CN109036495A - A kind of Z-direction nanometer displacement locating platform based on flexible hinge - Google Patents
A kind of Z-direction nanometer displacement locating platform based on flexible hinge Download PDFInfo
- Publication number
- CN109036495A CN109036495A CN201810964124.XA CN201810964124A CN109036495A CN 109036495 A CN109036495 A CN 109036495A CN 201810964124 A CN201810964124 A CN 201810964124A CN 109036495 A CN109036495 A CN 109036495A
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- flexible hinge
- hemisphere
- wolfram steel
- nanometer displacement
- platform
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Abstract
The invention discloses the Z-direction nanometer displacement locating platform based on flexible hinge, platform body includes motion platform and pedestal, and motion platform is connect by flexible hinge with pedestal；Blind hole is offered in platform body, installation is sequentially installed with locking nut, hemisphere nut, the first wolfram steel hemisphere, piezoelectric ceramics and the second wolfram steel hemisphere in blind hole, the one end of blind hole and the second wolfram steel dome contact, locking nut and hemisphere nut are installed, hemisphere nut is contacted with the surface of the first wolfram steel hemisphere in the other end；The upper surface of flexible hinge is connect with motion platform, and the lower end surface of flexible hinge is connect with pedestal.The beneficial effects of the invention are as follows the quantity of the upper surface tie point of the flexible hinge between motion platform and pedestal and lower end surface tie point can be improved resonance frequency, flexible hinge is integrally machined molding simultaneously, it is good that it is denaturalized consistency, it can guarantee lesser Z-direction movement deflection angle, it can satisfy demanding use occasion, overall structure is simple, has a wide range of application.
Description
Technical field
The invention belongs to Micro and nano manipulations and high-precision location technique field, more particularly, to a kind of Z based on flexible hinge
To nanometer displacement locating platform.
Background technique
Nanopositioning stage is used to generate the displacement of nanometer scale and realizes the location control of Nano grade, is mainly used in
The hi-tech industries such as atomic force microscope, precision optics equipment, semiconductor equipment.Advanced semiconductor chip manufacturing technology and
The development of large scale memory manufacturing technology is even more that nanometer displacement and nanometer equipotential technology have been pushed to new height.Accurate measurement
It is considered as the bottle that generation semiconductor chip fabrication techniques and large scale memory manufacturing technology must be broken through with detection technique
Neck.Metering and detection based on nanometer displacement and nanometer positioning are expected to become and break through Systems for optical inspection and Electron-beam measuring system
The new detection means for limitation of uniting.In addition, the precision and stability of precision finishing machine also depends on nanometer displacement and nanometer is fixed
The technical level of position, therefore, nanometer displacement and nanometer positioning have become in various ultra precise measurements, processing and detection device
Key technology and core component.
Currently, existing nanometer displacement locating platform has single-degree-of-freedom, two-freedom, Three Degree Of Freedom three types, list is certainly
It include two kinds of horizontal direction (X or Y-direction) and vertical direction (Z-direction) by degree nanometer displacement locating platform, but existing Z-direction nanometer
Displacement location platform deflection angle when Z-direction moves is larger, and resonance frequency is low, and processing cost is high, the error of installation assembly is larger, no
It is able to satisfy more demanding use occasion.
Summary of the invention
That the object of the present invention is to provide a kind of structures is simple, easy to operate, Z-direction deflection angle is small, resonance frequency is high, guarantee plus
The work Z-direction nanometer displacement locating platform with high accuracy based on flexible hinge.
Technical scheme is as follows:
A kind of Z-direction nanometer displacement locating platform based on flexible hinge, including platform body, the platform body include fortune
Moving platform and pedestal, the motion platform are connect by flexible hinge with the pedestal；
Offer blind hole in the platform body, in the blind hole installation be sequentially installed with locking nut, hemisphere nut,
First wolfram steel hemisphere, piezoelectric ceramics and the second wolfram steel hemisphere, the one end of the blind hole and the second wolfram steel dome contact, separately
The locking nut and hemisphere nut are installed, the surface of the hemisphere nut and the first wolfram steel hemisphere connects in one end
Touching；
The upper surface of the flexible hinge is connect with the motion platform, the lower end surface of the flexible hinge and the pedestal
Connection.
In the above-mentioned technical solutions, it is uniformly distributed multiple upper surface tie points on the upper surface of the flexible hinge, is used for
It is connected with the motion platform.
In the above-mentioned technical solutions, the quantity of the upper surface tie point is at least 4.
