CN107979223A - A kind of portable high acceleration macro/micromotion platform - Google Patents
A kind of portable high acceleration macro/micromotion platform Download PDFInfo
- Publication number
- CN107979223A CN107979223A CN201711468380.1A CN201711468380A CN107979223A CN 107979223 A CN107979223 A CN 107979223A CN 201711468380 A CN201711468380 A CN 201711468380A CN 107979223 A CN107979223 A CN 107979223A
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- axis
- platform
- base
- micromotion
- macro
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- 230000001133 acceleration Effects 0.000 title claims abstract description 11
- 230000033001 locomotion Effects 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000004377 microelectronic Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
- H02K7/116—Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention belongs to microelectronic manufacturing technology field,More particularly to a kind of portable high acceleration macro/micromotion platform,Including base,Platform base is provided with base,X-axis platform is provided with platform base,Y-axis platform is provided with X-axis platform,Electric rotating machine is provided with base,Gear is fixedly installed on the output shaft of electric rotating machine,The bottom sides of X-axis platform are provided with X-axis rack,The bottom sides of Y-axis platform are provided with Y-axis rack,Gear is engaged with X-axis rack and Y-axis rack at the same time,XY micromotion platforms are provided with above Y-axis platform,X-axis guide rail pair is equipped between X-axis platform and platform base,Y-axis guide rail pair is equipped between X-axis platform and Y-axis platform,The portable macro/micromotion platform employs electric rotating machine and drives X-axis platform and Y-axis platform at the same time,Solve the problems, such as that traditional platform takes big quantity space and can not save complete machine space and cost,Make X/Y shaft platforms are high to accelerate linear motion at the same time,Platform is set to realize fast positioning.
Description
Technical field
The invention belongs to microelectronic manufacturing technology field, and in particular to a kind of portable high acceleration macro/micromotion platform.
Background technology
The current macro/micromotion platform as critical equipment has been the fast-developing raising with productivity of microelectronic industry
Important technical support is provided, especially in the field of microelectronic fabrication such as wire bonding and photoetching, more its development provides
Strong power support.At present, in order to complete the targets such as the high speed of macro/micromotion platform and Ultra-precision positioning, phase is often provided
The grand dynamic motor of large volume is driven and completes target, and to make to occupy space big for two linear electric motor in parallel drivings, can not contract
Subtracting, this is carried out in the case of often leaving device space resource out of consideration, and it is passive and unreasonable in turn result in space layout,
Even produce that production efficiency is low and wasting of resources phenomenon.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, and a kind of portable high acceleration macro/micromotion provided is put down
Platform, the portable macro/micromotion platform solve parallel drive motor and take big quantity space and can not save complete machine space and cost
The problem of.
What the present invention was realized in：A kind of portable height accelerates macro/micromotion platform, including base, is provided with base
Platform base, is provided with X-axis platform on platform base, Y-axis platform is provided with X-axis platform, it is characterised in that：The base
Centre position is provided with electric rotating machine, and gear is fixedly installed on the output shaft of electric rotating machine, and the interposition of platform base installs
Platform base through hole is equipped with, the step of X-direction is provided through above platform base, the centre position of X-axis platform is provided with X
Shaft platform through hole, the step and groove that are provided through X-direction below X-axis platform, the groove one side of X-axis platform are set
X-axis rack is equipped with, is provided through the step of Y direction above X-axis platform, Y-axis is provided through below Y-axis platform
The step and groove in direction, the groove one side of Y-axis platform are provided with Y-axis rack, XY fine motions are provided with above Y-axis platform and are put down
Platform, is provided with X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator on XY micromotion platforms, X-axis piezoelectric ceramic actuator and
Y-axis piezoelectric ceramic actuator is connected by flexible hinge with XY micromotion platforms, is set at the step between X-axis platform and platform base
The second guideway of the first guideway of X-axis and X-axis is equipped with, being provided with Y-axis first at the step between X-axis platform and Y-axis platform leads
Rail is secondary and the second guideway of Y-axis, gear are engaged with X-axis rack and Y-axis rack at the same time.
The platform base through hole and X-axis platform through hole passes through for gear.
The upper plane of the platform base in X direction be provided at both ends with the second grating of X-axis first grating scale and X-axis
Ruler, the upper plane of X-axis platform are provided at both ends with Y-axis first grating scale and Y-axis second grating scale along Y-direction, before X-axis platform
Trailing flank centering is provided with X-axis first grating scale read head and X-axis second grating scale read head, and the left and right side centering of Y-axis platform is set
Y-axis first grating scale read head and Y-axis second grating scale read head are equipped with, each grating ruler reading head is corresponded with grating scale.
Multiple rectangular through-holes are provided with the Y-axis platform.
The electric rotating machine can realize positive and negative movement.
