CN204315237U - One is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling - Google Patents
One is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling Download PDFInfo
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- CN204315237U CN204315237U CN201420721848.9U CN201420721848U CN204315237U CN 204315237 U CN204315237 U CN 204315237U CN 201420721848 U CN201420721848 U CN 201420721848U CN 204315237 U CN204315237 U CN 204315237U
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Abstract
The utility model provides a kind of and is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, comprise the platform body be fixed, platform can be the various objects needing precision positioning, as: nanopositioning stage, precision movement platform, precison optical component positioning table, accurate sample stage etc.Described platform body inside is provided with some mounting-positioning holes, it is characterized in that: described mounting-positioning holes center line intersects at the center of described platform body, each mounting-positioning holes external process has one group of flexure hinge mechanism being trapped among the inside, described flexure hinge mechanism can produce certain elastic deformation separately, eliminates the distortion that platform body in use causes due to load, temperature variation and other factors and the positioning error caused.Described mounting-positioning holes center and the be fixed line at platform body center and the displacement deformation degree of freedom direction (flexible direction) of flexure hinge mechanism coincide, and it is flexible at deformation direction, is rigidity in other direction.
Description
Technical field
The utility model belongs to hi-Fix and interconnection technique field, especially relates to one and is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling.
Background technology
Be no matter the manipulation of the nano materials such as nano-micro structure, the Measurement and analysis of nano material or DNA molecular, CNT, nano particle, modification and processing, one of core technology that first must solve is that the displacement location of nanoscale (or even atom level) controls.So-called nanometer displacement location technology refers to carries out precise hard_drawn tuhes to controlled object (micro Process instrument or micrometering measurer) in the nanometer even accuracy class of Ya Na meter, to meet its requirement to positioning precision, kinematic accuracy and precision stability, realize having the processing of function of measuring and detect operation.Nanometer displacement and location technology are constantly pushed to the new limit by advanced semi-conductor chip manufacturing technology and the development of large scale memory (hard disk) manufacturing technology especially.Along with improving constantly of device integration, the requirement on machining accuracy of numerous device has approached the nanometer even level of Ya Na meter, and traditional detection technique and means are being subject to serious challenge.It is one of the Pinch technology that must overcome in generation semiconductor chip fabrication techniques and large scale memory (hard disk) manufacturing technology that precision measurement and detection technique have been identified as.Based on Nanometer Metering and the detection of nanometer displacement and location technology, be expected to become and break through Systems for optical inspection and the circumscribed new detection means of electron beam inspection system.In addition, the precision and stability of super-precision machine tools also depends on the technical merit of nano-precision feed system, and therefore nanometer displacement and positioning control system have become gordian technique and the core component of general character in various ultra precise measurement, processing and detecting instrument equipment.
Existing high precision displacement location is general adopts the fixed form that is rigidly connected, web member can be caused to produce certain elastic deformation when extraneous load and temperature etc. change in actual use, under the fixed form that is rigidly connected, the elastic deformation that web member produces discharges nowhere, under elastic deformation effect, web member produces certain displacement, thus produce error when causing Bit andits control and displacement location, make positioning result distortion.
Summary of the invention
The limitation that the utility model is located for existing high precision displacement and deficiency provide a kind of improve positioning precision eliminate or reduce error be connected and fixed mechanism based on hinge chain flexibility Dynamic Coupling, be especially applicable to accurate nanotechnology field.
The technical solution of the utility model is: one is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, comprise platform body, described platform body inside is provided with some mounting-positioning holes, described mounting-positioning holes center line intersects at the center of described platform body, each mounting-positioning holes external process has one group of flexure hinge mechanism being trapped among the inside, described flexure hinge mechanism can produce certain elastic deformation, eliminates platform body and makes in process due to error that load and temperature cause.
Concrete, described flexure hinge mechanism is at least three.
Concrete, the displacement freedom direction extended line of each flexure hinge mechanism intersects at platform body center.
Concrete, described flexure hinge mechanism only has one degree of freedom.
