CN101359082A - Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control - Google Patents
Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control Download PDFInfo
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- CN101359082A CN101359082A CNA2008100717004A CN200810071700A CN101359082A CN 101359082 A CN101359082 A CN 101359082A CN A2008100717004 A CNA2008100717004 A CN A2008100717004A CN 200810071700 A CN200810071700 A CN 200810071700A CN 101359082 A CN101359082 A CN 101359082A
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Abstract
A fiber displacement feedback closed-loop control two-dimensional flexible hinge worktable relates to a flexible hinge worktable and is provided with a two-dimensional flexible hinge platform, a horizontal piezoelectric ceramic drive, a vertical piezoelectric ceramic drive, a horizontal fiber displacement sensor and a vertical fiber displacement sensor; the two-dimensional flexible hinge platform is provided with a horizontal mounting hole, a vertical mounting hole, a horizontal fiber mounting channel and a vertical fiber mounting channel; the horizontal piezoelectric ceramic drive and the vertical piezoelectric ceramic drive are respectively arranged in the horizontal mounting hole and the vertical mounting hole; the horizontal fiber displacement sensor is provided with horizontal fibers, while the vertical fiber displacement sensor is provided with vertical fibers; the horizontal fibers and the vertical fibers are respectively arranged in the horizontal fiber mounting channel and the vertical fiber mounting channel; the horizontal fiber mounting channel and the vertical fiber mounting channel are respectively provided with curved-teeth structures; and the output ends of the horizontal fibers and the vertical fibers are externally connected with a detecting closed-loop control device.
Description
Technical field
The present invention relates to a kind of flexible hinge work bench, especially relate to a kind of two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control.
Background technology
In the engineering practice of ultraprecise processing and measurement and positioning, realize that nanometer drives and location technology, be the flexible hinge work bench that adopts Piezoelectric Ceramic mostly.Because piezoelectric ceramics existence sluggishness itself, creep, defective such as non-linear, so its precision and position stability are limited.In order to improve precision, adopt precise displacement sensor that worktable is carried out close-loop feedback control in the industry, use at present more precise displacement sensor and be capacitance displacement sensor with the integrated structure of worktable, but because capacitive transducer is subjected to variable effects such as electromagnetic field, edge effect and environment temperature bigger, self precision just is difficult to guarantee, therefore, still cause the precision of flexible hinge work bench and position stability limited.
Because the optical fibre displacement sensor precision can reach Ya Nami, and have advantages such as strong interference immunity, flexibility is big, the spatial placement form is more flexible; Therefore if optical fibre displacement sensor is applied on the two-dimension flexible hinge work bench, the precision and the stability of two-dimension flexible hinge work bench are significantly improved, but the present relevant technologies of using optical fibre displacement sensor on two-dimension flexible hinge work bench is not appeared in the newspapers.
Summary of the invention
The purpose of this invention is to provide a kind of precision height, two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control that position stability is good of driving.
The present invention is provided with two-dimension flexible hinge platform, horizontal piezoelectric ceramic actuator, vertical piezoelectric ceramic actuator, horizontal optical fibre displacement sensor and vertical optical fibre displacement sensor; The two-dimension flexible hinge platform is provided with horizontal mounting hole and vertical mounting hole, and laterally optical fiber is installed road and vertical optical fiber installation road, laterally piezoelectric ceramic actuator and vertically piezoelectric ceramic actuator be located in the horizontal mounting hole respectively and vertically in the mounting hole, laterally optical fibre displacement sensor is provided with horizontal optical fiber, vertically optical fibre displacement sensor is provided with vertical optical fiber, horizontal optical fiber installation road is located at respectively by horizontal optical fiber and vertical optical fiber and vertical optical fiber is installed in the road, laterally optical fiber installation road and vertical optical fiber are installed the road and are equipped with curved toothing, laterally optical fiber and the vertically external detection closed-loop control device of output terminal of optical fiber.
Laterally piezoelectric ceramic actuator is provided with piezo ceramic element, lead and web member, piezo ceramic element is located on the web member, lead one end is connected with piezo ceramic element, the external detection closed-loop control device of the lead other end, web member is connected with horizontal mounting hole, vertically piezoelectric ceramic actuator is provided with piezo ceramic element, lead and web member, piezo ceramic element is located on the web member, lead one end is connected with piezo ceramic element, the external detection closed-loop control device of the lead other end, web member is connected with vertical mounting hole.
Laterally the web member of piezoelectric ceramic actuator and horizontal mounting hole is connected to be preferably and is threaded.
Vertically the web member of piezoelectric ceramic actuator and vertical mounting hole is connected to be preferably and is threaded.
Laterally mounting hole preferably is located at the two-dimension flexible hinge platform side, and is positioned on the cross central line of two-dimension flexible hinge platform.