Each guideway is rail plate pair.
Compared with prior art, beneficial effects of the present invention are as follows：
1st, the portable macro/micromotion platform employs electric rotating machine and drives X-axis platform and Y-axis platform at the same time, and it is flat to solve tradition
The problem of platform takes big quantity space and can not save complete machine space and cost；
2nd, engaged using electric rotating machine drive gear, rack, the high of X/Y shaft platforms is accelerated linear motion, platform is realized
Fast positioning；
3rd, grand, microfluidic platform linkage, Ultra-precision positioning is realized on the basis of trueness error compensation.
Brief description of the drawings
Fig. 1 is a kind of portable high structure diagram for accelerating macro/micromotion platform.
Fig. 2 is the connection diagram of electric rotating machine.
Fig. 3 is the structure diagram of platform base.
Fig. 4 is the structure diagram of X-axis platform.
Fig. 5 is the structure diagram of Y-axis platform.
In figure：1- electric rotating machines, 2- bases, 3- platform bases, 4- X-axis racks, the first guideway of 5- X-axis, 6-X axis are put down
Platform, the second guideway of 7- X-axis, 8- Y-axis platforms, 9- X-axis piezoelectric ceramic actuators, 10- XY micromotion platforms, 11-Y axis piezoelectricity
Ceramic driver, the first guideway of 12- Y-axis, 13-Y axis racks, the second guideway of 14- Y-axis, 15- gears, 16- output shafts,
17- X-axis first grating scales, 18- platform base through holes, 19- X-axis second grating scales, 20- Y-axis first grating scales, 21- X-axis
First grating scale read head, 22- X-axis platform through holes, the second grating of 23- Y-axis, 24- X-axis second grating scale read heads, 25- Y-axis
First grating scale read head, 26- flexible hinges, 27- Y-axis second grating scale read heads.
Embodiment
Embodiment 1, as shown in Fig. 1-Fig. 5 structures, a kind of portable high acceleration macro/micromotion platform, including base 2, base
Platform base 3 is provided with 2, X-axis platform 6 is provided with platform base 3, Y-axis platform 8, Y-axis platform are provided with X-axis platform 6
Multiple rectangular through-holes are provided with 8, to mitigate the weight of Y-axis platform 8, improve positioning accuracy, the interposition of the base 2 installs
Electric rotating machine 1 is equipped with, electric rotating machine 1 can realize positive and negative movement, gear 15 is fixedly installed on the output shaft 16 of electric rotating machine 1,
The centre position of platform base 3 is provided with platform base through hole 18, and platform base 3 is provided through the step of X-direction above,
The centre position of X-axis platform 6 is provided with X-axis platform through hole 22, and platform base through hole 18 and X-axis platform through hole 22 are for gear 15
Pass through, the step and groove that are provided through X-direction below X-axis platform 6, the groove one side of X-axis platform 6 are provided with
X-axis rack 4, is provided through the step of Y direction above X-axis platform 6, and Y-axis is provided through below Y-axis platform 8
The step and groove in direction, the groove one side of Y-axis platform 8 are provided with Y-axis rack 13, and it is micro- that the top of Y-axis platform 8 is provided with XY
Moving platform 10, is provided with X-axis piezoelectric ceramic actuator 9 and Y-axis piezoelectric ceramic actuator 11, X-axis piezoelectricity on XY micromotion platforms 10
Ceramic driver 9 and Y-axis piezoelectric ceramic actuator 11 are connected by flexible hinge 26 with XY micromotion platforms 10, and X-axis platform 6 is with putting down
Be provided with the first guideway of X-axis 5 and the second guideway of X-axis 7 at step between platform base 3, X-axis platform 6 and Y-axis platform 8 it
Between step at be provided with the first guideway of Y-axis 12 and the second guideway of Y-axis 14, gear 15 at the same time with X-axis rack 4 and Y-axis tooth
Bar 13 engages, and each guideway is rail plate pair.
The upper plane of the platform base 3 in X direction be provided at both ends with the second light of X-axis first grating scale 17 and X-axis
Grid ruler 19, the upper plane of X-axis platform 6 are provided at both ends with Y-axis first grating scale 20 and Y-axis second grating scale 23, X along Y-direction
The front and back sides centering of shaft platform 6 is provided with X-axis first grating scale read head 21 and X-axis second grating scale read head 24, Y-axis platform 8
Left and right side centering be provided with Y-axis first grating scale read head 25 and Y-axis second grating scale read head 27, each grating ruler reading head and light
Grid ruler corresponds.