Concrete, described installation fixed hole position is in the center of flexure hinge mechanism.
Concrete, each flexure hinge mechanism can produce independent elastic deformation, the elastic deformation of multiple flexure hinge mechanism can coupling in platform body, when platform body finds elastic deformation due to external load and stable etc., the coupling absorption between being out of shape by multiple flexure hinge mechanism or the elastic deformation of release platform body self.
The advantage that the utility model has and good effect are: the flexible connection mode be coupled owing to adopting many hinges carries out installation to platform body to be fixed, eliminate the positioning error that distortion that platform body self causes due to load and temperature variation causes, thus realize improving further and connect and the object of positioning precision; There is structure simple, positioning precision advantages of higher.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present utility model
Fig. 2 is structural representation of the present utility model
Fig. 3 is hinge engaging structure schematic diagram of the present utility model
Fig. 4 is the structural representation of otch hinge cutout form of the present utility model
In figure:
1, platform body 2, flexure hinge mechanism 3, mounting-positioning holes
4, pedestal 5, V-type groove 6, positioning table
7, spheroid 8, single spring leaf flexible hinge 9, single otch flexible hinge 10, complex spring sheet flexible hinge 11, compound notch flexible hinge 12, circular lance
13, elliptical incision 14, otch of rising as high as the banks
Embodiment
Platform body 1 is fixed, and it can be the various objects needing precision positioning, as: nanopositioning stage, precision movement platform, precison optical component positioning table, accurate sample stage etc.
As shown in Figure 2, the technical solution of the utility model is: one is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, comprise platform body 1, centered by the geometric center of platform body 1, three flexure hinge mechanisms 2 are processed in platform body 1 inside, described flexure hinge mechanism 2 center is provided with mounting-positioning holes 3, and the displacement freedom direction extended line of each flexure hinge mechanism 2 intersects at platform body 1 center, described flexure hinge mechanism 2 only has one degree of freedom, each flexure hinge mechanism 2 can produce independent elastic deformation, the elastic deformation of multiple flexure hinge mechanism 2 can coupling in platform body 1, when platform body 1 finds elastic deformation due to external load and stable etc., coupling absorption between being out of shape by multiple flexure hinge mechanism 2 or the elastic deformation of release platform body 1 self.
Described flexure hinge mechanism 2 can be considered parallel linkage, can only be out of shape along connecting rod vertical direction generation relative displacement.Described flexure hinge mechanism 2 is such, and its displacement deformation degree of freedom direction (flexible direction) coincides with the line at mounting-positioning holes 3 center and platform body 1 center, and it is only flexible at deformation direction, is rigidity in other direction.Multiple mounting-positioning holes 3 with flexure hinge mechanism 2 forms a flexible Dynamic Coupling and is connected and fixed institution system, has both possessed the flexibility of distortion needed for decoupling zero, can ensure again the rigidity that platform body entirety is fixing.
The utility model application Kinemaitc mounting principle, as shown in Figure 1: pedestal 4 is processed with the V-type groove 5 that three center lines intersect at pedestal 4 center, three positions be connected with spheroid 7 are arranged at positioning table 6 bottom, and the center superposition of the center of positioning table 6 and pedestal 4, three spheroids 7 can move freely along V-type groove 5 in V-type groove 5 inside.When positioning table 6 produces distortion due to the reason such as external pressure, no matter whether the distortion of positioning table 6 is homogeneous deformation in positioning table 6 inside, and the distortion of positioning table 6 all can be discharged by the movement of three spheroids 7 in V-type groove 5 inside.When the distortion that positioning table 6 produces is when positioning table 6 inside is for homogeneous deformation, three spheroids 7 moving displacement in V-type groove 5 is equal; When positioning table 6 produce be deformed into nonaffine deformation time, three spheroids 7 moving displacement in V-type groove 5 is unequal.In this way, can ensure that the center of positioning table 6 overlaps all the time with the center of pedestal 4.