Vertically mounting hole preferably is located at the two-dimension flexible hinge platform side, and is positioned on the longitudinal centre line of two-dimension flexible hinge platform.
Laterally the curved toothing in optical fiber installation road is the involutory groove of profile of tooth.
Vertically the curved toothing in optical fiber installation road is the involutory groove of profile of tooth.
The present invention according to know-why be: because optical fiber has a specific character, the refractive index of refractive index ratio covering that is exactly the fibre core in the optical fiber is big slightly, and light just is bound in the propagation of optical fiber the inside like this.When optical fiber was in the microbend state, some light that can propagate in direct light fibre the inside can be radiated outside the optical fiber originally, so produced optical power loss.Utilize this specific character that curved toothing is set on the two-dimension flexible hinge platform, when piezoelectric ceramic actuator drives working table movement, curved toothing can push optical fiber, make optical fiber generation bent forming, therefore, as long as detect intensity variations, just can detect modulation voltage (being displacement) at fiber-optic output, and then modulation voltage is fed back to control system control, form the fiber optics displacement feeding back closed-loop control system.
Because the present invention adopts the optical fibre displacement sensor with advantages such as displacement accuracy height, strong interference immunities to realize the closed-loop control of worktable, so can improve the driving precision of worktable and the stability of the location that works long hours.Compare with existing two-dimensional flexible hinge platform, the present invention has following outstanding advantage: with the sensitive element of optical fiber as feedback transducer, have strong interference immunity, displacement measurement advantage of high precision; The two-dimension flexible hinge work bench of optical fibre displacement sensor and Piezoelectric Ceramic is integrated, compact conformation, and dirigibility is bigger during use; Optical fiber itself have electrical insulation capability good, be not subjected to electromagnetic interference (EMI), no-spark, characteristics such as can in inflammable and explosive environment, use, and highly sensitive, response is fast, volume is little.The measuring accuracy height of optical fibre displacement sensor can reach inferior nanometer scale; Optical fibre displacement sensor is applied to two-dimension flexible hinge platform by Piezoelectric Ceramic, can improves the dynamic test scope and the sensitivity of this mechanism greatly, drive precision and position stability and be improved.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the left view of Fig. 1.
Fig. 4 is the A portion enlarged drawing of Fig. 1.
Embodiment
Referring to Fig. 1～3, the present invention is provided with two-dimension flexible hinge platform 1 (being made of platform base 12 and mobile platform 11), horizontal piezoelectric ceramic actuator 2, vertical piezoelectric ceramic actuator 3, horizontal optical fibre displacement sensor (not drawing among the figure) and vertical optical fibre displacement sensor (not drawing among the figure).Two-dimension flexible hinge platform 1 is provided with and is positioned at the horizontal mounting hole 111 on the cross central line and is positioned at vertical mounting hole 112 on the longitudinal centre line, and laterally optical fiber install road 13 and vertically optical fiber road 14 is installed.Horizontal optical fibre displacement sensor is provided with body and horizontal optical fiber, and vertically optical fibre displacement sensor is provided with body and vertical optical fiber.Laterally optical fiber is located at respectively in horizontal optical fiber installation road 13 and the vertical optical fiber installation road 14 with vertical optical fiber, and laterally optical fiber installation road 13 and vertical optical fiber installation road 14 are located between platform base 12 and the mobile platform 11.Laterally optical fiber is installed road 13 and is respectively equipped with curved toothing 132 and 142 with vertical optical fiber installation road 14, laterally optical fiber is installed inlet 131 inputs in road 13 from horizontal optical fiber, outlet 132 outputs in road 13 are installed from horizontal optical fiber through curved toothing 132, the input termination light source of horizontal optical fiber, the laterally body of the fine displacement transducer of the output termination lateral light of optical fiber.Vertically optical fiber is installed inlet 141 inputs in road 14 from vertical optical fiber, outlet 143 outputs in road 14 are installed from vertical optical fiber through curved toothing 142, the input termination light source of vertical optical fiber, the body of the vertical optical fibre displacement sensor of output termination of vertical optical fiber, laterally optical fibre displacement sensor and the vertically external detection closed-loop control device of optical fibre displacement sensor (not drawing among the figure).
Laterally piezoelectric ceramic actuator is provided with piezo ceramic element 21, web member 22 and lead (not drawing among the figure), and piezo ceramic element 21 is located on the web member 22, and lead one end is connected with piezo ceramic element 21, the external detection closed-loop control device of the lead other end.Web member 22 is threaded with the horizontal mounting hole 111 of two-dimension flexible hinge platform 1.