In the above-mentioned technical solutions, it is uniformly distributed multiple lower end surface tie points on the lower end surface of the flexible hinge, is used for
It is connect with the base into contact.
In the above-mentioned technical solutions, the quantity of the lower end surface tie point is at least 4.
In the above-mentioned technical solutions, the upper surface tie point is identical as the quantity of the lower end surface tie point, and in institute
State the position relative misalignment being arranged on flexible hinge.
In the above-mentioned technical solutions, the both ends of the piezoelectric ceramics are separately connected the first wolfram steel hemisphere and the second wolfram steel half
Ball.
In the above-mentioned technical solutions, the blind hole is circular conical surface close to one end bottom hole inner wall of the second wolfram steel hemisphere, described
The surface of second wolfram steel hemisphere and the conical surface contact.
In the above-mentioned technical solutions, the locking nut and hemisphere nut pass through screw thread and connect with the platform body.
In the above-mentioned technical solutions, the platform body is cylindrical body.
The advantages and positive effects of the present invention are: due to the adoption of the above technical scheme, between motion platform and pedestal
The upper surface tie point of flexible hinge and the quantity of lower end surface tie point can be improved resonance frequency, while flexible hinge one
Machine-shaping, denaturation consistency is good, can guarantee lesser Z-direction movement deflection angle, can satisfy demanding use occasion, whole
Body structure is simple, has a wide range of application.
Detailed description of the invention
Fig. 1 is the Z-direction nanometer displacement locating platform main view of the invention based on flexible hinge；
Fig. 2 is the sectional view of A-A in Fig. 1；
Fig. 3 is the sectional view of B-B in Fig. 1；
Fig. 4 is the sectional view of the B-B of the embodiment of the present invention 3.
In figure:
1, platform body 1-1, motion platform 1-2, pedestal
2, flexible hinge 2-1, upper surface tie point 2-2, lower end surface tie point
3, blind hole 4, locking nut 5, hemisphere nut
6, the first wolfram steel hemisphere 7, piezoelectric ceramics 8, the second wolfram steel hemisphere
Specific embodiment
Below in conjunction with specific embodiment, invention is further described in detail.It should be appreciated that described herein specific
Embodiment is used only for explaining the present invention, is not intended to limit the present invention, is never limited in protection scope of the present invention.
Embodiment 1
As shown in Figure 1-Figure 3, the Z-direction nanometer displacement locating platform of the invention based on flexible hinge, including platform body
1, platform body 1 includes motion platform 1-1 and pedestal 1-2, and motion platform 1-1 is connect by flexible hinge 2 with pedestal 1-2；It is flat
Blind hole 3 is offered in playscript with stage directions body 1, installation is sequentially installed with locking nut 4, hemisphere nut 5, the first wolfram steel hemisphere in blind hole 3
6, piezoelectric ceramics 7 and the second wolfram steel hemisphere 8, the both ends of piezoelectric ceramics 7 are separately connected the first wolfram steel hemisphere 6 and the second wolfram steel hemisphere
8, the one end of blind hole 3 is contacted with the second wolfram steel hemisphere 8, and locking nut 4 and hemisphere nut 5, hemisphere are equipped in the other end
Nut 5 is contacted with the surface of the first wolfram steel hemisphere 6；Blind hole 3 is circular conical surface close to one end bottom hole inner wall of the second wolfram steel hemisphere 8,
The surface of second wolfram steel hemisphere 8 and the conical surface contact, the upper surface of flexible hinge 2 are connect with motion platform 1-1, flexible hinge
2 lower end surface is connect with pedestal 1-2, and 4 upper surface tie point 2-1 are uniformly distributed on the upper surface of flexible hinge 2, is used for and fortune
Moving platform 1-1 is connected.
Further, 4 lower end surface tie point 2-2 are uniformly distributed on the lower end surface of flexible hinge 2, for connecing with pedestal 1-2
Touching connection, upper surface tie point 2-1 is consistent with the requirement of lower end surface tie point 2-2, and being capable of circumferentially uniform staggered angle
It spends (4 tie points are 45 ° preferably by angle).