In the use of the present invention, platform base platform base through hole ensure gear can completely by with X-axis rack into
Row engagement driving；X-axis first grating scale read head reads the micron accuracies reading in X-axis first grating scale, the second grating of X-axis
Ruler reading head reads nano-precision reading in X-axis second grating scale, according to micron and nanometer error in reading, is made pottery by X-axis piezoelectricity
Porcelain driver drives XY micromotion platforms to carry out error compensation in X-direction and carries out nano-precision positioning；Gear and Y-axis rack
Driving is engaged, Y-axis first grating scale read head reads the micron accuracies reading in Y-axis first grating scale, the second light of Y-axis
Grid ruler reading head reads nano-precision reading in Y-axis second grating scale, according to micron and nanometer error in reading, passes through Y-axis piezoelectricity
Ceramic driver drives XY micromotion platforms to carry out error compensation in Y direction and carries out nano-precision positioning, so as to fulfill flat
Quick, the precise positioning of platform.
The foregoing is merely the preferred embodiment of the present invention, is not intended to limit the invention, for those skilled in the art
For member, the invention may be variously modified and varied, within the spirit and principles of the invention, any modification for being made,
Equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of portable height accelerates macro/micromotion platform, including base, platform base is provided with base, is set on platform base
X-axis platform is equipped with, Y-axis platform is provided with X-axis platform, it is characterised in that：The centre position of the base is provided with electric rotating
Machine, is fixedly installed gear on the output shaft of electric rotating machine, the centre position of platform base is provided with platform base through hole, platform
Submounts are provided through the step of X-direction, and the centre position of X-axis platform is provided with X-axis platform through hole, X-axis platform
The following step and groove that are provided through X-direction, the groove one side of X-axis platform are provided with X-axis rack, X-axis platform
Above be provided through the step of Y direction, the step and groove that are provided through Y direction below Y-axis platform, Y
The groove one side of shaft platform is provided with Y-axis rack, and XY micromotion platforms are provided with above Y-axis platform, are set on XY micromotion platforms
It is equipped with X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator, X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator
It is connected by flexible hinge with XY micromotion platforms, the first guideway of X-axis is provided with the step between X-axis platform and platform base
With the second guideway of X-axis, the second guide rail of the first guideway of Y-axis and Y-axis is provided with the step between X-axis platform and Y-axis platform
Pair, gear are engaged with X-axis rack and Y-axis rack at the same time.
2. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that：The platform bottom
Block hole and X-axis platform through hole pass through for gear.
3. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that：The platform bottom
The upper plane of seat in X direction be provided at both ends with X-axis first grating scale and X-axis second grating scale, the upper plane of X-axis platform is along Y
Direction is provided at both ends with Y-axis first grating scale and Y-axis second grating scale, and the front and back sides centering of X-axis platform is provided with X-axis
One grating ruler reading head and X-axis second grating scale read head, the left and right side centering of Y-axis platform are provided with Y-axis first grating scale read head
With Y-axis second grating scale read head, each grating ruler reading head is corresponded with grating scale.
4. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that：The Y-axis is put down
Multiple rectangular through-holes are provided with platform.
5. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that：The electric rotating
Machine can realize positive and negative movement.
6. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that：Each guide rail
Pair is rail plate pair.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711468380.1A CN107979223B (en) | 2017-12-29 | 2017-12-29 | Portable high-acceleration macro-micro motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711468380.1A CN107979223B (en) | 2017-12-29 | 2017-12-29 | Portable high-acceleration macro-micro motion platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107979223A true CN107979223A (en) | 2018-05-01 |
| CN107979223B CN107979223B (en) | 2024-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711468380.1A Active CN107979223B (en) | 2017-12-29 | 2017-12-29 | Portable high-acceleration macro-micro motion platform |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113023659A (en) * | 2021-03-04 | 2021-06-25 | 广东工业大学 | XY macro-micro motion platform and tail end feedback method thereof |
| US11365960B1 (en) | 2022-01-21 | 2022-06-21 | Guangdong University Of Technology | XY macro-micro motion stage and control method thereof based on end feedback |
| CN115582577A (en) * | 2022-11-01 | 2023-01-10 | 杭州电子科技大学 | Broaching machining method and device with error compensation function |
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| CN113023659A (en) * | 2021-03-04 | 2021-06-25 | 广东工业大学 | XY macro-micro motion platform and tail end feedback method thereof |
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| US11365960B1 (en) | 2022-01-21 | 2022-06-21 | Guangdong University Of Technology | XY macro-micro motion stage and control method thereof based on end feedback |
| CN115582577A (en) * | 2022-11-01 | 2023-01-10 | 杭州电子科技大学 | Broaching machining method and device with error compensation function |
| CN115582577B (en) * | 2022-11-01 | 2024-03-29 | 杭州电子科技大学 | Broaching processing method and equipment with error compensation |
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| Publication number | Publication date |
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| CN107979223B (en) | 2024-01-19 |
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