in X direction be provided at both ends with the second grating of X-axis first grating scale and X-axis Ruler, the upper plane of X-axis platform are provided at both ends with Y-axis first grating scale and Y-axis second grating scale along Y-direction, before X-axis platform Trailing flank centering is provided with X-axis first grating scale read head and X-axis second grating scale read head, and the left and right side centering of Y-axis platform is set Y-axis first grating scale read head and Y-axis second grating scale read head are equipped with, each grating ruler reading head is corresponded with grating scale.
Multiple rectangular through-holes are provided with the Y-axis platform.
The electric rotating machine can realize positive and negative movement.
Each guideway is rail plate pair.
Compared with prior art, beneficial effects of the present invention are as follows:
1st, the portable macro/micromotion platform employs electric rotating machine and drives X-axis platform and Y-axis platform at the same time, and it is flat to solve tradition The problem of platform takes big quantity space and can not save complete machine space and cost;
2nd, engaged using electric rotating machine drive gear, rack, the high of X/Y shaft platforms is accelerated linear motion, platform is realized Fast positioning;
3rd, grand, microfluidic platform linkage, Ultra-precision positioning is realized on the basis of trueness error compensation.
Brief description of the drawings
Fig. 1 is a kind of portable high structure diagram for accelerating macro/micromotion platform.
Fig. 2 is the connection diagram of electric rotating machine.
Fig. 3 is the structure diagram of platform base.
Fig. 4 is the structure diagram of X-axis platform.
Fig. 5 is the structure diagram of Y-axis platform.
In figure:1- electric rotating machines, 2- bases, 3- platform bases, 4- X-axis racks, the first guideway of 5- X-axis, 6-X axis are put down Platform, the second guideway of 7- X-axis, 8- Y-axis platforms, 9- X-axis piezoelectric ceramic actuators, 10- XY micromotion platforms, 11-Y axis piezoelectricity Ceramic driver, the first guideway of 12- Y-axis, 13-Y axis racks, the second guideway of 14- Y-axis, 15- gears, 16- output shafts, 17- X-axis first grating scales, 18- platform base through holes, 19- X-axis second grating scales, 20- Y-axis first grating scales, 21- X-axis First grating scale read head, 22- X-axis platform through holes, the second grating of 23- Y-axis, 24- X-axis second grating scale read heads, 25- Y-axis First grating scale read head, 26- flexible hinges, 27- Y-axis second grating scale read heads.
Embodiment
Embodiment 1, as shown in Fig. 1-Fig. 5 structures, a kind of portable high acceleration macro/micromotion platform, including base 2, base Platform base 3 is provided with 2, X-axis platform 6 is provided with platform base 3, Y-axis platform 8, Y-axis platform are provided with X-axis platform 6 Multiple rectangular through-holes are provided with 8, to mitigate the weight of Y-axis platform 8, improve positioning accuracy, the interposition of the base 2 installs Electric rotating machine 1 is equipped with, electric rotating machine 1 can realize positive and negative movement, gear 15 is fixedly installed on the output shaft 16 of electric rotating machine 1, The centre position of platform base 3 is provided with platform base through hole 18, and platform base 3 is provided through the step of X-direction above, The centre position of X-axis platform 6 is provided with X-axis platform through hole 22, and platform base through hole 18 and X-axis platform through hole 22 are for gear 15 Pass through, the step and groove that are provided through X-direction below X-axis platform 6, the groove one side of X-axis platform 6 are provided with X-axis rack 4, is provided through the step of Y direction above X-axis platform 6, and Y-axis is provided through below Y-axis platform 8 The step and groove in direction, the groove one side of Y-axis platform 8 are provided with Y-axis rack 13, and it is micro- that the top of Y-axis platform 8 is provided with XY Moving platform 10, is provided with X-axis piezoelectric ceramic actuator 9 and Y-axis piezoelectric ceramic actuator 11, X-axis piezoelectricity on XY micromotion platforms 10 Ceramic driver 9 and Y-axis piezoelectric ceramic actuator 11 are connected by flexible hinge 26 with XY micromotion platforms 10, and X-axis platform 6 is with putting down Be provided with the first guideway of X-axis 5 and the second guideway of X-axis 7 at step between platform base 3, X-axis platform 6 and Y-axis platform 8 it Between step at be provided with the first guideway of Y-axis 12 and the second guideway of Y-axis 14, gear 15 at the same time with X-axis rack 4 and Y-axis tooth Bar 13 engages, and each guideway is rail plate pair.
The upper plane of the platform base 3 in X direction be provided at both ends with the second light of X-axis first grating scale 17 and X-axis Grid ruler 19, the upper plane of X-axis platform 6 are provided at both ends with Y-axis first grating scale 20 and Y-axis second grating scale 23, X along Y-direction The front and back sides centering of shaft platform 6 is provided with X-axis first grating scale read head 21 and X-axis second grating scale read head 24, Y-axis platform 8 Left and right side centering be provided with Y-axis first grating scale read head 25 and Y-axis second grating scale read head 27, each grating ruler reading head and light Grid ruler corresponds.
In the use of the present invention, platform base platform base through hole ensure gear can completely by with X-axis rack into Row engagement driving;X-axis first grating scale read head reads the micron accuracies reading in X-axis first grating scale, the second grating of X-axis Ruler reading head reads nano-precision reading in X-axis second grating scale, according to micron and nanometer error in reading, is made pottery by X-axis piezoelectricity Porcelain driver drives XY micromotion platforms to carry out error compensation in X-direction and carries out nano-precision positioning;Gear and Y-axis rack Driving is engaged, Y-axis first grating scale read head reads the micron accuracies reading in Y-axis first grating scale, the second light of Y-axis Grid ruler reading head reads nano-precision reading in Y-axis second grating scale, according to micron and nanometer error in reading, passes through Y-axis piezoelectricity Ceramic driver drives XY micromotion platforms to carry out error compensation in Y direction and carries out nano-precision positioning, so as to fulfill flat Quick, the precise positioning of platform.
The foregoing is merely the preferred embodiment of the present invention, is not intended to limit the invention, for those skilled in the art For member, the invention may be variously modified and varied, within the spirit and principles of the invention, any modification for being made, Equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.