Working principle:
In the work of nanometer displacement locating platform, piezoelectric ceramics 7 extends under voltage effect, due to the right side of piezoelectric ceramics 7
End is fixed by hemisphere nut 5 and locking nut 4, therefore piezoelectric ceramics 7 extends to the left under voltage effect, motion platform 1-
1 starts side stretching flexible hinge 2 to the left under the action of piezoelectric ceramics 7, due to flexible hinge 2 upper surface tie point 2-1 and
Lower end surface tie point 2-2 is connect with motion platform 1-1 and pedestal 1-2 respectively, and the thickness of flexible hinge 2 is small, therefore can be led
The Z-direction denaturation for causing flexible hinge 2, to realize motion platform 1-1 in the precise motion of Z-direction.
Flexible hinge 2 walks wire cutting by slow silk and is integrally machined molding, and machining accuracy is high, the denaturation one of flexible hinge 2
Cause property is fine, can guarantee lesser Z-direction movement deflection angle, and resonance frequency is low.
Embodiment 2
Z-direction nanometer displacement locating platform based on flexible hinge of the invention, including platform body 1, platform body 1 include
Motion platform 1-1 and pedestal 1-2, motion platform 1-1 are connect by flexible hinge 2 with pedestal 1-2；It is offered in platform body 1
Blind hole 3, installation is sequentially installed with locking nut 4, hemisphere nut 5, the first wolfram steel hemisphere 6, piezoelectric ceramics 7 and the in blind hole 3
Two wolfram steel hemisphere 8, the both ends of piezoelectric ceramics 7 are separately connected the first wolfram steel hemisphere 6 and the second wolfram steel hemisphere 8, the one end of blind hole 3
It is contacted with the second wolfram steel hemisphere 8, locking nut 4 and hemisphere nut 5, hemisphere nut 5 and the first wolfram steel is installed in the other end
The surface of hemisphere 6 contacts；Blind hole 3 is circular conical surface close to one end bottom hole inner wall of the second wolfram steel hemisphere 8, the second wolfram steel hemisphere 8
Surface and the conical surface contact, the upper surface of flexible hinge 2 are connect with motion platform 1-1, the lower end surface of flexible hinge 2 and pedestal
1-2 connection is uniformly distributed 4 upper surface tie point 2-1 on the upper surface of flexible hinge 2, for contacting company with motion platform 1-1
It connects.
Further, 4 lower end surface tie point 2-2 are uniformly distributed on the lower end surface of flexible hinge 2, for connecing with pedestal 1-2
Touching connection, upper surface tie point 2-1 is consistent with the requirement of lower end surface tie point 2-2, and being capable of circumferentially uniform staggered angle
It spends (4 tie points are 45 ° preferably by angle).
Locking nut 4 and hemisphere nut 5 are connect by screw thread with platform body 1, and platform body 1 is cylindrical body.
Embodiment 3
As shown in figure 4, on the basis of embodiment 1, being different from place and being: upper surface tie point 2-1 and lower end surface
The quantity of tie point 2-2 may be greater than the integer (such as 6 tie points) equal to 4, according to flexible hinge 2 and motion platform 1-
1 connected with pedestal 1-2 needs come adjust processing upper surface tie point 2-1 and lower end surface tie point 2-2 connection quantity, simultaneously
Adjust the corresponding angle being staggered of upper surface tie point 2-1 and lower end surface tie point 2-2 circumferentially.
Further, the folder on upper surface tie point 2-1 and lower end surface tie point 6-2 between respectively arranged 6 tie points
Angle is 60 °, and the angle of the tie point between upper surface and two layers of lower end surface is 30 °, through upper surface tie point 2-1 under
Resonance frequency can be improved in the quantity of end face tie point 2-2, so that nanometer displacement locating platform can satisfy demanding make
Use occasion.
The spatially relative terms such as "upper", "lower", "left", "right" have been used in embodiment for ease of explanation, have been used for
Relationship of the elements or features relative to another elements or features shown in explanatory diagram.It should be understood that in addition to figure
Shown in except orientation, spatial terminology is intended to include the different direction of device in use or operation.For example, if in figure
Device be squeezed, the element for being stated as being located at other elements or feature "lower" will be located into other elements or feature "upper".
Therefore, exemplary term "lower" may include both upper and lower orientation.Device, which can be positioned in other ways, (to be rotated by 90 ° or position
In other orientation), it can be interpreted accordingly used herein of the opposite explanation in space.
Moreover, the relational terms of such as " first " and " second " or the like are used merely to one with another with identical
The component of title distinguishes, without necessarily requiring or implying between these components there are any this actual relationship or
Sequentially.
One embodiment of the present invention has been described in detail above, but the content is only preferable implementation of the invention
Example, should not be considered as limiting the scope of the invention.It is all according to equivalent variations made by the present patent application range and improve
Deng should still be within the scope of the patent of the present invention.