The course of work of this example: when platform body 1 produces distortion in position fixing process, the distortion that platform body 1 produces is delivered to by platform body 1 and installs fixed orifice 3 place, fixed orifice 3 is installed gib screw is installed, gib screw contacts with flexure hinge mechanism 2, the distortion that thus platform body 1 can be produced is discharged by the mode of hinges deform or is absorbed, and the distortion between multiple flexure hinge mechanism 2 can coupling, the jointly distortion of absorption platform body 1.If platform body 1 produce be deformed into uniform distortion, then the elastic deformation size that produces of three flexure hinge mechanisms 2 is identical, if platform body 1 produce be deformed into nonaffine deformation time, then the elastic deformation that three flexure hinge mechanisms 2 produce varies in size.The distortion of multiple flexure hinge mechanism 2 can change in real time along with the size of platform body 1 distortion.By the coupling of distortion between multiple flexure hinge mechanism 2, ensure that platform body 1 center is not subjected to displacement, achieve the function that flexible Dynamic Coupling connects, eliminate positioning error, improve positioning precision.
In fact above-mentioned flexure hinge mechanism 2 is exactly the linkage of single-degree-of-freedom, is not only confined to the parallel spring sheet hinge format represented by Fig. 1, Fig. 2, can be other conventional flex linkage form.As shown in Figure 3,4 kinds of typical hinge design are usually had: single spring leaf flexible hinge 8, single otch flexible hinge 9, complex spring sheet flexible hinge 10, compound notch flexible hinge 11.In addition, otch hinge can be different otch form, comprising: circular lance 12, elliptical incision 13 and otch 14 of rising as high as the banks, as shown in Figure 4.
Above an embodiment of the present utility model has been described in detail, but described content being only preferred embodiment of the present utility model, can not being considered to for limiting practical range of the present utility model.All equalizations done according to the utility model application range change and improve, and all should still belong within patent covering scope of the present utility model.
Claims (6)
1. one kind is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, comprise platform body, described platform body inside is provided with some mounting-positioning holes, it is characterized in that: described mounting-positioning holes center line intersects at the center of described platform body, each mounting-positioning holes external process has one group of flexure hinge mechanism being trapped among the inside, described flexure hinge mechanism can produce certain elastic deformation, eliminates platform body in use due to error that load and temperature cause.
2. one according to claim 1 is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, it is characterized in that: described flexure hinge mechanism is at least three.
3. the one according to claims 1 or 2 is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, it is characterized in that: the displacement freedom direction extended line of each flexure hinge mechanism intersects at platform body center.
4. one according to claim 3 is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, it is characterized in that: described flexure hinge mechanism only has one degree of freedom.
5. one according to claim 4 is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, it is characterized in that: described installation fixed hole position is in the center of flexure hinge mechanism.
6. the one according to claim 1 or 5 is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling, it is characterized in that: each flexure hinge mechanism produces independent elastic deformation, the elastic deformation coupling of multiple flexure hinge mechanism is in platform body, when platform body is due to external load and temperature action generation elastic deformation, the coupling absorption between being out of shape by multiple flexure hinge mechanism or the elastic deformation of release platform body self.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420721848.9U CN204315237U (en) | 2014-11-27 | 2014-11-27 | One is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420721848.9U CN204315237U (en) | 2014-11-27 | 2014-11-27 | One is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling |
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| Publication Number | Publication Date |
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| CN204315237U true CN204315237U (en) | 2015-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420721848.9U Expired - Fee Related CN204315237U (en) | 2014-11-27 | 2014-11-27 | One is connected and fixed mechanism based on flexible hinge chain flexibility Dynamic Coupling |
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| Country | Link |
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| CN (1) | CN204315237U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
-
2014
- 2014-11-27 CN CN201420721848.9U patent/CN204315237U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN104599722B (en) * | 2014-11-27 | 2017-12-26 | 须颖 | It is a kind of to be connected mechanism based on flexible hinge chain flexibility Dynamic Coupling |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150506 Termination date: 20181127 |