Claims (6)

1. a kind of portable height accelerates macro/micromotion platform, including base, platform base is provided with base, is set on platform base X-axis platform is equipped with, Y-axis platform is provided with X-axis platform, it is characterised in that:The centre position of the base is provided with electric rotating Machine, is fixedly installed gear on the output shaft of electric rotating machine, the centre position of platform base is provided with platform base through hole, platform Submounts are provided through the step of X-direction, and the centre position of X-axis platform is provided with X-axis platform through hole, X-axis platform The following step and groove that are provided through X-direction, the groove one side of X-axis platform are provided with X-axis rack, X-axis platform Above be provided through the step of Y direction, the step and groove that are provided through Y direction below Y-axis platform, Y The groove one side of shaft platform is provided with Y-axis rack, and XY micromotion platforms are provided with above Y-axis platform, are set on XY micromotion platforms It is equipped with X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator, X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator It is connected by flexible hinge with XY micromotion platforms, the first guideway of X-axis is provided with the step between X-axis platform and platform base With the second guideway of X-axis, the second guide rail of the first guideway of Y-axis and Y-axis is provided with the step between X-axis platform and Y-axis platform Pair, gear are engaged with X-axis rack and Y-axis rack at the same time.
2. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that:The platform bottom Block hole and X-axis platform through hole pass through for gear.
3. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that:The platform bottom The upper plane of seat in X direction be provided at both ends with X-axis first grating scale and X-axis second grating scale, the upper plane of X-axis platform is along Y Direction is provided at both ends with Y-axis first grating scale and Y-axis second grating scale, and the front and back sides centering of X-axis platform is provided with X-axis One grating ruler reading head and X-axis second grating scale read head, the left and right side centering of Y-axis platform are provided with Y-axis first grating scale read head With Y-axis second grating scale read head, each grating ruler reading head is corresponded with grating scale.
4. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that:The Y-axis is put down Multiple rectangular through-holes are provided with platform.
5. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that:The electric rotating Machine can realize positive and negative movement.
6. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that:Each guide rail Pair is rail plate pair.
CN201711468380.1A 2017-12-29 2017-12-29 A kind of portable high acceleration macro/micromotion platform Pending CN107979223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711468380.1A CN107979223A (en) 2017-12-29 2017-12-29 A kind of portable high acceleration macro/micromotion platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711468380.1A CN107979223A (en) 2017-12-29 2017-12-29 A kind of portable high acceleration macro/micromotion platform

Publications (1)

Publication Number Publication Date
CN107979223A true CN107979223A (en) 2018-05-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711468380.1A Pending CN107979223A (en) 2017-12-29 2017-12-29 A kind of portable high acceleration macro/micromotion platform

Country Status (1)

Country Link
CN (1) CN107979223A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113023659A (en) * 2021-03-04 2021-06-25 广东工业大学 XY macro-micro motion platform and tail end feedback method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113023659A (en) * 2021-03-04 2021-06-25 广东工业大学 XY macro-micro motion platform and tail end feedback method thereof

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