Vertically piezoelectric ceramic actuator 3 is provided with piezo ceramic element 31, web member 32 and lead (not drawing among the figure), and piezo ceramic element 31 is located on the web member 32, and lead one end is connected with piezo ceramic element 31, the external detection closed-loop control device of the lead other end.Web member 32 is threaded with vertical mounting hole 112 of two-dimension flexible hinge platform 1.
Laterally the curved toothing 132 in optical fiber installation road is the involutory groove of profile of tooth.
Vertically the curved toothing 142 in optical fiber installation road is the involutory groove of profile of tooth.
Referring to Fig. 4, laterally the curved toothing 132 in optical fiber installation road is located at (vertically the curved toothing 142 in optical fiber installation road also is located between platform base 12 and the mobile platform 11) between platform base 12 and the mobile platform 11.Set curved toothing 132 is the involutory groove of profile of tooth, and optical fiber 4 passes the involutory groove 132 of profile of tooth.Unidirectional arrow is represented the direction of the light input and the light output of optical fiber 4.Four-headed arrow is represented the sense of displacement that two-dimension flexible hinge platform 1 produces, when piezoelectric ceramic actuator drives mobile platform 11 motions, the micro-displacement that mobile platform 11 produces can make involutory serrate slot extruding optical fiber, make optical fiber generation bent forming, therefore, as long as detect intensity variations at fiber-optic output, just can detect modulation voltage (being displacement), and then modulation voltage is fed back to control system mobile platform 11 is carried out regulating and controlling, make mobile platform 11 reach accurate location, just can effectively improve the precision of two-dimension flexible hinge work bench 1.Thereby form reliable fiber optics displacement feeding back closed-loop control system.
Vertically the curved toothing 142 in optical fiber installation road also is located between platform base 12 and the mobile platform 11, and the structure of curved toothing 142 and principle of work are identical with the structure and the principle of work of the curved toothing 132 in horizontal optical fiber installation road.Single head arrow among Fig. 4 is represented the light direction of transfer of optical fiber, and double-headed arrow is represented the sense of displacement of mobile platform 11.
Determining of the tooth pitch Λ of curved toothing is very important, provides the principle of design of tooth pitch Λ below: because the cycle difference of fibre-optical bending, bending loss is also different, and Tiao Zhi sensitivity is also different simultaneously.Optical fiber only can produce maximum bending loss under the curved space width of the best, promptly modulation is the sensitiveest.For index distribution is n
2(r)=n
0 2[1-2 Δ (r/a)
α] optical fiber, theoretical analysis shows that propagation constant β in the fibre core and the propagation constant β in the covering satisfy:
In the formula: a---fiber core radius, α---characterize the constant of Refractive Index Profile o, the ordinal number of m---mould, the sum of M---mould, Δ=[n
2(0)-n
2(a)]/2n
2(0), n (0)---place, axle center refractive index
N (a)---radius is the refractive index at a place.
The optimal teeth spacing Λ of best curved tooth satisfies:
Claims (8)
1. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control is characterized in that being provided with two-dimension flexible hinge platform, horizontal piezoelectric ceramic actuator, vertical piezoelectric ceramic actuator, horizontal optical fibre displacement sensor and vertical optical fibre displacement sensor; The two-dimension flexible hinge platform is provided with horizontal mounting hole and vertical mounting hole, and laterally optical fiber is installed road and vertical optical fiber installation road, laterally piezoelectric ceramic actuator and vertically piezoelectric ceramic actuator be located in the horizontal mounting hole respectively and vertically in the mounting hole, laterally optical fibre displacement sensor is provided with horizontal optical fiber, vertically optical fibre displacement sensor is provided with vertical optical fiber, horizontal optical fiber installation road is located at respectively by horizontal optical fiber and vertical optical fiber and vertical optical fiber is installed in the road, laterally optical fiber installation road and vertical optical fiber are installed the road and are equipped with curved toothing, laterally optical fiber and the vertically external detection closed-loop control device of output terminal of optical fiber.
2. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1, it is characterized in that horizontal piezoelectric ceramic actuator is provided with piezo ceramic element, lead and web member, piezo ceramic element is located on the web member, lead one end is connected with piezo ceramic element, the external detection closed-loop control device of the lead other end, web member is connected with horizontal mounting hole, vertically piezoelectric ceramic actuator is provided with piezo ceramic element, lead and web member, piezo ceramic element is located on the web member, lead one end is connected with piezo ceramic element, the external detection closed-loop control device of the lead other end, web member is connected with vertical mounting hole.
3. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that the web member of horizontal piezoelectric ceramic actuator is threaded with horizontal being connected to of mounting hole.
4. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that the web member of vertical piezoelectric ceramic actuator is threaded with vertical being connected to of mounting hole.
5. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that horizontal mounting hole is to be located at the two-dimension flexible hinge platform side, and is positioned on the cross central line of two-dimension flexible hinge platform.
6. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that vertical mounting hole is to be located at the two-dimension flexible hinge platform side, and is positioned on the longitudinal centre line of two-dimension flexible hinge platform.
7. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that it is the involutory groove of profile of tooth that horizontal optical fiber is installed the curved toothing in road.
8. two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control as claimed in claim 1 is characterized in that it is the involutory groove of profile of tooth that vertical optical fiber is installed the curved toothing in road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNB2008100717004A CN100552486C (en) | 2008-09-02 | 2008-09-02 | Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control |
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|---|---|---|---|
| CNB2008100717004A CN100552486C (en) | 2008-09-02 | 2008-09-02 | Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control |
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| CN101359082A true CN101359082A (en) | 2009-02-04 |
| CN100552486C CN100552486C (en) | 2009-10-21 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102508360A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Plane fine-tuning mechanism device of movable mirror |
| CN102969030A (en) * | 2012-12-03 | 2013-03-13 | 哈尔滨工业大学 | Plane type precise two-dimensional micrometric displacement platform |
| CN103615990A (en) * | 2013-11-21 | 2014-03-05 | 苏州大学 | Interference objective driving device |
| CN103823275A (en) * | 2014-03-26 | 2014-05-28 | 中国人民解放军国防科学技术大学 | Self-adaptation optical fiber collimator based on flexible hinge |
| CN109099830A (en) * | 2018-08-18 | 2018-12-28 | 重庆巅慧科技有限公司 | A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension |
| CN110768568A (en) * | 2018-07-27 | 2020-02-07 | 成都理想境界科技有限公司 | Piezoelectric actuator, optical fiber scanning module and projection device |
| CN112629640A (en) * | 2019-10-08 | 2021-04-09 | 南京理工大学 | Self-adaptive broadband vibration measurement system based on fiber Fizeau interference |
| CN113484005A (en) * | 2021-07-12 | 2021-10-08 | 浙江科技学院 | Test bench and test method for automatic leveling device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301558A (en) * | 1992-10-02 | 1994-04-12 | Caterpillar Inc. | Testing apparatus for a multilayer piezoelectric actuator |
| DE19739594C2 (en) * | 1997-09-10 | 2001-09-06 | Daimler Chrysler Ag | Electrostrictive actuator |
-
2008
- 2008-09-02 CN CNB2008100717004A patent/CN100552486C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102508360A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Plane fine-tuning mechanism device of movable mirror |
| CN102969030A (en) * | 2012-12-03 | 2013-03-13 | 哈尔滨工业大学 | Plane type precise two-dimensional micrometric displacement platform |
| CN102969030B (en) * | 2012-12-03 | 2014-07-30 | 哈尔滨工业大学 | Plane type precise two-dimensional micrometric displacement platform |
| CN103615990A (en) * | 2013-11-21 | 2014-03-05 | 苏州大学 | Interference objective driving device |
| CN103823275A (en) * | 2014-03-26 | 2014-05-28 | 中国人民解放军国防科学技术大学 | Self-adaptation optical fiber collimator based on flexible hinge |
| CN103823275B (en) * | 2014-03-26 | 2015-12-09 | 中国人民解放军国防科学技术大学 | Based on the adaptive optic fiber collimating apparatus of flexible hinge |
| CN110768568A (en) * | 2018-07-27 | 2020-02-07 | 成都理想境界科技有限公司 | Piezoelectric actuator, optical fiber scanning module and projection device |
| CN109099830A (en) * | 2018-08-18 | 2018-12-28 | 重庆巅慧科技有限公司 | A kind of quick micro-displacement Scan orientation workbench of direct drive type two dimension |
| CN109099830B (en) * | 2018-08-18 | 2020-07-10 | 重庆巅慧科技有限公司 | Direct-push type two-dimensional rapid micro-displacement scanning positioning workbench |
| CN112629640A (en) * | 2019-10-08 | 2021-04-09 | 南京理工大学 | Self-adaptive broadband vibration measurement system based on fiber Fizeau interference |
| CN112629640B (en) * | 2019-10-08 | 2023-09-26 | 南京理工大学 | Self-adaptive broadband vibration measuring system based on optical fiber Fizeau interference |
| CN113484005A (en) * | 2021-07-12 | 2021-10-08 | 浙江科技学院 | Test bench and test method for automatic leveling device |
| CN113484005B (en) * | 2021-07-12 | 2024-02-09 | 浙江科技学院 | Test bench and test method of automatic leveling device |
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| CN100552486C (en) | 2009-10-21 |
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Granted publication date: 20091021 Termination date: 20120902 |