Claims (10)
1. a kind of Z-direction nanometer displacement locating platform based on flexible hinge, including platform body (1), it is characterised in that: described flat
Playscript with stage directions body (1) includes motion platform (1-1) and pedestal (1-2), the motion platform (1-1) by flexible hinge (2) with it is described
Pedestal (1-2) connection；
Blind hole (3) are offered in the platform body (1), are sequentially installed with locking nut (4), hemisphere in the blind hole (3)
Nut (5), the first wolfram steel hemisphere (6), piezoelectric ceramics (7) and the second wolfram steel hemisphere (8), the one end of the blind hole (3) and institute
The contact of the second wolfram steel hemisphere (8) is stated, the locking nut (4) and hemisphere nut (5), the hemisphere spiral shell are installed in the other end
Female (5) are contacted with the surface of the first wolfram steel hemisphere (6)；
The upper surface of the flexible hinge (2) is connect with the motion platform (1-1), the lower end surface of the flexible hinge (2) with
Pedestal (1-2) connection.
2. Z-direction nanometer displacement locating platform according to claim 1, it is characterised in that: the upper end of the flexible hinge (2)
Multiple upper surface tie points (2-1) are uniformly distributed on face, for connecting with the motion platform (1-1).
3. Z-direction nanometer displacement locating platform according to claim 2, it is characterised in that: the upper surface tie point (2-1)
Quantity be at least 4.
4. Z-direction nanometer displacement locating platform according to claim 3, it is characterised in that: the lower end of the flexible hinge (2)
Multiple lower end surface tie points (2-2) are uniformly distributed on face, for connecting with the pedestal (1-2).
5. Z-direction nanometer displacement locating platform according to claim 4, it is characterised in that: the lower end surface tie point (2-2)
Quantity be at least 4.
6. Z-direction nanometer displacement locating platform according to claim 5, it is characterised in that: the upper surface tie point (2-1)
Position relative misalignment identical, and being arranged on the flexible hinge (2) as the quantity of the lower end surface tie point (2-2).
7. Z-direction nanometer displacement locating platform described in any one of -6 according to claim 1, it is characterised in that: the piezoelectricity
The both ends of ceramic (7) are separately connected the first wolfram steel hemisphere (6) and the second wolfram steel hemisphere (8).
8. Z-direction nanometer displacement locating platform according to claim 7, it is characterised in that: the blind hole (3) is close to the second tungsten
One end bottom hole inner wall of steel hemisphere (8) is circular conical surface, the surface of the second wolfram steel hemisphere (8) and the conical surface contact.
9. Z-direction nanometer displacement locating platform according to claim 8, it is characterised in that: the locking nut (4) and hemisphere
Nut (5) is connect by screw thread with the platform body (1).
10. Z-direction nanometer displacement locating platform according to claim 9, it is characterised in that: the platform body (1) is circle
Cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810964124.XA CN109036495B (en) | 2018-08-23 | 2018-08-23 | Z-direction nanometer displacement positioning platform based on flexible hinge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810964124.XA CN109036495B (en) | 2018-08-23 | 2018-08-23 | Z-direction nanometer displacement positioning platform based on flexible hinge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109036495A true CN109036495A (en) | 2018-12-18 |
| CN109036495B CN109036495B (en) | 2021-02-19 |
Family
ID=64626997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810964124.XA Active CN109036495B (en) | 2018-08-23 | 2018-08-23 | Z-direction nanometer displacement positioning platform based on flexible hinge |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN110415758A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on multiple coil structure hinge is to single-degree-of-freedom mini positioning platform |
| CN110415759A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on honeycomb hinge is to single-degree-of-freedom mini positioning platform |
| CN117600915A (en) * | 2024-01-23 | 2024-02-27 | 齐鲁工业大学(山东省科学院) | Bionic honeycomb type rapid knife servo device with freely configured rigidity |
| CN117600915B (en) * | 2024-01-23 | 2024-04-26 | 齐鲁工业大学(山东省科学院) | Bionic honeycomb type rapid knife servo device with freely configured rigidity |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117600915A (en) * | 2024-01-23 | 2024-02-27 | 齐鲁工业大学(山东省科学院) | Bionic honeycomb type rapid knife servo device with freely configured rigidity |
| CN117600915B (en) * | 2024-01-23 | 2024-04-26 | 齐鲁工业大学(山东省科学院) | Bionic honeycomb type rapid knife servo device with freely configured rigidity |
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